JP2004306149A - Polishing cloth and manufacturing method therefor - Google Patents

Polishing cloth and manufacturing method therefor Download PDF

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Publication number
JP2004306149A
JP2004306149A JP2003098879A JP2003098879A JP2004306149A JP 2004306149 A JP2004306149 A JP 2004306149A JP 2003098879 A JP2003098879 A JP 2003098879A JP 2003098879 A JP2003098879 A JP 2003098879A JP 2004306149 A JP2004306149 A JP 2004306149A
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Prior art keywords
resin
polishing
polishing cloth
thermoplastic polyurethane
hardness
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Pending
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JP2003098879A
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Japanese (ja)
Inventor
Kenji Nagai
Masanori Nakada
Tomoyuki Okudaira
正典 中田
倫之 奥平
賢次 長井
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Kanebo Ltd
カネボウ株式会社
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Priority to JP2003098879A priority Critical patent/JP2004306149A/en
Publication of JP2004306149A publication Critical patent/JP2004306149A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To improve the flatness of a material to be polished after polishing by preventing fine uneven surface due to a hard resin. <P>SOLUTION: This polishing cloth is non-woven fabric impregnated with two or more resins, and formed by stacking a thermoplastic polyurethane resin layer closely adhering to a non-woven fabric fiber, and a resin layer having equal or lower hardness than the above resin thereon. Thus, the flatness of the material to be polished after polishing is remarkably improved, the polishing accuracy is improved, and efficient polishing is performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は、半導体ウエハー、メモリーディスク、光学部品レンズ等を研磨する際に用いられる研磨用クロスに関するものである。 The present invention semiconductor wafers, memory disks, a polishing cloth to be used for polishing optical components such as lenses.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
従来より、半導体ウエハー、メモリーディスク、光学部品レンズ等を研磨する際に、人工皮革として一般に良く知られているベロア調及びスエード調の繊維、樹脂複合材料、及びポリウレタン樹脂含湿式凝固処理フェルト上繊維質シート等が研磨用クロスとして用いられてきている。 Conventionally, semiconductor wafers, memory disks, when polishing optical components such as lenses, velor and suede fibers are generally well known as artificial leather, resin composite material, and a polyurethane resin humidified formula coagulated felt on the fibers quality sheet, and the like have been used as a polishing cloth.
【0003】 [0003]
中でも、Dynamic Random Access(以下、DRAMと省略)として用いられる回路については、その集積度を高くする努力が鋭意なされ、それに伴って回路形成を行う基板となる半導体用ウエハーについても回路間の線幅を縮める目的から平坦性の要求がますます厳しくなっている。 Among them, Dynamic Random Access (hereinafter, abbreviated as DRAM) for the circuit used as, made efforts intensive to increase the degree of integration, the line width between circuits for semiconductor wafers comprising a substrate, a circuit formed with it request of flatness for the purpose of reducing the has become more and more severe.
【0004】 [0004]
それに対し、フェルト状繊維質シート中の構成繊維が、線状の熱可塑性ポリウレタン樹脂を主体とする重合体により、埋設的に囲繞されて複合基材が形成されるとともに、前記複合基材の多孔質相に存在するセルの壁が、熱可塑性ポリウレタン樹脂より硬質の樹脂の薄膜により被覆・補強されている研磨用クロスが良好な研磨性能を上げている(例えば特許文献1)。 In contrast, the constituent fibers of the felt-like fibrous in sheet, the polymer consisting mainly of linear thermoplastic polyurethane resin, with the composite substrate is formed is embedded to surround, the pores of the composite base material walls of the cells present in the quality phase, polishing cloth is coated, reinforced by a thin film of a thermoplastic polyurethane resin from a hard resin is raised good polishing performance (for example, Patent Document 1).
【0005】 [0005]
【特許文献1】 [Patent Document 1]
特公平7−4769号公報【0006】 JP fair 7-4769 [0006]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
半導体ウエハー等の研磨加工において研磨クロス自体ができるだけ小さく均一な変形しか起さないことにより、被研磨物の面ダレ及びフチダレ、あるいは硬質樹脂による微細な凹凸を防止し、研磨加工後の被研磨物の平坦性を向上させることが課題である。 By polishing cloth itself does not cause only as small as possible a uniform deformation in the polishing of semiconductor wafers to prevent fine irregularities by dullness and Fuchidare or hard resin, the object to be polished, an object to be polished after polishing it is an issue to improve the flatness of the.
