JP2005175640A - Solid state imaging device - Google Patents

Solid state imaging device Download PDF

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JP2005175640A
JP2005175640A JP2003409665A JP2003409665A JP2005175640A JP 2005175640 A JP2005175640 A JP 2005175640A JP 2003409665 A JP2003409665 A JP 2003409665A JP 2003409665 A JP2003409665 A JP 2003409665A JP 2005175640 A JP2005175640 A JP 2005175640A
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imaging device
solid
state imaging
elastic support
holder
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Etsuyasu Kondo
悦康 近藤
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Olympus Corp
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Olympus Corp
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<P>PROBLEM TO BE SOLVED: To provide a solid state imaging device capable of reducing the number of components and the cost. <P>SOLUTION: On the inside of a base 9 constituting a fixing part, a square frame-like holder 2 having an upper end being fixed with a solid state image sensor 1 is arranged. On the inside of the holder 2, its central resilient supporting part fixing end 2a, resilient supporting parts 2b and 2c having one end being coupled therewith and extended in the X direction, and resilient supporting parts 2d and 2e having one ends being coupled with the other ends of the resilient supporting parts 2b and 2c and extended in the Y direction and the other ends being coupled with the inner surface of the holder 2 are formed by integral molding. Lower end of the resilient supporting part fixing end 2a is fixed to the fitting hole 9e of the base 9 thus realizing a structure for driving the movable part electromagnetically while reducing the number of components and the cost. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、固体撮像素子を用いて光情報記録媒体に情報を記録/再生する光情報記録/再生装置において、固体撮像素子を搭載した可動部を駆動する固体撮像装置及び固体撮像装置を駆動する方法に関する。   The present invention relates to an optical information recording / reproducing apparatus that records / reproduces information on / from an optical information recording medium using a solid-state imaging device, and drives a solid-state imaging device and a solid-state imaging device that drive a movable part on which the solid-state imaging device is mounted. Regarding the method.

近年、固体撮像素子は、映像機器の他に光情報記録再生装置など、広範囲の電子機器に搭載されるようになった。例えば、特開平7−46613号公報には、3板式TVカメラや電子スチルカメラ等の電子映像機器に用いられる固体撮像装置が開示されている。
撮影レンズからの光を色に分解し、各色成分毎に固体撮像素子に結像させるようにした場合、良好な色再現を得るために、各色成分の撮像を行う3つの固体撮像素子の画素を正確に合わせるレジストレーション調整機構が必要になる。
この従来例では、撮像素子の裏面又は周辺部に微小駆動手段を設け、位置合わせした状態で固定する構造を開示している。
特開平7−46613号公報
In recent years, solid-state imaging devices have been mounted on a wide range of electronic devices such as optical information recording / reproducing devices in addition to video devices. For example, Japanese Patent Laid-Open No. 7-46613 discloses a solid-state imaging device used for electronic video equipment such as a three-plate TV camera and an electronic still camera.
When the light from the photographic lens is separated into colors and imaged on the solid-state image sensor for each color component, the pixels of the three solid-state image sensors that image each color component are obtained in order to obtain good color reproduction. A registration adjustment mechanism for accurately matching is required.
In this conventional example, a structure is disclosed in which minute driving means is provided on the back surface or the peripheral portion of the imaging device and fixed in an aligned state.
Japanese Patent Laid-Open No. 7-46613

上記従来例においては、位置合わせのための微小駆動手段であるが、部品点数が多くなり、従ってコストがかさむ欠点がある。   In the above-mentioned conventional example, although it is a micro drive means for alignment, there is a disadvantage that the number of parts is increased and therefore the cost is increased.

(発明の目的)
本発明は上述した点に鑑みてなされたもので、部品点数を削減でき、低コスト化することができる固体撮像装置を提供することを目的とする。
(Object of invention)
The present invention has been made in view of the above-described points, and an object of the present invention is to provide a solid-state imaging device capable of reducing the number of parts and reducing the cost.

本発明は、光学系を介して得られる光学像を撮像する固体撮像素子と、前記固体撮像素子を保持する保持部材と、前記保持部材を駆動させる前記保持部材に固定された駆動コイルと、前記駆動コイルに作用し磁束を発生する磁性部材と、一端を前記保持部材に他端を固定部材に固定することにより前記固体撮像素子を前記固定部材に対して変位可能に支持する支持部材とを有する固体撮像装置において、
前記支持部材は、前記固体撮像素子を少なくとも2軸方向に変位可能なように複数の弾性支持部を有し、これら弾性支持部材が一体に形成され、前記固体撮像素子の撮像面の裏面に配置され、前記駆動コイルと前記磁性部材との電磁気作用により、前記固体撮像素子を移動させることを特徴とする。
The present invention includes a solid-state imaging device that captures an optical image obtained through an optical system, a holding member that holds the solid-state imaging device, a drive coil that is fixed to the holding member that drives the holding member, A magnetic member that acts on the drive coil to generate a magnetic flux; and a support member that supports the solid-state imaging device to be displaceable with respect to the fixed member by fixing one end to the holding member and the other end to the fixed member. In a solid-state imaging device,
The support member has a plurality of elastic support portions so that the solid-state imaging device can be displaced in at least two axial directions, and these elastic support members are integrally formed and arranged on the back surface of the imaging surface of the solid-state imaging device. The solid-state imaging device is moved by an electromagnetic action between the drive coil and the magnetic member.

