JP2005150146A - Flexible detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flexible detector advantageous for an increase in area and mechanical flexibility. <P>SOLUTION: Each cell 11 for an array 1 has sensors 11a detecting specified physical quantities and/or chemical characteristics and organic transistors 11b for PMOSs connected to the sensors 11a and having switching functions. Low decoders 2 have five PMOSs corresponding to each line of the array 1, and these PMOSs 12a to 12e constitute NANDs. Column selectors 3 have the three PMOSs 13a to 13c corresponding to each row of the array 1, and these PMOSs 13a to 13c constitute the NANDs. The flexible detector is advantageous for an increase in area and mechanical flexibility by using the organic transistors 11b having the switching functions. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention detects a predetermined physical quantity (pressure, temperature, light quantity, acceleration, strain, magnetism, humidity, voltage, resistance, etc.) and / or chemical characteristics (for example, the chemistry of an organic semiconductor and a target substance). This invention relates to a flexible sensing device.

In recent years, a detection device that detects a tactile sensation by detecting a predetermined physical quantity such as temperature or strain has been proposed (for example, Patent Document 1). In such a detection device, a composite element that functions as a switching element is formed on an insulating film or an insulating substrate formed on a conductive substrate.
JP 2002-48607 A (Claim 1)

However, the conventional detection device has the following disadvantages.
(1) Since an insulating film or an insulating substrate (that is, an inorganic material) formed on a conductive substrate is used, it is difficult to increase the area and secure mechanical flexibility.
(2) The types of physical quantities that can be detected are limited to pressure, temperature, and strain.
(3) Separation and / or bonding cannot be performed while maintaining the same function.
(4) It is difficult to efficiently make the detection device arbitrarily large.

  An object of the present invention is to provide a flexible detection device that is advantageous in increasing the area and mechanical flexibility.

  Another object of the present invention is to provide a flexible sensing device capable of detecting various physical quantities and / or chemical characteristics.

  Another object of the present invention is to provide a flexible detection device capable of freely performing separation and / or bonding while maintaining the same function.

  Another object of the present invention is to provide a flexible sensing device that can be efficiently sized.

The flexible detection device according to the present invention comprises:
comprising an array of cells of m rows and n columns (both m and n are natural numbers greater than or equal to 2);
Each of these cells has a detection means for detecting a predetermined physical quantity and / or chemical characteristic, and an organic cell having a switching function connected to the sensor.

Another flexible sensing device according to the present invention is:
comprising an array of cells of m rows and n columns (both m and n are natural numbers greater than or equal to 2);
Each of these cells has an actuator or a thermal printer heater and an organic cell having a switching function connected to the actuator or the thermal printer heater.

  According to the flexible detection device of the present invention, the use of an organic transistor having a switching function increases the area and machine compared to the case where the switching element is made of another material (for example, an inorganic material such as silicon). This is advantageous for general flexibility. In this specification, “an array of cells of m rows and n columns” means not only a case where cells are continuous in m rows and n columns, but also a case where a part is missing as will be described later. Shall mean.

  An inorganic material such as silicon has a low thermal resistance. Therefore, when an inorganic material is brought into contact with an object to be measured, it acts like a heat sink, causing a disturbance as heat is evenly distributed. On the other hand, the organic material has a high thermal resistance. Therefore, even when the organic material is brought into contact with the object to be measured, the organic material is hardly disturbed. Therefore, when an organic transistor having a switching function is used, it is advantageous from the viewpoint of accurate detection of physical quantities and chemical characteristics.

  The detection means includes at least one of a pressure sensor, a temperature sensor, an optical sensor, an acceleration sensor, a strain sensor, a magnetic sensor, a humidity sensor, a capacitor, a voltage sensor, and a chemical sensor. Thereby, various physical quantities and / or chemical properties can be detected.

  Preferably, the apparatus further comprises means for selecting a row and / or a column of the array, and the array is configured to be separable and / or pasted in a row unit and / or a column unit while maintaining the same function. To do. Thereby, separation and / or bonding can be performed freely while maintaining the same function.

  More preferably, the peripheral circuits of the array are configured independently so that the arrays can be individually attached. This makes it possible to efficiently create an array of an arbitrary size.

