JP2006526560A - 光学的な構成部分を製造するための石英ガラス円筒体ならびにその製造方法 - Google Patents
光学的な構成部分を製造するための石英ガラス円筒体ならびにその製造方法 Download PDFInfo
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- JP2006526560A JP2006526560A JP2006508251A JP2006508251A JP2006526560A JP 2006526560 A JP2006526560 A JP 2006526560A JP 2006508251 A JP2006508251 A JP 2006508251A JP 2006508251 A JP2006508251 A JP 2006508251A JP 2006526560 A JP2006526560 A JP 2006526560A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 86
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 title claims abstract description 6
- 238000005530 etching Methods 0.000 claims abstract description 109
- 238000000034 method Methods 0.000 claims abstract description 91
- 230000008569 process Effects 0.000 claims abstract description 49
- 239000013307 optical fiber Substances 0.000 claims abstract description 12
- 238000003754 machining Methods 0.000 claims abstract description 6
- 238000007920 subcutaneous administration Methods 0.000 claims abstract description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 12
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 13
- 230000003746 surface roughness Effects 0.000 description 13
- 238000000227 grinding Methods 0.000 description 11
- 239000004071 soot Substances 0.000 description 7
- 229910052681 coesite Inorganic materials 0.000 description 5
- 229910052906 cristobalite Inorganic materials 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 229910052682 stishovite Inorganic materials 0.000 description 5
- 229910052905 tridymite Inorganic materials 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012681 fiber drawing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
- C03B37/02754—Solid fibres drawn from hollow preforms
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1469—Means for changing or stabilising the shape or form of the shaped article or deposit
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01211—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments by inserting one or more rods or tubes into a tube
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01225—Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing
- C03B37/01228—Removal of preform material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2205/00—Fibre drawing or extruding details
- C03B2205/08—Sub-atmospheric pressure applied, e.g. vacuum
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2205/00—Fibre drawing or extruding details
- C03B2205/12—Drawing solid optical fibre directly from a hollow preform
- C03B2205/14—Drawing solid optical fibre directly from a hollow preform comprising collapse of an outer tube onto an inner central solid preform rod
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2205/00—Fibre drawing or extruding details
- C03B2205/12—Drawing solid optical fibre directly from a hollow preform
- C03B2205/16—Drawing solid optical fibre directly from a hollow preform the drawn fibre consisting of circularly symmetric core and clad
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
- Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
図2は、機械的加工後の本発明による石英ガラス円筒体の表面を撮影した図であって、
図3は、HF含有のエッチング溶液における1分間のエッチング過程後に、図2の石英ガラス円筒体の表面を撮影した図であって、
図4は、HF含有のエッチング溶液における50分間のエッチング過程後に、図3と同じ表面を撮影した図である。
Claims (15)
- 光学的な構成部分を製造するための石英ガラス円筒体であって、内孔を有しており、該内孔が最終寸法になるように機械的に加工されていて、この機械的加工に続くエッチング処理によりエッチング構造が設けられている形式のものにおいて、
エッチング構造が、最大深さ2.0mm、最大幅100μmのクラックを有していることを特徴とする、光学的な構成部分を製造するための石英ガラス円筒体。 - エッチング構造が、最大深さ1.0mm、最大幅50μmのクラックを有している、請求項1記載の石英ガラス円筒体。
- エッチング構造が、最大深さ0.5mm、最大幅20μmのクラックを有している、請求項1記載の石英ガラス円筒体。
- エッチング構造が、少なくとも30μmの深さおよび少なくとも5μmの幅を有するクラックを有している、請求項1から3までのいずれか1項記載の石英ガラス円筒体。
- 少なくとも150mmの外径を有している、請求項1から4までのいずれか1項記載の石英ガラス円筒体。
- 請求項1から5までのいずれか1項記載の、内孔を備えた石英ガラス円筒体を製造するための方法であって、前記石英ガラス円筒体の内孔を機械的に最終寸法に加工し、次いでエッチング処理を施す方法において、
機械的加工が、徐々に小さくなる除去深さを有する相次いで行われる複数の除去過程を有しており、最後の除去過程後に内孔が最大2mmの深さを有する皮下クラックを有しており、次いで内孔に、最大50μmの深さのエッチング除去を行うようにエッチング処理を施すことを特徴とする、請求項1から5までのいずれか1項記載の、内孔を備えた石英ガラス円筒体を製造するための方法。 - 最大25μmの深さのエッチング除去を行うエッチング処理を施す、請求項6記載の方法。
- 最大10μmの深さのエッチング除去を行うエッチング処理を施す、請求項6記載の方法。
- 少なくとも2.5μmの深さのエッチング除去を行うエッチング処理を施す、請求項6から8までのいずれか1項記載の方法。
- フッ酸を含有するエッチング溶液における第1のエッチングステップと、硝酸を含有するエッチング溶液におけるにおける第2のエッチングステップとを有するエッチング処理を施す、請求項6から9までのいずれか1項記載の方法。
- 最大3μm/分の平均エッチング速度でエッチング処理を行う、請求項6から10までのいずれか1項記載の方法。
- 平均エッチング速度が最大1μm/分である、請求項11記載の方法。
- 平均エッチング速度が最大0.1μm/分である、請求項11記載の方法。
- RIC法で光学的なファイバのためのプリフォームを製造するために、請求項1から5までのいずれか1項記載の石英ガラス円筒体を使用する方法であって、円筒体をコアロッド上に圧潰しながら被せ嵌め、同時にプリフォームを形成しながら引き延ばす、請求項1から5までのいずれか1項記載の石英ガラス円筒体を使用する方法。
- RIC−ODD法で光学的なファイバを製造するために、請求項1から5までのいずれか1項記載の石英ガラス円筒体を使用する方法であって、円筒体をコアロッド上に圧潰しながら被せ嵌め、同時にファイバを形成しながら引き延ばす、請求項1から5までのいずれか1項記載の石英ガラス円筒体を使用する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10325539.7 | 2003-06-04 | ||
DE10325539A DE10325539A1 (de) | 2003-06-04 | 2003-06-04 | Quarzglas-Zylinder für die Herstellung eines optischen Bauteils sowie Verfahren für seine Herstellung |
PCT/EP2004/005950 WO2004108615A1 (de) | 2003-06-04 | 2004-06-02 | Quarzglas-zylinder für die herstellung eines optischen bauteils sowie verfahren für seine herstellung |
Publications (2)
Publication Number | Publication Date |
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JP2006526560A true JP2006526560A (ja) | 2006-11-24 |
JP5382283B2 JP5382283B2 (ja) | 2014-01-08 |
Family
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Family Applications (1)
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JP2006508251A Expired - Fee Related JP5382283B2 (ja) | 2003-06-04 | 2004-06-02 | 光学的な構成部分を製造するための石英ガラス円筒体ならびにその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7712335B2 (ja) |
JP (1) | JP5382283B2 (ja) |
CN (1) | CN100528780C (ja) |
DE (2) | DE10325539A1 (ja) |
WO (1) | WO2004108615A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012153562A (ja) * | 2011-01-26 | 2012-08-16 | Shin-Etsu Chemical Co Ltd | 光ファイバ及び光ファイバ用プリフォームの製造方法 |
RU2479495C1 (ru) * | 2011-09-01 | 2013-04-20 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Способ изготовления труб из кварцевого стекла |
