JP2005308918A - Optical connection structure and manufacturing method therefor, and optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a passive alignment technique simpler and more precise than conventional. <P>SOLUTION: Since V-grooves and optical waveguides are formed on separate substrates according to a conventional technique, a process for fixedly sticking an optical waveguide substrate to a V-groove substrate using an alignment mark has been required. To the contrary to this, according to this invention, the V-grooves 231 to 235 are also formed on a PLC substrate 20 on which the optical wave guides 211 to 215 are formed, therefore, the manufacturing process is simplified and the alignment accuracy is also improved. Moreover, according to the conventional technique, optical fibers have been turned in the V-grooves even if the optical fibers are lined with the V-grooves, therefore, the alignment accuracy has sometimes been lowered. To the contrary to this, according to this invention, a turning preventive means is prepared and the turning of the optical fibers 111 in the V-grooves 231 is suppressed during the manufacturing process, therefore, the alignment accuracy is improved. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical connection structure and the like suitable for passive alignment technology.

AWG (Arrayed
Many optical components based on PLC (Planar Lightwave Circuit) technology such as Waveguide Grating (VOA), VOA (Variable Optical Attenuator), and optical splitter are widely used. These optical components have an interferometer and an optical branching unit in the optical circuit, and by combining them, an optical filter and an optical attenuator are realized and used as a key device in an optical communication system.

  Direct connection between an adhesive and an optical fiber is widely used for connection between an optical component based on PLC and an optical fiber. If an appropriate adhesive is selected, the connection characteristics are good, and a practical level of reliability is obtained. Furthermore, since these waveguide devices do not have a spatial propagation portion, there is no change in optical characteristics due to optical axis deviation, and thus stable operation can be expected.

  As described above, the waveguide type optical device based on the PLC has the advantages of high reliability and stable operation, but the optical fiber and the waveguide must be coupled with sub-μm accuracy, which increases the cost. Is the main factor.

  In order to solve this, studies on passive alignment, in which a waveguide and an optical fiber are coupled using a V-groove without aligning the optical axis, have been studied. On the other hand, in normal passive alignment, an optical fiber at the vertical end is used. If this is used as it is, Fresnel reflection of about −40 dB occurs at the boundary between the optical fiber and the refractive index matching agent. However, since there are many cases where a module reflection standard of −50 dB or less is set in an optical passive device, it is extremely difficult to satisfy this standard with an optical fiber at the vertical end. Therefore, a technique for reducing the return loss by connecting the waveguide and the optical fiber at oblique ends is known (Patent Document 1).

  9 and 10 show the optical waveguide module disclosed in Patent Document 1, FIG. 9 is a perspective view, and FIG. 10 is a plan view. Hereinafter, description will be given based on this drawing.

  The optical waveguide module 80 is an optical splitter including a V-groove substrate 81, an optical waveguide substrate 86, a multi-core tape fiber 91, a single-core fiber (not shown), and the like. In the V-groove substrate 81, a V-groove 82 for single-core connection, a recess 83 for mounting the optical waveguide substrate 86, a V-groove 84 for multi-core connection, an alignment mark 85, and the like are formed. On the optical waveguide substrate 86, a single-core oblique end face 87, an optical splitter waveguide 88, a multi-core oblique end face 89, an alignment mark 90, and the like are formed. The multi-core tape fiber 91 is composed of a plurality of optical fibers 92, and each optical fiber 92 has an oblique end surface 93. Although not shown, the single-core fiber is composed of a single optical fiber, and the optical fiber has an oblique end face.

  Next, a method for assembling the optical waveguide module 80 will be described. First, the optical waveguide substrate 86 is bonded and fixed to the concave portion 83 of the V-groove substrate 81 using the alignment marks 85 and 90. Subsequently, the optical fiber 92 is installed along the V groove 84 so that the core of the optical fiber 92 coincides with the core of the waveguide 88, and the multicore tape fiber 91 is bonded and fixed to the V groove substrate 81. Similarly, a single core fiber is bonded and fixed to the V-groove substrate 81.

  According to the optical waveguide module 80, passive alignment is performed by placing the optical fiber 92 along the V groove 84, and reflection is performed by connecting the oblique end surface 93 of the optical fiber 92 and the oblique end surface 89 of the optical waveguide substrate 86. The amount of attenuation is reduced.

JP 2003-227862 A

  However, the prior art shown in FIGS. 9 and 10 has the following problems.

