JP2007110822A - Periodic magnetic field generator, manufacturing method therefor, and linear motor using this periodic magnetic field generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a periodic magnetic field generator including a Halbach magnet array that generates a high magnetic field and is high in accuracy and light in weight, a method for easily and inexpensively manufacturing the generator, and a linear motor using the generator. <P>SOLUTION: The periodic magnetic field generator includes a Halbach magnet array having: multiple main pole permanent magnets 1 magnetized in the direction of a generated magnetic field; sub-pole permanent magnets 2 disposed between the main pole permanent magnets; and a back yoke for fixing these permanent magnets. The back yoke has recesses and projections. The main pole permanent magnets are disposed in the recesses 4a, and the sub-pole permanent magnets are disposed on the projections 4b. At least two sub-pole permanent magnets are disposed, and the height of the sub-pole permanent magnet in the direction of magnetic field generation is made lower than the height of the main pole permanent magnet. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a periodic magnetic field generator having a Halbach magnet arrangement, a manufacturing method thereof, and a linear motor using the same.

Conventionally, as a periodic magnetic field generating device having a Halbach magnet arrangement, there has been proposed one in which a magnet is arranged for each magnetic pole so that the magnetization directions of adjacent magnets are different (see, for example, Patent Document 1).
This magnetic field generator has features such as a large generated magnetic field and a sinusoidal distribution of the generated magnetic field compared to a periodic magnetic field generator arranged so that the magnetization directions of the magnets are different by 180 degrees. When applied to, there is an advantage that thrust is improved and thrust ripple is reduced.
FIG. 5 is a schematic diagram showing a conventional Halbach type periodic magnetic field generator. In FIG. 5, 101 is a permanent magnet, 102 is a magnetization direction, 103 is a back yoke, and has a periodic sine wave or a magnetic flux density waveform similar to the sine wave on the surface opposite to the back yoke 103 (upper side in the figure). Generate a magnetic field. The periodic magnetic field generator having this Halbach magnet arrangement can generate a periodic magnetic field that is higher and close to a sine wave as compared with a periodic magnetic field generator composed of only the main magnetic pole.

As another conventional example, there is a periodic magnetic field generator including a Halbach magnet array in which a yoke for fixing a permanent magnet has an uneven portion (for example, Patent Document 2).
FIG. 6 is a schematic diagram showing another conventional example. In FIG. 6, reference numeral 104 denotes a side yoke, and other reference numerals are the same as those of the above-described periodic magnetic field generator. A periodic magnetic field having a sine wave or a magnetic flux density waveform approximated to it is generated on the opposite surface of the back yoke 103 (surface perpendicular to the Y direction in the figure). The uneven portion of the yoke (denoted as a step of the yoke in Patent Document 2) exists in the side yoke 104 and is provided for each thickness of the permanent magnet, and the positioning accuracy of the permanent magnet is high and easy.
Japanese Patent Laying-Open No. 2003-070226 (page 3-4, FIG. 1) Japanese Unexamined Patent Publication No. 09-320800 (page 2-3, FIG. 1)

However, since the conventional periodic magnetic field generator having the Halbach magnet arrangement fixes the permanent magnet to the flat back yoke, the positional accuracy of the magnetic pole of the generated magnetic field depends on the processing accuracy and fixing accuracy of the permanent magnet, It has been extremely difficult to obtain a highly accurate periodic magnetic field generator that can be applied to ultraprecision machines.
In addition, in the conventional periodic magnetic field generator having other Halbach magnet arrangements, in which the yoke is provided with a concavo-convex portion (step), the effect is limited only to the improvement of the positioning accuracy.

  The present invention has been made in view of such problems, and there are two or more sub magnetic pole permanent magnets sandwiched between main magnetic pole permanent magnets, and the height of the magnetic field generation direction of the sub magnetic pole permanent magnet is the main magnetic pole permanent magnet. The position accuracy of the magnetic pole of the generated magnetic field is high by making it lower than the height of the magnet, providing a concave and convex portion on the back yoke, placing the main magnetic pole permanent magnet in the concave portion of the back yoke and the sub magnetic pole permanent magnet in the convex portion, An object of the present invention is to provide a periodic magnetic field generator that has excellent demagnetization resistance of a permanent magnet, has a high generated magnetic field, and can be reduced in weight, and a method that can easily manufacture a highly accurate periodic magnetic field generator.

