JP2004356478A - Article storage container and lid falling preventing mechanism in the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a lid from falling in an SIMF type pod, and to reduce the generation of any particle or the like due to a latch mechanism for fixing the lid to the main body. <P>SOLUTION: The fixing of a lid to the main body is carried out by a pressure reducing space formed between the main body and the lid, and a lid falling preventing member arranged in the lid is engaged with a main body recessed section only when the pressure reducing status of the pressure reducing space is broken down. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
INDUSTRIAL APPLICABILITY The present invention is used in a manufacturing process of an article whose process is performed in a highly clean environment, such as a semiconductor, a panel for a flat panel display, an optical disc, and the like, in order to house the article or various articles used together with the article. The present invention relates to an article storage container. More specifically, the present invention relates to a structure of the container main body having an opening in a vertical direction and a lid for closing the opening.
[0002]
[Prior art]
[Patent Document 1] Japanese Patent No. 3167970
[Patent Document 2] Japanese Patent No. 2960540
[0003]
Heretofore, in a semiconductor device manufacturing process, the entire factory for performing various processes on a substrate such as a wafer has been made into a clean room, thereby responding to the required high cleaning during the process. However, with the increase in the diameter of the wafer, in such a measure, obtaining an environment in terms of configuration has become a problem in terms of cost and the like, and in recent years, for example,
As disclosed in Patent Document 1, means for securing a mini-environment (microenvironment) space with high cleanliness is provided for each processing apparatus.
[0004]
Specifically, instead of increasing the cleanliness of the entire factory, only the inside of each processing device in the manufacturing process and the storage container (hereinafter, referred to as a pod) during the movement between them are kept at a high cleanliness. . As described above, a pod that has an opening vertically below and that opens and closes the opening by moving the lid vertically is collectively referred to as a standard mechanical interface (SMIF) type pod. Thus, the present invention relates to this SMIF type pod. In this way, the adoption of the so-called mini-environment method, which cleans only a small amount of space, achieves the same effect as if the entire factory was converted to a clean room, and reduced capital investment and maintenance costs, resulting in an efficient production process. Has been realized.
[0005]
Hereinafter, a semiconductor processing apparatus and the like that are actually used and that correspond to the so-called mini-environment method will be briefly described. FIG. 5 shows cross sections of various components related to the substrate transfer system of the semiconductor processing apparatus 1. The semiconductor processing apparatus 1 includes a processing chamber 60 for actually performing various kinds of processing on a substrate, a load port unit 10 on which a SMIF-type pod 2 is placed and a substrate or the like can be taken out, and a load port unit. And a transfer chamber 50 in which a substrate transfer robot 55 for transferring a substrate or the like from 10 to a processing chamber 60 is provided. In this example, the pod 2 accommodates not a substrate but a photomask called a reticle used in a semiconductor processing step. At the time of storing articles, the inside of the pod 2 is usually filled with a gas such as dry nitrogen kept at a high purity, and by keeping the inside of the pod 2 at a pressure equal to or higher than the atmospheric pressure, the surrounding environment is improved. To reduce possible internal contamination from
[0006]
The load port unit 10 has a port door 3 that can move up and down in the vertical direction and is kept substantially horizontal. In the illustrated state, the port door 3 is lowered with the pod lid 2b and the reticle (or substrate) placed thereon. The port door 3 cooperates with the inner wall of the load port section 10 to form a buffer chamber 6 for taking out the reticle 9. The buffer chamber 6 and the internal space of the transfer chamber 50 formed inside the load port section 10 are defined by the load port side opening 51, and the internal space of the transfer chamber 50 and the internal space of the processing chamber 60 are defined by the processing chamber side opening 52. Can communicate. The load port side opening 51 can be spatially closed by an opening / closing gate valve 53, and the processing chamber side opening 52 can be spatially closed by an opening / closing gate valve 54.
