JP2005156756A - Scanning microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make the device compact employing a simple constitution and to reduce aberration of scanning loci of laser light beams that made incident on a sample. <P>SOLUTION: In a scanning microscope, a resonance type galvano-scanner 22, which has a first rotational axis 28 on an approximate mirror flat surface of a mirror 21, is held by a second galvano-scanner 23 which has a second rotational axis 25 that crosses the first rotational axis 28 in an approximately vertical manner. At the scanning center, a two dimensional scanning mechanism 20 is arranged so that the mirror flat surface of the mirror 21 is provided on the flat surface which is approximately 45° rotated around the rotational axis of the resonance type galvano-scanner 22 with respect to the flat surface made by the first rotational axis 28 of the resonance type galvano-scanner 22 and the second rotational axis 25 of the second galvano-scanner 23. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a scanning microscope that obtains an image of a sample by two-dimensionally scanning illumination light such as laser light on a sample and detecting measurement light from the sample.

  FIG. 8 is a block diagram of a generally known scanning microscope. The laser light source 1 outputs laser light D having a single wavelength. The laser beam D passes through the polarization beam splitter 2 and enters the first galvano scanner 3. The first galvano scanner 3 swings in the direction of arrow a and scans the laser beam D in the Y direction on the sample S. The scanned laser beam D enters the second galvano scanner 6 through the relay lenses 4 and 5. The second galvano scanner 6 swings in the direction of arrow b and scans the laser beam D in the X direction on the sample S. The laser beam D scanned in the X and Y directions is irradiated on the surface of the sample S through the lenses 7 and 8, the quarter wavelength plate 9 and the objective lens 10 constituting the observation optical system.

  The first and second galvano scanners 3 and 6 are arranged at the respective pupil positions of the objective lens 10 relayed by the lenses 7 and 8 and the relay lenses 4 and 5, respectively. If it demonstrates in detail, the fulcrum of each inclination of the 1st and 2nd galvanometer scanners 3 and 6 will be arranged in each pupil position. If the first and second galvano scanners 3 and 6 are not arranged at the respective pupil positions, a deviation occurs in the scanning direction of the laser beam D and the measuring beam.

  The measurement light from the surface of the sample S is an optical path opposite to the optical path in which the sample S is irradiated with laser light, that is, the objective lens 10, the quarter wavelength plate 9, the lenses 8 and 7, and the second galvano scanner 6. The light passes through the relay lenses 5 and 4 and the first galvano scanner 3 and enters the polarization beam splitter 2 to be deflected. The deflected measurement light is collected by the condenser lens 11, passes through the pinhole 12, and is received by the light receiving element 13. An observation image of the sample S is acquired by processing the output signal of the light receiving element 13.

  However, the scanning microscope must use two first and second galvano scanners 3 and 6, and therefore, each relay lens 4 and 5 for arranging the scanner at each pupil position is required. These galvano scanners 3 and 6 occupy a large space, and the entire microscope is enlarged. For this reason, if the laser light is two-dimensionally scanned by a single galvano scanner, the entire microscope can be made compact without the need for a relay lens. For example, Patent Document 1 discloses a technique for two-dimensionally scanning laser light with a single galvano scanner.

  When the technology for two-dimensionally scanning laser light with the single galvano scanner of Patent Document 1 is applied to a scanning microscope, for example, as shown in FIGS. , Has a problem that the measurement accuracy decreases.

For example, Patent Document 2 discloses a technique for correcting the aberration of the scanning trajectory of the laser beam D with respect to the sample S. This Patent Document 2 describes a scanning microscope having a scanning device for scanning an irradiation light beam (corresponding to a laser beam D) along a sample. The scanning device has at least one micromirror that can move in at least two directions. When the irradiation light beam is scanned by this scanning device, aberration occurs in the scanning locus of the irradiation light beam with respect to the sample. Therefore, in Patent Document 2, an irradiation light beam applied to a sample is detected by, for example, a Hartmann-Shack detector, and a mirror surface of an applied lens is deformed by a plurality of active optical elements such as an electrostatic actuator according to the detection result. The defect or deformation of the mirror surface is corrected.
JP-A-6-337952 JP 2002-131649 A

  However, Patent Document 2 discloses a Hartmann-Shack detector that detects an irradiation light beam, an applied lens having a mirror surface, a plurality of active optical elements such as an electrostatic actuator for deforming the mirror surface, and a Hartman-Shack detector. Various components such as a personal computer for driving and controlling a plurality of active optical elements such as electrostatic actuators are required in accordance with the detection results. These various parts must be provided separately from the optical system of the scanning microscope. For this reason, in patent document 2, a structure becomes complicated and the whole apparatus enlarges. In addition, the cost of the entire apparatus is increased.

