JP2006041281A - Laminated piezoelectric element and injection device employing it - Google Patents

Laminated piezoelectric element and injection device employing it Download PDF

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JP2006041281A
JP2006041281A JP2004220727A JP2004220727A JP2006041281A JP 2006041281 A JP2006041281 A JP 2006041281A JP 2004220727 A JP2004220727 A JP 2004220727A JP 2004220727 A JP2004220727 A JP 2004220727A JP 2006041281 A JP2006041281 A JP 2006041281A
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piezoelectric
internal electrode
metal
multilayer piezoelectric
internal
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Takeshi Okamura
健 岡村
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Kyocera Corp
京セラ株式会社
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Priority to JP2004220727A priority Critical patent/JP2006041281A/en
Priority claimed from PCT/JP2005/004097 external-priority patent/WO2005086247A1/en
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Abstract

<P>PROBLEM TO BE SOLVED: To raise durability by preventing separation of a piezoelectric body from an internal electrode generated on the side surface of the element due to the continuous driving of the laminated piezoelectric element. <P>SOLUTION: The laminated piezoelectric element is equipped with a pair of external electrodes having a laminate consisting of at least alternately laminated one piece of piezoelectric body and a plurality of internal electrodes. The internal electrodes are connected alternately one every two layers to the side surface of the laminate to drive the element, by impressing electric field on the external electrodes. In such a laminated piezoelectric element, the configuration of a part whereat the internal electrodes having different polarities are superposed mutually through the piezoelectric body is constituted of an asymmetric configuration. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a laminated piezoelectric element (hereinafter, also simply referred to as “element”) and an injection device, for example, a fuel injection device for an automobile engine, a liquid injection device such as an ink jet, a precision positioning device such as an optical device, and a vibration. Drive elements mounted on prevention devices, etc., and sensor elements mounted on combustion pressure sensors, knock sensors, acceleration sensors, load sensors, ultrasonic sensors, pressure sensitive sensors, yaw rate sensors, etc., and piezoelectric gyros, piezoelectric switches, piezoelectric elements The present invention relates to a multilayer piezoelectric element and a jetting device used for circuit elements mounted on transformers, piezoelectric breakers, and the like.

  2. Description of the Related Art Conventionally, a multilayer piezoelectric actuator in which piezoelectric bodies and internal electrodes are alternately stacked is known as a multilayer piezoelectric element. Multi-layer piezoelectric actuators are classified into two types: simultaneous firing type and stack type in which piezoelectric ceramics made of a single piezoelectric body and plate-like internal electrodes are stacked alternately. Low voltage and low manufacturing costs. In view of the above, the simultaneous firing type laminated piezoelectric actuator is showing superiority because it is advantageous for thinning and advantageous for durability.

  FIG. 4 shows a conventional multilayer piezoelectric element disclosed in Patent Document 1, and includes a multilayer body 23 and external electrodes 25 formed on a pair of side surfaces facing each other. The laminated body 23 is formed by alternately laminating the piezoelectric bodies 21 and the internal electrodes 22 constituting the laminated body 23. However, the internal electrodes 22 are not formed on the entire main surface of the piezoelectric body 21, but have a so-called partial electrode structure. . The internal electrodes 22 of this partial electrode structure are alternately stacked on the left and right sides so as to be exposed on the side surfaces of different stacked bodies 23. Inactive layers 24 are stacked on both end surfaces of the stacked body 23 in the stacking direction. And the external electrode 25 is formed so that the said exposed internal electrodes 22 may be connected to a pair of mutually opposing side surface of the laminated body 23, and the internal electrodes 22 can be connected every other layer.

  As a conventional method for manufacturing a laminated piezoelectric element, an internal electrode paste is printed on a ceramic green sheet containing a raw material of the piezoelectric body 21 in a pattern having a predetermined electrode structure as shown in FIG. A laminated body obtained by laminating a plurality of green sheets coated with the electrode paste is produced, and the laminated body 23 is produced by firing the laminated molded body. Thereafter, external electrodes 25 are formed on the pair of side surfaces of the laminate 23 by firing to obtain a multilayer piezoelectric element (see, for example, Patent Document 1).

  As the internal electrode 22, an alloy of silver and palladium is used. Further, in order to simultaneously fire the piezoelectric body 21 and the internal electrode 22, the metal composition of the internal electrode 22 is 70% by mass of silver and 30% by mass of palladium. (See, for example, Patent Document 2).

  As described above, the internal electrode 22 made of a metal composition containing a silver-palladium alloy containing palladium is used instead of the internal electrode 22 made of a metal composition containing only silver. This is because when a potential difference is applied between the opposing internal electrodes 22, a so-called silver migration phenomenon occurs in which silver in the electrode moves along the element surface from the positive electrode to the negative electrode of the pair of internal electrodes 22. This phenomenon occurred remarkably in a high temperature and high humidity atmosphere.

When a conventional multilayer piezoelectric element is used as a piezoelectric actuator, a lead wire is further fixed to the external electrode 25 with solder (not shown), and can be driven by applying a predetermined potential between the external electrodes 25. . In particular, in recent years, there is a demand for a small multilayer piezoelectric element to ensure a large amount of displacement under a large pressure, and therefore, a higher electric field is applied and driven continuously for a long time.
JP-A-61-133715 Japanese Utility Model Publication No. 1-130568

  In the conventional co-fired multilayer piezoelectric element, the internal electrode pattern is formed so that the internal electrode and the external electrode having different polarities are not in contact with each other in order to form the internal electrode.

  However, unlike ordinary multilayer electronic components such as capacitors, the multilayer piezoelectric element continuously undergoes dimensional changes when driven. Therefore, when it is driven continuously for a long time under a high electric field and high pressure, it has a different polarity. The region where the internal electrodes overlap with each other via the piezoelectric body was effectively piezoelectrically displaced. At this time, if the shape of the portion where the internal electrodes of different polarities overlap with each other through the piezoelectric body is a line-symmetric shape, the portion where the displacement becomes large is aligned with a straight line that becomes the symmetric center line like the ridgeline of the mountain. Therefore, when the element is driven, the straight line that is the symmetric center line has the largest displacement, and the side surface of the element that is on the straight line is the starting point, and the laminated portion is peeled off and destroyed. Furthermore, due to the presence of a straight line with uniform displacement, a resonance phenomenon occurs, and a beat sound is generated, or a harmonic signal that is an integral multiple of the drive frequency is generated and becomes a noise component, which is used as an actuator. If there was a problem that would cause malfunction.

