JP2005230798A - Washing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make a washing apparatus, which has a structure to maintain the cleanliness of a solvent by distillating the solvent in the apparatus, have a structure which can effectively prevent the mixing of particles into the solvent. <P>SOLUTION: In the apparatus, at least one of a rotation driving device 10 and an elevation driving device 11 is arranged above washing tanks 3 to 5, the one of these rotation driving device 10 and elevation driving device 11 which has been arranged above the washing tanks 3 to 5 is made detachable from and attachable to the washing tanks 3 to 5, and a connecting part 36 of shafts 14 and 15 which rotate and are elevated and lowered by being connected to the rotation driving device 10 and the elevation driving device 11, and the washing tanks 3 to 5, is arranged below the opening edges of the washing tanks 3 to 5, and also, a solvent receiving member 90 to prevent the solvent, which flows into the washing tanks 3 to 5 along the shafts 14 and 15, to pass a sliding part 99 where members rub against each other on the shafts 14 and 15, and a guide member 91 for guiding this solvent to the washing tanks 3 to 5, are provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a cleaning apparatus. More specifically, the present invention relates to an improvement in the structure of a cleaning apparatus that cleans a workpiece that is an object to be cleaned using a solvent.

  Various cleaning tanks such as boiling cleaning tanks and ultrasonic cleaning tanks, and workpiece transfer devices for moving workpieces, as devices for cleaning machine articles such as products and parts (herein referred to as “workpieces”) Etc., and a cleaning apparatus for automatically cleaning the workpiece, which is an object to be cleaned, by sequentially immersing it in each of these tanks is used (see, for example, Patent Document 1 and Patent Document 2).

  One of the important issues in such a cleaning apparatus is how to remove particles mixed in the solvent to maintain a high cleanliness (in this specification, the term “particle” is used to refer to a metal Used as a term that refers to fine particles of about 0.5 to 5 μm in size, such as powder and ceramic particles, which, when mixed with the cleaning solvent in the cleaning tank, can reduce the cleanliness of the cleaning solvent. ing). In the conventional cleaning apparatus, there is also an external circulation type apparatus in which a solvent is once sent out of the apparatus using a pump, and then passed through a filter to remove particles and then returned to the cleaning tank. However, such a structure is disadvantageous for miniaturization because another device such as a pump is required outside, and particles may be generated in the pump itself used for solvent cleaning, Some aspects are undesirable for cleaning equipment.

  Therefore, as a cleaning apparatus that does not have such a problem, for example, a cleaning tank that cleans a workpiece using a solvent, a heater that heats and evaporates the solvent, and a funnel-shaped cooling that recovers the evaporated solvent vapor, for example A workpiece transfer device that holds the workpiece and immerses it in the cleaning tank, a rotation drive device that relatively rotates one of the workpiece transfer device and the cleaning tank, and a lift drive device that moves the work transfer device up and down. Things are being used. In such a cleaning device, the evaporated solvent is purified by cooling it inside the device without using a pump or a filter, and the purified solvent is returned to the final cleaning tank to perform the final cleaning. The cleanliness of the solvent in the tank is kept high.

  Further, in such a cleaning apparatus, there is a case where the work conveying apparatus or the like is rotated by a rotating shaft that penetrates upward from the lower center of the apparatus main body. In some cases, a driving device is provided to rotate the rotating shaft, the workpiece transfer device, and the like. In such an apparatus, in order to reduce the size of the apparatus main body, there is an apparatus that uses the rotating shaft as a solvent guiding means so that the recovered solvent flows into the final cleaning tank while being transmitted along the rotating shaft. .

  Further, in the cleaning apparatus in which the evaporated solvent is cooled by distillation inside the apparatus, the periphery of the cooler is covered with a heat insulating material to insulate the surrounding members and atmosphere. Some of them are designed for this purpose.

JP-A-60-78679 Japanese Examined Patent Publication No. 7-106345

  However, in the case of the structure in which the solvent after distillation flows into the final cleaning tank through the rotating shaft as described above, in particular, it passes through a joint for transmitting the rotational driving force provided at the lower portion of the rotating shaft, and finally. If it has a structure that flows into the washing tank, there is a possibility that extra particles may be mixed in while the purified solvent travels along the rotating shaft. Is desirable.

  Further, in the case where, for example, a Duracon bushing is adopted as the bearing of the rotating shaft, particles may be generated with the rotation of the rotating shaft although high slidability is obtained as the bearing. Therefore, it is desirable to cope with such a situation when the structure is such that particles are generated with the rotation of the rotating shaft and may be mixed into the cleaning tank.

  Furthermore, for example, a sponge may be employed as a heat insulating material covering the periphery of the cooler. In such a cleaning device, particles generated from the sponge enter the cleaning tank through a work passage hole provided in the cooler. Since there is a possibility of falling, it is desirable to take measures to prevent particles from being mixed into the solvent in the cleaning tank in such a structure.

  Accordingly, an object of the present invention is to provide a structure capable of effectively preventing particles from being mixed into a solvent in a cleaning apparatus having a structure that maintains the cleanliness of the solvent by distilling the solvent inside the apparatus. To do.

  In order to achieve such an object, the invention described in claim 1 is directed to a cleaning tank for cleaning a workpiece that is an object to be cleaned using a solvent, a heater for heating and evaporating the solvent, and condensing the vapor of the evaporated solvent. A cooler that recovers the workpiece, a workpiece transfer device that holds the workpiece and immerses it in the cleaning tank, a rotation drive device that relatively rotates one of the workpiece transfer device and the cleaning tank, and a lift drive device that moves the workpiece transfer device up and down And at least one of the rotation driving device and the lifting drive device is disposed above the cleaning tank, and the rotation driving device and the lifting drive device that are disposed above the cleaning tank are used as the cleaning tank. In addition, the connecting portion between the cleaning tank and the shaft that is connected to the rotation driving device and the lifting driving device and rotates and moves up and down is arranged below the opening edge of the cleaning tank. In addition, a solvent receiving member that prevents the solvent flowing through the shaft from flowing into the cleaning tank from passing through the sliding portion where the members rub against each other on the shaft, and a guide member that guides the solvent to the cleaning tank are provided. Is.

  According to a second aspect of the present invention, in the cleaning device according to the first aspect, the rotary drive bearing portion of the shaft in the rotary drive device is constituted by a rolling bearing and is disposed at the upper portion of the cooler, and the lower portion of the rotary drive bearing portion is disposed at the lower portion. It is characterized by a labyrinth structure.

  According to a third aspect of the present invention, in the cleaning apparatus according to the first aspect, the upper entrance of the work passage hole provided in the cooler for passing the work is at least above the heat insulating material provided around the cooler. It is characterized in that a peripheral edge projecting is provided.

  According to a fourth aspect of the present invention, in the cleaning device according to the first aspect, the rotary drive device and the lift drive device disposed above the cleaning tank can be attached to and detached from the cleaning tank, and the evaporated solvent A condensation amount promoting member for promoting the condensation amount is provided.

  According to a fifth aspect of the present invention, in the cleaning apparatus according to the first aspect, the rotary driving device and the lifting / lowering driving device arranged above the cleaning tank can be attached to and detached from the cleaning tank, and the final cleaning of the cleaning tank is performed. A filter that removes solvent particles flowing into the final cleaning tank is provided in front of the cleaning tank, and a water separation mechanism that separates water floating on the solvent in the tank is provided in the final cleaning tank. It is what.

  The invention described in claim 6 is characterized in that, in the cleaning device according to claim 5, the filter is a cartridge type.

  Further, the invention according to claim 7 is the cleaning apparatus according to claim 1, wherein the rotary drive device and the lift drive device arranged above the cleaning tank are detachable from the cleaning tank, A sample extraction hole is provided for extracting a sample for particle confirmation from the solvent in the cleaning tank.

  According to the cleaning apparatus of the first aspect, since the coupling portion between the shaft and the cleaning tank is disposed below the opening edge of the cleaning tank, even if particles are generated in the coupling portion, the particles are released from the tank opening. It can prevent falling into the washing tank. In addition, since the solvent traveling along the shaft is guided to the final cleaning tank or the like without passing through the sliding portion, particles adhering to the sliding portion or generated in the sliding portion itself become the solvent. It can prevent effectively that it mixes and the cleanliness in a washing tank falls.

  Furthermore, since the rotation driving device and the lifting / lowering driving device arranged above the washing tank are detachable from the washing tank, for example, if the rotation driving device is arranged above, cleaning is performed. It is possible to perform operations such as cleaning the cleaning tank with the rotary drive device removed from the tank side. For this reason, according to this washing | cleaning apparatus, a maintenance and maintenance work do not become complicated, and maintenance work, such as a washing tank, can be performed easily.

  Further, according to the cleaning device of claim 2, wherein the rotary drive bearing portion is configured by a rolling bearing, particles are mixed into the solvent in the cleaning tank by suppressing generation of particles during rotation of the shaft (rotating shaft). It can prevent effectively that a cleanliness falls. Furthermore, since the lower part of the rotary drive bearing portion has a labyrinth structure, even when particles are generated, the labyrinth structure portion can be used as a tray to temporarily hold the particles.

  Further, according to the cleaning device according to claim 3, wherein a peripheral edge protruding upward is provided at the upper entrance of the work passage hole of the cooler, even if particles are generated from the sponge that is a heat insulating material covering the periphery of the cooler. It becomes easy to prevent particles from falling from the workpiece passage hole into the cleaning tank. Therefore, it is possible to effectively prevent the cleanliness of the solvent in the cleaning tank from being lowered while adopting a sponge material as in the past as the heat insulating material.

  Further, according to the cleaning device of the fourth aspect, the condensation amount promoting member can dissipate the heat in the cooling pipe to the atmosphere more efficiently and promote the condensation amount of the solvent in the cooling pipe.

