JP2005221917A - Electromechanical type optical shutter element and optical shutter array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electromechanical type optical shutter element having large freedom in design and a simple structure, manufactured at a low cost, easily controlled and independent of wavelength. <P>SOLUTION: The electromechanical type optical switch element is composed by providing: a fixed electrode erected vertically on a transparent substrate; a movable electrode which is supported facing to the fixed electrode with a gap on the supporting substrate; and a light shielding film which shields light advancing vertically to the supporting substrate on the movable electrode. The electromechanical type optical switch element having a large stroke is obtained by using the two electromechanical type optical switches. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an electromechanical optical shutter element and an optical shutter array that transmit and block light by moving a movable thin film by an attractive force such as electrostatic force, electromagnetic force, and electrostriction.

In this field, as an optical switch for controlling light with an electromechanical optical shutter element, a diffraction grating light valve or the like in which a beam moves vertically on a silicon substrate has been known (for example, Patent Document 1 and 2).
Japanese National Patent Publication No. 10-510374 JP 11-258558 A

The light beam modulator described in Patent Document 1 includes the following a to d.
a. A plurality of elongate elements, each element having a first edge and a second edge and a light reflecting plane; and the elements are arranged in such a way that the first group of elements are interdigitated with the second group of elements. And the second group, and the elements are arranged in parallel to each other.
b. Means for suspending the elements of the first group and the second group at their edges; c. Means for applying a first bias voltage to the first group and the second group such that the reflective surface is substantially coplanar and in a first plane that reflects the incident light beam; Means for applying a second bias voltage;
d. Means for selectively deflecting the elements of the first group that are parallel to a first plane and perpendicular to the plane toward a second plane that diffracts the incident light beam;

  As described above, the diffraction grating light valve according to the invention described in Patent Document 1 modulates an incident light beam, and a plurality of elongated elements each have a reflective surface, and thus control of light transmission / blocking. There was a problem that could not be done.

  On the other hand, the light modulator described in Patent Document 2 has a one-dimensional or two-dimensional matrix-shaped light modulation unit that modulates light from a planar light source by an electromechanical operation on an ultraviolet planar light source. A fluorescent material excited by light emitted from the modulation section is disposed opposite to the light modulation section, and the light modulation section is a transparent signal electrode which is one electrode provided on the light guide plate, and the signal electrode A transparent flexible thin film facing each other with a gap in between, and a scanning electrode which is provided on the flexible thin film and is opposed to the signal electrode, and applying an electric field to the signal electrode and the scanning electrode. The flexible thin film is bent by the generated electrostatic force, and light emitted through the flexible thin film is modulated.

  The invention described in Patent Document 2 is of a transmissive type, has good light utilization efficiency, does not require high vacuum, can be increased in area at low cost, and can provide high image quality. However, since interference is used in transmissive light control, if there is distortion of the interference film, etc., it affects the ON / OFF of the optical switch. Since the interference film is used, there is a disadvantage that the structure becomes multi-layered, the structure is complicated, and the cost is high.

  The present invention solves these drawbacks, and is transmissive and has a high degree of design freedom, simple structure, low cost, easy control, and simply shuts down the light path, so it is wavelength dependent. An object of the present invention is to provide an electromechanical optical shutter element that does not have any.

  In order to solve the above-mentioned problems, the invention of the electromechanical optical shutter element according to claim 1 is characterized in that the fixing is erected perpendicularly to the support substrate on the support substrate having a function of being transparent or transmitting light. An electrode, a movable electrode or a movable film with an electrode (hereinafter referred to as a movable electrode) supported on the support substrate or the fixed electrode at a distance from the fixed electrode, and perpendicular to the support substrate A film having a function of blocking or reflecting light traveling in the direction (hereinafter referred to as a light shielding film) is provided on the movable electrode, and the movable electrode is displaced by a force acting between the fixed electrode and the movable electrode. The transmission / blocking of light is controlled by the light-blocking film.

  The invention of the electromechanical optical shutter element according to claim 2 is characterized in that a plurality of electromechanical optical shutter elements according to claim 1 are arranged with their light-shielding plates abutting each other when not operating.

  According to a third aspect of the present invention, there is provided an electromechanical optical shutter element comprising: a fixed electrode standing vertically to a support substrate having a transparent or light transmitting function; and the support substrate or the fixed substrate. A movable electrode supported in a state of being opposed to the fixed electrode at an interval on the electrode, and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the fixed electrode and the Two electromechanical optical shutter elements that control the transmission / blocking of light by the light shielding film by displacing the movable electrode with a force acting between the movable electrode and the light shielding plate in contact with each other when not operating. An electromechanical optical shutter element that is arranged in a concavo-convex shape that can be fitted into each other during operation on the opposing surfaces of the support member and the movable electrode provided on the fixed electrode side. Forming undulations It is characterized in.

  According to a fourth aspect of the present invention, there is provided an electromechanical optical shutter element comprising: a fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light transmitting function; and the support substrate or the fixed substrate. A movable electrode supported in a state of being opposed to the fixed electrode at an interval on the electrode, and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the fixed electrode and the Two electromechanical optical shutter elements that control the transmission / blocking of light by the light shielding film by displacing the movable electrode with a force acting between the movable electrode and the light shielding plate in contact with each other when not operating. An electromechanical optical shutter element arranged, characterized in that both end portions of the movable electrode and / or the vicinity of a contact portion of the support member supporting the movable electrode with the movable electrode are formed of a soft material. .

  According to a fifth aspect of the present invention, there is provided an electromechanical optical shutter element comprising: a fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light transmitting function; and the support substrate or the fixed substrate. A movable electrode supported in a state of being opposed to the fixed electrode at an interval on the electrode, and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the fixed electrode and the Two electromechanical optical shutter elements that control the transmission / blocking of light by the light shielding film by displacing the movable electrode with a force acting between the movable electrode and the light shielding plate in contact with each other when not operating. An electromechanical optical shutter element disposed, wherein the movable electrode is disposed opposite to the fixed electrode with a wide gap from the fixed electrode at one end and a narrow gap from the fixed electrode at the other end. Special To.