  In addition, when a laminated piezoelectric element that continuously undergoes dimensional changes is driven for a long time, the element temperature rises, and if the element temperature exceeds the heat dissipation, a thermal runaway phenomenon occurs, causing destruction, and the displacement amount deteriorates rapidly. There was a problem to do. Therefore, an internal electrode having a small specific resistance has been demanded in order to suppress an increase in element temperature.

  Furthermore, when a conventional multilayer piezoelectric element is used as an actuator used for a drive element such as a fuel injection device, the desired displacement amount gradually changes, causing a problem that the device malfunctions. There has been a demand for suppression of change in displacement and improved durability during operation.

  The present invention has been made in view of the above-described problems. The displacement amount of the piezoelectric actuator is increased even when the displacement amount of the piezoelectric actuator is increased under a high voltage and a high pressure and the piezoelectric actuator is continuously driven for a long period of time. It is an object of the present invention to provide a laminated piezoelectric element and a jetting device which are excellent in durability and have excellent durability.

  The multilayer piezoelectric element of the present invention has a multilayer body in which at least one piezoelectric body and a plurality of internal electrodes are alternately stacked, and the internal electrodes are alternately connected to the side surface of the multilayer body every other layer. In the laminated piezoelectric element that includes a pair of external electrodes and is driven by applying an electric field to the external electrodes, the shape of the portion where the internal electrodes of different polarities overlap with each other through the piezoelectric body is non-symmetrical It is characterized by.

  In addition, the shape of the portion where the internal electrodes of different polarities overlap with each other through the piezoelectric body is point-symmetric.

  The internal electrodes are exposed on all device side surfaces.

  In addition, a pattern for insulating the internal electrode and the external electrode having different polarities is formed on the internal electrode.

  The distance between the internal electrode and the external electrode having different polarities is 0.1 to 5 mm.

  Further, the distance between the internal electrode and the external electrode having different polarities on the element surface is 0.1 mm to 5 mm.

Further, the internal electrode pattern is formed with a C-plane or an R-plane, and the metal composition in the internal electrode is mainly composed of a group 8-10 metal and / or a group 11 metal. Further, when the content of the group 8-10 metal in the internal electrode is M1 (mass%) and the content of the group 11 metal is M2 (mass%), 0 <M1 ≦ 15, 85 ≦ M2 <100 and M1 + M2 = 100 are satisfied. Further, the Group 8-10 metal is at least one of Ni, Pt, Pd, Rh, Ir, Ru, and Os, and the Group 11 metal is It is characterized by being at least one of Cu, Ag, and Au.

  Further, the Group 8-10 metal is at least one of Pt and Pd, and the Group 11 metal is at least one of Ag and Au. Alternatively, the Group 8-10 metal is Ni, and the Group 11 metal is Cu.

Further, the piezoelectric body is mainly composed of a perovskite oxide. Further, the piezoelectric body is mainly composed of a perovskite oxide made of PbZrO 3 —PbTiO 3 .

  Further, the internal electrodes whose end portions are exposed on the side surfaces of the laminate and the internal electrodes whose end portions are not exposed are alternately configured, and the internal electrodes between which the end portions are not exposed and the external electrodes are formed. A groove is formed in the piezoelectric body portion, and the groove is filled with an insulator having a Young's modulus lower than that of the piezoelectric body.

  The injection device of the present invention includes a storage container having an injection hole, a stacked piezoelectric element stored in the storage container, and a valve that ejects liquid from the injection hole by driving the stacked piezoelectric element. It is characterized by becoming.

  According to the multilayer piezoelectric element of the present invention, the shape of the portion where the internal electrodes of different polarities overlap with each other through the piezoelectric body is non-symmetrical, so that the dimension change of the element when the multilayer piezoelectric element is driven Even if this occurs continuously, peeling of the laminated portion can be suppressed. In addition, since the resonance phenomenon that occurs when the displacement, which is the dimensional change of the elements, is complete, it is possible not only to prevent the generation of beat noise but also to prevent the generation of harmonic signals. Therefore, the noise of the control signal is suppressed, and the malfunction of the actuator can be suppressed.

  Furthermore, since the internal electrode shape is point symmetric, the axis of element displacement does not fluctuate, and the displacement direction can be made straight. Therefore, a highly reliable piezoelectric actuator with excellent durability that does not fluctuate. Can be provided.

  In addition, because the internal electrodes with different polarities are exposed on all side surfaces of the element, the stress generated in the element can be propagated to the outside of the element when driven as an actuator. A piezoelectric actuator can be provided.

  Furthermore, since the pattern for insulating the internal electrode and the external electrode having different polarities is formed on the internal electrode, it is not necessary to provide an insulation prevention area outside the element. Since the insulation preventing portion does not peel off or peel off due to the change, a highly reliable piezoelectric actuator having excellent durability can be provided.

  Furthermore, the distance between the internal electrode and the external electrode having different polarities is 0.1 to 5 mm, so that the displacement is large and the dielectric breakdown is prevented. An actuator can be provided.

  Furthermore, since the distance between the internal electrode and the external electrode having different polarities on the element surface is 0.1 mm to 5 mm, both the displacement amount is large and the dielectric breakdown of the element surface is prevented, and the durability is excellent. A highly reliable piezoelectric actuator can be provided.

  Furthermore, since the C-plane or R-plane is formed on the internal electrode pattern, it is possible to avoid stress concentration at the end of the electrode pattern when the element is displaced, so that it has high durability and high reliability. The piezoelectric actuator can be provided.

Furthermore, since the metal composition in the internal electrode is mainly composed of a group 8-10 metal and / or a group 11 metal, the piezoelectric body and the internal electrode can be fired simultaneously, and the bonding interface is firmly bonded. Not only can the element be displaced and stress is applied to the internal electrode, but the internal electrode itself can expand and contract, so the stress does not concentrate on one point, providing a highly reliable piezoelectric actuator with excellent durability can do.

Therefore, even if the multilayer piezoelectric element is continuously driven, the desired displacement amount does not change effectively, so that the device does not malfunction, and a highly reliable injection device having excellent durability is provided. it can.

  The multilayer piezoelectric element of the present invention will be described in detail below. 1A and 1B show an embodiment of a laminated piezoelectric element according to the present invention. FIG. 1A is a perspective view, and FIG. 1B is a perspective development view showing a laminated state of a piezoelectric layer and an internal electrode layer. FIG. 2 is an enlarged view showing an internal electrode pattern of the multilayer piezoelectric element of the present invention, (a) is a perspective development view showing a laminated state of the piezoelectric layer and the internal electrode layer, and (b) is a different polarity. 3 is a perspective view showing a portion 12a where internal electrodes overlap with each other via a piezoelectric body 11. FIG.

