JP2004287191A - Color filter array, spatial optical modulating device, and projection type display device - Google Patents

Color filter array, spatial optical modulating device, and projection type display device Download PDF

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Publication number
JP2004287191A
JP2004287191A JP2003080566A JP2003080566A JP2004287191A JP 2004287191 A JP2004287191 A JP 2004287191A JP 2003080566 A JP2003080566 A JP 2003080566A JP 2003080566 A JP2003080566 A JP 2003080566A JP 2004287191 A JP2004287191 A JP 2004287191A
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Japan
Prior art keywords
dielectric layer
light
filter array
color filter
dielectric
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Pending
Application number
JP2003080566A
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Japanese (ja)
Inventor
Susumu Ariga
進 有賀
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Seiko Epson Corp
セイコーエプソン株式会社
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Priority to JP2003080566A priority Critical patent/JP2004287191A/en
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Abstract

Provided are a color filter array, a spatial light modulator, and a projection type display device which have a sufficient wavelength selection width and can be manufactured at low cost.
A plurality of dielectric layers having different refractive indices are stacked in a thickness direction, and at least two or more of the plurality of dielectric layers are stacked. In addition, a step surface 35r, 35g, 35b, 36r, 36g, 36b whose layer thickness changes stepwise depending on the place is formed, and the layer thickness is at a predetermined position of one of the dielectric layers 31, 33, It is characterized in that light of a predetermined wavelength is set to be reflected in one dielectric layer, resonated, and transmitted.
[Selection diagram] FIG.

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a color filter array, a spatial light modulator, and a projection display. In particular, the present invention relates to a color filter array, a spatial light modulator, and a projection display device which have a sufficient wavelength selection width and can be manufactured at low cost.
[0002]
[Prior art]
Conventionally, color filters used in liquid crystal devices and the like include an absorption filter that transmits only light of a predetermined color and absorbs light of another color, and a color filter that transmits only light of a predetermined color and transmits light of another color. A reflection type filter that reflects light is known. One of the reflection filters is an interference filter.
For example, as a color filter array classified as an interference-type filter, a transparent glass substrate having a first reflective layer continuum disposed on one surface and a plurality of color filter arrays disposed at predetermined positions on the first reflective layer continuum are provided. And a second continuum of reflective layers disposed on the plurality of tuning spacer layers to form a plurality of Fabry-Perot single-cavity color filters.
[0003]
The basic design of the above color filter array is what is called a single cavity Fabry-Perot filter, which consists simply of a tuned cavity structure consisting of two mirrors separated by a spacer layer. In this filter, when the thickness of the spacer is an integral multiple of one half of the wavelength of the resonance frequency, a resonance peak occurs, and color light of a specific wavelength is transmitted. Utilizing this property, a color filter array that selectively transmits arbitrary color light has been designed (for example, see Patent Document 1).
[0004]
[Patent Document 1]
Japanese Unexamined Patent Publication No. Hei 8-508114 (page 9, FIG. 3)
[0005]
[Problems to be solved by the invention]
As described above, in the conventional color filter array, the first reflection layer continuum used for reflection is formed of a multilayer film, but the tuning spacer layer used as a resonator has a single-layer structure. Therefore, the wavelength range of resonable light determined by the combination of the thickness of the tuning spacer layer and the refractive index of the tuning spacer layer and the reflection layer continuum is limited. That is, there is a problem that the wavelength selection width becomes narrow.
[0006]
The color filter array is manufactured by a conventional lift-off method used for manufacturing an integrated circuit device, or a method using photomasking and etching. However, even if these manufacturing methods are used, there is a problem that many steps are required to form resonators having different thicknesses having the reflective layer continuum, and the manufacturing cost is high.
[0007]
The present invention has been made to solve the above problems, and has an object to provide a color filter array, a spatial light modulator, and a projection display device which have a sufficient wavelength selection width and can be manufactured at low cost. And
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the color filter array of the present invention has a structure in which a plurality of dielectric layers having different refractive indices are stacked in a thickness direction, and at least two or more dielectric layers among the plurality of dielectric layers are provided. In the body layer, a step surface whose layer thickness changes stepwise depending on the place is formed, and the layer thickness is set at a predetermined position of the one dielectric layer, and light of a predetermined wavelength is applied to the one dielectric layer. It is characterized in that it is set so as to reflect, resonate and transmit in the body layer.
