JP2006295063A - Thermoelectric transducing module - Google Patents

Thermoelectric transducing module Download PDF

Info

Publication number
JP2006295063A
JP2006295063A JP2005117188A JP2005117188A JP2006295063A JP 2006295063 A JP2006295063 A JP 2006295063A JP 2005117188 A JP2005117188 A JP 2005117188A JP 2005117188 A JP2005117188 A JP 2005117188A JP 2006295063 A JP2006295063 A JP 2006295063A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
thermoelectric conversion
electrode
type
fins
conversion element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005117188A
Other languages
Japanese (ja)
Inventor
Toshiki Sakamoto
Yasuhiro Suzuki
俊貴 坂本
康弘 鈴木
Original Assignee
Okano Electric Wire Co Ltd
岡野電線株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Images

Abstract

PROBLEM TO BE SOLVED: To simply and efficiently manufacture a thermoelectric transducing module which efficiently cools and heats a spacial region near a layout region.
SOLUTION: In a method for manufacturing the thermoelectric transducing module, a thermoelectric transducer is passed through and fitted into an element fitting hole of an insulating board, and at least one electrode of the thermoelectric transducing module having a circuit connected to the thermoelectric transducer through electrodes on a both-end side is used as U-shaped fin combining electrodes 2a ((e) to (g)), which comprise a fixing face fixed to one end face of the thermoelectric transducer and a fin 9 stood upright on the opposite side of the thermoelectric transducer from the both-end side of the fixing face. In the fin combining electrode 2a, a plurality of forming regions of the fixing face 8 are formed in an aligned state in an electrode forming plate 11 through an electrode dividing hole 7 (a). Thereafter, an insulating member 6 is filled in the electrode dividing hole 7 (b), an unwanted region 10 is removed from the electrode forming plate 11 (c), the fins 9 are bent from both sides of the fixing face 8 and stood upright to be formed in a lump (d), and the fins 9 are fixed in a lump to ends of a plurality of the thermoelectric transducers.
COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、例えば光通信用部品、理化学機器、携帯用クーラ、半導体プロセス中でのプロセス温度管理等に用いられて冷却や加熱を行う熱電変換モジュールの製造方法および熱電変換モジュールに関するものである。 The present invention is, for example, optical communication components, scientific instruments, portable cooler, a manufacturing method and a thermoelectric conversion module of the thermoelectric conversion module for cooling or heating is used in process temperature control and the like in a semiconductor process.

ペルチェモジュール等の熱電変換モジュールが、光通信分野等の様々な分野に用いられており、様々な熱電変換モジュールの構成が提案されている。 The thermoelectric conversion module such as a Peltier module, are used in various fields such as optical communication field have been proposed various configurations of the thermoelectric conversion module. 図8には、代表的な熱電変換モジュールの構造の一例が示されている。 Figure 8 is an example of the structure of a typical thermoelectric conversion module is illustrated. この熱電変換モジュール1はペルチェモジュールであり、複数の素子嵌合孔3を有する絶縁性基板(絶縁支持板)30の素子嵌合孔3に、熱電変換素子5(5a,5b)を貫通嵌合して形成されている(例えば特許文献1、2、参照。)。 The thermoelectric conversion module 1 is a Peltier module, the device fitting hole 3 of the insulating substrate (insulating support plates) 30 having a plurality of elements fitting hole 3, the thermoelectric conversion element 5 (5a, 5b) through fitting to have been formed (for example, Patent documents 1 and 2, reference.).

ペルチェモジュールの熱電変換素子5(5a,5b)は、ペルチェ素子として一般的に知られており、P型半導体により形成されたP型(p型)の熱電変換素子5aと、N型半導体により形成されたN型(n型)の熱電変換素子5bとを有する。 Thermoelectric conversion element 5 (5a, 5b) of the Peltier module is commonly known as a Peltier element, and the thermoelectric conversion element 5a of the P type formed by P-type semiconductor (p-type), formed by N-type semiconductor and a thermoelectric conversion element 5b of n-type (n-type). P型およびN型の熱電変換素子5(5a,5b)は、例えば長さが0.5〜3.0mm程度のビスマス・テルル等の半導体単結晶で構成されている。 P-type and N-type thermoelectric conversion element 5 (5a, 5b), for example the length is constituted by a semiconductor single crystal such as bismuth telluride of about 0.5 to 3.0 mm.

前記絶縁性基板30は、例えば厚さが0.2〜1.0mm程度の電気絶縁物の板、例えばガラスエポキシ板により構成されており、この絶縁性基板30の上下側に、熱電変換素子5(5a,5b)が、例えば0.1〜1.6mm程度突出するように、P型の熱電変換素子5aとN型の熱電変換素子5bが、それぞれ、対応する素子嵌合孔3に貫通嵌合されて交互に配置されている。 The insulating substrate 30 is, for example, a plate thickness of the electrical insulation of about 0.2 to 1.0 mm, is constituted by, for example, a glass epoxy plate, the upper and lower side of the insulating substrate 30, the thermoelectric conversion element 5 (5a, 5b) such that, for example, projects about 0.1~1.6Mm, P-type thermoelectric conversion elements 5a and N-type thermoelectric conversion element 5b, respectively, fitted through the corresponding element fitting hole 3 together they are and are arranged alternately.

P型とN型の熱電変換素子5(5a,5b)の素子嵌合孔3への貫通方向の一端側(ここでは上側)と他端側(ここでは下側)には、それぞれ電極2が配置されている。 P-type and N-type thermoelectric conversion element 5 (5a, 5b) in the through direction of the one end of the device fitting hole 3 of (here upper) and the other end (here lower), respectively the electrodes 2 It is located. これらの電極2はいずれも半田付け等により熱電変換素子5(5a,5b)に接合されており、熱電変換素子5(5a,5b)は、対応する電極2を介して電気的に直列に接続されて熱電変換素子5(5a,5b)の回路(PN素子対)が形成されている。 Thermoelectric conversion element 5 by any of these electrodes 2 soldering (5a, 5b) are joined to the thermoelectric conversion element 5 (5a, 5b) are connected in series electrically through the corresponding electrode 2 thermoelectric conversion elements 5 are (5a, 5b) circuit (PN element pair) are formed. なお、図に半田は図示されていない。 Incidentally, solder drawing are not shown. また、熱電変換素子5(5a,5b)の回路は、図示されていないリード端子とリード線を介して電源回路等に接続されている。 The circuit of the thermoelectric conversion element 5 (5a, 5b) are connected to the power supply circuit or the like through the lead terminal and the lead wire (not shown).

上記熱電変換素子5(5a,5b)の回路に電流を流すと、P型の熱電変換素子5aとN型の熱電変換素子5bに電極2を介して電流が流れて、熱電変換素子5(5a,5b)と電極2との接合部(界面)で冷却・加熱効果が生じる。 The thermoelectric conversion element 5 (5a, 5b) when an electric current is applied to the circuit of a current flows through the electrode 2 to the thermoelectric conversion element 5b of the thermoelectric conversion elements 5a and N-type P-type thermoelectric conversion element 5 (5a , 5b) and the bonding portion between the electrode 2 cooling and heating effect (interface) results. つまり、前記接合部を流れる電流の方向によって熱電変換素子5(5a,5b)の一方の端部が発熱せしめられると共に他方の端部が冷却せしめられるいわゆるペルチェ効果が生じる。 In other words, the thermoelectric conversion element 5 (5a, 5b) by the direction of current flowing through the junction-called Peltier effect in which the other end with one end of is made to an exotherm is allowed to cool occur.

このペルチェ効果によって熱電変換素子5(5a,5b)の一方の端部、例えば上端部が発熱せしめられると、この熱がペルチェモジュールの上側に設けられた部材に伝えられ、この部材の加熱が行われる。 Thermoelectric conversion element 5 (5a, 5b) by the Peltier effect one end of, for example, the upper end portion is brought into heat generation, the heat is transmitted to the member provided on the upper side of the Peltier module, the line heating of the member divide. また、その逆に、ペルチェ効果によって熱電変換素子5(5a,5b)の例えば上端部が冷却せしめられると、ペルチェモジュールの上側に設けられた部材の冷却(吸熱)が行われる。 Further, on the contrary, the thermoelectric conversion element 5 (5a, 5b) by the Peltier effect when for example the upper end portion of is allowed to cool, the cooling member provided on the upper side of the Peltier module (endothermic) is performed.

特開平9−181362号公報 JP-9-181362 discloses 特開平10−178216号公報 JP 10-178216 discloses

ところで、上記のような熱電変換モジュールによって、熱電変換モジュールの上側または下側の空間領域を冷却したり加熱したりすることが提案されているが、この場合、熱電変換素子5(5a,5b)の冷却端側や加熱端側の電極2が空気に接触する面積が大きい方が効率的に前記空間領域の冷却や加熱を行えると考えられる。 Meanwhile, the thermoelectric conversion module as described above, but that the upper or lower space region of the thermoelectric conversion module or heating or cooling has been proposed, in this case, the thermoelectric conversion element 5 (5a, 5b) electrodes 2 of the cold end side and the heating end is considered a larger area in contact with air can be performed efficiently cooling and heating of the space region.