RU2477713C1 (ru) * | 2011-09-02 | 2013-03-20 | Открытое акционерное общество "Научно-исследовательский и технологический институт оптического материаловедения Всероссийского научного центра "Государственный оптический институт им. С.И. Вавилова" (ОАО "НИТИОМ ВНЦ "ГОИ им. С.И. Вавилова") | Способ химического травления труб из кварцевого стекла |
WO2017103166A2 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Herstellung eines quarzglaskörpers in einem mehrkammerofen |
CN109153593A (zh) | 2015-12-18 | 2019-01-04 | 贺利氏石英玻璃有限两合公司 | 合成石英玻璃粉粒的制备 |
JP6984897B2 (ja) | 2015-12-18 | 2021-12-22 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 石英ガラス調製時のケイ素含有量の増大 |
KR20180095624A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 | 불투명 실리카 유리 제품의 제조 |
JP7044454B2 (ja) | 2015-12-18 | 2022-03-30 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製 |
TWI812586B (zh) | 2015-12-18 | 2023-08-21 | 德商何瑞斯廓格拉斯公司 | 石英玻璃體、其製備方法與應用、及用於控制烘箱出口處之露點 |
US11053152B2 (en) * | 2015-12-18 | 2021-07-06 | Heraeus Quarzglas Gmbh & Co. Kg | Spray granulation of silicon dioxide in the preparation of quartz glass |
US10676388B2 (en) | 2015-12-18 | 2020-06-09 | Heraeus Quarzglas Gmbh & Co. Kg | Glass fibers and pre-forms made of homogeneous quartz glass |
JP6981710B2 (ja) | 2015-12-18 | 2021-12-17 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 二酸化ケイ素造粒体からの石英ガラス体の調製 |
TWI813534B (zh) | 2015-12-18 | 2023-09-01 | 德商何瑞斯廓格拉斯公司 | 利用露點監測在熔融烘箱中製備石英玻璃體 |
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-
2003
- 2003-06-04 DE DE10325539A patent/DE10325539A1/de not_active Withdrawn
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2004
- 2004-06-02 WO PCT/EP2004/005950 patent/WO2004108615A1/de active Application Filing
- 2004-06-02 JP JP2006508251A patent/JP5382283B2/ja not_active Expired - Fee Related
- 2004-06-02 CN CNB2004800156796A patent/CN100528780C/zh not_active Expired - Lifetime
- 2004-06-02 DE DE112004000617T patent/DE112004000617B4/de not_active Expired - Fee Related
- 2004-06-02 US US10/559,736 patent/US7712335B2/en active Active
Patent Citations (7)
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JPH07109141A (ja) * | 1992-11-19 | 1995-04-25 | Shinetsu Quartz Prod Co Ltd | 大型石英ガラス管、光ファイバプリフォ−ムおよびそれらの製造方法 |
JPH0859275A (ja) * | 1994-08-24 | 1996-03-05 | Nippon Telegr & Teleph Corp <Ntt> | フッ化物光ファイバ母材の表面処理法 |
JPH10203841A (ja) * | 1997-01-22 | 1998-08-04 | Hoya Corp | ガラスプリフォーム及びガラスファイバの製造方法 |
JPH11314924A (ja) * | 1998-03-02 | 1999-11-16 | Hoya Corp | カルコゲナイドガラスからなる光学部材及びガラスファイバの製造方法、光学部材、ファイバ並びに光増幅器 |
JP2000119034A (ja) * | 1998-10-08 | 2000-04-25 | Shinetsu Quartz Prod Co Ltd | 光ファイバ用石英ガラス母材の製造方法 |
JP2001247338A (ja) * | 2000-03-02 | 2001-09-11 | Sumitomo Electric Ind Ltd | クラッドパイプの製造方法 |
JP2003081656A (ja) * | 2001-09-10 | 2003-03-19 | Mitsubishi Cable Ind Ltd | フォトニッククリスタルファイバの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE10325539A1 (de) | 2004-01-08 |
CN100528780C (zh) | 2009-08-19 |
JP5382283B2 (ja) | 2014-01-08 |
DE112004000617B4 (de) | 2009-03-26 |
US7712335B2 (en) | 2010-05-11 |
DE112004000617D2 (de) | 2006-04-06 |
WO2004108615A1 (de) | 2004-12-16 |
US20060137401A1 (en) | 2006-06-29 |
CN1802324A (zh) | 2006-07-12 |
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