  According to the cleaning apparatus according to claim 5, comprising a filter for removing solvent particles flowing into the final cleaning tank, the particles are prevented from flowing into the final cleaning tank and the cleanliness in the tank is reduced. It can be effectively prevented. Moreover, since this cleaning device also has a water separation mechanism, even if water is mixed into the final cleaning tank where the liquefied solvent returns, it is possible to separate this water floating on the solvent from the final cleaning tank. In addition, it is possible to prevent the deterioration of the cleanliness in the final washing tank and the like and further prevent the surface of the work from being rusted.

  In this case, if the filter is a cartridge type as described in claim 6, the dirty filter can be easily replaced, which is convenient.

  In addition, according to the cleaning apparatus of claim 7, wherein the sample take-out hole for particle confirmation is provided in the cooler, the sample for confirming the cleanliness of a part of the solvent in the washing tank can be obtained without removing the recovery plate or the heat insulating material. It can be taken out as a simple. Therefore, it becomes easy to check the cleanliness of the solvent in any cleaning tank even during the use of the cleaning device.

  Hereinafter, the configuration of the present invention will be described in detail based on an example of an embodiment shown in the drawings.

  1 to 26 show an embodiment of the present invention. The cleaning apparatus 1 according to the present invention includes cleaning tanks 3 to 5 for cleaning (including a case of degreasing) a workpiece 2 to be cleaned using a solvent, a heater 7 for heating and evaporating the solvent, and evaporation. Relative to the cooler 8 that condenses and recovers the vapor of the solvent, the workpiece transfer device 9 that holds the workpiece 2 and immerses it in the cleaning tanks 3 to 5, and one of the workpiece transfer device 9 and the cleaning tanks 3 to 5 A rotary drive device 10 that rotates and a lift drive device 11 that lifts and lowers the work transfer device 9, and is a distillation-integrated type that maintains the cleanliness of the cleaning solvent by evaporating and distilling the solvent while washing the work 2. It is an apparatus, Comprising: At least one of the rotation drive device 10 and the raising / lowering drive device 11 is arrange | positioned above the washing tanks 3-5, and it arrange | positions above the washing tanks 3-5 among these rotation drive devices 10 and the raising / lowering drive devices 11. What was done Those that are detachable with respect Kiyoshiso 3-5.

  Hereinafter, the cleaning device 1 in which both the rotary drive device 10 and the lift drive device 11 are disposed above the cleaning tanks 3 to 5 and both the rotary drive device 10 and the lift drive device 11 are detachable will be described. To do. In the present embodiment, a compact structure in which the space occupied by the entire apparatus is reduced by adopting a distiller-integrated structure in which both the rotary drive device 10 and the lift drive device 11 are arranged above the cleaning tanks 3 to 5 in this way. The device is realized.

  The cleaning apparatus 1 has three round-bottomed cleaning tanks 3 to 5 and a single round-bottomed or flat-bottomed drying tank 6 like test tubes. The workpiece 2 that has been immersed in and washed stepwise is dried in a drying tank 6 (see FIG. 3). These four tanks 3 to 6 are arranged on the rotating disk 30 at equal intervals around the vertical rotating shafts 14 and 15 to form a rotating washing tank that rotates in the drain tank 17 in an integrated state. (See FIG. 2). Further, a punching metal 16 that prevents the solvent in the drain tank 17 from splashing but allows the passage of the solvent vapor is fixed to the bottom of the rotating disk 30 with a screw 16b via a spacer 16c (FIG. 2). FIG. 16). The punching metal 16 is provided with a recess 16a slightly larger than each of the tanks 3 to 6 into which the tanks 3 to 6 can be fitted (see FIG. 5). When ultrasonic waves are applied, the solvent containing oil in the drain tank 17 bubbles or rises from the liquid level as a mist, but this punching metal 16 becomes a physical obstacle and absorbs the physical energy of the solvent vapor. In addition, excess solvent vapor is prevented from being brought into each tank 3-6. In addition, when there is no small hole in the metal, it is possible to completely suppress the trouble that extra solvent vapor is brought into each tank 3-6, but another trouble that prevents solvent regeneration occurs, so both troubles are comparatively considered. Thus, it is desirable to determine the size, number, arrangement, etc. of the small holes of the punching metal 16. Further, although one punching metal 16 is sufficient, when a plurality of punching metals 16 are used, it is possible to more reliably absorb the energy of the solvent vapor.

  These tanks 3 to 6 are arranged in the order of processing performed on the workpiece 2. For example, in the present embodiment, the first cleaning tank 3, the second cleaning tank 4, the third cleaning tank 5 and the drying tank 6 are arranged on the rotating disk 30 in this order clockwise (see FIG. 3). The rotating disk 30 (and the punching metal 16) is rotated counterclockwise. Each of the tanks 3 to 6 is installed at a height at least the bottom of which is immersed in the waste liquid in the drain tank 17, and is poured into the hot water through the heated waste liquid (see FIG. 2).

  Further, in the three cleaning tanks 3 to 5, the solvent that overflows the third cleaning tank 5 flows into the second cleaning tank 4, and the solvent that overflows the second cleaning tank 4 enters the first cleaning tank 3. In order to flow in, the liquid level is gradually lowered in the order of the third cleaning tank 5 → the second cleaning tank 4 → the first cleaning tank 3 (see FIG. 4). For this reason, as the solvent after distillation flowing into the third cleaning tank 5 flows from the second cleaning tank 4 to the first cleaning tank 3, the cleanliness gradually decreases. The degree of cleanliness of the solvent is higher in the second cleaning tank 4 than in the first cleaning tank 3, and higher in the third cleaning tank 5 than in the second cleaning tank 4. The third cleaning tank 5 and the second cleaning tank 4 are provided with flow paths 18 and 19 for guiding the overflowed solvent to the lower cleaning tank (the second cleaning tank 4 or the first cleaning tank 3). Yes. The first cleaning tank 3 is provided with a waste liquid port 20 for draining the solvent into the drain tank 17 (see FIG. 3).

  In the present embodiment, the work 2 is roughly cleaned in the first cleaning tank 3 in which the work 2 is first immersed, and the solvent in the cleaning tank 3 is heated to boil and distill (hereinafter, “ This first cleaning tank having the main function of “ultrasonic wave + boiling cleaning” is also referred to as “boil cleaning tank”). The solvent that has flowed into the boiling washing tank 3 is thereby vaporized, or is drained into the drain tank 17 through the waste liquid port 20 described above. In the second cleaning tank 4, the workpiece 2 after the rough cleaning is ultrasonically cleaned (hereinafter, this second cleaning tank having a main function of “ultrasonic wave + rinsing” is also referred to as “ultrasonic rinsing tank”. ). An ultrasonic transducer 21 that generates ultrasonic waves is provided at the bottom of the drain tank 17 (see FIG. 1 and the like). Although not particularly shown in the present embodiment, a circulating path for circulating the solvent and returning it to the original is provided in the bottom of the boiling washing tank 3 in some cases. The circulating path includes a valve, a Y-type strainer, and a pump. A pressure gauge, a filter case, etc. are provided. Further, in the third cleaning tank 5, final cleaning is performed with a solvent having the highest cleanliness (hereinafter, this third cleaning tank having a main function of “ultrasonic wave + final rinse” is referred to as “final cleaning tank”. Say). The cleaning solvent for cleaning the workpiece 2 is, for example, chlorofluorocarbon solvents (HFC, HFE, HCFC), chlorine solvents, bromine solvents, alcohol solvents, or these solvents and glycol ethers or hydrocarbon solvents. A low boiling solvent such as a mixture is used.

  The final cleaning tank 5 is designed to maintain a high degree of cleanliness of the solvent in the tank by the flow of the distilled purified solvent. In the present embodiment, a liquid recovery dish 22 is provided in the upper center of the rotating disk 30 so that the distilled solvent dropped on the dish flows into the final cleaning tank 5 (see FIGS. 2 and 3). In this case, considering that water may be mixed in the inflowing solvent, a water separation mechanism 12 is provided for separating the water from the viewpoint of preventing the occurrence of rust on the workpiece surface. Is preferred. In the present embodiment, the partition plate 12a subjected to the water repellent treatment is provided in the upper layer portion including the liquid surface of the solvent, and the inside of the final cleaning tank 5 is partitioned into the cleaning area A1 and the other external area A2, and the outside from the outside of the tank The water that has flowed into the region A2 is prevented from flowing into the cleaning region A1 (see FIGS. 3 and 4). In this case, the cleaning area A1 has a size that allows at least the work 2 to be lowered together with the work holder 46 and immersed in the bath. In this embodiment, since a liquid having a specific gravity greater than that of water is used as the solvent, the water that has flowed into the final cleaning tank 5 flows out of the tank while floating on the surface layer of the solvent. Therefore, it is possible to prevent water from staying in the final cleaning tank 5 as much as possible. Further, since the water separation mechanism 12 is formed by a simple configuration in which the partition plate 12a is provided in the final cleaning tank 5, the apparatus is compared with a case where a device for water separation is provided separately from the cleaning device 1. This is advantageous in terms of downsizing.

  The drying tank 6 is a tank for drying the surface of the workpiece 2 that has been finally cleaned, and is disposed as a fourth tank positioned next to the final cleaning tank 5 (see FIG. 3 and the like). The drying tank 6 has a main function of “vapor cleaning + drying” (that is, a function of performing vapor cleaning and a function of performing drying).

  Further, in the rotary cleaning tank as described above, it is also preferable to partition the space above the tank, which requires particularly cleanliness, from other parts. In such a case, the atmosphere of the workpiece 2 in the final stage of the cleaning or the final process can be kept clean. In this embodiment, the partition walls 29 are provided so as to partition the upper space of the drying tank 6 and the final cleaning tank 5 from the upper space of the boiling cleaning tank 3 and the ultrasonic rinsing tank 4 (see FIG. 3). The partition wall 29 is bent in a V shape near the center so as not to interfere with the shafts 14 and 15 and the liquid collection dish 22.