そこで、本発明者は、電極2と空気との接触面積を大きくするために、電極2の形状を平面形状ではなく、例えばP型とN型の対の熱電変換素子5(5a,5b)の一端面に固定される固定面と放熱用または吸熱用のフィンとを備えた形状とすることを考えた。 The present inventors, in order to increase the contact area between the electrode 2 and the air, the shape of the electrode 2 not flat shape, for example, P-type and N-type pairs of thermoelectric conversion element 5 (5a, 5b) of I thought to be a shape with a fixed surface fixed to one end surface and fins for radiating or heat absorbing.

しかしながら、電極2の形状を複雑にすると、1つ1つの電極2を形成してそれぞれの電極2を対応する熱電変換素子5(5a,5b)に固定する作業が難しくなり、短時間で効率的に熱電変換モジュールの製造を行うことが困難になる。 However, complicating the shape of the electrode 2, one single electrode 2 thermoelectric conversion element 5 (5a, 5b) corresponding to each of the electrodes 2 to form a difficult work to be fixed to efficiently in a short time carrying out the production of the thermoelectric conversion module is difficult.

本発明は、上記課題を解決するために成されたものであり、その目的は、熱電変換モジュールの配置領域近傍の空間領域の冷却や加熱を効率的に行うことができ、かつ、簡単で効率的に製造可能な熱電変換モジュールおよび熱電変換モジュールの製造方法を提供することにある。 The present invention has been made to solve the above problems, it is possible to perform cooling and heating of the spatial region of the placement area near the thermoelectric conversion module efficiently and simple efficiency It is to provide a method for producing a manner manufacturable thermoelectric conversion module and a thermoelectric conversion module.

上記目的を達成するために、本発明は次のような構成をもって課題を解決するための手段としている。 To achieve the above object, the present invention is a means for solving the problems with the following configuration. すなわち、第1の発明の熱電変換モジュールの製造方法は、複数の素子嵌合孔を形成した絶縁性基板の素子嵌合孔にP型とN型の対応する熱電変換素子をそれぞれ貫通嵌合し、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に電極を設け、該電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とを電気的に接続して熱電変換素子の回路を形成し、前記熱電変換素子の一端側と他端側に設ける電極のうち少なくとも一方側の電極を、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成す熱電変換モジュールの製造方法であって、前記フィン兼用電極を複数一括して形成するための電極形成 That is, the manufacturing method of the thermoelectric conversion module of the first invention, each through-fitted P-type and N-type corresponding thermoelectric conversion element into a plurality of element fitting hole elements of the formed insulating substrate a fitting hole , an electrode at one end and the other end of the through-direction of the device fitting hole of the thermoelectric conversion element is provided, the electrical and the P-type thermoelectric conversion elements and the N-type thermoelectric conversion elements corresponding through the electrode connected to form a circuit of the thermoelectric conversion element, the one end side and at least one side electrode of the other end is provided on the side of the electrode, P-type and N-type pairs of thermoelectric conversion elements of the thermoelectric conversion element a method of manufacturing a thermoelectric conversion module that forms the fin combined electrode of U-shape with a fin provided upright on opposite sides of the thermoelectric conversion element from the both ends of the fixing surface and the fixed surface which is fixed to the end face , the electrode formation for forming a plurality collectively the fins combined electrode 板を用意して該電極形成用板に前記固定面の形成部位を電極区分け孔を介して整列状に複数形成する孔形成工程と、該孔形成工程後に前記電極区分け孔に絶縁部材を充填する絶縁部材充填工程と、該絶縁部材充填工程後に前記電極形成用板から前記フィンの形成領域と前記固定面の形成領域を除いた不要領域を取り除いて隣り合う固定面同士が前記絶縁部材のみを介して連結されている状態とする不要領域削除工程と、該不要領域削除工程後に前記フィンを前記固定面の両側から折り曲げて固定面の両側にフィンを立設する工程を有して複数のフィン兼用電極を一括して形成し、この一括形成した複数のフィン兼用電極を対応する熱電変換素子に一括固定する工程を有する構成をもって課題を解決する手段としている。 Filling the hole forming step of forming a plurality aligned shape through the fixed surface electrode division pore formation site to the electrode forming plate prepared a plate, an insulation member to the electrode divided hole after the hole formation step via an insulating member filling step, the fixed surface adjacent to remove the unwanted areas the exclusion from the electrode forming plate and forming region of the fin forming region of the fixed surface after the insulating member filling process only the insulating member and an unnecessary area deleting step of the state of being connected Te, the unnecessary area deleting said fin after the step has a step of upright fins on both sides of the fixed surface by bending from both sides of the fixing surface a plurality of fins combined collectively formed the electrodes, and a means for solving the problems with the construction having the step of simultaneously fixing a plurality of fins shared electrodes that this simultaneously formed in the corresponding thermoelectric conversion element.

また、第2の発明の熱電変換モジュールの製造方法は、上記第1の発明の構成に加え、前記絶縁部材は耐熱性を有する樹脂とする構成をもって課題を解決する手段としている。 A method for manufacturing a thermoelectric conversion module of the second invention, in addition to the configuration of the first invention, the insulating member is a means for solving the problems with the construction of a resin having heat resistance.

さらに、第3の発明の熱電変換モジュールの製造方法は、上記第1または第2の発明の構成に加え、前記電極区分け孔に設けた絶縁部材の少なくとも一つに応力緩和用の亀裂を形成する亀裂形成工程を有する構成をもって課題を解決する手段としている。 Further, the third method of manufacturing thermoelectric conversion modules of the present invention, in addition to the configuration of the first or second aspect, to form a crack for stress relief in at least one insulating member provided on said electrode divided hole It has a structure having a cracking process is a means for solving the problems.

さらに、第4の発明の熱電変換モジュールの製造方法は、上記第1または第2または第3の発明の構成に加え、前記絶縁部材充填工程において電極区分け孔に充填する絶縁部材を前記電極区分け孔の貫通方向と前記電極形成用板の面方向とにはみ出す態様に充填し、前記電極区分け孔の面方向の不要領域にはみ出した絶縁部材を不要領域削除工程時に電極形成用板の不要領域と共に除く構成をもって課題を解決する手段としている。 Furthermore, the manufacturing method of the fourth thermoelectric conversion module of the present invention, the first or in addition to the configuration of the second or third invention, the electrode division bore the insulation member for filling the electrode divided hole in the insulating member filling step except in the penetrating direction and filled in a manner protruding in the surface direction of the electrode forming plate, with unnecessary area of ​​the electrode divided hole electrode forming plate insulating member when unnecessary area deleting step protruding in the surface direction of the unnecessary area of and a means for solving the problems with the configuration.

さらに、第5の発明の熱電変換モジュールの製造方法は、複数の素子嵌合孔を形成した絶縁性基板の素子嵌合孔にP型とN型の対応する熱電変換素子をそれぞれ貫通嵌合し、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に電極を設け、該電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とを電気的に接続して熱電変換素子の回路を形成し、前記熱電変換素子の一端側と他端側に設ける電極のうち少なくとも一方側の電極を、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成す熱電変換モジュールの製造方法であって、前記フィン兼用電極を複数一括して形成するための電極形成用 Furthermore, the manufacturing method of the fifth thermoelectric conversion module of the present invention, respectively through fitted P-type and N-type corresponding thermoelectric conversion element into a plurality of element fitting hole elements of the formed insulating substrate a fitting hole , an electrode at one end and the other end of the through-direction of the device fitting hole of the thermoelectric conversion element is provided, the electrical and the P-type thermoelectric conversion elements and the N-type thermoelectric conversion elements corresponding through the electrode connected to form a circuit of the thermoelectric conversion element, the one end side and at least one side electrode of the other end is provided on the side of the electrode, P-type and N-type pairs of thermoelectric conversion elements of the thermoelectric conversion element a method of manufacturing a thermoelectric conversion module that forms the fin combined electrode of U-shape with a fin provided upright on opposite sides of the thermoelectric conversion element from the both ends of the fixing surface and the fixed surface which is fixed to the end face , for forming an electrode for forming a plurality collectively the fins combined electrode を用意して該電極形成用板に前記固定面の形成部位を電極区分け孔を介して整列状に複数形成する孔形成工程と、該孔形成工程後に前記電極形成用板から前記フィンの形成領域と前記固定面の形成領域と隣り合う固定面同士を連結するための連結部位とを除いた不要領域を取り除いて隣り合う固定面同士が前記連結部位のみを介して連結されている状態とする不要領域削除工程と、該不要領域削除工程後に前記フィンを前記固定面の両側から折り曲げて固定面の両側にフィンを立設する工程を有して複数のフィン兼用電極を一括して形成し、この一括形成した複数のフィン兼用電極を対応する熱電変換素子に固定する時または固定後に前記連結部位を断ち切る工程を有する構成をもって課題を解決する手段としている。 A hole forming step of forming a plurality aligned shape through electrode partitioning hole formation portion of the fixed surface to the electrode forming plate was prepared, forming regions of the fins from the electrode forming plate after the pore formation process unnecessary to state that the fixed surface adjacent to remove the unnecessary area other than the connecting portion are connected via only the connecting portion for connecting the fixed surface adjacent to the fixed surface of the forming area and and area deleting step, a step of upright fins collectively formed a plurality of fins combined electrode of the fin after the unnecessary area deleting process on both sides of the fixed surface by bending from both sides of said fixing surface, this and a means for solving the problems with the construction having the step of breaking the time or the connecting portion after fixing to fix the plurality of fins shared electrodes which collectively form the corresponding thermoelectric conversion element.