本発明によれば、部品点数を削減でき、低コスト化することができる。   According to the present invention, the number of parts can be reduced and the cost can be reduced.

発明の実施の形態BEST MODE FOR CARRYING OUT THE INVENTION

以下、図面を参照して本発明の実施例を説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1から図6は、本発明の実施例1に係り、図1は本発明の実施例1の固体撮像装置を斜視図で示し、図2は実施例1の固体撮像装置を平面図で示し、図3は実施例1の固体撮像装置を分解した斜視図で示し、図4から図6は固体撮像装置をX方向、Y方向及びθ方向にそれぞれ駆動する場合の作用説明図を示す。
図1〜図3に示すように、本実施例の固体撮像装置10は、撮像を行う固体撮像素子1と、この固体撮像素子1を上面に取り付けて保持するホルダ2と、このホルダ2の側面に取り付けられる4個のコイル3〜6とにより構成される可動部と、この可動部の周囲に配置され、8個のマグネット7a〜7d,8a〜8dと、これらマグネット7a〜7d、8a〜8dが固定されると共に、可動部を移動可能に保持するベース9とにより構成される固定部とを有している。
1 to 6 relate to a first embodiment of the present invention, FIG. 1 shows a solid-state imaging device according to the first embodiment of the present invention in a perspective view, and FIG. 2 shows a solid-state imaging device according to the first embodiment in a plan view. FIG. 3 is an exploded perspective view of the solid-state imaging device according to the first embodiment, and FIGS. 4 to 6 are explanatory diagrams of operations when the solid-state imaging device is driven in the X direction, the Y direction, and the θ direction, respectively.
As shown in FIGS. 1 to 3, the solid-state imaging device 10 of the present embodiment includes a solid-state imaging device 1 that performs imaging, a holder 2 that holds the solid-state imaging device 1 attached to an upper surface, and a side surface of the holder 2. A movable part composed of four coils 3 to 6 attached to the magnet, and around the movable part, there are eight magnets 7a to 7d and 8a to 8d, and these magnets 7a to 7d and 8a to 8d. And a fixed part constituted by a base 9 that movably holds the movable part.

固体撮像素子1は、CCDやCMOS等の受像素子等により構成され、その中央部には、撮像面1aが設けられ、この撮像面1aには被写体像が図示しない光学系を介して結像される。
この固体撮像素子1は、その裏面が、固体撮像素子1の保持部材となるホルダ2の上端面2gに接着固定される。
ホルダ2は、四角形の枠形状であり、このホルダ2の外側のそれぞれ対向する4側面における各々のほぼ中央には4個のコイル3〜6が接着固定されている。
また、このホルダ2の内部には、可動部を変位可能に支持するための弾性支持部固定端2a、弾性支持部2b、2c及び弾性支持部2d、2eが設けてある。
この弾性支持部固定端2aは、ホルダ2の中央に配置され、高さ方向(Z方向)に円柱状に配置される。この弾性支持部固定端2aに一端が結合し、撮像面1aに平行な図示のX方向に弾性支持部2b、2cが延在されている。
The solid-state imaging device 1 is composed of an image receiving device such as a CCD or CMOS, and an imaging surface 1a is provided at the center thereof, and a subject image is formed on the imaging surface 1a via an optical system (not shown). Is done.
The back surface of the solid-state imaging device 1 is bonded and fixed to the upper end surface 2 g of the holder 2 that is a holding member of the solid-state imaging device 1.
The holder 2 has a quadrangular frame shape, and four coils 3 to 6 are bonded and fixed at substantially the center of each of the four opposing side surfaces on the outside of the holder 2.
The holder 2 is provided with an elastic support portion fixed end 2a, elastic support portions 2b and 2c, and elastic support portions 2d and 2e for supporting the movable portion in a displaceable manner.
This elastic support part fixed end 2a is arrange | positioned in the center of the holder 2, and is arrange | positioned in a column shape in the height direction (Z direction). One end is coupled to the elastic support portion fixed end 2a, and elastic support portions 2b and 2c extend in the X direction shown in the drawing parallel to the imaging surface 1a.

