JP2006199027A - Mask and its manufacturing process for stencil printing - Google Patents

Mask and its manufacturing process for stencil printing Download PDF

Info

Publication number
JP2006199027A
JP2006199027A JP2005356774A JP2005356774A JP2006199027A JP 2006199027 A JP2006199027 A JP 2006199027A JP 2005356774 A JP2005356774 A JP 2005356774A JP 2005356774 A JP2005356774 A JP 2005356774A JP 2006199027 A JP2006199027 A JP 2006199027A
Authority
JP
Japan
Prior art keywords
mask
protective film
film layer
stencil printing
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005356774A
Other languages
Japanese (ja)
Other versions
JP4817139B2 (en
Inventor
Tetsuya Ueda
上田哲也
Tadashi Shimoyama
正 下山
Yoshihiro Taniguchi
谷口義博
Takanobu Mizuta
水田孝信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Process Lab Micron Co Ltd
Original Assignee
Process Lab Micron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Process Lab Micron Co Ltd filed Critical Process Lab Micron Co Ltd
Priority to JP2005356774A priority Critical patent/JP4817139B2/en
Publication of JP2006199027A publication Critical patent/JP2006199027A/en
Application granted granted Critical
Publication of JP4817139B2 publication Critical patent/JP4817139B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that printing solder paste (cream solder) by stencil printing and forming solder terminals for mounting of electronic components causes deterioration in snap off of a printing plate and worsening of the solder paste omission as the printing pattern density becomes higher and results in bleeding of solder paste (cream solder) and splits, and in failures such as omissions or chipping of solder terminals. <P>SOLUTION: Metal top coat 2 is formed by plating on the mask substrate 1 and the openings 4 are created by laser beam irradiation. Additionally, the metal coat 2 for masks is formed on the conductive substrate 1 by plating and the openings 4 are created by laser beam irradiation. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、電子部品や半導体チップを高密度に実装するための接続用の導電性端子を孔版印刷で形成する際に用いられるクリームはんだ等の導電性ペースト印刷用のマスクに関し、特にクリームはんだがスキージによって押出される開口部の周辺のマスク表面に盛上りの発生や異物等の付着がなく、且つ平滑な壁面とシャープなエッジの開口部を有し、従って、版離れ性とクリームはんだの転写性に優れたマスク、及びそのマスクの製造方法に関する。   The present invention relates to a mask for conductive paste printing such as cream solder used when forming conductive terminals for connection for mounting electronic components and semiconductor chips at high density by stencil printing. The mask surface around the opening pushed out by the squeegee has no swell and no foreign matter attached, and has a smooth wall surface and sharp edge opening. The present invention relates to a mask having excellent properties and a method for manufacturing the mask.

携帯電話を筆頭に、電子回路の小型軽量化の要請から、プリント配線基板に電子部品を高密度に、特にプリント配線基板の両面に電子部品を高密度に実装することが広く行われている。この高密度実装においては、プリント配線基板面に電子部品を実装するために、プリント配線基板にクリームはんだを印刷し、はんだ端子の高精細な配線パターンを形成し、該はんだ端子に電子部品や半導体チップを搭載し、はんだリフロー炉を通して電子部品や半導体チップの実装を行う。
この際、はんだ端子の配線パターンを欠陥なく、且つ高精細に印刷するための印刷版が種々提案され、実用に供されている。
With the demand for miniaturization and weight reduction of electronic circuits, such as mobile phones, electronic components are mounted on a printed wiring board with high density, and particularly electronic components are mounted on both sides of the printed wiring board with high density. In this high-density mounting, in order to mount an electronic component on the surface of the printed wiring board, cream solder is printed on the printed wiring board to form a high-definition wiring pattern of the solder terminal, and the electronic component or semiconductor is formed on the solder terminal. A chip is mounted, and electronic components and semiconductor chips are mounted through a solder reflow furnace.
At this time, various printing plates for printing the wiring patterns of the solder terminals without defects and with high definition have been proposed and put into practical use.

例えば、金属や樹脂板にレーザー光を照射して配線パターン状の開口部を形成したマスクが知られている。特にステンレス板を用いたメタルマスクは広く実用に供されている。
特開昭62−90241 しかし、上記したステンレスマスクにおいては、レーザー光で開口部を形成した際に、マスク基材が溶融したり、アブレーション等を起こし、開口部のエッジがだれたり、開口部壁面のレーザー光の出射側近辺に突起(引きちぎれ痕)が残ったり、又開口部分の基材が飛散するために開口部周辺のマスク表面が盛上ったり、所謂ドロスが付着したりする。更に、開口部周辺に熱歪が生じる。そのためマスクと被印刷物との密着性が低下し、クリームはんだが滲んだりする。又開口部の壁面の突起、凹凸により、クリームはんだの抜け性が悪くなり、転写性が低下する。又、マスクの板厚が薄い場合、製造時のマスク基材のハンドリングが容易でなく、非常に煩雑であった。
For example, a mask is known in which a metal or resin plate is irradiated with laser light to form a wiring pattern-shaped opening. In particular, metal masks using stainless steel plates are widely used.
However, in the above-described stainless steel mask, when the opening is formed with a laser beam, the mask base material is melted, ablated, etc. Protrusions (tear marks) remain in the vicinity of the laser beam emission side, or the mask surface around the opening is raised or so-called dross adheres due to scattering of the base material in the opening. Further, thermal distortion occurs around the opening. As a result, the adhesion between the mask and the substrate is reduced, and the cream solder is smeared. In addition, due to the protrusions and irregularities on the wall surface of the opening, the ability to remove the cream solder is deteriorated and the transferability is lowered. Further, when the mask is thin, it is not easy to handle the mask base material at the time of manufacture, which is very complicated.