さらに、第6の発明の熱電変換モジュールは、複数の素子嵌合孔を縦横に整列状に形成した部位を含む絶縁性基板を有し、P型とN型の熱電変換素子が前記絶縁性基板の対応する素子嵌合孔にそれぞれ貫通嵌合されており、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に設けられた電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とが電気的に接続されて熱電変換素子の回路が形成されており、前記熱電変換素子の一端側と他端側に設けられた電極のうち少なくとも一方側の電極は、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成しており、フィン兼用電極が絶縁部材を介して Further, the sixth thermoelectric conversion module of the present invention has an insulating substrate including a portion formed to align form a plurality of elements fitting holes in a matrix, P-type and N-type thermoelectric conversion element is the insulating substrate of the corresponding elements fitting holes are fitted through each of the P type corresponding through element fitted electrode provided on the one end and the other end of the through-direction of the engagement hole of the thermoelectric conversion element circuit of the thermoelectric conversion element and N-type thermoelectric conversion elements are electrically connected thermoelectric conversion element and is formed, at least one side of one end and the other provided on the side electrode of the thermoelectric conversion element co is the electrode, with a fin provided upright on opposite sides of the thermoelectric conversion element from the both ends of the fixing surface and the fixed surface which is fixed to one end surface of the thermoelectric conversion element pairs in P-type and N-type and forms a fin combined electrode-shaped, fin combined electrode via an insulating member 数連結されてフィン兼用電極列が形成され、該フィン兼用電極列は縦または横に整列状に配置されたP型とN型の複数の熱電変換素子の端面に一括して固定されている構成をもって課題を解決する手段としている。 The number is concatenated with fins combined electrode row form, construction the fins combined electrode array are fixed collectively on the end face of the vertical or horizontal aligned shape arranged P-type and N-type multiple thermoelectric conversion element It is a means to solve the problems with.

さらに、第7の発明の熱電変換モジュールは、上記第6の発明の構成に加え、前記絶縁部材は耐熱性の樹脂とした構成をもって課題を解決する手段としている。 Furthermore, the seventh thermoelectric conversion module of the present invention, in addition to the configuration of the sixth aspect, the insulating member is a means for solving the problems with the configuration in which the heat-resistant resin.

第1〜第4の発明の熱電変換モジュールの製造方法によれば、熱電変換モジュールのP型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極を形成する際、以下のようにしてフィン兼用電極を一括して形成するので、容易に、かつ、効率的にフィン兼用電極を形成することができる。 According to the manufacturing method of the first to fourth thermoelectric conversion module of the present invention, from both ends of the fixed surface and the fixed surface which is fixed to one end surface of the thermoelectric conversion element of the P-type and N-type pairs of thermoelectric conversion module when forming the fins combined electrode of U-shape with a fin provided upright on opposite sides of the thermoelectric conversion element, so in the following collectively formed fins combined electrode easily, and, it is possible to efficiently form the fin combined electrode.

つまり、これらの発明は、フィン兼用電極を複数一括して形成するための電極形成用板を用意して、該電極形成用板に前記固定面の形成部位を電極区分け孔を介して整列状に複数形成し、絶縁部材充填工程によって前記電極区分け孔に絶縁部材を充填した後、電極形成用板から前記フィンの形成領域と前記固定面の形成領域を除いた不要領域を取り除いて隣り合う固定面同士が前記絶縁部材のみを介して連結されている状態とし、前記フィンを前記固定面の両側から折り曲げて固定面の両側にフィンを立設するので、容易に、かつ、効率的にフィン兼用電極を形成することができる。 That is, these inventions are prepared electrode forming plate for forming a plurality collectively fins combined electrode, the on fixed surface aligning shaped formation site through the electrode divided hole of the said electrode forming plate forming a plurality of, after filling the insulating member to the electrode divided hole by an insulating member filling step, the fixed surface adjacent to remove the unnecessary area other than the electrode forming plate and forming region of the fin forming region of the fixed surface a state where each other are connected through only the insulating member, since the upright fins of the fin on either side of the fixing surface by bending from both sides of the fixed surface, easily and efficiently fin combined electrode it can be formed.

そして、前記のようにして複数のフィン兼用電極を一括して形成した後、この一括形成した複数のフィン兼用電極を対応する熱電変換素子に一括固定する工程を有するので、熱電変換モジュールを容易に、かつ、効率的に製造できる。 Then, after forming collectively a plurality of fins combined electrode in the manner described above, since a step of collectively fixing a plurality of fins shared electrodes that this simultaneously formed in the corresponding thermoelectric conversion element, a thermoelectric conversion module easily and it can be efficiently manufactured.

また、絶縁部材充填工程を有する本発明の熱電変換モジュールの製造方法において、絶縁部材は耐熱性を有する樹脂とする構成によれば、樹脂は成型作業性が良好なので、フィン兼用電極を一括形成する作業をより一層良好に行うことができ、より効率的に熱電変換モジュールの製造を行うことができる。 In the method of manufacturing the thermoelectric conversion module of the present invention having an insulating member filling step, the insulating member according to the structure of a resin having heat resistance, the resin because the good molding workability, collectively form the fins combined electrode work can be a performed more better, more efficiently can be manufactured thermoelectric conversion module.

さらに、絶縁部材充填工程を有する本発明の熱電変換モジュールの製造方法において、電極区分け孔に設けた絶縁部材の少なくとも一つに応力緩和用の亀裂を形成する亀裂形成工程を有する構成によれば、例えば熱電変換モジュールを使用していくうちに、フィン兼用電極を形成する金属等の導電性部材と電極区分け孔に設けた絶縁部材との熱膨張率差等に起因する歪みによって絶縁部材に応力が加えられても、その応力を絶縁部材に形成された亀裂によって緩和できるので、熱電変換モジュールの長期信頼性を高めることができる。 Further, in the method of manufacturing the thermoelectric conversion module of the present invention having an insulating member filling step, according to the configuration having a crack forming step of forming a crack for stress relief in at least one insulating member provided on the electrode division hole, for example during the course of a thermoelectric conversion module, the stress in the insulating member by a distortion due to thermal expansion coefficients differentially with the insulating member provided on the conductive member and the electrode division holes such as a metal forming the fin combined electrode is be added, since the stress can be relieved by the crack formed in the insulating member, it is possible to enhance the long-term reliability of the thermoelectric conversion module.

さらに、絶縁部材充填工程を有する本発明の熱電変換モジュールの製造方法において、絶縁部材充填工程において電極区分け孔に充填する絶縁部材を前記電極区分け孔の貫通方向と前記電極形成用板の面方向とにはみ出す態様に充填し、前記電極区分け孔の面方向の不要領域にはみ出した絶縁部材を不要領域削除工程時に電極形成用板の不要領域と共に除く構成によれば、電極区分け孔に充填する絶縁部材を電極区分け孔から外れにくくすることができ、かつ、電極区分け孔からはみ出した不要な絶縁部材は不要領域削除工程時に除き、良好に、フィン兼用電極を一括形成することができる。 Further, in the method of manufacturing the thermoelectric conversion module of the present invention having an insulating member filling step, the surface direction of the insulating member filling the electrode division hole in the insulating member filling step and the through direction of the electrode dividing holes the electrode forming plate filling the manner protruding in, according to the configuration except with unnecessary area of ​​the electrode divided hole electrode forming plate insulating member protruding in the surface direction of the unnecessary area when unnecessary area deletion process of filling the electrode partitioning hole insulating member the can be easily disengaged from the electrode division holes, and unnecessary insulating member protruding from the electrode division holes except when unnecessary area deletion process, favorably, it is possible to collectively form the fins combined electrode.

さらに、本発明の熱電変換モジュールの製造方法において、フィン兼用電極を複数一括して形成する際に、電極区分け孔に絶縁部材を設けずに、隣り合う固定面同士を、電極形成用板から形成される連結部位のみを介して連結されている状態とし、一括形成した複数のフィン兼用電極を対応する熱電変換素子に固定する時または固定後に前記連結部位を断ち切る工程を有する構成によれば、フィン兼用電極の一括形成時に絶縁部材を設ける場合と同様に、熱電変換モジュールを容易に、かつ、効率的に製造できる。 Further, formed in the manufacturing method of the thermoelectric conversion module of the present invention, when forming a plurality collectively fins combined electrode, without providing the insulating member to the electrodes divided holes, the fixed surface adjacent, from the electrode forming plate a state where only via the connecting portion is connected to be, according to the configuration having a step of cutting off the connecting portion after time or fixed securing to the thermoelectric conversion elements corresponding to a plurality of fins shared electrodes which collectively form the fins similar to the case of providing the insulating member during bulk formation of the combined electrode, easily thermoelectric conversion module, and can be efficiently manufactured.

さらに、本発明の熱電変換モジュールは、熱電変換素子の一端側と他端側に設けられた電極のうち少なくとも一方側の電極を、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成し、フィン兼用電極が絶縁部材を介して複数連結されてフィン兼用電極列が形成され、該フィン兼用電極列は縦または横に整列状に配置されたP型とN型の複数の熱電変換素子の端面に一括して固定されているので、電極が熱電変換モジュールの配置空間領域の空気に接触する面積を大きくでき、効率的に空間領域の冷却や加熱を行うことができる。 Furthermore, the thermoelectric conversion module of the present invention, at least one side of the electrodes of one end and the other provided on the side electrode of the thermoelectric conversion element, fixed to one end surface of the thermoelectric conversion element pairs in P-type and N-type have been form from both ends of the fixed surface and the fixing surface and the fin combined electrode of U-shape with a fin provided upright on opposite sides of the thermoelectric conversion element, a plurality fins combined electrode via an insulating member is connected is formed fin combined electrode column, since the fin combined electrode column are fixed collectively on the end face of the vertical or P type disposed aligned shape laterally and N-type multiple thermoelectric conversion element, the area where the electrode is in contact with the air in the arrangement space area of ​​the thermoelectric conversion module can be increased, it is possible to efficiently perform cooling or heating of the spatial domain.

