JP2007144299A - Coating film forming apparatus - Google Patents

Coating film forming apparatus Download PDF

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JP2007144299A
JP2007144299A JP2005341636A JP2005341636A JP2007144299A JP 2007144299 A JP2007144299 A JP 2007144299A JP 2005341636 A JP2005341636 A JP 2005341636A JP 2005341636 A JP2005341636 A JP 2005341636A JP 2007144299 A JP2007144299 A JP 2007144299A
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film thickness
coating
film
support
forming apparatus
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JP4730069B2 (en
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Seiichi Tanahashi
清一 棚橋
Seiichi Tobisawa
飛沢  誠一
洋祐 ▲高▼島
Yosuke Takashima
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Konica Minolta Inc
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Konica Minolta Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating film forming apparatus which is capable of rectifying the density unevenness of application even after starting the printing, of preventing the density unevenness of the applied surface and of providing the uniform film formation on the image formation face and the whole surface of the applied width in forming the coating film on a rectangular supporter that is continuously conveyed by the application system. <P>SOLUTION: The coating forming apparatus detects the distribution of film thickness formed on a supporter to the width direction which is orthogonal to the conveying direction of the supporter, specifies the defective portion of film thickness in the width direction and adjusts the application amount of the coating liquid corresponding to the defective portion of film thickness based on the information of the defective portion of the film thickness so that it becomes the average value of the application amount of the coating liquid of the film thickness portion except the defective portion of the film thickness in the width direction of the supporter. Thus, the uniform film formation may be obtained on the image formation face and the whole face of the applied width. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、長尺状の支持体に塗布方式を用いて塗膜を形成する装置であって、詳しくはインクジェット方式で塗布される塗膜形成装置に関する。   The present invention relates to an apparatus for forming a coating film on a long support using an application method, and more particularly to a coating film forming apparatus applied by an inkjet method.

インクジェット塗布方式を用いて画像形成や、連続膜及びパターニングされた膜を形成する方法が一般的に知られている。   A method of forming an image using an ink jet coating method, and forming a continuous film and a patterned film are generally known.

インクジェット塗布方式に用いられる液滴吐出用ヘッドは複数のインク吐出のノズルを有し、印字(以下、塗布ともいう)データを基に液滴を支持体上に吐出して所望の画像や膜を形成するものである。   A droplet discharge head used in an inkjet coating method has a plurality of ink discharge nozzles, and discharges droplets onto a support based on printing (hereinafter also referred to as coating) data to form a desired image or film. To form.

しかしながら、複数のノズルを有する液滴吐出用ヘッドを均一に製作することは困難である。このため、複数のノズルより吐出される液滴の量がばらついたり吐出方向がばらつく等の不具合が発生し、吐出された液滴が支持体上に塗布された際に不均一な膜厚となり、色ムラが発生したりスジ状の跡になったりすることがある。また、ノズルの目詰まり等による吐出不良が発生し、所望の画像形成や均一な膜形成ができないといった問題があった。   However, it is difficult to uniformly manufacture a droplet discharge head having a plurality of nozzles. For this reason, problems such as variations in the amount of droplets ejected from a plurality of nozzles and variations in the ejection direction occur, resulting in a non-uniform film thickness when the ejected droplets are applied on a support, Color unevenness may occur or stripes may appear. In addition, there is a problem that ejection failure occurs due to nozzle clogging and the like, and desired image formation and uniform film formation cannot be performed.

前記色ムラや吐出不良といった問題に対して、印字前にテストパターンを印字して、濃度ムラの検出を行い、濃度ムラがある場合は補正を行ってから印字をすることが行われている。しかし、前述の方法では、長尺状の支持体に長時間にわたり印字を行う場合、ノズル部の消耗や液滴中に含まれる異物等により吐出量が不安定になり濃度ムラが発生することがあり、印字開始後の塗布の濃度ムラに対応することができなかった。   In order to solve the problems such as color unevenness and ejection failure, a test pattern is printed before printing to detect density unevenness, and when there is density unevenness, printing is performed after correction. However, in the above-described method, when printing is performed on a long support for a long time, the discharge amount becomes unstable and density unevenness may occur due to the exhaustion of the nozzle part or foreign matters contained in the droplets. Yes, it was not possible to cope with the uneven density of the coating after the start of printing.

