JP2005520346A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005520346A5 JP2005520346A5 JP2003581263A JP2003581263A JP2005520346A5 JP 2005520346 A5 JP2005520346 A5 JP 2005520346A5 JP 2003581263 A JP2003581263 A JP 2003581263A JP 2003581263 A JP2003581263 A JP 2003581263A JP 2005520346 A5 JP2005520346 A5 JP 2005520346A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- sensor
- photomask
- forming
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 21
- 239000000463 material Substances 0.000 claims 15
- 238000003491 array Methods 0.000 claims 4
- 239000004020 conductor Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000011159 matrix material Substances 0.000 claims 3
- 239000000919 ceramic Substances 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 238000001259 photo etching Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000002775 capsule Substances 0.000 claims 1
- 230000000295 complement effect Effects 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IL148463 | 2002-03-03 | ||
| IL148463A IL148463A (en) | 2002-03-03 | 2002-03-03 | Pixel sensor array and method of manufacture thereof |
| IL150867 | 2002-07-23 | ||
| IL15086702A IL150867A0 (en) | 2002-07-23 | 2002-07-23 | Pixel sensor array and method of manufacture thereof |
| PCT/IL2003/000125 WO2003083944A1 (en) | 2002-03-03 | 2003-02-18 | Pixel sensor array and method of manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005520346A JP2005520346A (ja) | 2005-07-07 |
| JP2005520346A5 true JP2005520346A5 (https=) | 2006-05-25 |
Family
ID=28676547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003581263A Pending JP2005520346A (ja) | 2002-03-03 | 2003-02-18 | 画素センサーのアレーとその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7132637B2 (https=) |
| EP (1) | EP1483790B1 (https=) |
| JP (1) | JP2005520346A (https=) |
| AT (1) | ATE338345T1 (https=) |
| AU (1) | AU2003209622A1 (https=) |
| DE (1) | DE60307994T2 (https=) |
| WO (1) | WO2003083944A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004179345A (ja) * | 2002-11-26 | 2004-06-24 | Fujitsu Ltd | 半導体用基板シート材及びその製造方法、及び基板シート材を用いたモールド方法及び半導体装置の製造方法 |
| IL158345A0 (en) * | 2003-10-09 | 2004-05-12 | Interon As | Pixel detector and method of manufacture and assembly thereof |
| GB2449853B (en) | 2007-06-04 | 2012-02-08 | Detection Technology Oy | Photodetector for imaging system |
| EP2461347A1 (en) | 2010-12-06 | 2012-06-06 | Fei Company | Detector system for transmission electron microscope |
| DE102011101835A1 (de) * | 2011-05-16 | 2012-11-22 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor |
| WO2013068912A1 (en) * | 2011-11-08 | 2013-05-16 | Koninklijke Philips Electronics N.V. | Seamless tiling to build a large detector |
| US9357972B2 (en) | 2012-07-17 | 2016-06-07 | Cyber Medical Imaging, Inc. | Intraoral radiographic sensors with cables having increased user comfort and methods of using the same |
| DE102013206407B3 (de) * | 2013-04-11 | 2014-03-06 | Siemens Aktiengesellschaft | Sensorchip, computertomographischer Detektor diesen aufweisend und Herstellungsverfahren dafür |
| DE102013206404B3 (de) * | 2013-04-11 | 2014-03-06 | Siemens Aktiengesellschaft | Sensorchip, computertomographischer Detektor diesen aufweisend, sowie ein Herstellungsverfahren und ein Betriebsverfahren dafür |
| US11335721B2 (en) * | 2013-11-06 | 2022-05-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside illuminated image sensor device with shielding layer |
| WO2018191725A1 (en) * | 2017-04-14 | 2018-10-18 | Paradromics, Inc. | Low-area, low-power neural recording circuit, and method of training the same |
| US12019035B2 (en) | 2021-07-16 | 2024-06-25 | Rapiscan Holdings, Inc. | Material detection in x-ray security screening |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4020080A (en) * | 1974-07-01 | 1977-04-26 | Eastman Kodak Company | Oxadiazolylphenyl aromatic ester compounds and their use as ultraviolet stabilizer in organic compositions |