[0009]
That is, in the color filter array of the present invention, white light containing light of various wavelengths enters the one dielectric layer, a part of the white light is transmitted at the boundary surface of the one dielectric layer, and the remaining White light is reflected. The reflected white light repeats part of the transmission at the boundary surface and reflection of the rest, but light having a wavelength where the thickness and refractive index of one dielectric layer match the resonance conditions causes resonance. Increases from the dielectric layer. Further, since at least two dielectric layers having different refractive indices are provided, the combination of the thickness of one dielectric layer and the refractive index is larger than that of the conventional color filter array, so that resonance and transmission are possible. Wavelength range, that is, the wavelength selection range can be widened.
In addition, since the one dielectric layer has a relatively simple shape having a step surface in which the layer thickness changes stepwise, the manufacturing method may be an inexpensive manufacturing method such as press molding. It can be manufactured at low cost.
[0010]
In order to realize the above configuration, more specifically, a step surface is formed on one surface of one dielectric, and the other surface of one dielectric is formed in a planar shape. Is formed so as to fill the gap, and the other surface that is not in contact with the step surface of the second dielectric can be formed in a planar shape.
[0011]
With the above configuration, one dielectric layer and two dielectric layers can be stacked without gaps to form a set of one dielectric layer and two dielectric layers. For example, a pair of the one dielectric layer and the two dielectric layers may be formed on one surface of the second dielectric layer by an inexpensive method such as press working so that the concave surface is symmetric with the step surface of the one dielectric. A step can be formed at a low cost by forming a step-like shape and depositing a dielectric layer on the step-like shape by vapor deposition or pouring a liquid.
And since the outer surface of the set of one dielectric layer and the second dielectric layer is formed in a planar shape, the outer surfaces of the plurality of sets of dielectric layers can be easily bonded to each other, A multilayer color filter array can be manufactured at low cost.
[0012]
In the above-described color filter array of the present invention, the semi-transmissive reflective layer can be provided on one surface and the other surface of one dielectric layer. More preferably, it is desirable that the reflective layer is formed of a metal film.
By providing the reflective layer, the number of effective reflections in one dielectric layer is increased, the effect of resonance due to interference is increased, the wavelength of transmitted light is reduced, and a more favorable characteristic as a color filter array is exhibited. be able to.
Further, as a reflection layer, a multilayer mirror in which dielectric layers having different refractive indexes are alternately arranged is also known, but in the case of a multilayer mirror, dielectric layers having different refractive indexes must be laminated in multiple layers. However, many steps are required for the production, and the production is expensive. On the other hand, in the case of a metal film, for example, even if evaporation is used, the number of steps is small, and it can be manufactured at low cost.
[0013]
In addition, a spatial light modulator that spatially modulates light incident on a display region and outputs the light can include the color filter array of the present invention. Further, as the spatial light modulator, a liquid crystal device in which liquid crystal is sandwiched between two substrates facing each other can be applied.
Since the spatial light modulator includes the above-described color filter array, the wavelength range of the color light that can be displayed by the spatial light modulator can be widened, and the spatial light modulator can be manufactured at low cost.
[0014]
The spatial light modulator according to the present invention is applied to a light modulating means of a projection display device comprising a light source, a light modulating means for modulating light from the light source, and a projecting means for projecting the light modulated by the light modulating means. Can be provided.
By providing the spatial light modulator in the light modulating means of the projection display device, the wavelength range of the color light of the image synthesized by the light modulating means can be widened, and it can be manufactured at low cost.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a schematic configuration diagram of a projection display device 10 according to the present embodiment. In FIG. 1, reference numeral 11 denotes a light source, 12 denotes a rod integrator, 13 denotes a condenser lens system, 14 denotes a color filter array, 16 denotes a spatial light modulator (light modulator), and 17 denotes a projection lens (projector). In the following embodiments, a transmissive liquid crystal device will be exemplified as a spatial light modulator according to the present invention.
[0016]
As shown in FIG. 1, a projection display device 10 according to the present embodiment includes a light source 11 that emits white light, a rod integrator 12 that makes the luminance distribution of the white light emitted from the light source 11 uniform, and a luminance distribution A condenser lens system 13 for converting white light into a parallel light, a color filter array 14 for separating the white light converted to parallel light into RGB color lights, and a liquid crystal device for modulating each of the separated color lights. 16 and a projection lens 17 for projecting the modulated color lights onto the screen S.
