JP2006051598A - ビーム・スイッチ構造及び方法 - Google Patents
ビーム・スイッチ構造及び方法 Download PDFInfo
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- JP2006051598A JP2006051598A JP2005231453A JP2005231453A JP2006051598A JP 2006051598 A JP2006051598 A JP 2006051598A JP 2005231453 A JP2005231453 A JP 2005231453A JP 2005231453 A JP2005231453 A JP 2005231453A JP 2006051598 A JP2006051598 A JP 2006051598A
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- JP
- Japan
- Prior art keywords
- buckling
- state
- buckled
- switch
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3574—Mechanical force, e.g. pressure variations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H37/00—Thermally-actuated switches
- H01H2037/008—Micromechanical switches operated thermally
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
Abstract
【解決手段】 非座屈状態の略直線ビームは、調節可能な圧縮器を使用してこのビームが座屈変形されるように圧縮される。調節可能な圧縮器は、力をビームの一端又は両端に加え、ビームを第1の座屈状態及び第2の座屈状態間で移動可能にするためにビーム上にかかる圧縮量を制限する。第1の座屈状態及び第2の座屈状態は、略均等な座屈変形量を有し、非座屈状態から反対方向に座屈変形する動作から構成される。
【選択図】 図3
Description
Claims (4)
- ビームと、
前記ビームの両側にあるアクチュエータと、
前記ビームの端部と接触し、前記ビームを座屈状態に圧縮するように適合されるくさびと、
を含む、座屈ビーム・スイッチ。 - ビームと、
前記ビームの両側にあるアクチュエータと、
前記ビームの端部と接触し、前記ビームを座屈状態に圧縮するように適合される調節可能な圧縮器と、
を含む、座屈ビーム・スイッチ。 - 前記ビームの前記端部における可撓性部材を更に含む、請求項1及び2に記載の座屈ビーム・スイッチ。
- 略直線ビームを非座屈状態に形成することと、
前記ビームを座屈変形させるように前記ビームを圧縮することと、
座屈状態の前記ビームを固定することと、
前記ビームの両側にアクチュエータを配置することと、
を含む、ビーム・スイッチの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/918,093 US7221817B2 (en) | 2004-08-13 | 2004-08-13 | Beam switch structures and methods |
US10/918093 | 2004-08-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006051598A true JP2006051598A (ja) | 2006-02-23 |
JP5110781B2 JP5110781B2 (ja) | 2012-12-26 |
Family
ID=35800046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005231453A Expired - Fee Related JP5110781B2 (ja) | 2004-08-13 | 2005-08-10 | ビーム・スイッチ構造及び方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7221817B2 (ja) |
JP (1) | JP5110781B2 (ja) |
CN (1) | CN100592444C (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150279587A1 (en) * | 2011-07-05 | 2015-10-01 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
US10480671B2 (en) | 2014-11-24 | 2019-11-19 | Genesis Advanced Technology Inc. | Control element with buckled member |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7046539B1 (en) * | 2004-11-02 | 2006-05-16 | Sandia Corporation | Mechanical memory |
US20090146773A1 (en) * | 2007-12-07 | 2009-06-11 | Honeywell International Inc. | Lateral snap acting mems micro switch |
US8232858B1 (en) | 2008-02-20 | 2012-07-31 | Sandia Corporation | Microelectromechanical (MEM) thermal actuator |
CN102142338A (zh) * | 2010-12-16 | 2011-08-03 | 上海交通大学 | 面内运动的多向多通道多稳态微机电开关 |
US11001494B2 (en) | 2011-06-23 | 2021-05-11 | Duality Reality Energy, LLC | Multi-zone microstructure spring |
US8203775B1 (en) | 2011-08-16 | 2012-06-19 | Agiltron, Inc. | MEMS bistable optical switch and methods for use thereof |
US9076961B2 (en) | 2012-01-31 | 2015-07-07 | Duality Reality Energy, LLC | Energy harvesting with a micro-electro-machanical system (MEMS) |
WO2015153179A1 (en) | 2014-04-01 | 2015-10-08 | Agiltron, Inc. | Microelectromechanical displacement structure and method for controlling displacement |