[0007]
Subsequently, the load port unit 10 will be described in detail with reference to FIG. FIG. 6 is an enlarged view of the load port unit 10 of FIG. In FIG. 6, unlike FIG. 5, the port door 3 is in a raised state, and the state shown by the two-dot chain line in the figure is the position of the port door 3 in the lowered state. The port door 3 is connected to the lifting / lowering means 4 on the lower surface thereof. The lifting / lowering means 4 includes a latch opening / closing shaft 4a, a frame 4b for holding an actuator in the latch opening / closing shaft, a lifting shaft 4c, and an electric actuator 7. The latch opening / closing shaft 4a penetrates a through hole in the lower center of the buffer chamber 6, and transmits the operation of the electric actuator 7 to the port door 3 via the frame 4b and the elevating shaft 4c.
[0008]
A rotating shaft 33 that is rotatable around the center of the latch opening / closing shaft 4a is mounted inside the latch opening / closing shaft 4a. A rod-shaped latch pin 32 that protrudes upward from the surface of the port door 3 is provided at the tip of the rotating shaft 33. The latch pin 32 is arranged at an arbitrary position on the circumference around the rotation axis of the rotation shaft 33. The port door 3 has a flat plate shape substantially corresponding to the shape of the opening 5, and is fitted into the opening 5 when ascending, and closes the opening 5 to seal the buffer chamber 6 as shown in FIG.
[0009]
Positioning pins 3c protruding from the upper surface of the port door 3 are arranged on the upper surface side of the port door 3 corresponding to the outer surface side of the load port unit 10 in order to align the position of the lid 2b of the pod. The lid 2b of the pod 2 has a hole corresponding to the positioning pin 3c. When the pod 2 is placed on the load port section 10 and the port door 3 rises and comes into contact with the lid 2b of the pod 2, the positioning pins 3c are fitted into the holes and the positions of the port door 3 and the lid 2b are adjusted. Let the relationship be predetermined. Below the port door 3, a flange-shaped flange 3a larger than the size of the opening 5 is formed, and a sealing member 3b is fitted into the flange 3a. When the electric actuator 7 is driven to raise the latch opening / closing shaft 4a and the port door 3 is fitted into the access opening 5, the flange 3a abuts on the edge 5a of the access opening 5, and the buffer chamber 6 is sealed. A bellows 31 is attached to the lower surface of the port door 3 and at least to the outer periphery of the latch opening / closing shaft 4 a inside the buffer chamber 6.
[0010]
The main body 2a and the lid 2b of the pod 2 are brought into close contact and integrated by a latch mechanism during transportation or the like. FIG. 7 is a view showing a latch mechanism inside the lid 2b. The mechanism has a structure described below, for example. A rotatable circular rotary cam plate 41 is arranged at the center position of the lid 2b. The rotary cam plate 41 is provided with a latch hole 41 a at an arbitrary position on a circumference centered on the rotary cam plate 41. The latch hole 41a is arranged at a position where the latch pin 32 can be received because the latch hole 41a is engaged with the latch pin 32. Outside the latch hole 41a of the rotary cam plate 41, two cam grooves 43 that are point-symmetric about the rotary cam plate 41 are arranged.
[0011]
Further, the lid 2b has a latch member 42 that is movable in parallel to the extending surface thereof. A driven pin 44 is disposed on the rotary cam plate 41 side of the latch member 42. The driven pin 44 is engaged with the cam groove 43. In addition, the latch member 42 includes a tip portion 42a protruding from the side surface of the lid 2a. When the lid 2b is placed on the port door 3, the latch pins 32 on the upper surface of the port door 3 are fitted into the latch holes 41a. When the rotating shaft 33 is rotated, the rotating cam plate 41 is rotated via the latch pin 32, and the driven pin 44 moves from the starting point 43a of the cam groove 43 toward the ending point 43b. Accordingly, the position of the driven pin 44 moves outward from the center of the rotary cam plate 41, and at the same time, the tip end portion 42a of the latch member 42 moves outward of the lid 2b. When the driven pin 44 is located at the starting point 43a, the tip end portion 42a of the latch member fits inside the lid 2b, and when the driven pin 44 is located at the end point 43b, it projects from the lid 2b.