  The detecting means includes at least two of a pressure sensor, a temperature sensor, an optical sensor, an acceleration sensor, a strain sensor, a magnetic sensor, a humidity sensor, a capacitor, a voltage sensor, and a chemical sensor, and at least two of them. However, it can be configured to be accessible by the same transistor.

  According to another flexible detection device according to the present invention, an actuator or a heater for a thermal printer and an organic transistor can be integrated so as to be advantageous in increasing the area and mechanical flexibility.

Embodiments of a flexible detection device according to the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram showing an embodiment of a flexible detection device according to the present invention. This flexible sensing device comprises an array 1 of cells of 16 rows and 16 columns, a row decoder 2 and a column selector 3.

  Each cell 11 of the array 1 includes a sensor 11a that detects a predetermined physical quantity and / or chemical characteristic, and a PMOS organic transistor 11b that is connected to the sensor 11a and has a switching function. As will be described in detail later, the sensor 11a is at least one of a pressure sensor, a temperature sensor, an optical sensor, an acceleration sensor, a strain sensor, a magnetic sensor, a humidity sensor, a capacitor, a voltage sensor, and a chemical sensor.

  The row decoder 2 has five PMOSs 12a to 12e corresponding to each row of the array 1, and these PMOSs 12a to 12e constitute a NAND. The column selector 3 has three PMOSs 13a to 13c corresponding to each column of the array 1, and these PMOSs 13a to 13c constitute a NAND.

  According to the present embodiment, the use of the organic transistor 11b having a switching function makes it possible to increase the area and mechanically compared to the case where the switching element is made of another material (for example, an inorganic material such as silicon). This is advantageous for flexibility.

  The array 1, the row decoder 2 and the column selector 3 are configured independently, and are connected to each other using tape or conductive adhesive deposited with metal wiring. It is possible to efficiently create an array having a size of.

  In addition, since the row decoder 2 and the column selector 3 are composed of NAND, by separating a cell having an arbitrary number of rows and / or columns and the PMOS of the row decoder 2 and the column selector 3 corresponding thereto with a cutter knife or the like. A part of the flexible detection device can be separated while maintaining the same function without redesigning the mask. As a result, the design time of the flexible detection device can be shortened and the manufacturing cost can be reduced. In FIG. 1, the case of separating an array of cells in 4 rows and 4 columns is indicated by a broken line.

  Furthermore, by preparing more address lines and attaching the arrays corresponding to these address lines, the arrays can be attached together while maintaining the same function. As a result, the flexible detection device The detection area can be expanded.

  FIG. 2 is a diagram for explaining the operation of the flexible detection device of FIG. In this case, an example of a signal waveform when the sensor 11a of the cell 1 in the 16th row and the first column detects a predetermined physical quantity and / or chemical characteristic is shown. At the same time as supplying an address and a load signal from the outside, The data output is also precharged externally and dropped to GND.

The row decoder 2 selects the word line F and the column selector 3 selects the column S3. Since the resistance value of the resistance of the sensor 11a becomes small, current flows out to the data output D ₀ from the bit line at the bottom left of Figure 1, the voltage rises.

  From the output obtained in this way, data of a predetermined physical quantity and / or chemical property is analyzed using an image processing technique, thereby achieving a sensing function comparable to a human's sensitive tactile sense. it can.

  FIG. 3 is a diagram showing another embodiment of the flexible detection device according to the present invention. This flexible sensing device comprises an array 1 of cells of 16 rows and 16 columns, a row decoder 2 'having a shift register, and a column selector 3' having a shift register.

  As in this embodiment, the row decoder 2 'and the column selector 3' can be configured using shift registers instead of PMOS. In FIG. 3, a case where a cell array of 4 rows and 4 columns is separated is indicated by a broken line.

  FIG. 4 shows a part of the layout of the row decoder. 4 shows a row address input unit 21 having a source / drain 21a, a gate 21b and an organic film 21c, and a load unit 22 having a via 22a. The row address input unit 21 and the load unit 22 are connected by a connection unit 23. It is connected.

  As shown in FIG. 4, the wirings at the cut portions A-A ′ and B-B ′ are thicker than other portions to facilitate connection to the outside. Further, the connection portion 23 is also thicker than other portions.

  There is no via in the row address input unit 21. If there is a difference in manufacturing cost due to the presence of the via, the manufacturing cost can be reduced by separating the load address input unit 21 and the load unit 22 as shown in FIG.