また、本発明の熱電変換モジュールによれば、フィン兼用電極列は縦または横に整列状に配置されたP型とN型の複数の熱電変換素子の端面に一括して固定されているので、前記第1乃至第4のいずれかの発明の熱電変換モジュールの製造方法を適用して製造することができ、容易に、かつ、効率的に製造可能な安価な熱電変換モジュールを実現できる。 Further, according to the thermoelectric conversion module of the present invention, since the fin combined electrode column are fixed collectively on the end face of the longitudinal or transverse to the arranged aligned form the P-type and N-type multiple thermoelectric conversion element, the first to be manufactured by applying the manufacturing method of the fourth thermoelectric conversion module of any one of the easily and can be realized efficiently inexpensive thermoelectric conversion module can be produced.

さらに、本発明の熱電変換モジュールにおいて、絶縁部材は耐熱性の樹脂とした構成によれば、絶縁部材として耐熱性の樹脂を適用して、より一層容易に、かつ、効率的に製造可能な熱電変換モジュールとすることができる。 Furthermore, in the thermoelectric conversion module of the present invention, the insulating member according to the configuration with the heat-resistant resin, by applying the heat-resistant resin as an insulating member, the more easily and efficiently manufacturable thermoelectric it can be a conversion module.

以下、本発明の実施の形態を、図面を参照して説明する。 Hereinafter, the embodiments of the present invention will be described with reference to the drawings. なお、本実施形態例の説明において、従来例と同一名称部分には同一符号を付し、その重複説明は省略又は簡略化する。 In the description of this embodiment, the same reference numerals are given to the conventional example having the same name portions, and redundant description will be omitted or simplified.

図5(a)には、本発明に係る熱電変換モジュールの一実施形態例が平面図により示されており、図5(b)には、そのA−A断面図、図5(c)にはB−B断面図、図5(d)にはC−C断面図がそれぞれ示されている。 Figure. 5 (a), an example embodiment of a thermoelectric conversion module according to the present invention is illustrated by the plan view, in FIG. 5 (b), the A-A cross-sectional view, in FIG. 5 (c) the sectional view taken along line B-B, C-C sectional view in FIG. 5 (d) are respectively shown. 本実施形態例の熱電変換モジュールは、図8に示した従来の熱電変換モジュールと同様に、絶縁性基板30の素子嵌合孔3にP型とN型の対応する熱電変換素子5(5a,5b)をそれぞれ貫通嵌合し、熱電変換素子5(5a,5b)の両端側に設けられた電極2を介して対応するP型の熱電変換素子5aとN型の熱電変換素子5bとを電気的に接続して構成されているが、本実施形態例では、前記電極2を、コ字形状のフィン兼用電極2aとしている。 The thermoelectric conversion module according to the present exemplary embodiment, as in the conventional thermoelectric conversion module shown in FIG. 8, the P-type and N-type elements fitting hole 3 of the insulating substrate 30 corresponding thermoelectric conversion element 5 (5a, 5b) the fitted through each thermoelectric conversion element 5 (5a, 5b) electrically and thermoelectric conversion elements 5b of the P-type thermoelectric conversion elements 5a and the N-type corresponding via electrodes 2 provided on both end sides of the While connected to and is configured, in this embodiment, the electrode 2, and the fins combined electrode 2a of the U-shape.

それぞれのフィン兼用電極2aは、P型とN型の対の熱電変換素子5(5a,5b)の一端面に固定された固定面8と該固定面8の両端側から前記熱電変換素子の反対側に立設されたフィン9とを備えてコ字形状を呈している。 Each fin combined electrode 2a is opposite from both ends of the P-type thermoelectric conversion of the N-type pairs element 5 (5a, 5b) fixed surface 8 is fixed to one end face of the said fixed surface 8 of the thermoelectric conversion element and it has a U-shape and a fin 9 which is erected on the side.

なお、図5(a)に示す絶縁性基板30の表面側において、図の上から一列目と下から一列目のフィン兼用電極2a(リード端子21に接続されている電極を除く)は、固定面8の長手方向に沿ってフィン9が形成され、それ以外のフィン兼用電極2aは固定面8の長手方向に対して直交する方向にフィン9が形成されている。 Incidentally, in the surface side of the insulating substrate 30 shown in FIGS. 5 (a), (excluding electrode connected to the lead terminal 21) fin combined electrode 2a of the first row from the bottom and the first column from the top in the figure, fixed formed fin 9 along the longitudinal direction of the surface 8, and the other fin combined electrode 2a fins 9 in the direction orthogonal it is formed with respect to the longitudinal direction of the fixing surface 8. また、絶縁性基板30の裏面側においては、フィン兼用電極2aは図5(a)に示す態様と位置をずらして配置されている。 In the back surface side of the insulating substrate 30, the fins combined electrode 2a are arranged staggered manner to the position shown in Figure 5 (a).

また、図5(c)、(d)に示すように、それぞれのフィン9は先端側に丸みを帯びた山型に形成され、図5(c)に示すように、固定面8の長手方向に沿って形成されているフィン9は、2つの山型のフィンが連接された形状と成している。 Further, as shown in FIG. 5 (c), (d), each of the fins 9 are formed in the mountain shape with rounded distally, as shown in FIG. 5 (c), the longitudinal direction of the fixing surface 8 fins 9 formed along the two hill-shaped fins forms an articulated shape.

本実施形態例において、フィン兼用電極2aは絶縁部材6を介して複数連結されてフィン兼用電極列が形成され、該フィン兼用電極2aの列が、縦または横に整列状に配置されたP型とN型の複数の熱電変換素子5(5a,5b)の端面(ここでは横の熱電変換素子5(5a,5b)の列の端面)に一括して固定されている。 In this embodiment, the fins combined electrode 2a is formed with a plurality concatenated with fins combined electrode columns via the insulating member 6, the rows of the fins combined electrode 2a is vertically or arranged P-type aligned shape laterally It is fixed collectively on a plurality of thermoelectric conversion elements 5 of the N type (5a, 5b) end face (the end face of the column next to the thermoelectric conversion element 5 (5a, 5b) in this case) with.

図1、図2には、本実施形態例の熱電変換モジュールに設けられているフィン兼用電極を一括して形成する方法が用いられており、このフィン兼用電極の一括形成工程は、本発明の熱電変換モジュールの製造方法を適用している。 1, FIG. 2, the fins combined electrode provided to the thermoelectric conversion module of this embodiment have been used a method of forming collectively, collectively forming process of the fin combined electrode is of the present invention and by applying the manufacturing method of the thermoelectric conversion module. 図5に示す熱電変換モジュールは、図1、図2に示すフィン兼用電極の一括形成工程を有する熱電変換モジュールの製造方法を適用することにより、上記特徴的な構成を有している。 Thermoelectric conversion module shown in FIG. 5, FIG. 1, by applying the method of manufacturing a thermoelectric conversion module having a bulk forming process of the fin combined electrode shown in FIG. 2, has the characteristic structure. 以下、図1、図2に基づき、フィン兼用電極2aの一括形成工程を説明する。 Hereinafter, FIG. 1, with reference to FIG. 2, illustrating a batch process of forming the fin combined electrode 2a.

まず、図1(a)、図2(a)にそれぞれ示すように、フィン兼用電極2aを複数一括して形成するための、例えばNiメッキの銅板により形成された電極形成用板11を用意し、該電極形成用板11にフィン兼用電極2aの固定面8の形成部位を、電極区分け孔7を介して整列状に複数形成する。 First, FIG. 1 (a), as shown respectively in FIG. 2 (a), is prepared for forming a plurality collectively fins combined electrode 2a, the electrode forming plate 11, for example formed by Ni plating copper plate the portions of the barrier on the fixed surface 8 of the fin combined electrode 2a to the electrode forming plate 11, forming a plurality of aligned shape through electrode partitioning hole 7. この工程を、孔形成工程という。 This process, referred to as hole forming step. なお、電極形成用板11の素材は特に限定されず適宜設定される。 Incidentally, the material of the electrode forming plate 11 is appropriately set without particular limitation.

図1(a)は、固定面8の長手方向を電極区分け孔7の長手方向と同方向に整列させ、図2(a)は、固定面8の長手方向と電極区分け孔7の長手方向とが交わる方向となるように整列させる。 1 (a) is a longitudinal direction aligned in the same direction of the electrode divided hole 7 in the longitudinal direction of the fixed surface 8, FIG. 2 (a), the longitudinal direction of the longitudinal and the electrode divided hole 7 of the fixed surface 8 align such that the direction of intersection. 電極区分け孔7は、例えばプレス打ち抜きにより一括形成する。 Electrode partitioning holes 7, for example, collectively formed by press punching. なお、図1、図2に示す符号12は、電極形成用板11を成型用の治具(図示せず)に固定するピン等の固定部材の挿入穴部である。 Incidentally, FIG. 1, reference numeral 12 shown in FIG. 2 is an insertion hole of the fixing member such as a pin for fixing the electrode forming plate 11 to the jig for molding (not shown).