  As shown in FIG. 1, the multilayer piezoelectric element of the present invention has end portions where the internal electrodes 12 are exposed on a pair of opposing side surfaces of a multilayer body 13 in which piezoelectric bodies 11 and internal electrodes 12 are alternately laminated. The external electrodes 15 that are electrically conductive are joined every other layer. In addition, an inactive layer 14 formed of the piezoelectric body 11 is stacked on both ends of the stacked body 13 in the stacking direction. Here, when the multilayer piezoelectric element of the present invention is used as a multilayer piezoelectric actuator, a lead wire may be connected and fixed to the external electrode 15 by soldering, and the lead wire may be connected to an external voltage supply unit.

  An internal electrode 12 is arranged between the piezoelectric bodies 11. Since the internal electrode 12 is made of a metal material such as silver-palladium, a predetermined voltage is applied to each piezoelectric body 11 through the internal electrode 12. The piezoelectric body 11 has a function of causing displacement due to the reverse piezoelectric effect.

On the other hand, since the inert layer 14 is a layer of a plurality of piezoelectric bodies 11 in which the internal electrode 12 is not disposed, no displacement occurs even when a voltage is applied.

  In the present invention, as shown in FIG. 2B, the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is non-symmetrical. Here, the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is formed through the piezoelectric body 11 of the stacked piezoelectric element, and the electrode pattern of the internal electrode 12 to which a voltage of different polarity is applied. The area | region which mutually overlaps is shown. Actually, the piezoelectric body 11 is effectively piezoelectric in a region sandwiched between the internal electrodes 12 to which electric fields of different polarities are applied (the portion 12a where the internal electrodes 12 having different polarities overlap each other via the piezoelectric body 11). The laminated piezoelectric element is driven by being displaced. Therefore, if the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is a line-symmetrical shape, the portion where the displacement is increased is aligned with a straight line that is a symmetric center line, such as a ridgeline of a mountain. Therefore, when the element is driven, a straight line that is a symmetric center line has the largest displacement, and the side surface of the element that is on the straight line is the starting point, and the stacked portion is peeled off and is not preferable. Furthermore, due to the presence of a straight line with uniform displacement, a resonance phenomenon occurs, and a beat sound is generated, or a harmonic signal that is an integral multiple of the drive frequency is generated and becomes a noise component, which is used as an actuator. In this case, it is not preferable because it causes a malfunction.

  On the other hand, if the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is axisymmetric, the dimensional change of the element continuously occurs when the stacked piezoelectric element is driven. However, peeling of the laminated portion can be suppressed. In addition, since the resonance phenomenon that occurs when the displacement, which is the dimensional change of the elements, is complete, it is possible not only to prevent the generation of beat noise but also to prevent the generation of harmonic signals. Therefore, the noise of the control signal is suppressed, and the malfunction of the actuator can be suppressed. Here, the non-axisymmetric shape indicates that the shape cannot take a line symmetry. That is, it does not take a symmetrical shape when viewed from any direction.

  Furthermore, in the present invention, it is preferable that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is point-symmetric. If the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is not point-symmetric, if the element is displaced, the center axes of the element displacement are not aligned and the displacement axes are not aligned. . Due to the point symmetry of the internal electrode 12, the center axis of the element displacement is in a straight line and the element displacement axis is not shaken. Therefore, the displacement direction is in a straight line. The piezoelectric actuator can be provided.

  Here, point symmetry indicates a shape having a so-called symmetry center. In the present invention, an arbitrary one point is defined in the plane of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11, and the internal electrodes of different polarities are formed on the piezoelectric body around the one point. When the overlapping portion 12a is rotated through 11 to be parallel to the surface, the shape before and after the rotation overlaps at a rotation angle within 180 °. The point that becomes the center of rotation at this time is the center of symmetry. As point symmetry, 180 ° rotational symmetry, 120 ° rotational symmetry, and 90 ° rotational symmetry are well known, but by minimizing the path that ensures conduction between the internal electrode 12 and the external electrode 15, A 180 [deg.] Rotational symmetry capable of manufacturing a laminated piezoelectric element with a simple structure and high accuracy is preferable.

  Further, when the center of symmetry is the center of gravity of the portion 12 a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11, all the internal electrodes of different polarities of the stacked piezoelectric element overlap with each other via the piezoelectric body 11. Since the center of gravity of the portion 12a is aligned with the stacking direction, the center axis in the displacement direction is not only in a straight line, but the center of gravity coincides with the center axis in the displacement direction, so that a highly reliable piezoelectric actuator with excellent durability can be obtained. It is more preferable because it can be provided.

  Furthermore, in the present invention, it is preferable that the internal electrodes 12 having different polarities are exposed on all the element side surfaces. In the portion where the internal electrode 12 is not exposed on the side surface of the element, the portion where the electrode is not exposed cannot be displaced during driving. Therefore, since the region displaced during driving is confined inside the element, the stress during displacement is Since it concentrates on the boundary of the part with an electrode and a part without an electrode and a problem arises in durability, it is not preferable. Since the internal electrodes 12 of different polarities are exposed on all the device side surfaces, stress generated in the device when it is driven as an actuator can be propagated to the outside of the device. A piezoelectric actuator can be provided.

  Furthermore, in the present invention, it is preferable that a pattern for insulating the external electrode 15 having a different polarity is formed on the internal electrode 12. If the internal electrode 12 is not formed with a pattern for insulating the external electrode 15 having a different polarity, there is a problem of short circuit. Since the pattern for insulating the external electrode 15 having a different polarity is formed on the internal electrode 12, it is not necessary to provide an insulation prevention region outside the element. Since the insulation preventing portion does not peel off or peel off, it is possible to provide a highly reliable piezoelectric actuator with excellent durability.

  Furthermore, in the present invention, the distance L1 between the internal electrode 12 and the external electrode 15 having different polarities is 0.1 to 5 mm, so that both the displacement amount is large and the dielectric breakdown is prevented, and the durability is excellent. A highly reliable piezoelectric actuator can be provided. If it exceeds 5 mm, the drive region of the piezoelectric body 11 becomes smaller as the internal electrode area decreases, which is not preferable. If it is less than 0.1 mm, the insulation characteristics deteriorate rapidly.