【0007】 [0007]
【課題を解決するための手段】 In order to solve the problems]
本発明者らは、上記の目的を達成するために、鋭意検討した結果、 The present inventors have found that in order to achieve the above object, intensive studies results,
[1] 複数の樹脂が含浸された不織布の研磨クロスであり、不織布の繊維に密着した熱可塑性ポリウレタン樹脂層と、その上層に前記樹脂よりも硬度が同等あるいは軟質の樹脂層が積層されていることを特徴とする研磨クロスによって、また、 [1] a polishing cloth of the nonwoven fabric in which a plurality of resin impregnated, a thermoplastic polyurethane resin layer in close contact with the fibers of the nonwoven fabric, hardness than the resin thereon has a resin layer of equal or soft are stacked by polishing cloth, characterized in that, also,
[2] 不織布に最初に熱可塑性ポリウレタン樹脂を含浸させ、さらに熱可塑性ポリウレタン樹脂よりも硬度が同等あるいは軟質の樹脂を含浸する研磨クロスの製造方法によって、課題を解決しうることを見出した。 [2] nonwoven initially impregnated with thermoplastic polyurethane resin, the manufacturing method of the polishing cloth for further impregnated with a thermoplastic polyurethane resin resin hardness of equal to or softer than, we have found that can solve the problems.
【0008】 [0008]
本発明の研磨クロスは、不織布の繊維に密着した熱可塑性ポリウレタン樹脂層、すなわち不織布と最初に含浸する熱可塑性ポリウレタン樹脂(以下、1次含浸熱可塑性ポリウレタン樹脂と略記する)と、その上層に前記樹脂よりも硬度が同等あるいは軟質の樹脂層、すなわちその後さらに含浸させる熱可塑性ポリウレタン樹脂よりも硬度が同等あるいは軟質の樹脂(以下、2次含浸樹脂と略記する)で構成される。 Polishing cloth of the present invention, the thermoplastic polyurethane resin layer in close contact with the fibers of the nonwoven fabric, i.e., the thermoplastic polyurethane resin impregnated into the nonwoven fabric and the first (hereinafter, abbreviated as primary impregnation thermoplastic polyurethane resin) and the thereon resin layer hardness of equal to or softer than the resin, i.e., constituted by then further impregnated to thermoplastic polyurethane hardness than the resin is equal to or soft resin (hereinafter, abbreviated as secondary impregnating resin).
【0009】 [0009]
不織布としては、ナイロン、ポリエステル、アラミド繊維等からなるもので良く、DMF、メチル・エチルケトン、テトラヒドロフラン等ポリウレタン可溶性の溶剤に対して耐性があり、かつ研磨時に使用されるpH10〜11程度の研磨液に対する耐アルカリ性をもつ繊維からなる不織布、好ましくはバインダーを含まない不織布で、その嵩密度が0.10〜0.30g/cm の範囲にあるものが好適である。 The nonwoven fabric, nylon, polyester, well made of aramid fibers or the like, DMF, for methyl ethyl ketone, is resistant to solvents such as tetrahydrofuran polyurethane soluble and pH10~11 about polishing liquid used in polishing nonwoven fabric made of fibers having alkali resistance, it is preferably a nonwoven fabric that does not contain a binder, preferably the bulk density is one in the range of 0.10~0.30g / cm 3.
【0010】 [0010]
1次含浸に用いられる熱可塑性ポリウレタンは、一般的に人工皮革用として市販されているものが何れも使用できるが、本用途として好ましくは、100%伸び時のモジュラスが100kg/cm 以上のものが好ましい。 Thermoplastic polyurethane used for the primary impregnation is those commercially available generally as for artificial leather both can be used, preferably as this application, those modulus at 100% elongation is 100 kg / cm 2 or more It is preferred. この工程において、ポリウレタン樹脂の濃度は適宜選択できるが、樹脂固形分濃度5〜30重量%の範囲が好ましく、10〜20重量%がさらに好ましく、12〜18重量%が繊維間に適度の空間がもたらされることからさらに好ましい。 In this step, the concentration of the polyurethane resin can be selected as appropriate, preferably in the range of resin solids concentration of 5 to 30 wt%, more preferably 10 to 20 wt%, moderate space between 12-18% by weight fibers further preferred since brought about.