それぞれの電極区分け孔7は、孔形成工程時に、例えば図3(a)、図3(b)、図4(a)、図4(b)にそれぞれ示すような形状とし、図3(a)の破線枠A内の拡大図および図4(a)の破線枠A内の拡大図に示すように、面方向に鉤状部位を有するようにする。 Each of the electrodes divided hole 7, during the hole forming process, for example, FIG. 3 (a), FIG. 3 (b), the FIG. 4 (a), a shape as shown respectively in FIG. 4 (b), FIGS. 3 (a) as shown in the enlarged view of the broken-line frame a in enlarged view and diagrams in a broken line frame a 4 (a) of, to have a hook-like portion in the surface direction. また、図3(b)、図4(b)に示すように、電極区分け孔7の断面は、電極形成用板11の裏面側(フィン兼用電極2aを熱電変換素子5に固定する側の面)から表面側(フィン9を立設する側の面)に向かうにつれて縮径するテーパ状に形成することが好ましい。 Further, as shown in FIG. 3 (b), FIG. 4 (b), the cross section of the electrode divided hole 7, the back surface side (the surface of the fins combined electrode 2a is fixed to the thermoelectric conversion element 5 of the electrode forming plate 11 ) from the surface side (it is preferable to form a tapered shape that decreases in diameter toward the surface) on the side upright fin 9.

そして、上記孔形成工程後には、図1(b)、図2(b)にそれぞれ示すように、前記電極区分け孔7に絶縁部材6を充填する。 Then, after the hole forming step, FIG. 1 (b), the as shown respectively in FIG. 2 (b), filled with an insulating member 6 to the electrode division holes 7. この工程は、絶縁部材充填工程という。 This process is called the insulating member filling step. 絶縁部材6として、本実施形態例では、耐熱性の樹脂であり、例えば常温では液状で加熱により硬化する熱硬化性のフェノール樹脂を適用している。 As the insulating member 6, in this embodiment, a heat-resistant resin, for example, at normal temperature is applied a thermosetting phenolic resin which is cured by heating in a liquid.

そして、液状の絶縁部材6を電極区分け孔7に注入し、絶縁部材6の硬化温度以上に加熱させて、図3(c)、図3(d)、図4(c)、図4(d)に示すように、電極区分け孔7に充填する絶縁部材6を電極区分け孔7の貫通方向と前記電極形成用板11の面方向とにはみ出す態様に(アウトサート成型と)するようにしている。 Then, by injecting an insulating member 6 liquid to the electrode sorted hole 7, by heating above the curing temperature of the insulating member 6, FIG. 3 (c), the FIG. 3 (d), the FIG. 4 (c), the FIG. 4 (d as shown in), the manner protruding insulating member 6 to be filled into the electrode divided hole 7 in the through direction of the electrode divided hole 7 and the plane direction of the electrode forming plate 11 so as to (a outsert molding) .

本実施形態例では、電極区分け孔7の形状を、前記の如く、図3(a)、図3(b)、図4(a)、図4(b)にそれぞれ示すような形状とし、また、図3(c)、図3(d)、図4(c)、図4(d)に示すように、電極区分け孔7に充填する絶縁部材6を電極区分け孔7の貫通方向と前記電極形成用板11の面方向とにはみ出す態様に充填するようにすることにより、絶縁部材充填工程において充填される絶縁部材6を電極区分け孔7から外れにくくすることができる。 In the present embodiment, the shape of the electrode divided holes 7, wherein as, FIG. 3 (a), FIG. 3 (b), the FIG. 4 (a), a shape as shown respectively in FIG. 4 (b), also , FIG. 3 (c), the FIG. 3 (d), the FIG. 4 (c), the as shown in FIG. 4 (d), the insulating member 6 to be filled with the electrode division hole 7 and the through direction of the electrode divided hole 7 electrodes by so filling the manner protruding in the surface direction of the forming plate 11 can be easily disengaged insulating member 6 which is filled in the insulating member filling step from the electrode division hole 7.

前記絶縁部材充填工程後には、図1(c)、図2(c)にそれぞれ示すように、前記電極形成用板11から前記フィン9の形成領域と前記固定面8の形成領域を除いた不要領域10を取り除いて、図1(d)、図2(d)、図3(e)、図4(e)にそれぞれ示すように、隣り合う固定面8同士が前記絶縁部材6のみを介して連結されている状態とする。 Wherein after the insulating member filling step, FIG. 1 (c), the as shown respectively in FIG. 2 (c), required from the electrode forming plate 11 excluding the formation region of the fixed surface 8 with the formation region of the fin 9 remove the region 10, FIG. 1 (d), the FIG. 2 (d), the FIG. 3 (e), the as shown respectively in FIG. 4 (e), the fixed surface 8 adjacent to each other through only the insulating member 6 a state of being connected. この工程を不要領域削除工程という。 This process is referred to as unnecessary area deletion process. この不要領域10の取り除きも、例えばプレス打ち抜きにより一括して行う。 Also removal of the unnecessary area 10, performed for example in a lump by press punching.

また、本実施形態例では、この不要領域削除工程時に、前記電極区分け孔7の面方向の不要領域にはみ出した絶縁部材6を、電極形成用板11の不要領域10と共に除くようにしている。 Further, in this embodiment, the at unnecessary area deleting step, an insulating member 6 which protrudes unnecessary region of the surface direction of the electrode divided hole 7, so that, except with unnecessary area 10 of the electrode forming plate 11.

そして、前記不要領域削除工程後に、図1(d)〜(g)、図2(d)〜(g)、図3(f)、図4(f)にそれぞれ示すように、前記フィン9を前記固定面8の両側から折り曲げて固定面8の両側にフィン9を立設する工程を有して複数のフィン兼用電極2aを一括して形成する。 Then, the following unnecessary area deleting step, FIG. 1 (d) ~ (g), FIG. 2 (d) ~ (g), FIG. 3 (f), the as shown respectively in FIG. 4 (f), the fins 9 a step of erecting the fins 9 on either side of the fixed surface 8 by bending from both sides of the fixed surface 8 collectively formed a plurality of fins combined electrode 2a.

そして、一括形成した複数のフィン兼用電極2aを、半田等を介して対応する熱電変換素子5(5a,5b)に一括固定し、図5に示すような熱電変換モジュールを形成する。 Then, a plurality of fins shared electrodes 2a which collectively form the thermoelectric conversion element 5 (5a, 5b) corresponding via solder or the like collectively fixed to form a thermoelectric conversion module as shown in FIG.

なお、熱電変換素子5(5a,5b)は、適宜の方法によって、複数の素子嵌合孔3を縦横に整列状に形成した部位を含む絶縁性基板30の対応する素子嵌合孔3に貫通嵌合した状態で、前記の如く、フィン兼用電極2aを一括固定することにより、フィン兼用電極列を縦または横に整列状に配置した熱電変換素子5(5a,5b)に一括固定する。 Incidentally, the thermoelectric conversion element 5 (5a, 5b) is by a suitable method, through the corresponding element fitting hole 3 of the insulating substrate 30 containing the site formed in aligned form a plurality of elements fitting hole 3 in the aspect in fitted state, said as, by collectively fix the fins combined electrode 2a, collectively fixed to the thermoelectric conversion element 5 arranged in the shape aligning the fins combined electrode column vertically or horizontally (5a, 5b).

また、リード端子21を絶縁性基板30の端部に配置されたフィン兼用電極2aに接続し、複数のフィン兼用電極2aを介して電気接続された熱電変換素子5(5a,5b)の回路を、リード端子21と図示されていないリード線とを介して、必要に応じ、電源回路等の電気回路に接続できるようにする。 Also, connect the lead terminals 21 to the fin shared electrodes 2a disposed at the end portion of the insulating substrate 30, the circuit of the electrical connection thermoelectric conversion element 5 via a plurality of fins combined electrode 2a (5a, 5b) , via a lead wire (not shown) to the lead terminal 21, if necessary, to be able to connect to an electrical circuit such as a power circuit.

本実施形態例の熱電変換モジュールは、以上のような製造方法を適用し、上記構成を有しており、容易に、かつ、効率的に、フィン兼用電極2aを一括して形成することができ、この一括形成した複数のフィン兼用電極2aを対応する熱電変換素子5(5a,5b)に一括固定する工程を有するので、熱電変換モジュールを容易に、かつ、効率的に製造できる。 The thermoelectric conversion module according to the present exemplary embodiment applies the above manufacturing method has the above configuration, easily and efficiently, can be collectively formed fin combined electrode 2a since a step of collectively fixed to the thermoelectric conversion element 5 corresponding a plurality of fins shared electrodes 2a that the bulk formation (5a, 5b), easily thermoelectric conversion module, and can be efficiently manufactured.

そして、この熱電変換モジュールは、電極2をフィン兼用電極2aとしているので、例えば図5(b)に示すように、固定治具31を用いて熱電変換モジュールを固定した場合に、固定治具31を挟んだ一方側の領域(例えばH領域)を加熱し、他方側の領域(例えばC領域)を冷却するといったように、熱電変換モジュールの配置領域の一方側を効率的に加熱し、他方側を効率的に冷却することができる優れた熱電変換モジュールとすることができる。 Then, the thermoelectric conversion module, since the electrode 2 has a fin combined electrode 2a, for example, as shown in FIG. 5 (b), when fixing the thermoelectric conversion module using the fixing jig 31, the fixing jig 31 heated to sandwiching one side region (e.g. H region), so that such cooling the other side of the region (e.g., C region), one side of the arrangement region of the thermoelectric conversion module to efficiently heat the other side it can be an excellent thermoelectric conversion module can be efficiently cooled.