  In order to increase the driving dimension and enhance the durability, the thickness is preferably 0.1 mm or more and 3 mm or less, and more preferably 0.5 mm or more and 1 mm or less. Here, the distance L1 is an insulation distance between the internal electrode 12 and the external electrode 15 on the piezoelectric body 11 on which the internal electrode 12 is disposed, and indicates the shortest distance of the insulation distance.

  Furthermore, in the present invention, as shown in FIG. 3, the distance L2 between the internal electrode 12 and the external electrode 15 having different polarities on the element surface is 0.1 mm to 5 mm, so that the displacement is increased and the dielectric breakdown is prevented. It is possible to provide a highly reliable piezoelectric actuator having both durability and excellent durability. If it exceeds 5 mm, the drive region of the piezoelectric body 11 becomes smaller as the internal electrode area decreases, which is not preferable. If it is less than 0.1 mm, the insulation characteristics deteriorate rapidly.

  In order to increase the driving dimension and enhance the durability, the thickness is preferably 0.1 mm or more and 3 mm or less, and more preferably 0.5 mm or more and 1 mm or less. Here, the distance L2 is an insulation distance between one internal electrode 12 and the external electrode 15 on the side surface of the multilayer body 13, and indicates the shortest distance of the insulation distance.

  Furthermore, in the present invention, since the C-plane or R-plane is formed on the internal electrode 12 pattern, it is possible to avoid stress concentration at the end of the electrode pattern when the element is displaced. It is possible to provide a highly reliable piezoelectric actuator excellent in performance. It is preferable that the C surface or the R surface is formed on all of the electrode patterns because durability is improved. It is preferable that the piezoelectric body 11 itself has a C-plane or R-plane because durability is further improved. It is preferable that the entire outer periphery of the electrode pattern is formed in a curved line because the displacement amount is further increased and the durability is improved.

  In the present invention, it is desirable that the metal composition in the internal electrode 12 is mainly composed of a group 8-10 metal and / or a group 11 metal. This is because the above metal composition has high heat resistance, so that the piezoelectric body 11 and the internal electrode 12 having a high firing temperature can be fired simultaneously. Therefore, since the sintering temperature of the external electrode 15 can be made lower than the sintering temperature of the piezoelectric body 11, it is possible to suppress severe mutual diffusion between the piezoelectric body 11 and the external electrode 15.

  Furthermore, when the content of the group 8-10 metal in the internal electrode 12 is M1 (mass%) and the content of the group 11 metal is M2 (mass%), 0 <M1 ≦ 15, 85 ≦ It is preferable that the main component is a metal composition satisfying M2 <100 and M1 + M2 = 100. This is because when the group 8-10 metal exceeds 15% by mass, the specific resistance increases, and when the laminated piezoelectric element is continuously driven, the internal electrode 12 generates heat, and the generated heat has temperature dependence. This is because the amount of displacement of the multilayer piezoelectric element may be reduced because the displacement characteristic is reduced by acting on the substrate 11. Further, when the external electrode 15 is formed, the external electrode 15 and the internal electrode 12 are mutually diffused and joined. However, when the group 8-10 metal exceeds 15 mass%, the internal electrode component diffuses into the external electrode 15. This is because the durability of the laminated piezoelectric element whose dimensions change during driving is reduced because the hardness of the above-described portions becomes high. Further, in order to suppress migration of the Group 11 metal in the internal electrode 12 to the piezoelectric body 11, the Group 8 to 10 metal content is preferably 0.001% by mass or more and 15% by mass or less. Moreover, 0.1 mass% or more and 10 mass% or less are preferable at the point of improving the durability of a laminated piezoelectric element. Moreover, when it is excellent in heat conduction and needs higher durability, 0.5 mass% or more and 9.5 mass% or less are more preferable. In addition, when higher durability is required, it is more preferably 2% by mass or more and 8% by mass or less.

  Here, when the Group 11 metal is less than 85% by mass, the specific resistance of the internal electrode 12 increases, and the internal electrode 12 may generate heat when the stacked piezoelectric element is continuously driven. Further, in order to suppress migration of the Group 11 metal in the internal metal 12 to the piezoelectric body 11, the Group 11 metal is preferably 85 mass% or more and 99.999 mass% or less. Moreover, 90 mass% or more and 99.9 mass% or less are preferable at the point of improving the durability of a laminated piezoelectric element. Moreover, when higher durability is required, 90.5 mass% or more and 99.5 mass% or less are more preferable. Moreover, when higher durability is calculated | required, 92 to 98 mass% is further more preferable.

  The 8-10 group metal and 11 group metal which show the mass% of the metal component in the internal electrode 12 can be specified by an analysis method such as EPMA (Electron Probe Micro Analysis).

  Furthermore, the metal component in the internal electrode 12 of the present invention is that the Group 8-10 metal is at least one of Ni, Pt, Pd, Rh, Ir, Ru, Os, and the Group 11 metal is Cu, Ag, Preferably, at least one of Au is used. This is because the metal composition has excellent mass productivity in recent alloy powder synthesis techniques.

  Furthermore, as for the metal component in the internal electrode 12, it is preferable that a group 8-10 metal is at least 1 or more types among Pt and Pd, and a group 11 metal is at least 1 type or more among Ag and Au. Thereby, there is a possibility that the internal electrode 12 having excellent heat resistance and small specific resistance can be formed.

  Furthermore, as for the metal component in the internal electrode 12, it is preferable that a 8-10 group metal is Ni. Thereby, the internal electrode 12 excellent in heat resistance may be formed.

  Furthermore, as for the metal component in the internal electrode 12, it is preferable that group 11 metal is Cu. Thereby, there is a possibility that the internal electrode 12 having a low hardness and excellent thermal conductivity can be formed.

  Furthermore, it is preferable to add an oxide, nitride, or carbide to the internal electrode 12 together with the metal composition described above. Thereby, the strength of the internal electrode is increased, and the durability of the multilayer piezoelectric element is improved. In particular, an oxide is more preferable because it interdiffuses with the piezoelectric body 11 and increases the adhesion strength between the internal electrode 12 and the piezoelectric body 11. Furthermore, it is preferable that the said inorganic composition is 50 volume% or less. Thereby, the bonding strength between the internal electrode 12 and the piezoelectric body 11 can be made smaller than the strength of the piezoelectric body 11. More preferably, the durability of the multilayer piezoelectric element can be improved by setting the volume to 30% by volume or less.

It is preferable that the oxide contains a perovskite oxide composed of PbZrO 3 —PbTiO 3 as a main component. The content of the added oxide or the like can be calculated from the area ratio of the composition in the internal electrode in the cross-sectional SEM image of the multilayer piezoelectric element.