CA3049474C (en) | 2017-01-19 | 2020-08-11 | Grant J. ELIUK | Thermal-sensitive appearance-changing label |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3833876A (en) * | 1973-11-21 | 1974-09-03 | Honeywell Inc | Temperature compensated snap-beam actuator |
JPH04240606A (ja) * | 1991-01-24 | 1992-08-27 | Fujitsu Ltd | 光スイッチ |
US20030029705A1 (en) * | 2001-01-19 | 2003-02-13 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2121841A1 (de) | 1971-05-04 | 1972-11-16 | Daimler-Benz Ag, 7000 Stuttgart | Vorrichtung zur Kontaktierung von Enden elektrischer Leiter |
GB2077510A (en) * | 1980-06-06 | 1981-12-16 | Gen Electric Co Ltd | Thermally responsive switches |
US5502781A (en) * | 1995-01-25 | 1996-03-26 | At&T Corp. | Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress |
US6072924A (en) * | 1996-09-02 | 2000-06-06 | Nippon Telegraph And Telephone Corporation | Optical switch and method for assembling the same |
US5909078A (en) * | 1996-12-16 | 1999-06-01 | Mcnc | Thermal arched beam microelectromechanical actuators |
JPH10334778A (ja) * | 1997-05-30 | 1998-12-18 | Hyundai Motor Co Ltd | 臨界マイクロスイッチ及びその製造方法 |
US6498870B1 (en) | 1998-04-20 | 2002-12-24 | Omm, Inc. | Micromachined optomechanical switches |
US6303885B1 (en) | 2000-03-03 | 2001-10-16 | Optical Coating Laboratory, Inc. | Bi-stable micro switch |
US6388359B1 (en) * | 2000-03-03 | 2002-05-14 | Optical Coating Laboratory, Inc. | Method of actuating MEMS switches |
US6310419B1 (en) * | 2000-04-05 | 2001-10-30 | Jds Uniphase Inc. | Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
US6407478B1 (en) * | 2000-08-21 | 2002-06-18 | Jds Uniphase Corporation | Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
US6753582B2 (en) * | 2002-08-14 | 2004-06-22 | Intel Corporation | Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
FR2865724A1 (fr) * | 2004-02-04 | 2005-08-05 | St Microelectronics Sa | Microsysteme electromecanique pouvant basculer entre deux positions stables |
US7046539B1 (en) * | 2004-11-02 | 2006-05-16 | Sandia Corporation | Mechanical memory |
-
2004
- 2004-08-13 US US10/918,093 patent/US7221817B2/en not_active Expired - Fee Related
-
2005
- 2005-08-10 JP JP2005231453A patent/JP5110781B2/ja not_active Expired - Fee Related
- 2005-08-12 CN CN200510091476A patent/CN100592444C/zh not_active Expired - Fee Related
-
2007
- 2007-04-12 US US11/734,419 patent/US7450797B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3833876A (en) * | 1973-11-21 | 1974-09-03 | Honeywell Inc | Temperature compensated snap-beam actuator |
JPH04240606A (ja) * | 1991-01-24 | 1992-08-27 | Fujitsu Ltd | 光スイッチ |
US20030029705A1 (en) * | 2001-01-19 | 2003-02-13 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150279587A1 (en) * | 2011-07-05 | 2015-10-01 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
US10366849B2 (en) * | 2011-07-05 | 2019-07-30 | Duality Reality Energy, LLC | Method to create a reduced stiffness microstructure |
US10480671B2 (en) | 2014-11-24 | 2019-11-19 | Genesis Advanced Technology Inc. | Control element with buckled member |
Also Published As
Publication number | Publication date |
---|---|
CN1733591A (zh) | 2006-02-15 |
US7450797B2 (en) | 2008-11-11 |
US20080002930A1 (en) | 2008-01-03 |
US20060034562A1 (en) | 2006-02-16 |
US7221817B2 (en) | 2007-05-22 |
CN100592444C (zh) | 2010-02-24 |
JP5110781B2 (ja) | 2012-12-26 |
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