なお、本発明は上記実施形態例に限定されることはなく、様々な実施の態様を採り得る。 The present invention is not limited to the above embodiment may take aspects of various embodiments. 例えばフィン兼用電極2aを一括形成する際に、図6に示すように、電極区分け孔7同士を連結する溝(ランナー)14を電極形成用板11に形成し、絶縁部材充填工程時に、絶縁部材注入部15から溝14を介して樹脂等の液状の絶縁部材6を流し込み、その後、硬化させてもよい。 For example, when collectively forming the fins combined electrode 2a, as shown in FIG. 6, a groove (runner) 14 for connecting the electrode division holes 7 between the electrode forming plate 11, when the insulating member filling process, the insulating member from the injection unit 15 through the groove 14 pouring an insulating member 6 of the liquid resin or the like, it may be cured.

また、上記実施形態例では、フィン兼用電極2aのフィン9は先端側に丸みを帯びた山型に形成されていたが、フィン9の形状は特に限定されるものでなく、適宜設定されるものである。 Also, those in the above embodiment, the fins 9 of the fin combined electrode 2a has had formed in the mountain shape with rounded distally, the shape of the fins 9 is not specifically limited, and is appropriately it is. 例えば、固定面8の長手方向に形成されるフィン9は、前記の如く2つの山型のフィンを連接して形成する代わりに、図4(e)の破線Bに示すように、1つの台形状のフィンとしてもよい。 For example, the fins 9 formed in the longitudinal direction of the fixed surface 8, instead of forming by concatenating the two hill-shaped fins as, as indicated by the broken line B in FIG. 4 (e), 1 single platform it may be a fin shape.

さらに、上記説明では、図1に示したように、フィン兼用電極2aを、その固定面8の長手方向が固定面8の配列方向と交わるように整列させた例と、図2に示したように、固定面8の長手方向と固定面8の配列方向とが同方向となるように整列させた例を述べたが、固定面8の長手方向と固定面8の配列方向とが同方向になるものと交わる方向になるものとを、同じ列に配列することもできる。 Furthermore, in the above description, as shown in FIG. 1, the fins combined electrode 2a, the example in which the longitudinal direction is aligned to intersect the array direction of the fixing surface 8 of the fixed surface 8, as shown in FIG. 2 , although the longitudinal direction of the fixing surface 8 and the arrangement direction of the fixed surface 8 has dealt with the cases where aligned so that the same direction, the arrangement direction and the same direction of the longitudinal direction of the fixing surface 8 of the fixed surface 8 and those made in a direction intersecting to become ones, can be arranged in the same column.

例えば、両端側に配列されるフィン兼用電極2aのみを、その固定面8の長手方向と固定面8の配列方向とが交わる方向とし、それ以外のフィン兼用電極2aは、その固定面8の長手方向と配列方向とが同方向となるように配列することにより、図5(a)の平面図における下から一列目のような配列形態のフィン兼用電極2aを、一括して形成することができる。 For example, only the fins shared electrodes 2a arranged on both end sides, the the longitudinal direction of the fixing surface 8 and the arrangement direction of the fixed surface 8 and the direction in which intersect the other fin combined electrode 2a is length of the fixed surface 8 by arranging such that the arrangement direction direction is the same direction, the fins combined electrode 2a of the array form, such as a row from the bottom in the plan view of FIG. 5 (a), can be formed collectively .

さらに、上記実施形態例では、絶縁部材6はフェノール樹脂を適用したが、絶縁部材6は、フィン兼用電極2aを対応する熱電変換素子5(5a,5b)に半田付けする際の熱に耐えられるような耐熱性を有していればよく、フェノール樹脂以外の熱硬化性樹脂としてもよいし、耐熱性の熱可塑性樹脂により形成してもよく、さらに、樹脂以外の部材により形成してもよい。 Furthermore, in the above embodiment, the insulating member 6 was applied a phenolic resin, the insulating member 6, can withstand heat at the time of soldering the thermoelectric conversion element 5 corresponding fin combined electrode 2a (5a, 5b) long as it has heat resistance, such as, may be a thermosetting resin other than a phenol resin, may be formed by heat resistant thermoplastic resin, furthermore, it may be formed by members other than the resin . ただし、絶縁部材6を樹脂とすると、樹脂は成型作業性が良好なので、電極区分け孔7に容易に充填でき、絶縁部材充填工程以降の工程も行いやすいので、フィン兼用電極2aの一括形成作業を非常に良好に行うことができる。 However, when the insulating member 6 and the resin, the resin has excellent molding workability, can be easily filled in the electrode divided hole 7, since the insulating member filling step since the step is also easily performed, the collective work of forming the fin combined electrode 2a very it can be performed well.

さらに、電極区分け孔7の形状は、上記実施形態例で形成したような形状に限定されることはなく、適宜設定されるものである。 Furthermore, the shape of the electrode divided hole 7 is not limited to the shape as formed in the above embodiment, and may be set appropriately.

さらに、上記実施形態例における絶縁部材充填工程を省略し、以下のような製造方法を適用することもできる。 Further, omitting the insulating member filling step in the above embodiment, it is also possible to apply the manufacturing method described below. つまり、孔形成工程後に絶縁部材充填工程を行わずに、電極形成用板11から不要領域削除工程を行う。 That is, without an insulating member filling step after the hole formation step, the unnecessary area deletion process from the electrode forming plate 11. この際、図7(a)、(b)に示すように、フィン兼用電極2aを形成するためのフィン9の形成領域と固定面8の形成領域と、隣り合う固定面8同士を連結するための連結部位13とを除いた不要領域を取り除いて隣り合う固定面同士が前記連結部位13のみを介して連結されている状態とする。 At this time, FIG. 7 (a), the (b), the formation region of the fins 9 for forming the fins combined electrode 2a and the formation region of the fixed surface 8, for connecting the fixing surface 8 adjacent to each other a state in which the fixing surface adjacent to remove the unnecessary area other than the connecting portion 13 of which is connected via only the connecting portion 13.

そして、該不要領域削除工程後に、前記フィン9を前記固定面8の両側から折り曲げて固定面8の両側にフィン9を立設し、複数のフィン兼用電極2aを一括して形成し、この一括形成した複数のフィン兼用電極2aを対応する熱電変換素子5(5a,5b)に固定する時または固定後に前記連結部位13を断ち切る工程を有するようにする。 Then, after the unnecessary area deleting step, the fins 9 erected fins 9 on either side of the fixed surface 8 by bending from both sides of the fixed surface 8, collectively formed a plurality of fins combined electrode 2a, the batch thermoelectric conversion element 5 (5a, 5b) to the corresponding plurality of fins shared electrodes 2a formed to have a step of cutting off the connecting portion 13 when or after fixing to fixed. この連結部材13の断ち切り方は特に限定されるものではないが、例えば図7(c)に示すように、連結部材13の位置にのみ突起状の切断刃を有する治具16等を用いて、複数の連結部材13を一括して断つようにすると、効率的である。 This cut off way of the connecting member 13 is not particularly limited, for example, as shown in FIG. 7 (c), by using a jig 16 or the like having a protruding cutting edge only at the position of the connecting member 13, If so sever collectively a plurality of connecting members 13, it is efficient.

また、連結部位13の形状や大きさ等は特に限定されるものでなく、適宜設定されるものであり、フィン兼用電極2aを一括形成する際に、フィン兼用電極2aを固定面8を介して連結可能で、かつ、連結部位13を断ち切る工程時に、フィン兼用電極2aに支障を来すことなく容易に断ちきることができる態様に形成すればよい。 The shape and size of the connecting portion 13 is not limited in particular, which is appropriately set, when collectively forming the fins combined electrode 2a, the fins combined electrode 2a via a fixed surface 8 connectable, and during the step of breaking the connecting portion 13 may be formed in a manner that may be as possible easily cut off without disturbing the fins combined electrode 2a.

さらに、上記実施形態例において、電極区分け孔7に設けた絶縁部材6の少なくとも一つに応力緩和用の亀裂を形成する亀裂形成工程を有するようにしてもよい。 Further, in the above embodiment, it may have a crack forming step of forming a crack for stress relief in at least one insulating member 6 provided on the electrode divided hole 7. この亀裂形成工程は、絶縁部材6が樹脂の場合、この樹脂が固まってから適宜のタイミングで行われるものであり、例えば、一括形成したフィン兼用電極2aを対応する熱電変換素子5(5a,5b)に固定すると同時、または固定後に行うことができる。 This crack formation process, when the insulating member 6 is a resin, which resin is performed at appropriate timing from the solidified, for example, a thermoelectric conversion element 5 (5a corresponding fin shared electrodes 2a which collectively formed, 5b When fixed) can be carried out simultaneously with, or after fixing, the. なお、図7(c)に示した連結部材13を断ち切る治具16のような治具を用いると、複数の絶縁部材6に一括して亀裂を形成できる。 Note that a jig such as jig 16 to break the connecting member 13 shown in FIG. 7 (c), cracks can be formed collectively in a plurality of insulating members 6.

