JP2005233967A - プローブピン用材料 - Google Patents
プローブピン用材料 Download PDFInfo
- Publication number
- JP2005233967A JP2005233967A JP2005059926A JP2005059926A JP2005233967A JP 2005233967 A JP2005233967 A JP 2005233967A JP 2005059926 A JP2005059926 A JP 2005059926A JP 2005059926 A JP2005059926 A JP 2005059926A JP 2005233967 A JP2005233967 A JP 2005233967A
- Authority
- JP
- Japan
- Prior art keywords
- probe pin
- examples
- hardness
- platinum
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
【解決手段】 本願発明に係るプローブピンは、白金、イリジウム、ルテニウム、オスミウム、パラジウム、ロジウムの群から選択される1又は2以上の元素からなるものを用いることを特徴とする材料とした。また、上記の金属に、タングステン、ニッケル、コバルトの群から選択される1または2以上の元素を添加した材料とすることもできる。
Description
Claims (6)
- 白金、イリジウム、ルテニウム、オスミウム、パラジウム、ロジウムの群から選択される1又は2以上の元素からなるプローブピン用の材料。
- 重量パーセントで、ロジウム5〜30%と、残部イリジウムとからなる、請求項1に記載のプローブピン用の材料。
- 重量パーセントで、イリジウム5〜40%と、残部白金とからなる、請求項1に記載のプローブピン用の材料。
- 更にタングステン、ニッケル、コバルトの群から選択される1又は2以上の元素を添加した、請求項1に記載のプローブピン用の材料。
- 重量パーセントで、タングステン5〜10%、ニッケル5〜30%、コバルト10〜30%から選ばれる1の元素と、残部白金とからなる、請求項4に記載のプローブピン用の材料。
- 請求項1から請求項5いずれか一項に記載の材料を含むプローブピンを備えたプローブカード。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005059926A JP4216823B2 (ja) | 2005-03-04 | 2005-03-04 | プローブピン及び該ブロ−ブビンを備えたブロ−ブカ−ド |
TW094131996A TWI276807B (en) | 2005-03-04 | 2005-09-16 | Probe pins |
US11/237,544 US8183877B2 (en) | 2005-03-04 | 2005-09-28 | Material for probe pins |
KR1020050093254A KR100718577B1 (ko) | 2005-03-04 | 2005-10-05 | 프로브 핀용 재료 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005059926A JP4216823B2 (ja) | 2005-03-04 | 2005-03-04 | プローブピン及び該ブロ−ブビンを備えたブロ−ブカ−ド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005233967A true JP2005233967A (ja) | 2005-09-02 |
JP4216823B2 JP4216823B2 (ja) | 2009-01-28 |
Family
ID=35017027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005059926A Active JP4216823B2 (ja) | 2005-03-04 | 2005-03-04 | プローブピン及び該ブロ−ブビンを備えたブロ−ブカ−ド |
Country Status (4)
Country | Link |
---|---|
US (1) | US8183877B2 (ja) |
JP (1) | JP4216823B2 (ja) |
KR (1) | KR100718577B1 (ja) |
TW (1) | TWI276807B (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009107289A1 (ja) * | 2008-02-27 | 2009-09-03 | 田中貴金属工業株式会社 | 硬度、加工性、並びに、防汚特性に優れたイリジウム合金 |
WO2012108338A1 (ja) * | 2011-02-08 | 2012-08-16 | 田中貴金属工業株式会社 | 硬度、加工性、並びに、防汚特性に優れるプローブピン用線材に好適なロジウム合金 |
JP2014055102A (ja) * | 2008-02-28 | 2014-03-27 | Corning Inc | 白金含有容器の直接抵抗加熱に使用するためのニッケル含有フランジ |
JP2015083955A (ja) * | 2013-10-25 | 2015-04-30 | 石福金属興業株式会社 | Pt基合金からなるプローブピン |
JP2018175127A (ja) * | 2017-04-07 | 2018-11-15 | 東海電気株式会社 | 体内管導入物用マーカー及び体内管導入物,並びにそれらの製造方法 |