[0012]
On the other hand, a latch hole (not shown) that engages with the latch member 42 is disposed at a position where the pod 2 comes into contact with the lid 2b of the main body 2a. The latch hole has an opening slightly larger than the cross-sectional shape of the latch member distal end portion 42a. Therefore, the lid 2b can be fixed to the clean box 2 by rotating the rotary cam plate 41 so that the latch member distal end portion 42a comes into contact with the inside of the latch hole and frictionally engages. On the upper surface of the port door 3, a latch pin 32 which is rotatable by engaging with a cam groove 43 of a rotary cam plate 41 is disposed as an opening / closing mechanism. The latch pin 32 is connected to a rotating shaft 33 disposed inside the latch opening / closing shaft 4a. The rotating shaft 33 is connected to a rotary actuator 34 as a rotating means.
[0013]
[Problems to be solved by the invention]
As described above, in the SMIF-type container, the lid is fixed to the pod main body by engaging the latch member disposed on the lid or the tip thereof with the hole or groove formed in the main body. . That is, in this fixing, the latch member comes into contact with a surface receiving the latch member formed on the main body side, and a load in the direction toward the lid center portion and a load in the direction toward the main body side are applied from the surface. Done. in this case,
As described also in Patent Document 2, in order to obtain the above-described load, physical "rubbing" occurs between the surface of the latch member and the receiving surface of the latch member, and particles may be generated. . Although the frequency of generation of the particles is extremely small in the case of a single operation, the number of generated particles may be insignificant in a number of processing steps of several tens or more.
[0014]
In order to reduce the generation factor of such particles,
In Patent Document 2, two cam surfaces acting in different directions are introduced to a latch member. That is, when the latch tip moves forward or backward with respect to the inside of the groove or the like of the main body, the latch tip moves to a position where it does not come into contact with the latch receiving surface. It moves in a direction substantially perpendicular to the latch receiving surface. Therefore, in the configuration disclosed in the document, the state in which the latch distal end portion and the latch receiving surface rub against each other hardly occurs. For this reason, in the present configuration, it is considered that the generation of particles due to the rubbing of the latch tip, which has conventionally been a problem, can be reduced. However, the latch tip normally acts as a fulcrum for pressing the entire lid against the body. For this reason, when the contact is obtained by the movement of the latch tip in the substantially vertical direction as in the above-described configuration, the load tends to concentrate on the contact, and locally large wear caused by the load concentration occurs. May occur. In this case, it is considered that the generation of particles due to a cause slightly different from the conventional one becomes a problem.
[0015]
Note that the inside of the pod and the inside of the buffer chamber at the load port are generally maintained at atmospheric pressure or a pressure higher than atmospheric pressure by a clean gas. Therefore, even if the above-mentioned particles and the like are generated, it is extremely rare that these particles enter the inside of the pod and the like. Therefore,
Even with the configuration disclosed in Patent Document 2, it was possible to obtain a particle reduction effect of a certain level or more. However, in the case of a SIMF type container intended for a specific use, for example, for storing a reticle, the inside of the pod is usually kept at a reduced pressure. You are going to do this. In this case, the possibility that the generated particles enter the inside of the pod or the like becomes extremely large.
[0016]
In view of the above-described situation, the present applicant has formed a vacuum space on the surface of the lid on the body side instead of using the latch mechanism, and used the atmospheric pressure loaded on the lid due to the presence of the vacuum space. Configuration that tightly adheres to the body and seals the internal space
It is disclosed in Patent Document 1. According to this configuration, it is not necessary to use the latch mechanism, and therefore, it is not necessary to consider the generation of particles by the mechanism. In addition, if the configuration is applied to a container having an opening on the side, such as a so-called FOUP, the lid is unlikely to come off even if the vacuum space is at atmospheric pressure due to some situation. It is relatively easy to deal with such a situation. However, when such a configuration is applied to a container having an opening on the lower surface in the vertical direction such as a pod of the SMIF type, for example, an appropriate measure is desired since breaking the vacuum in the space may cause the lid to fall. In this case, when the above-mentioned latch mechanism is used as the corresponding means, it is necessary to simultaneously reduce the above-mentioned particles.