また、吐出ヘッドを複数用意し、濃度ムラが発生した場合に第1のヘッドより濃度の低いインクを吐出する第2のヘッドにより濃度を補正したり(例えば、特許文献1参照)、ノズル吐出不良部をリペア用のヘッドで補う(例えば、特許文献2参照)等の方法が提案されている。   In addition, when a plurality of ejection heads are prepared and density unevenness occurs, the density is corrected by a second head that ejects ink having a density lower than that of the first head (for example, see Patent Document 1), or nozzle ejection failure A method has been proposed in which a part is supplemented with a repair head (see, for example, Patent Document 2).

しかし、特許文献1及び特許文献2では、部分的な箇所の補正であり、画像形成面や塗布幅全面のバランスを考慮した補正にはなっておらず、所望の画像形成や均一な膜形成ができないという問題があった。
特開2000−85157号公報 特開2005−185978号公報
However, in Patent Document 1 and Patent Document 2, correction of a partial portion is not performed, and correction is not performed in consideration of the balance of the entire image forming surface and coating width, and desired image formation and uniform film formation are performed. There was a problem that I could not.
JP 2000-85157 A JP 2005-185978 A

本発明は、上記状況に鑑みなされたもので、
連続搬送する長尺状の支持体上に塗布方式により塗膜を形成する際に、
印字開始後においても塗布の濃度ムラを補正することができ、塗布面の濃度ムラを防止し、画像形成面及び塗布幅全面に均一な膜形成を可能とする塗膜形成装置を提供することを目的とする。
The present invention has been made in view of the above situation,
When forming a coating film by a coating method on a long support that is continuously conveyed,
To provide a coating film forming apparatus that can correct coating density unevenness even after the start of printing, prevent density unevenness on the coated surface, and form a uniform film over the entire image forming surface and coating width. Objective.

上記目的は、下記の構成により達成される。
1.連続搬送する長尺状の支持体上に塗布により塗膜を形成する塗膜形成装置において、
前記支持体上に形成された塗膜の膜厚分布を、前記支持体の搬送方向と直交する幅方向に検出し、検出データを基に前記幅方向の膜厚不良箇所を特定する膜厚検出手段と、前記膜厚不良箇所の情報を基に膜厚不良箇所に対応する塗布液の塗布量を調整する変調手段とを有し、前記膜厚検出手段により検出した膜厚不良箇所の塗布液の塗布量を前記支持体の幅方向の膜厚の不良箇所を除いた膜厚部分の塗布液の塗布量の平均値になるように変調することを特徴とする塗膜形成装置。
2.前記膜厚検出手段は、光学的方法により前記塗膜の反射率を基に膜厚分布を検出する反射率検出型の膜厚計、または塗膜の濃度を基に膜厚分布を検出する濃度検出型の膜厚計であることを特徴とする1に記載の塗膜形成装置。
3.前記塗布がピエゾ素子方式のインクジェット塗布方式であり、前記変調手段による塗布液の塗布量の調整はピエゾ素子に印加する駆動電圧またはパルス幅を調整して行うことを特徴とする1または2に記載の塗膜形成装置。
The above object is achieved by the following configuration.
1. In a coating film forming apparatus that forms a coating film by coating on a long support that is continuously conveyed,
The film thickness distribution of the coating film formed on the support is detected in the width direction orthogonal to the transport direction of the support, and the film thickness detection that identifies the film thickness defect location in the width direction based on the detection data. Means and a modulation means for adjusting the coating amount of the coating liquid corresponding to the film thickness failure location based on the information on the film thickness failure location, and the coating solution for the film thickness failure location detected by the film thickness detection device The coating film forming apparatus is characterized in that the coating amount is modulated so as to become an average value of the coating amount of the coating liquid in the film thickness portion excluding the defective portion of the film thickness in the width direction of the support.
2. The film thickness detecting means is a reflectance detection type film thickness meter that detects the film thickness distribution based on the reflectance of the coating film by an optical method, or a concentration that detects the film thickness distribution based on the film thickness. 2. The coating film forming apparatus according to 1, which is a detection type film thickness meter.
3. The application is an inkjet application method of a piezo element method, and the adjustment of the application amount of the application liquid by the modulation means is performed by adjusting a driving voltage or a pulse width applied to the piezo element. Coating film forming apparatus.