  According to a sixth aspect of the present invention, there is provided an electromechanical optical shutter element comprising: a cylindrical fixed electrode that is erected vertically on a support substrate having a transparent or light transmitting function; and the cylindrical shape. Two semi-cylindrical movable electrodes respectively supported on the support substrate so as to be concentrically arranged with the cylindrical fixed electrode when not operating in the fixed electrode, and light traveling in a direction perpendicular to the support substrate A light shielding film for blocking is provided on the semi-cylindrical movable electrode, and the semi-cylindrical movable electrode is displaced by a force acting between the cylindrical fixed electrode and the semi-cylindrical movable electrode, and light is transmitted by the light shielding film. It is characterized by controlling transmission / blocking.

  According to a seventh aspect of the present invention, there is provided an electromechanical optical shutter element comprising: a fixed electrode which is erected vertically on a support substrate having a transparent or light transmitting function; and the support substrate or the fixed substrate. Provided on the movable electrode is a movable electrode supported in a state of being opposed to the fixed electrode on the electrode, and a light-shielding film having a function of blocking light traveling in a direction perpendicular to the support substrate, Two electromechanical optical shutter elements that displace the movable electrode by a force acting between the fixed electrode and the movable electrode and control light transmission / blocking by the light shielding film, and the light shielding plates are stacked one above the other. The electro-mechanical optical shutter element is arranged in a state where a plurality of slits are provided in each of the light shielding plates, and the upper and lower slits are shifted from each other in a non-operating state to be in a light shielding state, and the upper and lower slits are overlapped during an operation. To.

  The invention according to claim 8 is the electromechanical optical shutter element according to any one of claims 2 to 7, wherein a gap formed between the two light-shielding films arranged in contact with each other is a wavelength of light to be used. 1/10 or less.

  The invention of an electromechanical optical shutter array according to claim 9 is characterized in that a plurality of electromechanical optical shutter elements according to any one of claims 1 to 8 are arranged in an array.

  According to a tenth aspect of the present invention, there is provided an optical shutter array according to the ninth aspect, and an array of a plurality of condensing lenses on the incident light side and / or the outgoing light side of the electromechanical optical shutter array. It is characterized by arranging in a shape.

According to the present invention, a transmission type optical shutter is obtained by adopting the configuration as described above, and since the electrodes are parallel plates, high-speed response is possible, and the stroke can be increased by juxtaposing two optical shutters. It has a feature that it can be doubled or the voltage can be lowered if the amount of displacement is the same.
Further, if four optical shutters are juxtaposed, light having an area twice that of two juxtaposed optical shutters can be controlled.
Also, compared to the reflective shutter described in Patent Document 1, the reflective shutter uses diffraction, so the size is determined by the light used and the diffraction angle, and there is a problem in design flexibility and definition. However, according to the present invention, the degree of freedom in design is greatly improved.
In addition, since the transmission type shutter described in Patent Document 2 uses a multilayer film, it is difficult to manufacture and it is difficult to control the shape because interference is used. Since it is off control, the control becomes simple.

  Hereinafter, embodiments of the present invention will be described based on Examples 1 to 6 with reference to the drawings.

1A and 1B are perspective views of an electromechanical optical shutter element according to Embodiment 1 of the present invention, in which FIG. 1A is before operation (when no voltage is applied), and FIG. 1B is after operation (when voltage is applied).
1A and 1B, reference numeral 11 denotes an electromechanical optical switch element according to the first embodiment, and reference numeral 10 denotes a support substrate. Here, the support substrate 10 uses a transparent body such as a glass substrate. However, even if it is not a transparent body, it does not matter as long as it has a function of transmitting light. For example, a plastic substrate, a resin substrate, or a silicon processed substrate that has been drilled so as to transmit light may be used.
The support substrate 10 is formed with a step 10a in which the front side edge and the back side edge of the support substrate are increased in the figure, and the middle part between both end edges is low (valley formation). Thus, the movable electrode described later can be easily displaced. A process such as valley formation and its material will be described later.

Reference numerals 12 and 13 denote rectangular fixed electrodes which are erected vertically on the support substrate 10.
The surface of the fixed electrodes 12 and 13 is coated with an electrode protective layer, but is not shown here for the sake of clarity.
Reference numerals 14 and 15 denote movable electrodes which are erected on the support substrate 10 in both supported states, and have a rectangular shape facing the rectangular fixed electrodes 12 and 13. The movable electrodes 14 and 15 may be supported on the fixed electrodes 12 and 13 side. The movable electrodes 14 and 15 are preferably electrodes that are flexible, elastic, and strong, but instead may be movable films in which foil-like electrodes are attached to the surface. (Hereafter, these are collectively referred to as a movable electrode)
Reference numerals 16 and 17 are support members interposed between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15, and are erected on the support substrate 10. This is made of, for example, SiN. The support members 16 and 17 may be supported by the fixed electrodes 12 and 13.
Reference numerals 18 and 19 denote light-shielding plates which are provided on the side surfaces of the movable electrodes 14 and 15 and have a light-shielding function for blocking the light L1 arriving here (by reflection or absorption). Here, a metal reflector is used. As the metal reflector, gold, silver, palladium, zinc, aluminum, or nickel can be used in addition to the metal plate.

  In the above example, the reflecting plates are used as 18 and 19, but an absorbing plate that absorbs light may be used instead of the reflecting plate. According to this, light modulation by light absorption and transmission is performed. In this case, the absorbing plate can be obtained by applying or transferring an organic film such as a carbon resin film.