上記問題を改良する方法として、開口部を形成した後、マスクをサンドブラスト処理により研磨する方法が提案されている。
特開平6−39988 しかし該方法では開口部のエッジのだれは改善されなし、一部のドロスは研削できるが、十分ではない。又サンドブラスト操作が煩雑であった。一方、サンドブラスト処理に代えて電解研磨により開口部部壁面を平滑にする方法も提案されている。 特開平6−918396
As a method for improving the above problem, there has been proposed a method of polishing a mask by sandblasting after forming an opening.
However, this method does not improve the edge of the opening, and some dross can be ground, but it is not sufficient. Moreover, the sandblasting operation was complicated. On the other hand, a method for smoothing the wall surface of the opening by electrolytic polishing instead of sandblasting has also been proposed. JP-A-6-918396

上記したような方法で作られたマスクを用いても開口部のエッジのだれ、開口部周辺部のマスク面の盛上り、ドロス付着は十分には解消せず、且つ開口部壁面の平滑性も不十分であり、端子パターンがより高精細になるに従って、印刷版の版離れが悪くなったり、クリームはんだの版からの抜けが悪くなり、クリームはんだの転写性の悪化を招く。その結果転写されたクリームはんだが滲んだり、形成されたはんだ端子に欠け、割れ、抜け等の欠陥が発生し、歩留まり低下の大きな原因となっていた。又印刷スピードを上げると、前記した欠陥がより発生しやすくなり、印刷スピードを早くすることもできなかった。   Even if a mask made by the above-described method is used, the dripping of the edge of the opening, the rising of the mask surface around the opening, and the dross adhesion are not sufficiently eliminated, and the smoothness of the wall of the opening is also eliminated. As the terminal pattern becomes higher in definition, the separation of the printing plate becomes worse and the cream solder does not come off from the plate, resulting in deterioration of transferability of the cream solder. As a result, the transferred cream solder oozes out, and defects such as chipping, cracking, and disconnection occur in the formed solder terminal, which is a major cause of yield reduction. Further, when the printing speed is increased, the aforementioned defects are more likely to occur, and the printing speed cannot be increased.

更に、近年環境上の配慮から鉛を含有しない、所謂鉛フリーはんだが使用されるようになってきたが、該鉛フリーのクリームはんだは従来のクリームはんだに比して転写性に劣り、前記した欠陥が発生し易い。   Furthermore, in recent years, so-called lead-free solder that does not contain lead has been used for environmental considerations, but the lead-free cream solder is inferior in transferability as compared with conventional cream solder, and has been described above. Defects are likely to occur.

本発明の目的は、プリント配線基板等に高密度実装用のはんだ端子の形成において、孔版印刷によりクリームはんだを印刷した際に、版離れ性及びクリームはんだの抜け性に優れ、その結果前記したクリームはんだの滲み、はんだ端子の欠け、抜け、割れ等の欠陥の発生を防止し、且つ印刷スピードを早くできる孔版印刷用のマスク、及びそのマスクの製造方法を提供することにある。   The object of the present invention is to form a solder terminal for high-density mounting on a printed wiring board or the like, and when the cream solder is printed by stencil printing, it is excellent in stencil release and cream solder detachment. An object of the present invention is to provide a mask for stencil printing which can prevent the occurrence of defects such as solder bleeding, chipping of solder terminals, disconnection and cracking, and increase the printing speed, and a method for manufacturing the mask.

本発明者らは、レーザーで開口部を形成する際に、開口部のエッジをシャープにし、開口部周辺部の盛上りやドロスの発生を防止し、且つ開口部壁面を平滑にする方法を検討し、本発明を完成した。   The inventors of the present invention have studied a method for sharpening the edge of the opening, preventing the swell and dross from occurring around the opening, and smoothing the wall of the opening when forming the opening with a laser. The present invention has been completed.

すなわち、本発明は、
孔版印刷用のマスクであって、マスク用基板の両面に保護膜層を積層し、該保護膜層の上からレーザー光を照射して印刷パターンの貫通開口部をマスク用基板に形成し、保護膜層を剥離してなる孔版印刷用のマスク、及び
前記マスクにおいて、保護膜層が金属層、又は熱硬化性樹脂層である前記記載の孔版印刷用のマスク、及び
That is, the present invention
It is a mask for stencil printing, and a protective film layer is laminated on both sides of the mask substrate, and a laser beam is irradiated from above the protective film layer to form a through-opening portion of the printing pattern on the mask substrate, thereby protecting it. A mask for stencil printing formed by peeling a film layer, and the mask for stencil printing described above, wherein the protective film layer is a metal layer or a thermosetting resin layer, and

マスク用基板にメッキ法によって金属の保護膜層を積層してなる前記記載の孔版印刷用のマスク、及び
マスク用基板がステンレスからなる前記記載の孔版印刷用のマスク、及び
貫通開口部を形成した後、電解研磨を行ってから保護膜層を剥離してなる前記記載の孔版印刷用のマスク、及び
The mask for stencil printing described above, which is formed by laminating a metal protective film layer on the mask substrate by plating, and the mask for stencil printing described above, wherein the mask substrate is made of stainless steel, and a through opening. Then, the mask for stencil printing described above, wherein the protective film layer is peeled off after electrolytic polishing, and

孔版印刷用のマスクの製造方法であって、マスク用基板の両面に保護膜層を積層する工程、保護膜層の上からレーザー光を照射して印刷パターンの貫通開口部をマスク用基板に形成する工程、マスク用基板から保護膜層を剥離してなる工程、からなる孔版印刷用のマスクの製造方法、及び
保護膜層が金属層、又は熱硬化性樹脂層である前記記載の孔版印刷用のマスクの製造方法、及び
A method of manufacturing a mask for stencil printing, a process of laminating protective film layers on both sides of a mask substrate, and irradiating a laser beam on the protective film layer to form a through opening portion of a printing pattern on the mask substrate A process for removing the protective film layer from the mask substrate, a method for producing a mask for stencil printing, and the protective film layer as described above, wherein the protective film layer is a metal layer or a thermosetting resin layer. Mask manufacturing method, and

マスク用基板に保護膜層を積層する工程において、金属のメッキ法による前記記載の孔版印刷用のマスクの製造方法、及び
マスク用基板がステンレスからなる前記記載の孔版印刷用のマスクの製造方法、及び
貫通開口部を形成する工程の後、電解研磨工程を追加してなる前記記載の孔版印刷用のマスクの製造方法、である。
In the step of laminating the protective film layer on the mask substrate, the method for producing a mask for stencil printing as described above by a metal plating method, and the method for producing a mask for stencil printing as described above, wherein the mask substrate is made of stainless steel, And the manufacturing method of the mask for stencil printing of the said description formed by adding an electropolishing process after the process of forming a through-opening part.

