JP2005081453A - Assembling device for micro-part and droplet discharge head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an assembling device for micro-parts, reduced in size, cleaned in local space, reduced in cycle time, improved in the cleanliness of a work space, and improved in space efficiency, and a droplet discharge head assembled by the device. <P>SOLUTION: This assembling device for the micro-parts includes: a first loading module 50 for feeding a passage plate as a first part on a tray 51 to the next process; an adhesive application module 60 for applying an adhesive to the surface of the passage plate; an UV agent application module for applying an UV adhesive to a plurality of portions of the surface of the passage plate; a second loading module 80 for feeding a nozzle plate as a second part on a tray 81 to a jointing process; a joining module 90 for positioning the passage plate and the nozzle plate, and then pressurizing and joining them to cure the UV adhesive by exposure; and an unloading module 100 for discharging and storing a completed article formed by joining the nozzle plate and the passage plate to a tray 101. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a fine component assembling apparatus and a droplet discharge head.

  Some image forming apparatuses such as a printer, a facsimile machine, a copier, and a complex machine of these include a droplet discharge head that discharges droplets to an image forming unit. As a droplet discharge head, as a driving means for generating energy for pressurizing the liquid in the flow path, a diaphragm that forms the wall surface of the flow path is deformed by using a piezoelectric actuator including a piezoelectric element, and the volume in the flow path Pressure generated by generating bubbles by heating the liquid in the flow path using a so-called piezo-type device that changes the pressure and discharging a droplet, or a thermal actuator that includes a heating resistor (electrothermal transducer) A so-called thermal type that discharges liquid droplets with a liquid, or an electrostatic actuator that deforms the diaphragm that forms the wall surface of the flow path with electrostatic force, deforms the diaphragm and changes the volume in the flow path to change the liquid volume. An electrostatic type that discharges drops is known.

  Here, as a piezo head, a plurality of piezoelectric elements are provided on a substrate, a displacement portion of a vibration plate is joined to the piezoelectric element, and a flow path plate for forming the vibration plate and a liquid chamber is joined. The nozzle plate is joined to the flow path plate so that each nozzle corresponds to the displacement portion of the vibration plate, and the piezoelectric element is driven to pressurize the liquid in the liquid chamber via the vibration plate. There are some which discharge droplets from the nozzles.

  In such a head, in order to achieve high density and high quality recording, it is necessary to assemble various fine parts such as nozzle plates, flow path plates, diaphragms, and piezoelectric elements, which are components constituting the head, with high accuracy. is there. In order to realize these high-precision assemblies, various assembling apparatuses have been proposed.

For example, as an article assembling method in the process division type assembling apparatus, the position of the first member is measured by the first position detecting means arranged at the second work station, and the first member is based on the result. In order to measure the position of the second member, the position of the second position detecting means arranged at the third station is measured each time the second member is moved from the second station to the third station. What moves a position detection means is known.
Japanese Patent No. 02739885

Further, as an assembly apparatus for fine parts, a first station for supplying parts, a second station for applying adhesive, a third station for joining two parts, and a fourth station for discharging the joined assembly. The stations are sequentially arranged, the second station is provided with a position detecting means and a positioning means for positioning at the adhesive application position, and the third station is provided with a holding means for holding the other fine parts and holding the holding means. A moving mechanism for reciprocally moving the means between the other parts supply side, a position detecting means capable of measuring the position of the two parts, and a position adjusting means for adjusting the position of one of the parts based on the result. Things are known.
Japanese Patent Laid-Open No. 10-277853

Furthermore, as a clean work module and a clean tunnel, in the clean work module 1 in which a work unit is attached to a clean space to which clean air of a downflow is supplied and a predetermined work is performed by the work unit in the clean space, A body wall that forms a space and is provided with an opening on the side opposite to the working port, and a moving unit that can be combined and moved from the side opposite to the working port so as to cover the opening. It is known to attach a work unit to the machine.
JP 2001-343140 A

Similarly, as a clean work module and a clean tunnel, the work unit is mounted so as to protrude from the main body wall part on the rear side in the depth direction defining the clean space toward the inside of the clean space. Constructed so that the downflow clean air that has passed through the unit flows smoothly downward in a uniform laminar flow and is smoothly discharged to the outside of the module through the air exhaust provided at the lower side of the clean space In addition, the pressure in the booth for the worker is maintained at a pressure higher than the pressure outside the module and lower than the pressure in the clean space by the spatial partitioning action of the sheet covering the booth for the worker. Such a structure is known that achieves a high level of cleanliness in a clean space.
JP 2002-195620 A

Furthermore, similarly, as a clean work module and a clean tunnel, the air delivery surface of the outlet surface filter is curved substantially radially along at least the width direction orthogonal to the depth direction, and the flow of downflow fed from the air delivery unit By configuring the clean air to be sent out at least substantially radially in the width direction, the downflow clean air fed from the air delivery surface of the outlet surface filter is at least in the width direction in the clean space. It is known that it can be fed satisfactorily over the entire width and a uniform down flow can be obtained.
JP 2002-195636 A

  However, in the article assembling method in the process division type assembly apparatus described in Patent Document 1 described above, the detection means for position measurement has two detection systems, a first detection means and a second detection means. It is used to adjust the position of the member. In this way, the two parts are not directly measured, but the position of the two detection means is grasped using calibration parts and the members are indirectly adjusted. As a result, the assembly accuracy may not be ensured. Further, since the second position detection means is moved every time in accordance with the position of the first member, there is a problem that a detection error due to the movement of the detection means occurs and assembly accuracy cannot be ensured.