弾性支持部2b、2cの他端は、弾性支持部2b、2cと直交するY方向に延在する弾性支持部2d、2eの一端とそれぞれ結合されている。
それぞれ撮像面1aに平行でX方向と直交するY方向に延在する弾性支持部2d、2eの他端は、ホルダ2の内側の側面に結合されている。
弾性支持部2b、2cは、撮像面1aの法線方向であるZ方向の寸法が、Y方向の寸法に比べて大きく、弾性支持部2d、2eでも、Z方向の寸法が、X方向の寸法に比べて大きくなるように設定され、Z方向の例えば振動や衝撃などの外乱に対して変位しにくい構造となっている。
弾性支持部固定端2aの根元に形成された嵌合用の凸部2fは、ベース9の嵌合孔9eに嵌合され、接着固定される。以上の構成により、固体撮像素子1が固着されたホルダ2は、弾性支持部2b、2c、2d、2e、及び弾性支持部固定端2a、嵌合用の凸部2fを介して、ベース9に固定されることになる。
The other ends of the elastic support portions 2b and 2c are respectively coupled to one ends of elastic support portions 2d and 2e extending in the Y direction orthogonal to the elastic support portions 2b and 2c.
The other ends of the elastic support portions 2 d and 2 e that are parallel to the imaging surface 1 a and extend in the Y direction perpendicular to the X direction are coupled to the inner side surface of the holder 2.
The elastic support portions 2b and 2c have a dimension in the Z direction, which is the normal direction of the imaging surface 1a, larger than the dimension in the Y direction, and the elastic support portions 2d and 2e also have a Z direction dimension in the X direction. It is set so as to be larger than the above, and has a structure that is difficult to be displaced by disturbances such as vibrations and shocks in the Z direction.
The protrusion 2f for fitting formed at the base of the elastic support portion fixing end 2a is fitted into the fitting hole 9e of the base 9 and is fixed by adhesion. With the above configuration, the holder 2 to which the solid-state imaging device 1 is fixed is fixed to the base 9 via the elastic support portions 2b, 2c, 2d, and 2e, the elastic support portion fixing end 2a, and the fitting convex portion 2f. Will be.

ここで、ホルダ2と、弾性支持部2b、2c、2d、2e、弾性支持部固定端2a、嵌合用凸部2fは樹脂の一体成形で形成される。これにより、部品点数が削減され、安価に本固体撮像装置10を提供することができるようにしている。
固定部であるベース9は、磁性を有する金属板のプレス加工などで形成され、4箇所の立ち上げ部9a〜9dと、中央部に嵌合孔9eを有する。4箇所の立ち上げ部9a〜9dの内側側面には、8個のマグネット7a〜7d、8a〜8dが固定される。
1箇所の立上げ部につき2個のマグネット7i,8i(i=a〜d)が配置され、図2に示すように2個のマグネット7i,8iの極性は反転した状態で、隣接に配置される。これにより、例えばマグネット7aと8aにより発生する磁束の向きは矢印11となり、マグネット7bと7bにより発生する磁束の向きは矢印12、マグネット7cと8cにより発生する磁束の向きは矢印13となり、マグネット7dと8dにより発生する磁束の向きは矢印14となる。
Here, the holder 2, the elastic support portions 2b, 2c, 2d, and 2e, the elastic support portion fixed end 2a, and the fitting convex portion 2f are formed by integral molding of resin. Thereby, the number of parts is reduced, and the solid-state imaging device 10 can be provided at low cost.
The base 9 that is a fixed portion is formed by pressing a metal plate having magnetism, and has four raised portions 9a to 9d and a fitting hole 9e at the center. Eight magnets 7a to 7d and 8a to 8d are fixed to the inner side surfaces of the four rising portions 9a to 9d.
Two magnets 7i, 8i (i = a to d) are arranged for one rising portion, and the two magnets 7i, 8i are arranged adjacent to each other with their polarities reversed as shown in FIG. The Thus, for example, the direction of the magnetic flux generated by the magnets 7a and 8a is an arrow 11, the direction of the magnetic flux generated by the magnets 7b and 7b is an arrow 12, the direction of the magnetic flux generated by the magnets 7c and 8c is an arrow 13, and the magnet 7d And the direction of the magnetic flux generated by 8d is an arrow 14.

