JP2005246946A - Inkjet recording head and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent degradation of ink discharging characteristics by preventing an adhesive from flowing into an ink passage. <P>SOLUTION: An inkjet recording head 10 is constituted of a substrate 1 provided with an orifice plate 4 in which a discharge port is formed, and fixedly bonded on a supporting member 21 with the adhesive 30. The substrate 1 is provided with a common liquid chamber 9 which passes through the substrate 1 and has an opening so as to form an ink supply port on its front surface side. A releasing path 12 having an opening in a corner of the ink supply port and communicating with the ink supply port is formed between the substrate 1 and the orifice plate 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ink jet recording head that performs recording on a recording medium by discharging a liquid such as ink from a discharge port as flying droplets, and a manufacturing method thereof.

  Inkjet recording devices that perform recording by ejecting ink from the ejection port of an inkjet recording head have the characteristics that high-speed recording is possible and noise during recording hardly occurs. Has been.

  FIG. 10 is a perspective view for explaining an example of a conventional ink jet recording head, and FIG. 11 is a cross-sectional view of the ink jet recording head of FIG. 10 taken along line AA.

  As shown in FIGS. 10 and 11, in the inkjet recording head 110, an orifice plate 104 in which an ejection port 103 for ejecting ink is formed is disposed on a substrate 101, and the substrate 101 is positioned on a support member 121. It is configured by being fixed.

  A common liquid chamber 109 for storing ink to be supplied to each ejection port 103 is formed as a through hole in the substrate 101, and the common liquid chamber 109 is formed as an elongated ink supply port 106 on the surface side of the substrate 101. It is open. On both sides of the ink supply port 106, a plurality of energy generating elements 106 (for example, electrothermal conversion elements) are arranged in a direction along the ink supply port 106.

  In the orifice plate 104, a plurality of discharge ports 103 are formed in two rows, and each discharge port 103 is arranged at a position facing the energy generating element 106. Between the orifice plate 104 and the substrate 101, an ink flow path 105 that guides the ink supplied from the ink supply port 106 to each ejection port 103 is formed. Adjacent ink flow paths 105 are separated from each other by a partition configured as a part of the orifice plate 104.

  As shown in FIG. 11, the substrate 101 on which the orifice plate 104 is arranged is bonded and fixed onto a support member 121 on which a supply flow path 126 for supplying ink is formed, for example, using an adhesive 130. Is done. Thereby, the supply flow path 126 and the common liquid chamber 109 communicate with each other. The adhesive 130 is applied so as to surround the opening of the supply channel 126 (common liquid chamber 109), and prevents ink from leaking from the contact surfaces of both members.

  In the ink jet recording head 110 configured as described above, the ink is supplied from the supply flow path 126 to the common liquid chamber 109, and further supplied to each discharge port 103 via the ink flow path 105, so that the energy generating element 2 is supplied. It is discharged from each discharge port 103 by being driven.

  In addition to fixing the substrate 1 and the support member 121, in addition to the method using the adhesive 130, for example, a method in which both members are pressed against each other by using an urging means such as a spring, A method of fixing by providing a fitting portion on the close contact surface of the member and fitting it may be considered. However, in the method of fixing both members using the biasing means, it is necessary to bias both members with a very large load in order to prevent ink from leaking from the contact surface between the substrate 101 and the support member 121. As a result, the orifice plate 104 or the substrate 101 may be deformed by the load. Such deformation may cause misalignment of the ejection port position, deformation of the ink flow path 105, and the like, and may deteriorate the ink ejection characteristics. Further, in the case of the method of fixing both members by providing a fitting portion, for example, when forming the fitting portion, minute irregularities are formed on the surface of the substrate 101, and the substrate 101 and the support member 121 are brought into close contact with each other. Ink may leak from the contact surfaces of both members. For these reasons, it is common to use an adhesive as described above to fix the substrate 1 and the support member 121.