連続搬送する長尺状の支持体上に塗布方式により塗膜を形成する際に、前記支持体上に形成された塗膜の膜厚分布を、前記支持体の搬送方向と直交する幅方向に検出し、検出データを基に前記幅方向の膜厚不良箇所を特定し、前記膜厚不良箇所の情報を基に膜厚不良箇所に対応する塗布液の塗布量を前記支持体の幅方向の膜厚の不良箇所を除いた膜厚部分の塗布液の塗布量の平均値になるように調整することにより、画像形成面及び塗布幅全面に均一な膜形成を可能とすることができる。   When a coating film is formed on a long support that is continuously conveyed by a coating method, the film thickness distribution of the coating film formed on the support is adjusted in the width direction perpendicular to the conveyance direction of the support. And detecting the film thickness defect location in the width direction based on the detection data, and applying the coating amount of the coating liquid corresponding to the film thickness failure location in the width direction of the support based on the information on the film thickness failure location. By adjusting so as to obtain an average value of the application amount of the coating liquid in the film thickness portion excluding the defective portion of the film thickness, it is possible to form a uniform film over the entire image forming surface and the entire coating width.

以下に図を参照しながら本発明の実施の形態を説明するが、本発明はこれに限定されるものではない。   Embodiments of the present invention will be described below with reference to the drawings, but the present invention is not limited thereto.

図1は、塗膜形成装置1の構成を示す模式図である。ロール状に巻かれた長尺状の支持体10は、図示しない駆動手段により巻き出しロール10Aから矢印X方向に繰り出され搬送される。   FIG. 1 is a schematic diagram showing the configuration of the coating film forming apparatus 1. The long support 10 wound in a roll shape is fed out in the direction of the arrow X from the unwinding roll 10A by a driving means (not shown) and conveyed.

長尺状の支持体10は支持ローラ12に支持されながら搬送され、インクジェットユニット20のインクジェトヘッド21より塗布液のインクが当初設定された所定量吐出され塗布されて所定の厚さの塗膜が形成される。インクジェットヘッド21は一般的に知られているインクジェットヘッドを用いることができる。更に、インクジェットヘッド21はピエゾ素子方式のインクジェットヘッドが、吐出量の変調の容易さから好ましい。インクジェットヘッド21は複数のノズル21Aを有し、ヘッド駆動部22により駆動されインクをノズル21Aより吐出する。また、インクジェットユニットには、インクタンク23より塗布液のインクが供給される。   The long support 10 is conveyed while being supported by the support roller 12, and a predetermined amount of coating liquid ink is ejected and applied from the inkjet head 21 of the inkjet unit 20 to form a coating film having a predetermined thickness. It is formed. As the inkjet head 21, a generally known inkjet head can be used. Further, the ink jet head 21 is preferably a piezo element type ink jet head from the viewpoint of ease of modulation of the discharge amount. The inkjet head 21 has a plurality of nozzles 21 </ b> A and is driven by the head driving unit 22 to eject ink from the nozzles 21 </ b> A. Further, the ink of the coating liquid is supplied from the ink tank 23 to the ink jet unit.

図2は、インクジェットヘッドの配置の概略構成の一例を示す斜視図である。支持体10は支持ローラ12に支持されながら矢印X方向に搬送される。インクジェットヘッド21は所定の長さを有する一体型のヘッドで、支持体10を挟み支持ローラ12に対向する位置に配設される。インクはノズル21Aより吐出され支持体10に塗布される。インクジェットヘッド21の配設位置は図2に示す位置に限定されるものではなく、支持体10を挟み支持ローラ12に対向する位置であればよい。   FIG. 2 is a perspective view illustrating an example of a schematic configuration of the arrangement of the inkjet head. The support 10 is conveyed in the arrow X direction while being supported by the support roller 12. The ink jet head 21 is an integral head having a predetermined length, and is disposed at a position facing the support roller 12 with the support 10 interposed therebetween. Ink is ejected from the nozzle 21 </ b> A and applied to the support 10. The arrangement position of the inkjet head 21 is not limited to the position illustrated in FIG. 2, and may be any position as long as the support 10 is sandwiched and opposed to the support roller 12.