  Further, the assembly apparatus for fine parts described in Patent Document 2 has position detection means that can image two parts at the same time, and adjusts the position of the other part with reference to one part with high accuracy. Although the assembly has been realized, the screen printing method is adopted as the adhesive application means, and maintenance such as adhesive replacement, screen cleaning, and screen replacement is required every predetermined time. During the period, the device goes down, the operation rate of the entire device is lowered, and the productivity is lowered. In addition, since the transfer device sequentially transfers parts between a plurality of work stations, the transfer distance becomes large, and in order to convey at high speed, the rigidity and size of the device must be increased. As a result, the apparatus becomes large, and the installation space increases with an increase in apparatus cost, resulting in a decrease in space efficiency. Furthermore, the formation of a clean environment necessary for assembling fine parts also increases the overall space volume compared to the required clean volume in the work area, making it difficult to form an optimal downflow of clean air in the work area. Furthermore, in order to secure the necessary number of ventilations, there is a problem that the amount of clean air blown increases and the air supply unit becomes large.

  Further, in the clean work module and the clean tunnel described in Patent Documents 3 to 5, the clean environment and the clean bench are necessary as a method for forming a clean environment necessary for assembling the fine parts. The overall space volume is larger than the originally required cleaning volume in the work area, and it is difficult to form an optimal downflow of clean air in the work area. Furthermore, in order to ensure the required number of ventilations, the amount of clean air blown increases, and the air supply unit becomes large. In addition, since the clean space is a continuous structure, there is a problem that dust is scattered to other work areas adjacent to each other at the time of troubles such as equipment and jigs and maintenance, and the cleanliness is lowered.

  The present invention has been made in view of the above-described problems, and can achieve downsizing and local cleanliness, thereby reducing tact time, improving the cleanliness of the work space, and improving the space efficiency. An object of the present invention is to provide a high-quality, low-cost and high-productivity fine-part assembly apparatus, and a droplet discharge head that can be assembled by this fine-part assembly apparatus.

  An apparatus for assembling a fine component according to the present invention includes a first component supply unit that inputs a first component, a second component supply unit that inputs a second component, a first component, and a second component. An adhesive application means for applying an adhesive to one of the parts, and an adhesive application means for temporary fixing for applying a temporary adhesive for temporarily adhering the first part and the second part to the surface of the one part; The first component position detecting means for detecting the position detection reference of the first component, the second component position detecting means for detecting the position detection reference of the second component, the first component and the second component Based on the position detection result, the position adjusting means for adjusting the position of the second part, the joining means for pressure joining the two parts after performing the position adjustment, and the temporary fixing adhesive are cured. A temporary fixing means for temporarily bonding the first part and the second part, and the first part and the second part are completed after the joining is completed. A discharge means for discharging the product, detecting a position detection reference provided for each of the first component and the second component, adjusting the position of the component based on the detection result, An apparatus for assembling fine parts to be bonded and bonded, wherein a first component supplying means, a second component supplying means, an adhesive applying means, a temporary fixing adhesive applying means, a joining means and a discharging means are each provided with predetermined operations. Are composed of modules that are independent of each other and are composed of the components necessary to complete the process.

  Here, both of the two parts can be parts constituting the droplet discharge head.

  Moreover, it is preferable that the modules are individually equipped with a conveying means for sequentially conveying components between the modules. Further, the module is preferably a shield structure that is isolated from the outside air and each adjacent module, and is preferably equipped with a clean unit for supplying a predetermined amount of clean air into the module. Furthermore, the module preferably includes one or a plurality of exhaust means for forcibly exhausting a predetermined amount of internal air in the module to a room outside the module or to an exhaust pipe.

  Moreover, it is preferable that the module has a positioning means for determining a relative position with each adjacent module. Further, the module preferably has module fastening means for maintaining a relative position with each adjacent module, and the module can be attached / detached by this fastening means. Furthermore, it is preferable that the components constituting the module can be controlled independently of the other modules by the control means provided individually for each module. Moreover, it is preferable that it is comprised on a desktop.

  In the liquid droplet ejection head according to the present invention, a nozzle plate having a plurality of nozzles for ejecting liquid droplets and a flow path plate in which a liquid chamber corresponding to each nozzle is formed are joined by the micropart assembly device according to the present invention. It was set as the structure which was made.

  According to the fine component assembling apparatus of the present invention, since a plurality of work stations are divided into processes, and at the same time, each work station has a module structure having an autonomous structure and a control function. It is possible to reduce the tact time, improve the cleanliness of the work space, improve the space efficiency, and obtain a high-quality, low-cost and highly productive assembly device for fine parts. It is done.

  Since the droplet discharge head according to the present invention is assembled by the fine component assembling apparatus according to the present invention, high reliability can be obtained.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. First, an example of a droplet discharge head in which fine parts are assembled by the fine part assembling apparatus according to the present invention will be described with reference to FIGS. 1 is a schematic configuration diagram of the head, FIG. 2 is an explanatory plan view of a flow path plate of the head, FIG. 3 is an explanatory plan view of a nozzle plate of the head, and FIG. 4 is a joined liquid chamber unit of the head. It is plane explanatory drawing seen from the nozzle plate side when it did.