Another ink jet recording head in which a substrate and a supporting member are fixed using an adhesive is proposed in Patent Document 1.
JP 2002-154209 A

  However, in the conventional inkjet recording head in which the substrate and the support member are bonded using an adhesive, the adhesive before curing may flow and flow into the ink flow path in the manufacturing process. That is, for example, as shown in FIG. 12, the adhesive 130 applied between the substrate 101 and the support member 121 travels through the corners of the common liquid chamber 109 by capillary force before being cured, and enters the ink flow path 105. There was a possibility of inflow. As described above, the adhesive 130 that has flowed into the ink flow path 105 is cured in the ink flow path 105 and deforms the shape of the ink flow path 105, and as a result, the ejection characteristics of the ink jet recording head may be deteriorated. . Further, the adhesive 130 may completely block the ink flow path 105. In FIG. 12, a part of the orifice plate 104 is cut out in order to easily understand the trouble caused by the adhesive.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ink jet recording head that prevents a decrease in ink ejection characteristics by preventing an adhesive from flowing into an ink flow path and the like, and a method for manufacturing the same.

  In order to achieve the above object, an ink jet recording head according to the present invention has a substrate in which a common liquid chamber for storing ink to be supplied to an ejection port for ejecting ink is formed as a through-hole bonded to a support member with an adhesive. In the fixed ink jet recording head, at least one escape portion into which the adhesive flowing through the common liquid chamber flows is provided.

  According to the ink jet recording head of the present invention, since at least one relief portion is provided, in the manufacturing process, it is assumed that the adhesive before curing flows through the common liquid chamber by capillary force. However, since the adhesive flows into the escape portion, the adhesive is prevented from flowing into another structural portion such as an ink flow path.

  In the ink jet recording head according to the present invention, the relief portion may have a rectangular cross-sectional shape and one surface thereof may be constituted by the surface of the substrate. According to this configuration, the shape of the relief portion can be variously changed simply by forming a layer made of a resin material on the entire surface of the substrate and patterning the resin layer using, for example, a photolithography technique. Further, the relief portion may be formed so that its cross-sectional area becomes smaller toward the side surface side of the orifice plate. Thus, by making the escape portion into a shape in which the capillary force gradually increases toward the outside, the adhesive is more effectively guided into the escape portion.

  An ink jet recording head manufacturing method of the present invention supplies ink to a substrate on which energy generating means for discharging ink from an ejection port is formed and to the surface on the side where the energy generating means is formed through the substrate. In a method of manufacturing an ink jet recording head in which a common liquid chamber opening as a mouth is formed, a resin material that is soluble and located on a region where an ink supply port is formed is formed on a substrate on which energy generating means is formed. Forming a resin layer including a central portion, a plurality of flow path portions extending outward from the central portion, and a relief portion continuing to at least one of corner portions of the central portion; Forming a coating resin layer made of a resin material so as to cover the resin layer, and forming the discharge port communicating with the flow path portion in the coating resin layer; Removing a part from the opposite side of the surface on which the energy generating means is formed, thereby forming a common liquid chamber that opens as the ink supply port on the surface side, the central portion, the flow path portion, And the step of removing the escape portion by eluting from the common liquid chamber, and after removing the central portion, the flow path portion, and the escape portion, the substrate and the support member are bonded using an adhesive. And a step of bonding and fixing.

  According to the manufacturing method of the present invention, the relief portion that opens at the corner of the ink supply port and communicates with the ink supply port is formed between the coating resin layer formed as the orifice plate and the substrate. In this manufacturing process, even if the adhesive before curing flows, the adhesive flows into the escape portion. Therefore, for example, the adhesive material is prevented from flowing into other structural portions such as in the ink flow path.

  In this specification, “recording” means not only giving an image having a meaning such as a character or a figure to a recording medium but also giving an image having no meaning such as a pattern. To do. The “recording medium” is not limited to paper, but also includes threads, fibers, fabrics, leather, metals, plastics, glass, wood, ceramics, and the like. The “recording apparatus” is not limited to a printer, but includes a copier, a facsimile having a communication system, a word processor having a printer unit, and an industrial recording apparatus combined with various processing apparatuses.