図3は、図2に対し複数のインクジェットヘッドを配設した例である。図3に示す例では、インクジェットヘッドを3個とし、千鳥配置としている。3個のインクジェットヘッド211、212、213、を組み合わせて所定の長さのインクジェットヘッドを構成している。各インクジェットヘッドの塗布の繋ぎ目はノズル211Aと212A、212Aと213Aが重なるように配置される。ノズルが重なった部分は重なった部分のノズルの塗布量を変調することにより所定の膜厚を得る。上記以外は図2に示す例と同様である。   FIG. 3 shows an example in which a plurality of ink jet heads are arranged with respect to FIG. In the example shown in FIG. 3, there are three inkjet heads, which are staggered. The three inkjet heads 211, 212, and 213 are combined to form an inkjet head having a predetermined length. Application joints of the respective ink jet heads are arranged so that the nozzles 211A and 212A and 212A and 213A overlap. A portion where the nozzles overlap is obtained with a predetermined film thickness by modulating the application amount of the nozzle of the overlapping portion. Other than the above, the example is the same as the example shown in FIG.

塗膜が形成された支持体10は乾燥部40で塗膜の乾燥が行われ、支持体10の搬送速度緩衝部であるダンサーローラ部50を経由して膜厚検出手段30に搬送される。   The support 10 on which the coating film has been formed is dried by the drying unit 40 and conveyed to the film thickness detection means 30 via the dancer roller unit 50 that is a conveyance speed buffer unit of the support 10.

膜厚検出手段30は膜厚計31を具備し、支持体10の搬送方向と直交する幅方向に膜厚を検出し膜厚分布を測定する。測定データは変調手段A1に送られる。膜厚計31は、一般的に知られている反射率検出型の膜厚計、または反射濃度検出型あるいは透過濃度検出型の膜厚計を用いることができる。   The film thickness detecting means 30 includes a film thickness meter 31 and detects the film thickness in the width direction orthogonal to the conveying direction of the support 10 to measure the film thickness distribution. The measurement data is sent to the modulation means A1. The film thickness meter 31 may be a generally known reflectance detection type film thickness meter, or a reflection density detection type or transmission density detection type film thickness meter.

図4は、膜厚検出部の概略構成の一例を示す斜視図である。図4では、反射型膜厚計の例を示す。支持体10の搬送方向と直交する幅方向に所定の検出部長さを有する膜厚形31を配設し、膜厚を検出し膜厚分布を測定する。膜厚検出範囲全域の膜厚を精度よく検出するため膜厚計31の検出部を図示しない駆動手段により支持体10の搬送方向と直交する幅方向である矢印Y方向に往復動させ、スキャンしながら膜厚検出することが好ましい。   FIG. 4 is a perspective view illustrating an example of a schematic configuration of the film thickness detection unit. FIG. 4 shows an example of a reflective film thickness meter. A film thickness form 31 having a predetermined detection unit length is disposed in the width direction orthogonal to the conveyance direction of the support 10, the film thickness is detected, and the film thickness distribution is measured. In order to accurately detect the film thickness in the entire film thickness detection range, the detection unit of the film thickness meter 31 is reciprocated in the arrow Y direction, which is the width direction orthogonal to the conveyance direction of the support 10, by a driving means (not shown). However, it is preferable to detect the film thickness.

変調手段A1には、予めテスト塗布により設定された当初のノズルの吐出量とインクジェットヘッド21のピエゾ素子に印加する駆動電圧またはパルス幅及び膜厚の相関データが設定されている。   In the modulation means A1, correlation data between the initial nozzle discharge amount set in advance by test application and the drive voltage or pulse width and film thickness to be applied to the piezo elements of the inkjet head 21 is set.

変調手段A1は膜厚検出手段30の測定データに基づき、膜厚不良箇所の位置を支持体10の幅方向に特定する。また、前記膜厚不良箇所を除いた膜厚部分の塗布液の塗布量の平均値を算出するとともに、前記膜厚不良箇所の塗布液の塗布量と前記平均値の塗布量の差を比較し、前記膜厚不良箇所の塗布量が前記平均値の塗布量と同等になるように、相当するノズルのインク吐出の変調量を算出する。   The modulation unit A1 specifies the position of the defective film thickness in the width direction of the support 10 based on the measurement data of the film thickness detection unit 30. Further, the average value of the coating amount of the coating liquid in the film thickness portion excluding the defective film thickness portion is calculated, and the difference between the coating amount of the coating liquid in the defective film thickness portion and the coating amount of the average value is compared. The modulation amount of the ink ejection of the corresponding nozzle is calculated so that the application amount of the defective film thickness portion is equal to the average application amount.