  (1). Since a process of bonding and fixing the optical waveguide substrate to the V-groove substrate using the alignment mark is required, the manufacturing process becomes complicated and the alignment accuracy is lowered.

  (2). In the case of a single-core fiber, even if the optical fiber is placed along the V-groove, the optical fiber rotates within the V-groove around the optical axis. For this reason, it is difficult to match the oblique end face of the optical fiber with the oblique end face of the optical waveguide substrate. In other words, the rotation angle of the optical fiber must be precisely adjusted according to the oblique end face of the optical waveguide.

  (3). In the case of a multi-core fiber, each optical fiber can be prevented from rotating in each V-groove around the optical axis. However, since the oblique end face of each optical fiber is a free end, the oblique end face of each optical fiber swings within each V-groove, which may reduce the alignment accuracy.

  Accordingly, an object of the present invention is to provide an optical connection structure and a method for manufacturing the same, which enable a simpler and more accurate passive alignment technique than before.

  The optical connection structure according to the present invention is formed by connecting an optical waveguide having an oblique end face and an optical fiber having an oblique end face in a state where the oblique end faces are combined. In this optical connection structure, a V-groove is formed in the optical waveguide substrate on which the optical waveguide is formed, and the optical fiber is fixed in a state where the oblique end faces are aligned in the V-groove, and the oblique end faces are Rotation preventing means for preventing the rotation of the optical fiber in the V-groove at the time of matching is provided. “Rotation” here includes rotation and swinging.

  In the prior art, since the V-groove and the optical waveguide are formed on separate substrates, a step of bonding and fixing the optical waveguide substrate to the V-groove substrate using the alignment mark is necessary. On the other hand, in the present invention, since the V-groove is also formed in the optical waveguide substrate on which the optical waveguide is formed, the manufacturing process is simplified and the positional accuracy is improved. In the prior art, even if an optical fiber is placed along the V-groove, the optical fiber rotates in the V-groove, so that the alignment accuracy may be lowered. On the other hand, in the present invention, since the rotation preventing means is provided, the rotation of the optical fiber in the V-groove during the manufacturing process can be suppressed, so that the positioning accuracy is improved.

  The anti-rotation means fixes at least one optical fiber used for optical transmission and a plurality of optical fibers not used for optical transmission, and a plurality of optical fibers, respectively. A plurality of the V-grooves. Conventionally, in the case of a single-core fiber, since the optical fiber rotates in the V-groove around the optical axis even if the optical fiber is placed along the V-groove, the oblique end face of the optical fiber and the oblique end face of the optical waveguide substrate It was difficult to match. On the other hand, in the present invention, the optical fiber that is not used for the optical transmission of the multi-core tape fiber is also fixed to the V-groove, thereby suppressing the force of the optical fiber rotating in the V-groove around the optical axis. Further, the rotation preventing means at this time is inexpensive because the existing multi-core tape fiber is used.

  In this case, the following configuration may be adopted. An oblique slit is formed in the optical waveguide substrate, and a part of the oblique slit becomes an oblique end surface of the optical waveguide. The plurality of V-grooves have one end reaching the peripheral end surface of the optical waveguide substrate and the other end reaching the oblique slit, and are formed in parallel to each other. The optical waveguide is formed only at a position located in the central V groove among the plurality of V grooves. Of the plurality of optical fibers, the optical fiber used for optical transmission is fixed to the central V-groove, and the remaining optical fibers not used for optical transmission are fixed to the V-grooves other than the central.

  The rotation preventing means is a lid member to which the optical fiber is fixed in advance, and is placed on the optical waveguide substrate in which the V-groove is formed, whereby the optical fiber is moved to the V It is good also as what is inserted in a groove | channel. Conventionally, in the case of a single-core fiber and a multi-core fiber, the oblique end face of the optical fiber is a free end, and the oblique end face of the optical fiber rotates in the V-groove, thereby lowering the alignment accuracy. There was something to do. In contrast, in the present invention, the optical fiber is fixed to the lid member in advance, and the optical fiber is inserted into the V-groove by placing the lid member on the optical waveguide substrate. At this time, since the optical fiber is already fixed to the lid member, the rotation of the oblique end surface of the optical fiber in the V-groove is suppressed.

  The lid member may be formed with another V-groove for fixing the optical fiber in advance. In this case, the optical fiber is fixed in advance in the V groove of the lid member, and the lid member is placed on the optical waveguide substrate, whereby the optical fiber is inserted into the V groove of the optical waveguide substrate.