  As described above, according to the ink jet recording head of the present invention, since the escape portion for collecting the adhesive is formed, the adhesive before curing may flow into the ink flow path or the like in the manufacturing process. As a result, the ink ejection characteristics are improved. Moreover, according to the method for producing an ink jet recording head of the present invention, the ink jet recording head of the present invention can be produced satisfactorily.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) -Inkjet recording head-
FIG. 1 is a perspective view showing an ink jet recording head according to an example of the present invention. FIG. 2 is a perspective view showing an ink jet recording head manufactured by the manufacturing method of the present embodiment, and the ink jet recording head shown is the same as the ink jet recording head 10 shown in FIG.

  The ink jet recording head 10 shown in FIGS. 1 and 2 is the same as the ink jet recording head 110 shown in FIGS. 10 to 8 except that an escape portion 12 is formed between the orifice plate 4 and the substrate 1. Since it is configured, the description of the same structural portion is omitted. As will be described later, one escape portion 12 is formed at each corner of the common liquid chamber 9, but only one escape portion 12 is shown in FIG. 1 for ease of explanation.

  More specifically, the escape portion 12 has an inner wall constituted by a groove-like structure portion formed on the back surface of the orifice plate 4, that is, a surface that is in close contact with the substrate 1, and the surface of the substrate 1. Yes. The escape portion 12 has a rectangular cross section and is provided so as to extend in a plane parallel to the substrate surface of the substrate 1, and its cross-sectional area is constant. One end of the escape portion 12 is formed so as to open directly above the corner portion of the common liquid chamber 9 (corner portion of the ink supply port 6), thereby communicating with the ink supply port 6. On the other hand, the other end of the escape portion 12 opens on the side surface of the orifice plate 4. As shown in the top view of FIG. 3, each escape portion 12 is formed to extend in a direction away from the ink supply port 6 at a predetermined angle from the corner of the ink supply port 6.

  According to the ink jet recording head 10 configured as described above, the relief portion 12 that opens at the corner of the ink supply port 6 is formed between the orifice plate 4 and the substrate 1. Even when the uncured adhesive 30 flows toward the orifice plate 4 through the corners of the common liquid chamber 9 due to capillary force, the adhesive 30 flows into the escape portion 12, so that the ink Inflow into the flow path 5 is prevented.

Second Embodiment—Method for Manufacturing Inkjet Recording Head—
An example of the method for producing the ink jet recording head of the present invention will be described below mainly with reference to FIG. FIG. 4 is a view for explaining the steps of the manufacturing method of the present embodiment, and is a cross-sectional view taken along the line BB of FIG.

  The ink jet recording head manufacturing method described below is for manufacturing the ink jet recording head 10 shown in FIGS. 1 to 3 and FIG. Since the configuration of the inkjet recording head 10 is as described in the first embodiment with reference to FIGS. 1 to 3, detailed description thereof is omitted.

  The ink jet recording head 10 is manufactured by the following steps.

  First, as shown in FIG. 4A, a plurality of electrothermal transducers that are energy generating elements 2 are supplied to the surface side (upper side of the drawing) of the substrate 1 made of silicon, and power is supplied to the electrothermal transducers. Electrical wiring (not shown) is formed. The energy generating element 2 is not limited to the electrothermal conversion element but may be a piezoelectric element or the like.

  Next, as shown in FIG. 4B, a resin layer 19 made of a soluble resin material is formed on the surface side of the substrate 1 and patterned into a predetermined shape. Specifically, the resin layer 19 includes a central portion 19a, a flow path portion 19b, and a relief portion 19c.

  The central portion 19a is located above the ink supply port 6 (see FIG. 3) and has an outer shape that is substantially the same as the opening shape of the ink supply port 6. The flow path portion 19b and the escape portion 19c are formed in outer shapes corresponding to the ink flow path 5 and the escape portion 12 shown in FIG. 3, respectively, and are formed to extend outward from the central portion 19a.