JP2021092450A (ja) * | 2019-12-11 | 2021-06-17 | 石福金属興業株式会社 | Rh基合金からなるプローブピン用材料およびプローブピン |
JP2022501502A (ja) * | 2018-09-21 | 2022-01-06 | デリンジャー−ニー・インコーポレイテッドDeringer−Ney Inc. | 白金−ニッケル基合金、製品、およびそれらを製造および使用する方法 |
EP4148152A1 (en) * | 2021-09-13 | 2023-03-15 | Tanaka Kikinzoku Kogyo K.K. | Medical pt alloy wire and medical pt alloy coil |
EP4148153A1 (en) * | 2021-09-13 | 2023-03-15 | Tanaka Kikinzoku Kogyo K.K. | Medical pt-w alloy |
WO2023063156A1 (ja) | 2021-10-15 | 2023-04-20 | 田中貴金属工業株式会社 | 高硬度貴金属合金及びその製造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8896075B2 (en) * | 2008-01-23 | 2014-11-25 | Ev Products, Inc. | Semiconductor radiation detector with thin film platinum alloyed electrode |
JP4808794B2 (ja) * | 2008-03-28 | 2011-11-02 | パナソニック株式会社 | 半導体検査装置 |
DE102012008907A1 (de) | 2012-05-08 | 2013-11-14 | Heraeus Materials Technology Gmbh & Co. Kg | Rhodiumlegierung zur Herstellung eines Drahts für Prüfnadeln |
SG10201610940SA (en) | 2012-08-03 | 2017-02-27 | Yamamoto Precious Metal Co Ltd | Alloy material, contact probe, and connection terminal |
EP3066480B1 (de) | 2013-11-07 | 2018-02-28 | Heraeus Deutschland GmbH & Co. KG | Prüfnadel und verfahren zur herstellung einer prüfnadel |
JP6243275B2 (ja) * | 2014-03-28 | 2017-12-06 | 田中貴金属工業株式会社 | イリジウム又はイリジウム合金からなる金属線材 |
EP3862759B1 (de) | 2020-02-04 | 2022-05-11 | Heraeus Deutschland GmbH & Co. KG | Manteldraht und verfahren zur herstellung von manteldrähten |
EP3878986A1 (de) | 2020-03-12 | 2021-09-15 | Heraeus Deutschland GmbH & Co KG | Draht und band mit bornitrid-nanoröhren für elektrische kontaktierungen |
US11990252B2 (en) * | 2020-04-17 | 2024-05-21 | National Technology & Engineering Solutions Of Sandia, Llc | Hermetic electrical feedthrough comprising a Pt—Ni-based pin alloy |
JP7072126B1 (ja) | 2022-02-10 | 2022-05-19 | 田中貴金属工業株式会社 | Ag-Pd-Cu系合金からなるプローブピン用材料 |
EP4325227A1 (de) | 2022-08-16 | 2024-02-21 | Heraeus Precious Metals GmbH & Co. KG | Bandförmiger verbundwerkstoff für prüfnadeln |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04337473A (ja) * | 1991-05-14 | 1992-11-25 | Tanaka Kikinzoku Kogyo Kk | 接触抵抗測定用プローブとその使用方法 |
JPH10332740A (ja) * | 1997-06-04 | 1998-12-18 | Toshiba Corp | プローブ針、プローブカードおよびプローブ針の製造方法 |
JPH1194875A (ja) * | 1997-09-16 | 1999-04-09 | Japan Electronic Materials Corp | プローブ及びそれを用いたプローブカード |
JP2004090050A (ja) * | 2002-08-30 | 2004-03-25 | Furuya Kinzoku:Kk | 白金又は白金基合金の摩擦攪拌接合法及びその接合構造 |
JP2004336062A (ja) * | 1995-05-26 | 2004-11-25 | Formfactor Inc | より大きな基板にばね接触子を定置させるための接触子担体(タイル) |