[0017]
The present invention has been made in view of the above circumstances. For example, in a SIMF-type pod, a pod or the like which prevents a lid from dropping at the time of vacuum breakage and reduces generation of particles and the like due to a latch mechanism is provided. It is intended to provide an article storage container. More specifically, when the inside of the container is at a pressure lower than the atmospheric pressure (under reduced pressure), it is possible to reduce the generation of particles and the like due to the latch mechanism and further prevent the particles and the like from entering the inside of the container. It is intended to provide an article storage container.
[0018]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, an article storage container according to the present invention has a main body having an internal space capable of storing articles and an opening provided vertically below the internal space, and closing the opening to seal the internal space. An article storage container comprising a lid, wherein a decompression space is disposed between the main body and the lid, the lid has a fall prevention member protrudable from the outer periphery of the lid, and the main body has an outer periphery of the lid. It has a concave portion for accommodating the fall prevention member without protruding from the outer periphery of the cover when the protrusion is protruded from the outer periphery of the cover. When the state is broken, the fall prevention member comes into contact with the inner periphery of the concave portion.
[0019]
In the above-mentioned article storage container, it is preferable that the decompression space is either the same as the internal space or a space different from the internal space. In the above-described article storage container, the main body and the lid each have first and second planes facing each other in the horizontal direction, the fall prevention member protrudes in the horizontal direction from the second plane, and the concave portion has the first shape. Preferably, it is formed in a plane. Further, the internal space preferably has a shape in which the shape of the horizontal cross section is a circle or a square and the four corners are part of an arc having a predetermined radius.
[0020]
Embodiment
(First embodiment)
Hereinafter, the configuration of the pod according to the first embodiment of the present invention will be described with reference to the drawings. 1 is a schematic cross-sectional view of an article storage container according to the present invention, that is, a pod, FIG. 2 is a state in which the body is viewed from below except for a lid of the pod, and FIG. 3 is a view of the pod including the lid from below. FIGS. 3A and 3B respectively show views showing the internal structure in a partially folded state. In the drawings, components having the same functions as the components described in the related art will be described using the same reference numerals as those used in FIGS. As for the load port and the like, those described in the related art with reference to FIG. 6 are used.
[0021]
(Pod shape)
The pod 2 according to the present invention includes a main body 2a and a lid 2b. The main body 2a has a substantially cylindrical first internal space 11a and a first internal space 11a, each of which has a substantially rectangular shape when viewed from above, and has a substantially rectangular shape with a circular or four corners each having an arbitrary diameter. A substantially cubic second internal space 11b that is continuous with the space 11a below has an approximately cubic appearance formed therein. The first internal space 11a has a size capable of accommodating an article to be held inside, in this case, a reticle (or substrate) 9 having an outer shape indicated by a two-dot chain line in the drawing. The main body 2a has, on its side, a flange portion 12 used during pod transport, and a circular window portion 13 for observing the internal space in which glass or the like is fixed on the upper surface so as to maintain the airtightness of the internal space. Is arranged.
[0022]
In the first internal space 11a, a plurality of work holding pins 14, which extend downward from the space above and restrict the movement of the reticle in the vertical direction, are uniformly arranged in the circumferential direction of the reticle. The work holding pin 14 is in contact with the reticle at the tip on the protrusion in order to reduce the contact area with the reticle, and via a support member 14b having elasticity so as not to apply an excessive load to the reticle. It is fixed to the main body 2a. The second internal space 11b has a size capable of accommodating the lid 2b described later, and has a groove 15 described later on two opposing side surfaces.
[0023]
The lid 2b has a work guide 16 and a work pin 17 on the upper surface which is the main body 2a side when the main body 2a is closed. The work guide 16 has a substantially annular shape that can be inserted into the first internal space 11a, and a guide portion 16a that guides the outer peripheral portion of the internal space reticle from all sides projects from the outer peripheral portion of the upper surface thereof. The work pin 17 is disposed at a position substantially opposite to the work holding pin 14, and supports the reticle at the tip. Further, an O-ring 18 is disposed on the upper surface of the lid 2b and on the outer periphery of the work guide 16, and the O-ring 18 comes into close contact with a surface 11c that defines the upper surface of the second space 11b. The first space 11a defined by the main body 2a and the lid 2b is sealed.