  The resin layer 19 is formed by, for example, forming a dissolvable resin material flatly on the entire surface of the substrate 1 by spin coating, and then irradiating the resin material with ultraviolet rays or deep ultraviolet rays, and performing exposure and development to perform patterning. Can be implemented.

  Next, as shown in FIG. 4C, a coating resin layer 13 made of a resin material is formed on the substrate 1 so as to cover the entire resin layer 19, and then a through hole is formed at a position facing the energy generating element 2. As a result, the discharge port 3 is formed.

The ejection port 3 can be formed by using a photolithography technique. Specifically, after the resist disposed on the coating resin layer 13 is exposed and developed, the ejection port 3 corresponds to the ejection port 3 of the sub resin layer 13. A through-hole is formed by etching the position to be performed. The coating resin layer 13 in which the plurality of discharge ports 3 are thus formed finally functions as the orifice plate 4 (see FIGS. 1 and 2). The ejection port 3 can be formed by a method such as etching using O ₂ plasma or removal of a member using an excimer laser in addition to the photolithography technique.

  Next, as shown in FIG. 4D, a part of the substrate 1 is etched from the back side by using anisotropic etching using a strong alkaline solution such as KOH, NaOH, TMAH, for example. As a result, the common liquid chamber 9 is formed as a through-hole penetrating the substrate 1, and the upper side of the common liquid chamber 9 opens as the ink supply port 6. More specifically, as shown in the perspective views of FIGS. 1 and 2, the shape of the common liquid chamber 9 is such that the shape of the opening on the front surface side and the back surface side of the substrate 1 are both rectangular. The opening area gradually becomes smaller.

  In order to form the common liquid chamber 9, in addition to such chemical anisotropic etching, a method of mechanically removing a member using a cutting tool such as a drill, or light energy such as a laser is used. There is also a method of removing the member by using, but the above-described chemical etching is more preferable because it is less likely to deform or break the pattern of the resin layer 19 formed in the previous step.

  Next, as shown in FIG. 4 (e), the respective portions 19 a, 19 b, 19 c of the resin layer 19 made of a soluble resin material are eluted from the common liquid chamber 9. Then, the flow path portion 19b (see FIG. 4B) of the resin layer 19 is formed as the ink flow path 5, and the escape portion 19c of the resin layer 19 is formed as the escape portion 12 for receiving the adhesive. Is done. Finally, as described with reference to FIG. 3, the escape portions 12 are formed so as to open at the corner portions of the ink supply port 6 and extend from the respective corner portions toward the side surface of the substrate 1. .

  Next, as shown in FIG. 4F, the substrate 1 is bonded and fixed onto the support member 21 on which the supply flow channel 26 is formed in advance, thereby completing the ink jet recording head 10.

  In this step, for example, the adhesive 30 before curing is first applied to the surface of the support member 21 by a transfer method, and then the substrate 1 is positioned with respect to the support member 21 to bring both members into close contact with each other, thereby curing the adhesive 30. It is carried out by letting. The adhesive 30 can be one that is cured by heat, one that is cured by light, or one that is cured by a combination thereof, and more preferably has ink resistance.

  The material of the support member 21 may be, for example, a metal material such as Al or magnesium alloy, a ceramic material such as alumina, or a resin material such as polysulfone, and in particular, a material having high thermal conductivity. This is more preferable in that the substrate 1 heated by the heat generated by the energy generation element 2 (electrothermal conversion element) can be efficiently cooled.

  When the inkjet recording head 10 manufactured by the above steps is used by being mounted on a recording apparatus such as a printer, for example, an electrical wiring (not shown) connected to the energy generating element 2 is connected to a circuit board (not shown) of the recording apparatus. In the state where ink is supplied from the supply flow path 26 of the support member 21 to the common liquid chamber 9 of the substrate 1 and the ink flow path 5 is filled with ink, an electrical signal is sent from the recording apparatus. By driving the energy generating element 2 by applying the ink, the ink in the ink flow path 5 is heated and bubbles are generated, and the ink is discharged as droplets from the discharge port 3 by the generation of the bubbles.

