JP2006301067A - Fiber lighting type microscope - Google Patents

Fiber lighting type microscope Download PDF

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Publication number
JP2006301067A
JP2006301067A JP2005119527A JP2005119527A JP2006301067A JP 2006301067 A JP2006301067 A JP 2006301067A JP 2005119527 A JP2005119527 A JP 2005119527A JP 2005119527 A JP2005119527 A JP 2005119527A JP 2006301067 A JP2006301067 A JP 2006301067A
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fiber
light
core
light source
objective lens
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JP2005119527A
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Japanese (ja)
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Naoko Hisada
菜穂子 久田
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Olympus Corp
オリンパス株式会社
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a fiber lighting type microscope that is capable of bright uniform lighting and of ensuring high resolution observation. <P>SOLUTION: Light from a light source section 1 is introduced in a primary microscope body 3 through a single-fiber unit 2 having a single fiber and an image at an exit end of the fiber unit 2 is projected on the pupil of an objective 33 through a projection lens 31 in the primary microscope body 3. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a fiber illumination microscope that introduces light from a light source unit using a fiber.

  Recently, optical microscopes have been widely used in the industrial market as represented by defect inspection of semiconductor wafers and the like, and in particular, with high integration and miniaturization of the semiconductor pattern of the specimen, The demand for high-resolution microscopes is increasing.

  In response to such a demand, in addition to an optical microscope that uses light having a wavelength in the visible region as illumination light, an ultraviolet microscope that realizes high resolution by using light having a wavelength in the ultraviolet region has been developed. However, ultraviolet light used in an ultraviolet microscope has a light source with less power than visible light, and further has low transmittance in each optical element constituting the illumination optical system, resulting in a dark observation image.

  On the other hand, conventional optical microscopes including such an ultraviolet microscope generally use an illumination optical system to introduce light from a light source unit into the microscope main body and illuminate an observation sample through an objective lens. However, recently, the light source unit, which is a heat source, has been separated from the microscope body for reasons such as keeping the light source unit away from the microscope body and ensuring the freedom of arrangement of the light source unit. A fiber illuminating type optical microscope optically coupled using a laser has been put into practical use.

  FIG. 8 shows an example of a conventional fiber illumination optical microscope. In this case, the light emitted from the lamp 101 of the light source unit 100 is collected by the action of the light source unit lens 102 and enters the incident end 201 of the fiber 200 through the filter 103. The microscope main body 300 is connected to the emission end 202 of the fiber 200, and light emitted from the emission end 202 is transmitted through the projection lens 301, reflected by the half mirror 302, and incident on the objective lens 303. In this case, an image of the output end 202 of the fiber 200 is formed at a rear focal position fb (hereinafter referred to as a pupil) of the objective lens 303 with a size corresponding to the projection magnification B of the projection lens 301. The light transmitted through the objective lens 303 is irradiated onto the sample 304, and the reflected light from the sample 304 passes through the objective lens 303 again and further passes through the half mirror 302 and enters the imaging lens 305. Then, an image is formed on the imaging surface of the CCD 306 by the imaging lens 305.

  Note that a plurality of objective lenses 303 having different magnifications are mounted on the rotating revolver 307, and the objective lens 303 having a desired magnification is switched and used as necessary.

  By the way, in such a fiber illumination optical microscope, a bundle fiber is used as the fiber 200. Here, as shown in FIG. 9, the bundle fiber is formed by bundling a large number of fiber core wires 200a and covering with a secondary coating 200b, and these many fiber core wires 200a are randomly wired in the secondary coating 200b. Therefore, uniform light distribution is possible. Here, the fiber core wire is a core having a core as a center, a clad having a different refractive index around the core, and the periphery thereof covered with a primary coating, and light travels while totally reflecting inside the core.

  Further, in such an optical microscope, as described above, the image of the emission end 202 of the fiber 200, that is, the image of the light source is projected onto the pupil of the objective lens 303. It is desirable that the light from the end 202 be uniformly irradiated on the entire pupil of the objective lens 303.