  The droplet discharge head 1 includes a liquid chamber unit 2 and a drive unit 3. The liquid chamber unit 2 includes a nozzle plate 11 in which a plurality of nozzles 40 for discharging droplets are formed, a flow path plate 12 in which a liquid chamber (discharge chamber) 30 with which each nozzle 40 communicates, and a liquid chamber 30. It is comprised with the diaphragm 13 which forms a wall surface. The drive unit 3 alternately joins the other end portions of the plurality of piezoelectric elements (drive portions) 14a and the column portions 14b to the substrate 15 at a predetermined interval, and connects one end portion of the piezoelectric elements 14a to the liquid chamber 30. Correspondingly, it is joined to the outer surface side of the diaphragm 13, and one end portion side of the support column part 14 b is joined to the outer surface side of the diaphragm 13 corresponding to the liquid chamber interval wall 31.

  Here, the nozzle plate 11, the flow channel plate 12, and the vibration plate 13 constituting the liquid chamber unit 2 are bonded and bonded with high accuracy by an adhesive 16 applied to the front and back surfaces of the flow channel plate 12. Further, each piezoelectric element 14a and the column portion 14b of the drive unit 3 are adhesively bonded to the vibration plate 13 of the liquid chamber unit 2 with an adhesive 16 on the upper surface.

  In this droplet discharge head, a liquid, for example, ink is supplied to the liquid chamber 30 of the liquid chamber unit 2, and the droplet is discharged from the corresponding nozzle 40 by driving the required piezoelectric element 14 a.

  The position adjustment of the nozzle plate 11 and the flow path plate 12 will be described with reference to FIGS. As shown in FIG. 2, position detection reference marks 22 a are formed at both ends of the flow path plate 12. On the other hand, as shown in FIG. 3, position detection reference marks 21 made of through holes are also formed at both ends of the nozzle plate 11.

  Therefore, after detecting the mark 22a of the flow path plate 12 and the mark 21 of the nozzle plate 11 and calculating the center of gravity of each by image processing, the center of gravity of the flow path plate 12 is matched with the center of gravity of the nozzle plate 11. Then, the alignment (position correction) between the nozzle plate 11 and the flow path plate 12 is completed by correcting the position error amount XYθ of the flow path plate 12. Thereafter, the nozzle plate 11 and the flow path plate 12 are pressurized, and the adhesive 16 is pressed and joined. After the joining, as shown in FIG. 4, the position detection reference mark 22 a of the flow path plate 12 is aligned with high accuracy in the nozzle plate position detection reference mark 21.

  Since the flow path plate 12 and the vibration plate 13 are aligned in the same manner as the nozzle plate 11 and the flow path plate 12 described above, position detection reference marks 22b are formed at both ends of the flow path plate 12. Position detection reference marks 23 made of through holes are also formed at both ends of the diaphragm 13 and are joined by the same position adjustment method as described above.

Next, a fine component assembling apparatus according to the present invention will be described with reference to FIGS. 5 is an explanatory perspective view of the assembling apparatus, FIG. 6 is an explanatory plan view of the assembling apparatus, FIG. 7 is an explanatory plan view of essential parts of the assembling apparatus, and FIG. 8 is an explanatory front view of FIG.
Here, as an example, the assembly of a nozzle plate and a flow channel plate, which are components of a droplet discharge head, will be described as two components. The flow path plate is a first component, and the nozzle plate is a second component.

  This fine component assembling apparatus applies a first loading module 50 as a first component supply means for supplying a flow path plate, which is a first component on a tray, to the next process, and an adhesive on the surface of the flow path plate. An adhesive application module 60 that is an adhesive application means, and a UV agent application module 70 that is a temporary adhesive application means for applying a UV adhesive that is a temporary adhesive to a plurality of locations on the surface of the flow path plate. The second loading module 80 as the second component supply means for supplying the nozzle plate as the second component on the tray to the joining process, the flow path plate and the nozzle plate are adjusted in position, and then pressure bonded. A joining module 90 which is a joining means for exposing and curing the adhesive and an unloading module 100 which is a discharging means for discharging and storing the finished product obtained by joining the nozzle plate and the flow path plate to the tray are configured.

  Therefore, the configuration and operation of each part of the fine component assembling apparatus will be described with reference to FIGS. FIG. 9 is a flowchart for explaining the process of the assembling apparatus, and FIG. 10 is a flowchart for explaining the operation of the assembling apparatus.

  The first loading module 50 includes at least two trays 51 in which a plurality of flow path plates are stored. The transfer unit 52 includes a vacuum suction chuck unit (not shown) for gripping the flow path plate placed on the tray 51, a pitch feed mechanism for sequentially taking out from the tray, a lifting mechanism, and a turning mechanism.

  Here, the plurality of trays 51 are automatically switched to the other channel plate tray 51 when the channel plate on one tray 51 becomes empty, and can be continuously inserted. In this embodiment, two trays 51 are arranged vertically, empty trays are discharged to the near side, and another full tray 51 is raised to the transfer position from below and is loaded by the transfer unit 52. Will continue.