  The present invention includes a light source that outputs illumination light, a two-dimensional scanning mechanism that scans the illumination light output from the light source by deflecting the illumination light in at least two directions with respect to the incident optical axis of the illumination light, and a two-dimensional scanning mechanism. Based on the observation optical system that irradiates the sample with the illumination light scanned by, and detects the measurement light from the sample, the light receiving element that receives the measurement light detected by the observation optical system, and the output signal of the light receiving element An image processing unit that acquires an observation image of the sample, and the two-dimensional scanning mechanism includes a mirror that reflects the illumination light output from the light source and the measurement light from the sample, and a direction substantially parallel to the mirror plane of the mirror And a first scanning mechanism for rotating the mirror about the first rotational axis, and in a direction substantially perpendicular to the first rotational axis of the first scanning mechanism. A second rotation axis provided, and the first scanning mechanism is And a second scanning mechanism that rotates about the second rotation axis, the mirror plane of the mirror being substantially 45 ° with respect to the second rotation axis of the second scanning mechanism, and the first scanning mechanism The scanning microscope is arranged on the surface so that the rotation axis and the rotation center of the first scanning mechanism intersect.

  The present invention provides a scanning microscope that obtains a confocal image of a sample by two-dimensionally scanning a laser beam output from a laser light source on a sample and detecting measurement light from the sample through a pinhole. A mirror that reflects the output laser light and measurement light from the sample, and a first rotation axis that is provided in a direction substantially parallel to the mirror plane of the mirror, the mirror about the first rotation axis. A first scanning mechanism that rotates, and a second rotational shaft that is provided in a direction substantially perpendicular to the first rotational shaft of the first scanning mechanism, and the first scanning mechanism is a second rotational shaft. A second scanning mechanism that rotates about the first rotation axis, the mirror plane of the mirror is substantially 45 ° with respect to the second rotation axis of the second scanning mechanism, and the first rotation axis and the second rotation mechanism The first scanning machine is arranged on the surface so as to intersect the rotation center of the first scanning mechanism. It is a scanning microscope provided with the two-dimensional scanning mechanism for scanning the laser beam two-dimensionally by the rotation of the first scanning mechanism due to rotation and a second scanning mechanism of the mirror by.

  The present invention can provide a scanning microscope in which the apparatus can be made compact with a simple configuration and the aberration of the scanning trajectory of the laser beam with respect to the sample can be reduced.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 8 are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 1 is a block diagram of a scanning microscope, specifically a laser scanning confocal microscope. A two-dimensional scanning mechanism 20 is provided via the polarization beam splitter 2 on the optical axis of the single wavelength laser beam D output from the laser light source 1. The two-dimensional scanning mechanism 20 performs two-dimensional scanning by deflecting laser light D having a single wavelength output from the laser light source 1 in at least two directions with respect to the incident optical axis of the laser light. On the optical path of the laser beam D that is two-dimensionally scanned by the two-dimensional scanning mechanism 20, the lenses 7, 8, the quarter wavelength plate 9, and the objective lens 10 are provided.

  2 is a configuration diagram of the two-dimensional scanning mechanism 20 viewed from the Y-axis direction, and FIG. 3 is a configuration diagram of the two-dimensional scanning mechanism 20 viewed from the Z-axis direction. The two-dimensional scanning mechanism 20 includes a mirror 21 that reflects laser light D output from the laser light source 1 and measurement light from the sample S, and a first galvano scanner (first scanning mechanism that rotates the mirror 21). (Hereinafter referred to as a resonance type galvano scanner) 22 and a second galvano scanner 23 as a second scanning mechanism for rotating the first galvano scanner 22.