  The rotation driving device 10 for rotating the rotary cleaning tank composed of the cleaning tanks 3 to 5, the drying tank 6, the rotating disk 30 and the punching metal 16 includes a cleaning tank rotating motor 23, a timing belt 24, pulleys 25 and 26, and a shaft. 14 and 15 (see FIGS. 1 and 12 to 14). In this embodiment, the DC geared motor placed vertically is used as a washing tank rotation motor 23, and power is transmitted to the shafts 14 and 15 by the timing belt 24. The rotation amount of the cleaning tank rotation motor 23 can be detected by a rotation sensor dog 27 which is attached to the rotation shaft of the cleaning tank rotation motor 23 and rotates by the same amount, and a rotation sensor 28 which reads the rotation amount of the dog (FIGS. 12 and 12). 14). From the viewpoint of avoiding the influence of the solvent vapor flowing out from the upper opening of the cooling pipe 61, the cleaning tank rotation motor 23, the rotation sensor dog 27, and the rotation sensor 28 are in front (or rear) and below the upper opening. It is preferable that it is installed.

  The shafts 14 and 15 are double shafts having a double structure for integrally rotating the washing tanks 3 to 5 and the drying tank 6 through the rotating disk 30 (see FIG. 2). Of these two shafts, the shaft 14 is a hollow shaft having a pulley 26 attached to the outer periphery, and the power is transmitted by a timing belt 24 wound around the pulley 26 to rotate. On the other hand, the shaft 15 is a solid axis that is longer than the hollow shaft 14, and can rotate in the hollow shaft 14 and move in the axial direction (that is, the vertical direction) (see FIG. 12). The shafts 14 and 15 have an engagement / disengagement mechanism 31 having the following structure, for example, which can be selected from a locked state in which the shafts 14 and 15 rotate integrally or an unlocked state in which the shafts 14 and 15 do not rotate integrally. (See FIGS. 2 and 6). That is, a cap member 32 that rotates integrally with the upper shaft end of the solid shaft 15 is attached, and a drive pin 33 that protrudes toward the center of rotation is provided at the cap portion. A crank-shaped engagement groove 34 is provided in the crank member 35 attached to a portion facing 33. The engagement groove 34 rotates the shafts 14 and 15 integrally with a position where a later-described locking pin 38 is not hooked to the joint block 36 (drive portion removal position) and the locking pin 38 is hooked to the joint block 36. It has a crank shape with a rotational position at a position opened approximately 90 degrees (see FIG. 6). Further, a step is provided between the rotation position and the removal position, and the rotation position is higher than the removal position by the level difference. Therefore, in order to move the drive pin 33 in the removal position to the rotation position, it is necessary to perform an operation of rotating 90 degrees while overcoming the step on the way. In the present embodiment, the height of the drive pin 33 at the rotational position is made higher than that at the removal position, and the solid shaft 15 is moved upward by the height during rotation. An engaging claw 35a for engaging the drive pin 33 with the crank member 35 is provided at the rotational position (see FIG. 6). When the driving pin 33 is engaged with the engaging claw 35a, the rotational driving force of the washing tank rotating motor 23 is motor 23 → pulley 25 → timing timing belt 24 → pulley 26 → shaft 14 → crank member 35 → driving pin. 33 → shade member 32 → shaft 15 is transmitted.

  Moreover, the lower end part of the hollow shaft 14 and the solid shaft 15 becomes a structure which can be attached or detached with respect to the rotation disc 30 (refer FIG. 2, FIG. 7). For example, in the present embodiment, a joint block 36 is provided on the liquid collection tray 22, and the lower ends of the shafts 14 and 15 can be attached to or detached from the joint block 36. The lower end of the hollow shaft 14 is provided with, for example, a quadrangular prism-shaped engagement block 37 having an engagement protrusion 37a, and the joint block 36 is provided with an engagement block 37 (and an engagement protrusion, for example, by protrusions at four corners as shown). A recess in which 37a) fits is formed. In a state where the engagement block 37 (and the engagement protrusion 37a) are fitted in the concave portion of the joint block 36, the rotating disk 30 (and each of the tanks 3 to 6) and the hollow shaft 14 are not integrally rotatable. Engage with.

  Further, a locking pin 38 that protrudes horizontally from the shaft 15 is provided near the lower end of the solid shaft 15, while a long hole 39 through which the locking pin 36 can pass is provided in the joint block 36. (See FIG. 7). After the lower end portion of the solid shaft 15 and the locking pin 38 are inserted into the long hole 39, when the locking pin 38 is rotated together with the solid shaft 15, the locking pin 38 is locked and the solid shaft 15 is locked. The joint block 36 cannot be removed. At this time, since the engagement block 37 is already fitted in the joint block 36, the hollow shaft 14 and the joint block 36 are integrated and rotate by the same amount. Further, when the locking pin 38 is rotated together with the solid shaft 15, the driving pin 33 is simultaneously locked with the locking pin 38 by the joint block 36 by rotating it 90 degrees while being lifted so as to exceed the step. Can be engaged with the rotational position of the crank member 35 (see FIG. 6). Thereby, the hollow shaft 14, the solid shaft 15, the joint block 36, the rotating disk 30 and the like are integrated and rotated by the same amount. In addition, as the drive pin 33 is lifted by the crank step of the engagement groove 34, the solid shaft 15, the locking pin 38, the joint block 36, the rotating disk 30, the punching metal 16, the tanks 3-6, etc. The same amount can be lifted. In this embodiment, until the rotary disk 30 is locked to the inner wall of the drain tank 17 until it is lifted in this way, the tanks 3 to 6 are kept in a non-rotatable state and the rotary disk 30 is lifted. Thus, the locked state is released so that the tanks 3 to 6 can be rotated.

  Subsequently, a structure for liquid replacement and liquid amount confirmation of the cleaning solvent in the cleaning apparatus 1 of the present embodiment will be described.

  In the present embodiment, a waste drain pipe 40 for draining the solvent accumulated in the drain tank 17 is installed on the outer peripheral side of the drain tank 17 (see FIGS. 1 and 15 to 16). The waste liquid drain pipe 40 communicates with the lower part of the drain tank 17 through a communication pipe 40a at the lower part thereof, and has a structure capable of turning in a vertical plane around the horizontal communication pipe 40. A plug 40c is provided at the tip of the swivelable tube portion 40b (see FIG. 1). However, when the tip is always held at a position higher than the liquid level in the drain tank 17 except during waste liquid. It is also possible to omit the stopper 40c. A holding device 40d is provided on the outer periphery of the drain tank 17 to keep the pipe portion 40b vertical (see FIG. 16). The solvent in the drain tank 17 can be drained by tilting the pipe portion 40b.

  Further, a drain tank liquid level pipe 41 is provided on the outer periphery of the drain tank 17 to make it possible to visually recognize the amount of waste liquid in the tank (see FIGS. 1 and 15 to 17). The drain tank liquid level pipe 41 is provided at the upper and lower parts of the drain tank 17 and communicates with the communication pipes 41a and 41b and the transparent or translucent tube 41c provided between the communication pipes 41a and 41b. It consists of and. According to the drain tank liquid level pipe 41, the height of the waste liquid at that time in the drain tank 17, that is, the amount of the waste liquid accumulated in the tank can be confirmed by visually checking the liquid level in the tube 41c. .

  Next, the workpiece transfer device 9 will be described. The workpiece transfer device 9 is a device that supplies the workpiece 2 to the cleaning device 1 or discharges the cleaned workpiece 2 from the cleaning device 1 (this supply operation and discharge operation are collectively referred to as “supply / discharge” in this specification). ). In the cleaning apparatus 1 of this embodiment, the workpiece 2 is held up and down a plurality of times at that position, and the tanks 3 to 6 are rotated together with the rotating disk 30 in the meantime to sequentially advance the cleaning process. ing. Hereinafter, the configuration of the workpiece transfer device 9 will be described (see FIGS. 1, 8, 9, 10, 18 to 22, etc.). The “intermediate position” shown in FIGS. 9 and 10 is a stop position when the work 2 is stopped at a position where the solvent vapor exists when the work 2 is moved between the cleaning tanks 3 to 5. The “drying position” indicates the work position (height) in the drying tank 6.

  In the present embodiment, the workpiece transfer device 9 includes a pair of left and right upper and lower guide shafts 42 and 43, a bridge 44 connecting the upper ends of the upper and lower guide shafts 42 and 43, a workpiece holding component 45 provided in the middle of the bridge 44, and the like. The work 2 held on the work holder 46 at the lower end of the work holding part 45 is moved up and down together with the upper and lower guide shafts 42, 43, etc. (see FIG. 1). The upper and lower guide shafts 42 and 43 are guided in the vertical direction by the upper and lower guide bearing portions 50 provided in the upper portions of the tanks 3 to 6 and the drain tank 17. The up / down amount of the upper and lower guide shafts 42 and 43 is detected by an upper / lower sensor dog 51 attached to one upper / lower guide shaft (for example, the upper / lower guide shaft 43) and moving up / down by the same amount and an up / down sensor 52 that reads the up / down amount of the upper / lower sensor dog 51. (See FIG. 1).