  The empty tray 51 discharged to the near side is taken out from the loading module 50 by the operator, and a new full flow path plate tray 51 is set instead. The arrangement of the plurality of trays is not limited to the vertical arrangement as in the present embodiment, and a planar arrangement is also possible. In this case, the tray changing method is flat for both the empty tray and the full tray. Will move on. In the present embodiment, a vertical arrangement capable of a minimum installation area is adopted.

  Then, the first loading module 50 sequentially transfers the flow path plates on the tray 51 one by one by means of gripping means such as vacuum suction of the transfer unit 52, and applies the application table 61 of the adhesive application module 60 in the next process. Placed on.

  The adhesive application module 60 includes an application table 61, a channel plate positioning mechanism, an application unit 62, a channel plate gripping mechanism, a table moving mechanism, and a transfer unit 63. The flow path plate supplied from the previous process is placed on the application table 61, positioned in two directions XY by a positioning mechanism (not shown), and the flow path board is sucked and held by a vacuum suction mechanism built in the application table 61. To do.

  In this embodiment, the coating unit 62 transfers a predetermined amount of adhesive onto the relief plate, and then applies the relief plate to the surface of the flow path plate by a flexographic printing method. The channel plate positioned at a predetermined position is moved to the application unit 62 by the table moving mechanism, and is pressed against the relief plate of the application unit 62 to apply the adhesive. Thereafter, the application table 61 moves to the transfer position for the next process.

  The transfer unit 63 has a vacuum suction chuck unit (not shown) for gripping the flow path plate placed on the coating table 61, and a single axis for transporting to the position of the UV coating table 71 of the UV coating module 70 in the next process. It consists of a feed mechanism and a lifting mechanism.

  The flow path plate coated with the adhesive is vacuum-sucked and gripped by the transfer unit 63, moved by a predetermined distance by the lifting mechanism and the single-axis feed mechanism, and transferred to the UV coating table 71 in the next process. Is done.

  The UV agent application module 70 includes an application table 71 for placing the flow channel plate, a positioning mechanism for positioning the flow channel plate at a predetermined position, an application nozzle 72 for discharging the UV agent, and a movement of the application nozzle 72 in the XY direction. It comprises a coating unit 73 for moving up and down, a coating controller for controlling the amount of UV agent discharged from the coating nozzle, a flow path plate gripping mechanism, a table moving mechanism, and a transfer unit 74.

  The flow path plate supplied from the previous process is placed on the application table 71, positions in two directions XY are determined by a positioning mechanism (not shown), and the flow path plate is moved by a vacuum suction mechanism built in the application table 71 (not shown). Hold by adsorption. The coating unit 73 discharges a predetermined amount of UV agent determined in advance by a coating controller (not shown) from the coating nozzle 72, moves the coating nozzle 72 by a predetermined amount in the XY2 direction, and moves the coating nozzle 72 to a predetermined position on the surface of the flow path plate. Apply over areas. In the present embodiment, a coating method is adopted in which the coating is performed by a constant discharge dispenser by air pressure control.

  The transfer unit 74 includes a vacuum suction chuck unit (not shown) for gripping the flow path plate placed on the coating table 71, a single-axis feed mechanism for transporting to the position of the UV coating table 71 in the next process, and a lifting mechanism. Consists of. The flow path plate coated with the adhesive and UV agent on the surface is vacuum-sucked and held by the transfer unit 74, moved by a predetermined distance by an elevating mechanism and a single-axis feed mechanism, and a joining module 90 in the next process. Are transferred to the flow path plate temporary placement table 91.

  The second loading module 80 includes at least two trays 81 in which a plurality of nozzle plates are stored. The nozzle plates on the tray are sequentially transferred one by one by the transfer unit 82 by gripping means such as vacuum suction and placed on the nozzle plate temporary placement table 94 of the joining module 90 in the next process.

  The plurality of trays 81 are automatically switched to the other nozzle plate tray 81 when the nozzle plate on one tray 81 becomes empty, and can be continuously inserted. In this embodiment, two trays 81 are arranged vertically, and the empty tray 81 is discharged to the front side. Instead, another full tray 81 rises to the transfer position from below, and is transferred by the transfer unit 82. The input is continued.

  The empty tray 81 discharged to the front is taken out from the second loading module 80 by the operator, and a new full nozzle plate tray 81 is set instead. The arrangement of a plurality of trays is not limited to the vertical arrangement as in this embodiment, and a planar arrangement is also possible. In this case, the tray changing method moves on the plane for both empty and full trays. Will do. In the present embodiment, a vertical arrangement capable of a minimum installation area is adopted.

  The transfer unit 82 includes a vacuum suction chuck unit (not shown) for gripping a nozzle plate placed on the tray 81, a pitch feed mechanism for sequentially taking out from the tray, a lifting mechanism, and a turning mechanism.

  The joining module 90 optically detects the flow path plate and the nozzle plate to which the adhesive is applied, aligns the alignment marks of these two parts by image processing, and then pressurizes and bonds the UV adhesive. In order to cure, the passage plate temporary placing table 91, the finished product temporary placing table 92, the joining table 93, the passage plate positioning mechanism (not shown), the joining table position adjusting mechanism (XYθ axis), the joining table pressurizing mechanism (Z axis). ), An image processing device, a UV exposure device, a nozzle plate temporary placement table 94, a nozzle plate positioning mechanism, a nozzle plate delivery mechanism, a transfer unit 95, a nozzle plate transfer index 96, and an alignment mark detection camera 97.