  An optical device according to the present invention includes an optical circuit formed on an optical waveguide substrate, an optical fiber connected to the optical waveguide substrate on the input side of the optical circuit, and the optical waveguide substrate on the output side of the optical circuit. And a connected optical fiber. In the optical device according to the present invention, the optical connection structure according to the present invention is used on at least one of the input side and the output side of the optical circuit.

  The manufacturing method according to the present invention is a method for manufacturing the optical connection structure according to the present invention. The manufacturing method includes a step of forming the optical waveguide and the V-groove on the optical waveguide substrate, a step of placing the optical fiber in the V-groove, the optical fiber in the V-groove, and the light guide Connecting the waveguide in a state where the oblique end faces are aligned with each other while using the rotation preventing means.

  The method for manufacturing the optical connection structure according to claim 3 may be as follows. The manufacturing method includes a step of forming a silica glass layer including the optical waveguide on a silicon substrate to obtain the optical waveguide substrate, a step of performing anisotropic etching on the silicon substrate to form the V-groove, Forming the oblique slits by grinding the optical waveguide substrate; placing the plurality of optical fibers in the plurality of V grooves; and the plurality of the plurality of optical fibers in the plurality of V grooves. Connecting the optical fiber in the V-groove and the optical waveguide in a state in which the oblique end faces are aligned while maintaining the state where the optical fibers are respectively placed.

  The method for manufacturing the optical connection structure according to claim 5 may be as follows. In this manufacturing method, the step of forming the another V-groove in the lid member, the step of fixing the optical fiber in the other V-groove, and polishing the lid member to which the optical fiber is fixed Forming the oblique end face on the optical fiber, forming the optical waveguide and the V-groove on the optical waveguide substrate, and placing the lid member on the optical waveguide substrate, The oblique end surfaces of the optical fiber and the optical waveguide in the V-groove are matched with each other while maintaining a state where the fiber is inserted into the V-groove and the state where the optical fiber is inserted into the V-groove. Connecting in a state.

  According to the present invention, since the optical waveguide substrate and the V-groove substrate are formed on the same optical waveguide substrate, the step of aligning the optical waveguide substrate and the V-groove substrate is not necessary, so that the manufacturing process can be simplified and positioned. Accuracy can be improved. In addition, by providing a rotation preventing means for preventing the rotation of the optical fiber in the V-groove during the manufacturing process, it is easy to align the optical waveguide having the oblique end surface and the optical fiber having the oblique end surface. Therefore, positioning accuracy can be improved. Therefore, it is possible to realize a passive alignment technique that is simpler and more accurate than conventional techniques.

  In other words, according to the present invention, an optical fiber having an oblique end face and an optical waveguide having an oblique end face can be coupled with high accuracy and high efficiency without precise angle adjustment. As a result, it is possible to significantly reduce the cost when manufacturing the optical module.

  Embodiments of the present invention will be described below with reference to the drawings. However, the “optical waveguide substrate” in the claims is specifically referred to as “PLC substrate”.

  1 and 2 show a first embodiment of an optical device according to the present invention, FIG. 1 is a schematic plan view, FIG. 2 [1] is a cross-sectional view taken along the line II in FIG. 1, and FIG. 2 is a sectional view taken along line II-II in FIG. Hereinafter, description will be given based on these drawings.

  In the optical device 10 of the present embodiment, the optical fibers 111 to 115 having the oblique end surfaces 121 to 125 and the optical waveguides 211 to 215 having the oblique end surfaces 221 to 225 connect the oblique end surfaces 121 to 125 and 221 to 225 to each other. They are connected together. V-grooves 231 to 235 are formed in the PLC substrate 20 on which the optical waveguides 211 to 215 are formed. In the V grooves 231 to 235, the optical fibers 111 to 115 are fixed by the adhesive 14 in a state where the oblique end surfaces 121 to 125 and 221 to 225 are combined. Further, a rotation preventing means (described later) for preventing the rotation of the optical fiber 111 in the V groove 231 during the manufacturing process is provided. The rotation preventing means includes a three-core tape fiber 30 having the optical fiber 111 and optical fibers 311 and 312 that are not used for optical transmission, and V-grooves formed on the PLC substrate 20 and fixing the optical fibers 311 and 312 respectively. 322, 323.

