JP2006308074A5 - - Google Patents

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Publication number
JP2006308074A5
JP2006308074A5 JP2005282573A JP2005282573A JP2006308074A5 JP 2006308074 A5 JP2006308074 A5 JP 2006308074A5 JP 2005282573 A JP2005282573 A JP 2005282573A JP 2005282573 A JP2005282573 A JP 2005282573A JP 2006308074 A5 JP2006308074 A5 JP 2006308074A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005282573A
Other languages
Japanese (ja)
Other versions
JP2006308074A (ja
JP4466526B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005282573A priority Critical patent/JP4466526B2/ja
Priority claimed from JP2005282573A external-priority patent/JP4466526B2/ja
Publication of JP2006308074A publication Critical patent/JP2006308074A/ja
Priority to US11/936,514 priority patent/US7679248B2/en
Publication of JP2006308074A5 publication Critical patent/JP2006308074A5/ja
Application granted granted Critical
Publication of JP4466526B2 publication Critical patent/JP4466526B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005282573A 2005-04-01 2005-09-28 磁気軸受装置 Expired - Lifetime JP4466526B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005282573A JP4466526B2 (ja) 2005-04-01 2005-09-28 磁気軸受装置
US11/936,514 US7679248B2 (en) 2005-09-28 2007-11-07 Magnetic bearing system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005106026 2005-04-01
JP2005282573A JP4466526B2 (ja) 2005-04-01 2005-09-28 磁気軸受装置

Publications (3)

Publication Number Publication Date
JP2006308074A JP2006308074A (ja) 2006-11-09
JP2006308074A5 true JP2006308074A5 (enrdf_load_html_response) 2008-01-31
JP4466526B2 JP4466526B2 (ja) 2010-05-26

Family

ID=37475182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005282573A Expired - Lifetime JP4466526B2 (ja) 2005-04-01 2005-09-28 磁気軸受装置

Country Status (1)

Country Link
JP (1) JP4466526B2 (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5045894B2 (ja) 2006-05-09 2012-10-10 株式会社島津製作所 磁気軸受装置
JP6131602B2 (ja) * 2013-01-17 2017-05-24 株式会社島津製作所 磁気軸受装置および真空ポンプ
JP6171375B2 (ja) 2013-02-06 2017-08-02 株式会社島津製作所 磁気軸受装置および真空ポンプ
JP6244734B2 (ja) * 2013-08-14 2017-12-13 株式会社島津製作所 磁気軸受装置および真空ポンプ
JP6269080B2 (ja) * 2014-01-14 2018-01-31 株式会社島津製作所 磁気軸受装置および真空ポンプ
DE102015102913B4 (de) * 2015-03-02 2024-03-14 Pfeiffer Vacuum Gmbh Magnetlager und Verfahren zum kontaktlosen Halten eines Körpers

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