  The second galvano scanner 23 is used for scanning around the X axis, for example. The second galvano scanner 23 has a drive unit 24. A rotation shaft (hereinafter referred to as a second rotation shaft) 25 of the drive unit 24 is disposed in the X-axis direction. A holding portion 26 is provided at the tip of the second rotating shaft 25. The holding portion 26 has, for example, an inclined holding surface 27 formed at an inclination angle of 45 °, and the resonance type galvano scanner 22 is assembled on the inclined holding surface 27. Thereby, the resonance type galvano scanner 22 corresponds to the first rotation axis 28 for rotating the mirror 21 in the Y-axis direction that is substantially orthogonal to the X-axis direction and intersects.

  As shown in FIG. 4, the mirror 21 forms, for example, an inclination angle of 45 ° with respect to the second rotation axis 25 of the second galvano scanner 23 as shown in FIG. The two galvano scanners 23 are assembled and arranged on the surface so as to intersect with the rotation center. In other words, the mirror plane of the mirror 21 is set on a plane rotated about 45 ° around the rotation axis of the resonant galvano scanner 22 with respect to the plane composed of the X axis and the Y axis.

  The optical axis of the laser beam D is adjusted so as to pass on the second rotation axis 25 of the second galvanoscanner 23. Thereby, the laser beam D is first reflected by the mirror 21. When the second rotation shaft 25 of the second galvano scanner 23 is rotated about the X axis, the emitted light reflected by the mirror 21 is scanned in the direction of the arrow shown in FIG. When the first rotation shaft 28 of the resonance type galvano scanner 22 is rotated around the Y axis, the emitted light reflected by the mirror 21 is scanned in the direction of arrow E shown in FIG.

  FIG. 5 is an external configuration diagram of the resonance type galvano scanner 22. The resonance type galvano scanner 22 is used for scanning around the Y axis. The resonant galvano scanner 22 includes a movable plate 30 that is integrally processed by etching a single crystal silicon substrate, a torsion bar 31 that is integrally provided on the movable plate 30, and the movable plate 30 and the torsion. The support frame 32 that supports the bar 31 is manufactured by bonding and assembling to the metal base 33.

  A mirror 21 is provided on one surface of the movable plate 30. On the other surface of the movable plate 30, a movable coil is formed which includes a drive coil 34 for driving the scanner and a detection coil 35 for monitoring the vibration state. Further, a permanent magnet 36 and a magnetic yoke 37 that form a magnetic circuit are provided at positions facing each other through the movable plate 30 in the support frame 32. The permanent magnet 36 and the magnetic yoke 37 apply a magnetic field to the drive coil 34 formed on the movable plate 30 and are substantially parallel to the movable plate 30 and substantially perpendicular to the extending direction of the torsion bar 31. A magnetic field is generated in the direction (X-axis direction).

  Therefore, when a current is passed through the drive coil 34, drive forces having different directions in the Z-axis direction are generated on the two sides parallel to the torsion bar 31 according to Fleming's left-hand rule. Torque is applied to the movable plate 30 by this driving force. Due to the relationship between this torque and the reaction force of the torsion bar 31, the movable plate 30 swings in the direction of the arrow in the figure with the torsion bar 31 as the swing axis. As a result, the laser light D incident on the mirror 21 is reflected and scanned in the X-axis direction as outgoing light E.

  In the configuration of the resonance galvano scanner 22 and the second galvano scanner 23 as described above, when the second galvano scanner 23 is rotationally driven around the X axis in synchronization with the scanning frequency of the resonance galvano scanner 22, FIG. As shown in FIG. 4, the laser beam D incident on the mirror 21 is reflected and deflected and emitted to the LM plane. The light emitted from the mirror 21 is the N axis in the optical axis direction of the outgoing light E when the mirror 21 is at the scanning center, the LM plane is a plane substantially perpendicular to the optical axis direction, and the N axis and the Y axis Are set to be approximately parallel.

Here, when the angular rotation angles around the X axis and the Y axis of the mirror 21 are φ and θ, respectively, the direction in the LMN space is expressed by a unit vector.
(L, M, N) = (sin (2θ), sin (φ) · cos (2θ), cos (φ) · cos (2θ)) (1)
It becomes.