  According to the manufacturing method of the present embodiment described above, the relief portion 12 formed so as to open at the corner of the ink supply port 6 is provided between the orifice plate (coating resin layer 13) and the substrate 1. In the manufacturing process, even if the adhesive 30 before curing flows from the back side of the substrate toward the orifice plate 13, the adhesive 30 flows into the escape portion 12. Is prevented from flowing into. As a result, the ink jet recording head 10 has good ejection characteristics because the shape of the ink flow path is not deformed by the adhesive 30. If the cross-sectional shape of the relief portion is rectangular, the shape of the relief portion 12 can be variously changed by simply patterning the resin material disposed on the entire substrate 1 using, for example, a photolithography technique.

  The relief portion 12 described with reference to FIGS. 1 to 4 has a constant cross-sectional area, is formed to extend outward from the vicinity of the center of the orifice plate 4, and opens to the side surface of the orifice plate 4. However, the escape portion is not limited thereto and can be variously changed.

  A modified example of the escape portion will be described below with reference to the drawings.

  FIG. 5 is a diagram for explaining a modified example of the escape portion, and the configuration other than the escape portion is the same as that of the ink jet recording head 10 of FIGS. 1 to 3.

  The relief portion 12a shown in FIG. 5 (a) has a constant thickness in the thickness direction of the substrate 1 and has a shape in which the cross-sectional area becomes smaller as the cross-sectional area goes outward as the cross-sectional width dimension gradually decreases. The capillary force gradually increases toward the outside. Thereby, the adhesive 30 is more effectively guided into the escape portion 12a.

  Further, the escape portion may be such that the end portion does not open to the side surface of the substrate 1 like the escape portion 12b shown in FIG. Such a change in the shape of the relief portion can be implemented by variously changing the patterning of the resin layer in the step of forming the resin layer 19 (see FIG. 4). Or you may block | close the escape part 12 (refer FIG. 3) opened to a side surface as shown in 1st Embodiment in a post process. In addition, although it is preferable to provide an escape part in all the corner | angular parts of the ink supply port 6, as needed, you may arrange | position only in the corner | angular part with high possibility that the adhesive agent 30 will flow out.

  The escape portion may be as shown in FIGS. FIG. 6 is a view for explaining another modified example of the relief portion, FIG. 6A is a top view seen from the discharge port side of the ink jet recording head, and FIG. 6B is a part thereof. FIG. FIG. 7 is a perspective view showing a structure of the escape portion of FIG. 6 and its surroundings.

  As shown in the figure, one escape portion 12 c is formed at each end of the ink supply port 6 in the longitudinal direction. As shown in FIG. 7, the escape portion 12 c forms one space with the surface of the substrate 1 as the bottom surface. The side wall surface and the top surface (not shown) of the space are constituted by the orifice plate 4.

  As shown in FIG. 6B, the escape portion 12 c is provided at a position including the two corner portions 6 a and one short side of the ink supply port 6. Thus, the end portion of the ink supply port 6 serves as one entrance for the escape portion 12c.

  As shown in FIG. 7, the escape portion boundary wall 15 is a structural portion that constitutes a side wall on the inlet side of the escape portion 12 c, and is formed to extend toward the ink supply port 6 side. Further, the end surface 15 a coincides with the peripheral edge of the ink supply port 6.

  According to the escape portion 12c having such a configuration, the adhesive that has flowed through the corner portion of the common liquid chamber 9 (see FIG. 1) passes through the corner portion 6a of the ink supply port 6 as shown by the arrow in FIG. It flows into the space of the escape portion 12c. Further, even if the amount of the adhesive is large, or even when flowing along the side wall surface of the common liquid chamber 9 instead of the corner portion, the inlet of the ink escape portion 12 c is short of the ink supply port 6. Since the side and the corners 6a at both ends thereof are formed to be large, the adhesive is more reliably collected as compared to the above-described escape portions 12, 12a, 12b. In this way, it is preferable to form the entrance of the escape portion 12c so that the possibility of the entrance being blocked by the adhesive is reduced. In addition, the escape portion 12c has a larger internal space than the above-described escape portions 12, 12a, 12b, and therefore can collect more adhesive.