  However, if the pupil diameter of the objective lens 303 is D, the numerical aperture is NAc, and the focal length is f, the relationship is D = 2 × NAc × f, and the focal length f is the magnification of the objective lens 303. In contrast, NAc takes a number close to 1 when the magnification is high, and no difference occurs. For this reason, the pupil diameter D of the objective lens 303 is smaller as the magnification is higher, and the pupil diameter D is larger as the magnification is low.

  Therefore, in the conventional fiber illumination microscope, assuming that the objective lens 303 has all magnifications and the magnification of the projection lens 301 is B, “the bundle diameter Wd of the fiber is the pupil diameter D / projection lens of the low magnification objective. A bundle fiber that satisfies the condition “approximately equal to the magnification B” is selected and used.

  By the way, when a bundle fiber is used for the fiber 200 as described above, the illumination light on the pupil plane of the objective lens 303 is as shown in FIG. 10A, and an exit end face image of the bundle fiber is formed by the projection lens 301. The In this case, the portion corresponding to the core of the fiber core wire 200a described in FIG. 9 is bright (white portion shown in the figure), and the other clad and clothing portions are dark (black portion shown).

  As a result, the light emitted from the core portion of the bundle fiber can be used as illumination light, but the other portions cannot be used as illumination light, resulting in a large light loss. As a specific example, for example, in the case of a bundle fiber having a bundle diameter of 0.63 mm obtained by bundling 19 fibers having a core diameter of 115 μm and a cladding diameter of 125 μm with respect to the fiber core wire 200a described in FIG. Only about 63%.

  Thus, it is conceivable to minimize the gap between the fiber core wires by compressing the exit end of the bundle fiber. However, even in this case, the light amount loss in the clad portion is inevitable. Further, as described above, when the objective lens 303 is enlarged and the pupil diameter is reduced, only a part of the illumination light projected on the pupil plane is used, and thus the light amount loss is further increased. Further, as another problem when a bundle fiber is used as the fiber 200, the fact that only the core part is bright as described above is uneven in brightness on the pupil plane of the objective lens 303 and is not uniform. In addition, when the pupil diameter is reduced with a high magnification objective and the number of effective Fiha cores decreases, the illumination state on the pupil plane at this time becomes as shown in FIG. Is emphasized, and the brightness is not uniform and uneven. This is not a problem as long as the observation surface of the sample 304 is flat, but if there is unevenness and a defocused state occurs depending on the location, the bright and dark pattern becomes uneven and shadows on the image, which has an adverse effect. There is a fear.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a fiber illumination microscope capable of obtaining bright and uniform illumination and enabling high-resolution observation.

  According to the first aspect of the present invention, a microscope body having a light source unit, an objective lens, a fiber having a single core for transmitting light from the light source unit, and an image of an exit end of the fiber are obtained from the objective lens. And a light projecting means for projecting onto the pupil.

  According to a second aspect of the present invention, in the first aspect of the present invention, the fiber has a plurality of fiber core wires arranged around the single core.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the light projecting means is detachably provided to the microscope body.

  According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the light source unit generates light having a wavelength in a visible region or an ultraviolet region.

  According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, the fiber has a core diameter of the single-core core Wc, a pupil diameter of the objective lens D, and the projection lens. When the projection magnification is B, Wc is set substantially equal to D / B.

  According to a sixth aspect of the present invention, in the fourth aspect of the present invention, the light source unit that generates light having a wavelength in the ultraviolet region has a large number of openings and shielding portions, and the ratio of these openings to the shielding portions can be changed. It is characterized by having the light control means.

  According to the present invention, it is possible to provide a fiber illumination microscope capable of obtaining bright and uniform illumination and enabling high-resolution observation.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 shows a schematic configuration of a fiber illumination type optical microscope according to a first embodiment of the present invention.