本実施例の固体撮像装置10の組立は、ホルダ2に4個のコイル3〜6を接着固定した後に、固体撮像素子1をホルダ2に接着固定し、可動部のサブアセンブリとする。一方、ベース9に8個のマグネット7a〜7d、8a〜8dを固定し、固定部のサブアセンブリとする。その後、可動部のサブアセンブリと固定部のサブアセンブリは、ホルダ2の嵌合用凸部2fとベース9の嵌合孔9eとに嵌合され、接着固定し、完成となる。
次に、本実施例の固体撮像装置10における駆動動作について図2に基づき説明する。本実施例の固体撮像装置10は、X方向、Y方向、Z方向周りのθ方向(光軸回転方向)の3軸駆動である。
前述したように、ベース9と8個のマグネット7a〜7d、8a〜8dによって発生する磁束の向きは矢印11〜14であり、4個のコイル3〜6は、それぞれ独立に給電できる配線となっており、4個のコイル3〜6の電流の向きを変えることで、所望の方向に駆動できることになる。
In the assembly of the solid-state imaging device 10 of the present embodiment, after the four coils 3 to 6 are bonded and fixed to the holder 2, the solid-state imaging device 1 is bonded and fixed to the holder 2 to form a sub-assembly of the movable part. On the other hand, eight magnets 7a to 7d and 8a to 8d are fixed to the base 9 to form a sub-assembly of the fixing portion. Thereafter, the sub-assembly of the movable part and the sub-assembly of the fixed part are fitted into the fitting convex part 2f of the holder 2 and the fitting hole 9e of the base 9, and are adhesively fixed to complete.
Next, the driving operation in the solid-state imaging device 10 of the present embodiment will be described with reference to FIG. The solid-state imaging device 10 according to the present embodiment is triaxially driven in the θ direction (optical axis rotation direction) around the X direction, the Y direction, and the Z direction.
As described above, the directions of the magnetic flux generated by the base 9 and the eight magnets 7a to 7d and 8a to 8d are the arrows 11 to 14, and the four coils 3 to 6 are wires that can supply power independently. By changing the directions of the currents of the four coils 3 to 6, it can be driven in a desired direction.

まず、固体撮像素子1をX方向に駆動させる場合は、コイル4の左右の辺における電流の向きを4a(−Z方向)、4b(+Z方向)の向きに、コイル6の左右の辺における電流の向きを6a(−Z方向)、6b(+Z方向)の向きになるように給電することで、コイル4,6にはそれぞれ駆動力16、18が発生し、+X方向に固体撮像素子1が駆動される。
固体撮像素子1をY方向に駆動させる場合は、コイル3の上下の辺における電流の向き3a(−Z方向)、3b(+Z方向)の向きに、コイル5の上下の辺における電流の向きを5a(−Z方向)、5b(+Z方向)の向きになるように給電することで、コイル3、5にはそれぞれ駆動力15、17が発生し、+Y方向に固体撮像素子1が駆動される。
First, when the solid-state imaging device 1 is driven in the X direction, the current direction in the left and right sides of the coil 4 is set to 4a (−Z direction) and 4b (+ Z direction), and the current in the left and right sides of the coil 6 is changed. Is fed to the direction of 6a (−Z direction) and 6b (+ Z direction), driving forces 16 and 18 are generated in the coils 4 and 6, respectively, and the solid-state imaging device 1 is moved in the + X direction. Driven.
When the solid-state imaging device 1 is driven in the Y direction, the current direction in the upper and lower sides of the coil 5 is set to the current direction 3a (−Z direction) and 3b (+ Z direction) in the upper and lower sides of the coil 3. By supplying power in the directions 5a (−Z direction) and 5b (+ Z direction), driving forces 15 and 17 are generated in the coils 3 and 5, respectively, and the solid-state imaging device 1 is driven in the + Y direction. .

固体撮像素子1をθ方向に駆動させる場合は、駆動力15と17、または駆動力16と18のバランスが変わるようにか、向きが逆方向にするように、コイル3〜6の給電を変えることにより、θ方向に固体撮像素子1が駆動する。また、コイル3〜6の電流の向きを変更することで、X方向、Y方向、θ方向の反転動作は可能となる。
次に、固体撮像素子1を駆動した際の弾性支持部2b、2c、2d、2eの変形を説明する。
固体撮像素子1をX方向に駆動した場合を図4、Y方向に駆動した場合を図5、θ方向に駆動した場合を図6に示す。
When the solid-state imaging device 1 is driven in the θ direction, the feeding of the coils 3 to 6 is changed so that the balance between the driving forces 15 and 17 or the driving forces 16 and 18 is changed or the direction is reversed. As a result, the solid-state imaging device 1 is driven in the θ direction. Further, by changing the direction of the current of the coils 3 to 6, the reversing operation in the X direction, the Y direction, and the θ direction can be performed.
Next, deformation of the elastic support portions 2b, 2c, 2d, and 2e when the solid-state imaging device 1 is driven will be described.
FIG. 4 shows a case where the solid-state imaging device 1 is driven in the X direction, FIG. 5 shows a case where it is driven in the Y direction, and FIG. 6 shows a case where it is driven in the θ direction.