[0024]
The pod 2 according to the present invention maintains and closes the main body 2a and the lid 2b by maintaining the pressure inside the first space 11a at a pressure lower than the ambient pressure (atmospheric pressure). The pod 2 has a substantially circular cross section in the first space 11a held as a depressurized space, and has a large difference between the pressure in the space and the ambient pressure, or the cross-sectional area of the internal space is small. Even if it becomes large, it becomes robust against the load received from the atmospheric pressure. In addition, the shape can be easily formed of a metal such as aluminum, and the inner surface thereof can be easily subjected to electrolytic polishing. By performing the treatment, generation of particles and the like from the inner surface of the pod can be reduced.
[0025]
(Fall prevention mechanism)
Next, as a countermeasure in the case where the reduced pressure state inside the first space 11a is damaged and the close contact state between the main body 2a and the lid 2b is broken, a fall prevention structure which is a configuration added to the pod according to the present invention is provided. The mechanism will be described in detail. Inside the lid 2b, a fall prevention mechanism 20 for the lid 2b is arranged. The fall prevention mechanism includes a disc-shaped cam plate 21, a fall prevention plate 24, and a prevention plate holder 26. The cam plate 21 is rotatably disposed at a position substantially at the center of the lid 2b. The rotary cam plate 21 is provided with an engagement hole 21 a disposed at an arbitrary position on a circumference centered on the center of the rotary cam plate 21. The engaging hole 21a is preferably a circular hole arranged symmetrically on the circumference.
[0026]
The engagement hole 21 a is a hole that engages with the latch pin 32 in the load port 10. The engagement hole 21 a is a hole that can receive the latch pin 32, and the position of the engagement hole 21 a also corresponds to the position of the latch pin 32. Outside the engagement hole 21 a of the cam plate 21, two cam grooves 23 which are point-symmetric with respect to the center of the cam plate 21 are arranged. Assuming that one end of each cam groove 23 is a start point 23a and the other end is an end point 23b, the distance between the start point 23a of the cam groove 23 and the center of the cam plate 21 is the shortest, while the end of the cam groove 23 is closer to the end point 23b. And the distance from the center of the cam plate 21 to the center of the cam plate 21 is the longest.
[0027]
The fall prevention plate 24 is formed of a substantially rod-shaped member extending on a line connecting the center of the cam plate 21 and the substantially central portion of the groove 15 provided in the main body 2a. Is formed of a plate-like member extending in parallel with the extending direction of The prevention plate holder 26 is fixed to the lid 2b, and supports the fall prevention plate 24 via two bushes 25 so as to be drivable in the extending direction thereof. A driven pin 27 is fixed to an end of the fall prevention plate 24 on the cam plate 21 side. The driven pin 27 is inserted through the cam groove 23. A spring member 28 is disposed around the fall prevention plate 24 between the two bushes 25. The stopper 28a fixed to the fall prevention plate 24 restricts the movement of the fall prevention plate 24 in the extending direction of the spring member 28. The fall prevention plate 24 is prevented from being shaken, vibrated, or the like at each position of the movement thereof due to the additional load in the direction of the rolled material received from the spring member 28.
[0028]
When the lid 2b is placed on the load port 10, the latch pin 32 protruding from the surface of the port door 3 is fitted into the latch hole 21a. When the rotating shaft 33 is rotated in this state, the cam plate 21 rotates together with the latch pin 33, and the driven pin 27 at the end of the drop prevention plate 24 moves from the starting point 23a of the cam groove 23 toward the ending point 23b. That is, the driven pin 24 moves from the center of the rotary cam plate 21 to the outside of the rotary cam plate 21 along the extending direction of the fall prevention plate 24. With the movement of the driven pin 27, the distal end portion 24a of the fall prevention plate 24 moves toward the outside of the lid 2b. When the driven pin 27 is located at the cam groove start point 23a, the distal end portion 24a is set in the lid 2b, and when the driven pin 27 is located at the cam groove end point 23b, it is set so as to protrude from the lid 2b.