Furthermore, it is preferable that the piezoelectric body 11 has a perovskite oxide as a main component. This is because, for example, when formed of a perovskite type piezoelectric ceramic material typified by barium titanate (BaTiO 3 ) or the like, the piezoelectric strain constant d 33 indicating the piezoelectric characteristics is high, so that the amount of displacement can be increased. Further, the piezoelectric body 11 and the internal electrode 12 can be fired simultaneously. The piezoelectric body 11 described above preferably contains a perovskite oxide composed of PbZrO 3 —PbTiO 3 having a relatively high piezoelectric strain constant d 33 as a main component.

  Furthermore, it is preferable that a calcination temperature is 900 degreeC or more and 1000 degrees C or less. This is because when the firing temperature is 900 ° C. or lower, the firing temperature is low, so firing is insufficient, and it becomes difficult to manufacture the dense piezoelectric body 11. Further, when the firing temperature exceeds 1000 ° C., the bonding strength between the internal electrode 12 and the piezoelectric body 11 increases.

  In addition, the internal electrodes 12 whose end portions are exposed on the side surfaces of the multilayer piezoelectric element of the present invention and the internal electrodes 12 whose end portions are not exposed are alternately configured, and the internal electrodes 12 whose end portions are not exposed and It is preferable that a groove is formed in the piezoelectric portion between the external electrodes 15 and an insulator having a Young's modulus lower than that of the piezoelectric body 11 is formed in the groove. As a result, in such a multilayer piezoelectric element, stress generated by displacement during driving can be relieved, so that heat generation of the internal electrode 12 can be suppressed even when continuously driven.

  Next, a method for producing the multilayer piezoelectric element of the present invention will be described.

The multilayer piezoelectric element of the present invention includes a calcined powder of a perovskite oxide piezoelectric ceramic made of PbZrO 3 —PbTiO 3 or the like, a binder made of an organic polymer such as acrylic or butyral, and DBP (phthalate). A ceramic green sheet that is made into a piezoelectric body 11 by mixing with a plasticizer such as dibutyl acid or DOP (diethyl phthalate) to produce a slurry, and then forming the slurry by a tape molding method such as a known doctor blade method or calendar roll method. Is made.

  Next, a metal paste such as silver-palladium and the like constituting the internal electrode 12 is mixed with a metal oxide such as silver oxide, a binder, a plasticizer, and the like to prepare a conductive paste. Printing on the upper surface to a thickness of 1 to 40 μm by screen printing or the like.

  At this time, the internal electrode pattern is formed so that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other through the piezoelectric body 11 is non-symmetrical.

  Then, a plurality of green sheets with conductive paste printed on the upper surface are laminated, the binder is debindered at a predetermined temperature, and then fired at 900 to 1200 ° C., whereby the laminate 13 is produced.

  At this time, when the metal powder constituting the internal electrode 12 such as silver-palladium is added to the green sheet of the inert layer 14 or when the green sheet of the inert layer 14 is laminated, the silver- By printing a slurry made of a metal powder, an inorganic compound, a binder, and a plasticizer constituting the internal electrode 12 such as palladium on a green sheet, shrinkage behavior and shrinkage rate of the inert layer 14 and other parts during sintering Therefore, a dense laminate can be formed.

  In addition, the laminated body 13 is not limited to what is produced by the said manufacturing method, What is necessary if the laminated body 13 which laminates | stacks alternately the several piezoelectric body 11 and the some internal electrode 12 is producible. It may be formed by any manufacturing method.

  Thereafter, the internal electrodes 12 whose ends are exposed and the internal electrodes 12 whose ends are not exposed are alternately formed on the side surfaces of the multilayer piezoelectric element, and the internal electrodes 12 and the external electrodes 15 whose ends are not exposed are formed alternately. A groove is formed in the piezoelectric portion, and an insulator such as resin or rubber having a Young's modulus lower than that of the piezoelectric body 11 is formed in the groove. Here, the groove is formed on the side surface of the laminate 13 by an internal dicing device or the like.

Next, a binder is added to the glass powder to produce a silver glass conductive paste, which is formed into a sheet and dried (the solvent is scattered), and the raw density of the sheet is controlled to 6 to 9 g / cm 3 . Then, this sheet is transferred to the external electrode formation surface of the columnar laminate 13, and is a temperature higher than the softening point of the glass, a temperature not higher than the melting point of silver (965 ° C.), and the firing temperature (° C. of the laminate 13). ) At a temperature of 4/5 or less, the binder component in the sheet produced using the silver glass conductive paste is scattered and disappeared, and the external electrode 15 made of a porous conductor having a three-dimensional network structure. Can be formed.

  At this time, the paste constituting the external electrode 15 may be baked after being laminated on the multilayer sheet, or may be baked after being laminated one by one. Baking is better for mass production. And when changing a glass component for every layer of an external electrode layer, what is necessary is just to have what changed the quantity of the glass component for every sheet | seat, but a very thin glass rich layer is formed on the surface which contacted the piezoelectric material 11 most. When it is desired to configure, it is used to laminate a multilayer sheet after printing a glass-rich paste on the laminate by a method such as screen printing. At this time, a sheet of 5 μm or less may be used instead of printing.

  The baking temperature of the silver glass conductive paste effectively forms a neck portion, diffuses and joins silver in the silver glass conductive paste and the internal electrode 12, and effectively creates voids in the external electrode 15. The temperature is preferably 500 to 800 ° C. from the standpoint of remaining and further partially bonding the external electrode 15 and the side surface of the columnar laminate 13. The softening point of the glass component in the silver glass conductive paste is preferably 500 to 800 ° C.

  When the baking temperature is higher than 800 ° C., the silver powder of the silver glass conductive paste is sintered too much to form a porous conductor having an effective three-dimensional network structure. May become too dense, and as a result, the Young's modulus of the external electrode 15 may become too high to absorb the stress during driving sufficiently and the external electrode 15 may be disconnected. Preferably, baking should be performed at a temperature within 1.2 times the softening point of the glass.

  On the other hand, when the baking temperature is lower than 500 ° C., the diffusion electrode is not sufficiently bonded between the end portion of the internal electrode 12 and the external electrode 15, so that the neck portion is not formed and the internal electrode 12 and the external electrode are externally driven. There is a possibility of causing a spark between the electrodes 15.

  Next, the laminated body 13 on which the external electrode 15 is formed is immersed in a silicone rubber solution, and the silicone rubber solution is vacuum degassed to fill the groove of the laminated body 13 with silicone rubber. The laminated body 13 is pulled up, and the side surface of the laminated body 13 is coated with silicone rubber. Thereafter, the silicone rubber filled in the groove and coated on the side surface of the laminated body 13 is cured to complete the laminated piezoelectric element of the present invention.