Next, the operation of the electromechanical optical switch element 11 thus obtained will be described.
As shown in FIG. 1A, when no voltage is applied between the fixed electrodes 12, 13 and the movable electrodes 14, 15, no electrostatic force acts between the fixed electrodes 12, 13 and the movable electrodes 14, 15. Therefore, the movable electrodes 14 and 15 do not move, and the light shielding plates 18 and 19 erected on the movable electrodes 14 and 15 do not move. Therefore, even if the light L1 arriving perpendicularly to the support substrate 10 arrives at the light shielding plates 18 and 19, it is reflected by the light shielding plates 18 and 19 and returns to the original optical path.

  Next, as shown in FIG. 1B, when a voltage is applied between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15, static electricity is generated between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15. Power works and sucks each other. Accordingly, the movable electrodes 14 and 15 are bent in the direction of the fixed electrodes 12 and 13, and accordingly, the light shielding plates 18 and 19 erected on the movable electrodes 14 and 15 are also moved (displaced) in the direction of the fixed electrodes 12 and 13. To do. Accordingly, since the portion that was on the original light shielding plate is opened, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 18 and 19 without being reflected by the light shielding plates 18 and 19 (light L1). reference).

When the voltage between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15 is removed again, the electrostatic force does not work between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15. It returns to the state of FIG.
Since the return in this case is performed at both ends of the movable electrodes 14 and 15 that are both supported, the restoring force is larger than that of the electromechanical optical shutter that is cantilevered and is suitable for high-speed movement. Further, unlike the prior art document 2, since interference is not used, electromechanical optical switching with a simple configuration that does not depend on the wavelength of light can be performed, and since an electromechanical optical switch element is used instead of liquid crystal, the contrast ratio of light is increased. Becomes higher. In addition, since it has a simple configuration, it can be easily manufactured and integrated at a high density.

  The above shows an example in which two electromechanical optical switch elements (12, 14, 16, 18), (13, 15, 17, 19) and their light shielding plates 18 and 19 are arranged in abutment with each other when not in operation. However, if this is done, even if the movement (displacement) stroke of the movable electrode is small, double strokes can be obtained by the movement of the light shielding plates 18 and 19. Or if it is the same stroke, a low voltage will be attained.

  According to the present invention, a transmission type optical shutter is obtained by adopting the configuration as described above, and since the electrodes are parallel plates, high-speed response is possible, and the stroke can be increased by juxtaposing two optical shutters. It has a feature that it can be doubled or the voltage can be lowered if the amount of displacement is the same.

  Furthermore, four electromechanical optical switch elements are used, and the two light shielding plates are arranged side by side so that the light shielding plates are sandwiched between the two light shielding plates on the left and right. For example, it is possible to control light having an area twice as large as that of the two electromechanical optical switch elements arranged side by side.

  However, if light is condensed on the light shielding plate 18 or 19 of one electromechanical optical switch element using a condensing lens, on the contrary, even if one electromechanical optical switch element with a narrow stroke is used, no light is emitted. Can also be controlled.

Although the light shielding plates 18 and 19 are in contact with each other when not operating, it is not always necessary to make contact with each other. Even if there is a slight gap between the two, if the gap is less than 1/10 of the wavelength of the light used, the light may ooze out but cannot pass through. Is fine.
Of course, under conditions where it would be a problem if light oozes out, if the light-shielding plates are not on the same plane but are placed on separate upper and lower planes and their tips are slightly overlapped, Since there is no risk of oozing out, it is possible to do this.

2A and 2B are perspective views of an electromechanical optical shutter element according to a second embodiment of the present invention, in which FIG. 2A is before operation (when no voltage is applied), and FIG. 2B is after operation (when voltage is applied).
2A and 2B, 21 is an electromechanical optical switch element according to the second embodiment, 10 is the same support substrate as that of the first embodiment, and 22 and 23 are vertically installed on the support substrate 10. It is a rectangular fixed electrode.
Numerals 24 and 25 are movable electrodes erected on the support substrate 10 in both supported states, and have a rectangular shape facing the fixed electrodes 22 and 23 having a rectangular shape. Reference numerals 26 and 27 are support members interposed between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25, and are erected on the support substrate 10. Reference numerals 28 and 29 are light shielding plates provided on the side surfaces of the movable electrodes 24 and 25. The material of each member is the same as the corresponding member in the first embodiment.
According to this embodiment, the concave and convex shapes that can be fitted to each other during operation on the opposing surfaces of the support members 26 and 27 and the movable electrodes 24 and 25 provided on the fixed electrodes 22 and 23 side. This is characterized by the formation of undulations. That is, in FIG. 1A, the movable electrode 24 has a plurality of protrusions 24 a (five in the figure) formed on the opposite surface side of the support member 26, while the support member 26 has the opposite surface of the movable electrode 24. A plurality of protrusions 26a (five in the figure) are formed on the side, and each protrusion 24a, 26a faces a valley between the protrusions on the other side. Therefore, when a voltage is applied, the protrusion 24 a of the movable electrode 24 enters the valley of the support member 26 and the protrusion 26 a of the support member 26 enters the valley of the movable electrode 24 as shown in FIG.

Next, the operation of the electromechanical optical switch element 21 thus obtained will be described.
As shown in FIG. 2A, when no voltage is applied between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25, no electrostatic force acts between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25. Therefore, the movable electrodes 24 and 25 do not move, and the light shielding plates 28 and 29 erected on the movable electrodes 24 and 25 do not move. Therefore, even if the light L1 arriving perpendicularly to the support substrate 10 arrives at the light shielding plates 28 and 29, it is reflected by the light shielding plates 28 and 29 and returns to the original optical path.