[0029]
As described above, the groove 15 is formed at a position corresponding to the tip 24a of the fall prevention plate 24 in the main body 2a of the clean box 2. When the tip portion 24a protrudes outside the lid 2b, the tip portion 24a is located inside the groove 15. The groove 15 has a width, a height, and a depth such that the tip portion 24a does not come into contact with the inside when performing a normal operation. Therefore, generation of particles and the like due to the fall prevention member according to the present invention, particularly, the tip portion 24a of the fall prevention plate 24 is completely eliminated. That is, the fall prevention member contacts and engages with the distal end portion 24a and the inner wall of the groove 15 only when the depressurized state of the space exhibiting the function of bringing the main body 2a and the lid 2b into close contact with each other is broken, It has the effect of preventing these substantial separations.
[0030]
(Second embodiment)
Next, a pod according to a second embodiment of the present invention will be described. Note that components having the same operational effects as those described in the first embodiment will be described using the same reference numerals. FIGS. 4A and 4B are enlarged views of a main part in a cross-sectional view of the pod 2 in the second embodiment. In the present embodiment, the lid 2b is kept in close contact with the main body 2a, not by reducing the pressure in the internal space 11a, but by reducing the pressure in the space 19 provided for keeping the close contact. You. FIG. 4A shows a case where the space 19 is formed in a portion facing the surface 11c of the lid 2b, and FIG. 4B shows a case where the space 19 is formed in the surface 11c. The O-ring 18 is disposed at a position on the inner peripheral portion and the outer peripheral portion of the space 19 having a substantially annular shape, which can be in close contact with the surface 11c, in order to keep the space closed.
[0031]
As described above, by providing the exclusive space 19 having an action for holding the main body 2a and the lid 2b in close contact with each other, the inside of the first internal space 11a is pressurized by, for example, dry nitrogen with a pressure equal to or higher than the atmospheric pressure. Can also be held. Further, even if the depressurized state of the space 19 is broken, it is possible to prevent the lid 2b from being separated from the main body 2a by the action of the fall prevention mechanism. Therefore, as compared with the conventional SIMF type pod, it becomes possible to hold a reticle or the like under a wider pressure condition. Further, according to the present invention, in the conventional SIMF type pod, it is possible to completely eliminate the inevitable engagement, friction, and the like of the latch member and the like. Therefore, particles and the like generated when the main body 2a and the lid 2b are kept in close contact with each other can be significantly reduced.
[0032]
In the first and second embodiments described above, the tip of the drop prevention member is covered by rotating the disk-shaped cam plate and transmitting the rotation to the fall prevention member via the cam mechanism. 2b. However, as the drive mechanism of the fall prevention member, various known mechanisms can be used as long as the mechanism can reciprocate the distal end portion. That is, the fall prevention member can adopt various configurations as long as a part of the fall prevention member can be projected from the outer peripheral portion of the lid in a state where the lid is in close contact with the main body. Further, the groove provided on the main body 2a side for accommodating the distal end of the fall prevention member is not limited to the shape of the groove in the present embodiment. At the time of normal driving of the fall prevention member, it is possible to adopt various shapes as long as the shape has an internal width such that the tip end portion and the inner peripheral surface do not come into contact with each other. An elastic member such as rubber may be arranged on the inner peripheral surface to absorb the pressure.
[0033]
Regarding the direction in which the fall prevention member protrudes, in the present embodiment, the main body and the lid protrude between surfaces opposed to each other in the horizontal direction, and the groove is provided on this opposing surface. I have. However, the embodiment of the present invention is not limited to this configuration, and the fall prevention member may project toward a surface opposed in the vertical direction, for example, the surface 11c, and may project into a groove provided on the surface 11c and then project the projection. May be configured to be able to engage with a part of the groove. Specifically, a hook-shaped portion may be provided at the tip of the protruding portion, and this may be engaged by rotating the hook inside the groove, or the hook-shaped portion may be further protruded from the tip after being arranged inside the groove. It is good also as a structure which performs.