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JPH06275365A (ja) * | 1993-03-18 | 1994-09-30 | Nippondenso Co Ltd | 金属チップの製造方法,製造装置,金属チップ及びスパークプラグ |
JP3417721B2 (ja) * | 1995-04-04 | 2003-06-16 | 三菱電機株式会社 | 走査プローブ顕微鏡の使用方法 |
JPH1038922A (ja) | 1996-07-26 | 1998-02-13 | Iwaki Electron Corp Ltd | プローブピン装置 |
US6683783B1 (en) * | 1997-03-07 | 2004-01-27 | William Marsh Rice University | Carbon fibers formed from single-wall carbon nanotubes |
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JP3650722B2 (ja) * | 2000-05-18 | 2005-05-25 | 株式会社アドバンテスト | プローブカードおよびその製造方法 |
JP2002131334A (ja) * | 2000-10-24 | 2002-05-09 | Nec Yamaguchi Ltd | プローブ針、プローブカード、及びプローブカードの作製方法 |
US7244367B2 (en) * | 2001-12-11 | 2007-07-17 | Jds Uniphase Corporation | Metal alloy elements in micromachined devices |
JP4065787B2 (ja) * | 2002-08-30 | 2008-03-26 | 株式会社日立グローバルストレージテクノロジーズ | 磁気ヘッドおよび磁気記録再生装置 |
US7084650B2 (en) * | 2002-12-16 | 2006-08-01 | Formfactor, Inc. | Apparatus and method for limiting over travel in a probe card assembly |
US6852925B2 (en) * | 2003-05-23 | 2005-02-08 | Medtronic, Inc. | Feed-through assemblies having terminal pins comprising platinum and methods for fabricating same |
US7804232B2 (en) * | 2004-01-27 | 2010-09-28 | Ngk Spark Plug Co., Ltd. | Spark plug with high durability |
-
2005
- 2005-03-04 JP JP2005059926A patent/JP4216823B2/ja active Active
- 2005-09-16 TW TW094131996A patent/TWI276807B/zh active
- 2005-09-28 US US11/237,544 patent/US8183877B2/en active Active
- 2005-10-05 KR KR1020050093254A patent/KR100718577B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04337473A (ja) * | 1991-05-14 | 1992-11-25 | Tanaka Kikinzoku Kogyo Kk | 接触抵抗測定用プローブとその使用方法 |
JP2004336062A (ja) * | 1995-05-26 | 2004-11-25 | Formfactor Inc | より大きな基板にばね接触子を定置させるための接触子担体(タイル) |
JPH10332740A (ja) * | 1997-06-04 | 1998-12-18 | Toshiba Corp | プローブ針、プローブカードおよびプローブ針の製造方法 |
JPH1194875A (ja) * | 1997-09-16 | 1999-04-09 | Japan Electronic Materials Corp | プローブ及びそれを用いたプローブカード |
JP2004090050A (ja) * | 2002-08-30 | 2004-03-25 | Furuya Kinzoku:Kk | 白金又は白金基合金の摩擦攪拌接合法及びその接合構造 |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009107289A1 (ja) * | 2008-02-27 | 2009-09-03 | 田中貴金属工業株式会社 | 硬度、加工性、並びに、防汚特性に優れたイリジウム合金 |
US9063173B2 (en) | 2008-02-27 | 2015-06-23 | Tanaka Kikinzoku Kogyo K.K. | Iridium alloy excellent in hardness, workability and anti-contamination properties |
JP2014055102A (ja) * | 2008-02-28 | 2014-03-27 | Corning Inc | 白金含有容器の直接抵抗加熱に使用するためのニッケル含有フランジ |