  A work holding part 45 for holding the work 2 is suspended substantially at the center of the bridge 44 (see FIG. 8 and the like). An attachment member 48 is provided at the upper end of the workpiece holding component 45 so that the workpiece holding component 45 itself can be attached to and detached from the bridge 44. The material for connecting the mounting member 48 and the work holder 46 is not particularly limited in material, thickness, shape, etc., but the surface area that comes into contact with the solvent when the work 2 is immersed is as small as possible. When the surface area is reduced in this way, the amount of the solvent adhering to the connecting member can be reduced each time the workpiece 2 is moved up and down, and the evaporation amount of the solvent can be suppressed. For example, in this embodiment, two steel wires 47 are suspended in parallel, and the work holder 46 is supported at the lower end thereof. Here, the steel wire 47 includes high carbon steel such as a so-called piano wire. When strength is required as the connecting member, a sheet metal or the like can be used instead of the steel wire 47. In addition, the work holder 46 is made of resin and is formed according to the shape of the bottom of the work 2 to be transported, but the material, shape, size, etc. can be appropriately changed according to the work type. In addition to such a trapezoidal holder, a holder that is moved up and down while the workpiece 2 is housed in a cage, or a holder that is moved up and down while hooked with a wire, etc. may be adopted. it can. Further, in the present embodiment, a workpiece discharge port lid 49 is provided in the middle of the two steel wires 47 (see FIG. 1 and the like). When the work 2 is immersed in the solvent in the cleaning tanks 3 to 5 or positioned in the drying tank 6, the work supply / discharge cover 49 is provided at the opening (that is, the work discharge port) of each tank 3 to 6. It is for covering, and is installed at a size and height that covers each tank 3-6. For example, when each of the cleaning tanks 3 to 5 during cleaning is covered with the work discharge port lid 49, the solvent recovery efficiency can be improved. As described above, in the workpiece transfer device 9 of the present embodiment, the workpiece holding component 45 can be attached to and detached from the bridge 44 by the mounting member 48, so that the type of the workpiece 2 or the depth of each of the tanks 3 to 6 is determined. It is possible to replace the workpiece holding part 45 with different specifications such as the holder shape and height according to the conditions.

  The raising / lowering drive device 11 is a device for raising and lowering the workpiece conveying device 9 composed of the upper and lower guide shafts 42, 43 and the like, and is constituted by a workpiece raising / lowering motor 53, a timing belt 54, and the like (see FIG. 20 and the like). In the present embodiment, a geared motor placed horizontally on the vertical guide bearing portion 50 is used as the workpiece vertical motor 53. The timing belt 54 is stretched in the vertical direction by attaching belt ends to upper and lower brackets 55 and 56 provided near the upper end and the lower end of the upper and lower guide shafts 42 and 43, and a part of the timing belt 54 is supported by the workpiece vertical motor 53. It is in the state wound around the pulley 57 of the rotating shaft (see FIG. 19 and the like). Further, auxiliary pulleys 58 and 59 are provided above and below the pulley 57 to stretch the timing belt 54 in a V shape and increase the amount of winding around the pulley 57. According to the elevating drive device 11 described above, the rotational driving force of the workpiece vertical motor 53 is transmitted in the order of the motor 53 → the pulley 57 → the timing belt 54, whereby the timing belt 54, the brackets 55 and 56, the bridge 44, and the vertical guide. The shafts 42 and 43, the work holding component 45, etc. move up and down integrally.

  Note that it is also preferable that the horizontal position of the workpiece supply / discharge port lid 49 is positioned by the positioning member 60 only when the workpiece is at the lifted end (see FIG. 8 and the like). In such a case, the horizontal positioning reproducibility at the rising end of the work 2 is ensured, and the work holding component 45 is fixed when the work 2 is attached or detached, so that the work can be easily performed. In the present embodiment, a positioning pin 49 a is provided on the upper part of the work supply / discharge port lid 49, and the horizontal position of the positioning pin 49 a and thus the work supply / discharge port cover 49 is positioned by using a through hole provided in the positioning member 60. (See FIG. 23 and the like).

  Next, the cooler 8 will be described. The cooler 8 is a device that condenses and recovers evaporated solvent vapor, and includes a cooling pipe 61, a recovery plate 62, a Peltier element 64, and the like (see FIG. 2 and the like).

  The cooling pipe 61 is a pipe provided above the tanks 3 to 6 for cooling and condensing the solvent vapor. The cooling pipe 61 desirably has a long pipe length in terms of a normally open pipe that cools the steam, but when it also serves as an introduction pipe for the work 2, it is desirable that the pipe length be short from the viewpoint of shortening the work moving distance. Therefore, in the present embodiment, a pipe is constituted by the large-diameter and short-axis vertical workpiece passage hole 61a and the small-diameter and long-axis vertical hole 61b, and the solvent vapor is condensed on the inner walls of these pipes (see FIG. 24). . The workpiece passage hole 61a is formed in a size that allows the workpiece holder 46 described above to pass while holding the workpiece 2. The cooling pipe 61 of this embodiment is provided with a bearing hole 61c at the center thereof, and also functions as a radial bearing of the hollow shaft 14 (see FIG. 2). In this embodiment, a cooling device for cooling the cooling pipe 61 is constituted by a Peltier element 64, a heat sink 65, and a fan motor 66 (see FIG. 24).

  The collecting plate 62 is a device that collects and collects the solvent cooled and condensed by the cooling pipe 61 in a part. For example, a funnel-shaped (inverted conical shape) that can be collected in the center is adopted, and the collecting plate 62 is formed through the collecting hole 62c in the center. The solvent is provided so as to flow out to the liquid collection tray 22 disposed below (see FIG. 2). Through holes 62a and 62b having substantially the same diameter are provided at positions where the recovery plate 62 overlaps with the workpiece passage hole 61a and the vertical hole 61b described above. Around the through holes 62a and 62b, there are provided bank-like edges 62d that prevent the solvent flowing along the inclined surface of the recovery plate 62 from flowing downward from the through holes 62a and 62b. The recovery plate 62 is preferably formed of a material such as a resin so that heat transfer between the cooling pipe 61 and the cooling pipe 61 is prevented as much as possible, thereby further improving the heat insulation of the cooling pipe 61. Thus, the cooling efficiency can be increased. It is also preferable to interpose a heat insulating material 63 between the cooling pipe 61 and the recovery plate 62 in order to further improve the heat insulating property. In the present embodiment, the heat insulating material 63 is attached to the upper edge of the peripheral wall 67 of each of the tanks 3 to 6, the recovery plate 62 is attached to the lower portion of the heat insulating material 63, and the cooling pipe 61 is attached to the upper portion of the heat insulating material 63. Therefore, the loss of heat (cold heat) is reduced (see FIG. 2). As the heat insulating material 63, a plastic material having heat insulating property and solvent resistance such as PTFE resin (polytetrafluoroethylene), epoxy resin, POM resin (polyoxymethylene), or polyacetal resin is suitable.

  According to the cooler 8 having the above-described configuration, the solvent cooled and condensed on the inner wall of the cooling pipe 61 flows along the inner wall and drops onto the recovery plate 62, and further flows along the inclined surface through the recovery hole 62c. Drop it below. This solvent further flows along the surfaces of the hollow shaft 14, the engagement block 37, the joint block 36, etc., and is returned to the final cleaning tank 5 by the liquid recovery dish 22 (see FIG. 2).

  Furthermore, the control device 13 in the cleaning device 1 of the present embodiment will be described. The control device 13 is provided so as to detect the evaporation amount of the solvent based on the surface temperature of the cooler 8 and adjust the temperature of the heater 7 based on the detected amount. In the present embodiment, a liquefier temperature sensor 70 is provided on or near the surface of the cooling pipe 61 (see FIG. 11), and the temperature near the surface of the cooling pipe 61 is detected by this sensor 70. That is, when the amount of solvent evaporation is large, the amount of heat exchange and liquefaction increases and the surface temperature rises. On the other hand, when the amount of solvent evaporation is not large, the amount of heat exchange and liquefaction is small. Since the surface temperature remains low without increasing, the evaporation amount of the solvent in the cooler 8 is detected based on the measured surface temperature and the change thereof. Further, the temperature of the Peltier element 64 is detected by a cooler heat radiation part temperature sensor 71 provided in the Peltier element 64 (see FIG. 11). The cooler heat radiating portion temperature sensor 71 functions as a sensor that can detect malfunctions and failures of the cooler 8 based on the detected temperature. Both the liquefaction part temperature sensor 70 and the cooler heat radiation part temperature sensor 71 are connected to the CPU 72 (see FIG. 11). The CPU 72 controls the temperature of the heater 7 via a heater temperature controller 73 and an SSR (solid state relay) 74 based on information detected by the sensors 70 and 71. That is, when the amount of evaporation of the solvent is too large, the temperature of the heater 7 is lowered to suppress the amount of evaporation, while when the amount of evaporation is small, the temperature of the heater 7 is increased as necessary to increase the amount of evaporation. As a result of temperature control in this way, the situation where the amount of solvent exceeding the condensing capacity of the cooler 8 evaporates in the cleaning apparatus 1 or the situation where only a very small amount evaporates compared to the condensing capacity is improved. By balancing the evaporation amount and the condensation amount, an appropriate amount of solvent can always be distilled and purified. Moreover, according to this, since the solvent of the quantity suitable for the cooling capacity of the cooler 8 can be refine | purified stably, it contributes also to the energy saving of the washing | cleaning apparatus 1 whole. Furthermore, even when the amount of solvent evaporation increases due to heat generated by the ultrasonic vibrator 21 or the outside air temperature, the cleaning apparatus 1 of this embodiment detects the amount of evaporation based on the surface temperature of the heater 7. In this case, the detection sensitivity is high, and the time until the response of stopping the heater 7 is short. Therefore, it is possible to prevent the solvent from flowing out.