[0034]
[Effects of the present invention]
According to the present invention, the adhesion between the pod body and the lid is ensured by the decompression space formed therein. Further, the fall prevention mechanism of the lid is configured such that it does not engage with the main body or the like with friction or the like in a normal state and contacts a part of the main body only when the decompression state of the decompression space is broken. . Further, it is stated that the decompression space does not need to be an article storage space in the pod, and may be a space formed only for ensuring adhesion. By adopting this configuration, it is possible to greatly reduce the generation of particles and the like due to the configuration in which the operation such as sealing is actually performed when the operation of sealing or opening the pod body with the lid is performed. Become.
[0035]
Further, the addition of the fall prevention mechanism makes it possible to prevent an accident such as the lid falling off the main body even when the decompression state of the decompression space is broken. Further, the fall prevention mechanism according to the present invention can be constituted by substantially the same element as a so-called latch mechanism used when fixing the lid to the pod in the related art, and is different from a conventional load port or the like. Thus, it can be used as it is.
[0036]
Further, the pod body according to the present invention has a structure in which a space for actually storing a storage object such as a reticle has a substantially circular cross section. Thereby, the resistance against the pressure difference between the outside and the inside of the container is increased, and the container can be used as a robust vacuum container. Further, such a pod shape can be easily formed from a metal, and a process for reducing the generation of particles such as an electrolytic polishing process can be easily performed inside the pod.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration in a cross section of a pod according to a first embodiment of the present invention.
FIG. 2 is a view showing a state of the pod shown in FIG. 1 when the main body is viewed from below.
FIG. 3 is a view showing a state in which a lid is attached to a main body of the pod shown in FIG. 1 when viewed from below, and further showing a portion related to a fall prevention mechanism formed inside the lid. .
FIG. 4A is a cross-sectional view of a pod according to a second embodiment of the present invention, showing a main part in an enlarged manner.
FIG. 4B is a cross-sectional view of a pod according to a second embodiment of the present invention, showing a main part in an enlarged manner.
FIG. 5 is a view showing a schematic configuration of a load port using a pod or the like according to the present invention, a transport system of a substrate or the like, and a part of a processing apparatus.
FIG. 6 is a view showing the load port shown in FIG. 5 in an enlarged manner and showing a vertical cross section thereof.
FIG. 7 is a diagram for explaining an example of a latch mechanism used to fix a lid to a main body in a conventional pod.
[Explanation of symbols]
1: Semiconductor processing equipment
2: Pod
3: Port door
4: Elevating means
5: Opening
6: Buffer chamber
7: Electric actuator
9: Reticle (substrate)
10: Load port section
11: Internal space
12: Tsubabe
13: Window
14: Work holding pin
15: Groove
16: Work guide
17: Work pin
18: O-ring
19: Space for decompression
20: Fall prevention mechanism
21: Cam plate
13: Cam groove
25: Bush
26: Prevention plate holder
27: Follower pin
28: Spring member
31: Bellows
32: Latch pin
33: rotating shaft
34: Rotary actuator
41: Rotating cam plate
42: Latch member
43: Cam groove
44: Follower pin
50: transfer room
51: Load port side opening
52: Processing chamber side opening
53, 54: Gate valve for opening and closing
60: Processing room

Claims (5)

An article storage container comprising: a main body having an internal space capable of storing articles and an opening provided vertically below the internal space; and a lid for closing the opening and sealing the internal space,
A decompression space is arranged between the main body and the lid,
The lid has a fall prevention member that can protrude from an outer periphery of the lid,
The main body, when the fall prevention member protrudes from the outer periphery of the lid, has a recess for accommodating the fall prevention member without contacting the fall prevention member,
In a state in which the fall prevention member protrudes from the outer periphery of the lid, when the reduced pressure state of the reduced pressure space that seals the internal space with the lid is broken, the fall prevention member is positioned on the inner periphery of the concave portion. An article storage container that comes into contact with the article. The article storage container according to claim 1, wherein the reduced pressure space is the same as the internal space. The article storage container according to claim 1, wherein the decompression space is a space different from the internal space. The main body and the lid each have first and second planes facing each other in the horizontal direction, the fall prevention member projects horizontally from the second plane, and the recess is formed in the first plane. The article storage container according to claim 1, wherein: 2. The article container according to claim 1, wherein the internal space has a shape in which a horizontal cross section is circular or square and four corners thereof are part of an arc having a predetermined radius. 3. .

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