  The PLC substrate 20 is a general one composed of a silicon substrate 25 and a silica glass layer 26 formed on the silicon substrate 25. Optical waveguides 211 to 215 and an optical circuit 24 are formed on the silica glass layer 26. The optical circuit 24 is an optical splitter that divides the light incident from the optical waveguide 211 into four and emits the light to the optical waveguides 212 to 214. In addition, V grooves 231 to 235, 321, and 322 are formed in the silicon substrate 25.

  The multi-core tape fiber 13 and the three-core tape fiber 30 are general ones in which a plurality of optical fiber strands are fixed in parallel with UV resin. However, the illustrated optical fibers 111 to 115, 311, and 322 have the coating removed, and the end faces are free ends. Further, the angle θ1 of the oblique end surfaces 121 to 125 of the optical fibers 111 to 115 and the angle θ2 of the oblique end surfaces 221 to 225 of the optical waveguides 211 to 215 are equal. The optical fibers 311 and 312 that are not used for optical transmission are terminated by cutting.

  Next, the operation of the optical device 10 will be described.

  In the prior art, since the V-groove and the optical waveguide are formed on separate substrates, a step of bonding and fixing the optical waveguide substrate to the V-groove substrate using the alignment mark is necessary. On the other hand, in this embodiment, since the V grooves 231 to 235 are also formed in the PLC substrate 20 on which the optical waveguides 211 to 215 are formed, the manufacturing process is simplified and the positional accuracy is improved.

  In the prior art, even if an optical fiber is placed along the V-groove, the optical fiber rotates in the V-groove, so that the alignment accuracy may be lowered. On the other hand, in this embodiment, by providing the rotation preventing means, the rotation of the optical fiber 111 in the V groove 231 during the manufacturing process can be suppressed, so that the positioning accuracy is improved.

  In particular, in the case of a single-core fiber, since the optical fiber rotates within the V-groove around the optical axis even if the optical fiber is placed along the V-groove, the oblique end face of the optical fiber and the oblique end face of the optical waveguide substrate are It was difficult to match. On the other hand, in this embodiment, the optical fibers 311 and 312 that are not used for the optical transmission of the three-core tape fiber 30 are also fixed to the V grooves 321 and 322, so that the optical fiber 111 is centered on the optical axis. The force that rotates in the groove 231 is suppressed. Further, the rotation preventing means of this embodiment is inexpensive because the existing three-core tape fiber 30 is used.

  Next, a method for manufacturing the optical device 10 will be described. 3 to 5 show the method of manufacturing the optical device 10 in the order of steps. 3 and 4 [1] are a plan view and a right side view, FIG. 4 [2] is a front view and a right side view, and FIG. 5 is a plan view, a front view and a right side view. Hereinafter, description will be given based on these drawings.

  First, a rectangular silicon substrate 25 having a (100) surface is prepared. Then, a tungsten silicide film (hereinafter referred to as “WSix film”) 27 serving as a mask at the time of V-groove etching is formed on the silicon substrate 25 by using a general film forming technique, a photolithography technique, and an etching technique (see FIG. 3 [1]).

  Subsequently, a silica glass layer 26 including an optical waveguide and an optical circuit is formed on the WSix film 27 (FIG. 3 [2]). This becomes the PLC substrate 20.

  Subsequently, the silica glass layer 26 on the V-groove etching region is removed (FIG. 3 [3]). Thereby, the silicon substrate 25 in the V-groove etching region is exposed.

  Subsequently, anisotropic etching is performed on the silicon substrate 25 not covered with the WSix film 27 and the silica glass layer 26, thereby forming V grooves 231 to 235, 321, and 322 (FIG. 4 [1]). The etching solution used for this anisotropic etching is a solution in which KOH is dissolved in water and isopropyl alcohol. At this time, the (100) plane with low atomic density is etched first, so that V-grooves 231... Made of the (111) plane with high atomic density remain.

  Subsequently, after removing the WSix film 27, the silica glass layer 26 and the silicon substrate 25 are ground using the rotary blade 28 so that the end face of the optical waveguide has an angle θ2 (FIG. 4 [2]). This ground portion is the “oblique slit” in the claims.

  Finally, the optical fibers 111 to 115, 321, and 322 are placed in the V grooves 231 to 235, 321, and 322, and these are fixed with an adhesive (FIG. 5).