[0017]
As shown in FIG. 1, the light source 11 includes a lamp 21 such as a metal halide that emits white light, and a reflector 22 that reflects the emitted white light.
As the rod integrator 12, a transparent rod-shaped light guide (for example, a glass rod) or a tubular light guide having an inner surface as a reflection surface (for example, a kaleidoscope in which a plurality of reflection mirrors are arranged in a tubular shape inwardly) ) Is used.
The condenser lens system 13 is provided with a condenser lens 25a and a condenser lens 25b such that light incident from the rod integrator 12 is incident on the color filter array 14 as parallel light.
[0018]
FIG. 2 is a schematic diagram of the color filter array 14 and the liquid crystal device 16 in the present embodiment, and FIG. 3 is an enlarged cross-sectional view of the color filter array 14 and the liquid crystal device 16 in the present embodiment.
As shown in FIGS. 2 and 3, the color filter array 14 includes a first dielectric layer 31 made of a medium having a refractive index n1, a second dielectric layer 32 made of a medium having a refractive index n2, A third dielectric layer 33 made of a medium of n3 and a fourth dielectric layer made of a medium of a refractive index n4 are laminated.
[0019]
The first dielectric layer 31 has a stepped surface 35r having a layer thickness tr1, a stepped surface 35g having a layer thickness tg1, and a stepped surface 35b having a layer thickness tb1, and the arrangement of these stepped surfaces is determined by pixels 43r and 43g described later. 43b, they are arranged in stripes or in a matrix. Similarly, the third dielectric layer 33 is formed with a stepped surface 36r having a layer thickness tr3, a stepped surface 36g having a layer thickness tg3, and a stepped surface 36b having a layer thickness tb3, and the arrangement of these stepped surfaces will be described later. 43r, 43g, and 43b are arranged in a stripe or a matrix corresponding to each.
[0020]
The second dielectric layer 32 is formed in a shape that fills the step surfaces 35r, 35g, and 35b, and the fourth dielectric layer 34 is also formed in a shape that fills the step surfaces 36r, 36g, and 36b.
The layer thicknesses tr1 and tr3 are set such that color light having an R wavelength component of the white light passes through the color filter array 14, and the layer thicknesses tg1 and tg3 have a G wavelength component of the white light. The layer thicknesses tb1 and tb3 are set so that the color light having the B wavelength component of the white light passes through the color filter array 14 so that the color light passes through the color filter array 14.
[0021]
As shown in FIGS. 2 and 3, the liquid crystal device 16 has a transmission type of a TN (Twisted Nematic) mode using a thin film transistor (hereinafter abbreviated as a TFT) as a pixel switching element. Liquid crystal cell is used.
The liquid crystal device 16 includes substrates 41a and 41b arranged on the light source 11 side and the projection lens 17 side, a common electrode 42 provided on the substrate 41a, a pixel electrode 43 provided on the substrate 41b, a common electrode 42 and a pixel. It comprises a thin film transistor 44 for controlling the voltage between the electrodes 43 and a liquid crystal 45 sealed between the common electrode 42 and the pixel electrode 43.
The pixel electrodes 43 are arranged in the display area of the liquid crystal device 16, and a pixel 43r corresponding to R, a pixel 43g corresponding to G, and a pixel 43b corresponding to B are configured as one basic unit of image display.
[0022]
Next, the operation of the projection display device 10 having the above configuration will be described.
As shown in FIG. 1, the white light emitted to the surroundings by the emission of the lamp 21 is reflected by the reflector 22 and enters the rod integrator 12. The white light that has entered the rod integrator 12 repeats internal reflection within the rod integrator 12, and when emitted from the exit end face, has uniform illuminance and exits from the exit side end face.
The white light emitted from the rod integrator 12 becomes parallel light by transmitting through the condenser lenses 25a and 25b, and is emitted toward the color filter array 14.
[0023]
The white light that has entered the color filter array 14 first enters the first dielectric layer 31 and is reflected at a boundary surface of the first dielectric layer 31 at a reflectance determined by a difference in refractive index, and is not reflected. Light is transmitted. Color light of a wavelength whose refractive index n1 and layer thicknesses tr1, tg1, and tb1 of the white light that repeats reflection in the first dielectric layer 31 matches the resonance condition causes resonance and causes the first dielectric layer 31 to move. To Penetrate.