In order to solve the above problems, the present invention is configured as follows.
The invention according to claim 1 includes a plurality of main magnetic pole permanent magnets magnetized in the direction of the generated magnetic field, a sub magnetic pole permanent magnet disposed between the main magnetic pole permanent magnets, and a back yoke for fixing the permanent magnet. In the periodic magnetic field generator having the Halbach magnet arrangement, the back yoke is provided with a concavo-convex portion, a main magnetic pole permanent magnet is disposed in the concave portion, a sub magnetic pole permanent magnet is disposed in the convex portion, and the sub magnetic pole permanent magnet is disposed at least. Two are arranged, and the height of the auxiliary magnetic pole permanent magnet in the magnetic field generation direction is made lower than the height of the main magnetic pole permanent magnet.
According to a second aspect of the present invention, the back yoke is made of a magnetic material.
According to a third aspect of the present invention, the back yoke is made of a soft magnetic material, and the convex portion is replaced with a non-magnetic material.
According to a fourth aspect of the present invention, the back yoke is made of a nonmagnetic material.
According to a fifth aspect of the present invention, there is provided a yoke forming step of forming a back yoke, a main magnetic pole assembly step of fixing a plurality of main magnetic pole permanent magnets magnetized in the generated magnetic field direction to the back yoke, and the main magnetic pole permanent magnet In the manufacturing method of the periodic magnetic field generating device comprising the sub magnetic pole assembly step of fixing the sub magnetic pole permanent magnet in the direction different from the direction of the generated magnetic field therebetween, the pre-process includes providing an uneven portion on one surface of the back yoke The main magnetic pole assembling step fixes the main magnetic pole permanent magnet to the concave portion of the back yoke, and the auxiliary magnetic pole assembling step includes at least two auxiliary magnetic pole permanent magnets at the convex portion of the back yoke. It is to be fixed.
According to a sixth aspect of the present invention, the permanent magnet is fixed by mechanical and / or chemical means.
A seventh aspect of the invention is a linear motor configured by using the periodic magnetic field generator of any one of the first to fourth aspects.

According to the first aspect of the present invention, the position accuracy of the magnetic pole of the generated magnetic field can be increased, the permanent magnet has excellent demagnetization resistance, the generated magnetic field is high, and the weight can be reduced.
According to the second aspect of the present invention, an inexpensive and easy-to-process material can be selected for the back yoke, and the back yoke can be used as a part of the magnetic path, so that the generated magnetic field can be further increased.
According to the invention of claim 3, the magnetic part of the back yoke can be used as a part of the magnetic path, and the magnetic field generated is increased by eliminating the magnetic flux shortcut by making the convex part nonmagnetic. Can do.
According to the fourth aspect of the present invention, a lightweight material can be selected for the back yoke, and the generated magnetic field per weight can be greatly increased.
According to the fifth and sixth aspects of the invention, since the magnet can be positioned by using the concave and convex portions of the back yoke that can be easily machined and the positional accuracy can be easily increased, a highly accurate periodic magnetic field generator is provided. It can be produced simply and inexpensively.
According to the seventh aspect of the invention, it is possible to obtain a linear motor with high accuracy, high thrust, and low cost.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a cross-sectional view of a periodic magnetic field generator showing Embodiment 1 of the present invention. In the figure, 1 is a main magnetic pole permanent magnet, 2 is a sub magnetic pole permanent magnet, 3 is a magnetization direction, and 4 is a back yoke. The back yoke 4 has a concave portion 4a and a convex portion 4b.

  The difference between the present invention and Patent Document 1 is that the height of the sub-pole permanent magnet is made lower than that of the main pole permanent magnet, the concave portion is provided in the back yoke, and the main pole permanent magnet is disposed in the concave portion of the back yoke. In this case, two or more sub-pole permanent magnets are arranged on the convex portion of the back yoke between the main pole permanent magnets. Further, the present invention is different from Patent Document 2 in that the yoke provided with the uneven portion is not a side yoke (the yoke or the magnet fixing yoke of Patent Document 2) but a back yoke arranged on the opposite side of the magnetic field generating surface. It is a part. That is, as shown in FIG. 1, two main magnetic pole permanent magnets 1 having a high height are arranged in the concave portion of the back yoke 4, and two sub magnetic pole permanent magnets 2 having a low height are arranged in the convex portion between the main magnetic pole permanent magnets. It is a thing.