  Next, when a voltage is applied between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25 as shown in FIG. The facing area between the electrodes is greatly increased, the electrostatic force can be increased, and the movable operation of the movable electrode becomes easy to move. Accordingly, a strong electrostatic force acts between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25, so that they are attracted to each other strongly. Accordingly, the movable electrodes 24 and 25 are bent at high speed in the direction of the fixed electrodes 22 and 23, and accordingly, the light shielding plates 28 and 29 erected on the movable electrodes 24 and 25 are also moved at high speed in the direction of the fixed electrodes 22 and 23. To do. Therefore, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 28 and 29 without being reflected by the light shielding plates 28 and 29 (see the light L1).

When the voltage between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25 is removed again, the electrostatic force does not work between the fixed electrodes 22 and 23 and the movable electrodes 24 and 25. The state returns to the state of FIG.
Since the return in this case is performed at both ends of the movable electrodes 24 and 25 of both supports, the restoring force is larger than that of the electromechanical optical shutter of the cantilever support, and it is suitable for high speed movement.

  According to the present embodiment, the area between the electrodes is increased by forming irregularities on the electrodes, so that a larger force can be generated between the electrodes, and the movable operation of the movable electrode can be performed by increasing the electrostatic force. Becomes easy to move.

3A and 3B are perspective views of an electromechanical optical shutter element according to Embodiment 3 of the present invention, in which FIG. 3A is before operation (when no voltage is applied), and FIG. 3B is after operation (when voltage is applied).
3A and 3B, 31 is an electromechanical optical switch element according to the third embodiment, 10 is the same support substrate as that of the first embodiment, 32 and 33 are fixed electrodes, and 34 and 35 are on the support substrate 10. The movable electrodes 36 and 37 are erected on both sides of the movable electrodes 34 and 35, the support members are interposed between the fixed electrodes 32 and 33 and the movable electrodes 34 and 35, and 38 and 39 are erected on the side surfaces of the movable electrodes 34 and 35. It is a shading plate. The material of each member is the same as the corresponding member in the first embodiment.
This embodiment is characterized in that a soft material such as an organic film, an organic material, or a resin is used for both end portions 34a, 35a of the movable electrodes 34, 35. As a result, the soft material portion can move with a slight electrostatic force, so that the movable operation of the movable electrode becomes easy to move.

Next, the operation of the electromechanical optical switch element 31 thus obtained will be briefly described.
As shown in FIG. 3A, when no voltage is applied between the fixed electrodes 32 and 33 and the movable electrodes 34 and 35, no electrostatic force acts between the fixed electrodes 32 and 33 and the movable electrodes 34 and 35. Therefore, the movable electrodes 34 and 35 do not move, and the light shielding plates 38 and 39 provided on the movable electrodes 34 and 35 do not move. Therefore, the light L1 arriving perpendicularly to the support substrate 10 is reflected by the light shielding plates 38 and 39 and returns to the original optical path.

  Next, as shown in FIG. 3B, when a voltage is applied between the fixed electrodes 32 and 33 and the movable electrodes 34 and 35, the soft material portion 34a of the movable electrodes 34 and 35 with a slight electrostatic force, Since the movable movement of the movable electrodes 34 and 35 is easy to move, the movable electrodes 34 and 35 are bent at high speed in the direction of the fixed electrodes 32 and 33, and accordingly the movable electrodes 34 and 35 are moved. The light-shielding plates 38 and 39 erected on the side also move at high speed in the direction of the fixed electrodes 32 and 33. Therefore, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 38 and 39 without being reflected by the light shielding plates 38 and 39 (see the light L1).

  According to the present embodiment, by using a soft material for both end portions 34a and 35a of the movable electrodes 34 and 35, the soft material portion can be moved with a slight electrostatic force. Operation becomes easy to move.

FIGS. 4A and 4B are perspective views of an electromechanical optical shutter element according to Example 4 of the present invention, where FIG. 4A is before operation (when no voltage is applied), and FIG. 4B is after operation (when voltage is applied).
4 (a) and 4 (b), 41 is an electromechanical optical switch element according to Example 4, 10 is a support substrate, 42 and 43 are fixed electrodes, 44 and 45 are movable electrodes, and 46 and 47 are fixed electrodes. Support members 48, 49 interposed between the movable electrodes 44, 45 and the movable electrodes 44, 45 are light shielding plates that stand on the side surfaces of the movable electrodes 44, 45. The material of each member is the same as the corresponding member in the first embodiment.
According to this embodiment, a soft material such as an organic film is used for the support portions 46a and 47a that are in contact with the movable electrodes 42 and 43 of the support members 46 and 47, respectively. The other portions 46b and 47b are made of the same material as the support members 16 and 17 described above.
As a result, the soft support portions 46a and 47a can be moved by a slight electrostatic force, so that the movable operation of the movable electrode can be easily performed.

Next, the operation of the electromechanical optical switch element 41 thus obtained will be briefly described.
As shown in FIG. 4A, when no voltage is applied between the fixed electrodes 42 and 43 and the movable electrodes 44 and 45, no electrostatic force acts between the fixed electrodes 42 and 43 and the movable electrodes 44 and 45. Therefore, the movable electrodes 44 and 45 do not move, and the light shielding plates 48 and 49 erected on the movable electrodes 44 and 45 also do not move. Accordingly, the light L1 arriving perpendicularly to the support substrate 10 is reflected by the light shielding plates 48 and 49 and returns to the original optical path.

  Next, as shown in FIG. 4B, when a voltage is applied between the fixed electrodes 42 and 43 and the movable electrodes 44 and 45, the soft material portions 46a of the support members 46 and 47 with a slight electrostatic force, 47a becomes movable, so that the movable operation of the movable electrodes 44 and 45 is easy to move, so that the movable electrodes 44 and 45 are bent at high speed in the direction of the fixed electrodes 42 and 43, and accordingly the movable electrodes 44 and 45 are moved. The light shielding plates 48 and 49 erected on the side also move at high speed in the direction of the fixed electrodes 42 and 43. Therefore, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 48 and 49 without being reflected by the light shielding plates 48 and 49 (see the light L1).