【0011】 [0011]
上述の不織布を熱可塑性ポリウレタンに含浸し、湿式凝固、洗浄、乾燥を経て作成された中間基材は、次に2次含浸樹脂に含浸される。 The aforementioned nonwoven fabric was impregnated with thermoplastic polyurethanes, wet coagulation, washing, intermediate substrates that are created through the drying is then impregnated into the secondary impregnation resin.
【0012】 [0012]
2次含浸樹脂は、水系ポリエステル樹脂、ポリエーテル樹脂、ウレタンプレポリマー、メラミン樹脂、ポリカーボネート樹脂等の内、1次含浸に用いられる熱可塑性ポリウレタン樹脂よりも同等かそれより軟質のものである。 Secondary impregnation resins, aqueous polyester resins, polyether resins, urethane prepolymers, melamine resins, among such as polycarbonate resin, is equivalent to or softer than the thermoplastic polyurethane resin used for the primary impregnation. 中でも、水系ポリエステル樹脂が好適である。 Among them, water-based polyester resin is preferable.
【0013】 [0013]
熱可塑性ポリウレタン樹脂よりも同等かそれより軟質の樹脂とは、熱可塑性ポリウレタン樹脂単独あるいは、2次含浸の候補である樹脂単独を、フィルム状にし、そのShoreD硬度を調べ、同じ厚みにて両者硬度比較をして同程度あるいは軟質である樹脂を2次含浸樹脂としたものである。 Thermal The thermoplastic polyurethane resin equal to or more of the soft resin than the thermoplastic polyurethane resin alone or a resin alone is a candidate of the secondary impregnation, into a film shape, examine the ShoreD hardness, both hardness at the same thickness and the comparison is that the resin is equal to or soft to the secondary impregnation resin.
【0014】 [0014]
1次含浸樹脂硬度を2次含浸樹脂硬度で割った除数(1次含浸樹脂硬度/2次含浸樹脂硬度)が1の場合同等の硬度であり、それ以上は2次含浸樹脂が1次含浸樹脂より軟質であり、それ以下は2次含浸樹脂が1次含浸樹脂より硬質である。 If the divisor divided primary impregnating resin hardness secondary impregnating resin hardness (primary impregnating resin hardness / secondary impregnating resin hardness) of 1 is equivalent hardness, more secondary impregnating resin is primary impregnating resin more is soft, less secondary impregnating resin is harder than the primary impregnation resin. 本願においては、その除数が1以上であり、1以上2以下が好ましい。 In the present application, it is a the divisor is 1 or more, 1 or more and 2 or less is preferable. また、1以上1.5以下が更に好ましく、1以上1.2以下が更に好ましい。 Further, 1 to 1.5 more preferably less, more preferably 1 to 1.2.
【0015】 [0015]
この工程における2次含浸樹脂の濃度は適宜選択できるが、樹脂固形分濃度5〜30重量%の範囲が好ましく、7〜20重量%がさらに好ましく、8〜18重量%が繊維間に適度の空間がもたらされることからさらに好ましい。 While this concentration of secondary impregnation resin in the process can be selected as appropriate, preferably in the range of resin solids concentration of 5 to 30 wt%, more preferably 7-20 wt%, moderate space between 8 to 18% by weight fibers further preferred because is provided.
【0016】 [0016]
本発明の研磨クロスの製造方法は、上述の構成材料を用い、不織布に最初に熱可塑性ポリウレタン樹脂を含浸させる工程と、さらに熱可塑性ポリウレタン樹脂よりも硬度が同等あるいは軟質の樹脂を含浸させる工程で構成されるものである。 A method of making an abrasive cloth of the present invention, using the above-described constituent materials, in step a step of initially impregnated with a thermoplastic polyurethane resin to the nonwoven fabric, the more hardness than thermoplastic polyurethane resin is impregnated with a resin of equal to or soft it is intended to be constructed.
【0017】 [0017]
【実施例】 【Example】
次に本発明を、実施例、比較例によって、さらに詳細に説明する。 The invention will now examples, comparative examples will be described in more detail.
【0018】 [0018]
なお、各研磨布の硬度測定は以下の方法によった。 It should be noted that the hardness measurement of each of the polishing cloth was carried out by the following methods.