  A flow path plate sent from the previous process is placed on the flow path plate temporary placement table 91. The transfer unit 95 transfers the temporary flow path plate table 91 to the joining table 93 by holding the flow path plate by gripping means such as vacuum suction. The position of the flow path plate in the XY2 direction is determined by a flow path plate positioning mechanism (not shown).

  On the other hand, the nozzle plate supplied from the second loading module 80 is positioned on the nozzle plate temporary placement table 94 in the XY2 direction by a positioning mechanism (not shown), and then transferred to the nozzle plate by the nozzle plate delivery mechanism. Passed to the index 96.

  The nozzle plate transfer index 96 is rotated 180 degrees after the nozzle plate is sucked and held by a vacuum suction mechanism (not shown), and moves above the joining table 93 on which the above-described flow path plate is placed. Thereafter, the nozzle plate alignment mark 21 is detected by the two alignment mark detection cameras 97, the center of gravity of the alignment mark is calculated by the image processing apparatus, and the target coordinates for the joint position adjustment are obtained. Subsequently, the alignment mark 22a of the flow path plate on the bonding table 93 is detected by the alignment mark detection camera 97, and similarly, the flow path plate reference position for adjusting the bonding position is obtained by image processing.

  Next, the joining table 93 is moved by a joining table position adjusting mechanism (XY axis) (not shown) so as to match the channel plate reference position with the nozzle plate target coordinates, and the position of the nozzle plate and the channel plate is adjusted. Thereafter, the nozzle plate and the flow path plate are pressed and bonded to each other by a bonding table pressurizing mechanism (Z-axis).

  Further, the UV agent is irradiated with ultraviolet rays for a predetermined time and cured by a UV exposure device (not shown). The finished product in which the nozzle plate and the flow channel plate are temporarily joined is finished from the joining table 93 by a transfer unit 95 including a vacuum suction chuck unit (not shown), a single-axis feed mechanism, and a lifting mechanism for holding the nozzle plate and the flow path plate. It is placed on the temporary placement table 92.

  In the configuration of the main joining process, the delivery operation from the loading of the nozzle plate to the nozzle plate transfer index 96 and the alignment and joining operation from the transfer of the flow path plate can be performed in parallel, and the tact time of the joining step is shortened. Can be planned.

  The unloading module 100 includes at least two trays 101 that can store a plurality of finished products. As described above, the finished product joined by the joining module is placed on the finished product temporary placement table 92. The transfer unit 102 includes a vacuum suction chuck unit (not shown) for gripping a finished product, a pitch feed mechanism for sequentially storing in a tray, a lifting mechanism, and a turning mechanism.

  The transfer unit 102 holds the finished products on the finished product temporary placement table 92 by gripping means such as vacuum suction and sequentially stores them one by one in the finished product tray 101.

  The plurality of trays 101 are automatically switched to the other finished product tray 101 when the finished product on one tray 101 is full, and can be continuously stored. In this embodiment, two trays 101 are arranged vertically, and a full tray is discharged to the near side, and another empty tray rises to the transfer position from below, and the transfer unit 102 continues to store the tray. It is assumed to be configured. The full tray 101 discharged to the front is taken out from the unloading module 100 by the operator, and a new empty finished product tray is set instead. The arrangement of the plurality of trays is not limited to the vertical arrangement as in this embodiment, and a planar arrangement is also possible. In this case, the tray changing method moves on the plane for both empty trays and full trays. It will be. In the present embodiment, a vertical arrangement capable of a minimum installation area is adopted.

  In this way, the assembly device detects the position detection reference provided for each of the first component and the second component, adjusts the position of the component based on the detection result, and adhesively joins the two components. The first component supplying means, the second component supplying means, the adhesive applying means, the temporary fixing adhesive applying means, the joining means, and the discharging means are composed of components necessary for completing a predetermined operation, independent of each other. With this modular structure, it is extremely easy to replace, delete, and add new modules in a short time if necessary, in order to cope with parts changes, process changes, etc. caused by differences in production models. Can be done.

  As a result, the setup time for changing the production model associated with the fluctuation of the production amount can be greatly shortened, the downtime of the apparatus can be shortened, and the operating rate can be improved.

  Here, the two parts are components of the droplet discharge head, and the assembly device for the above-mentioned fine parts is used as the droplet discharge head assembly device, so that the module can be replaced, deleted, or new module as necessary. Can be easily added.

  For example, in the above embodiment, the flow path plate surface supplied from the flow path plate tray module 50 between the first component supply means (flow path plate tray module 50) and the adhesive application means (adhesive application module 60). A cleaning module for cleaning the adhesive-coated surface can be added.

  Alternatively, a joining position inspection module for inspecting the joining position accuracy of the nozzle plate 11 and the flow path plate 12 which is conveniently joined by the joining module 90 is added between the joining module 90 and the discharging means (finished product tray module 100). Good products can be eliminated.

  In this way, the setup time for changing the production model due to process changes due to model differences and production volume fluctuations can be greatly shortened, and the apparatus downtime can be reduced, resulting in a highly efficient droplet discharge head. The assembling apparatus can be configured.

Next, a module built-in type transport unit in the above-described fine component assembling apparatus will be described with reference to FIGS.
The transport unit in this assembling apparatus has two types of transfer units 52, 82, 102 with built-in tray modules and transfer units 63, 74, 95 with built-in adhesive coating modules, UV coating modules, and bonding modules. Consists of 6 units.