  Then, a lead wire is connected to the external electrode 15, a direct current voltage of 0.1 to 3 kV / mm is applied to the pair of external electrodes 15 via the lead wire, and the laminate 13 is subjected to polarization treatment. When a multilayer piezoelectric actuator using the multilayer piezoelectric element is completed, a lead wire is connected to an external voltage supply unit, and a voltage is applied to the internal electrode 12 via the lead wire and the external electrode 15, each piezoelectric The body 11 is largely displaced by the inverse piezoelectric effect, and thereby functions as an automobile fuel injection valve that injects and supplies fuel to the engine, for example.

  Furthermore, a conductive auxiliary member made of a conductive adhesive in which a metal mesh or a mesh-like metal plate is embedded on the outer surface of the external electrode 15 may be formed. In this case, even when a large current is input to the actuator by providing a conductive auxiliary member on the outer surface of the external electrode 15 and the actuator is driven at a high speed, a large current can flow through the conductive auxiliary member. For the reason that the current flowing through 15 can be reduced, the external electrode 15 can be prevented from causing local heat generation and disconnection, and the durability can be greatly improved. Furthermore, since a metal mesh or a mesh-like metal plate is embedded in the conductive adhesive, it is possible to prevent the conductive adhesive from cracking.

  The metal mesh is a braided metal wire, and the mesh metal plate is a mesh formed by forming holes in a metal plate.

  Furthermore, the conductive adhesive constituting the conductive auxiliary member is preferably made of a polyimide resin in which silver powder is dispersed. That is, by dispersing silver powder having a low specific resistance in a polyimide resin having high heat resistance, a conductive auxiliary member having a low resistance value and maintaining a high adhesive strength can be formed even when used at high temperatures. . More preferably, the conductive particles are non-spherical particles such as flakes or needles. This is because the entanglement between the conductive particles can be strengthened by making the shape of the conductive particles non-spherical particles such as flakes and needles, and the shear strength of the conductive adhesive can be further increased. This is because it can be increased.

  The multilayer piezoelectric element of the present invention is not limited to these, and various modifications can be made without departing from the gist of the present invention.

  Moreover, although the example which formed the external electrode 15 in the side surface which the laminated body 13 opposes above was demonstrated, in this invention, you may form a pair of external electrode in the side surface provided adjacently, for example.

  FIG. 5 shows an injection device according to the present invention. An injection hole 33 is provided at one end of the storage container 31, and a needle valve 35 that can open and close the injection hole 33 is stored in the storage container 31. Has been.

  A fuel passage 37 is provided in the injection hole 33 so as to be able to communicate. The fuel passage 37 is connected to an external fuel supply source, and fuel is always supplied to the fuel passage 37 at a constant high pressure. Therefore, when the needle valve 35 opens the injection hole 33, the fuel supplied to the fuel passage 37 is formed to be injected into a fuel chamber (not shown) of the internal combustion engine at a constant high pressure.

  Further, the upper end portion of the needle valve 35 has a large diameter, and serves as a piston 41 slidable with a cylinder 39 formed in the storage container 31. In the storage container 31, the piezoelectric actuator 43 described above is stored.

  In such an injection device, when the piezoelectric actuator 43 is extended by applying a voltage, the piston 41 is pressed, the needle valve 35 closes the injection hole 33, and the supply of fuel is stopped. When the application of voltage is stopped, the piezoelectric actuator 43 contracts, the disc spring 45 pushes back the piston 41, and the injection hole 33 communicates with the fuel passage 37 so that fuel is injected.

  Further, the present invention relates to a multilayer piezoelectric element and an injection device, but is not limited to the above-described embodiments. For example, a fuel injection device for an automobile engine, a liquid injection device such as an ink jet, an optical device, etc. Drive elements mounted on precision positioning devices, vibration prevention devices, etc., or sensor elements mounted on combustion pressure sensors, knock sensors, acceleration sensors, load sensors, ultrasonic sensors, pressure sensors, yaw rate sensors, and piezoelectric elements Needless to say, the present invention can be applied to elements other than circuit elements mounted on a gyroscope, a piezoelectric switch, a piezoelectric transformer, a piezoelectric breaker, or the like as long as the elements use piezoelectric characteristics.

  Example 1 A laminated piezoelectric actuator comprising the laminated piezoelectric element of the present invention was produced as follows.

First, a slurry in which a calcined powder of a piezoelectric ceramic mainly composed of lead zirconate titanate (PbZrO 3 —PbTiO 3 ) having an average particle size of 0.4 μm, a binder, and a plasticizer is prepared, and a doctor blade method is used. A ceramic green sheet to be the piezoelectric body 11 having a thickness of 150 μm was produced.

  On one side of this ceramic green sheet, 300 sheets of a conductive paste prepared by adding a binder to a silver-palladium alloy (silver 95% by mass-palladium 5% by weight) to a thickness of 3 μm by a screen printing method are laminated and fired. did. Firing was carried out at 1000 ° C. after holding at 800 ° C.

  Here, the internal electrode 12 was printed so as to have the shape shown in FIGS.

  FIG. 6 shows that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other through the piezoelectric body 11 is axisymmetric and point symmetric, and the internal electrodes of different polarities on all the element side surfaces of the laminated piezoelectric element. It is a figure which shows the internal electrode pattern which has exposed. Here, FIGS. 6A and 6B are plan views showing internal electrode patterns having different polarities, and FIG. 6C shows a portion 12a in which internal electrodes having different polarities overlap with each other through the piezoelectric body 11. FIG. FIG.

  FIG. 7 shows that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other through the piezoelectric body 11 is non-axisymmetric and point symmetrical, and the internal electrodes of different polarities on all the element side surfaces of the laminated piezoelectric element. It is a figure which shows that the R surface is further formed in the internal electrode pattern by the internal electrode pattern which is exposed. 7A and 7B are plan views showing internal electrode patterns having different polarities, and FIG. 7C shows a portion 12a where internal electrodes having different polarities overlap with each other through the piezoelectric body 11. FIG.

  In FIG. 8, the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is a line-symmetrical shape and a point-symmetrical shape. It is a figure which shows the internal electrode pattern which is not exposed. Here, FIGS. 8A and 8B are plan views showing internal electrode patterns having different polarities, and FIG. 8C shows a portion 12 a where internal electrodes having different polarities overlap with each other through the piezoelectric body 11. FIG.