  The main magnetic pole permanent magnet 1 and the sub magnetic pole permanent magnet 2 are Nd—Fe—B type magnets. The magnetic characteristics are: residual magnetic flux density = 1.20 [T], coercive force = 2,100 [kA / m]. The height of the main magnetic pole permanent magnet 1 was formed higher than the height of the sub magnetic pole permanent magnet 2. The back yoke 4 is made of pure iron, which is a soft magnetic material, and has a concave portion 4a and a convex portion 4b formed by cutting.

Next, a method for manufacturing the periodic magnetic field generator of the present invention will be described with reference to FIG.
(1) First, as shown in FIG. 2A, a back yoke 4 having an uneven portion was prepared.
(2) Subsequently, as shown in FIG. 2B, the magnetized main magnetic pole permanent magnet 1 having a high height is disposed in the recess 4a of the back yoke 4 and fixed using an adhesive. .
(3) Further, as shown in FIG. 2 (c), by placing the sub-magnetic pole permanent magnet 2 having a low height on the convex portion 4b of the back yoke 4 between the main magnetic pole permanent magnets 1 and fixing it, A periodic magnetic field generator was produced. Here, the magnetization directions of the adjacent secondary magnetic pole permanent magnets 2 were made to differ by 60 degrees.
The generated magnetic field of the periodic magnetic field generator thus manufactured was measured. As a result, the generated magnetic field was 0.49 [T] higher than that of the conventional periodic magnetic field generator, and the magnetic pole position accuracy was also higher than that of the conventional one. In the prior art, an assembling jig is required to ensure the positional accuracy of the magnetic pole, but in the present invention, assembling can be performed with high accuracy without the need for an assembling jig.

  This result can be interpreted as follows. That is, by disposing two sub-pole permanent magnets between the main pole permanent magnets, the difference in magnetization direction between adjacent permanent magnets is as small as 60 degrees, and the flow of magnetic flux in the magnetic circuit becomes smooth. The leakage of magnetic flux generated between adjacent permanent magnets was reduced, and the generated magnetic field could be increased. Further, since the leakage of magnetic flux is reduced, the back yoke side opposite to the direction of the magnetic field generated by the sub-pole permanent magnet need not be made of a nonmagnetic material.

In this embodiment, an example in which the number of sub-pole permanent magnets between the main pole permanent magnets is two has been described. However, as the number increases, the flow of magnetic flux in the magnetic circuit becomes smoother. Since it becomes large, it is not limited to two.
Moreover, although the Nd-Fe-B type magnet was used as the permanent magnet, the present invention is not limited to this, and other rare earth magnets, ferrite magnets, cast magnets, bonded magnets, and the like can be used, and the type of permanent magnet is not limited.
In addition, although pure iron was described as an example of the material of the back yoke, since most of the magnetic flux passes through the permanent magnet, the role as the magnetic path of the back yoke is not great, so the required magnetic characteristics do not need to be high, If it is a soft magnetic body, it will not be limited to the kind.

  In the conventional technology, permanent magnets are arranged on the flat back yoke, so that the processing accuracy of the permanent magnets can be increased to ensure the accuracy of the magnetic pole position of the generated magnetic field, and special magnets can be used to place and fix the permanent magnets. And a manufacturing method thereof is complicated and expensive.

In the present embodiment, the example in which the main magnetic pole permanent magnet is first arranged and fixed and then the sub magnetic pole permanent magnet is arranged and fixed, or the sub magnetic pole permanent magnet is arranged and fixed one by one. The present invention is effective regardless of the order in which permanent magnets are arranged and fixed. For example, after two secondary magnetic pole permanent magnets are fixed in advance, they are arranged on the convex portion of the back yoke between the main magnetic pole permanent magnets.・ It may be fixed.
In this embodiment, an adhesive is used as a method for fixing the permanent magnet. However, any means for fixing may be used in the present invention. For example, a mechanical method by screwing may be used.

FIG. 2 is a cross-sectional view of a periodic magnetic field generator showing Embodiment 2 of the present invention. Here, 5 is a nonmagnetic back yoke.
A non-magnetic carbon fiber composite was used for the non-magnetic back yoke 5, and a periodic magnetic field generator having the same configuration as in Example 1 was produced.
The generated magnetic field of the periodic magnetic field generator thus manufactured was measured. As a result, the generated magnetic field was as low as 0.47 [T], but a sufficiently high generated magnetic field was obtained. Moreover, the positional accuracy of the magnetic poles was the same as in Example 1.
As in the first embodiment, the above results show that the number of sub magnetic pole permanent magnets between the main magnetic pole permanent magnets is two or more, thereby reducing the leakage of magnetic flux and serving as a magnetic path for the back yoke. This can be interpreted as being smaller.