【0019】 [0019]
(ShoreD硬度): (ShoreD hardness):
ASTM D 2240準拠のD型硬度計により、ShoreD硬度を測定した。 By a D-type hardness meter compliant ASTM D 2240, it was measured ShoreD hardness. 被検体である樹脂をガラス板上にキャスティングし、加熱・乾燥により一定厚みのフィルムを得た。 The resin is a subject was cast on a glass plate to obtain a film having a predetermined thickness by heating and drying. 得られた樹脂フィルムを数枚重ね合わせ各厚みの硬度測定を行った。 The resulting resin film was subjected to hardness measurement of several sheets superimposed each thickness of.
【0020】 [0020]
(研磨性能評価) (Polishing performance evaluation)
スピードファム社製36SPAWを用い、4インチシリコンウェーハを研磨したのち、洗浄し平坦度を測定した。 Using Speed ​​Fam Co. 36SPAW, After polished 4-inch silicon wafer, washed measured flatness. 平坦度の測定にはZYGO社製GPIを用い、TRI(μm)を測定した。 The measurement of the flatness using a ZYGO Co. GPI, was measured TRI ([mu] m).
【0021】 [0021]
実施例1 Example 1
繊維長が64mm、3.3デシテックスに相当する繊維断面積であって、ポリエステル短繊維(東レ社製、銘柄名テトロンT201)を360g/m の目付けでニードリング処理して、厚み2.0mm、密度0.2.0の不織布を得た。 Fiber length 64 mm, a fiber cross-sectional area which corresponds to 3.3 dtex, polyester staple fiber (manufactured by Toray Industries Inc., brand name Tetron T201) by needling with basis weight of 360 g / m 2, thickness 2.0mm to obtain a nonwoven fabric of density 0.2.0.
【0022】 [0022]
次に、最終固形分濃度が13重量%であるエーテル系ポリウレタン樹脂(大日本インキ化学工業社製、商品名MP−299)に前記基布不織布を含浸処理し、圧搾ロールで過剰の液を絞り、40℃の温水にて湿式凝固させた。 Then, ether-based polyurethane resin final solids concentration of 13 wt% (manufactured by Dainippon Ink and Chemicals, Inc., trade name MP-299) impregnated with the base fabric nonwoven fabric, squeezing excess liquid in mill roll , was wet coagulation at the 40 ℃ hot water. さらに50℃温水で充分水洗後、150℃で乾燥して、前処理済不織布を得た。 After more fully washed with 50 ° C. warm water, and dried at 0.99 ° C., to obtain a pre-treated nonwoven fabric. 1次含浸による基布不織布の質量増加は約120%であった。 Weight increase of the base fabric nonwoven by the primary impregnation was about 120%.
【0023】 [0023]
ついで、固形分濃度が13重量%の水系ポリエステル樹脂溶液(高松油脂社製、ペスレジンA124GP)に前記前処理済不織布を2次含浸させ、圧搾ロールで過剰の液を絞って、150℃にて乾燥させ、厚みが1.3mm、密度が0.39g/cm であり、製品目付けが500g/m 前後の研磨クロスを得た。 Then, the solid content concentration of 13 wt% aqueous polyester resin solution (Takamatsu Oil & Fat Co., PESRESIN A124GP) the pretreated nonwoven fabric was secondary impregnated in, squeeze excess liquid in mill roll, dried at 0.99 ° C. It is a thickness 1.3 mm, a density of 0.39 g / cm 3, the product having a basis weight to obtain a 500 g / m 2 before and after the polishing cloth.
【0024】 [0024]
実施例2 Example 2
2次含浸の固形分濃度を8重量%とした以外、実施例1と同様の樹脂を用い、同様に研磨クロスを作成した。 The solid content of the secondary impregnation except that 8 wt%, using the same resin as in Example 1, were prepared in the same manner as in the polishing cloth.
【0025】 [0025]
比較例1 Comparative Example 1
1次含浸の樹脂がエステル系ポリウレタン樹脂であり、その固形分濃度を15重量%とし、2次含浸の水系ポリエステル樹脂の固形分濃度を15重量%とした以外は、実施例1と同様に研磨クロスを作成した。 Primary impregnation of the resin is an ester-based polyurethane resin, the solid content concentration of 15 wt%, except that the solid concentration of the aqueous polyester resin of the secondary impregnation was 15 wt%, the polishing in the same manner as in Example 1 It created the cross.
【0026】 [0026]
【表1】 [Table 1]
【0027】 [0027]
表1に示す通り、2次含浸において1次含浸の樹脂よりも硬度が同等あるいは軟質の樹脂を用いることにより、被研磨物の研磨後の平坦度が格段に向上した。 As shown in Table 1, by using the primary impregnation of the resin hardness of equal to or softer than the resin in the secondary impregnation, the flatness after polishing the object to be polished is remarkably improved.
