JP2005321505A - Exposure apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus which can transfer a seamless image by exposure. <P>SOLUTION: When two lines are to be exposed as shown in Fig (A), a computer 68 for exposure controls the swing angle of a light beam L of a first line exposing device 64 to be equal to the swing angle of a beam L of a second line exposing device 66. The image signals inputted to the first line exposing device 64 and the second line exposing device 66 from the computer 68 for exposure can be identical. When three lines are to be exposed as shown in Fig (B), the computer 68 for exposure controls the swing angle of the beam L in the first line exposing device 64 to be larger than the swing angle 4 of the beam L in the second line exposing device 66 so that two lines are exposed by the first line exposing device 64 and one line is exposed by the second line exposing device 66. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus that performs exposure by irradiating a light beam in a line while conveying a long photosensitive material.

  There is an exposure apparatus that performs exposure by irradiating a light beam in a line while conveying a long photosensitive material (for example, TAB tape, COF tape, etc.).

  The exposure apparatus performs main scanning with a light beam in a line shape in the width direction of the photosensitive material to be conveyed, and performs sub-scanning by conveying the photosensitive material.

  By the way, when the width of the photosensitive material is narrow, one line exposure unit is used. However, when exposing a wide photosensitive material, the scanning range may be insufficient with one line exposure unit.

  In such a case, conventionally, as shown in FIG. 10, two exposure units 100 and 102 are arranged in the width direction of the photosensitive material 104 (arrow W direction. Note that the arrow S direction is the conveyance direction of the photosensitive material).

  However, as shown in FIG. 10A, when two rows of images P are exposed on the photosensitive material 104, one exposure device 100 exposes one row of images P and the other exposure device 102 uses the other one. There is no problem in exposing the image P in the row, but as shown in FIG. 10B, in the case of exposing the image P in the third row, one half of the image P in the center row is the one exposure device 100. The other half is exposed by the other exposure unit 102, and the seam 106 (the difference between the image (half) of one exposure unit and the image (half) of the other exposure unit) is formed at the center of the image. It was easy to do, and it was difficult to control the beam and adjust the optical system to eliminate the seam.

  In light of the above, an object of the present invention is to provide an exposure apparatus that can expose a seamless image on a photosensitive material.

  The exposure apparatus according to claim 1 is disposed along a width direction of a conveyance path of the photosensitive material, and a conveying unit that conveys a long photosensitive material in the longitudinal direction, and the photosensitive material of the photosensitive material is based on image data. A plurality of line exposure units that perform scanning exposure so as to irradiate a light beam in a line shape in the width direction; and a control device that controls the plurality of line exposure units, and a plurality of line exposure units in the width direction of the photosensitive material. When the image is exposed, the control means controls the line exposure unit so that the line exposure unit exposes an integer number of images.

  Next, the operation of the exposure apparatus according to the first aspect will be described.

  In the exposure apparatus according to the first aspect, the long photosensitive material is conveyed in the longitudinal direction by the conveying means.

  The line exposure unit irradiates the light beam in a line shape in the width direction of the photosensitive material based on the image data.

  The main scanning is performed by the line exposure unit, and the sub scanning is performed by conveying the photosensitive material, whereby the image can be exposed to the photosensitive material (a latent image is formed on the photosensitive material).

  Here, when exposing a plurality of images in the width direction with respect to the photosensitive material, the control device sets the line exposure unit such that the line exposure unit exposes an integer number (1, 2, 3,... N) images. Control.

  Therefore, since one image is not exposed by two or more line exposure units, it is not necessary to consider the joint between the light beam of one line exposure unit and the light beam of the other line exposure unit. It is possible to easily expose an image that does not exist.

  According to a second aspect of the present invention, in the exposure apparatus according to the first aspect, the line exposure unit irradiates a plurality of light beams.

  Next, the operation of the exposure apparatus according to the second aspect will be described.

  In the exposure apparatus according to the second aspect, since a plurality of light beams are irradiated, the exposure time can be shortened.

  According to a third aspect of the present invention, in the exposure apparatus according to the first or second aspect, the transport unit ejects a gas from a guide surface that guides the photosensitive material so that the photosensitive material is not contacted. It has a non-contact photosensitive material guide for guiding.

  Next, the operation of the exposure apparatus according to the third aspect will be described.

  In the exposure apparatus according to the third aspect, since the non-contact photosensitive material guide of the transport unit ejects gas from the guide surface and guides the tape in a non-contact manner, the resistance during transport of the photosensitive material may be reduced. I can do it.

  As described above, the exposure apparatus of the present invention has an excellent effect that a seamless image can be exposed.