  In FIG. 1, reference numeral 1 denotes a light source unit. The light source unit 1 includes a lamp 11, a light source unit lens 12, and a filter 13. The lamp 11 generates light having a wavelength in the visible range. The light source unit lens 12 condenses the light emitted from the lamp 11. The filter 13 is appropriately selected and used according to the observation purpose, such as an ND filter or a color filter.

  An incident end 21 of a single-core fiber 2 is connected to the light source unit 1 as a fiber. In this case, unlike the above-described bundle fiber, the single-core fiber 2 has a single-core core 2a as shown in FIG. 2, and a clad 2b having a different refractive index is provided around the core 2a. Further, the periphery of the clad 2b is covered twice with the primary coating 2c and the secondary coating 2d.

  The light condensed by the light source unit lens 12 is incident on the incident end 21 of the single core fiber 2. The microscope main body 3 is connected to the emission end 22 of the single-core fiber 2.

  In the microscope main body 3, a projection lens 31 and a half mirror 32 that constitute a light projecting unit 30 as light projecting means are disposed on the optical path of light emitted from the output end 22 of the single-core fiber 2. The projection lens 31 has a size corresponding to the projection magnification B, and forms an image of the emission end 22 of the single-core fiber 2 on a pupil (back focal position fb) of an objective lens 33 described later. The half mirror 32 reflects light from the emission end 22 of the single-core fiber 2 and transmits reflected light from the sample 4 described later.

  The objective lens 33 and the sample 4 are arranged on the optical path of the light reflected by the half mirror 32. The light reflected by the half mirror 32 passes through the objective lens 33 and is irradiated on the sample 4 as illumination light. In this case, a plurality of objective lenses 33 having different magnifications are mounted on the rotating revolver 35, and the objective lens 33 having a predetermined magnification is switched on the optical path as necessary. In the optical path of the light passing through the half mirror 32, an imaging lens 36 and a CCD 37 as an imaging means are arranged. The imaging lens 36 images the reflected light from the sample 4 on the imaging surface of the CCD 37. The CCD 37 captures a sample image from the light imaged on the imaging surface.

  Next, the operation of the embodiment configured as described above will be described.

  Now, when light having a wavelength in the visible range is generated from the lamp 11 of the light source unit 1, the light is condensed by the action of the light source unit lens 12 and enters the incident end 21 of the single-core fiber 2 through the filter 13.

  The light emitted from the emission end 22 through the single-core fiber 2 passes through the projection lens 31, is reflected by the half mirror 32, and enters the objective lens 33. In this case, an image of the exit end 22 of the single-core fiber 2 is formed on the pupil of the objective lens 33 with a size corresponding to the double projection rate B by the projection lens 31.

  The light transmitted through the objective lens 33 is irradiated onto the sample 4, and the reflected light from the sample 4 passes through the objective lens 33 again, further passes through the half mirror 32, and enters the imaging lens 36. Then, an image is formed on the imaging surface of the CCD 37 by the imaging lens 36, and a sample image is taken.

  In this case, a single-core fiber 2 is used as a fiber that transmits light from the light source unit 1 to the projection lens 31 of the microscope body 3 instead of the conventional bundle fiber. As shown in FIG. 2, the single-core fiber 2 is provided with a clad 2b having a refractive index around the single-core core 2a, and a primary coat 2c and a secondary coat 2d around the clad 5b. Overlapping is provided. Thereby, the image of the exit end 22 of the single-core fiber 2 imaged on the pupil of the objective lens 33 by the projection lens 31, that is, the illumination light at the pupil of the objective lens 33, as shown in FIG. The portion corresponding to the core 2a has a uniform brightness (white portion shown in the figure) without unevenness, and the bright and dark pattern as seen in FIG.