図4の場合には、+X方向の駆動力16,18を発生させるようにしている。また、図5の場合には、+Y方向の駆動力15,17を発生させるようにしている。また、図6の場合には、Z軸の反時計回り方向の向きとなる駆動力15、駆動力16と逆向きの駆動力20、駆動力17と逆向きの駆動力21,駆動力18を発生させるようにしている。
各々の図で、点線は弾性支持部2b、2c、2d、2eの中立状態を示し、実線は弾性支持部2b、2c、2d、2eの変形を示す。これら図4〜図6をから分かるように、固体撮像素子1がX方向、Y方向、θ方向に変位可能なように、弾性支持部2b、2c、2d、2eにより弾性支持されている。
In the case of FIG. 4, the driving forces 16 and 18 in the + X direction are generated. In the case of FIG. 5, the driving forces 15 and 17 in the + Y direction are generated. In the case of FIG. 6, the driving force 15 in the counterclockwise direction of the Z axis, the driving force 20 in the opposite direction to the driving force 16, the driving force 21 in the opposite direction to the driving force 17, and the driving force 18 are obtained. It is trying to generate.
In each figure, the dotted line indicates the neutral state of the elastic support portions 2b, 2c, 2d, and 2e, and the solid line indicates the deformation of the elastic support portions 2b, 2c, 2d, and 2e. As can be seen from FIGS. 4 to 6, the solid-state imaging device 1 is elastically supported by elastic support portions 2b, 2c, 2d, and 2e so as to be displaceable in the X direction, the Y direction, and the θ direction.

本実施例の固体撮像装置10或いはこの固体撮像装置10により構成される固体撮像素子支持装置によると、以下の効果を得ることができる。
固体撮像素子1を変位可能に保持する保持部材としてのホルダ2と、このホルダ2を変位可能に支持する支持部材としての弾性支持部固定端2a、弾性支持部2b〜2eを簡単な形状にすると共に、樹脂による一体成形で形成しているので、低コストによりこの固体撮像装置10を提供できる。
また、この固体撮像装置10によれば、直交する2軸の方向に変位可能に支持することができると共に、これら2軸に垂直な軸の回りにも駆動することができ、広い用途に低コストで適用することができる。
また、固体撮像装置10における光学素子としての固体撮像素子1を支持する固体撮像素子支持装置を低コストで提供することもできる。
According to the solid-state imaging device 10 of the present embodiment or the solid-state imaging device support device configured by the solid-state imaging device 10, the following effects can be obtained.
The holder 2 as a holding member that holds the solid-state imaging device 1 so as to be displaceable, and the elastic support portion fixed end 2a and the elastic support portions 2b to 2e as support members that support the holder 2 so as to be displaceable are made simple shapes. At the same time, since it is formed by integral molding with resin, the solid-state imaging device 10 can be provided at low cost.
Further, according to the solid-state imaging device 10, it can be supported so as to be displaceable in the directions of two orthogonal axes, and can also be driven around an axis perpendicular to these two axes. Can be applied.
Moreover, the solid-state image sensor supporting apparatus which supports the solid-state image sensor 1 as an optical element in the solid-state image sensor 10 can also be provided at low cost.

次に、本発明の実施例2を図7及び図8を参照して説明する。図7は、実施例2における可動部31の構造を斜視図で示し、図8は可動部31の構造を平面図で示す。
本実施例の固体撮像装置は、実施例1におけるベース9側で構成される固定部と、図7図に示す可動部31とから構成される。但し、ベース9における可動部31の後述する弾性支持部固定部材38を嵌合固定する嵌合孔の形状を正方形にしている。
この可動部31は、撮像を行う固体撮像素子1と、この固体撮像素子1を上面に取り付けて保持する第1ホルダ32及びこの第1ホルダ32の底面側に積層される第2ホルダ33と、この第1ホルダ32及び第2ホルダ33の側面に取り付けられる4個のコイル3〜6とにより構成される。
第1ホルダ32及び第2ホルダ33は、樹脂等により成形された同じ構造のものを重ねて一体化される。
Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 7 is a perspective view showing the structure of the movable part 31 in the second embodiment, and FIG. 8 is a plan view showing the structure of the movable part 31.
The solid-state imaging device according to the present embodiment includes a fixed portion configured on the base 9 side in Embodiment 1 and a movable portion 31 illustrated in FIG. However, the shape of the fitting hole for fitting and fixing an elastic support portion fixing member 38 (described later) of the movable portion 31 in the base 9 is a square.
The movable portion 31 includes a solid-state imaging device 1 that performs imaging, a first holder 32 that holds the solid-state imaging device 1 attached to the upper surface, a second holder 33 that is stacked on the bottom surface side of the first holder 32, The four coils 3 to 6 are attached to the side surfaces of the first holder 32 and the second holder 33.
The first holder 32 and the second holder 33 are integrated by overlapping the same structure formed of resin or the like.