本発明の孔版印刷用のマスクはシャープなエッジと平滑な壁面の開口部を有し、且つ開口部周辺に盛上りやドロスの付着がない。従ってクリームはんだを印刷した際、クリームはんだの滲みが生じなく、クリームはんだの抜け性及び版離れ性が優れるため、印刷スピードを早くしてもクリームはんだの転写性不良に由来するはんだ端子の割れ、抜け、欠け等の欠陥を防止することができ、クリームはんだの滲みの発生もなく、はんだ端子形成工程の生産性及び歩留まりが大きく向上する。又、マスク用基板が薄くなっても製造工程でのマスク用基板のハンドリングを容易に行える。   The mask for stencil printing of the present invention has a sharp edge and a smooth opening on the wall surface, and there is no swell or adhesion of dross around the opening. Therefore, when the cream solder is printed, the cream solder does not bleed, and the cream solder is easily removed and the plate is peeled off. Defects such as omission and chipping can be prevented, cream solder bleeding does not occur, and the productivity and yield of the solder terminal forming process are greatly improved. Even if the mask substrate is thin, the mask substrate can be easily handled in the manufacturing process.

以下、本発明の孔版印刷用のマスク、及びその製造方法について図を用いて詳細に説明する。
図1は本発明のマスクの製造工程の1例を表す。図1(a)はマスク用基板1に保護膜層2を形成した断面を表す。マスク用基板としては、レーザー光で加工し易く、且つ印刷版としての特性に優れる種々の金属や樹脂、金属と樹脂の積層体が挙げられ、具体的には、ニッケル、ニッケル合金、銅、銅合金、鉄、アルミ、ステンレス等の金属、ポリイミド樹脂等の熱硬化性樹脂、PPS、PES、PEEK、液晶樹脂等の高強度で且つ耐熱性に優れた熱可塑性樹脂、及び前記金属と樹脂の積層体等が挙げられ。該マスク用基板の厚さは、形成するはんだ端子の仕様にもよるが、通常5〜300μm程度である。
Hereinafter, the mask for stencil printing of this invention and its manufacturing method are demonstrated in detail using figures.
FIG. 1 shows an example of the manufacturing process of the mask of the present invention. FIG. 1A shows a cross section in which a protective film layer 2 is formed on a mask substrate 1. Examples of the mask substrate include various metals, resins, and laminates of metals and resins that are easy to process with laser light and have excellent properties as printing plates. Specifically, nickel, nickel alloys, copper, copper Alloys, metals such as iron, aluminum, and stainless steel, thermosetting resins such as polyimide resins, thermoplastic resins with high strength and excellent heat resistance such as PPS, PES, PEEK, and liquid crystal resins, and lamination of the above metals and resins Such as the body. The thickness of the mask substrate is usually about 5 to 300 μm, although it depends on the specifications of the solder terminals to be formed.

マスク用基板に積層される保護膜層としては、薄膜のマスクを製造する際にマスク用基板を補強でき、マスク用基板からの剥離が容易で、且つレーザー光で開口部を形成する際に悪影響を及ぼさなければ特に限定はなく、種々の金属層や樹脂層が挙げられる。特に熱特性等の点からニッケル、鉄、銅から選ばれた金属を1種または2種以上を含有する金属層、ポリイミド等の熱硬化性樹脂層が好ましい。前記した保護膜層をマスク用基板に積層するには、保護膜の薄膜をマスク基板に接着剤や熱融着で貼り合わせる方法、前記した保護膜の金属をメッキ、スパッタ、蒸着等で積層する方法、ポリイミド樹脂の前駆体を塗布・加熱硬化する方法、前記した熱可塑性樹脂を溶融積層する方法等が挙げられる。 As a protective film layer to be laminated on the mask substrate, the mask substrate can be reinforced when manufacturing a thin film mask, it is easy to peel off from the mask substrate, and adversely affects when forming an opening with a laser beam. Is not particularly limited, and various metal layers and resin layers can be mentioned. In particular, from the viewpoint of thermal characteristics, a metal layer containing one or more metals selected from nickel, iron, and copper, and a thermosetting resin layer such as polyimide are preferable. In order to laminate the above protective film layer on the mask substrate, a method of laminating the thin film of the protective film to the mask substrate by an adhesive or heat fusion, and laminating the above protective film metal by plating, sputtering, vapor deposition or the like. The method, the method of apply | coating and heat-curing the precursor of a polyimide resin, the method of melt-laminating the above-mentioned thermoplastic resin, etc. are mentioned.

更に、本発明の保護膜層としては、マスク用基板との間に間隙が発生せず、且つ適度の密着性と適度な剥離性を有する点から、又該保護膜の膜厚の制御と管理が容易に行える点から前記金属をメッキ法により積層した層が特に好ましい。前記保護膜層がメッキ法の場合は通常の公知の電気メッキ法により成膜される。この際、マスク用基板としては導電性を有する基板が好ましく、前記した金属が挙げられる。又ポリイミド樹脂、PPS、PES、PEEK、液晶樹脂等の樹脂の場合は、樹脂の表面を導電性にするため、導電性金属をスパッタしたり、無電解メッキをしたり、又は薄膜を積層する。メッキ法で積層する場合、保護膜層との適度な密着性と剥離性、機械的強度、経済性の点からマスク用基板としては、ステンレスが、保護膜層としてはニッケル又はニッケル合金が最も好ましい。 Furthermore, as the protective film layer of the present invention, no gap is generated between the mask substrate, moderate adhesion and moderate peelability, and control and management of the thickness of the protective film. A layer in which the metal is laminated by a plating method is particularly preferable from the viewpoint of easily performing the process. When the protective film layer is a plating method, the protective film layer is formed by an ordinary known electroplating method. In this case, the substrate for mask is preferably a conductive substrate, and examples thereof include the metals described above. In the case of a resin such as polyimide resin, PPS, PES, PEEK, or liquid crystal resin, a conductive metal is sputtered, electroless plated, or a thin film is laminated to make the resin surface conductive. When laminating by a plating method, stainless steel is most preferable as a mask substrate, and nickel or a nickel alloy is most preferable as a protective film layer from the viewpoint of appropriate adhesion and peelability with a protective film layer, mechanical strength, and economy. .