  Furthermore, the other structure of the control apparatus 13 and its circuit structure are demonstrated below (refer FIG. 1, FIG. 11). The CPU 72 is connected to motor drivers 75 and 76 of the cleaning tank rotating motor 23 and the workpiece vertical motor 53, respectively. Further, the origin sensor 28a and the index sensor 28b constituting the rotation sensor 28, and the rising end sensor 52a, the intermediate position sensor 52b and the falling end sensor 52c constituting the vertical sensor 52 are connected to the CPU 72. The Peltier element 64 and the fan motor 66 are driven by a pulse width modulated signal. A temperature sensor 77 that detects the temperature of the liquid in the drain tank 17 and further prevents emptying in the tank is connected to the heater temperature controller 73 described above. The temperature sensor 77 and the ultrasonic oscillator 78 that oscillates ultrasonic waves to the ultrasonic transducer 21 are connected to the power supply device 79 and the CPU 72, respectively. In addition, a communication interface 80, a communication HMI (Human Machine Interface) 81, a display device 82 such as an LED or an LCD, and a nonvolatile memory 83 are connected to the CPU 72. The nonvolatile memory 83 stores an operation program, a temperature control value, and the like.

  Further, in this embodiment, a frame 84 is provided by combining a bracket-like frame or plate material, the cleaning device 1 is provided thereon, and the above-described various control devices are arranged in the frame 84 (FIG. 1). Specifically, a heater temperature controller 73, an ultrasonic oscillator 78, a switch box (reference numeral 85a is a switch) 85, and the like are arranged on the top or bottom of the base plate 84. The gantry 84 is provided with a detachable connector 86 for connecting various devices of the cleaning device 1. The connector 86 is attached / detached when the upper side of the cleaning device 1 is removed from the lower control device 13 or attached to the control device 13.

  Subsequently, a structure in which a part of the inside of the cleaning apparatus 1 is visible will be described below. In the cleaning device 1 of the present embodiment, a viewing window 69 is provided on the peripheral wall 67, and it is possible to check the inside of the device 1 through the viewing window 69. Thereby, in this washing | cleaning apparatus 1, an operator and an administrator hold | maintain the workpiece | work 2 in the predetermined position on the workpiece holder 46, and each tank 3-6 is rotating 90 degree | times at predetermined timing. In addition, it is possible to visually confirm the progress and progress of the cleaning work, such as the work 2 being immersed in each of the tanks 3 to 5 and the solvent circulation amount being within an appropriate range. Moreover, since the visual recognition window 69 is provided on the peripheral wall 67, it is easier to grasp the situation in the rotary cleaning tank or the like than when looking through the upper opening of the cooling pipe 61, for example. In the present embodiment, a glass plate is used as the visual recognition window 69, but an acrylic plate or the like can also be adopted.

  Further, in the cleaning device 1, at least one of the rotation driving device 10 and the lifting / lowering driving device 11 is disposed above the cleaning tanks 3 to 5, and the cleaning tanks 3 to 5 of the rotation driving device 10 and the lifting / lowering driving device 11 are arranged. The thing arrange | positioned above is removable with respect to the washing tanks 3-5. Hereinafter, the attachment / detachment structure of the cleaning apparatus 1 of the present embodiment that is detachable as described above will be described.

  In this embodiment, both the rotary drive device 10 and the lift drive device 11 are disposed above the cleaning tanks 3 to 5 (and the drying tank 6) (see FIG. 1). Here, “arranged upward” includes not only the case of being arranged right above the tank but also the case of being arranged at a position higher than the washing tanks 3 to 5. In this embodiment, the peripheral wall surrounding each of the tanks 3 to 6 and the drain tank 17 is separated into the upper peripheral wall 67 and the lower peripheral wall 87 described above, and the upper portion can be removed from the peripheral wall 67 for rotation. The drive device 10 and the lift drive device 11 can be attached to and detached from the cleaning tanks 3 to 5 (and the drying tank 6 and the drain tank 17) (see FIG. 2). Specifically, the peripheral wall 67 and the peripheral wall 87 have the same diameter, the upper edge of the drain tank 17 has a flange shape that can be sandwiched between the peripheral walls 67, 87, and a plurality of attachments / detachments provided around the peripheral walls. These peripheral walls 67 and 87 can be integrated using the member 88 (refer FIG. 15 etc.). The detachable member 88 is preferably one that can reliably integrate the peripheral walls 67 and 87 and can be easily attached and detached. In this embodiment, a buckle device with a spring as shown in the figure is used as the attaching / detaching member 88, but other devices such as a clasp (hasp), a latch lock, a hose band, etc. may be used. Furthermore, in addition to these mechanical devices, a magnet type that can be attached and detached using magnetic force may be used. As an example of the magnet type, a magnet 89 is provided opposite to the lower end of the shaft 14 (or 15) and the center of the rotating disk 30, and the upper and lower portions of the cleaning device 1 are connected by attracting the two magnets 89 to each other. What is integrated is mentioned (refer FIG. 25, FIG. 26).

  The cleaning solvent has a small surface area and tends to swell or deteriorate the rubber sealing material. In order to attach and detach the peripheral walls 67 and 87, it is necessary to have a sealing effect that prevents the solvent from leaking to the outside, and it is necessary to devise a sealing method. The sealing material is preferably an O-ring or rubber plate using a highly solvent-resistant fluorine rubber, EPDM or the like, a PTFE sealing material, or the like. In order to obtain a high sealing effect, it is preferable that the attachment / detachment position of the sealing material is the upper part so that the solvent is not directly applied. In addition, it is preferable that a shaping | molding surface like an O-ring exists in the whole surface periphery. In the case of an elastomer such as PTFE, it is preferable that the pores on the porous surface are closed by coating on the side in contact with the liquid.

  As described above, according to the cleaning device 1 in which the rotation driving device 10 and the elevation driving device 11 are detachable, there is an advantage that maintenance of each component is facilitated. That is, since the rotary drive device 10 or the lift drive device 11 can be subjected to maintenance work such as inspection / maintenance after being removed from the apparatus main body, disassembly and the like are easy to perform and the degree of freedom of work is high. Further, if the upper part is removed from the peripheral wall 67, the cleaning tanks 3 to 5, the drying tank 6, and the drain tank 17 can be easily cleaned or removed from the gantry 84. .

  The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention. For example, in this embodiment, both the rotary drive device 10 and the lift drive device 11 are arranged above the cleaning tanks 3 to 5 and the devices 10 and 11 are detachable from the cleaning tanks 3 to 5, so-called tank rotation type. Although the upper fishing type rotation transmission type cleaning apparatus 1 has been described, the present invention is not particularly limited to such a structure. At least one of the apparatuses 10 and 11 is disposed above the cleaning tanks 3 to 5 and the apparatus 10 If the (or the apparatus 11) has a structure that can be attached to and detached from the cleaning tanks 3 to 5, work such as maintenance can be facilitated. Below, only the raising / lowering drive device 11 is arrange | positioned above the washing tanks 3-5 (and drying tank 6), and the rotation drive apparatus 10 is the tank rotation type lower part rotation transmission arrange | positioned below the washing tanks 3-5 etc. The type cleaning device 1 will be described (see FIG. 27).

  The cleaning apparatus 1 shown in FIG. 27 rotates the cleaning tanks 3 to 5 by a cleaning tank rotating motor 23 disposed below the cleaning tanks 3 to 5. The rotating shaft 23 a of the cleaning tank rotating motor 23 rotates. It is placed vertically so as to coincide with the rotation center of the washing tank. Although not specifically shown in FIG. 27, the configuration of each device such as the lifting drive device 11, each of the tanks 3 to 6, the heater 7, the cooler 8, and the workpiece transfer device 9 is particularly different from that of the cleaning device 1 described above. Absent. In this cleaning device 1, since the upper side including the lifting drive device 11 can be removed, maintenance of each device including the lifting drive device 11 can be easily performed.

  Here, the configuration of each type of cleaning device 1 described above is schematically shown in FIGS. 28 and 29. Each of these cleaning apparatuses 1 moves the workpiece 2 up and down only on one vertical track and advances the cleaning process by sequentially rotating the rotary cleaning tank in accordance with the lifting operation. In order to sequentially immerse in the tanks 3 to 5 (and the drying tank 6), it is only necessary to relatively rotate one of the workpiece transfer device 9 and the cleaning tanks 3 to 5 (and the drying tank 6). Therefore, it is good also as a structure opposite to the washing | cleaning apparatus 1 of this embodiment, ie, the structure which rotates the work holder 46 etc. of the workpiece conveyance apparatus 9 instead, without rotating each tank 3-6. For example, the cleaning device 1 whose outline is shown in FIG. 30 sequentially advances the cleaning process of each workpiece 2 by rotating a single or a plurality of workpiece holders 46 in the workpiece transfer device 9 by a rotary motor 23 ′. As shown in the example, after all, automatic cleaning can be performed by relatively rotating any one of the workpiece transfer device 9 and the cleaning tanks 3 to 5 (and the drying tank 6). . In FIGS. 28 to 30, the cleaning tanks are indicated by reference numerals 3 and 4, but this is only for convenience and does not mean that other cleaning tanks or drying tanks are excluded.

  Subsequently, still another embodiment of the cleaning apparatus 1 will be described (see FIGS. 31 to 39). Although the cleaning apparatus 1 shown below is common in basic structure to the above-described cleaning apparatus, the tank (symbol 6) used as the drying tank in the above embodiment is not a drying tank but a part of the cleaning tank. One feature is the point of use. That is, a filter 95 is provided inside this tank adjacent to the final cleaning tank 5, and the solvent after distillation is first returned to this tank (hereinafter referred to as “filter tank” and denoted by reference numeral 6 ′) and filtered through the filter 95. To the final cleaning tank 5 to prevent particles from flowing into the final cleaning tank 5 so that the cleanliness in the tank can be maintained (see FIG. 33 and the like). In this case, the function of the vapor cleaning performed in the drying tank 6 can be replaced by, for example, increasing the stay time of the work 2 in the upper part of the tank.