前記膜厚不良箇所の位置情報及び前記変調量の情報は、インクジェットユニット20のヘッド駆動部22に送られ、ノズル21Aからのインクの吐出量は変調され、これ以降、前記膜厚不良箇所位置に塗布される塗布量は修正される。前記インクの吐出量の変調は、インクジェットヘッド21のピエゾ素子に印加する駆動電圧またはパルス幅を調整することにより行われる。   The positional information on the defective film thickness location and the information on the modulation amount are sent to the head drive unit 22 of the ink jet unit 20, and the ink ejection amount from the nozzle 21A is modulated. The applied amount is corrected. The ink ejection amount is modulated by adjusting the drive voltage or pulse width applied to the piezoelectric element of the inkjet head 21.

膜厚検出手段30を通過した支持体10は、巻き取りロール10Bに巻き散られる。   The support 10 that has passed through the film thickness detection means 30 is wound around the take-up roll 10B.

図5は、本実施の形態における膜厚検出手段と変調手段の関係を示す構成図である。CPU100、膜厚検出手段30、膜厚計31、変調手段A1、ヘッド駆動部22、ヘッド駆動電源25及びインクジェットヘッド21からなる。膜厚検出手段30と変調手段A1はCPU100により制御される。膜厚計31の検出データは膜厚検出手段30に取り込まれ変調手段A1に送られる。ヘッド駆動電源25からヘッド駆動部22に電源が供給され、変調手段A1により変調されインクジェットヘッド21を駆動する。なお、本図では、本実施の形態の説明に不要な関係図の記載を省略している。   FIG. 5 is a configuration diagram showing the relationship between the film thickness detection means and the modulation means in the present embodiment. The CPU 100, the film thickness detection unit 30, the film thickness meter 31, the modulation unit A 1, the head drive unit 22, the head drive power supply 25, and the ink jet head 21. The film thickness detection means 30 and the modulation means A1 are controlled by the CPU 100. The detection data of the film thickness meter 31 is taken into the film thickness detection means 30 and sent to the modulation means A1. Power is supplied from the head drive power supply 25 to the head drive unit 22, and is modulated by the modulation means A1 to drive the inkjet head 21. It should be noted that, in this drawing, the illustration of the relationship diagram that is not necessary for the description of this embodiment is omitted.

上記構成により、連続搬送する長尺状の支持体上に塗布方式により塗膜を形成する際に、前記支持体上に形成された塗膜の膜厚分布を、前記支持体の搬送方向と直交する幅方向に検出し、検出データを基に前記幅方向の膜厚不良箇所を特定し、前記膜厚不良箇所の情報を基に膜厚不良箇所に対応する塗布液の塗布量を前記支持体の幅方向の膜厚の不良箇所を除いた膜厚部分の塗布液の塗布量の平均値になるように調整することにより、塗布開始後に発生した膜厚不良に対しても塗布を停止させずに不良箇所を最小限に留めた修復が可能となり、画像形成面及び塗布幅全面に均一な膜形成を可能とすることができる。   With the above configuration, when a coating film is formed by a coating method on a long support that is continuously transported, the film thickness distribution of the coating film formed on the support is orthogonal to the transport direction of the support. Detecting in the width direction, identifying the defective film thickness portion in the width direction based on the detection data, and determining the coating amount of the coating liquid corresponding to the defective film thickness location based on the information on the defective film thickness portion. By adjusting to the average value of the coating amount of the coating solution in the film thickness part excluding the defective part of the film thickness in the width direction, application is not stopped even for film thickness defects that occur after the start of coating. In addition, it is possible to repair the defective portion to a minimum, and it is possible to form a uniform film on the entire image forming surface and coating width.

上記構成でインクジェットヘッドの配置は図3に示す配置で塗布を行った。
支持体:ポリエチレンテレフタレート、厚さ75μm
搬送速度:2.4m/分
塗布幅:105mm
膜厚:0.1μm±5%、(乾燥前のウェット膜厚4μm)
塗布液:LIOJET SR マゼンタ 001K(コニカミノルタ製)
上記条件で塗布を行った結果、塗布開始後に発生した膜厚不良箇所の修正は、塗布を停止させずに修正することができた。
With the above configuration, the inkjet head was applied in the arrangement shown in FIG.
Support: polyethylene terephthalate, thickness 75μm
Conveyance speed: 2.4 m / min Application width: 105 mm
Film thickness: 0.1 μm ± 5% (wet film thickness before drying 4 μm)
Coating solution: LIOJET SR Magenta 001K (manufactured by Konica Minolta)
As a result of the application under the above conditions, it was possible to correct the defective film thickness portion that occurred after the start of the application without stopping the application.