保護膜層の役割は開口部周辺の盛上りやドロスの付着の防止、及び薄膜のマスク用基板のハンドリングの容易さ等にあり、該保護膜層の膜厚は、用いるマスク用基板の厚さ、及びマスク用基板との剥離性等を考慮して決めればよく、好ましくは10〜200μm、更に好ましくは20〜150μmである。保護膜層を金属のメッキ法で積層する際、保護膜層の膜厚が厚くなればメッキに長時間を要する。この場合、薄膜の金属の保護膜層をメッキ法で積層し、その上に金属箔又は樹脂膜を積層するのが好ましい。又、金属の保護膜層が厚い場合、開口部壁面に焼けが生じたり、バリの発生が増加して好ましくない。これらの点から、薄膜の金属の保護膜層をメッキ法で積層し、その上に樹脂膜を積層するのが更に好ましい。保護膜層を金属と樹脂で構成する際は、金属の保護膜層の膜厚は5〜40μm、樹脂の保護膜層の膜厚は15〜140μmが好ましい。樹脂の保護膜層は樹脂フィルムをラミネートしたり、樹脂液を塗布することにより積層される。 The role of the protective film layer is to prevent swell and dross adhesion around the opening, and ease of handling of the thin film mask substrate. The film thickness of the protective film layer is the thickness of the mask substrate used. In addition, it may be determined in consideration of the releasability from the mask substrate, etc., preferably 10 to 200 μm, more preferably 20 to 150 μm. When the protective film layer is laminated by a metal plating method, if the protective film layer is thick, plating takes a long time. In this case, a thin metal protective film layer is preferably laminated by a plating method, and a metal foil or a resin film is laminated thereon. Moreover, when the metal protective film layer is thick, it is not preferable because the wall surface of the opening is burned or the generation of burrs is increased. From these points, it is more preferable to laminate a thin metal protective film layer by a plating method and to laminate a resin film thereon. When the protective film layer is made of metal and resin, the metal protective film layer preferably has a thickness of 5 to 40 μm, and the resin protective film layer preferably has a thickness of 15 to 140 μm. The protective film layer of the resin is laminated by laminating a resin film or applying a resin liquid.

保護膜層として用いられる樹脂としては特に制限はなく、普通の熱可塑性樹脂や熱硬化性樹脂が挙げられる。具体的な樹脂としては、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエステル樹脂、ポリアミド樹脂、アクリル樹脂、ポリカーボネート樹脂、ポリスチレン樹脂、PPS、PES、PEEK、ポリイミド樹脂、エポキシ樹脂等が挙げられる。更に、ドライフィルムレジスト等の感光性樹脂は剥離する際に光を照射することにより剥離性を向上させることが可能であり好ましい。マスク用基板の両側の保護膜層の膜の種類、構成、厚さは同じでも、又は異なってもよいが、マスク基板のカールの点からは同じ膜構成及び膜厚が好ましい。 There is no restriction | limiting in particular as resin used as a protective film layer, A normal thermoplastic resin and a thermosetting resin are mentioned. Specific examples of the resin include polyethylene resin, polypropylene resin, polyester resin, polyamide resin, acrylic resin, polycarbonate resin, polystyrene resin, PPS, PES, PEEK, polyimide resin, and epoxy resin. Furthermore, a photosensitive resin such as a dry film resist is preferable because it can improve releasability by irradiating light when it is peeled off. The type, configuration, and thickness of the protective film layer on both sides of the mask substrate may be the same or different, but the same film configuration and film thickness are preferred from the viewpoint of curl of the mask substrate.

次に図1(b)に示したように、保護膜層の上からレーザー光3を照射してマスク用基板に所望の印刷パターンの貫通開口部4を形成する。開口部を形成するには、収束したレーザー光を開口部の外周部に沿って走査しなが照射し、外周部を切断する。照射するレーザー光としては、固体レーザー、ガスレーザー、半導体レーザーが挙げられ、具体的にはYAGレーザーが好ましく、YAGレーザーの基本波、高調波及びそれらの混合波を用いることができる。
貫通開口部を形成する際、レーザー光の入射側の保護膜層は当然貫通開口部が形成されるが、レーザー光の出射面側の保護膜層は必ずしも貫通しなくてもよい。
Next, as shown in FIG. 1B, a laser beam 3 is irradiated from above the protective film layer to form a through-opening 4 having a desired print pattern on the mask substrate. In order to form the opening, the converged laser beam is irradiated while scanning along the outer periphery of the opening, and the outer periphery is cut. Examples of the laser beam to be irradiated include a solid laser, a gas laser, and a semiconductor laser. Specifically, a YAG laser is preferable, and a fundamental wave, a harmonic wave, and a mixed wave of the YAG laser can be used.
When forming the through opening, the protective film layer on the laser beam incident side is naturally formed with the through opening, but the protective film layer on the laser beam emission surface side does not necessarily pass through.