  According to the present embodiment, by using a soft material for both ends 64a and 47a of the support members 46 and 47, the soft material portion can be moved with a slight electrostatic force, and the movable electrode can be moved. Operation becomes easy to move.

  In addition, the Example which employ | adopted both Example 3 and Example 4 is also possible. That is, by using soft materials for both ends of the movable electrode and both ends of the support member, a synergistic effect appears and the movable operation of the movable electrode becomes even easier to move.

FIGS. 5A and 5B are perspective views of an electromechanical optical shutter element according to Example 5 of the present invention, where FIG. 5A is before operation (when no voltage is applied), and FIG. 5B is after operation (when voltage is applied).
5 (a) and 5 (b), 51 is an electromechanical optical switch element according to Example 5, 10 is a support substrate, 52 and 53 are fixed electrodes, 54 and 55 are movable electrodes, and 56 and 57 are fixed electrodes. 52, 53 and the movable electrodes 54, 55 are support members interposed between the long members 55b, 57b and the short members 56a, 57a standing at right angles thereto. The movable electrodes 54 and 55 are supported obliquely from the end of the short member 56a toward the end of the long member 55b (wedge type structure). 58 and 59 are light shielding plates provided upright on the side surfaces of the movable electrodes 54 and 55. The material of each member is the same as the corresponding member in the first embodiment.
According to this embodiment, the parallel plate structure electrode in Embodiment 1 is stopped to form a wedge structure, so that the movable electrodes 54 and 55 are spaced apart from the fixed electrodes 52 and 53 at one end, At the other end, it is arranged opposite to the fixed electrodes 52 and 53 with a small gap from the fixed electrodes 52 and 53. At the same time, the mounting positions of the light shielding plates 58 and 59 are also arranged at the same position as the maximum gap portion. ing. Since the electrostatic force works as the square of the distance, by doing this, the largest electrostatic force is generated in the part where the facing distance between both electrodes is the narrowest, and even between weak electrodes, even between weak electrodes The movement starts from the part where the facing distance is the narrowest. Therefore, it becomes easier to move than the parallel plate type structure even at the same voltage. Since the suction moves sequentially in the direction of wide intervals, the operation becomes easy to move.

Next, the operation of the electromechanical optical switch element 51 thus obtained will be briefly described.
As shown in FIG. 5A, when no voltage is applied between the fixed electrodes 52 and 53 and the movable electrodes 54 and 55, no electrostatic force acts between the fixed electrodes 52 and 53 and the movable electrodes 54 and 55. Therefore, the movable electrodes 54 and 55 do not move, and the light shielding plates 58 and 59 provided on the movable electrodes 54 and 55 do not move. Therefore, the light L1 arriving perpendicularly to the support substrate 10 is reflected by the light shielding plates 58 and 59 and returns to the original optical path.

  Next, as shown in FIG. 5B, when a voltage is applied between the fixed electrodes 52 and 53 and the movable electrodes 54 and 55, the facing distance between the electrodes is the narrowest even with a weak suction force. Since it starts to move from the part, it becomes easy to move the movable electrodes 54, 55. The movable electrodes 54, 55 bend at high speed in the direction of the fixed electrodes 52, 53, and accordingly, the light shielding plate 58 standing on the movable electrodes 54, 55. , 59 also move at high speed in the direction of the fixed electrodes 52, 53. Therefore, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 58 and 59 without being reflected by the light shielding plates 58 and 59 (see the light L1).

  According to the present embodiment, the movable electrodes 54 and 55 are arranged so as to be opposed to the fixed electrodes 52 and 53 at one end with a wide space from the fixed electrodes 52 and 53 and at the other end with a narrow space from the fixed electrodes 52 and 53. By doing so, the movable electrodes 54 and 55 can be moved easily because the opposing distance between the two electrodes starts to move from the narrowest even with a weak suction force, and the movable electrodes 54 and 55 are in the direction of the fixed electrodes 52 and 53. It can be bent at high speed.

  In the sixth embodiment, while the first to fifth embodiments are mainly the parallel plate type and its modification, in order to increase the electrostatic force, both electrodes are formed of a double cylindrical structure. The inner cylinder is composed of two half-cylinders, and each end is fixed to the support member.

6A and 6B are perspective views of an electromechanical optical shutter element according to Example 6 of the present invention, in which FIG. 6A is before operation (when no voltage is applied), and FIG. 6B is after operation (when voltage is applied).
6 (a) and 6 (b), 61 is an electromechanical optical switch element according to the sixth embodiment, 10 is a support substrate, 62 is a cylindrical fixed electrode erected vertically to the support substrate 10, and 64 and 65 are Two semi-cylindrical movable electrodes having both ends supported by the stepped portion 10a of the support substrate 10, 66 is a cylindrical support member interposed between the cylindrical fixed electrode 62 and the movable electrodes 64, 65. Support columns 66a and 66b are formed, and both end portions of the two semi-cylindrical movable electrodes 64 and 65 are fixed thereto. 68 and 69 are light shielding plates provided upright on the side surfaces of the movable electrodes 64 and 65. The material of each member is the same as the corresponding member in the first embodiment.

Next, the operation of the electromechanical optical switch element 61 thus obtained will be briefly described.
As shown in FIG. 6A, when no voltage is applied between the cylindrical fixed electrode 62 and the semi-cylindrical movable electrodes 64 and 65, it is between the cylindrical fixed electrode 62 and the semi-cylindrical movable electrodes 64 and 65. Since the electrostatic force does not work, the semi-cylindrical movable electrodes 64 and 65 do not move, and the light shielding plates 68 and 69 standing on the semi-cylindrical movable electrodes 64 and 65 do not move. Therefore, the light L1 arriving perpendicularly to the support substrate 10 is reflected by the light shielding plates 68 and 69 and returns to the original optical path.