  The transfer units 52, 82, and 102 carry parts between the tray and the module, and include a parts gripping mechanism such as a vacuum suction chuck, a pitch feed mechanism, a lifting mechanism, and a turning mechanism. The transfer units 63, 74, and 95 transfer components between modules, and include a component gripping mechanism 200 such as a vacuum suction chuck, a single-axis feed mechanism 201 for transporting to the next process table position, and an elevating mechanism 202. Composed.

  This transport unit has a function of transferring parts from its own module predetermined position to the next module predetermined position, and all have a built-in structure in the module. In the assembly apparatus for fine parts of this embodiment, all the modules (six modules in the example) 50, 60, 70, 80, 90, 100 constituting the apparatus are all equipped with a transport unit as described above. In addition to performing the process in its own module, it has a transfer function to the next module.

  In this way, by providing each module with a transport means for sequentially transporting parts between modules, it is possible to transfer parts from a predetermined position of the module to a predetermined position of the next module in units of modules. As a result, a series of work steps from parts introduction to processing (assembly) discharge is completed in one module.

  It is extremely difficult to change the process in the case of parts transfer methods such as orthogonal robot transfer, walking beam transfer, etc. as in the past, and it is necessary to replace the transfer device, increasing the equipment cost and generating large downtime. Is extremely inefficient. On the other hand, in this apparatus, processes such as addition, deletion, and rearrangement can be changed in units of modules, and a production system with excellent flexibility can be constructed.

  Next, local cleaning in the above-described fine component assembling apparatus will be described with reference to FIGS. 5, 11, and 12. 11 is an explanatory front view for explaining the local clean structure of the apparatus, and FIG. 12 is an explanatory side view showing the internal transmission state of FIG.

  In this apparatus for assembling fine parts, each module 50, 60, 70, 80, 90, 100 constituting the apparatus is outside air except for a work space opening necessary for transferring parts between adjacent modules and taking in and out the tray. And the structure which became the clean booth 302 covered with the shielding board etc. so that it may isolate from each adjacent module is comprised.

  One or a plurality of clean units 300 (300a to 300f, etc.) composed of a filter 311 and a blower fan 312 are provided on the upper surface of the booth 302, and a predetermined amount of clean air is constantly supplied into the module. Further, in the lower part of the module, one or a plurality of exhaust fans 301 (only 301a to 301d are shown in FIG. 11) for forcibly exhausting a predetermined amount of air inside the module into a room outside the module or an exhaust pipe or the like at a predetermined time. ) Is installed.

  Each booth 302 optimizes the amount of clean air supplied by the clean unit 300, the amount of outflow from the opening, and the amount of forced exhaust by the exhaust fan 301 corresponding to the volume of each booth. At the same time as a positive pressure state of approximately 10 Pa, it is possible to form a clean air downflow from the top to the bottom of the components in the module.

  As described above, each module constituting the assembling apparatus is a clean structure having a shielding structure that is isolated from the outside air and each adjacent module except for a work space opening necessary for transferring parts between adjacent modules and taking in and out the tray. A booth is configured, each having a clean unit for supplying a predetermined amount of clean air into the module, and exhaust means for forcibly exhausting the air in the module to a room outside the module or to an exhaust pipe, etc. By installing the module, the amount of clean air supplied by the clean unit, the amount of outflow from the opening, and the forced exhaust amount by the exhaust means are optimized to keep the inside of the module at a predetermined positive pressure. On the other hand, it is possible to form a clean air downflow from above to below.

  And by providing these clean units and exhaust means independently for each module, it is possible to form an independent clean space for each module, so air supply is combined with minimizing the volume of the module. A good downflow airflow can be easily formed by optimizing the amount and the displacement.

  Furthermore, even if the clean space is destroyed in a specific module due to device troubles, maintenance, etc., the clean state is maintained by an independent clean unit in other modules, and contamination adherence to in-process parts of the line is prevented.

  In this way, the formation and maintenance of a clean environment can be easily achieved, and contamination can be prevented from adhering to the assembled product, thereby improving the yield.

Next, a module positioning and fastening method in this fine component assembling apparatus will be described with reference to FIGS. 13 is an explanatory plan view for explaining the positioning and fastening method, and FIG. 14 is an explanatory side view for explaining another example of the positioning and fastening method.
Each module 50, 60, 70, 80, 90, 100 constituting this assembling apparatus holds a module positioning means for determining a relative position with each adjacent module and a relative position with each adjacent module. Module fastening means is provided.

  In the example shown in FIG. 13, one module (referred to as module A) is provided with a plurality of concave positioning holes 401, and the other module (referred to as module B) opposed thereto has a plurality of convex shapes. The positioning pins 400 are arranged, and the positioning pins 400 of the module B are inserted and fitted into the positioning holes 401 of the module A, whereby the relative positions of the modules A and B are determined.

  Then, after the relative positions of the modules A and B are determined by the module positioning mechanism (module positioning means constituted by the hole 401 and the pin 400), the table or the like is fixed by the module fastening means 402a to 402d such as a plurality of screws and bolts. The relative positions of the modules A and B are held and fixed to the common base member 500.