上記のような亀裂形成工程を有すると、例えば熱電変換モジュールを使用していくうちに、フィン兼用電極2aを形成する金属等の導電性部材と電極区分け孔7に設けた絶縁部材6との熱膨張率差等に起因する歪みによって絶縁部材6に応力が加えられても、その応力を絶縁部材6に形成された亀裂によって緩和できるので、熱電変換モジュールの長期信頼性を高めることができる。 When a crack forming step as described above, for example, during the course of a thermoelectric conversion module, the heat of the insulating member 6 provided on the conductive member and the electrode divided hole 7 of the metal or the like to form a fin combined electrode 2a the distortion due to expansion differentially even stress is applied to the insulating member 6, since the stress can be relieved by the crack formed in the insulating member 6, it is possible to enhance the long-term reliability of the thermoelectric conversion module.

さらに、上記実施形態例では、熱電変換素子5(5a,5b)の両端側の電極2をフィン兼用電極2aとしたが、熱電変換素子5(5a,5b)の一端側の電極2のみをフィン兼用電極2aとし、他端側は従来のような平面状の電極としてもよい。 Furthermore, in the above embodiment, both ends but the side of the electrode 2 and the fin combined electrode 2a, the thermoelectric conversion element 5 (5a, 5b) at one end of the electrodes 2 only fins of the thermoelectric conversion element 5 (5a, 5b) and the combined electrode 2a, the other end may be a planar electrode as in the prior art. また、熱電変換素子5(5a,5b)の両端側の電極2のうち、少なくとも一端側の一部領域にのみフィン兼用電極2aを設け、他の領域の電極2は平面状の電極としてもよい。 Also, the thermoelectric conversion element 5 (5a, 5b) of the ends of the side electrodes 2, provided with fins combined electrode 2a only in a partial region of the at least one end, the electrode 2 of the other region may be a planar electrode .

さらに、上記実施形態例では、熱電変換素子5(5a,5b)を断面形状が矩形状の素子としたが、熱電変換素子5(5a,5b)の形状は特に限定されるものでなく、適宜設定されるものであり、例えば、その断面形状が円形状の素子としてもよいし、他の形状の素子としてもよい。 Furthermore, in the above embodiment, the thermoelectric conversion element 5 (5a, 5b) is a cross-sectional shape and a rectangular element, the shape of the thermoelectric conversion element 5 (5a, 5b) is not specifically limited, as appropriate is intended to be set, for example, the cross-sectional shape may be a circular device may be a device other shapes.

さらに、上記実施形態例では、熱電変換モジュール1は、平面形状を略長方形状に形成したが、平面形状が略正方形状の熱電変換モジュール1としてもよいし、平面形状が略円形状や略楕円形状の熱電変換モジュール1としてもよい。 Furthermore, in the above embodiment, the thermoelectric conversion module 1 has formed the planar shape in a substantially rectangular shape, to a plane shape may be as a thermoelectric conversion module 1 of substantially square shape, planar shape substantially circular shape or a substantially elliptical or as a thermoelectric conversion module 1 of the shape.

本発明に係る熱電変換モジュールの製造方法の一実施形態例におけるフィン兼用電極の一括形成方法を模式的に示す工程図である。 Bulk forming method of the fins combined electrode in an embodiment of the manufacturing method of the thermoelectric conversion module according to the present invention is a process diagram schematically showing. 上記実施形態例における、別の態様のフィン兼用電極の一括形成方法を模式的に示す工程図である。 In the embodiment example, it is a process diagram schematically showing the batch forming method of the fins combined electrode of another aspect. 図1の各工程において形成される各構成部位を示す説明図である。 It is an explanatory view showing each structure site formed in each step of Figure 1. 図2の各工程において形成される各構成部位を示す説明図である。 It is an explanatory view showing each structure site formed in each step of Figure 2. 本発明に係る熱電変換モジュールの一実施形態例を示す説明図である。 Is an explanatory view showing an embodiment of a thermoelectric conversion module according to the present invention. 本発明に係る熱電変換モジュールの製造方法の別の実施形態例を適用したフィン兼用電極形成の一工程を示す説明図である。 It is an explanatory view showing a step of the fin shared electrodes formed according to the another example embodiment of a method for manufacturing a thermoelectric conversion module according to the present invention. 本発明の熱電変換モジュール製造方法の他の態様のフィン兼用電極形成における不要領域削除工程により形成される部位を示す平面説明図(a)、(b)と、連結部材を断ち切る工程を模式的に示す断面説明図(c)である。 Plan view showing a portion formed by the unnecessary area deleting step in the fin combined electrode formed of another embodiment of the thermoelectric conversion module manufacturing method of the present invention (a), (b) and the step of breaking the connecting member schematically it is a cross-sectional view showing (c). 従来の熱電変換モジュールの例を側面図により示す説明図である。 An example of a conventional thermoelectric conversion module is an explanatory diagram showing a side view.

符号の説明 DESCRIPTION OF SYMBOLS

2 電極 2 フィン兼用電極 3 素子嵌合孔 5,5a,5b 熱電変換素子 6 絶縁部材 8 固定面 9 フィン 10 不要領域 11 電極形成用板 13 連結部位 30 絶縁性基板 2 electrodes 2 fin combined electrode 3 elements fitting holes 5, 5a, 5b thermoelectric conversion element 6 insulating member 8 fixed surface 9 fin 10 unnecessary region 11 electrode forming plate 13 connecting portion 30 insulating substrate

Claims (7)