また、第1ホルダ32及び第2ホルダ33の内部には、中央部に四角の枠体状の弾性支持部固定部材37、38が配置されている。
弾性支持部固定部材37には、その一端が結合されてX方向に延在するように、導電性を有する金属板等からなる弾性支持部39a、39bと40a、40bとが設けられている。
また、弾性支持部39a、39bと40a、40bの各々の他端には、X方向と直交するY方向に延在される弾性支持部39c、39d、40c、40dの一端が結合され、各弾性支持部39c、39d、40c、40dの他端は、ホルダ32の内面に結合されている。
Further, inside the first holder 32 and the second holder 33, square frame-shaped elastic support portion fixing members 37 and 38 are arranged at the center.
The elastic support portion fixing member 37 is provided with elastic support portions 39a, 39b and 40a, 40b made of a conductive metal plate or the like so that one end thereof is coupled and extends in the X direction.
Also, one end of each of the elastic support portions 39c, 39d, 40c, 40d extending in the Y direction orthogonal to the X direction is coupled to the other end of each of the elastic support portions 39a, 39b and 40a, 40b. The other ends of the support portions 39c, 39d, 40c, and 40d are coupled to the inner surface of the holder 32.

上記弾性支持部39a及び39cと、弾性支持部39b及び39dとは、弾性支持部固定部材37の中心Oを通るYZ平面に関してミラー対称となるように形成されている。 また、上記弾性支持部40a及び40cと、弾性支持部40b及び40dとは、弾性支持部固定部材37の中心Oを通るYZ平面に関してミラー対称となるように形成されている。
また、上記弾性支持部39a及び39cと、弾性支持部40a及び40cとは、弾性支持部固定部材37の中心Oを通るXZ平面に関してミラー対称となるように形成されている。
The elastic support portions 39 a and 39 c and the elastic support portions 39 b and 39 d are formed so as to be mirror symmetric with respect to the YZ plane passing through the center O of the elastic support portion fixing member 37. The elastic support portions 40 a and 40 c and the elastic support portions 40 b and 40 d are formed so as to be mirror symmetric with respect to the YZ plane passing through the center O of the elastic support portion fixing member 37.
The elastic support portions 39 a and 39 c and the elastic support portions 40 a and 40 c are formed so as to be mirror-symmetric with respect to the XZ plane passing through the center O of the elastic support portion fixing member 37.

また、上記弾性支持部39b及び39dと、弾性支持部40b及び40dとは、弾性支持部固定部材37の中心Oを通るXZ平面に関してミラー対称となるように形成されている。
上記ホルダ32の内面に結合される弾性支持部39c、39d、40c、40dの端部には、接続端子39e、39f、40e、40fが設けられている。そして、例えば接続端子39e、39fは、コイル4の両端と接続され、また接続端子40e、40fは、コイル6の両端と接続される。
また、接続端子39eは、導電性を有する金属板からなる弾性支持部39c、39aを介して弾性支持部固定部材37の給電端子39gと導通し、接続端子39fは、導電性を有する金属板からなる弾性支持部39d、39bを介して弾性支持部固定部材37の給電端子39hと導通する。
The elastic support portions 39b and 39d and the elastic support portions 40b and 40d are formed so as to be mirror-symmetric with respect to the XZ plane passing through the center O of the elastic support portion fixing member 37.
Connection terminals 39e, 39f, 40e, and 40f are provided at the ends of the elastic support portions 39c, 39d, 40c, and 40d that are coupled to the inner surface of the holder 32. For example, the connection terminals 39 e and 39 f are connected to both ends of the coil 4, and the connection terminals 40 e and 40 f are connected to both ends of the coil 6.
The connection terminal 39e is electrically connected to the power supply terminal 39g of the elastic support portion fixing member 37 through elastic support portions 39c and 39a made of a conductive metal plate, and the connection terminal 39f is made of a conductive metal plate. The power supply terminal 39h of the elastic support portion fixing member 37 is electrically connected through the elastic support portions 39d and 39b.

同様に、接続端子40eは、導電性を有する金属板からなる弾性支持部40c、40aを介して弾性支持部固定部材37の給電端子40gと導通し、接続端子40fは、導電性を有する金属板からなる弾性支持部40d、40bを介して弾性支持部固定部材37の給電端子40hと導通する。
また、ホルダ32の下側に設けられたホルダ33側においても、弾性支持部固定部材37に一端が結合して設けられた弾性支持部39a〜39d、40a〜40dと同様に、弾性支持部固定部材38に一端が結合して弾性支持部41a〜41d、42a〜42dが設けられている。
また、弾性支持部41c、41d、42c、42dの端部には、接続端子41e、41f、42e、42fが設けてあり、それぞれ弾性支持部固定部材38の給電端子41g、41h、42g、42hと導通する。
Similarly, the connection terminal 40e is electrically connected to the power supply terminal 40g of the elastic support portion fixing member 37 via elastic support portions 40c and 40a made of a conductive metal plate, and the connection terminal 40f is a conductive metal plate. The elastic support portions 40d and 40b are electrically connected to the power supply terminal 40h of the elastic support portion fixing member 37.
Also, on the holder 33 side provided below the holder 32, the elastic support portion fixing is performed in the same manner as the elastic support portions 39a to 39d and 40a to 40d provided with one end coupled to the elastic support portion fixing member 37. One end is coupled to the member 38, and elastic support portions 41a to 41d and 42a to 42d are provided.
Further, connection terminals 41e, 41f, 42e, and 42f are provided at end portions of the elastic support portions 41c, 41d, 42c, and 42d, and power supply terminals 41g, 41h, 42g, and 42h of the elastic support portion fixing member 38 are provided. Conduct.