【0028】 [0028]
【発明の効果】 【Effect of the invention】
複数の樹脂が含浸された不織布の研磨クロスであり、不織布の繊維に密着した熱可塑性ポリウレタン樹脂層と、その上層に前記樹脂よりも硬度が同等あるいは軟質の樹脂層が積層されていることを特徴とする研磨クロスによって、被研磨物の研磨後の平坦度が格段に向上した。 A polishing cloth of the nonwoven fabric in which a plurality of resin impregnated, wherein the thermoplastic polyurethane resin layer in close contact with the fibers of the nonwoven fabric, that are laminated resin layers of equal or softer hardness than the resin thereon the polishing cloth to flatness after polishing the object to be polished is remarkably improved. この事により、研磨精度が向上すると共に、効率の良い研磨が可能となった。 By this, as well as improving polishing accuracy, and enables efficient grinding.

Claims (2)

  1. 複数の樹脂が含浸された不織布の研磨クロスであり、不織布の繊維に密着した熱可塑性ポリウレタン樹脂層と、その上層に前記樹脂よりも硬度が同等あるいは軟質の樹脂層が積層されていることを特徴とする研磨用クロス。 A polishing cloth of the nonwoven fabric in which a plurality of resin impregnated, wherein the thermoplastic polyurethane resin layer in close contact with the fibers of the nonwoven fabric, that are laminated resin layers of equal or softer hardness than the resin thereon polishing cloth to be.
  2. 不織布に最初に熱可塑性ポリウレタン樹脂を含浸させ、さらに熱可塑性ポリウレタン樹脂よりも硬度が同等あるいは軟質の樹脂を含浸する研磨クロスの製造方法 First impregnated with thermoplastic polyurethane resin to the nonwoven fabric, the method of manufacturing a polishing cloth, further hardness than thermoplastic polyurethane resin is impregnated with a resin of equal to or soft
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JP2012101333A (en) * 2010-11-11 2012-05-31 Fujibo Holdings Inc Polishing pad and method of manufacturing polishing pad
US8850719B2 (en) 2009-02-06 2014-10-07 Nike, Inc. Layered thermoplastic non-woven textile elements
US8906275B2 (en) 2012-05-29 2014-12-09 Nike, Inc. Textured elements incorporating non-woven textile materials and methods for manufacturing the textured elements
US9227363B2 (en) 2009-02-06 2016-01-05 Nike, Inc. Thermoplastic non-woven textile elements
US9579848B2 (en) 2009-02-06 2017-02-28 Nike, Inc. Methods of joining textiles and other elements incorporating a thermoplastic polymer material

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JP2009101504A (en) * 2007-10-03 2009-05-14 Fujibo Holdings Inc Polishing cloth
JP2010069592A (en) * 2008-09-19 2010-04-02 Asahi Kasei Fibers Corp Abrasive cloth for processing texture
US9227363B2 (en) 2009-02-06 2016-01-05 Nike, Inc. Thermoplastic non-woven textile elements
US10131091B2 (en) 2009-02-06 2018-11-20 Nike, Inc. Methods of joining textiles and other elements incorporating a thermoplastic polymer material
US8850719B2 (en) 2009-02-06 2014-10-07 Nike, Inc. Layered thermoplastic non-woven textile elements
US10138582B2 (en) 2009-02-06 2018-11-27 Nike, Inc. Thermoplastic non-woven textile elements
US9579848B2 (en) 2009-02-06 2017-02-28 Nike, Inc. Methods of joining textiles and other elements incorporating a thermoplastic polymer material
US9682512B2 (en) 2009-02-06 2017-06-20 Nike, Inc. Methods of joining textiles and other elements incorporating a thermoplastic polymer material
US9732454B2 (en) 2009-02-06 2017-08-15 Nike, Inc. Textured elements incorporating non-woven textile materials and methods for manufacturing the textured elements
US10174447B2 (en) 2009-02-06 2019-01-08 Nike, Inc. Thermoplastic non-woven textile elements
JP2012101333A (en) * 2010-11-11 2012-05-31 Fujibo Holdings Inc Polishing pad and method of manufacturing polishing pad
US8906275B2 (en) 2012-05-29 2014-12-09 Nike, Inc. Textured elements incorporating non-woven textile materials and methods for manufacturing the textured elements

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