レーザー光で開口部を形成する際に、保護膜層が積層されたマスク基板を保持する方法としては空中に浮かしてマスク基板の周辺部を固定する方法、台座に密着載置する方法がある。形成される開口部の形状の均一性からは台座に密着載置する方法が好ましい。台座に密着載置した場合、レーザー光の出射側の保護膜層まで貫通して開口部を設けると、切断された開口部の切断屑がマスク基板の上面の保護膜層の表面に飛散し、開口部の形成の障害となり好ましくない。この切断屑の飛散を防止するには、下面(レーザー光の出射側)の保護膜層の途中まで開口部を形成する。   When forming the opening with laser light, there are a method of holding the mask substrate on which the protective film layer is laminated, a method of floating in the air to fix the peripheral portion of the mask substrate, and a method of closely mounting on the pedestal. In view of the uniformity of the shape of the opening to be formed, a method of closely mounting on the pedestal is preferable. When placed in close contact with the pedestal, when the opening is provided through the protective film layer on the laser light emission side, the cut waste of the cut opening is scattered on the surface of the protective film layer on the upper surface of the mask substrate, This is not preferable because it obstructs the formation of the opening. In order to prevent the scattering of the cutting waste, an opening is formed partway through the protective film layer on the lower surface (laser beam emission side).

次に図1(c)に示したように、両方の保護膜層をマスク用基板から剥離すと、本発明のマスク1’ができあがる。保護膜層を剥離するには、物理的な方法や化学的な方法で行える。化学的な方法としては、保護層膜又はマスク用基板のどちらか一方を選択的に侵し易い液を用いると容易に剥離できる。例えば、マスク用基板としてステンレスを用い、銅を保護膜層とした場合はアルカリ系のエッチング液を、ニッケルを保護膜層とした場合は強アルカリ液を用いればよい。   Next, as shown in FIG. 1C, when both protective film layers are peeled from the mask substrate, the mask 1 'of the present invention is completed. The protective film layer can be removed by a physical method or a chemical method. As a chemical method, it can be easily peeled off by using a liquid that easily erodes either the protective layer film or the mask substrate. For example, when stainless steel is used as the mask substrate and copper is used as the protective film layer, an alkaline etching solution may be used, and when nickel is used as the protective film layer, a strong alkaline solution may be used.

本発明においては、マスクの開口部壁面を電解研磨処理を行えば、印刷特性がより一層向上し、更に好ましい。又、電解研磨を行った後、フッ素樹脂微粒子を含有する共析メッキを行っても良い。前記した電解研磨処理は、保護膜層を剥離してから行っても良いが、マスク開口部のエッジのだれ、マスク厚の変化、マスク表面のダメージ等の防止の点から、保護膜層を剥離する前に電解研磨を行うのが好ましい。しかし、前記したように開口部がレーザー光出射側の保護膜層を貫通していない場合は、開口部壁面への電解研磨液の流入が阻害され、その結果電解研磨が十分に行われず、好ましくない。この場合も保護膜層を金属と樹脂の積層構成とし、開口部の加工を金属保護膜と樹脂保護膜の界面付近、又は金属の保護膜層を貫通し、樹脂保護膜層の途中まで行い、電解研磨を行う前に樹脂保護膜層を剥離し、電解研磨を行うのが好ましい。 In the present invention, it is more preferable to perform electropolishing treatment on the wall surface of the opening of the mask because the printing characteristics are further improved. Further, after electrolytic polishing, eutectoid plating containing fluororesin fine particles may be performed. The above-described electropolishing treatment may be performed after the protective film layer is peeled off, but the protective film layer is peeled from the viewpoint of preventing dripping of the edge of the mask opening, change in mask thickness, damage to the mask surface, and the like. It is preferable to perform electropolishing before performing. However, as described above, when the opening does not penetrate the protective film layer on the laser light emission side, the inflow of the electrolytic polishing liquid to the wall surface of the opening is hindered, and as a result, the electropolishing is not sufficiently performed. Absent. Also in this case, the protective film layer has a laminated structure of metal and resin, and the opening is processed near the interface between the metal protective film and the resin protective film, or through the protective film layer of the metal, to the middle of the resin protective film layer, It is preferable to peel the resin protective film layer and perform electropolishing before performing electropolishing.

以下、本発明を実施例により更に詳細に説明する。但し、本発明は、この実施例に限定されるものではない。   Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to this embodiment.

550×650mmで厚さ60μmのSUS304の基板をスルファミン酸ニッケルメッキ浴に入れて、浴温45℃、電流密度2A/dm2で電気メッキを行い、SUS304基板の両面に保護膜層として30μmのニッケル膜を成膜した。次に、YAGレーザー加工機(HPS362B/P、ハイパー・フォトン・システム社製)を用いて、直径50μmの開口部を繰返しピッチ100μmで50×50(2500)個からなる基本パターンを4つ面取りした印刷パターンの開口部を形成した。 A SUS304 substrate having a thickness of 550 × 650 mm and a thickness of 60 μm is placed in a nickel sulfamate plating bath, and electroplating is performed at a bath temperature of 45 ° C. and a current density of 2 A / dm 2. Was deposited. Next, using a YAG laser processing machine (HPS362B / P, manufactured by Hyper Photon System Co., Ltd.), four basic patterns of 50 × 50 (2500) basic patterns with 50 μm diameter openings were repeated at a pitch of 100 μm. A printed pattern opening was formed.

開口部を形成した直後のニッケル保護膜層を剥離しない状態では、保護膜表面の開口部周辺部に盛上り、ドロスの付着が観察されたが、ニッケル保護膜層を剥離した後の本発明のマスク1’には開口部周辺部には盛上りは発生せず、且つドロスの付着も観測されなかった。又、開口部のエッジは非常にシャープであり、開口部の壁面も略平滑であった。 In the state in which the nickel protective film layer immediately after forming the opening is not peeled off, it was swelled around the opening peripheral part of the protective film surface, and adhesion of dross was observed, but after the nickel protective film layer was peeled off, In the mask 1 ′, no swell occurred in the periphery of the opening, and no adhesion of dross was observed. Moreover, the edge of the opening was very sharp and the wall surface of the opening was substantially smooth.