  Next, in the example shown in FIG. 14, a plurality of convex positioning pins 404 a and 404 b are arranged in a predetermined position corresponding to each module position in advance on a common base member 500 such as a table, and on the bottom of each module. A plurality of concave positioning holes 405 are provided at positions facing the reference pins 404a and 404b, and the positioning pins 404 are inserted and fitted into the positioning holes 405 to determine the relative positions of the modules A and B. Is.

  Then, after the relative position of each module is determined by the module positioning mechanism (module positioning means constituted by the hole 405 and the pins 404a and 404b), the module is attached to the table or the like by the gripping means 403 which is a module fastening means such as a toggle clamp. A relative position between the modules is held and fixed on the common base member 500.

  In this way, each module 50, 60, 70, 80, 90, 100 can be easily attached to and detached from the common base member 500 such as a table, and relative positioning of each module can be easily performed.

  Thus, each module is provided with positioning means for determining the relative position with each adjacent module, and with module fastening means for maintaining the relative position between each adjacent module. The relative position of each module can be held and fixed on the base member.

  Thus, each module can be easily attached and removed at a predetermined position by the positioning means and the fastening means. Thereby, in order to cope with a change in parts, a change in process, and the like caused by a difference in production model, replacement and deletion of the module and addition of a new module can be performed very easily in a short time. Therefore, it is possible to greatly shorten the setup time for changing the production model due to the fluctuation of the production amount, to reduce the downtime of the apparatus, and to operate the assembly apparatus for fine parts at a high operation rate. .

Next, an independent control method of each module in the fine component assembling apparatus will be described with reference to FIG.
Each of the modules 50, 60, 70, 80, 90, and 100 constituting the assembling apparatus is for causing a motor, a sensor, a mechanism, a device, or the like constituting the module to perform a predetermined operation for each module. The control device 600 (600a to 600f) such as PLC is individually provided.

  Each control device 600 is connected by a data link 603 between modules in order to avoid operation interference with adjacent modules in each module and to control operation timing between the modules, and the data link 603 is also connected to the operation panel 602. Connected. Furthermore, each module is connected to a network 604 such as Ethernet (registered trademark), and can collect and manage operation data such as operation data and machining data.

  In this way, the plurality of modules are individually provided with a control device such as a PLC for causing the motor, sensor, mechanism, equipment, etc. constituting the module to perform a predetermined operation in advance. By controlling the corresponding module independently of the module, it becomes easy to collect and manage operation data such as operation data and machining data.

  As a result, even when a module is exchanged, deleted, or a new module is added in order to cope with a process change or the like, debugging such as operation confirmation of the module can be completed offline in advance. In addition, even when the module is incorporated into the system, it can be incorporated with little change in the control program of the entire system, and the downtime of the equipment accompanying the process change is reduced, resulting in a high operating rate and flexibility. It is possible to provide an assembly device for fine parts having a high height.

Here, a specific configuration example in the case of assembling the nozzle plate and the flow path plate constituting the droplet discharge head will be described.
In this case, the size of the component is approximately 20 to 30 mm in the long dimension, 10 mm in the short dimension, and 1 mm in thickness. This component is stored in units of 10 to 20 in the tray described above. The tray dimensions are approximately 200 to 300 mm in the longitudinal dimension, 50 to 60 mm in the short dimension, and 5 to 10 mm in thickness.

  In this case, the modules 50, 60, 70, 80, 90 correspond to minute parts such as a nozzle plate and a flow path plate by minimizing mechanisms and devices necessary for processing, assembly, etc., such as conveyance, positioning, and adhesive application. , 100 is miniaturized.

  The external dimensions of each module here are as follows. Tray modules 50, 80 and 100 have a width of 150 mm, a depth of 650 mm, and a height of 800 mm. An adhesive application module 60 has a width of 450 mm, a depth of 450 mm and a height of 800 mm. A UV agent application module has a width of 150 mm, a depth of 650 mm, and a height of 800 mm. The module 90 has a width of 250 mm, a depth of 450 mm, and a height of 800 mm.

  The external dimensions of the entire system (the entire apparatus) on which these six modules 50, 60, 70, 80, 90, 100 are mounted are 1100 mm in width, 700 mm in depth, and 800 mm in height. As a result, this assembling apparatus can be easily configured on a table (utility disk) 700 as shown in FIG.

  In this way, it is possible to reduce the size of each module by minimizing the mechanism and equipment required for processing, assembly, etc., handling, positioning, adhesive application etc. corresponding to fine parts, and assembling apparatus composed of predetermined modules By configuring it on the desktop, the installation space of the system can be greatly reduced, and the factory space can be effectively utilized. In addition, since it is a small desktop system, it is possible to move within and between factories, change the layout, etc. very easily and in a short time, and a system with excellent flexibility and expandability can be constructed.

It is a schematic block diagram which shows an example of the droplet discharge head assembled with the assembly apparatus of the fine components based on this invention. It is plane explanatory drawing of the flow-path board of the head. It is a plane explanatory view of the nozzle plate of the head. It is plane explanatory drawing seen from the nozzle plate side when the liquid chamber unit of the head is joined. BRIEF DESCRIPTION OF THE DRAWINGS It is an external appearance perspective explanatory drawing which shows the whole structure of the assembly apparatus of the fine components based on this invention. It is a plane explanatory view of the assembly apparatus. It is plane explanatory drawing of the conveyance unit of the assembly apparatus. It is a side explanatory view similarly. It is a flowchart explaining the assembly process by the assembly apparatus. It is a flowchart explaining operation | movement of the assembly apparatus. It is front explanatory drawing explaining the structure of the local clean means of the assembly apparatus. It is side surface explanatory drawing similarly shown in the internal permeation | transmission state of FIG. It is plane explanatory drawing explaining an example of the positioning means and fastening means of the assembly apparatus. It is a plane explanatory view explaining other examples of positioning means and fastening means of the assembling apparatus. It is explanatory drawing explaining the control apparatus structure of the assembly apparatus.