[0024]
Each color light transmitted through the first dielectric layer 31 is transmitted through the second dielectric layer 32 and enters the third dielectric layer 33. The respective color lights incident on the third dielectric layer 33 are, as in the case of the first dielectric layer 31, the color lights R, G of wavelengths whose refractive index n3 and layer thickness tr3, tg3, tb3 match the resonance conditions. , B cause resonance and pass through the third dielectric layer 33 and pass through the fourth dielectric layer 34.
[0025]
The respective color lights R, G, B separated by the color filter array 14 are respectively incident on the pixels 43r, 43g, 43b of the liquid crystal device 16 corresponding to the respective color lights.
Since the liquid crystal device 16 is controlled and driven for each of the pixels 43r, 43g, and 43b corresponding to each color light, an image is synthesized by selectively modulating and transmitting each color light. The light emitted from the liquid crystal device 16 enters the projection lens 17 and is emitted toward the projection screen S as shown in FIG.
[0026]
Next, a method of manufacturing the color filter array 14 will be described.
First, the plate-shaped second dielectric layer 32 is press-processed, so that the step surfaces corresponding to the step surfaces 35r, 35g, and 35b of the first dielectric layer 31 are formed on one side of the second dielectric layer 32. Formed on the surface.
Then, a first dielectric layer 31 is formed on one surface of the second dielectric layer 32 by vapor deposition, or a liquid dielectric is poured and solidified to form the first dielectric layer 31. , A set of the first dielectric layer 31 and the second dielectric layer 32 is formed.
[0027]
The set of the third dielectric layer 33 and the fourth dielectric layer 34 is also formed by press working or the like, similarly to the set of the first dielectric layer 31 and the second dielectric layer 32.
Then, the set of the first dielectric layer 31 and the second dielectric layer 32 and the set of the third dielectric layer 33 and the fourth dielectric layer 34 are connected to the step surfaces 35r, 35g, 35b and the step surfaces. The surfaces 36r, 36g, and 36b are bonded to each other.
[0028]
According to the above configuration, a combination of the refractive index n1 of the first dielectric layer 31 and each of the layer thicknesses tr1, tg1, and tb1, and the refractive index n3 of the third dielectric layer 32 and each of the layer thicknesses tr3, tg3, and tb3. Thereby, the wavelength selection range of light to be resonated and transmitted can be widened.
Therefore, the wavelength width of the color of the image that can be synthesized by the liquid crystal device 16 is widened, and the wavelength width of the color of the image that can be projected by the projection display device 10 can be widened.
[0029]
Also, steps corresponding to the step surfaces 35r, 35g, and 35b are formed in the second dielectric layer 32 by press working, and a dielectric is deposited thereon, or a first dielectric is poured by pouring a liquid dielectric. Since the body layer 31 is formed, an inexpensive manufacturing method can be used as compared with the conventional example, and the color filter array 14 can be manufactured at low cost.
Therefore, the liquid crystal device 16 using the color filter array 14 can be manufactured at low cost, and the projection display device 10 can be manufactured at low cost.
[0030]
[Second embodiment]
Next, a second embodiment of the present invention will be described with reference to FIG.
The basic configuration of the projection display device of the present embodiment is the same as that of the first embodiment, but differs from the first embodiment in the configuration of the color filter array. Therefore, in the present embodiment, only the periphery of the color filter array will be described with reference to FIG. 4, and the description of the other parts will be omitted.
[0031]
FIG. 4 is an enlarged cross-sectional view of the liquid crystal device which is the color filter array and the spatial light modulator of the present embodiment.
As shown in FIG. 4, the color filter array 60 includes a surface of the first dielectric layer 31 on the light source 11 side, a surface of the third dielectric layer 33 on the light source 11 side, and step surfaces 35r, 35g, A semi-permeable aluminum film (reflection layer) 61 is deposited on 35b, 36r, 36g and 36b.
[0032]
Next, the operation of the projection display device 10 having the above configuration will be described.