次に、得られたマスクを400×480mmに切断し、アルミ枠に180メッシュのポリエステル製の紗を介して貼り合わせて孔版印刷版を作製し、該孔版印刷版をスクリーン印刷機(SP28P−DH、パナソニックファクトリーソリューション(株)製)にセットし、鉛フリーのクリームはんだ(LF−71S−3、タムラ化研(株)製)をプリント配線基板上に印刷し、はんだ端子を形成した。印刷版マスクの被印刷面への密着性は良好で、クリームはんだの滲みは発生しなかった。一方、印刷版の版離れ性に優れ、クリームはんだの抜け性は良好であった。その結果、形成したはんだ端子には割れ、抜け、欠け等の欠陥の発生も殆どなく、はんだ量のばらつきも小さかった。 Next, the obtained mask was cut into 400 × 480 mm, and bonded to an aluminum frame through a 180 mesh polyester crease to produce a stencil printing plate, and the stencil printing plate was printed on a screen printing machine (SP28P-DH). , Manufactured by Panasonic Factory Solution Co., Ltd.) and lead-free cream solder (LF-71S-3, manufactured by Tamura Kaken Co., Ltd.) was printed on the printed circuit board to form solder terminals. The adhesion of the printing plate mask to the surface to be printed was good, and no blurring of cream solder occurred. On the other hand, the printing plate was excellent in the release property, and the cream solder was easily removed. As a result, the formed solder terminals were almost free from defects such as cracks, omissions, and chipping, and the variation in the amount of solder was small.

マスクの印刷特性を更に向上させるために、実施例1の開口部を形成した後、ニッケル保護膜層を剥離しない状態で、燐酸600ml/l、硫酸180ml/lからなる電解液を用い、45℃でマスクを陽極にして下記の条件を1サイクルとし、20サイクルの電解研磨を行った。
電流密度 通電時間
・通電 : 15A/dm2 15秒
・逆通電: −0.5A/dm2 3秒
・非通電: 0A/dm2 20秒
In order to further improve the printing characteristics of the mask, after forming the opening of Example 1, an electrolytic solution consisting of 600 ml / l phosphoric acid and 180 ml / l sulfuric acid was used at 45 ° C. without peeling off the nickel protective film layer. Then, using the mask as an anode, the following conditions were set to 1 cycle, and 20 cycles of electropolishing were performed.
Current density Energizing time ・ Energizing: 15 A / dm2 15 seconds ・ Reverse energizing: −0.5 A / dm2 3 seconds ・ Non-energizing: 0 A / dm2 20 seconds

次に、電解研磨処理を行った後、保護膜層を剥離し、本発明のマスクを作製した。該マスクを実施例1と同じ方法で、アルミ枠にポリエステル製の紗を介して貼り合わせて孔版印刷版を作製し、鉛フリーのクリームはんだをプリント配線基板上に印刷し、はんだ端子を形成した。印刷版マスクの被印刷面への密着性は非常に優れ、クリームはんだの滲みは発生しなかった。一方、印刷版の版離れ性及びクリームはんだの抜け性は実施例1よりも更に優れていた。その結果、形成したはんだ端子には割れ、抜け、欠け等の欠陥の発生は全くなく、はんだ量のばらつきも非常に小さかった。   Next, after performing an electropolishing treatment, the protective film layer was peeled off to produce a mask of the present invention. In the same manner as in Example 1, the mask was bonded to an aluminum frame via a polyester rivet to produce a stencil printing plate, and lead-free cream solder was printed on a printed wiring board to form solder terminals. . The adhesion of the printing plate mask to the surface to be printed was very good, and no blurring of cream solder occurred. On the other hand, the detachability of the printing plate and the detachability of the cream solder were even better than in Example 1. As a result, the formed solder terminals did not have any defects such as cracks, omissions, and chipping, and the variation in the amount of solder was very small.

550×650mmで厚さ20μmのSUS304の基板をスルファミン酸ニッケルメッキ浴に入れて、浴温45℃、電流密度2A/dm2で電気メッキを行い、SUS304基板の両面に保護膜層として20μmのニッケル膜を成膜した。更に、該ニッケル膜の上に樹脂保護膜として50μmのネガ型のドライフィルムを両面にラミネートした。次に、YAGレーザー加工機(Model5300 esi社製)を用いて、直径40μmの開口部を繰返しピッチ100μmで50×50(2500)個からなる基本パターンを4つ面取りした印刷パターンの開口部を形成した。但し、開口部はレーザー光出射側のニッケル膜とドライフィルム膜からなる保護膜層のニッケル膜層は貫通し、ドライフィルム膜層の途中まで形成した。   A SUS304 substrate having a thickness of 550 × 650 mm and a thickness of 20 μm is placed in a nickel sulfamate plating bath, and electroplating is performed at a bath temperature of 45 ° C. and a current density of 2 A / dm 2. Was deposited. Further, a negative dry film of 50 μm was laminated on both sides as a resin protective film on the nickel film. Next, using a YAG laser processing machine (Model 5300 esi), openings of a printed pattern are formed by chamfering four basic patterns consisting of 50 × 50 (2500) openings with a diameter of 40 μm and openings with a diameter of 40 μm. did. However, the opening was formed partway through the dry film film layer through the nickel film layer of the protective film layer made of the nickel film and dry film film on the laser light emission side.

次に両面のドライフィルムに紫外線を照射して、該フィルムを硬化した後、剥離液に浸漬し、剥離した。ニッケル保護膜を両面に積層されたマスク基板の開口部は上面から下面まで完全に貫通していた。該メタルマスク基板を実施例2と同じ電解液を用い、15A/dm2の電流を90秒間通電し、電解研磨処理を行った。最後に両面のニッケル保護膜を剥離し、本発明のマスクを作製した。マスクの表面にはドロスの付着はなく、開口部周辺の盛り上がりも無かった。又、マスクの開口部の壁面はバリは完全に無く、且つレーザー照射痕(微小な立筋)も消え、非常に平滑であった。   Next, the dry film on both sides was irradiated with ultraviolet rays to cure the film, and then immersed in a stripping solution and peeled off. The opening of the mask substrate having the nickel protective film laminated on both sides completely penetrated from the upper surface to the lower surface. The same electrolytic solution as in Example 2 was used for the metal mask substrate, and a current of 15 A / dm 2 was applied for 90 seconds to perform an electropolishing treatment. Finally, the nickel protective film on both sides was peeled off to produce the mask of the present invention. There was no dross on the surface of the mask, and there was no rise around the opening. Further, the wall surface of the opening of the mask was completely free of burrs, and the laser irradiation traces (fine ridges) disappeared and were very smooth.