上記第1ホルダ32及び第2ホルダ33は、同じ構造のものを積み重ねるように固定することができ、また第1ホルダ32及び第2ホルダ33内部に設けた支持部材としての弾性支持部39a〜39d、40a〜40d、接続端子39e,39f、40e、40f等をエッチングや金属板の打ち抜き加工等で簡単に形成できるようにしている。
なお、弾性支持部固定部材38の下端は、この弾性支持部固定部材38の下端の形状に合わせて嵌合するベース9の嵌合孔に嵌入されて接着等により固定される。
また、コイル3〜6の両端を上記接続端子39e,39f、40e、40f等に接続することにより、弾性支持部固定部材37の給電端子39g、39h、40g、40h等から給電して駆動することができ、安定した駆動特性を実現できる。
なお、本実施例における可動部31は、実施例1と同様に直交する2軸方向と、この2軸に直交する軸の回りに駆動することができる。
The first holder 32 and the second holder 33 can be fixed so as to be stacked with the same structure, and elastic support portions 39a to 39d as support members provided inside the first holder 32 and the second holder 33. , 40a to 40d, connection terminals 39e, 39f, 40e, and 40f can be easily formed by etching or punching a metal plate.
Note that the lower end of the elastic support portion fixing member 38 is fitted into a fitting hole of the base 9 that fits in accordance with the shape of the lower end of the elastic support portion fixing member 38 and fixed by adhesion or the like.
In addition, by connecting both ends of the coils 3 to 6 to the connection terminals 39e, 39f, 40e, 40f, etc., power is supplied from the power supply terminals 39g, 39h, 40g, 40h, etc. of the elastic support portion fixing member 37 and driven. And stable drive characteristics can be realized.
In addition, the movable part 31 in a present Example can be driven to the 2 axis direction orthogonal to Example 1, and the periphery of the axis | shaft orthogonal to these 2 axes.

本実施例によれば、実施例1よりも高い対称性構造により可動部31(ホルダ32,33)を変位可能に支持する支持構造を実現しているので、より高精度に2軸方向や2軸の回りでの駆動ができる。
また、支持部材を金属を用いて形成することにより、樹脂を用いて形成した場合よりも例えば高さ方向等の寸法を小さくでき、より小型化した固体撮像装置を実現することが可能となる。
なお、上述の説明では、可動部側にコイル3〜6を取り付け、固定部側にマグネット7a〜7d、8a〜8dを取り付けた場合により説明したが、本発明は、可動部側にマグネット7a〜7d、8a〜8dを取り付け、固定部側にコイル3〜6を取り付けるようにした場合も含む。
また、上述の説明では、固体撮像素子1を可動部に取り付けた場合により説明したが、固体撮像素子1以外の他の光学素子を取り付けて可動部を駆動する場合にも本発明は適用することができる。
According to the present embodiment, the support structure that supports the movable portion 31 (holders 32 and 33) so as to be displaceable is realized by a symmetric structure higher than that of the first embodiment. Can be driven around the axis.
In addition, by forming the support member using a metal, for example, the dimension in the height direction and the like can be made smaller than when formed using a resin, and a more compact solid-state imaging device can be realized.
In the above description, the coils 3 to 6 are attached to the movable part side, and the magnets 7a to 7d and 8a to 8d are attached to the fixed part side. However, the present invention is directed to the magnets 7a to 7d on the movable part side. This includes the case where 7d and 8a to 8d are attached and the coils 3 to 6 are attached to the fixed portion side.
In the above description, the case where the solid-state imaging device 1 is attached to the movable part has been described. However, the present invention is also applied to the case where an optical element other than the solid-state imaging element 1 is attached to drive the movable part. Can do.

固体撮像素子を用いて光学的に情報を記録或いは再生する光情報記録/再生装置に利用でき、固体撮像素子を可動部に取り付けて電磁気的に可動部を駆動する場合に適する。   It can be used in an optical information recording / reproducing apparatus that optically records or reproduces information using a solid-state imaging device, and is suitable for a case where a solid-state imaging device is attached to a movable portion and the movable portion is electromagnetically driven.