The white light that has entered the color filter array 60 first enters the first dielectric layer 31 and has a higher reflectance than the first embodiment due to the aluminum film 61 at the boundary surface of the first dielectric layer 31. Light that is reflected and not reflected is transmitted. Since the light is reflected with a higher reflectance, the number of times of reflection in the first dielectric layer 31 increases, the resonance effect increases, and the intensity of each color light transmitted through the first dielectric layer 31 decreases. As the intensity increases, the wavelength width of each transmitted color light decreases.
[0033]
Similarly, for each color light transmitted through the first dielectric layer 31 and incident on the third dielectric layer 33, the number of times of repetition of reflection in the third dielectric layer 33 increases, and the effect of resonance is large. Thus, the intensity of each color light R, G, B transmitted through the third dielectric layer 33 increases, and the wavelength width of each color light R, G, B transmitted decreases.
[0034]
Next, a method of manufacturing the color filter array 60 will be described.
First, similarly to the first embodiment, a step surface corresponding to the step surfaces 35r, 35g, and 35b is formed on one surface of the plate-shaped second dielectric layer 32.
Next, aluminum is deposited on the formed step surface to form an aluminum film 61.
Then, similarly to the first embodiment, the first dielectric layer 31 is formed on one surface of the second dielectric layer 32. Thereafter, aluminum is deposited on a surface of the first dielectric layer 31 which is not in contact with the second dielectric layer 32 to form an aluminum film 61, and the first dielectric layer 31 and the second dielectric layer 32 are formed. Complete the set of
[0035]
The set of the third dielectric layer 33 and the fourth dielectric layer 34 is also created in the same manner as the set of the first dielectric layer 31 and the second dielectric layer 32, and has step surfaces 35r, 35g, 35b and The step surfaces 36r, 36g, and 36b are stuck so as to correspond to each other.
[0036]
According to the above configuration, since the aluminum film 61 is disposed on the light reflecting surfaces of the first and third dielectric films 31, 33, the effective number of reflections in each of the dielectric layers 31, 33 is reduced. The effect of the resonance due to the increased interference increases, and the wavelength of the transmitted light becomes narrower, so that more preferable characteristics as the color filter array 60 can be exhibited.
Therefore, the color purity of the image synthesized by the liquid crystal device 16 using the color filter array 60 can be increased, and the color purity of the image projected by the projection display device 10 can be increased.
[0037]
Further, since the aluminum film 61 is used as a reflection film, the number of steps required for manufacturing the mirror is smaller than that of a multilayer mirror, so that the color filter array 60 can be manufactured at low cost.
Therefore, the liquid crystal device 16 using the color filter array 60 can be manufactured at low cost, and the projection display device 10 can also be manufactured at low cost.
[0038]
Note that the technical scope of the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, a description has been given of a case in which a plurality of sets of a dielectric layer that repeatedly reflects light inside and a plurality of sets of dielectric layers that do not reflect light are stacked. It is not limited to a stacked structure, and a space is formed without inserting anything between the dielectric layers that repeatedly reflect light inside, and a resonator structure is established by the difference in the refractive index between the dielectric layer and air It can be adapted to things.
Further, in the above-described embodiment, the description has been given of the case where the dielectric layer is laminated in four layers. However, the present invention is not limited to the dielectric layer in which four dielectric layers are laminated. It can be adapted to.
Further, in the above embodiment, a transmissive liquid crystal device is exemplified and shown as the spatial light modulator according to the present invention. However, the technical scope of the present invention is not limited to the transmissive liquid crystal device. The present invention also includes a liquid crystal device of a type, a form as a DMD (digital mirror device) and the like.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a projection display device according to a first embodiment of the present invention.
FIG. 2 is a schematic diagram illustrating a color filter array and a liquid crystal device according to the first embodiment of the present invention.
FIG. 3 is an enlarged sectional view showing the color filter array and the liquid crystal device according to the first embodiment of the present invention.
FIG. 4 is an enlarged sectional view showing a color filter array and a liquid crystal device according to a second embodiment of the present invention.
[Explanation of symbols]
Reference Signs List 10 projection display device, 11 light source, 14, 60 color filter array, 16 liquid crystal device (light modulation means), 17 projection lens (projection means), 31, 32, 33, 34 dielectric layer, 35r, 35g, 35b, 36r, 36g, 36b Step surface, 41a, 41b substrate, 45 liquid crystal, 61 aluminum film (reflection layer)

Claims (7)

  1. A plurality of dielectric layers having different refractive indices are stacked in the thickness direction,
    Of the plurality of dielectric layers, at least two or more dielectric layers are formed with a step surface whose thickness changes stepwise depending on the location,
    A color, wherein the layer thickness is set such that light of a predetermined wavelength is reflected, resonated, and transmitted in the one dielectric layer at a predetermined position of the one dielectric layer. Filter array.