Explanation of symbols

1 ... Droplet ejection head
2 ... Liquid chamber unit 3 ... Drive unit 11 ... Nozzle plate 12 ... Channel plate 13 ... Vibration plate 14a ... Piezoelectric element
14b ... support part
15 ... Board
16 ... Adhesive 21 ... Nozzle plate position detection reference mark 22a ... Nozzle plate position detection reference mark for flow path plate
22b: Vibration plate position detection reference mark for flow path plate 23: Vibration plate position detection reference mark 30 ... Liquid chamber 40 ... Nozzle hole 50 ... Tray module (first loading module)
DESCRIPTION OF SYMBOLS 51 ... (Channel plate) Tray 52 ... (Channel plate) Transfer unit 60 ... Adhesive application module 61 ... Application table 62 ... Application unit 63 ... Adhesive application transfer unit 70 ... UV adhesive application module 71 ... UV Application table 72 ... UV application nozzle 73 ... UV application unit 74 ... UV application transfer unit 80 ... Tray module (second loading module)
81 ... (Nozzle plate) tray 82 ... (Nozzle plate) transfer unit 90 ... Joining module 91 ... Temporary passage plate temporary placement table 92 ... Finished product temporary placement table 93 ... Joining table 94 ... Nozzle plate temporary placement table 95 ... Joining transfer Mounting unit 96 ... Nozzle plate transfer index table 97 ... Alignment mark detection camera 100 ... Tray module (unloading module)
DESCRIPTION OF SYMBOLS 101 ... Finished product tray 102 ... Completed product transfer unit 200 ... Parts gripping mechanism 201 ... Single axis feeding mechanism 202 ... Lifting mechanism 300 ... Clean unit 301 ... Exhaust fan 302 ... Clean booth 400 ... Positioning pin 401 ... Positioning hole 402 ... Fastening Means 403 ... Fastening means 404 ... Positioning pin 405 ... Positioning hole 500 ... Table 600 ... Control device 601 ... Control unit 602 ... Operation panel (touch panel)
603 ... Data link 604 ... Network

Claims (10)

A first component supplying means for supplying a first component; a second component supplying means for supplying a second component; and an adhesive for applying an adhesive to one of the first component and the second component. Application means, temporary fixing adhesive application means for temporarily bonding adhesive for temporarily bonding the first component and the second component to the surface of one component, and a position detection reference for the first component Based on the first component position detecting means for detecting, the second component position detecting means for detecting the position detection reference of the second component, and the position detection results of the first component and the second component, the second A position adjusting means for adjusting the position of the part, a joining means for pressure joining the two parts after the position adjustment, and the first part and the first part by curing the temporary fixing adhesive. Temporary fixing means for temporarily bonding the two components, and discharging the finished product after the first and second components are joined Discharging means for detecting the position detection reference provided for each of the first part and the second part, adjusting the position of the part based on the detection result, and bonding the two parts In the assembly equipment for fine parts to be joined,
The first component supply means, the second component supply means, the adhesive application means, the temporary fixing adhesive application means, the joining means, and the discharge means are each composed of components necessary for completing a predetermined operation. An apparatus for assembling fine parts, characterized by comprising modules independent of each other.   2. The fine component assembling apparatus according to claim 1, wherein both of the two components are components constituting a droplet discharge head.   3. The apparatus for assembling a fine part according to claim 1 or 2, wherein the module is individually equipped with conveying means for sequentially conveying parts between the modules.   3. The apparatus for assembling a fine component according to claim 1, wherein the module has a shielding structure that is isolated from outside air and adjacent modules, and includes a clean unit for supplying a predetermined amount of clean air into the module. A device for assembling fine parts, each of which is equipped.   5. The apparatus for assembling fine parts according to claim 1, 2, or 4, wherein the module is one or more exhausts for forcibly discharging a predetermined amount of internal air in the module to a room outside the module or to an exhaust pipe. An apparatus for assembling a fine part, characterized by comprising means.   3. The apparatus for assembling a fine part according to claim 2, wherein the module has positioning means for determining a relative position with each adjacent module.   7. The apparatus for assembling a fine part according to claim 2, wherein the module has module fastening means for maintaining a relative position with each adjacent module, and the module can be attached / detached by the fastening means. A device for assembling fine parts.   3. The apparatus for assembling a fine part according to claim 2, wherein the components constituting the module can be controlled independently of other modules by a control means provided individually for each module. Assembly equipment for fine parts.   3. The fine component assembling apparatus according to claim 1, wherein the fine component assembling apparatus is a tabletop. 10. The liquid droplet discharge head for discharging liquid droplets includes a nozzle plate having a plurality of nozzles for discharging liquid droplets and a flow path plate in which a liquid chamber corresponding to each nozzle is formed. A droplet discharge head characterized by being joined by an assembly apparatus for fine parts.

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