[付記]
1.請求項1において、前記駆動コイルは、可動部を構成する前記保持部材に取り付けられ、前記磁性部材は、前記固定部材に取り付けられる。
2.請求項1において、前記磁性部材は、可動部を構成する前記保持部材に取り付けられ、前記駆動コイルは、前記固定部材に取り付けられる。
[Appendix]
1. In Claim 1, the said drive coil is attached to the said holding member which comprises a movable part, and the said magnetic member is attached to the said fixed member.
2. In Claim 1, the said magnetic member is attached to the said holding member which comprises a movable part, and the said drive coil is attached to the said fixed member.

本発明の実施例1の固体撮像装置を示す斜視図。1 is a perspective view showing a solid-state imaging device according to Embodiment 1 of the present invention. 実施例1の固体撮像装置を示す平面図。1 is a plan view showing a solid-state imaging device according to Embodiment 1. FIG. 実施例1の固体撮像装置を分解して示す斜視図。1 is an exploded perspective view showing a solid-state imaging device according to Embodiment 1. FIG. 固体撮像装置をX方向に駆動する場合を示す説明図。Explanatory drawing which shows the case where a solid-state imaging device is driven to a X direction. 固体撮像装置をY方向に駆動する場合を示す説明図。Explanatory drawing which shows the case where a solid-state imaging device is driven to a Y direction. 固体撮像装置をθ方向に駆動する場合を示す説明図。Explanatory drawing which shows the case where a solid-state imaging device is driven to (theta) direction. 本発明の実施例2における可動部の構成を示す斜視図。The perspective view which shows the structure of the movable part in Example 2 of this invention. 可動部を示す平面図。The top view which shows a movable part.

符号の説明Explanation of symbols

1…固体撮像素子
1a…撮像面
2…ホルダ
2a…弾性支持部固定端
2b〜2e…弾性支持部
3〜6…コイル
7a〜7d、8a〜8d…マグネット
9…ベース
10…固体撮像装置
9a〜9d…立ち上げ部
9e…嵌合孔
15〜18…駆動力
代理人 弁理士 伊藤 進
DESCRIPTION OF SYMBOLS 1 ... Solid-state image sensor 1a ... Imaging surface 2 ... Holder 2a ... Elastic support part fixed end 2b-2e ... Elastic support part 3-6 ... Coil 7a-7d, 8a-8d ... Magnet 9 ... Base 10 ... Solid-state imaging device 9a- 9d ... Rising part 9e ... Fitting hole 15-18 ... Driving force Agent Patent attorney Susumu Ito

Claims (3)

光学系を介して得られる光学像を撮像する固体撮像素子と、前記固体撮像素子を保持する保持部材と、一端を前記保持部材に他端を固定部材に固定することにより前記固体撮像素子を前記固定部材に対して変位可能に支持する支持部材と、前記保持部材を駆動させるために駆動コイル及び該駆動コイルに作用し磁束を発生する磁性部材と、を有する固体撮像装置において、
前記支持部材は、前記固体撮像素子を少なくとも2軸方向に変位可能なように複数の弾性支持部を有し、これら弾性支持部材が一体に形成され、前記固体撮像素子の撮像面の裏面に配置され、前記駆動コイルと前記磁性部材との電磁気作用により、前記固体撮像素子を移動させることを特徴とする固体撮像装置。
A solid-state imaging device that captures an optical image obtained via an optical system; a holding member that holds the solid-state imaging device; and one end fixed to the holding member and the other end fixed to a fixing member to In a solid-state imaging device having a support member that is displaceably supported with respect to a fixing member, and a magnetic member that acts on the drive coil and generates a magnetic flux to drive the holding member.
The support member has a plurality of elastic support portions so that the solid-state imaging device can be displaced in at least two axial directions, and these elastic support members are integrally formed and arranged on the back surface of the imaging surface of the solid-state imaging device. The solid-state imaging device is characterized in that the solid-state imaging device is moved by an electromagnetic action of the drive coil and the magnetic member.
前記支持部材と前記保持部材は、樹脂の一体成形によって形成されたことを特徴とする請求項1に記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein the support member and the holding member are formed by integral molding of resin. 前記支持部材は、導電性を有する金属によって形成され、前記駆動コイルの端末を前記支持部材の一端に接続し、前記駆動コイルに前記支持部材を介して給電することを特徴とする請求項1に記載の固体撮像装置。   The said support member is formed with the metal which has electroconductivity, connects the terminal of the said drive coil to the end of the said support member, and supplies electric power to the said drive coil via the said support member. The solid-state imaging device described.
JP2003409665A 2003-12-08 2003-12-08 Solid state imaging device Withdrawn JP2005175640A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520500A (en) * 2007-02-28 2010-06-10 コーニング インコーポレイテッド Monolithic optical element mount

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520500A (en) * 2007-02-28 2010-06-10 コーニング インコーポレイテッド Monolithic optical element mount

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