  Next, as shown in FIG. 6B, when a voltage is applied between the cylindrical fixed electrode 62 and the semi-cylindrical movable electrodes 64 and 65, the semi-cylindrical movable electrode is generated by the suction force generated between the two electrodes. 64 and 65 are pulled outward and deformed into an elliptical cylindrical shape. Accordingly, the light shielding plates 68 and 69 erected on the semi-cylindrical movable electrodes 64 and 65 move in the direction of the cylindrical fixed electrode 62. Therefore, the light L1 arriving perpendicularly to the support substrate 10 passes between the light shielding plates 68 and 69 without being reflected by the light shielding plates 68 and 69 (see the light L1).

  According to the present embodiment, the cylindrical length of the cylindrical fixed electrode 62 and the semi-cylindrical movable electrodes 64 and 65 can increase the electrode length in a narrow space, so that the area is increased and the electrostatic force is increased. Compared with the first embodiment, if the space is the same, the suction force is increased and the speed can be increased. If the stroke is the same, the voltage can be reduced.

  In each of Examples 1 to 6, two light shielding plates (or reflecting plates) were brought into contact with each other (blocked) to block light and separated to allow light to pass. A number of slits (through holes) that are twice the width of the movable electrode in the direction perpendicular to the moving direction are provided in parallel at equal intervals of two times the stroke of the movable electrode on each light shielding plate, The light shielding plates are arranged so as to overlap each other. At that time, before the operation, the slits of the upper and lower light shielding plates are in a state where light is blocked by the non-slit portions of the other light shielding plate.

7A and 7B are perspective views of an electromechanical optical shutter element according to Example 7 of the present invention, in which FIG. 7A is before operation (when no voltage is applied), and FIG. 7B is after operation (when voltage is applied).
7A and 7B, 71 is an electromechanical optical switch element according to Example 7, 10 is a support substrate, 72 and 73 are fixed electrodes, 74 and 75 are movable electrodes, and 76 and 77 are support members. 78 and 79 are light shielding plates. The material of each member is the same as the corresponding member in the first embodiment.
According to this embodiment, each of the light shielding plates 78 and 79 has a large number of slits (through holes) 78a having a width twice the stroke of the movable electrodes 74 and 75 in a direction perpendicular to the moving direction of the light shielding plates 78 and 79. Each of the movable electrodes 74 and 75 is provided in parallel at an equal interval that is twice the width of the stroke. Then, the light shielding plates 78 and 79 are arranged on the top and bottom without being placed on the same plane. At this time, the slits 78a and 79a of the upper and lower light shielding plates 78 and 79 are in a state before operation (no voltage is applied). Light is blocked by the non-slit portion of the other light-shielding plate. After operation (voltage application), the upper light-shielding plate 78 moves by one stroke, and the lower light-shielding plate 79 also moves in a direction to separate one stroke. The relative movement of the slit is two strokes. Therefore, the upper and lower slots 78a and 79a are completely overlapped, and the maximum opening is opened.

Next, the operation of the electromechanical optical switch element 71 thus obtained will be briefly described.
As shown in FIG. 7A, when no voltage is applied between the fixed electrodes 72 and 73 and the movable electrodes 74 and 75, no electrostatic force acts between the fixed electrodes 72 and 73 and the movable electrodes 74 and 75. Therefore, the movable electrodes 74 and 75 do not move, and the light shielding plates 78 and 79 installed on the movable electrodes 74 and 75 do not move. Therefore, the light L1 arriving perpendicularly to the support substrate 10 is reflected by the light shielding plates 78 and 79 and returns to the original optical path.

  Next, as shown in FIG. 7B, when a voltage is applied between the fixed electrodes 72 and 73 and the movable electrodes 74 and 75, the movable electrodes 74 and 75 move in the direction of the fixed electrodes 72 and 73. Accordingly, the light shielding plates 78 and 79 erected on the movable electrodes 74 and 75 also move in the direction of the fixed electrodes 72 and 73. As a result, the upper slot 78a and the lower slot 79a are completely overlapped, the largest opening is opened, and the light L1 arriving perpendicularly to the support substrate 10 passes between the slits (see the light L1).

  According to the present embodiment, in the state after the operation, the slits of the upper and lower light shielding plates overlap each other, and light passes through each slit. Since a plurality of slits (six in the figure) are provided, a light amount that is six times the light amount corresponding to the stroke can pass. As described above, according to the seventh embodiment, a large amount of light can be transmitted with a small amount of displacement.

Here, taking the electromechanical optical switch element 11 according to the first embodiment of the present invention as an example, a manufacturing process thereof will be briefly described with reference to FIGS.
In addition, since the manufacturing process of Examples 2 to 7 is basically the same as that of Example 1, the description of the manufacturing process for these is omitted.
FIG. 8 is a perspective view showing the first half of the manufacturing process, and FIG. 9 is a perspective view showing the second half.
In the “substrate cleaning” process of (1) in FIG. 8, first, the glass substrate 10 formed of a rectangular parallelepiped flat plate is cleaned with an alkali and dried.
Next, in the “substrate patterning” process of (2), in order to form the step 10a at both ends of the glass substrate 10 of (1) (the end opposite to the front in the figure), first, a resist is formed. Then, the resist is patterned by a photolithography process. Next, a step is formed by dry etching using CF4 gas, and the remaining resist is stripped under wet or oxygen gas plasma. As a result, the glass substrate 10 with the step 10a shown in FIG. In the “sacrificial layer deposition” process of (3), a stepped recess portion of the stepped glass substrate 10 is formed with polyimide, baked, the surface is polished (for example, by CMP polishing method), and the surface is stepped. The surface is the same as the part 10a. Here, the sacrificial layer is a layer that is not removed after the process in order to finally form a void.