  6 and 7 show a second embodiment of the optical device according to the present invention, FIG. 6 is a schematic plan view, FIG. 7 [1] is a cross-sectional view taken along line II in FIG. 6, and FIG. 6 is a cross-sectional view taken along line II-II in FIG. Hereinafter, description will be given based on this drawing. However, the same parts as those in FIG. 1 and FIG.

  In the optical device 40 of the present embodiment, the lid member 41 to which the optical fibers 111, 311 and 312 are fixed in advance is used as the rotation preventing means. The lid member 41 is formed by forming V grooves 421 to 423 in the silicon substrate 43 for fixing the optical fibers 111, 311, and 312 in advance. The optical fibers 111,... Are previously fixed to the V grooves 422,... Of the lid member 41 with the adhesive 44, the lid member 41 is placed on the PLC substrate 20, and the optical fibers 111,. It fixes with the adhesive agent 14 to V groove 231, ....

  Conventionally, in the case of a single-core fiber and a multi-core fiber, the oblique end face of the optical fiber is a free end, and the oblique end face of the optical fiber rotates in the V-groove, thereby lowering the alignment accuracy. There was something to do. On the other hand, in this embodiment, the optical fibers 111,... Are fixed to the lid member 41 in advance, the lid member 41 is placed on the PLC substrate 20, and the optical fibers 111,. Secure to. At this time, since the optical fibers 111 are already fixed to the lid member 41, the rotation of the oblique end surface 121 of the optical fiber 111 within the V groove 231 is suppressed. A single-core fiber may be used instead of the three-core tape fiber 30.

  FIGS. 8A and 8B are a left side view and a front view showing the manufacturing method of the optical device 40, and the process proceeds in the order of FIGS. 8 [1] to 8 [4]. Hereinafter, a method for manufacturing the optical device 40 will be described with reference to this drawing.

  First, V-grooves 422,... Having the same spacing and number as the V-grooves 231 of the silicon substrate 25 on the PLC substrate side are formed in the silicon substrate 43. The method of forming the V grooves 422,... Is the same as the method of forming the V grooves 231,. Then, the optical fibers 111,... Are placed along the V grooves 422, and the optical fibers 111,... Are fixed to the silicon substrate 43 via the adhesive 44 (FIG. 8 [1]).

  Then, the optical fiber 111,... Is covered and the silicon substrate 43 is hardened with wax 45 (FIG. 8 [2]). At this time, in order to prevent the wax 45 from collapsing, a glass substrate or the like may be attached to the wax 45 for reinforcement.

  Subsequently, the silicon substrate 43 and the optical fibers 111,... Hardened with the wax 45 are polished so that the oblique end surface 121 of the optical fiber 111 has an angle θ1 (FIG. 8 [3]).

  Subsequently, after removing the wax 45, the lid member 41 is integrated with the PLC substrate by inserting the optical fibers 111,... Fixed to the lid member 41 into the V grooves 231 of the silicon substrate 25 on the PLC substrate side. (FIG. 8 [4]). Other steps are the same as those in the first embodiment. Instead of the silicon substrate 43, a light-transmitting substrate such as a glass substrate may be used. In this case, an optical fiber can be fixed to the V-groove by using a UV curable adhesive as the adhesive 44 and irradiating UV light from the substrate side. A V-groove is formed on the glass substrate or the like by dicing (grinding) or the like.

  Needless to say, the present invention is not limited to the first and second embodiments. For example, the optical circuit is not limited to the optical splitter but may be AWG, VOA, or the like.

1 is a schematic plan view showing a first embodiment of an optical device according to the present invention. 2 [1] is a cross-sectional view taken along the line II in FIG. 1, and FIG. 2 [2] is a cross-sectional view taken along the line II-II in FIG. FIGS. 3A and 3B are a plan view and a right side view showing the method for manufacturing the optical device of FIG. 1, and the steps proceed in the order of FIGS. FIG. 4 shows a method for manufacturing the optical device of FIG. 1, FIG. 4 [1] is a plan view and a right side view, FIG. 4 [2] is a front view and a right side view, and FIG. The process proceeds in this order. FIG. 6 is a plan view, a front view, and a right side view showing a method for manufacturing the optical device of FIG. 1. It is a schematic plan view which shows 2nd embodiment of the optical device which concerns on this invention. 7 [1] is a cross-sectional view taken along the line II in FIG. 6, and FIG. 7 [2] is a cross-sectional view taken along the line II-II in FIG. FIGS. 7A and 7B are a left side view and a front view showing the method for manufacturing the optical device in FIG. 6, and the steps proceed in the order of FIGS. It is a perspective view which shows a prior art. It is a top view which shows a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,40 Optical device 111-115 Optical fiber 121-125 Oblique end surface of optical fiber 13 Multi-core tape fiber 14 Adhesive 20 PLC board 211-215 Optical waveguide 221-225 Oblique end surface of optical waveguide 231-235 V-groove 24 Optical circuit 25 Silicon substrate 26 Silica glass layer 30 Three-core tape fiber 311, 312 Optical fiber (rotation prevention means)
322, 323 V groove (rotation prevention means)
41 Lid member 421-423 V-groove 43 Silicon substrate 44 Adhesive