  Based on the equation (1), when the emitted light is given predetermined rotation angles θ and φ to the mirror 21, the locus of the scanning range is projected on the LM plane. Therefore, by scanning the second galvano scanner 23 along the scanning locus shown in FIG. 6 in synchronism with the scanning frequency of the resonance type galvano scanner 23, the laser beam D is raster-scanned as shown in FIG. Is done. As a result, a two-dimensional optical scanning configuration with almost no aberration in the scanning trajectory is constructed, and measurement can be performed with high accuracy.

  Returning to FIG. 1, the image processing unit 38 acquires and stores image data of the confocal observation image of the sample S by performing image processing on the output signal of the light receiving element 13, and displays the observation image on the monitor 39.

  Next, the operation of the scanning microscope configured as described above will be described.

  The laser light source 1 outputs laser light D having a single wavelength. The laser beam D passes through the polarization beam splitter 2 and enters the mirror 21 of the two-dimensional scanning mechanism 20.

  In the resonant galvano scanner 22 in the two-dimensional scanning mechanism 20, when a current flows through the drive coil 34 as shown in FIG. 5, the Z-axis direction is determined by Fleming's left-hand rule on two sides parallel to the torsion bar 31 as described above. Thus, driving forces having different directions are generated. Since torque is applied to the movable plate 30 by this driving force, the movable plate 30 swings in the direction of the arrow in the figure using the torsion bar 31 as a swing axis around the Y axis due to the relationship between this torque and the reaction force of the torsion bar 31. To do. As a result, the laser light D incident on the mirror 21 is reflected and scanned in the X-axis direction as outgoing light E.

  At the same time, in the second galvano scanner 23, as shown in FIG. 2, the holding unit 26 holding the resonant galvano scanner 22 is swung around the X axis by the drive unit 24.

  As described above, when the mirror 21 is swung around the Y axis in the resonance type galvano scanner 22 and the second galvano scanner 23 is driven to rotate around the X axis in synchronization with the scanning frequency of the resonance type galvano scanner 22, the mirror is obtained. For example, as shown in FIG. 7, the laser beam D incident on 21 is raster-scanned in the XY axis directions.

  The laser beam D raster-scanned in the XY axis direction is irradiated onto the surface of the sample S through the lenses 7, 8, the quarter wavelength plate 9 and the objective lens 10.

  The measurement light from the surface of the sample S passes through the optical path opposite to the optical path in which the sample S is irradiated with the laser light, that is, the objective lens 10, the quarter wavelength plate 9, the lenses 8, 7, and the two-dimensional scanning mechanism 20. Then, the light enters the polarization beam splitter 2 and is deflected. The deflected measurement light is collected by the condenser lens 11, passes through the pinhole 12, and is received by the light receiving element 13. The observation image appearing on the light receiving surface of the light receiving element 13 is a confocal image on the surface of the sample S. The light receiving element 13 outputs a signal corresponding to the amount of received light. The image processing unit 38 acquires and stores image data of the confocal observation image of the sample S by performing image processing on the output signal of the light receiving element 13, and displays the observation image on the monitor 39.

  As described above, according to the above-described embodiment, the resonant galvano scanner 22 having the first rotation axis 28 on the substantially mirror plane of the mirror 21 is arranged on the scanning microscope substantially perpendicular to the first rotation axis 28. The mirror plane of the mirror 21 is held by the second galvano scanner 23 having the intersecting second rotation axis 25, and the mirror plane of the mirror 21 at the scanning center is changed to the first rotation axis 28 of the resonance galvano scanner 22 and the second galvano scanner 23. A two-dimensional scanning mechanism 20 configured to be provided on a plane rotated approximately 45 ° around the axis of the first rotation axis 28 of the resonance type galvano scanner 22 with respect to the plane consisting of the second rotation axis 25 is used. It was.

  According to the two-dimensional scanning mechanism 20, on the LM plane when the rotation angles θ and φ are given to the first rotation shaft 28 of the resonance type galvano scanner 22 and the second rotation shaft 25 of the second galvano scanner 23. As shown in FIG. 6, the trajectory of the scanning range projected onto can reduce the aberration compared to the aberration of the scanning trajectory of the conventional optical scanning device. Therefore, the aberration of the scanning trajectory of the laser beam D can be reduced with a simple and simple configuration in which the resonance type galvano scanner 22 is provided at the tip of the second rotating shaft 25 of the second galvano scanner 23. In addition, since the two-dimensional scanning mechanism 20 has a simple configuration, the space area of the two-dimensional scanning mechanism 20 in the scanning microscope can be reduced, and the entire scanning microscope can be made compact.