| US4104674A (en) * | 1977-02-07 | 1978-08-01 | Honeywell Inc. | Double sided hybrid mosaic focal plane |
| US4547792A (en) | 1980-06-19 | 1985-10-15 | Rockwell International Corporation | Selective access array integrated circuit |
| JPS61128564A (ja) | 1984-11-28 | 1986-06-16 | Fujitsu Ltd | 半導体装置 |
| DE3633181C2 (de) * | 1986-09-30 | 1998-12-10 | Siemens Ag | Reflexlichtschranke |
| JPH085566Y2 (ja) * | 1989-07-12 | 1996-02-14 | オリンパス光学工業株式会社 | 固体撮像装置 |
| DE69013104T2 (de) | 1989-07-29 | 1995-03-23 | Shimadzu Corp., Kyoto | Halbleiterstrahlungsbilddetektor und sein Herstellungsverfahren. |
| JP3077034B2 (ja) * | 1990-07-25 | 2000-08-14 | セイコーインスツルメンツ株式会社 | 半導体イメージセンサ装置 |
| JPH05110048A (ja) | 1991-10-14 | 1993-04-30 | Mitsubishi Electric Corp | 光−電子集積回路 |
| US5734201A (en) * | 1993-11-09 | 1998-03-31 | Motorola, Inc. | Low profile semiconductor device with like-sized chip and mounting substrate |
| BR9510290A (pt) * | 1994-12-23 | 1997-11-11 | Digirad | Câmera de raios gama semicondutores e sistema médico de formação de imagens |
| JPH08316450A (ja) * | 1995-05-17 | 1996-11-29 | Hitachi Ltd | 積層型固体撮像素子及びその製造方法 |
| US5998292A (en) * | 1997-11-12 | 1999-12-07 | International Business Machines Corporation | Method for making three dimensional circuit integration |
| JP3545247B2 (ja) * | 1998-04-27 | 2004-07-21 | シャープ株式会社 | 二次元画像検出器 |
| US6586812B1 (en) * | 1999-04-13 | 2003-07-01 | Agilent Technologies, Inc. | Isolation of alpha silicon diode sensors through ion implantation |
| US6510195B1 (en) * | 2001-07-18 | 2003-01-21 | Koninklijke Philips Electronics, N.V. | Solid state x-radiation detector modules and mosaics thereof, and an imaging method and apparatus employing the same |
| US6852566B2 (en) * | 2003-03-12 | 2005-02-08 | Taiwan Semiconductor Manufacturing Co., Ltd | Self-aligned rear electrode for diode array element |
-
2003
- 2003-02-18 AT AT03745385T patent/ATE338345T1/de not_active IP Right Cessation
- 2003-02-18 EP EP03745385A patent/EP1483790B1/en not_active Expired - Lifetime
- 2003-02-18 AU AU2003209622A patent/AU2003209622A1/en not_active Abandoned
- 2003-02-18 US US10/506,497 patent/US7132637B2/en not_active Expired - Lifetime
- 2003-02-18 JP JP2003581263A patent/JP2005520346A/ja active Pending
- 2003-02-18 WO PCT/IL2003/000125 patent/WO2003083944A1/en not_active Ceased
- 2003-02-18 DE DE60307994T patent/DE60307994T2/de not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102074556B (zh) | 半导体器件及其制造方法 | |
| KR101137688B1 (ko) | 관통 실리콘 비아(tsv) 와이어 본드 구조 | |
| CN101521169B (zh) | 半导体装置的制造方法及半导体装置 | |
| KR102154039B1 (ko) | 접속 조인트부의 크랙이 억제된 칩 내장형 패키지 | |
| TWI463635B (zh) | 具有堆疊的微電子單元之微電子封裝及其製造方法 | |
| TWI463578B (zh) | 用於積體電路晶粒的角結構 | |
| KR20090100895A (ko) | 반도체 패키지 제조 방법 | |
| JP2009508324A6 (ja) | マイクロ電子デバイス、積み重ねられたマイクロ電子デバイス、およびマイクロ電子デバイスを製造する方法 | |
| EP1359618A3 (en) | Semiconductor device | |
| JP2005520346A5 (https=) | ||
| JPH10270592A5 (https=) | ||
| TW201342546A (zh) | 可堆疊微電子封裝結構 | |
| US8648449B2 (en) | Electrical connectivity for circuit applications | |
| TWI538118B (zh) | 重組式晶圓級封裝動態隨機存取記憶體 | |
| US10707160B2 (en) | Electrical connectivity of die to a host substrate | |
| CN101615605B (zh) | 半导体集成电路 | |
| JP2005520346A (ja) | 画素センサーのアレーとその製造方法 | |
| CN106463461A (zh) | 半导体装置中形成为金属线互连件的凸块接合件 | |
| US8154117B2 (en) | High power integrated circuit device having bump pads | |
| TWI464836B (zh) | 具有第二基板以促進核心功率及接地分佈之積體電路 | |
| JPH04107964A (ja) | 半導体集積回路装置 | |
| CN104157623A (zh) | 芯片装置以及用于形成芯片装置的方法 | |
| JP5361114B2 (ja) | 基板導通を利用した積重ねダイ式の構成をもつ集積回路 | |
| TWM267628U (en) | Packaging structure with drill holes formed directly below an underfill layer | |
| JPH05190712A (ja) | 半導体装置 |