  Further, since the escape portion boundary wall 15 is formed up to the periphery of the ink supply port 6, the adhesive once collected in the escape portion 12 c flows out from the escape portion 12 c and flows into the ink flow path 5. It is prevented. If the escape portion boundary wall 15 is shorter than that shown in FIG. 7, the adhesive in the escape portion 12c flows out into the adjacent ink flow path 5 along the side surface 15b and the end surface 15a of the escape portion boundary wall 15. there is a possibility.

  The relief boundary wall 15 may be as shown in FIG. The relief portion boundary wall 16 in FIG. 8 is formed longer than the relief portion 15 in FIG. 7, and the end portion 16 a on the leading end side is located on the ink supply port 6. Note that even the relief portion boundary wall 16 having such a shape can be formed by the manufacturing method described with reference to FIG. 4, and more specifically, by changing the patterning of the resin layer 19. can do.

  Since the end portion 16a on the leading end side of the escape portion boundary wall 16 protrudes above the ink supply port 6, the adhesive flows into the ink flow path as compared with the escape portion boundary wall 15 of FIG. Can be prevented more effectively. This is because the end face 15a of the escape portion boundary wall 15 shown in FIG. 7 is located at the periphery of the ink supply port 6, and the adhesive collected at one end in the escape portion 12c travels along the end face 15a to form ink. Although there is a possibility of flowing into the supply path 5, since the front end side protrudes at the escape boundary wall 16 in FIG. 8, the possibility of the adhesive flowing in becomes smaller. Further, since the leading end side of the escape portion boundary wall 16 protrudes, the adhesive that has flowed along the side wall of the common liquid chamber adheres to and is held on the back surface (the lower surface in the drawing) of the escape portion boundary wall 16 that protrudes. Therefore, the inflow of the adhesive into the ink flow path 5 is more effectively prevented.

  The escape portion may be as shown in FIG. The escape portion 12e of FIG. 9 is formed with a guide wall 18 extending in parallel with the escape portion boundary wall 16 in the space. As shown by the arrow in FIG. 9B, since the adhesive flowing in from the corner 6a of the ink supply port 6 is usually collected along the inner wall of the escape portion 12e, the guide wall 18 is formed. As a result, the distance of the inner wall through which the adhesive is transmitted becomes longer, and the collection of the adhesive becomes more reliable. Further, since the adhesive tends to adhere and be held on the inner wall of the escape portion 12e by capillary force, the provision of the guide wall 18 in this way improves the adhesive holding ability of the escape portion 12e. Is preferable. Thereby, the once collected adhesive is unlikely to flow out of the escape portion 12e, and the inflow of the adhesive into the ink flow path 5 is further prevented. The number and shape of the guide walls 18 can be appropriately changed. For example, two or more guide walls may be provided on one side wall. Further, the guide wall 18 is not necessarily formed continuously on the side wall of the escape portion 12e, and may be independently provided in the escape portion 12e. Even if it is such a structure, if the collected adhesive is hold | maintained by capillary force, the adhesive holding capability of the escape part 12e can be improved.

1 is a perspective view showing an ink jet recording head according to an example of the present invention. It is a perspective view which shows the inkjet recording head manufactured by the manufacturing method of this embodiment. It is a schematic diagram for demonstrating the shape of the escape part of the inkjet recording head of FIG. It is a figure for demonstrating the process of the manufacturing method of this embodiment, and is sectional drawing cut | disconnected by the BB line of FIG. It is a figure for demonstrating the modification of an escape part. It is a figure for demonstrating the other modification of an escape part. It is a perspective view which shows the escape part of FIG. 6, and the structure of the periphery. It is a figure which shows the modification of the boundary wall of an escape part. It is a figure which shows the guidance wall formed in the space of an escape part. It is a perspective view for demonstrating an example of the conventional inkjet recording head. It is sectional drawing which cut | disconnected the inkjet recording head of FIG. 10 by the AA line. It is a figure for demonstrating the malfunction by the adhesive agent of the conventional inkjet recording head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Energy generating element 3 Ejection port 4 Orifice plate 5 Ink flow path 5a Ink flow path wall 6 Ink supply port 6a Corner | angular part 9 Common liquid chamber 10 Inkjet recording head 12, 12a-12e Escape part 13 Covering resin layers 15, 16 Escape part boundary wall 15a, 16a End face 15b Side face 18 Guide wall 19 Resin layer 19a Center part 19b Channel part 19c Escape part 21 Support member 26 Supply channel 30 Adhesive