[First Embodiment]
The exposure inspection apparatus 10 to which the exposure apparatus of the present invention is applied will be described below with reference to FIGS.

As shown in FIG. 1, the exposure inspection 10 of this embodiment is roughly composed of an exposure apparatus 11 and an inspection apparatus 13, and the exposure apparatus 11 and the inspection apparatus 13 are integrated. The inspection device 13 may be a separate body.
(Exposure equipment)
As shown in FIG. 2, the exposure apparatus 11 includes an unwinding unit 12.

  The unwinding unit 12 winds an unexposed tape (TAB tape, COF tape, etc.) 16 for repeatedly exposing a large number of package patterns and a spacer tape 18 together to hold a roll 20 formed into a roll shape. An unwinding side reel shaft 22 and an unwinding side spacer shaft 24 that winds and holds the spacer tape 18 drawn together with the tape 16 are provided.

  A guide 26 for changing the transport direction of the tape 16 is disposed on the delivery side of the roll 20.

  On the downstream side of the guide 26 in the tape transport direction, the short dancer 34, the first feed roller 36, the first press roller 38, the second press roller 40, and the second feed roller 42 that form the transport path of the tape 16. A long dancer 44, a guide 46, and a developing device 47 are arranged in this order.

  The first feed roller 36 and the second feed roller 42 are horizontally disposed with a space therebetween, and a table 56 is disposed between the first feed roller 36 and the second feed roller 42. ing.

  As shown in FIG. 3, the table 56 has a guide surface 56 </ b> A on the upper surface, and is curved convexly upward.

  The top portion of the guide surface 56 </ b> A is located above a virtual surface connecting the upper end of the first feed roller 36 and the upper end of the second feed roller 42.

  The table 56 has a hollow structure, and compressed air from the compressor 60 is supplied to the inside via a pipe 58.

  The table 56 has a large number of pores 62 communicating with the internal space and the guide surface 56A in the tape transport direction and the tape width direction, and air is ejected from the pores 62 to the outside of the guide surface 56A. A thin air layer is formed between the tape 16 and the guide surface 56A.

  The first presser roller 38 and the second presser roller 40 are driven rollers that freely rotate, and abut against the upper surface of the tape 16 to limit the upward movement of the tape 16.

  A first line exposure unit 64 and a second line exposure unit 66 are arranged above the center of the table 56.

  As shown in FIGS. 4 and 5, the first line exposure unit 64 and the second line exposure unit 66 perform the main scanning of the light beam in the width direction of the tape 16, and the first line exposure unit 64 and the second line exposure unit 66. The line exposure unit 66 is arranged in a straight line in the tape width direction.

  The first line exposure unit 64 and the second line exposure unit 66 are optical scanning devices that scan a light beam emitted from a laser light source or the like with a polygon mirror or the like, and have a general structure.

  Note that sub-scanning is performed by transporting the tape 16 at a constant speed.

  In the present embodiment, the first line exposure unit 64 and the second line exposure unit 66 each have a scanning range with a width of 70 mm, and the scanning ranges overlap at the central portion of the tape.

  Further, the tape 16 is formed with perforations 16A.

  As shown in FIG. 2, the tape 16 is stretched between a first feed roller 36 and a second feed roller 42, and the first feed roller 36 and the second feed roller 42 are rotated in one direction. The circuit pattern is exposed on the tape as it passes over the table 56 at a constant speed.

  The first line exposure unit 64 and the second line exposure unit 66 are controlled by an exposure computer 68 (see FIG. 1).

  As shown in FIG. 3, a laser distance meter 76 for measuring the flying height of the tape 16 from the guide surface 56 </ b> A is disposed above the table 56.

  The laser distance meter 76 emits an infrared beam so that the tape 16 is not exposed. The irradiation position of the infrared beam is preferably outside the image forming area.

  As shown in FIG. 2, the first feed roller 36 is rotated by a first servo motor 72, and the second feed roller 42 is rotated by a second servo motor 74.

  The first servo motor 72, the second servo motor 74, and the laser distance meter 76 are connected to a computer 78, and the first servo motor 72 and the second servo motor 72 are connected so as to keep the flying height of the tape 16 constant. The servo motor 74 is controlled (that is, the tension of the tape 16 between the first feed roller 36 and the second feed roller 42 is controlled).

  The developing device 47 includes a plurality of processing tanks 47A for developing the tape 16 on which an image (latent image) is formed with a developer, a drying device 47B, and a plurality of transport rollers 47C for transporting the tape 16. .

  As shown in FIG. 6, the guide 26 has a hollow pipe structure that is long in the width direction of the tape 16 (the front and back of the drawing), and has an arcuate guide surface 26A.

  Compressed air from a compressor 60 (not shown in FIG. 6) is supplied to the inside via a pipe 82.