US9297833B2 (en) | 2011-02-08 | 2016-03-29 | Tanaka Kikinzoku Kogyo K.K. | Rhodium alloy having excellent hardness, processability and antifouling properties and suitable for wire rod for probe pins |
CN103348254A (zh) * | 2011-02-08 | 2013-10-09 | 田中贵金属工业株式会社 | 硬度、加工性及防污特性优异的适合作为探针用线材的铑合金 |
KR20130107360A (ko) * | 2011-02-08 | 2013-10-01 | 다나카 기킨조쿠 고교 가부시키가이샤 | 경도, 가공성 및 방오 특성이 우수한 프로브 핀용 선재에 적합한 로듐 합금 |
JP2012163460A (ja) * | 2011-02-08 | 2012-08-30 | Tanaka Kikinzoku Kogyo Kk | プローブピン |
CN103348254B (zh) * | 2011-02-08 | 2015-09-30 | 田中贵金属工业株式会社 | 由铑合金构成的探针 |
KR101683335B1 (ko) * | 2011-02-08 | 2016-12-06 | 다나카 기킨조쿠 고교 가부시키가이샤 | 경도, 가공성 및 방오 특성이 우수한 프로브 핀용 선재에 적합한 로듐 합금 |
WO2012108338A1 (ja) * | 2011-02-08 | 2012-08-16 | 田中貴金属工業株式会社 | 硬度、加工性、並びに、防汚特性に優れるプローブピン用線材に好適なロジウム合金 |
JP2015083955A (ja) * | 2013-10-25 | 2015-04-30 | 石福金属興業株式会社 | Pt基合金からなるプローブピン |
JP2018175127A (ja) * | 2017-04-07 | 2018-11-15 | 東海電気株式会社 | 体内管導入物用マーカー及び体内管導入物,並びにそれらの製造方法 |
JP7463352B2 (ja) | 2018-09-21 | 2024-04-08 | デリンジャー-ニー・インコーポレイテッド | 白金-ニッケル基合金、製品、およびそれらを製造および使用する方法 |
JP2022501502A (ja) * | 2018-09-21 | 2022-01-06 | デリンジャー−ニー・インコーポレイテッドDeringer−Ney Inc. | 白金−ニッケル基合金、製品、およびそれらを製造および使用する方法 |
JP2021092450A (ja) * | 2019-12-11 | 2021-06-17 | 石福金属興業株式会社 | Rh基合金からなるプローブピン用材料およびプローブピン |
JP7300677B2 (ja) | 2019-12-11 | 2023-06-30 | 石福金属興業株式会社 | Rh基合金からなるプローブピン用材料およびプローブピン |
EP4148153A1 (en) * | 2021-09-13 | 2023-03-15 | Tanaka Kikinzoku Kogyo K.K. | Medical pt-w alloy |
CN115807177A (zh) * | 2021-09-13 | 2023-03-17 | 田中贵金属工业株式会社 | 医疗用Pt合金线材和医疗用Pt合金螺圈 |
US11702721B2 (en) | 2021-09-13 | 2023-07-18 | Tanaka Kikinzoku Kogyo K.K. | Medical Pt alloy wire and medical Pt alloy coil |
US11795524B2 (en) | 2021-09-13 | 2023-10-24 | Tanaka Kikinzoku Kogyo K.K. | Medical Pt-W alloy |
EP4148152A1 (en) * | 2021-09-13 | 2023-03-15 | Tanaka Kikinzoku Kogyo K.K. | Medical pt alloy wire and medical pt alloy coil |
CN115807177B (zh) * | 2021-09-13 | 2024-05-07 | 田中贵金属工业株式会社 | 医疗用Pt合金线材和医疗用Pt合金螺圈 |
WO2023063156A1 (ja) | 2021-10-15 | 2023-04-20 | 田中貴金属工業株式会社 | 高硬度貴金属合金及びその製造方法 |
KR20240073963A (ko) | 2021-10-15 | 2024-05-27 | 다나카 기킨조쿠 고교 가부시키가이샤 | 고경도 귀금속 합금 및 그 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20060197542A1 (en) | 2006-09-07 |
JP4216823B2 (ja) | 2009-01-28 |
TW200632325A (en) | 2006-09-16 |
TWI276807B (en) | 2007-03-21 |
KR20060096250A (ko) | 2006-09-11 |
US8183877B2 (en) | 2012-05-22 |
KR100718577B1 (ko) | 2007-05-15 |
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