本発明に係る塗膜形成装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the coating-film formation apparatus which concerns on this invention. インクジェットヘッドの配置の概略構成の一例を示す斜視図である。It is a perspective view which shows an example of schematic structure of arrangement | positioning of an inkjet head. 複数のインクジェットヘッドを配設した一例を示す斜視図である。It is a perspective view which shows an example which has arrange | positioned the some inkjet head. 膜厚検出部の概略構成の一例を示す斜視図である。It is a perspective view which shows an example of schematic structure of a film thickness detection part. 本実施の形態における膜厚検出手段と変調手段の関係を示す構成図である。It is a block diagram which shows the relationship between the film thickness detection means in this Embodiment, and a modulation means.

符号の説明Explanation of symbols

1 塗膜形成装置
10 支持体
10A 巻き出しロール
10B 巻き取りロール
12 支持ローラ
20 インクジェットユニット
21、211、212、213 インクジェットヘッド
21A、211A、212A、213A ノズル
22 ヘッド駆動部
23 インクタンク
25 ヘッド駆動電源
30 膜厚検出手段
31 膜厚計
40 乾燥部
50ダンサーローラー部
100 CPU
A1変調手段
DESCRIPTION OF SYMBOLS 1 Coating film formation apparatus 10 Support body 10A Unwinding roll 10B Take-up roll 12 Support roller 20 Inkjet unit 21, 211, 212, 213 Inkjet head 21A, 211A, 212A, 213A Nozzle 22 Head drive part 23 Ink tank 25 Head drive power supply 30 Film thickness detection means 31 Film thickness meter 40 Drying section 50 Dancer roller section 100 CPU
A1 modulation means

Claims (3)

連続搬送する長尺状の支持体上に塗布により塗膜を形成する塗膜形成装置において、
前記支持体上に形成された塗膜の膜厚分布を、前記支持体の搬送方向と直交する幅方向に検出し、検出データを基に前記幅方向の膜厚不良箇所を特定する膜厚検出手段と、
前記膜厚不良箇所の情報を基に膜厚不良箇所に対応する塗布液の塗布量を調整する変調手段とを有し、
前記膜厚検出手段により検出した膜厚不良箇所の塗布液の塗布量を前記支持体の幅方向の膜厚の不良箇所を除いた膜厚部分の塗布液の塗布量の平均値になるように変調することを特徴とする塗膜形成装置。
In a coating film forming apparatus that forms a coating film by coating on a long support that is continuously conveyed,
The film thickness distribution of the coating film formed on the support is detected in the width direction orthogonal to the transport direction of the support, and the film thickness detection that identifies the film thickness defect location in the width direction based on the detection data. Means,
Modulation means for adjusting the coating amount of the coating liquid corresponding to the film thickness failure location based on the information on the film thickness failure location,
The application amount of the coating liquid at the defective film thickness portion detected by the film thickness detecting means is set to the average value of the coating liquid application amount at the film thickness portion excluding the defective portion of the film thickness in the width direction of the support. A coating film forming apparatus characterized by modulating.
前記膜厚検出手段は、光学的方法により前記塗膜の反射率を基に膜厚分布を検出する反射率検出型の膜厚計、または塗膜の濃度を基に膜厚分布を検出する濃度検出型の膜厚計であることを特徴とする請求項1に記載の塗膜形成装置。 The film thickness detecting means is a reflectance detection type film thickness meter that detects the film thickness distribution based on the reflectance of the coating film by an optical method, or a concentration that detects the film thickness distribution based on the film thickness. The coating film forming apparatus according to claim 1, wherein the coating film forming apparatus is a detection type film thickness meter. 前記塗布がピエゾ素子方式のインクジェット塗布方式であり、前記変調手段による塗布液の塗布量の調整はピエゾ素子に印加する駆動電圧またはパルス幅を調整して行うことを特徴とする請求項1または2に記載の塗膜形成装置。 3. The coating is a piezo element type ink jet coating method, and the adjustment of the coating amount of the coating liquid by the modulating means is performed by adjusting a driving voltage or a pulse width applied to the piezo element. The coating-film formation apparatus as described in any one of.
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