  In FIG. 9, the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is a line-symmetrical shape and a point-symmetrical shape, and the internal electrodes of different polarities are present on all the element side surfaces of the laminated piezoelectric element. It is a figure which shows the internal electrode pattern of the exposed multilayer piezoelectric element. Here, FIGS. 9A and 9B are plan views showing internal electrode patterns of different polarities, and FIG. 9C shows a portion 12 a where internal electrodes having different polarities overlap with each other through the piezoelectric body 11. FIG.

  FIG. 10 shows that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is axisymmetric and asymmetrical, and the internal electrodes of different polarities on all the element side surfaces of the laminated piezoelectric element. It is a figure which shows the internal electrode pattern of the lamination type piezoelectric element which has exposed. Here, FIGS. 10A and 10B are plan views showing internal electrode patterns of different polarities, and FIG. 10C shows a portion 12a where internal electrodes having different polarities overlap with each other through the piezoelectric body 11. FIG. FIG.

  Next, a mixture of a flaky silver powder having an average particle size of 2 μm and an amorphous glass powder having a softening point of 640 ° C. having a balance of silicon having an average particle size of 2 μm as a main component is combined with a silver powder 8 parts by mass is added to 100 parts by mass of the total mass of the glass powder, and mixed well to produce a silver glass conductive paste. The silver glass conductive paste thus produced is screen-printed on a release film. After drying, the film was peeled off from the release film to obtain a silver glass conductive paste sheet.

  And the sheet | seat of the said silver glass paste was transcribe | transferred and laminated | stacked on the external electrode 15 surface of the laminated body 13, and baked at 700 degreeC for 30 minutes, and the external electrode 15 was formed.

  Thereafter, a lead wire is connected to the external electrode 15, a 3 kV / mm direct current electric field is applied to the positive and negative external electrodes 15 through the lead wire for 15 minutes, and polarization is performed. As shown in FIG. A multilayer piezoelectric actuator using a piezoelectric element was produced.

When a DC voltage of 170 V was applied to the obtained multilayer piezoelectric element, a displacement amount of 45 μm in the stacking direction was obtained in all the multilayer piezoelectric actuators. Further, a test was performed in which the multilayer piezoelectric actuator was continuously driven up to 1 × 10 9 times by applying an AC voltage of 0 to +170 V at a frequency of 150 Hz at room temperature. The results are as shown in Table 1.

  From Table 1, the sample numbers 3, 4 and 5 as comparative examples have a pattern of the internal electrode 12, and the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is line symmetric. When the laminated piezoelectric actuator is continuously driven, the portion where the piezoelectric displacement increases becomes a line-symmetrical center line, and the displacement becomes remarkably large on the center line, so that the displacement is caused between the piezoelectric body 11 and the internal electrode 12 on the side surface of the element. Propagation to the lamination interface increased the load applied to the lamination interface, resulting in peeling, and the generation of beat sound and noise.

On the other hand, in sample numbers 1 and 2, which are examples of the present invention, the pattern of the internal electrode 12 is such that the shape of the portion 12a where the internal electrodes of different polarities overlap with each other via the piezoelectric body 11 is non-symmetrical. Therefore, even after 1 × 10 9 continuous driving, the element displacement does not decrease significantly, it has the effective displacement required as a multilayer piezoelectric actuator, and it has excellent durability without malfunction A multilayer piezoelectric actuator having the characteristics was successfully fabricated.

In particular, Sample No. 2 has an R surface in the internal electrode pattern, and the element displacement amount hardly changed even after continuous driving 1 × 10 9 times, and was extremely excellent in durability.

(Example 2) Sample No. The change rate of the displacement amount of each sample was measured by changing the material composition of the internal electrode 12 of the multilayer piezoelectric actuator 2. Here, the change rate of the displacement amount is the displacement amount (μm) when the multilayer piezoelectric element of each sample reaches 1 × 10 9 times of driving, and the initial value of the multilayer piezoelectric element before starting the continuous driving. This is a comparison with the amount of displacement (μm) in the state. The results are shown in Table 2.

  From Table 2, Sample No. When one internal electrode 12 was made of 100% silver, the laminated piezoelectric element was damaged by silver migration, and continuous driving became impossible. Sample No. 18 is a metal composition in the internal electrode 12, the group 8-10 metal content exceeds 15 mass%, and the group 11 metal content is less than 85 mass%. It can be seen that because the resistance is large, heat is generated when the multilayer piezoelectric element is continuously driven, and the displacement amount of the multilayer piezoelectric actuator decreases.

  In contrast, sample no. 2 to 14, when the metal composition in the internal electrode 12 is 8% to 10% of the metal content and 1% of the metal group content is 2% by mass, 0 <M1 ≦ 15, 85 ≦ M2 <100, M1 + M2 = In order to have a metal composition that satisfies 100% by mass as a main component, the specific resistance of the internal electrode 12 can be reduced, and heat generated in the internal electrode 12 can be suppressed even when continuously driven. It can be seen that a laminated actuator with a stable element displacement can be produced.

  Sample No. 15 to 17 can reduce the specific resistance of the internal electrode 12 and suppress the heat generation generated in the internal electrode 12 even when continuously driven, so that it can be understood that a laminated actuator with a stable element displacement can be manufactured.

  It should be noted that the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the scope of the present invention.