  The guide 26 is formed with a large number of pores 62 communicating with the internal space and the guide surface 26A. Air is ejected from the pores 62 toward the outside of the guide surface 26A. An air layer is formed between them.

The short dancer 34, the long dancer 44, and the guide 46 have the same structure as the guide 26, and an air layer is formed between the tape 16 and the guide surface.
(Inspection equipment)
As shown in FIG. 7, the inspection device 13 includes a guide 126 that forms a transport path of the tape 16, a short dancer 134, a first feed roller 136, a first presser roller 138, a second presser roller 140, 2 feed rollers 142, long dancer 144, guide 1
46, guide 148, guide 150, guide 152, and short dancer 154 are arranged in this order.
(Scanner unit)
The first feed roller 136 and the second feed roller 142 are horizontally disposed with a space therebetween, and a table 156 is disposed between the first feed roller 136 and the second feed roller 142. ing.

  The table 156 has the same configuration as the table 56 described above, and the first press roller 138 and the second press roller 140 are the same as the first press roller 38 and the second press roller 40 described above. It is the composition.

  An image reading unit 166 including a lens and a CCD line sensor is disposed above the center of the table 156.

  The tape 16 is wound around the first feed roller 136 and the second feed roller 142, and is fed at a constant speed in one direction by the rotation of the first feed roller 136 and the second feed roller 142. When passing over the table 156, the circuit pattern formed on the tape is photographed by the image reading unit.

  The image information from the CCD line sensor is sent to a first computer 168 that performs image processing, and the first computer 168 performs image processing based on the image information from the CCD line sensor to detect pattern defects.

  The image and the like are displayed on the monitor 169.

  A laser distance meter (not shown) for measuring the flying height of the tape 16 from the guide surface 156A is disposed above the table 156.

  The first feed roller 136 is rotated by the first servo motor 172, and the second feed roller 142 is rotated by the second servo motor 174.

  The first servo motor 172, the second servo motor 174, and the laser distance meter are connected to the second computer 178, and the first servo motor 172, The second servomotor 174 is controlled (that is, the tension of the tape 16 between the first feed roller 136 and the second feed roller 142 is controlled).

  Between the guide 148 and the guide 150, a marking unit 180 is provided for marking at a predetermined position of the package pattern detected as having a defect.

  A winding unit 14 is disposed downstream of the marking unit 180 in the tape conveyance direction.

  The winding unit 14 includes a winding side spacer shaft 128 that holds the spacer tape 118 formed in a roll shape, and a winding side reel shaft 130 that winds the spacer tape 118 and the inspected tape 16 together.

  A guide 132 for changing the transport direction of the tape 16 is disposed on the tape winding side of the winding side reel shaft 130.

The guide 126, the short dancer 134, the long dancer 144, the guide 146, the guide 148, the guide 150, the guide 152, the short dancer 154, and the guide 132 have the same structure as the guide 26 described above. An air layer is formed between them.
(Function)
Next, the operation of the exposure inspection apparatus 10 of this embodiment will be described.

  The unexposed tape 16 pulled out of the roll is conveyed in a curved and non-contact manner on the guide surface 56A of the table 56 by the first feed roller 36 and the second feed roller 42.

  At this time, since the tape 16 is curved in the transport direction, the curved top portion of the tape 16 is in a straight line shape (front and back direction in the figure) in the tape width direction.

  Further, since the flying height of the tape 16 from the guide surface 56A is controlled, the light beam L from the first line exposure unit 64 and the second line exposure unit 66 forms an appropriate image.

  In the exposure inspection apparatus 10 of the present embodiment, the image P can be exposed to the tape 16 in two rows as shown in FIG. 5A, and the image P is displayed as 3 as shown in FIG. It can also be exposed in a row.

  When exposure is performed in two rows as shown in FIG. 4A, the exposure computer 68 uses the swing angle of the light beam L of the first line exposure unit 64 and the swing angle of the light beam L of the second line exposure unit 66. Set the corners the same. At this time, the image signal input from the exposure computer 68 may be the same for both the first line exposure unit 64 and the second line exposure unit 66.

  5B, when the exposure is performed in three rows, the exposure computer 68 sets the swing angle of L of the first line exposure unit 64 to the light beam L of the second line exposure unit 66. The swing angle is larger than 4, and the first line exposure unit 64 performs exposure for two rows, and the second line exposure unit 66 performs exposure for one row. In this case, the image signals input from the exposure computer 68 are different between the first line exposure unit 64 and the second line exposure unit 66, and the first line exposure unit 64 has two images P per scan. Thus, image information for one image P per scan is input to the second line exposure unit 66.