  As a result, in a compact scanning microscope, two-dimensional scanning with high accuracy can be realized easily and easily. Such a confocal image of the sample S obtained by irradiating the sample S with the two-dimensionally scanned laser light D can be obtained by capturing the surface of the sample S with high resolution.

  Further, by using the two-dimensional scanning mechanism 20 in this way, the relay lenses 4 and 5 used in the generally known scanning microscope shown in FIG. 8 can be omitted, and only the optical path length using the relay lenses 4 and 5 is obtained. The distance between the polarizing beam splitter 2 and the two-dimensional scanning mechanism 20 can be narrowed, thereby further reducing the size of the entire scanning microscope.

  The resonant galvano scanner 22 includes a movable plate 30 that is integrally processed by etching a single crystal silicon substrate, a torsion bar 31 that is integrally provided on the movable plate 30, and a movable plate 30. Since the support frame 32 supporting the torsion bar 31 and the support frame 32 are bonded and assembled to the metal base 33, design and manufacture are easy.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

  For example, the two-dimensional scanning mechanism 20 is configured such that the mirror 21 is arranged on the resonance type galvano scanner 22 and the resonance type galvano scanner 22 is assembled and arranged on the first galvano scanner 23. However, the present invention is not limited thereto. Both of them can be constituted by a resonance type galvano scanner.

  In the above-described embodiment, an example in which the two-dimensional scanning mechanism 20 is used in a laser scanning confocal microscope that acquires a confocal image has been described. However, the present invention is not limited thereto, and various observation methods such as differential interference observation methods are used. It can be applied to a scanning microscope for observing the sample S by a simple deflection observation method, a bright field observation method, a dark field observation method, or the like. In the differential interference observation method, an analyzer, a DIC (differential interference) prism, and a polarizer are arranged on the optical axis of the observation optical system including the lenses 7, 8, ¼ wavelength plate 9 and objective lens 10. In the simple deflection observation method, an analyzer and a polarizer having a crossed Nicols relationship are arranged on the optical axis of the observation optical system.

  Furthermore, as an application example, the two-dimensional scanning mechanism 20 is not limited to a scanning microscope, but can be used to deflect and scan a light beam in a laser beam printer, a barcode scanner, or the like.

The block diagram which shows one Embodiment of the scanning microscope which concerns on this invention. The block diagram which looked at the two-dimensional scanning mechanism in the scanning microscope from the Y-axis direction. The block diagram which looked at the two-dimensional scanning mechanism in the scanning microscope from the Z-axis direction. The figure which shows the effect | action of the mirror of the resonance type galvano scanner in the scanning microscope. The external appearance block diagram of the resonance type galvano scanner in the scanning microscope. The figure which shows an example of the scanning trace scanned with the 2nd galvano scanner in the scanning microscope. The figure which shows the raster scan of the laser beam in the scanning microscope. The block diagram of the scanning microscope generally known. The figure which shows the aberration which arises in the scanning locus | trajectory of the laser beam with respect to a sample. The figure which shows the aberration which arises in the scanning locus | trajectory of the laser beam with respect to a sample.

Explanation of symbols

  1: Laser light source, 2: Polarizing beam splitter, 7, 8: Lens, 9: 1/4 wavelength plate, 10: Objective lens, 11: Condensing lens, 12: Pinhole, 13: Light receiving element, 20: Two-dimensional Scanning mechanism, 21: mirror, 22: first galvano scanner (resonance type galvano scanner), 23: second galvano scanner, 24: drive unit, 25: second rotating shaft, 26: holding unit, 27: tilting Holding surface, 28: rotating shaft, 30: movable plate, 31: torsion bar, 32: support frame, 33: metal base, 34: drive coil, 35: detection coil, 36: permanent magnet, 37: magnetic yoke, 38: Image processing unit, 39: monitor.