1A and 1B show a laminated piezoelectric element of the present invention, in which FIG. 1A is a perspective view, and FIG. 2B is a developed perspective view showing a laminated state of a piezoelectric layer and an internal electrode layer. The internal electrode pattern of the lamination type piezoelectric element of the present invention is shown, (a) is a perspective development view showing the lamination state of a piezoelectric material layer and an internal electrode layer, and (b) is an internal electrode of different polarity between piezoelectric materials. It is a figure which shows the part which overlaps through. It is a cross-sectional view which shows the distance of the internal electrode and external electrode which the lamination type piezoelectric element of this invention has. 1 shows a conventional multilayer piezoelectric element, in which (a) is a perspective view and (b) is a developed perspective view showing a laminated state of a piezoelectric layer and an internal electrode layer. It is sectional drawing which shows the injection apparatus of this invention. The internal electrode pattern of the laminated piezoelectric element which is an Example of this invention is shown, (a), (b) is a top view which shows each internal electrode pattern which has a different polarity, (c) is a different polarity It is a figure which shows the part which internal electrodes overlap through a piezoelectric material. The internal electrode pattern of the laminated piezoelectric element which is an Example of this invention is shown, (a), (b) is a top view which shows each internal electrode pattern which has a different polarity, (c) is a different polarity It is a figure which shows the part which internal electrodes overlap through a piezoelectric material. The internal electrode patterns of a conventional multilayer piezoelectric element are shown. (A) and (b) are plan views showing internal electrode patterns having different polarities. (C) is an internal electrode having different polarities. It is a figure which shows the part which overlaps through a body. The internal electrode patterns of a conventional multilayer piezoelectric element are shown. (A) and (b) are plan views showing internal electrode patterns having different polarities. (C) is an internal electrode having different polarities. It is a figure which shows the part which overlaps through a body. The internal electrode patterns of a conventional multilayer piezoelectric element are shown. (A) and (b) are plan views showing internal electrode patterns having different polarities. (C) is an internal electrode having different polarities. It is a figure which shows the part which overlaps through a body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11, 21 ... Piezoelectric material 12, 22 ... Internal electrode 12a ... The part which the internal electrodes of different polarity overlap through a piezoelectric material 13, 23 ... Laminated body 14, 24 ... Inactive Layers 15, 25 ... External electrode 31 ... Storage container 33 ... Injection hole 35 ... Valve 37 ... Fuel passage 39 ... Cylinder 41 ... Piston 43 ... Piezoelectric actuator

Claims (17)

  1. It has a laminate formed by alternately laminating at least one piezoelectric body and a plurality of internal electrodes, and has a pair of external electrodes in which the internal electrodes are alternately connected to every other side surface of the laminate, A laminated piezoelectric element that is driven by applying an electric field to the external electrode, wherein the shape of a portion where internal electrodes of different polarities overlap with each other through a piezoelectric body is non-symmetrical.
  2. 2. The multilayer piezoelectric element according to claim 1, wherein the shape of the portion where the internal electrodes of different polarities overlap with each other through the piezoelectric body is point-symmetric.
  3. 3. The multilayer piezoelectric element according to claim 1, wherein the internal electrode is exposed on all element side surfaces.
  4. 4. The multilayer piezoelectric element according to claim 1, wherein a pattern for insulating the internal electrode and the external electrode having different polarities is formed on the internal electrode.
  5. The multilayer piezoelectric element according to claim 1, wherein a distance between the internal electrode and the external electrode having different polarities is 0.1 to 5 mm.
  6. 6. The multilayer piezoelectric element according to claim 1, wherein a distance between the internal electrode and the external electrode having different polarities on the element surface is 0.1 mm to 5 mm.
  7. The multilayer piezoelectric element according to claim 1, wherein a C-plane or an R-plane is formed on the internal electrode pattern.
  8. The multilayer piezoelectric element according to claim 1, wherein the metal composition in the internal electrode contains a group 8-10 metal and / or a group 11 metal as a main component.
  9. When the content of the group 8-10 metal in the internal electrode is M1 (mass%) and the content of the group 11 metal is M2 (mass%), 0 <M1 ≦ 15, 85 ≦ M2 <100, M1 + M2 = The multilayer piezoelectric element according to claim 1, wherein 100 is satisfied.
  10. The Group 8-10 metal is at least one of Ni, Pt, Pd, Rh, Ir, Ru, and Os, and the Group 11 metal is at least one of Cu, Ag, and Au. The multilayer piezoelectric element according to claim 1.
  11. The said group 8-10 metal is at least 1 or more types among Pt and Pd, and a 11 group metal is at least 1 or more types among Ag and Au, The Claim 1 thru | or 10 characterized by the above-mentioned. Multilayer piezoelectric element.
  12. The multilayer piezoelectric element according to claim 1, wherein the group 8-10 metal is Ni.
  13. The multilayer piezoelectric element according to claim 1, wherein the group 11 metal is Cu.
  14. The multilayer piezoelectric element according to claim 1, wherein the piezoelectric body contains a perovskite oxide as a main component.
  15. The multilayer piezoelectric element according to claim 14, wherein the piezoelectric body contains a perovskite oxide composed of PbZrO 3 —PbTiO 3 as a main component.
  16. The internal electrodes whose end portions are exposed on the side surfaces of the laminate and the internal electrodes whose end portions are not exposed are alternately configured, and the internal electrodes between which the end portions are not exposed and the external electrodes are formed. The multilayer piezoelectric element according to claim 1, wherein a groove is formed in the piezoelectric body portion, and the groove is filled with an insulator having a Young's modulus lower than that of the piezoelectric body. .
  17. A storage container having an injection hole, the multilayer piezoelectric element stored in the storage container, and a valve for ejecting liquid from the injection hole by driving the multilayer piezoelectric element; An injection device comprising:
JP2004220727A 2004-07-28 2004-07-28 Laminated piezoelectric element and injection device employing it Pending JP2006041281A (en)

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JP2004220727A JP2006041281A (en) 2004-07-28 2004-07-28 Laminated piezoelectric element and injection device employing it
PCT/JP2005/004097 WO2005086247A1 (en) 2004-03-09 2005-03-09 Multilayer piezoelectric element and its manufacturing method
CN 200580006818 CN100563039C (en) 2004-03-09 2005-03-09 Laminate type piezoelectric element and manufacture method thereof
CN 200910204671 CN101694865B (en) 2004-03-09 2005-03-09 Multilayer piezoelectric element and its manufacturing method
EP20050720369 EP1732146B1 (en) 2004-03-09 2005-03-09 Multilayer piezoelectric element
US10/598,680 US7554251B2 (en) 2004-03-09 2005-03-09 Multi-layer piezoelectric element and method for manufacturing the same
US12/467,901 US7705525B2 (en) 2004-03-09 2009-05-18 Multi-layer piezoelectric element and method for manufacturing the same
US12/717,018 US8125124B2 (en) 2004-03-09 2010-03-03 Multi-layer piezoelectric element and method for manufacturing the same

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JPH02237083A (en) * 1989-03-09 1990-09-19 Hitachi Metals Ltd Laminated piezoelectric element
JPH09148639A (en) * 1995-11-24 1997-06-06 Kyocera Corp Multilayered piezoelectric actuator
JP2002319716A (en) * 2001-02-15 2002-10-31 Ceramtec Ag Innov Ceramic Eng Piezoelectric ceramic multilayer actuator and method for manufacturing the same
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Publication number Priority date Publication date Assignee Title
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US8007903B2 (en) 2006-02-27 2011-08-30 Kyocera Corporation Method for manufacturing ceramic member, and ceramic member, gas sensor device, fuel cell device, filter device, multi-layer piezoelectric device, injection apparatus and fuel injection system

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