(4) is the process of forming the electrodes vertically, and the electrodes are formed by electrolytic plating. First, in the “metal film vacuum film formation and patterning” process, an electrode pattern is patterned on a base through which electricity passes. For this purpose, first, metal (Au, Ni, Al, etc., Au is used here) is vacuum-deposited by photolithography, and photolithography etching and resist stripping are used for future fixed electrodes 12, 13 and a movable electrode. Leave only 14,15. As a result, Au remains only on the electrodes 12, 13, 14, and 15.
In the “insulating film formation and patterning” process (5), a SiNx film is formed by plasma CVD, and a vertical gap is formed in the insulating layer only at the electrode portion by photolithography and dry etching (CF4).

In the “electrode deposition” process (6), electrodes are grown on the electrodes 12, 13, 14, and 15 by plating (electrolytic plating such as Ni) to reach the top.
In the “insulating film patterning” process (7), an insulating film is formed between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15. Therefore, the insulating layers (SiN, which becomes a supporting member) 16 and 17 are left by photolithography and dry etching (CF4).
In the “sacrificial layer deposition” process of (8), the surface is exposed again by polyimide deposition, baking, and polishing (CMP).
The light shielding plate is formed from the “light shielding or reflective layer film formation and patterning” process of (9). First, a light shielding plate is attached to the entire surface by vacuum film formation (aluminum: sputtering), and patterned by photolithography. Only the light shielding plates 18 and 19 remain.
It is completed by the “sacrificial layer removal” process of (10). That is, as shown in FIG. 9, the electrodes and the light shielding plate are made of metal, the insulating film 17 is made of SiN (inorganic material), and the others are made of polyimide (organic material). ), All the organic matter (polyimide) is removed, so that the metal electrodes 12 to 15, the light shielding plates 18 and 19, and the inorganic insulating films (SiN) 17 and 18 remain, thereby completing the product.
It should be noted that the wiring is most easily incorporated during the process (1) or the process (4), and it is preferable to do so. .

  In the above-described embodiments, an example in which both electrodes are attracted by electrostatic force is shown. However, the present invention is not limited to electrostatic force. Electromagnetic force by a coil and a magnetic material, and piezoelectric element are used. Since the portion corresponding to the movable electrode can be moved even by electrostrictive force, an electromechanical optical shutter element that controls transmission / blocking of light can be obtained by moving the light shielding film by these suction forces.

A plurality of electromechanical optical shutter elements according to any of the first to seventh embodiments are arranged one-dimensionally or two-dimensionally, and a condensing lens (microlens) is arranged on each incident light side and each outgoing light side. Thus, an efficient small optical shutter array can be obtained.
FIG. 10 is a cross-sectional view showing such an optical shutter array, where (a) shows no voltage applied and (b) shows a voltage applied. In the figure, 11 and 11 'are two electromechanical optical shutter elements according to the first embodiment, 81 is an optical shutter array, 82 is an incident side microlens array, and 83 is an output side microlens array.
Hereinafter, the electromechanical optical shutter element 11 among the two electromechanical optical shutter elements will be described.
As shown in FIG. 10A, when no voltage is applied between the fixed electrodes 12 and 13 and the movable electrodes 14 and 15, the movable electrodes 14 and 15 do not move, and the light shielding provided on the movable electrodes 14 and 15. The plates 18, 19 remain closed. Therefore, even if the parallel light L1 collected by the microlens array 82 reaches the light shielding plates 18 and 19, it is reflected by the light shielding plates 18 and 19 and returns to the original optical path.

Next, as shown in FIG. 10B, when a voltage is applied between the fixed electrodes 12, 13 and the movable electrodes 14, 15, the fixed electrode 12, the movable electrode 14, the fixed electrode 13, and the movable electrode 15 During this period, electrostatic forces act and attract each other. Therefore, the movable electrode 14 bends in the direction of the fixed electrode 12 and the movable electrode 15 bends in the direction of the fixed electrode 13, and accordingly, the light shielding plates 18 and 19 move away from each other. Since the light is released, the light L1 that has arrived passes between the light shielding plates 18 and 19 and reaches the emission-side microlens array 83, where it is converted back into parallel light and exits from the emission-side microlens array 83.
Thus, the light L1 incident in parallel on the entire surface of the microlens array 82 as the optical path narrowing means is narrowed down on the light shielding plates 18 and 19 by the convex lens portion to become a thin beam and reflected by the light shielding plates 18 and 19. Since the light passes through the open portions of the light shielding plates 18 and 19 (when no voltage is applied), the light utilization efficiency is improved.

As described above, according to the present invention, since a transmissive optical shutter can be obtained, the degree of freedom in design is increased, the structure is simple, the cost is low, the control is simple, and the light path is simply shut down. Therefore, an electromechanical optical shutter element having no wavelength dependency can be obtained. In addition, since the electrodes are parallel plates, high-speed response is possible, and by arranging two optical shutters in parallel, the stroke can be doubled, or the voltage can be lowered if the displacement is the same. .
Further, if four optical shutters are juxtaposed, light having an area twice that of two juxtaposed optical shutters can be controlled.
Further, by combining such an optical shutter and a microlens array, an optical shutter array with good light utilization efficiency can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an electromechanical optical shutter element according to Embodiment 1 of the present invention, where (a) is before operation (when no voltage is applied), and (b) is after operation (when voltage is applied). It is a perspective view of the electromechanical optical shutter element which concerns on Example 2 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is a perspective view of the electromechanical optical shutter element which concerns on Example 3 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is a perspective view of the electromechanical optical shutter element which concerns on Example 4 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is a perspective view of the electromechanical optical shutter element which concerns on Example 5 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is a perspective view of the electromechanical optical shutter element which concerns on Example 6 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is a perspective view of the electromechanical optical shutter element which concerns on Example 7 of this invention, (a) is before operation | movement (at the time of no voltage application), (b) is after operation | movement (at the time of voltage application). It is the first half part of explanatory drawing of the manufacturing process of the electromechanical optical switch element which concerns on Example 1 of this invention. It is the second half part of explanatory drawing of the manufacturing process of the electromechanical optical switch element which concerns on Example 1 of this invention. 2A and 2B are cross-sectional views showing an optical shutter array using an electromechanical optical switch element according to Embodiment 1 of the present invention, in which FIG.