  It should be noted that the load address input unit 21 and the load unit 22 can be manufactured integrally. Furthermore, in order to further expand the address, a terminal can be prepared in the load address input unit 21 and expansion by bonding can be performed.

FIG. 5 is a diagram for explaining a method of manufacturing an array cell of the flexible detection device. In this case, the organic transistor and the pressure sensor are integrated.
First, a gate electrode 32 is formed on a polymer film 31 such as a polyimide film or polyethylene terephthalate (PET). Next, a gate insulating film 33 such as polyimide is applied by spin coating and cured in an oven.

  Next, a part of the polyimide is peeled off by laser processing or the like to prepare for forming a via. In laser processing, for example, a laser processing machine including a YAG laser oscillator, a Q switch, an XY table, and a computer is used. An organic semiconductor layer 34 such as pentacene is formed by vapor deposition or the like. At the time of vapor deposition, by using a metal mask, the organic semiconductor layer 34 is formed only in a necessary portion, and element isolation is performed. Finally, the source electrode 35 and the drain electrode 36 are formed to complete the organic transistor.

  After forming the organic transistor, in order to integrate with the pressure sensor, first, a polymer film 37 such as a polyimide film is processed to form a through-hole sheet 38. The polymer film 37 is superposed on and attached to the polymer film 31 on which the organic transistor is formed. Further, a pressure-sensitive conductive rubber sheet 39 formed by adding graphite to silicone rubber is laminated. Finally, the polymer film 41 holding the electrode 40 is bonded to complete the device.

  FIG. 6 is a diagram for explaining another method of manufacturing the cells of the array of the flexible detection device. In this case, when integrating the organic transistor and the pressure sensor, instead of superimposing the polymer film on which the through-hole sheet is formed on the polymer film on which the organic transistor is formed, the polymer film 51 is mechanically processed. Through hole sheet 52 is formed in advance (FIG. 6A).

  Thereafter, in the same manner as described with reference to FIG. 5, an organic transistor 53 is formed on one surface of the polymer film 51 (FIG. 6B), and a pressure-sensitive conductive rubber sheet 54 is bonded to the other surface. Finally, the polymer film 56 holding the electrode 55 is bonded to the pressure-sensitive conductive rubber 54 (FIG. 6C).

  FIG. 7 is a diagram for explaining another method of manufacturing the cells of the array of the flexible detection device. In this case, various elements are integrated on the polymer film, and the elements are completely separated. First, patterning is performed on one surface of the polymer film 61 when silicone rubber before curing is placed. Thereafter, the silicone rubber is cured to form a pressure-sensitive conductive rubber sheet 62. Thereafter, the organic transistor 63 is formed on the other surface of the polymer film 61. Finally, the electrode 65 held on the polymer film 64 is bonded to the pressure-sensitive conductive rubber sheet 62 to complete the device.

FIG. 8 is a diagram showing the voltage / current characteristics of the cells of the array of the flexible sensing device manufactured by any one of the manufacturing methods of FIGS. 8, the horizontal axis represents the gate voltage _{V GS,} the vertical axis represents the source-drain current _{I DS.} The solid line shows the voltage / current characteristics when the polymer film is made of polyethylene terephthalate (PET), and the broken line shows the voltage / current characteristics when the polymer film is made of polyimide.

  FIG. 9 is a diagram showing the location dependence of the input / output characteristics of the sensors in the array of the flexible detection device manufactured by any one of the manufacturing methods in FIGS. In FIG. 9, the horizontal axis represents position, and the vertical axis represents current. The position 1 to 4 mm corresponds to the sensor position.

  As can be seen from FIGS. 8 and 9, the pressure is well detected in the cell in which the pressure sensor and the organic transistor are integrated. A flexible sensing device including an array constituted by such cells is advantageous in increasing the area and mechanical flexibility, and is optimal for applications such as artificial skin.

  When the flexible detection device of the present invention is used as artificial skin, it is effective to use a temperature sensor in addition to the pressure sensor. As the temperature sensor, an organic transistor having temperature dependency or an element utilizing a thermoelectric effect in which different metals are joined can be used. Note that a structure in which two organic transistors are integrated will be described in detail in connection with integration of an optical sensor and an organic transistor.