  The exposed tape 16 (latent image formed) is subjected to development processing and drying processing in the development device 47 and then sent to the inspection device 13.

The first computer 168 performs image processing based on image information from the CCD line sensor to detect a pattern defect, and if a defect is detected, the marking unit 80 corresponds to the defective pattern in advance. Mark the determined part.
[Second Embodiment]
The exposure inspection apparatus 10 according to the second embodiment of the present invention will be described below with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same structure as 1st Embodiment, and the description is abbreviate | omitted.

  As shown in FIG. 8, in the exposure inspection apparatus 10 of the present embodiment, a first presser guide 84 and a second presser guide 86 are used instead of the first presser roller 38 and the second presser roller 40. And a third presser guide 88 is provided.

  The first presser guide 84, the second presser guide 86, and the third presser guide 88 are different in shape from the guide 26 described above, but have the same function, and the compressor 60 (not shown in FIG. 8). ) Is ejected toward the tape 16 from the pores 90 opened in the curved guide surfaces 84A, 86A, 88A, and an air layer is provided between the tape 16 and guided without contact.

In the present embodiment, it is possible to further reduce the resistance during conveyance compared to the first embodiment.
[Third Embodiment]
The exposure inspection apparatus 10 according to the third embodiment of the present invention will be described below with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same structure as embodiment mentioned above, and the description is abbreviate | omitted.

  In the first embodiment, one L is emitted from each of the first line exposure unit 64 and the second line exposure unit 66, but in this embodiment, as shown in FIG. Two light beams L separated in the transport direction are emitted from the exposure device 64 (the same applies to the second line exposure device 66 not shown).

  On the other hand, the top surface of the guide surface 56A of the table 56 is formed in a planar shape, and the tape 16 is also partially planar if it corresponds to the top portion on the plane.

  In the present embodiment, two light beams L are applied to the tape 16 that is planarized by the guide surface 56A.

  In the present embodiment, since the first line exposure unit 64 and the second line exposure unit 66 each emit two light beams L, it is possible to increase the conveyance speed and shorten the image forming time.

  In the present embodiment, the two light beams L that are separated from each other in the transport direction are emitted from the first line exposure unit 64 and the second line exposure unit 66. However, the present invention is not limited to this, and there are three each. The plurality of light beams L may be emitted. Thereby, the image formation time can be further shortened.

It is a side view which shows schematic structure of the exposure inspection apparatus which concerns on 1st Embodiment. It is a side view which shows schematic structure of exposure apparatus. It is an expanded sectional view of the conveyance direction of an image reading part. It is a front view of exposure apparatus. (A) is explanatory drawing in the case of performing exposure of two rows, (B) is an explanatory diagram in the case of performing exposure of three rows. It is an expanded sectional view of a guide. It is a side view which shows schematic structure of exposure apparatus. It is an expanded sectional view of the table of the exposure apparatus which concerns on 2nd Embodiment. It is a perspective view of the table vicinity of the exposure apparatus which concerns on 3rd Embodiment. (A) is explanatory drawing in the case of performing the exposure of the conventional 2 rows, (B) is explanatory drawing in the case of performing the exposure of the conventional 3 rows.

Explanation of symbols

10 Exposure inspection device 16 Tape (photosensitive material)
26 Guide (Non-contact photosensitive material guide)
34 Short Dancer (Non-contact Photosensitive Material Guide)
36 First feed roller (conveying means)
38 First presser roller (conveying means)
40 Second presser roller (conveying means)
42 Second feed roller (conveying means)
44 Long Dancer (Non-contact Photosensitive Material Guide)
46 Guide (Non-contact photosensitive material guide)
56 Table (guide)
64 1st line exposure device 66 2nd line exposure device 68 Computer for exposure (control apparatus)
72 1st servo motor (conveyance means)
74 Second servo motor (conveying means)

Claims (3)

Conveying means for conveying a long photosensitive material in the longitudinal direction;
A plurality of line exposure units that are arranged along the width direction of the photosensitive material conveyance path and perform scanning exposure so as to irradiate a light beam in a line shape in the width direction of the photosensitive material based on image data;
A control device for controlling the plurality of line exposure units;
With
An exposure apparatus characterized in that, when exposing a plurality of images in the width direction of the photosensitive material, the control means controls the line exposure unit so that the line exposure unit exposes an integer number of images. .   The exposure apparatus according to claim 1, wherein the line exposure unit emits a plurality of light beams.   3. The non-contact photosensitive material guide according to claim 1, wherein the transport unit includes a non-contact photosensitive material guide that guides the photosensitive material in a non-contact manner by ejecting gas from a guide surface that guides the photosensitive material. The exposure apparatus described.

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