  2. The step surface is formed on one surface of the one dielectric, and the other surface of the one dielectric is formed in a planar shape,
    A second dielectric layer is formed to fill the step surface of the one dielectric layer,
    The color filter array according to claim 1, wherein the other surface of the two dielectric layers that is not in contact with the step surface is formed in a planar shape.
  3. 3. The color filter array according to claim 1, wherein a semi-transmissive reflective layer is provided on one surface and the other surface of said one dielectric layer.
  4. The color filter array according to claim 3, wherein the reflection layer is formed of a metal film.
  5. A spatial light modulator that spatially modulates light incident on a display area and outputs the light,
    A spatial light modulation device comprising the color filter array according to claim 1.
  6. The spatial light modulation device according to claim 5, wherein the spatial light modulation device is a liquid crystal device that sandwiches a liquid crystal between two substrates facing each other.
  7. A projection display device including a light source, light modulation means for modulating light from the light source, and projection means for projecting light modulated by the light modulation means,
    A projection type display device, wherein the light modulation means includes the spatial light modulation device according to claim 5.
JP2003080566A 2003-03-24 2003-03-24 Color filter array, spatial optical modulating device, and projection type display device Pending JP2004287191A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070437A (en) * 2006-09-12 2008-03-27 Matsushita Electric Ind Co Ltd Interference filter, liquid crystal display, electroluminescence display, and projection display device
EP1913627A2 (en) * 2005-08-12 2008-04-23 Essex Corporation Variable reflectivity coatings with constant optical thickness and phase
US7453547B2 (en) 2005-01-12 2008-11-18 Au Optronics Corp. Method of forming liquid crystal display panel
JP2010541000A (en) * 2007-09-26 2010-12-24 イーストマン コダック カンパニー Manufacturing method of color filter array
JP2011123186A (en) * 2009-12-09 2011-06-23 Panasonic Corp Color development structure and product using color development structure
FR2977684A1 (en) * 2011-07-08 2013-01-11 Commissariat Energie Atomique Method for printing a filter for electromagnetic radiation
WO2015169761A1 (en) * 2014-05-06 2015-11-12 Commissariat à l'énergie atomique et aux énergies alternatives Optical filtering device including fabry-perot cavities comprising a structured layer and having different thicknesses
KR101575760B1 (en) * 2014-04-14 2015-12-08 서울대학교산학협력단 Self-alignment type color filter array with light-blocking region and method for manufacturing the same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7453547B2 (en) 2005-01-12 2008-11-18 Au Optronics Corp. Method of forming liquid crystal display panel
EP1913627A2 (en) * 2005-08-12 2008-04-23 Essex Corporation Variable reflectivity coatings with constant optical thickness and phase
EP1913627A4 (en) * 2005-08-12 2010-11-10 Essex Corp Variable reflectivity coatings with constant optical thickness and phase
JP2008070437A (en) * 2006-09-12 2008-03-27 Matsushita Electric Ind Co Ltd Interference filter, liquid crystal display, electroluminescence display, and projection display device
JP2010541000A (en) * 2007-09-26 2010-12-24 イーストマン コダック カンパニー Manufacturing method of color filter array
JP2011123186A (en) * 2009-12-09 2011-06-23 Panasonic Corp Color development structure and product using color development structure
FR2977684A1 (en) * 2011-07-08 2013-01-11 Commissariat Energie Atomique Method for printing a filter for electromagnetic radiation
WO2013008146A1 (en) * 2011-07-08 2013-01-17 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method of impression-based production of a filter for an electromagnetic radiation
KR101575760B1 (en) * 2014-04-14 2015-12-08 서울대학교산학협력단 Self-alignment type color filter array with light-blocking region and method for manufacturing the same
WO2015169761A1 (en) * 2014-05-06 2015-11-12 Commissariat à l'énergie atomique et aux énergies alternatives Optical filtering device including fabry-perot cavities comprising a structured layer and having different thicknesses

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