  Needless to say, it is desirable that the filter 95 in the filter tank 6 ′ can effectively remove particles. For example, in the present embodiment, the filter 95 includes a glass tube 95a, a prefilter 95b, a filter body 95c, and a filter case 95d. (See FIGS. 32 and 33). The glass tube 95a is, for example, a cylinder about half the length of the filter body 95c, and guides the distillate (solvent) that has flowed into the filter tank 6 'to the prefilter 95b (see FIG. 33). The pre-filter 95b is a filter for roughly filtering the distillate primarily, and is provided at the lower part of the glass tube 95a as shown in the figure. The filter body 95c is used to remove the fine particles by secondarily filtering the distillate that has passed through the prefilter 95b. For example, in the case of this embodiment, a bottomed cylindrical filter is used. Although used, the shape and the like are not particularly limited, and this is only an example. The filter case 95d is a case in which the filter main body 95c, the prefilter 95b, and the glass tube 95a are built. Although not particularly shown, a plurality of small holes for allowing the filtered distilled liquid to pass therethrough are not shown. Is provided. Such a filter 95 is preferably a cartridge type in that it can be easily replaced even when the filter main body 95c and the like are soiled. In the present embodiment, the filter case 95d can be attached to and detached from the filter tank 6 'so that the filter 95 can be replaced (see FIG. 33). A filter lid 95 e is provided on the upper portion of the filter 95.

  The cleaning apparatus 1 is provided with a solvent receiving member 90 and a guide member 91 (see FIGS. 32 to 37). The solvent receiving member 90 is provided to prevent the solvent flowing into the final cleaning tank 5 from passing through the shafts 14 and 15 (more precisely, the surface of the shaft 14) from passing through the sliding portion 99 on the shafts 14 and 15. The other guide member 91 is a member provided to guide the solvent to the final cleaning tank 5. The sliding portion 99 here is a portion where the members rub against each other on the shafts 14 and 15. For example, in the cleaning device 1 described here, the connection between the shafts 14 and 15 and the rotating disc 30 is performed. Corresponds to (see FIG. 36). Specifically, the connecting portion includes a hook plate 101 provided in the middle of the shafts 14 and 15 and an engaged portion 102 provided on the center back side of the rotary disk 30 so that the hook plate 101 engages. The hooking plate 101 is a substantially triangular member having three hooking pins 101a arranged at intervals of 120 degrees (see FIG. 37). In contrast, the engaged portion 102 is provided with an engagement hole 102a corresponding to each hook pin 101a (see FIG. 36). The hook plate 101 is fixed in the middle of the solid shaft 15, and moves up and down or rotates together with the shaft 15. Further, a hook plate insertion hole 103 having a size and a shape through which the hook plate 101 can pass is provided in the center of the rotating disk 30 (see FIG. 34), and the shaft after the hook plate 101 is passed through the insert hole 103 is provided. The position of the hook pin 101a and the engagement hole 102a can be adjusted by rotating the pin 15 by a predetermined angle (for example, 30 degrees). In addition, it is also preferable to make it the shape which changes protrusion length only by one of the three protrusion parts of the hook plate 101. FIG. By matching the shape of the hook plate insertion hole 103 with this, the hook plate 101 cannot pass through the insert plate 103 unless the hook plate 101 is in a predetermined direction. This is because the guide member 91 always faces a certain direction when engaged.

  In this case, the shape and structure of the solvent receiving member 90 and the guide member 91 are not particularly limited. For example, in this embodiment, a bottomed cylindrical member is provided around the shafts 14 and 15 to form a cup. In addition to the solvent receiving member 90, an inclined guide member 91 extending in the radial direction from the solvent receiving member 90 is formed. The leading end of the guide member 91 is located in the upper part of the filter tank 6 'so that the solvent overflowing beyond a certain water level in the solvent receiving member 90 is guided to the filter 95 (see FIG. 33). According to the cleaning apparatus 1 of the present embodiment including the solvent receiving member 90 and the guide member 91 having such a structure, the solvent transmitted through the shafts 14 and 15 does not pass through the sliding portion 99 and the final cleaning tank 5 and the filter. Since the tank 6 'is guided, it is possible to effectively prevent particles adhering to the sliding portion 99 or generated in the sliding portion 99 itself from being mixed into the solvent.

  Moreover, the coupling | bond part of the shafts 14 and 15 connected to the rotation drive device 10 and the raising / lowering drive device 11 and rotating and raising / lowering and the washing tanks 3-5 is arrange | positioned below the opening edge of the washing tanks 3-5. (See FIGS. 31 and 32). In such a case, even if particles are generated at the joint between the shafts 14 and 15 and the cleaning tanks 3 to 5, the particles can be prevented from falling into the respective tanks from the openings of the cleaning tanks 3 to 5. Specifically, the connecting portion here is a portion where the shafts 14 and 15 and the rotating disk 30 are connected, that is, the joint block 36 in the above-described embodiment (see FIG. 31 and the like).

  Further, in this cleaning device 1, the rotational drive bearing portions 92 of the shafts 14 and 15 in the rotational drive device 10 are constituted by rolling bearings and are arranged on the upper part of the cooler 8 (see FIG. 31 and the like). Thus, when the rotational drive bearing part 92 is comprised with a rolling bearing, generation | occurrence | production of the particle at the time of shaft rotation can be suppressed compared with the case of a sliding bearing. Further, by concentrating the rotary drive bearing portion 92 in the upper part of the cleaning device 1 in this way, particles fall into the tank as compared with the case where the rotary drive bearing portion 92 is located in the vicinity of the cleaning tanks 3 to 5. Can be suppressed. Further, the lower portion of the rotary drive bearing portion 92 has a labyrinth structure 93 (see FIG. 31 and the like). The labyrinth structure 93 here is a structure in which particles passing therethrough are reduced by interposing grooves while keeping the members in a non-contact state, and the rotary drive bearing portion located at the upper part thereof Even if particles are generated at 92, it is possible to temporarily hold the particles as a tray for these particles.

  Further, a peripheral edge 94 protruding upward from at least the heat insulating material 63 provided around the cooler 8 is provided at the upper entrance 61 i of the work passage hole 61 a provided in the cooler 8 for allowing the work 2 to pass therethrough. (See FIGS. 31 and 39). Thereby, even if particles are generated from the heat insulating material 63 covering the periphery of the cooler 8, it is easy to prevent the particles from falling into the cleaning tanks 3 to 5 from the workpiece passage holes 61a. Accordingly, it is possible to effectively prevent the cleanliness of the solvent in the cleaning tanks 3 to 5 from being lowered while employing, for example, the same EPDM sponge material as the heat insulating material 63. Further, when the cleaning device 1 is not used, it is preferable to place a lid 96 on the upper portion of the peripheral edge 94 to prevent the particles from dropping and close the upper entrance 61i (see FIG. 39). The periphery of the peripheral edge 94 has a stepped shape, and an O-ring 97 that enhances the sealing performance between the lid 96 and the peripheral edge 94 is provided.

  Further, the cleaning device 1 is provided with cooling members 108 and 109, a heat insulating plate 110, a heat insulating separating plate 111, and a condensing amount promoting member 112 for promoting the condensing amount of the evaporated solvent (see FIG. 31). The condensation amount promoting member 112 is provided in a state separated from the cooling pipe 61, and allows heat in the cooling pipe 61 to be dissipated more efficiently into the atmosphere, thereby condensing the solvent in the cooling pipe 61. To promote. For example, the heat insulating separation plate 111 which is a copper plate receives heat from the condensation amount promoting member 112 and dissipates it to the atmosphere. By improving the amount of condensation and preventing condensation on the surface, the surface is used for preventing condensation. There is no need to provide a heat insulating sponge member. The heat insulating plate 110 is a heat insulating member between the cooling members 108 and 109 and the heat insulating separation plate 111.

  The cooler 8 of the cleaning device 1 is provided with a specimen extraction hole 98 (see FIG. 31 and the like). The sample take-out hole 98 is a hole for taking out a sample for checking whether or not particles are mixed in the solvent in the cleaning tanks 3 to 5, and if the sample take-out hole 98 is used, the recovery plate 62 and the heat insulating material 63 are used. The specimen (solvent) can be taken out without removing the sample. In order to take out the sample in the washing tanks 3 to 5, for example, a sample extraction tube may be inserted into the sample extraction hole 98, and a part of the solvent can be sucked out as a sample by this tube. The specimen taken out in this way is used as a sample for confirming how much particles are contained in the specimen, whereby the cleanliness in any of the washing tanks 3 to 5 is adjusted during use of the washing apparatus 1. It is possible to check the situation at Note that such a specimen extraction hole 98 can also be used as an injection hole when a new solvent is poured into the cleaning tanks 3 to 5. That is, when injecting a new solvent into the cleaning apparatus 1, whether it is a boiling cleaning tank 3, an ultrasonic rinsing tank 4, or a final cleaning tank 5 at random. In some cases, it is desirable that the cleanliness in the final cleaning tank 5 be as high as possible in view of the presence of a small amount of fine particles in the new solvent. Therefore, if the specimen extraction hole 98 is used as a solvent injection hole and a new solvent is poured into the boiling washing tank 3 or the filter tank 6 ′, the new solvent is poured directly into the final washing tank 5. In addition, it is possible to ensure the cleanliness in the final cleaning tank 5.

  Furthermore, in the cleaning apparatus 1 of the present embodiment, the cleanliness of the solvent in the cleaning tanks 3 to 5 is not lowered by adjusting the air direction of the cooling air. The cooling air here is air that is forced to circulate in order to carry the heat of the heat sink to the outside of the cleaning device 1 and cool the heat sink and the like. It is discharged from the portion (see thick arrows in FIGS. 31 and 32). In the present embodiment, in order to prevent the cooling air discharged from the cleaning apparatus 1 from flowing around the workpiece passage hole 61a and the vertical hole 61b and mixing excess particles into the solvent, the wind direction diverting plate is used. 100 controls the air direction of the cooling air. For example, as shown in FIG. 32, the airflow direction change plate 100 is a duct having a lower opening, and the airflow direction change plate 100 guides the discharged air downward. In addition, although the example which led the discharged | emitted air below is shown here, this is only an example, the point is that the discharged | emitted air is the direction of the opening part of the washing tanks 3-5, ie, a workpiece | work discharge port. Therefore, it is sufficient that the air flow is controlled not to go into the cleaning apparatus. Therefore, if this condition is satisfied, the air may be controlled not only downward but also behind or below the cleaning device 1.