  FIG. 10 is a diagram for explaining the operation of the flexible detection device according to the present invention when an optical sensor is used. In this case, the flexible detection device can be used as the image capture 71 by using an optical sensor as the sensor.

  Conventionally, when an image is read, a CCD is generally used. However, when a CCD is used, it is disadvantageous for an increase in area and mechanical flexibility, and a complicated optical element is required. On the other hand, when an organic transistor is used as in the present invention, it is advantageous for an increase in area and mechanical flexibility, and an image can be read with a simple optical system or without using an optical element.

  The operation of the image capture 71 will be described. As the light passes through the light sensors in the cells 72 and 73, the light reaches the image to be read on the paper. Like the cell 72, the light 74 hitting the black ink hardly returns to the light sensor. On the other hand, most of the light 75 that hits a blank paper portion without black ink, such as the cell 73, is reflected back to the photosensor. As a result, the black and white of the paper can be determined from the output of the optical sensor.

  Further, when copying a book, it is often difficult for a conventional scanner to clearly copy an inner portion near the back of the book. However, according to the present invention, since the image capture 71 itself has mechanical flexibility, the entire page can be read without distortion.

  Further, since there is no mechanical part such as a movable part, as will be described later, manufacturing can be performed easily and at low cost. Further, the image capture 71 has an advantage of being lightweight and strong in impact resistance.

  FIG. 11 is a cross-sectional view of an example of a cell in an array of flexible sensing devices. In this cell, an organic transistor 82 and an optical sensor 83 are formed on a polymer film 81, and the cell is manufactured by the same manufacturing method as described in FIG.

  In this case, the organic transistor 82 has substantially the same structure as the organic transistor 53 (FIG. 6), but the gate electrode 84 is formed of a transparent electrode such as ITO for compatibility with the optical sensor 84. The optical sensor 83 is formed of a multilayer structure of ITO 85, a p-type organic semiconductor 86, an n-type organic semiconductor 87, and a cathode electrode 88 such as aluminum or ITO.

  The p-type organic semiconductor 86 may be made of any material different from the same material as the material constituting the channel of the organic transistor 82, and the n-type organic semiconductor 87 is made of NTCDI, for example.

  FIG. 12 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this cell, an organic transistor 92 having the same configuration as the organic transistor 82 (FIG. 11) and a photosensor 93 configured by an organic transistor instead of using a pn junction are provided on a polymer film 91.

  The organic transistor that constitutes the optical sensor 93 has the same configuration as the organic transistor 92. In this case, since the organic semiconductor layer can be formed once, the manufacturing process can be remarkably simplified. In the optical sensor 93, the organic semiconductor layer 94 that absorbs light is exposed, which is advantageous from the viewpoint of light transmittance.

  FIG. 13 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, a polymer film 101 that does not transmit light is provided on the organic transistor 92 and the optical sensor 93 formed on the polymer film 91, and a hole 102 is opened on the optical sensor 93. As described above, the operation is stabilized by preventing the organic transistor 92 from being exposed to light and applying the light only to the optical sensor 93.

  FIG. 14 is a cross-sectional view of another example of a cell of an array of flexible sensing devices. In this case, the optical sensor 103 has a configuration in which the gate electrode and the insulating film are omitted from the optical sensor 93 (FIGS. 12 and 13). When an organic transistor is manufactured by the manufacturing method described with reference to FIG. 5, it is preferable to minimize peeling of the gate insulating film in order to apply a gate insulating film such as polyimide by spin coating. In such a case, peeling can be omitted. Further, although the electrodes 104 and 105 are formed on the organic semiconductor layer 106 in FIG. 14, the electrodes 104 and 105 may be formed between the polymer film 91 and the organic semiconductor layer 106.

  FIG. 15 is a diagram illustrating characteristics of an optical sensor having a pn junction, and FIG. 16 is a diagram illustrating characteristics of an optical sensor having an organic transistor. In either case, the optical sensor responds according to the light intensity.