該マスクを実施例1と同じ方法で、アルミ枠にポリエステル製の紗を介して貼り合わせて孔版印刷版を作製し、鉛フリーのクリームはんだをプリント配線基板上に印刷し、はんだ端子を形成した。印刷版マスクの被印刷面への密着性は非常に優れ、クリームはんだの滲みは発生しなかった。一方、印刷版の版離れ性及びクリームはんだの抜け性は実施例1よりも更に優れていた。その結果、形成したはんだ端子には割れ、抜け、欠け等の欠陥の発生は全くなく、はんだ量のばらつきも非常に小さかった。
In the same manner as in Example 1, the mask was bonded to an aluminum frame via a polyester rivet to produce a stencil printing plate, and lead-free cream solder was printed on a printed wiring board to form solder terminals. . The adhesion of the printing plate mask to the surface to be printed was very good, and no blurring of cream solder occurred. On the other hand, the detachability of the printing plate and the detachability of the cream solder were even better than in Example 1. As a result, the formed solder terminals did not have any defects such as cracks, omissions, and chipping, and the variation in the amount of solder was very small.

本発明の孔版印刷用のマスクは電子部品を搭載する際のはんだ端子の形成において、クリームはんだの印刷用マスクとして使用できる。本発明のマスクを用いてクリームはんだを印刷した場合、クリームはんだを高速で、且つ高密度に、更に優れた転写性で印刷することができ、電子部品の高密度実装向けのはんだ端子の形成に利用できる。   The stencil printing mask of the present invention can be used as a cream solder printing mask in the formation of solder terminals when electronic components are mounted. When cream solder is printed using the mask of the present invention, the cream solder can be printed at high speed, high density, and excellent transferability, and can be used to form solder terminals for high density mounting of electronic components. Available.

本発明の孔版印刷用のマスクの製造工程の一様態を表す。1 represents an embodiment of a process for producing a mask for stencil printing according to the present invention.

符号の説明Explanation of symbols

1 マスク用基板
1’ 孔版印刷用のマスク
2 保護膜層
3 レーザー光
4 開口部
DESCRIPTION OF SYMBOLS 1 Mask substrate 1 'Mask for stencil printing 2 Protective film layer 3 Laser beam 4 Opening

Claims (10)

孔版印刷用のマスクであって、マスク用基板の両面に保護膜層を積層し、保護膜層の上からレーザー光を照射して印刷パターンの貫通開口部をマスク用基板に形成し、マスク用基板から保護膜層を剥離してなることを特徴とする孔版印刷用のマスク。 A mask for stencil printing, in which a protective film layer is laminated on both sides of the mask substrate, and a laser beam is irradiated on the protective film layer to form a through-opening portion of the printing pattern on the mask substrate. A mask for stencil printing, comprising a protective film layer peeled off from a substrate. 保護膜層が金属層、又は熱硬化性樹脂層である請求項1記載の孔版印刷用のマスク。 2. The mask for stencil printing according to claim 1, wherein the protective film layer is a metal layer or a thermosetting resin layer. マスク用基板にメッキ法によって金属の保護膜層を積層してなる請求項1記載の孔版印刷用のマスク。 2. A mask for stencil printing according to claim 1, wherein a protective film layer of metal is laminated on the mask substrate by plating. マスク用基板がステンレスからなる請求項3記載の孔版印刷用のマスク。 4. A mask for stencil printing according to claim 3, wherein the mask substrate is made of stainless steel. 貫通開口部を形成した後、電解研磨を行ってから保護膜層を剥離してなる請求項4記載の孔版印刷用のマスク。 The mask for stencil printing according to claim 4, wherein the protective film layer is peeled off after electrolytic polishing is performed after the through opening is formed. 孔版印刷用のマスクの製造方法であって、マスク用基板の両面に保護膜層を積層する工程、保護膜層の上からレーザー光を照射して印刷パターンの貫通開口部をマスク用基板に形成する工程、マスク用基板から保護膜層を剥離してなる工程、からなることを特徴とする孔版印刷用のマスクの製造方法。 A method of manufacturing a mask for stencil printing, a process of laminating protective film layers on both sides of a mask substrate, and irradiating a laser beam on the protective film layer to form a through opening portion of a printing pattern on the mask substrate A method for producing a mask for stencil printing, comprising: a step of removing a protective film layer from a mask substrate. 保護膜層が金属層、又は熱硬化性樹脂層である請求項6記載の孔版印刷用のマスクの製造方法。 The method for producing a mask for stencil printing according to claim 6, wherein the protective film layer is a metal layer or a thermosetting resin layer. マスク用基板に保護膜層を積層する工程において、金属のメッキ法による請求項6記載の孔版印刷用のマスクの製造方法。 7. The method for producing a mask for stencil printing according to claim 6, wherein the step of laminating the protective film layer on the mask substrate comprises a metal plating method. マスク用基板がステンレスからなることを特徴とする請求項8記載の孔版印刷用のマスクの製造方法。 9. The method for producing a mask for stencil printing according to claim 8, wherein the mask substrate is made of stainless steel. 貫通開口部を形成する工程の後、電解研磨工程を追加してなる請求項9記載の孔版印刷用のマスクの製造方法。
The method for producing a mask for stencil printing according to claim 9, wherein an electropolishing step is added after the step of forming the through opening.
JP2005356774A 2004-12-22 2005-12-09 Mask for stencil printing and manufacturing method thereof Active JP4817139B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005356774A JP4817139B2 (en) 2004-12-22 2005-12-09 Mask for stencil printing and manufacturing method thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004370792 2004-12-22
JP2004370792 2004-12-22
JP2005356774A JP4817139B2 (en) 2004-12-22 2005-12-09 Mask for stencil printing and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JP2006199027A true JP2006199027A (en) 2006-08-03
JP4817139B2 JP4817139B2 (en) 2011-11-16