  As a result, since the pupil plane of the objective lens 33 has a uniform brightness and is bright and good illumination can be obtained, high-resolution sample observation can be realized by using such illumination. In addition, even when the observation surface of the sample 4 is uneven, it is possible to reduce the influence on image unevenness during defocusing. Further, since the single core 2a is used, light can be efficiently incident on the entire core, so that the loss of light amount when the illumination light is transmitted through the fiber is reduced, and the image can be brightened. This is particularly effective for microscopes that are intended only for high-magnification observations, and for low-magnification microscopes that are used only for sample positioning, and for actual observations that are performed at high magnifications. The single-core fiber 2 may be selected by optimizing the core diameter Wc of the core 2a for high-magnification objectives. Specifically, when the core diameter of the single-core fiber 2 is Wc, the pupil diameter of the high-magnification objective lens 33 is D, and the projection magnification of the projection lens 31 is B, “the core diameter Wc is substantially equal to D / B” It is sufficient to satisfy the above condition. Incidentally, assuming that the pupil diameter D of the high-magnification objective lens is about 3 to 7 mm and the magnification of the projection lens 31 is about 5 to 10 times, the core diameter Wc of the single-core fiber 2 is about 0.3 to 1.4 mm. It becomes.

  In the first embodiment, the lamp 11 of the light source unit 1 that generates light having a wavelength in the visible region is used. However, if a lamp that generates light having a wavelength in the ultraviolet region is used, an ultraviolet microscope can be configured. can do. In this case, each optical element used is applicable to ultraviolet light. Further, the light projecting means composed of the projection lens 31 and the half mirror 32 may be detachably provided to the microscope main body 1 as a unit separated from the microscope main body 1.

(Modification of the first embodiment)
Next, a modification of the first embodiment will be described.

  In order to use a single-core fiber for low-magnification observation, it is necessary to use a single-core fiber having a large core diameter corresponding to the pupil diameter of the low-magnification objective lens. Furthermore, in such a case, it is necessary to keep the bending radius small and to ensure the degree of freedom of light source arrangement, which is one of the merits of using fibers.

  Therefore, in this case, a fiber 5 as shown in FIG. 4 is used in place of the single-core fiber 2 described above. This fiber 5 has a single core 5a having a core diameter corresponding to the pupil diameter of the high-magnification objective lens, and a clad 5b having a different refractive index is provided around the core 5a. A number of fiber core wires 5c are arranged around the periphery, and the periphery of these fiber core wires 5c is covered with a coating 5d.

  According to such a fiber 5, a single core 5a that is optimum for the pupil diameter of the high-magnification objective lens is provided. Since the fiber core wire 5c is provided, the bending radius can be kept small as compared with a configuration in which all of the high to low magnification is covered only by the single core fiber. Further, in the illumination state on the pupil plane of the objective lens 33 when such a fiber 5 is used, the portion corresponding to the single core 5a is bright as shown in FIG. Around the core 5a, the portion corresponding to the core of the fiber core wire 5c is bright (white portion shown in the figure), and the other clad and clothing portions are dark (black portion shown). As a result, uniform brightness can be obtained in the central portion used for high-magnification observation, and constant brightness can be obtained for the whole used for low-magnification observation, thereby ensuring a predetermined resolution. it can.

(Second embodiment)
Next, a second embodiment of the present invention will be described.

  FIG. 6 shows a schematic configuration of a fiber illumination type optical microscope according to the second embodiment of the present invention, and the same parts as those in FIG.

  In this case, a dichroic mirror 6 is disposed in place of the half mirror 32. The dichroic mirror 6 has such characteristics that it reflects light in the visible wavelength range passing through the single-core fiber 2, transmits reflected light from the sample 4, and transmits light in the ultraviolet wavelength range described later. Yes.