  An organic transistor formed on a flexible sheet such as a polymer film changes its current value when it is bent. As a result, the cell shown in FIG. 12 has a function of detecting distortion instead of light. In order to optimize the organic transistor for detecting strain, as shown in FIG. 17, on one surface of the polymer film 111, an organic transistor 112 having a switching function and a strain sensor 113 composed of the organic transistor are provided. And the polymer film 114 and the hard portion 115 are formed on the other surface of the polymer film 114. Providing the hard portion 115 under the organic transistor 112 makes it difficult for the characteristics to change due to strain, and providing the polymer film 114 under the strain sensor 113 makes it easier to detect strain.

  As shown in FIG. 18, by providing a polymer film 123 in which a portion corresponding to the organic transistor 121 having a switching function is made thick and a portion corresponding to the strain sensor 122 made of the organic transistor is made thin. A cell having a distortion detection function can also be configured.

  17 and 18, it is not necessary to form the gate electrode of the organic transistor from ITO. FIG. 19 shows that the characteristics of the organic transistor change due to strain. In FIG. 19, it can be seen that when the organic transistor is bent, the current-voltage characteristics change according to the curvature. As a result, it can be seen that the organic transistor can be applied to a strain sensor and an acceleration sensor (which will be described later).

  FIG. 20 is a circuit diagram when the cell of the array of the flexible detection device according to the present invention has an organic transistor and a capacitor. In FIG. 20, by having the organic transistor 131 and the capacitor 132, a sensor array of capacitance coupling can be realized. Such a configuration can be used for flexible touch panels, artificial skin, living body measurement, and the like.

  FIG. 21 is a cross-sectional view of a specific configuration of the circuit of FIG. In this case, one of the source electrode 142 and the drain electrode 143 of the organic transistor 141 is connected to the electrode 144 constituting the capacitor (in the case of FIG. 21, the drain electrode 143 is connected to the electrode 144). Thereafter, the electrode 144 is covered with an insulating film (protective film) 145. The capacitor electrode may be on any surface of the polymer film 146.

  FIG. 22 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, an organic transistor 152 having a switching function and a chemical sensor 153 having a three-terminal structure constituted by the organic transistor are integrated on the polymer film 151.

  FIG. 23 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, an organic transistor 162 having a switching function and a chemical sensor 163 having a two-terminal structure are integrated on the polymer film 161. The chemical sensor 163 includes a chemical sensor polymer.

  FIG. 24 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, an organic transistor 172 having a switching function and a chemical sensor 173 having a three-terminal structure constituted by the organic transistor are integrated on the polymer film 171. A polymer film 174 that does not transmit light is provided on the organic transistor 172 and the chemical sensor 173, and a hole 175 is formed on the chemical sensor 173. Thus, by exposing only the execution part of the chemical sensor 173, the operation is stabilized.

  FIG. 25 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, an organic transistor 182 having a switching function and a voltage sensor 183 configured by the organic transistor are integrated on the polymer film 181, and the voltage mapping of the object 184 is directly applied to the electrode 185. It is to be measured. The electrode may be formed on any surface of the polymer film 181.

  FIG. 26 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In the cell shown in FIG. 26, an organic transistor 192 is formed on one surface of a polymer film 191, and a polymer film 193 and a polymer film 194 are sequentially formed on the other surface. The electrodes 195 and 196 formed on the polymer films 191 and 194 constitute a capacitor.

  In this embodiment, it has a function of an acceleration sensor. Conventionally, an acceleration sensor using silicon MEMS has been proposed, but it is disadvantageous for an increase in area and mechanical flexibility.

  In order to be advantageous in increasing the area and mechanical flexibility, not only the switch part but also the acceleration sensor part needs to be flexible. In addition, it is desirable that a large area can be realized at a low price by using a printing technique or the like.

  Therefore, the acceleration sensor portion is realized by processing the polymer film so that the displacement can be measured. In the cell shown in FIG. 26, a membrane is formed with a polymer film 194, and a spring function is provided. The amount of displacement of the membrane is read from the change in capacitance.

  FIG. 27 is a cross-sectional view of another example of a cell in an array of flexible sensing devices. In this case, the organic transistor 202 having a switching function is formed on the thick part of the polymer film 201, and the acceleration sensor 203 composed of the organic transistor is formed on the thin part of the polymer film 201. Also in this case, the acceleration can be measured by sensing the displacement of the polymer film 201.

  FIG. 28 is a cross-sectional view of another example of cells of an array of flexible sensing devices. In this case, an organic transistor 212 having a switching function and a temperature sensor 215 composed of an alumel wire 213 and a chromel wire 214 thermocouple are formed on one surface of the polymer film 211.