  Although the function and the like are not particularly described in the present specification, the reference numeral 104 in the above-described cleaning device 1 is a cover, 105 is a coupler with a drain valve or drain plug, 106 is a heat insulating material cover, and 107 is a dust-absorbing joint. .

  Subsequently, in the following, other embodiments relating to the workpiece transfer device 9, the workpiece holder 46, the cleaning tanks 3 to 5 and the like will be described. First, another embodiment of the workpiece transfer device 9 will be described (see FIGS. 40 and 41). For example, two long holes 113 that are long in the vertical direction are formed in the bracket 55 ′ of the workpiece transfer device 9 in parallel. In addition, two support pins 114 having stoppers pass through these long holes 113 and support the bracket 55 'so as to be movable up and down while being fixed to the bridge 44 (see FIGS. 40 and 41). . The upper portion of the bracket 55 ′ is bent and becomes horizontal, and a compression spring (hereinafter referred to as an escape) is urged between the horizontal portion and the bridge 44 to push up the bracket 55 ′ and tension the timing belt 54. 115 (referred to as a spring) is arranged (see FIG. 40). Further, for example, two knobs 116 are provided on the upper part of the horizontal portion of the bracket 55 ′. The upper end of the timing belt 54 is connected to the lower part of the bracket 55 '. In the workpiece transfer device 9 having such a structure, when the bracket 55 ′ is pushed down against the escape spring 115, the timing belt 54 is loosened. For example, when adjusting the position where the work holder 46 is immersed in the cleaning tanks 3 to 5 or when it is desired to lower the work transfer device 9 in order to make the packing space at the time of transfer compact, the bridge 44 is moved in this state. It can be adjusted manually by moving it up and down. When the timing belt 54 is loosened by depressing the bracket 55 ′ in this way, the cleaning jig such as the work holder 46 and the steel wire 47 attached to the tip of the bridge 44 can be easily moved up and down. This mechanism has the merits that the position confirmation between the cleaning jig and each of the cleaning tanks 3 to 5 can be performed manually, and that the cleaning state can be confirmed without being driven manually. In addition, this structure preferably has a torque limiter function. While the bridge 44 is lowered by the workpiece vertical motor 53, if a catch occurs, the bracket 55 'is pulled by the workpiece vertical motor 53 and pushed down. In this case, the timing belt 54 is loosened for a moment and a step-out occurs between the workpiece up-and-down motor 53 and the timing belt 54, thereby reducing the driving force and ensuring safety.

  Subsequently, another form of the work holder (hereinafter, denoted by reference numeral 46 ′) will be described (see FIGS. 42 and 43). Here, U-shaped grooves 117 are formed at two locations on the upper and lower sides of the attachment member 48 ′. Further, a pressing pin 118 capable of moving up and down is provided on the upper portion of the attachment member 48 '. The pressing pin 118 is urged downward by a pressing spring 119 built in the upper portion of the attachment member 48 ′. On the other hand, on both sides of the work holder 46 ′, engagement pins 120 with which the U-shaped grooves 117 are engaged are provided. When the work holder 46 ′ having such a configuration is attached to the attachment member 48 ′, the engagement pins 120 engage with the U-shaped grooves 117, and in this state, the presser pins 118 face the upper part of the work holder 46 ′ downward. The work holder 46 ′ is prevented from unexpectedly coming off by being pressed down. Further, when the work holder 46 ′ thus engaged is removed from the attachment member 48 ′, the pressing pin 118 may be pulled up. As described above, according to the work holder 46 ′ and the attachment member 48 ′ shown in FIGS. 42 and 43, the work holder 46 ′ can be attached and detached very easily.

  Next, another embodiment of the detachable structure will be described (see FIGS. 44 to 47). The cleaning tanks 3 to 5 need to be detachable for cleaning or replacing the solution in the tank. In the present embodiment, the cleaning tank 3 of the rotary drive device 10 and the lift drive device 11 is required. The structure which can attach or detach the thing arrange | positioned above-5 with respect to the washing tanks 3-5 was employ | adopted. However, depending on the structure, a mechanism for attaching / detaching is provided in the vicinity of the cleaning tanks 3 to 5, and the attaching / detaching position may be difficult to understand. In view of such points, the embodiment shown in FIGS. 44 to 46 has the following structure. That is, first, the shaft 14 is fixed to the rotating disk 30, and a plurality of cleaning tanks 3 to 5 are fixed to the rotating disk 30 (see FIG. 44). Further, an attaching / detaching mechanism (indicated by reference numeral 121 in FIG. 44) constituted by the fixing screw 122, the upper cam member 123, the lower cam member 124, and the like is disposed above the pulley 26, the rotary drive bearing portion 92, and the like, for example. (See FIG. 44). For this reason, there exists an advantage that an attachment / detachment position becomes easy to understand. Moreover, in the case of such a structure, a solid shaft 14 can be adopted, and high strength can be ensured while suppressing costs. Further, since the operation can be performed while visually observing the attachment / detachment mechanism 121, the cleaning tanks 3 to 5 can be positioned reliably and easily.

Furthermore, in the embodiment shown in FIGS. 44 to 47, a mechanism for attaching the shaft 14 removed by the above-described attaching / detaching mechanism 121 in a state where there is no phase shift will be described. That is, here, both shoulders at the upper end of the shaft 14 are cut (shaved) to form a cross-section in a track shape (see FIG. 45). At this time, the cut position is offset and the width of one cut surface 14a is obtained. It is the L _a and the other shape having different width L _b of the cut surface 14b. Further, the track-shaped hole 123a of the upper cam member 123 into which the upper end portion is inserted and removed has the same shape (see FIG. 45). Therefore, when the upper end portion of the shaft 14 is attached to the upper cam member 123 of the attachment / detachment mechanism 121, it cannot be attached in a state where the phase is reversed by 180 degrees. When the upper end portion of the shaft 14 is inserted into the hole 123a of the upper cam member 123, these can be fixed by screwing the fixing screw 122 into the screw hole 14c at the upper end of the shaft (see FIG. 45). In this embodiment, a lower cam member 124 is interposed between the upper cam member 123 and the shaft 14 (see FIG. 45). The upper cam member 123 and the lower cam member 124 are provided with a recess so as to be substantially cylindrical when fitted. The upper cam member 123 is fixed to the shaft 14 and functions to transmit a motor driving force from the lower cam member 124 to the shaft 14. A pin 124a is provided in the concave portion of the lower cam member 124, and a pin hole 123b is provided in a portion corresponding to the pin 124a of the upper cam member 123. When the upper cam member 123 and the lower cam member 124 are fitted together, The state is not reversed 180 degrees (see FIG. 47).

  Next, another embodiment of the filter attaching / detaching structure will be described (see FIGS. 48 to 52). Here, when removing the filter 95 for cleaning or the like, the ease of use is improved by removing the drive unit and the like without separation. This will be specifically described. First, a rotating plate 125 capable of rotating (spinning) is provided on the rotating disk 30 (see FIGS. 48 and 49). An installation hole 125a for attaching the filter 95 is provided at a position offset from the rotation (spinning) center of the rotating plate 125 (see FIG. 50). Further, the front end portion of the guide member 91 ′ provided for guiding the solvent is shortened so that it does not get in the way when the filter 95 is taken out or attached. With the above-described configuration, when the filter 95 is taken out, the rotating plate 125 can be rotated 180 degrees (half rotation) so as to be retracted to a position where it does not interfere with the guide member 91 ′ (FIG. 48 to FIG. 48). (See FIG. 51). After moving the filter 95 in this way, if the pulling member 127 such as a wire is used and the handle 126 of the filter 95 is held and pulled up through the cooling pipe 61 and the recovery plate 62, the filter 95 is removed from the filter tank. 6 'and the rotating disk 30 can be taken out (see FIG. 52). On the other hand, when the filter 95 is mounted again, the reverse procedure may be performed. In addition, the code | symbol 30a is a recessed part provided in the rotation disc 30 so that the rotation plate 125 can enter. In order to rotate the rotating plate 125, for example, there is a method of inserting and turning the lifting member 127 into a rotation hole 125 b arranged on the rotating plate 125 in a circumferential manner. The vicinity of the upper end of the lifting member 127 is a portion for turning the rotation hole 125b, and the hook-shaped portion near the lower end of the lifting member 127 is a portion for hooking the handle 126 of the filter 95 (see FIG. 49).

  Further, since a mechanism for manually rotating the tanks 3 to 6 (the drying tank 6 or the filter tank 6 'and the cleaning tanks 3 to 5) is also employed, this will also be described (see FIG. 53). When the tanks 3 to 6 are manually rotated, it is difficult to obtain a sufficient moment by grasping and rotating the shaft 14 having a small diameter. Therefore, in this embodiment, the upper cam member 123 is used to rotate the shaft 14. That is, the upper cam member 123 shown in FIG. 45 is turned upside down so that it can be attached to the upper end portion of the shaft 14, and the upper cam member 123 functions as a rotary knob (FIG. 53). reference).