Explanation of symbols

11 Electromechanical optical switch element 21 according to Example 1 Electromechanical optical switch element 31 according to Example 2 Electromechanical optical switch element 41 according to Example 3 Electromechanical optical switch element 51 according to Example 4 Electromechanical optical switch element 61 according to Example 5 Electromechanical optical switch element 71 according to Example 6 Electromechanical optical switch element 10 according to Example 7 Support substrate 10a Steps 12, 13, 22, 23, 32, 33 , 42, 43, 52, 53, 62, 72, 73 Fixed electrodes 14, 15, 24, 25, 34, 35, 44, 45, 54, 55, 64, 65, 74, 75 Movable electrodes 16, 17, 26 27, 36, 37, 46, 47, 56, 57, 66, 76, 77 Support member 18, 19, 28, 29, 38, 39, 48, 49, 58, 59, 68, 69, 78, 79 Optical Plate 81 Optical Shutter Array 82 According to Example 8 Incident Side Microlens Array 83 Output Side Microlens Array L1 Light

Claims (10)

  A fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light-transmitting function, and being placed opposite to the fixed electrode on the support substrate or the fixed electrode. A supported movable electrode or a movable film with an electrode (hereinafter referred to as a movable electrode) and a film having a function of blocking or reflecting light traveling in a direction perpendicular to the support substrate (hereinafter referred to as a light shielding film) An electromechanical optical shutter provided on the movable electrode, wherein the movable electrode is displaced by a force acting between the fixed electrode and the movable electrode, and light transmission / blocking is controlled by the light shielding film. element.   2. An electromechanical optical shutter element according to claim 1, wherein a plurality of electromechanical optical shutter elements according to claim 1 are arranged with their light-shielding plates abutting each other when not operating. A fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light-transmitting function, and being placed opposite to the fixed electrode on the support substrate or the fixed electrode. A movable electrode that is supported and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the movable electrode is displaced by a force acting between the fixed electrode and the movable electrode. Two electromechanical optical shutter elements that control transmission / blocking of light by the light shielding film, and arranged in a state where the light shielding plates are in contact with each other when not operating,
An electro-mechanical type characterized in that a concavo-convex undulation that can be fitted to each other during operation is formed on the opposing surface side of the support member provided on the fixed electrode side and the movable electrode. Optical shutter element. A fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light-transmitting function, and being placed opposite to the fixed electrode on the support substrate or the fixed electrode. A movable electrode that is supported and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the movable electrode is displaced by a force acting between the fixed electrode and the movable electrode. Two electromechanical optical shutter elements that control transmission / blocking of light by the light shielding film, and arranged in a state where the light shielding plates are in contact with each other when not operating,
An electromechanical optical shutter element, characterized in that both ends of the movable electrode and / or the vicinity of a contact portion of the support member supporting the movable electrode with the movable electrode are formed of a soft material.   A fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light-transmitting function, and being placed opposite to the fixed electrode on the support substrate or the fixed electrode. A movable electrode that is supported and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the movable electrode is displaced by a force acting between the fixed electrode and the movable electrode. An electromechanical optical shutter element in which two electromechanical optical shutter elements that control transmission / blocking of light by the light shielding film are disposed in a state where the light shielding plates are in contact with each other when not operating, the movable electrode The electromechanical optical shutter element has a wide interval with the fixed electrode at one end and a small interval with the fixed electrode at the other end.   A cylindrical fixed electrode standing perpendicular to the support substrate on a transparent or light-transmitting support substrate, and concentrically arranged with the cylindrical fixed electrode when not operating in the cylindrical fixed electrode Two semi-cylindrical movable electrodes each supported on the support substrate, and a light-shielding film that blocks light traveling in a direction perpendicular to the support substrate is provided on the semi-cylindrical movable electrode, Electromechanical light characterized in that the semi-cylindrical movable electrode is displaced by a force acting between a cylindrical fixed electrode and the semi-cylindrical movable electrode, and transmission / blocking of light is controlled by the light shielding film. Shutter element.   A fixed electrode standing vertically to the support substrate on a support substrate having a transparent or light-transmitting function, and being placed opposite to the fixed electrode on the support substrate or the fixed electrode. A movable electrode supported and a light shielding film having a function of blocking light traveling in a direction perpendicular to the support substrate are provided on the movable electrode, and the force acting between the fixed electrode and the movable electrode Two electromechanical optical shutter elements that displace the movable electrode and control transmission / blocking of light by the light shielding film, and are arranged in a state where the light shielding plates are vertically stacked, An electromechanical optical shutter element, wherein a plurality of slits are provided in each of the light shielding plates, and the upper and lower slits are shifted from each other when not in operation to be in a light shielding state, and the upper and lower slits overlap during operation.   The electromechanical light according to any one of claims 2 to 7, wherein a gap formed between the two light-shielding films arranged in contact with each other is 1/10 or less of a wavelength of light to be used. Shutter element.   An electromechanical optical shutter array comprising a plurality of electromechanical optical shutter elements according to claim 1 arranged in an array.   10. An electromechanical optical shutter array according to claim 9, and an optical shutter array comprising a plurality of condensing lenses arranged in an array on the incident light side and / or the outgoing light side of the electromechanical optical shutter array. .

Images