  In the optical path between the dichroic mirror 6 and the imaging lens 36, an ultraviolet light projecting tube 9 is detachably provided. The ultraviolet light source section 7 is connected to the ultraviolet light projecting tube 9 through a single-core fiber 8. The ultraviolet light source unit 7 includes a lamp 71, a first light source unit lens 72, a wavelength selection filter 73, a second light source unit lens 74, and a filter 75. The lamp 71 generates light having a wavelength from visible to ultraviolet. The wavelength selection filter 73 extracts only light having a wavelength in the ultraviolet region from the light generated from the lamp 71. The second light source unit lens 74 condenses the light selected by the wavelength selection filter 73. The filter 75 adjusts the amount of light emitted to the single-core fiber 8, and an ND filter or the like is used.

  The single-core fiber 8 has the same configuration as described with reference to FIG. 2, and the light condensed by the second light source unit lens 74 is incident on the incident end 81. The output end 82 of the single-core fiber 8 is connected to the ultraviolet light projecting tube 9.

  The ultraviolet light projection tube 9 includes a projection lens 91, a half mirror 92, and a dichroic mirror 93. The projection lens 91 has a size corresponding to the magnification B1 and forms an image of the emission end 82 of the single-core fiber 8 on the pupil of the objective lens 33. The half mirror 92 has such characteristics that it transmits light having an ultraviolet wavelength from the ultraviolet light source unit 7 and reflects light having an ultraviolet wavelength reflected by the sample 4. The dichroic mirror 93 is disposed in the optical path between the dichroic mirror 6 and the imaging lens 36, and has a characteristic of reflecting light having a wavelength in the ultraviolet region and transmitting light having a wavelength in the visible region. is doing.

  In the reflected light path of the half mirror 92, an imaging lens 94 and a CCD 95 as an imaging means are arranged. The imaging lens 94 forms an image of light having an ultraviolet wavelength reflected by the sample 4 on the imaging surface of the CCD 95. The CCD 95 captures a sample image from the light imaged on the imaging surface.

  In addition, when setting it as such a structure, it replaces with the single core fiber 2 and the fiber connected to the light source part 1 may use a bundle fiber. A half mirror can be used in place of the dichroic mirror 6. In this case, the half mirror needs to be retracted from the optical path during ultraviolet observation.

In such a configuration, visible observation using light having a wavelength in the visible range is the same as that described in the first embodiment, and description thereof is omitted here.
Next, a case where high-resolution and high-resolution observation is performed using light having a wavelength in the ultraviolet region will be described. In this case, the objective lens 33 is switched to an ultraviolet lens (not shown). Now, when light is generated from the lamp 71 of the ultraviolet light source unit 7, only the light having a wavelength in the ultraviolet region is extracted by the wavelength selection filter 73, collected by the action of the second light source unit lens 74, and single-core through the filter 75. The light enters the incident end 81 of the fiber 8.

  Light emitted from the emission end 82 through the single-core fiber 8 is guided to the ultraviolet light projection tube 9, passes through the projection lens 91 and the half mirror 92, is reflected by the dichroic mirror 93, and further passes through the dichroic mirror 6. The light passes through and enters the ultraviolet objective lens 33. In this case, an image of the emission end 82 of the single-core fiber 8 is formed on the pupil of the objective lens 33 by the projection lens 91 with a size corresponding to the magnification B1.

  The light transmitted through the objective lens 33 is irradiated onto the sample 4, and the reflected light from the sample 4 passes through the objective lens 33 again, passes through the dichroic mirror 6, is reflected by the dichroic mirror 93, and is further reflected by the half mirror 92. Then enters the imaging lens 94. Then, an image is formed on the imaging surface of the CCD 95 by the imaging lens 94 and a sample image is taken.

  Therefore, in this way, the light loss can be reduced by using the single-core fiber 8 as the fiber in the ultraviolet observation using the light having the wavelength in the ultraviolet region. As a result, there is no margin in the power of the light source compared to visible light, which was a weak point of using ultraviolet light, and the image becomes dark because the transmittance of each optical element constituting the illumination optical system is low. The problem can be eliminated, and high magnification and high resolution UV observation can be obtained stably.