Claims (14)

In an inkjet recording head in which a substrate in which a common liquid chamber for storing ink to be supplied to an ejection port for ejecting ink is formed as a through hole is bonded and fixed to a support member with an adhesive,
An ink jet recording head comprising: at least one escape portion into which an adhesive flowing through the common liquid chamber flows. The discharge port is formed in an orifice plate disposed on the substrate, and the common liquid chamber opens as an ink supply port on a surface on the side where the orifice plate is disposed,
2. The ink jet recording head according to claim 1, wherein the escape portion is constituted by the substrate and the orifice plate, and is formed so as to open at a corner of the ink supply port and communicate with the common liquid chamber. .   The inkjet recording head according to claim 2, wherein the escape portion has a rectangular cross-sectional shape, and one surface thereof is constituted by the surface of the substrate.   4. The ink jet recording head according to claim 2, wherein the escape portion is open on a side surface of the orifice plate.   5. The ink jet recording head according to claim 2, wherein the relief portion has a cross-sectional area that decreases as it approaches the side surface of the orifice plate. 6. The discharge port is formed in an orifice plate disposed on the substrate, and the common liquid chamber opens as an ink supply port on a surface on the side where the orifice plate is disposed,
The escape portion is configured to form a space for collecting an adhesive by the substrate and the orifice plate, and an entrance of the space includes an end portion of the ink supply port. The inkjet recording head described.   The inkjet recording head according to claim 6, wherein a boundary wall on an inlet side of the escape portion extends to at least the ink supply port.   The inkjet recording head according to claim 6 or 7, wherein at least one structure for holding the adhesive by capillary force is formed in the space of the escape portion.   The ink jet recording head according to claim 6, wherein the escape portions are provided at both ends of the ink supply port.   10. The ink jet recording head according to claim 1, wherein the adhesive is any one of thermosetting, photocuring, or curing by combination of light and heat. A common liquid chamber that opens as an ink supply port is formed on the surface of the substrate on which energy generation means for discharging ink from the discharge port is formed, on the side where the energy generation means is formed through the substrate. In the method of manufacturing an inkjet recording head,
A central portion located on a region where the ink supply port is formed, and a plurality of flow passage portions extending outward from the central portion, on a substrate on which energy generating means is formed, with a soluble resin material And a step of forming a resin layer including a relief portion that is continuous with at least one of the corner portions of the central portion;
Forming a coating resin layer made of a resin material on the substrate so as to cover the resin layer, and forming the discharge port communicating with the flow path portion in the coating resin layer;
Removing a part of the substrate from the opposite side of the surface on which the energy generating means is formed, thereby forming a common liquid chamber that opens as the ink supply port on the surface side;
Removing the central portion, the flow path portion, and the escape portion by eluting from the common liquid chamber;
And a step of bonding and fixing the substrate and the support member using an adhesive after removing the central portion, the flow path portion, and the escape portion.   The method of manufacturing an ink jet recording head according to claim 11, wherein the step of forming the resin layer includes forming a relief portion extending outward from the central portion with the corner portion as a starting point.   The method of manufacturing an ink jet recording head according to claim 11, wherein the step of forming the resin layer includes forming a relief portion including an end portion of the central portion.   The step of forming the resin layer includes forming the central portion, the flow path portion, and the relief portion by patterning after the dissolvable resin material is formed flat on the entire surface of the substrate. The method for manufacturing an ink jet recording head according to claim 11, comprising:

Images