Claims (9)

In an optical connection structure in which an optical waveguide having an oblique end face and an optical fiber having an oblique end face are connected in a state where the respective oblique end faces are combined,
A V-groove is formed in the optical waveguide substrate on which the optical waveguide is formed;
The optical fiber is fixed in a state where the oblique end faces are aligned in the V-groove,
Rotation preventing means for preventing rotation of the optical fiber in the V groove when the oblique end surfaces are aligned is provided.
An optical connection structure characterized by that. The anti-rotation means fixes at least one optical fiber used for optical transmission and a plurality of optical fibers not used for optical transmission, and a plurality of optical fibers, respectively. A plurality of the V-grooves,
The optical connection structure according to claim 1. An oblique slit is formed in the optical waveguide substrate, and a part of the oblique slit becomes an oblique end surface of the optical waveguide,
The plurality of V-grooves have one end reaching the peripheral end surface of the optical waveguide substrate and the other end reaching the oblique slit, and are formed in parallel to each other,
The optical waveguide is formed only at a position located in a central V groove among the plurality of V grooves,
Of the plurality of optical fibers, the optical fiber used for optical transmission is fixed to the central V-groove, and the remaining optical fibers not used for optical transmission are fixed to the V-grooves other than the center.
The optical connection structure according to claim 2. The rotation preventing means is a lid member to which the optical fiber is fixed in advance, and is placed on the optical waveguide substrate on which the V-groove is formed, whereby the optical fiber is placed in the V-groove. To be inserted into the
The optical connection structure according to claim 1. The lid member is formed with another V-groove for fixing the optical fiber in advance.
The optical connection structure according to claim 4.
An optical circuit formed on the optical waveguide substrate, an optical fiber connected to the optical waveguide substrate on the input side of the optical circuit, and an optical fiber connected to the optical waveguide substrate on the output side of the optical circuit Optical devices
The optical connection structure according to any one of claims 1 to 5 is used for at least one of an input side and an output side of the optical circuit.
An optical device characterized by that.
A method for manufacturing the optical connection structure according to any one of claims 1 to 5,
Forming the optical waveguide and the V-groove in the optical waveguide substrate;
Placing the optical fiber in the V-groove;
Connecting the optical fiber in the V-groove and the optical waveguide in a state in which the oblique end faces are combined with each other while using the rotation preventing means;
The manufacturing method of the optical connection structure containing this. A method for manufacturing the optical connection structure according to claim 3, comprising:
Forming a silica glass layer including the optical waveguide on a silicon substrate to obtain the optical waveguide substrate;
Performing anisotropic etching on the silicon substrate to form the V-groove;
Forming the oblique slits by grinding the optical waveguide substrate;
Placing each of the plurality of optical fibers in the plurality of V-grooves;
A step of connecting the optical fiber and the optical waveguide in the V-groove in a state where the oblique end faces are aligned with each other while maintaining the state where the plurality of optical fibers are respectively placed in the plurality of V-grooves. When,
The manufacturing method of the optical connection structure containing this. A method for manufacturing the optical connection structure according to claim 5, comprising:
Forming the another V-groove in the lid member;
Fixing the optical fiber in the another V-groove;
Forming an oblique end surface on the optical fiber by polishing the lid member to which the optical fiber is fixed;
Forming the optical waveguide and the V-groove in the optical waveguide substrate;
Inserting the optical fiber into the V-groove by placing the lid member on the optical waveguide substrate;
Maintaining the state where the optical fiber is inserted into the V-groove, and connecting the optical fiber and the optical waveguide in the V-groove in a state where the oblique end faces are aligned with each other;
A method of manufacturing an optical connection structure including:

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