  FIG. 29 is a cross-sectional view of another example of a cell in an array of flexible sensing devices. In the cell shown in FIG. 29, the organic transistor 222 is formed on one surface of the polymer film 221, and the polymer film 223 and the polymer film 224 are sequentially formed on the other surface. The electrodes 225 and 226 formed in the polymer film 223 constitute a capacitor.

  The polymer film 223 is made of a polymer material whose capacitance changes with humidity. As a result, it is possible to realize a humidity detection function that is advantageous for increasing the area and mechanical flexibility.

The present invention is not limited to the above-described embodiment, and many changes and modifications can be made.
For example, as the organic transistor, an organic transistor having an arbitrary configuration other than that used in the above embodiment can be used. Further, any type of sensor can be used in combination as a sensor.

  In the above-described embodiment, the case has been described in which the array is configured to be separable in units of rows and / or columns while maintaining the same function. However, bonding can be performed while maintaining the same function. be able to. In addition, the array peripheral circuits (row decoder and / or column selector) can be configured independently, so that the array can be mounted individually, so that an array of any size can be created efficiently. can do.

  Furthermore, the array can implement the present invention not only when the matrix is continuous, but also when there is an omission. For example, as shown in FIG. 30, in the array of cells of m rows and n columns, the present invention can be achieved even when there are missing cells in the m rows and n-1 columns and the cells in the m-1 to m rows and n columns. Can be realized.

  Artificial skin has pain points, warm points, and the like. Therefore, when each cell has a plurality of sensors as in the case where the flexible detection device according to the present invention is applied to artificial skin, access to the plurality of sensors becomes accessible by the same transistor, that is, the plurality of sensors It is preferable to share the transistor to be accessed.

  A case where each cell has a pressure sensor 301 and a temperature sensor 302 will be described. When a word line is shared to share an access transistor (not shown) connected to the word line (see FIG. 31A), and a bit There may be a case where an access transistor (not shown) connected to the bit line is shared by sharing the line (see FIG. 31B).

  Another flexible sensing device of the present invention comprises an array of cells of m rows and n columns (both m and n are natural numbers greater than or equal to 2), for each of these cells an organic transistor 321 and a plastic electrostatic cell. The actuator 322 is integrated, and the organic transistor 321 functions as a switch for driving the electrostatic actuator 322 (FIGS. 32 and 33).

  In this case, the organic transistor 321 is formed on one surface of the polymer film 323, and the polymer film 324 is formed on the other side. The actuator 322 has an electrode 325 and an electrode 327 on the back surface of the free-standing membrane 326. Note that an organic transistor 321 is formed on the surface opposite to the section 328.

  By coating the surface of the movable membrane 326 with a highly reflective metal or the like, it can be applied to an optical switch array, a display, or the like. It can also be used for wallpaper that can freely change the state of sound reflection.

  In addition, a device capable of applying a current locally, applying a voltage, heating, or applying a magnetic field can be formed on a flexible sheet (eg, a plastic sheet. As a result, the pulse without melting. 34, the organic transistor 332 and the heating (thermal printer) heater 333 are integrated on one surface of the polymer film 331. In the example shown in FIG. In this case, the heater 333 includes electrodes 334 and 335 and a heating resistor 336.

  The present invention is used in the fields of electronics, robotics, mechanical engineering and the like, and is applied to artificial skin and the like.

