JP2006278316A5 - - Google Patents
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- Publication number
- JP2006278316A5 JP2006278316A5 JP2006025000A JP2006025000A JP2006278316A5 JP 2006278316 A5 JP2006278316 A5 JP 2006278316A5 JP 2006025000 A JP2006025000 A JP 2006025000A JP 2006025000 A JP2006025000 A JP 2006025000A JP 2006278316 A5 JP2006278316 A5 JP 2006278316A5
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- pivot
- ion beam
- axis
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/049,264 US7057192B2 (en) | 2004-02-06 | 2005-02-02 | Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006278316A JP2006278316A (ja) | 2006-10-12 |
JP2006278316A5 true JP2006278316A5 (zh) | 2006-11-24 |
Family
ID=37212834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006025000A Pending JP2006278316A (ja) | 2005-02-02 | 2006-02-01 | リボンビームで半導体ウエハのシリーズ処理するための放射走査アーム及びコリメータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2006278316A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080116390A1 (en) * | 2006-11-17 | 2008-05-22 | Pyramid Technical Consultants, Inc. | Delivery of a Charged Particle Beam |
JP2009081032A (ja) * | 2007-09-26 | 2009-04-16 | Axcelis Technologies Inc | リボン形ビームを用いたイオン注入クラスターツール |
JP4471009B2 (ja) * | 2008-02-12 | 2010-06-02 | 日新イオン機器株式会社 | イオン注入方法およびイオン注入装置 |
US9437392B2 (en) | 2011-11-02 | 2016-09-06 | Varian Semiconductor Equipment Associates, Inc. | High-throughput ion implanter |
CN115763310B (zh) * | 2022-11-16 | 2023-06-30 | 浙江鑫钰新材料有限公司 | 一种离子注入装置及方法 |
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2006
- 2006-02-01 JP JP2006025000A patent/JP2006278316A/ja active Pending
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