  Finally, other forms of the cleaning tanks 3 to 5 will be described (see FIGS. 54 to 59). Here, the size of the cleaning tanks 3 to 5 (including the filter tank 6 ′ and the drying tank 6 in some cases) is appropriately changed according to the size of the workpiece 2. For example, it is possible to form a plurality of washing tanks by providing a large washing tank in which the washing tanks 3 to 5 are connected and partitioning the middle with a partition 128 (see FIG. 54). In this case, although not particularly illustrated, the size of the inlet of the work 2 is also changed as appropriate. Or you may make it change a material suitably with the magnitude | size of a tank. For example, FIGS. 55 and 56 show a SUS-integrated tank including a first tank 3 ′, a second layer 4 ′, and a filter tank 6 ′. In the case of the SUS integrated structure, there is an advantage that almost no particles are generated because it is electrolytically polished. In the case of the SUS integrated structure, it is preferable that the bottom plate of each tank is a thin plate (for example, about 0.5 mm) from the viewpoint of improving the transmission of ultrasonic waves (see FIG. 56). Or it can also be set as a glass integrated structure, for example, as shown in FIG. 57, a tank is comprised by 1st layer 3 ', 2nd layer 4', main tank 5 ', and filter tank 6' from which shapes differ, respectively. You can also. When glass is used, there is an advantage that it is relatively inexpensive and has good ultrasonic transmission. Alternatively, as shown in FIG. 58, a cleaning tank or the like can be configured by combining a metal plate denoted by reference numeral 129 and a glass component denoted by reference numeral 130. In this case, if the convex part 131 is provided in the bottom face of the glass component 130 and the metal plate 129 is attached so as to be fitted using the convex part 131, there is an advantage that the alignment in the rotation direction becomes easy. (See FIG. 59).

It is a figure which shows one form of the washing | cleaning apparatus which concerns on this invention, and represents the whole apparatus based on an actual viewpoint. It is a longitudinal cross-sectional view which shows structures, such as a shaft of a washing | cleaning apparatus, and a rotary washing tank. It is a top view which shows the example of a shape of a rotation washing tank and the partition provided there. It is the schematic which expanded and represented the installation height of each washing tank and the drying tank which were installed in the circumferential shape so that a liquid level may become low gradually. It is a top view which shows the shape of a punching metal. It is a figure which expand | deploys and shows the shape of the engagement groove | channel provided in the crank member, and the motion of the drive pin in this engagement groove | channel. It is a perspective view which shows the shape of a joint block, and shapes, such as an engagement block of the lower end of the shaft provided so that engagement / disengagement to this joint block was possible. It is the schematic from the side part which shows the workpiece holding component which comprises a workpiece conveyance apparatus. It is the schematic explaining each stop position of the workpiece | work during washing | cleaning operation | movement. It is the schematic explaining the operation | movement order of the workpiece | work in washing | cleaning operation | movement. It is a figure which shows an example of the circuit structure of the control apparatus in a washing | cleaning apparatus. It is a fragmentary longitudinal cross-section which shows the structural example of the rotational drive apparatus in a washing | cleaning apparatus. It is a top view which shows the power transmission system from a washing tank rotation motor to a shaft. It is a top view of a rotation sensor dog and a rotation sensor. It is a top view which shows a rotary washing tank and the external shape of the circumference | surroundings. It is a longitudinal cross-sectional view in the XV-XV line | wire of FIG. It is a figure showing the drain tank liquid level tube seen from another angle. It is a front view which shows the outline of the structure of a part of workpiece conveyance apparatus and a raising / lowering drive device. It is the figure which showed the structure of the timing belt and the pulley etc. in the raising / lowering drive device which is shown in FIG. It is sectional drawing in the XIX-XIX line of the raising / lowering drive apparatus etc. which were shown in FIG. It is a rear view of the raising / lowering drive apparatus etc. which were shown in FIG. It is a bottom view of the raising / lowering drive apparatus etc. which were shown in FIG. It is a fragmentary figure which shows a workpiece | work discharge port lid and a positioning member. It is a top view of a washing | cleaning apparatus. It is a top view showing the rotary washing tank provided with the magnet in the center. It is a figure showing only the shaft provided with the magnet, and a rotation washing tank. It is a longitudinal cross-sectional view of the washing | cleaning apparatus of the tank rotation type lower part rotation transmission type in other embodiment of this invention. It is the schematic of the washing | cleaning apparatus of a tank rotation type upper fishing type rotation transmission type. It is the schematic of a washing device of a tank rotation type lower part rotation transmission type It is the schematic of the washing | cleaning apparatus of the tank fixed type top rotation transmission type which was made to rotate a workpiece conveyance apparatus, without rotating each tank. It is a longitudinal cross-sectional view from the front which shows one form of a washing | cleaning apparatus. It is a longitudinal cross-sectional view from the right side surface of the washing | cleaning apparatus shown in FIG. It is the schematic which expanded and showed on the plane the structure of a solvent receiving member, a guide member, a filter tank, and each washing tank about each tank. It is a top view showing a rotation disc and each tank. It is a top view which shows a solvent receiving member and a guide member. It is a longitudinal cross-sectional view which shows a solvent receiving member, a guide member, and the sliding part of these lower parts. It is a top view showing the hook plate of a sliding part. It is a top view of the washing | cleaning apparatus shown in FIG. It is the elements on larger scale centering on the upper side entrance and exit of the workpiece | work passage hole of the washing | cleaning apparatus shown in FIG. It is a side view which shows another forms, such as a bracket. It is front views, such as a bracket shown in FIG. It is a side view which shows another form of a work holder and an attachment member. 43 is a front view of the work holder and the attachment member shown in FIG. 42. FIG. It is a figure which shows another form of a washing tank and its attachment / detachment mechanism. It is a perspective view which shows the structure of a shaft upper end part and each cam member. It is a top view which shows the shape of a shaft upper end part. It is a side view which shows the state which fitted the upper and lower cam members. It is a figure which shows the structure of the filter which made it possible to invert and attach | detach easily, and its periphery. It is a figure which shows the state which reversed the filter shown in FIG. FIG. 49 is a plan view of the filter shown in FIG. 48. It is a top view of the filter shown in FIG. It is a figure which shows an example of the structure of a filter, a filter tank, and a rotation disc. It is a perspective view which shows a mode that an upper cam member is turned upside down and attached to the upper end part of a shaft. It is a top view which shows an example of the large sized washing tank which partitioned off the middle with the partition. It is a top view which shows an example of the tank of the SUS integral structure provided with the 1st tank, the 2nd layer, and the filter tank. It is a front view of the tank of the SUS integrated structure shown in FIG. It is a top view which shows an example of the tank made into the glass integrated structure. It is a front view which shows the washing tank etc. which combined the SUS board and the glass component. FIG. 59 is a bottom view of the cleaning tank shown in FIG. 58.

Explanation of symbols

1 Cleaning device 2 Work 3 Boiling distillation tank (cleaning tank)
4 Ultrasonic cleaning tank (cleaning tank)
5 Final cleaning tank (cleaning tank)
7 Heater 8 Cooler 9 Work transfer device 10 Rotation drive device 11 Lift drive device 12 Water separation mechanism 14 (Hollow) shaft 15 (Solid) shaft 36 Joint block (joint)
61 Cooling pipe 63 Heat insulating material 90 Solvent receiving member 91 Guide member 92 Rotary drive bearing portion 93 Labyrinth structure 94 Perimeter 95 Filter 98 Sample extraction hole 99 Sliding portion 112 Condensation amount promoting member

Claims (7)

  A cleaning tank for cleaning a workpiece, which is an object to be cleaned, using a solvent, a heater for heating and evaporating the solvent, a cooler for condensing and recovering the vapor of the evaporated solvent, and holding the workpiece In the cleaning apparatus, comprising: a work transfer device immersed in the cleaning tank; a rotation drive device that relatively rotates one of the work transfer device and the cleaning tank; and a lift drive device that moves the work transfer device up and down. At least one of the driving device and the lifting / lowering driving device is disposed above the cleaning tank, and the rotary driving device and the lifting / lowering driving device disposed above the cleaning tank are detachable from the cleaning tank. In addition, a coupling portion between the cleaning tank and the shaft connected to the rotation driving device and the lifting / lowering driving device and rotating and lifting is disposed below the opening edge of the cleaning tank. And a solvent receiving member that prevents the solvent flowing through the shaft from flowing into the cleaning tank from passing through a sliding portion where the members rub against each other on the shaft, and a guide member that guides the solvent to the cleaning tank. A cleaning device characterized by that.   2. The cleaning according to claim 1, wherein the rotary drive bearing portion of the shaft in the rotary drive device is constituted by a rolling bearing and is arranged at an upper portion of the cooler, and a lower portion of the rotary drive bearing portion has a labyrinth structure. apparatus.   The upper and lower entrances and exits of the workpiece passage hole provided in the cooler for allowing the workpiece to pass through are provided with at least a peripheral edge protruding upward from a heat insulating material provided around the cooler. The cleaning apparatus according to 1.   Among the rotation driving device and the lifting / lowering driving device, the one disposed above the washing tank is detachable from the washing tank, and a condensation amount promoting member for promoting the condensation amount of the evaporated solvent is provided. A cleaning device characterized by.   Of the rotation driving device and the lifting / lowering driving device, the one disposed above the cleaning tank is detachable from the cleaning tank, and the final cleaning tank is placed in front of the cleaning tank that performs final cleaning among the cleaning tanks. The cleaning apparatus according to claim 1, wherein a filter for removing particles of the solvent flowing in is provided, and a water separation mechanism for separating water floating on the solvent in the tank is provided in the final cleaning tank.   The cleaning apparatus according to claim 5, wherein the filter is a cartridge type. Of the rotation driving device and the lifting / lowering driving device, the one disposed above the cleaning tank is made detachable from the cleaning tank, and the cooler takes out a sample for particle confirmation from the solvent in the cleaning tank. 2. A cleaning apparatus according to claim 1, further comprising a sample take-out hole.

Images