It is a figure which shows embodiment of the flexible detection apparatus by this invention. It is a figure for demonstrating operation | movement of the flexible detection apparatus of FIG. It is a figure which shows other embodiment of the flexible detection apparatus by this invention. It is a figure which shows a part of layout of a row decoder. It is a figure for demonstrating the manufacturing method of the cell of the array of a flexible detection apparatus. It is a figure for demonstrating the other manufacturing method of the cell of the array of a flexible detection apparatus. It is a figure for demonstrating the other manufacturing method of the cell of the array of a flexible detection apparatus. It is a figure which shows the voltage and electric current characteristic of the cell of the array of the flexible detection apparatus manufactured by the manufacturing method in any one of FIGS. It is a figure which shows the location dependence of the input-output characteristic of the sensor of the array of the flexible detection apparatus manufactured by the manufacturing method in any one of FIGS. It is a figure for demonstrating operation | movement of the flexible detection apparatus by this invention at the time of using an optical sensor. It is sectional drawing of an example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is a figure which shows the characteristic of the optical sensor which has a pn junction. It is a figure which shows the characteristic of the optical sensor which has an organic transistor. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. FIG. 6 is a cross-sectional view of another example of a cell of an array of flexible sensing devices. It is a figure which shows that the characteristic of an organic transistor changes with distortion. FIG. 3 is a circuit diagram in a case where a cell of an array of a flexible detection device according to the present invention includes an organic transistor and a capacitor. It is sectional drawing of the concrete structure of the circuit of FIG. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is a figure which shows the omission of the array of the flexible detection apparatus by this invention. It is a figure explaining the case where each cell has the pressure sensor 301 and the temperature sensor 302. FIG. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus. It is a top view of the other example of the cell of the array of a flexible detection apparatus. It is sectional drawing of the other example of the cell of the array of a flexible detection apparatus.

Explanation of symbols

1 array 2, 2 'row decoder 3, 3' column selector 11, 72, 73 cell 11a sensor 11b, 53, 63, 82, 92, 112, 121, 131, 141, 152, 162, 172, 182, 192 202, 203, 212, 222, 321, 332 Organic transistors 12a, 12b, 12c, 12d, 12e, 13a, 13b, 13c PMOS
21 row address input part 21a source / drain 21b gate 21c organic film 22 load part 22a via 23 connection part 31, 37, 41, 51, 56, 61, 64, 81, 91, 101, 111, 114, 123, 146 151,161,171,174,181,191,193,194,201,211,221,223,224,323,324,331 polymer film 32,84 gate electrode 33 gate insulating film 34,94,106 organic semiconductor Layer 35, 142 Source electrode 36, 143 Drain electrode 38, 52 Through-hole sheet 39, 54, 62 Pressure-sensitive conductive rubber sheet 40, 55, 65, 88, 104, 105, 133, 144, 185, 195, 196, 225 , 226, 325, 327, 334, 335 Electrode 71 Image Di capture 74 and 75 light 83,93,103 optical sensor 85 ITO
86 p-type organic semiconductor 87 n-type organic semiconductor 102,175 hole 113,122 strain sensor 115 hard portion 132 capacitor 145 insulating film (protective film)
153, 163, 173 Chemical sensor 184 Target 213 Alumel wire 214 Chromel wire 215, 302 Temperature sensor 301 Pressure sensor 322 Electrostatic actuator 326 Membrane 327 Classification 333 Heater 336 Heating resistance conductor

Claims (8)

comprising an array of cells of m rows and n columns (both m and n are natural numbers greater than or equal to 2);
Each of these cells has a detection means for detecting a predetermined physical quantity and / or chemical property, and an organic cell having a switching function connected to the sensor.   2. The detection unit includes at least one of a pressure sensor, a temperature sensor, an optical sensor, an acceleration sensor, a strain sensor, a magnetic sensor, a humidity sensor, a capacitor, a voltage sensor, and a chemical sensor. Flexible detection device.   A means for selecting a row and / or a column of the array is further provided, and the array is configured to be separable and / or pasted in a row unit and / or a column unit while maintaining the same function. The flexible detection device according to claim 1 or 2.   4. The flexible detection device according to claim 1, wherein peripheral circuits of the array are configured independently, and the array is configured to be individually attachable. 5.   The detection means includes at least two of a pressure sensor, a temperature sensor, an optical sensor, an acceleration sensor, a strain sensor, a magnetic sensor, a humidity sensor, a capacitor, a voltage sensor, and a chemical sensor, and at least two of these are: The flexible detection device according to claim 1, wherein the flexible detection device is configured to be accessible by the same transistor. comprising an array of cells of m rows and n columns (both m and n are natural numbers greater than or equal to 2);
Each of these cells has an actuator or a thermal printer heater and an organic cell having a switching function connected to the actuator or thermal printer heater.   A means for selecting a row and / or a column of the array is further provided, and the array is configured to be separable and / or pasted in a row unit and / or a column unit while maintaining the same function. The flexible detection device according to claim 6.   8. The flexible detection device according to claim 6, wherein peripheral circuits of the array are configured independently, and the arrays are individually attachable.

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