(Modification of the second embodiment)
In the second embodiment, the case where an ND filter is used as the filter 75 in the ultraviolet light source unit 7 has been described. For example, a light control member 10 as shown in FIGS. 7A and 7B can also be used. . The light control member 10 has a large number of openings 10b and shielding portions 10c on the surface of the disk-shaped rotating substrate 10a, and changes the ratio of the openings 10b and shielding portions 10c along the rotation direction of the rotating substrate 10a. It is what. Then, the light adjusting member 10 is rotated to change the ratio of the opening 10b and the shielding portion 10c of the light adjusting member 10, and the amount of light incident on the single core fiber 8 from the ultraviolet light source unit 7 through the opening 10b is adjusted. By doing so, an effect equivalent to that of the ND filter is obtained.

  In the ultraviolet region, a material having a high transmittance is limited, and if an ND filter is constituted by such a transmissive member, the price becomes very high and the loss of light amount cannot be ignored. Is used, the amount of light is adjusted by the ratio of the opening 10b and the shielding portion 10c, so that an inexpensive filter with little loss of light amount can be realized. Further, since the ultraviolet light is passed through the opening 10b, there is an effect of making the generated light source unevenness substantially uniform. Therefore, an inexpensive and compact system can be realized without using a commercially available homogenizer.

  In addition, this invention is not limited to the said embodiment, In the implementation stage, it can change variously in the range which does not change the summary.

  Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the above effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.

1 is a diagram showing a schematic configuration of a fiber illumination type optical microscope according to a first embodiment of the present invention. The figure which shows schematic structure of the single core fiber used for 1st Embodiment. The figure which shows the state of the illumination light in the pupil of the objective lens of 1st Embodiment. The figure which shows schematic structure of the fiber used for the modification of 1st Embodiment. The figure which shows the state of the illumination light in the pupil of the objective lens of the modification of 1st Embodiment. The figure which shows schematic structure of the optical microscope of the fiber illumination type concerning the 2nd Embodiment of this invention. The figure which shows schematic structure of the light control member used for the modification of 1st Embodiment. The figure which shows schematic structure of an example of the conventional fiber illumination type optical microscope. The figure which shows schematic structure of the bundle fiber used for the conventional fiber illumination type optical microscope. The figure which shows the state of the illumination light in the pupil of the objective lens of the conventional fiber illumination optical microscope.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Light source part, 11 ... Lamp 12 ... Light source part lens, 13 ... Filter 2 ... Single core fiber, 21 ... Incident end 22 ... Outlet end, 2a ... Core 2b ... Cladding, 2c ... Primary coating 2d ... Secondary coating, DESCRIPTION OF SYMBOLS 3 ... Microscope main body 30 ... Projection part 31 ... Projection lens, 32 ... Half mirror 33 ... Objective lens, 35 ... Rotating revolver 36 ... Imaging lens, 37 ... CCD
DESCRIPTION OF SYMBOLS 4 ... Sample, 5 ... Fiber, 5a ... Core 5b ... Cladding, 5c ... Fiber core wire 5d ... Coating, 6 ... Dichroic mirror 7 ... Ultraviolet light source part, 71 ... Lamp 72 ... First light source part lens, 73 ... Wavelength selection filter 74 ... second light source lens, 75 ... filter 8 ... single core fiber, 81 ... incident end 82 ... output end, 9 ... ultraviolet projector tube 91 ... projection lens, 92 ... half mirror 93 ... dichroic mirror 94 ... connection Image lens, 95 ... CCD
DESCRIPTION OF SYMBOLS 10 ... Light control member, 10a ... Rotary substrate, 10b ... Small hole

Claims (6)