Family

ID=36957428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005356774A Active JP4817139B2 (en) 2004-12-22 2005-12-09 Mask for stencil printing and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP4817139B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LT5825B (en) 2010-09-06 2012-04-25 Uab "Laser Stencil Europe", , Stencil for solder paste or glue application
JP2017074718A (en) * 2015-10-15 2017-04-20 日立マクセル株式会社 Photogravure offset printing intaglio and manufacturing method thereof
JP6171161B1 (en) * 2016-10-03 2017-08-02 株式会社プロセス・ラボ・ミクロン Method for manufacturing a mask for solder printing
KR101792667B1 (en) 2017-04-07 2017-11-02 크레아퓨쳐 주식회사 Manufacturing method of fine metal mask
JP6364599B1 (en) * 2017-11-20 2018-08-01 株式会社プロセス・ラボ・ミクロン Fine pattern nickel thin film and manufacturing method thereof
KR20180128115A (en) * 2017-05-22 2018-12-03 삼성디스플레이 주식회사 Deposition mask manufacturing method and manufacturing apparatus thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10151872A (en) * 1996-11-21 1998-06-09 Ricoh Micro Electron Kk Printing mask for particle-containing paste and its manufacture
JPH10151873A (en) * 1996-11-21 1998-06-09 Ricoh Micro Electron Kk Printing mask for particle-containing paste
JP2000168256A (en) * 1998-12-02 2000-06-20 Ricoh Microelectronics Co Ltd Printing mask and manufacture of printing mask
JP2004284182A (en) * 2003-03-20 2004-10-14 Bonmaaku:Kk Metal mask screen plate and its manufacturing method
JP2005262692A (en) * 2004-03-19 2005-09-29 Ricoh Microelectronics Co Ltd Manufacturing method of printing mask

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10151872A (en) * 1996-11-21 1998-06-09 Ricoh Micro Electron Kk Printing mask for particle-containing paste and its manufacture
JPH10151873A (en) * 1996-11-21 1998-06-09 Ricoh Micro Electron Kk Printing mask for particle-containing paste
JP2000168256A (en) * 1998-12-02 2000-06-20 Ricoh Microelectronics Co Ltd Printing mask and manufacture of printing mask
JP2004284182A (en) * 2003-03-20 2004-10-14 Bonmaaku:Kk Metal mask screen plate and its manufacturing method
JP2005262692A (en) * 2004-03-19 2005-09-29 Ricoh Microelectronics Co Ltd Manufacturing method of printing mask

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LT5825B (en) 2010-09-06 2012-04-25 Uab "Laser Stencil Europe", , Stencil for solder paste or glue application
JP2017074718A (en) * 2015-10-15 2017-04-20 日立マクセル株式会社 Photogravure offset printing intaglio and manufacturing method thereof
JP6171161B1 (en) * 2016-10-03 2017-08-02 株式会社プロセス・ラボ・ミクロン Method for manufacturing a mask for solder printing
KR101792667B1 (en) 2017-04-07 2017-11-02 크레아퓨쳐 주식회사 Manufacturing method of fine metal mask
KR20180128115A (en) * 2017-05-22 2018-12-03 삼성디스플레이 주식회사 Deposition mask manufacturing method and manufacturing apparatus thereof
KR102402998B1 (en) * 2017-05-22 2022-05-30 삼성디스플레이 주식회사 Deposition mask manufacturing method and manufacturing apparatus thereof
JP6364599B1 (en) * 2017-11-20 2018-08-01 株式会社プロセス・ラボ・ミクロン Fine pattern nickel thin film and manufacturing method thereof
JP2019094520A (en) * 2017-11-20 2019-06-20 株式会社プロセス・ラボ・ミクロン Fine pattern nickel film and method for manufacturing the same

Also Published As

Publication number Publication date
JP4817139B2 (en) 2011-11-16

Similar Documents

Publication Publication Date Title
JP4126038B2 (en) BGA package substrate and manufacturing method thereof
JP4817139B2 (en) Mask for stencil printing and manufacturing method thereof
TW201223353A (en) A printed wiring board
JP2006173554A (en) Ball grid array substrate provided with window and its manufacturing method
KR101089959B1 (en) Printed circuit board and fabricating method of the same
JP2006108613A (en) Printed board and its manufacturing method
CN105870026B (en) Carrier, its manufacturing method and the method using carrier manufacture centreless package substrate
JP5518624B2 (en) Printed wiring board and manufacturing method thereof
JP2007287920A (en) Manufacturing method of double sided wiring board, and double sided wiring board
CN113709984B (en) Circuit board manufacturing method for plating hole, bonding pad plating resistance and resist pattern by laser processing
JP2008010689A (en) Multi-layer printed circuit board, and its manufacturing method
US20020083586A1 (en) Process for producing multilayer circuit board
JP2005144973A (en) Perforated printing mask
JP6320879B2 (en) Mask for printing and manufacturing method thereof
JP4730222B2 (en) Wiring board manufacturing method
JP5163840B2 (en) Mask for stencil printing and manufacturing method thereof
JP2006203074A (en) Circuit board and manufacturing method thereof
JP2003500845A (en) Plastic chip carrier manufacturing process and plastic chip carrier
JP2009016518A (en) Multilayer wiring board
JP2007111942A (en) Metal mask and its manufacturing method
JP4670005B2 (en) Metal mask, screen printing plate and solder bump forming method
JP5407161B2 (en) Multilayer circuit board manufacturing method
JP5287570B2 (en) Method for manufacturing printed wiring board
JP4676859B2 (en) Printed wiring board for electronic component package and manufacturing method thereof
KR100619349B1 (en) Method for forming circuit pattern of printed circuit board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110510

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110707

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110816

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110822

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140909

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4817139

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250