Claims (7)

A light source that outputs illumination light;
A two-dimensional scanning mechanism for scanning the illumination light output from the light source by deflecting the illumination light in at least two directions with respect to an incident optical axis of the illumination light;
An observation optical system for irradiating the sample with the illumination light scanned by the two-dimensional scanning mechanism and detecting measurement light from the sample;
A light receiving element that receives the measurement light detected by the observation optical system;
An image processing unit for obtaining an observation image of the sample based on an output signal of the light receiving element;
Comprising
The two-dimensional scanning mechanism includes a mirror that reflects the illumination light output from the light source and the measurement light from the sample;
A first scanning mechanism having a first rotation axis provided in a direction substantially parallel to a mirror plane of the mirror, and rotating the mirror around the first rotation axis;
A second rotation axis provided substantially perpendicular to the first rotation axis of the first scanning mechanism; and the first scanning mechanism is rotated about the second rotation axis. A second scanning mechanism;
Have
The mirror plane of the mirror is substantially 45 ° with respect to the second rotation axis of the second scanning mechanism, and the first rotation axis and the rotation center of the first scanning mechanism are Placed on the surface to intersect,
A scanning microscope characterized by that. In a scanning microscope for obtaining a confocal image of the sample by two-dimensionally scanning the sample with laser light output from a laser light source, and detecting measurement light from the sample through a pinhole,
A mirror that reflects the laser light output from the laser light source and the measurement light from the sample;
A first scanning mechanism having a first rotation axis provided in a direction substantially parallel to a mirror plane of the mirror, and rotating the mirror around the first rotation axis;
A second rotation axis provided substantially perpendicular to the first rotation axis of the first scanning mechanism; and the first scanning mechanism is rotated about the second rotation axis. A second scanning mechanism;
Have
The mirror plane of the mirror is substantially 45 ° with respect to the second rotation axis of the second scanning mechanism, and the first rotation axis and the rotation center of the first scanning mechanism are Two-dimensional scanning that is arranged on the surface so as to intersect and that causes the laser light to be two-dimensionally scanned by rotation of the mirror by the first scanning mechanism and rotation of the first scanning mechanism by the second scanning mechanism mechanism,
A scanning microscope characterized by comprising: A laser light source for outputting laser light;
A two-dimensional scanning mechanism for two-dimensionally scanning the laser light output from the laser light source;
An observation optical system for irradiating the sample with the laser beam two-dimensionally scanned by the two-dimensional scanning mechanism through at least the wave plate and the objective lens, and detecting measurement light from the sample through at least the objective lens and the wave plate; ,
A polarizing beam splitter that deflects the measurement light detected by the observation optical system;
A pinhole for passing the measurement light deflected by the polarization beam splitter;
A light receiving element that receives the measurement light that has passed through the pinhole;
An image processing unit for obtaining an observation image of the sample based on an output signal of the light receiving element;
Comprising
The two-dimensional scanning mechanism includes a mirror that reflects the laser light output from the laser light source and the measurement light from the sample;
A first scanning mechanism having a first rotation axis provided in a direction substantially parallel to a mirror plane of the mirror, and rotating the mirror around the first rotation axis;
A second rotation axis provided substantially perpendicular to the first rotation axis of the first scanning mechanism; and the first scanning mechanism is rotated about the second rotation axis. A second scanning mechanism;
Have
The mirror plane of the mirror is substantially 45 ° with respect to the second rotation axis of the second scanning mechanism, and the first rotation axis and the rotation center of the first scanning mechanism are Arranged on the surface so as to intersect, and the two-dimensional scanning of the laser beam by the rotation of the mirror by the first scanning mechanism and the rotation of the first scanning mechanism by the second scanning mechanism,
A scanning microscope characterized by that. 4. The scanning type according to claim 1, wherein the second rotation axis of the second scanning mechanism is disposed so as to substantially coincide with an incident optical axis of the illumination light. 5. microscope. 4. The scanning microscope according to claim 1, wherein at least one of the first and second scanning mechanisms is a resonance type galvano scanner. 5. The first scanning mechanism includes a movable plate provided with the mirror on one side;
A torsion bar provided on the movable plate;
A movable coil formed on the other surface of the movable plate and swinging at least the movable plate in relation to a reaction force of the torsion bar;
A magnetic circuit for generating a magnetic field around the movable coil;
The scanning microscope according to claim 1, further comprising: 4. The scanning microscope according to claim 1, wherein the second scanning mechanism is scanned in synchronization with a scanning frequency of the first scanning mechanism. 5.

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