  1. 複数の素子嵌合孔を形成した絶縁性基板の素子嵌合孔にP型とN型の対応する熱電変換素子をそれぞれ貫通嵌合し、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に電極を設け、該電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とを電気的に接続して熱電変換素子の回路を形成し、前記熱電変換素子の一端側と他端側に設ける電極のうち少なくとも一方側の電極を、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成す熱電変換モジュールの製造方法であって、前記フィン兼用電極を複数一括して形成するための電極形成用板を用意して該電極形成用板に前記固定面の形成部位を電 P-type and N-type corresponding thermoelectric conversion element fitted through each of the plurality of elements elements of the insulating substrate formed with the fitting hole fitting hole, the through direction of the element fitting hole of the thermoelectric conversion element an electrode at one end and the other end is provided, and said P-type thermoelectric conversion elements and the N-type thermoelectric conversion elements corresponding through the electrodes electrically connected to form a circuit of the thermoelectric conversion element, wherein at least one side of the electrode among the electrodes provided on the one end and the other end of the thermoelectric conversion element, from both ends of the fixed surface and the fixed surface which is fixed to one end surface of the thermoelectric conversion element pairs in P-type and N-type a method of manufacturing a U-shaped thermoelectric conversion module formed by the fins combined electrode with a fin provided upright on opposite sides of the thermoelectric conversion element, the electrode for forming a plurality collectively the fins combined electrode It is prepared forming plate collector formation region of the fixing surface to the electrode forming plate 区分け孔を介して整列状に複数形成する孔形成工程と、該孔形成工程後に前記電極区分け孔に絶縁部材を充填する絶縁部材充填工程と、該絶縁部材充填工程後に前記電極形成用板から前記フィンの形成領域と前記固定面の形成領域を除いた不要領域を取り除いて隣り合う固定面同士が前記絶縁部材のみを介して連結されている状態とする不要領域削除工程と、該不要領域削除工程後に前記フィンを前記固定面の両側から折り曲げて固定面の両側にフィンを立設する工程を有して複数のフィン兼用電極を一括して形成し、この一括形成した複数のフィン兼用電極を対応する熱電変換素子に一括固定する工程を有することを特徴とする熱電変換モジュールの製造方法。 Wherein the hole forming step of forming a plurality aligned shape through the sorting hole, an insulating member filling step of filling the insulating member to the electrode divided hole after the hole formation process, from the electrode forming plate after the insulating member filling step and an unnecessary area deleting step of a state in which the fixed surface adjacent to remove the unnecessary region excluding the formation region of the fixing surface and forming regions of the fins are connected through only the insulating member, the unnecessary area deleting step It said fins have a step of standing the fins on either side of the fixing surface by bending from both sides of the fixing surface to form collectively a plurality of fins combined electrode after corresponding a plurality of fins shared electrodes that this bulk form method for manufacturing a thermoelectric conversion module and a step of collectively fixed to the thermoelectric conversion element.
  2. 絶縁部材は耐熱性を有する樹脂とすることを特徴とする請求項1記載の熱電変換モジュールの製造方法。 Insulating member manufacturing method of the thermoelectric conversion module according to claim 1, characterized in that the resin having heat resistance.
  3. 電極区分け孔に設けた絶縁部材の少なくとも一つに応力緩和用の亀裂を形成する亀裂形成工程を有することを特徴とする請求項1または請求項2記載の熱電変換モジュールの製造方法。 The process according to claim 1 or thermoelectric conversion module of claim 2 wherein characterized in that it has a crack forming step of forming a crack for at least one stress relaxation of the insulating member provided on the electrode divided hole.
  4. 絶縁部材充填工程において電極区分け孔に充填する絶縁部材を前記電極区分け孔の貫通方向と前記電極形成用板の面方向とにはみ出す態様に充填し、前記電極区分け孔の面方向の不要領域にはみ出した絶縁部材を不要領域削除工程時に電極形成用板の不要領域と共に除くことを特徴とする請求項1または請求項2または請求項3記載の熱電変換モジュールの製造方法。 An insulating member filling the electrode division hole in the insulating member filling process to fill the manner protruding in the surface direction of the electrode forming plate and the through direction of the electrode division hole, protrudes unnecessary region in the planar direction of the electrode divided hole the process according to claim 1 or claim 2 or claim 3 thermoelectric conversion module, wherein the excluding with unnecessary area of ​​the insulating member a plate electrode formed at unnecessary area deletion process was.
  5. 複数の素子嵌合孔を形成した絶縁性基板の素子嵌合孔にP型とN型の対応する熱電変換素子をそれぞれ貫通嵌合し、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に電極を設け、該電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とを電気的に接続して熱電変換素子の回路を形成し、前記熱電変換素子の一端側と他端側に設ける電極のうち少なくとも一方側の電極を、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成す熱電変換モジュールの製造方法であって、前記フィン兼用電極を複数一括して形成するための電極形成用板を用意して該電極形成用板に前記固定面の形成部位を電 P-type and N-type corresponding thermoelectric conversion element fitted through each of the plurality of elements elements of the insulating substrate formed with the fitting hole fitting hole, the through direction of the element fitting hole of the thermoelectric conversion element an electrode at one end and the other end is provided, and said P-type thermoelectric conversion elements and the N-type thermoelectric conversion elements corresponding through the electrodes electrically connected to form a circuit of the thermoelectric conversion element, wherein at least one side of the electrode among the electrodes provided on the one end and the other end of the thermoelectric conversion element, from both ends of the fixed surface and the fixed surface which is fixed to one end surface of the thermoelectric conversion element pairs in P-type and N-type a method of manufacturing a U-shaped thermoelectric conversion module formed by the fins combined electrode with a fin provided upright on opposite sides of the thermoelectric conversion element, the electrode for forming a plurality collectively the fins combined electrode It is prepared forming plate collector formation region of the fixing surface to the electrode forming plate 区分け孔を介して整列状に複数形成する孔形成工程と、該孔形成工程後に前記電極形成用板から前記フィンの形成領域と前記固定面の形成領域と隣り合う固定面同士を連結するための連結部位とを除いた不要領域を取り除いて隣り合う固定面同士が前記連結部位のみを介して連結されている状態とする不要領域削除工程と、該不要領域削除工程後に前記フィンを前記固定面の両側から折り曲げて固定面の両側にフィンを立設する工程を有して複数のフィン兼用電極を一括して形成し、この一括形成した複数のフィン兼用電極を対応する熱電変換素子に固定する時または固定後に前記連結部位を断ち切る工程を有することを特徴とする熱電変換モジュールの製造方法。 A hole forming step of forming a plurality aligned shape through the sorting hole from the electrode forming plate after the hole forming process for connecting the fixing surface adjacent the formation region of the fixing surface and forming region of the fin and an unnecessary area deleting step of a state in which the fixed surface adjacent to remove the unnecessary area other than the connecting portion are connected via only the connecting portion, the fin after the unnecessary region removing step of the fixing surface when a step of upright fins collectively formed a plurality of fins combined electrode on both sides of the fixed surface by bending from both sides to fix the plurality of fins shared electrodes that this simultaneously formed in the corresponding thermoelectric element or the method of manufacturing the thermoelectric conversion module, characterized in that it comprises a step of cutting off the connecting portion after fixing.
  6. 複数の素子嵌合孔を縦横に整列状に形成した部位を含む絶縁性基板を有し、P型とN型の熱電変換素子が前記絶縁性基板の対応する素子嵌合孔にそれぞれ貫通嵌合されており、前記熱電変換素子の素子嵌合孔への貫通方向の一端側と他端側に設けられた電極を介して対応する前記P型の熱電変換素子とN型の熱電変換素子とが電気的に接続されて熱電変換素子の回路が形成されており、前記熱電変換素子の一端側と他端側に設けられた電極のうち少なくとも一方側の電極は、P型とN型の対の熱電変換素子の一端面に固定された固定面と該固定面の両端側から前記熱電変換素子の反対側に立設されたフィンとを備えたコ字形状のフィン兼用電極と成しており、フィン兼用電極が絶縁部材を介して複数連結されてフィン兼用電極列が形成され、 An insulating substrate including a portion formed in aligned form a plurality of elements fitting hole in the vertical and horizontal directions, respectively through the fitting P-type and N-type thermoelectric conversion element to the corresponding element fitting hole of the insulating substrate are, the said P-type thermoelectric conversion elements and the N-type thermoelectric conversion elements corresponding via electrodes provided on the one end and the other end of the through-direction of the device fitting hole of the thermoelectric conversion element are electrically connected are formed circuits of the thermoelectric conversion element, at least one side of the electrodes of one end and the other provided on the side electrode of the thermoelectric conversion element, a pair of P-type and N-type and it forms a fin combined electrode of U-shape with a fin provided upright on opposite sides of the thermoelectric conversion element from the both ends of the fixing surface and the fixed surface which is fixed to one end surface of the thermoelectric conversion element, multiple concatenated with fins combined electrode column fins combined electrode via the insulating member is formed, フィン兼用電極列は縦または横に整列状に配置されたP型とN型の複数の熱電変換素子の端面に一括して固定されていることを特徴とする熱電変換モジュール。 The thermoelectric conversion module fins combined electrode array, characterized in that it is fixed collectively on the end surface of the P type disposed aligned shaped vertically or horizontally and N-type multiple thermoelectric conversion element.
  7. 絶縁部材は耐熱性の樹脂としたことを特徴とする請求項6記載の熱電変換モジュール。 Insulating member thermoelectric conversion module according to claim 6, characterized in that a heat-resistant resin.
JP2005117188A 2005-04-14 2005-04-14 Thermoelectric transducing module Pending JP2006295063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005117188A JP2006295063A (en) 2005-04-14 2005-04-14 Thermoelectric transducing module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005117188A JP2006295063A (en) 2005-04-14 2005-04-14 Thermoelectric transducing module

Publications (1)

Publication Number Publication Date
JP2006295063A true true JP2006295063A (en) 2006-10-26

Family

ID=37415276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005117188A Pending JP2006295063A (en) 2005-04-14 2005-04-14 Thermoelectric transducing module

Country Status (1)

Country Link
JP (1) JP2006295063A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175556A (en) * 1991-12-25 1993-07-13 Nippondenso Co Ltd Thermoelectric converter
JPH0997930A (en) * 1995-07-27 1997-04-08 Aisin Seiki Co Ltd Thermoelectric cooling module and manufacture thereof
JP2006287067A (en) * 2005-04-01 2006-10-19 Denso Corp Thermoelectric conversion device and method of manufacturing the device
JP2006287066A (en) * 2005-04-01 2006-10-19 Denso Corp Thermoelectric conversion apparatus and method of manufacturing the apparatus
JP2006294648A (en) * 2005-04-05 2006-10-26 Denso Corp Thermoelectric conversion device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175556A (en) * 1991-12-25 1993-07-13 Nippondenso Co Ltd Thermoelectric converter
JPH0997930A (en) * 1995-07-27 1997-04-08 Aisin Seiki Co Ltd Thermoelectric cooling module and manufacture thereof
JP2006287067A (en) * 2005-04-01 2006-10-19 Denso Corp Thermoelectric conversion device and method of manufacturing the device
JP2006287066A (en) * 2005-04-01 2006-10-19 Denso Corp Thermoelectric conversion apparatus and method of manufacturing the apparatus
JP2006294648A (en) * 2005-04-05 2006-10-26 Denso Corp Thermoelectric conversion device

Similar Documents

Publication Publication Date Title
US5847930A (en) Edge terminals for electronic circuit modules
US4730459A (en) Thermoelectric modules, used in thermoelectric apparatus and in thermoelectric devices using such thermoelectric modules
US5966939A (en) Multistage thermoelectric cooling device
US4687879A (en) Tiered thermoelectric unit and method of fabricating same
JP2006294699A (en) Heat sink
JP2004208411A (en) Semiconductor module for half bridge circuit
JPH07263754A (en) Led element and manufacture of it
JP2004296663A (en) Semiconductor device
JP2008235469A (en) Optical semiconductor device, and manufacturing method thereof
JP2011009410A (en) Semiconductor module
JPH0955535A (en) Surface mount type led element and its manufacture
US6391676B1 (en) Thermoelectric module and a method of fabricating the same
US3261079A (en) Fabrication of thermoelectric apparatus
JP2004104041A (en) Thermoelectric converting device and method for manufacturing the same
JP2002110893A (en) Semiconductor device
JP2005064441A (en) Semiconductor device
JP2005079210A (en) Thermoelectric conversion device
CN102237343A (en) Semiconductor package realizing connection by connecting sheets and manufacturing method for semiconductor package
US6812554B2 (en) Semiconductor device and a method of manufacturing the same
JP2008205129A (en) Circuit block and manufacturing method thereof
JP2006287101A (en) Power module and its manufacturing method
US20090120677A1 (en) Wiring substrate and associated manufacturing method
JP2010129550A (en) Power semiconductor module
JP2006066813A (en) Semiconductor device
US3449173A (en) Thermoelectric couple with soft solder electrically connecting semi-conductors and method of making same

Legal Events

Date Code Title Description
A621 Written request for application examination

Effective date: 20080411

Free format text: JAPANESE INTERMEDIATE CODE: A621

A977 Report on retrieval

Effective date: 20101220

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110419

A02 Decision of refusal

Effective date: 20110816

Free format text: JAPANESE INTERMEDIATE CODE: A02