  1. A light source unit;
    A microscope body having an objective lens;
    A fiber having a single core for transmitting light from the light source unit;
    Projecting means for projecting an image of the exit end of the fiber onto the pupil of the objective lens;
    A fiber illumination microscope characterized by comprising:
  2. The fiber illuminating microscope according to claim 1, wherein a plurality of fiber core wires are arranged around the single core of the fiber.
  3. The fiber illumination microscope according to claim 1, wherein the light projecting unit is detachably provided to the microscope main body.
  4. The fiber illuminating microscope according to any one of claims 1 to 3, wherein the light source unit generates light having a wavelength in a visible region or an ultraviolet region.
  5. The fiber is characterized in that Wc is set substantially equal to D / B, where Wc is the core diameter of the single core, D is the pupil diameter of the objective lens, and B is the projection magnification of the projection lens. The fiber illumination microscope according to any one of claims 1 to 4.
  6. 5. The light source unit for generating light having a wavelength in the ultraviolet region has a large number of openings and shielding parts, and has a dimming means capable of changing a ratio of these openings and shielding parts. Fiber illumination microscope.
JP2005119527A 2005-04-18 2005-04-18 Fiber lighting type microscope Pending JP2006301067A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122553A (en) * 2006-11-10 2008-05-29 Opcell Co Ltd Optical unit
JP2009092878A (en) * 2007-10-05 2009-04-30 Olympus Corp Fiber illumination type microscope system, and control method therefor
US10324280B2 (en) 2016-05-16 2019-06-18 Olympus Corporation Microscope system

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JPH0921958A (en) * 1996-01-26 1997-01-21 Olympus Optical Co Ltd Microscope equipment with optical system for automatically controlled illumination
JPH09216086A (en) * 1996-02-06 1997-08-19 Fujikura Ltd Laser beam machine and laser beam machining method using it
JPH11119116A (en) * 1997-10-16 1999-04-30 Olympus Optical Co Ltd Light source device
JPH11337831A (en) * 1998-05-21 1999-12-10 Nikon Corp Laser microscope
JP2001108907A (en) * 1999-10-12 2001-04-20 Rohm Co Ltd Illuminating method using laser light source
JP2002090640A (en) * 2000-09-14 2002-03-27 Olympus Optical Co Ltd Ultraviolet microscope
JP2003021787A (en) * 2001-07-06 2003-01-24 Nikon Corp Observation device
JP2003305008A (en) * 2002-04-17 2003-10-28 Pentax Corp Electronic endoscope equipped with automatic light control function
JP2004086009A (en) * 2002-08-28 2004-03-18 Olympus Corp Scanning type laser microscope system
JP2004085796A (en) * 2002-08-26 2004-03-18 Nikon Corp Illuminating device for microscope and microscope

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0921958A (en) * 1996-01-26 1997-01-21 Olympus Optical Co Ltd Microscope equipment with optical system for automatically controlled illumination
JPH09216086A (en) * 1996-02-06 1997-08-19 Fujikura Ltd Laser beam machine and laser beam machining method using it
JPH11119116A (en) * 1997-10-16 1999-04-30 Olympus Optical Co Ltd Light source device
JPH11337831A (en) * 1998-05-21 1999-12-10 Nikon Corp Laser microscope
JP2001108907A (en) * 1999-10-12 2001-04-20 Rohm Co Ltd Illuminating method using laser light source
JP2002090640A (en) * 2000-09-14 2002-03-27 Olympus Optical Co Ltd Ultraviolet microscope
JP2003021787A (en) * 2001-07-06 2003-01-24 Nikon Corp Observation device
JP2003305008A (en) * 2002-04-17 2003-10-28 Pentax Corp Electronic endoscope equipped with automatic light control function
JP2004085796A (en) * 2002-08-26 2004-03-18 Nikon Corp Illuminating device for microscope and microscope
JP2004086009A (en) * 2002-08-28 2004-03-18 Olympus Corp Scanning type laser microscope system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122553A (en) * 2006-11-10 2008-05-29 Opcell Co Ltd Optical unit
JP2009092878A (en) * 2007-10-05 2009-04-30 Olympus Corp Fiber illumination type microscope system, and control method therefor
US10324280B2 (en) 2016-05-16 2019-06-18 Olympus Corporation Microscope system

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