  In this embodiment, the carbon fiber composite body is described as an example of the material of the non-magnetic back yoke. However, since no magnetic properties are required, the material can be limited to that material in consideration of its strength and weight. Absent.

FIG. 3 is a cross-sectional view of a periodic magnetic field generator showing Embodiment 3 of the present invention. Here, 6 is a non-magnetic material.
A back yoke 4 made of pure iron and having a nonmagnetic material 6 made of resin on the convex portion was prepared, and a periodic magnetic field generator having the same configuration as in Example 1 was prepared.

The generated magnetic field of the periodic magnetic field generator thus manufactured was measured. As a result, the generated magnetic field was sufficiently high as 0.51 [T], and the magnetic pole position accuracy was obtained.
The above results show that the magnetic flux shortcut due to the magnetic flux leakage between the permanent magnets is suppressed by the non-magnetic material 6, and the back yoke as a magnetic circuit plays the role of the soft magnetic material, thereby obtaining a high generated magnetic field. Can be interpreted.

  In this example, pure iron was used as the material for the back yoke, and resin was used as the non-magnetic material. However, the material is not limited to that material as long as it is a soft magnetic material and a non-magnetic material. Absent.

  The periodic magnetic field generator of the present invention has a high generated magnetic field, is highly accurate, can be lightweight, and can be manufactured easily and inexpensively. Therefore, the periodic magnetic field generator can be applied to devices that require particularly high accuracy, such as a linear motor.

The schematic diagram of the periodic magnetic field generator which shows Example 1 of this invention The figure explaining the manufacturing method of the periodic magnetic field generator of this invention The schematic diagram of the periodic magnetic field generator which shows Example 2 of this invention The schematic diagram of the periodic magnetic field generator which shows Example 3 of this invention Schematic diagram showing a conventional periodic magnetic field generator Schematic diagram of a periodic magnetic field generator showing another conventional example

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main magnetic pole permanent magnet 2 Sub magnetic pole permanent magnet 3 Magnetization direction 4 Back yoke 4a Concave part 4b Convex part 5 Nonmagnetic back yoke 6 Nonmagnetic body 101 Permanent magnet 102 Magnetization direction 103 Back yoke 104 Side yoke

Claims (7)

Period provided with a Halbach magnet array having a plurality of main magnetic pole permanent magnets magnetized in the direction of the generated magnetic field, a sub magnetic pole permanent magnet disposed between the main magnetic pole permanent magnets, and a back yoke for fixing the permanent magnet In the magnetic field generator,
An uneven portion is provided in the back yoke, a main magnetic pole permanent magnet is disposed in the concave portion, and a sub magnetic pole permanent magnet is disposed in the convex portion, respectively.
A periodic magnetic field generator comprising: at least two sub magnetic pole permanent magnets, wherein a height of the sub magnetic pole permanent magnet in a magnetic field generating direction is lower than a height of the main magnetic pole permanent magnet.   The periodic magnetic field generator according to claim 1, wherein a material of the back yoke is a soft magnetic material.   The periodic magnetic field generator according to claim 2, wherein the convex portion of the back yoke is replaced with a nonmagnetic material.   The periodic magnetic field generator according to claim 1, wherein the back yoke is made of a non-magnetic material. A yoke forming step for forming a back yoke, a main magnetic pole assembly step for fixing a plurality of main magnetic pole permanent magnets magnetized in the generated magnetic field direction to the back yoke, and the generated magnetic field direction between the main magnetic pole permanent magnets In the manufacturing method of the periodic magnetic field generator comprising the sub magnetic pole assembly process for fixing the sub magnetic pole permanent magnets in different directions,
The yoke forming step includes a step of providing an uneven portion on one surface of the back yoke,
The main magnetic pole assembly step is to fix the main magnetic pole permanent magnet to the concave portion of the back yoke,
The method of manufacturing a periodic magnetic field generator, wherein the sub magnetic pole assembly step includes fixing at least two of the sub magnetic pole permanent magnets to the convex portion of the back yoke.   6. The method of manufacturing a periodic magnetic field generator according to claim 5, wherein the permanent magnet is fixed by mechanical and / or chemical means.   A linear motor comprising the periodic magnetic field generator according to any one of claims 1 to 4.

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