JP2004264015A - Air conditioner and air conditioning method for clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air conditioner and an air conditioning method for a clean room, capable of effectively using a floor surface in the room, reducing implementation cost, improving air conditioning efficiency, and preventing the occurrence of unevenness in temperature. <P>SOLUTION: A return shaft 11 having openings at both upper and lower ends extends from neighborhood of the floor of a room 4 to a ceiling section 2, and connects to the inside of a ceiling chamber 3. A first fan coil 12 installed above the return shaft 11 and inside the ceiling camber 3, sucks part of the air inside the return shaft 11, and feeds temperature conditioned air into the ceiling chamber 3 so as to mix with air flowing into the ceiling chamber 3 as it is induced by sucking force of a fan filter unit 5. A second fan coil 13 installed above an opening portion 2b for temperature conditioning, sucks a part of the air from the opening portion 2b for temperature conditioned formed in a ceiling section 2, and feeds the temperature conditioning air into the ceiling chamber 3 so as to mix with air flowing into the ceiling chamber 3 as it is induced by the sucking force of the fan filter unit 5. A hanging wall 14 is provided around the opening portion 2b for temperature conditioning to block the air along the ceiling section 2. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to an air conditioner and an air conditioning method for a clean room.

  As a conventional clean room air conditioner, a filter device provided in the indoor ceiling, a lower chamber formed in the indoor underfloor space, a ceiling chamber formed in the indoor ceiling, a lower chamber and a ceiling chamber. And a return shaft provided in the indoor space by communicating with a fan coil provided in the return shaft (for example, see Patent Documents 1, 2, and 3). Further, there is a type in which a dry coil is installed under the floor or on the ceiling of a return shaft (for example, see Patent Document 4).

  As the one without a return shaft, the outer casing incorporates an air conditioner with a thin box body on the indoor wall surface, a suction port at one end of the casing, and an air outlet with a filter at the other end, A heat exchanger is provided on the suction port side in the casing, and a blower is provided on the outlet port side (for example, see Patent Document 5). An air suction port unit that sucks indoor air and a fan filter unit are provided in a ceiling chamber. Provided with an air conditioner outside the room (see, for example, Patent Document 6), a clean air supply unit for supplying clean air into the room, and air returned to the clean air supply unit by sucking room air from the air inlet. And a return chamber unit that is disposed in the ceiling chamber, and a return air guide extending toward the room is provided around the air suction port (for example, See Patent Document 7).

JP 2000-74439 A JP 2000-346416 A JP-A-7-139761 Japanese Utility Model Publication No. 6-48256 JP-A-61-101732 Japanese Patent Publication No. 4-54140 JP 2001-153414 A

  However, the air conditioners for clean rooms described in Patent Literatures 1, 2, 3, and 4 have a problem that the floor area is reduced because the return shaft is provided in the indoor space. In the air conditioner for a clean room described in Patent Literature 5, it is necessary to manufacture a dedicated air conditioner, and there is a problem that the introduction cost increases. In the air conditioner for a clean room described in Patent Literature 6, the air blown out from the fan filter unit is sucked into the air inlet unit immediately after traveling along the ceiling, or a vortex of air is generated at the ceiling, and the air conditioning efficiency is increased. Was bad. The air conditioner for a clean room described in Patent Literature 7 has a problem that the air circulation efficiency is lower and temperature unevenness is more likely to occur as compared with a case where air is sucked in near the floor.

  The present invention has been made in view of such a conventional problem, and is an air conditioner for a clean room capable of effectively utilizing the indoor floor surface, reducing the introduction cost, improving the air conditioning efficiency, and eliminating temperature unevenness. And an air conditioning method.

  In order to achieve the above object, a clean room air conditioner according to the present invention is a clean room air conditioner that sends clean air into a room by a fan filter unit from a ceiling chamber separated from a room and a room ceiling portion. A return shaft extending from the vicinity of the floor in the room to the ceiling of the room and communicating with the interior of the ceiling chamber; and a return shaft provided inside the ceiling chamber above the return shaft and inside the return shaft. A first fan coil that draws a portion of the air from the chamber, sends temperature-controlled air into the ceiling chamber, and sends the air to the ceiling chamber as it is mixed with the air flowing into the ceiling chamber by the suction force of the fan filter unit; A part of the air is sucked from the temperature control opening provided in the ceiling of the room and the inside of the ceiling chamber is A second fan coil installed above the temperature control opening for sending temperature-controlled air to be mixed with the air flowing into the ceiling chamber as it is by the suction force of the fan filter unit; and a second fan coil provided around the temperature control opening. And a hanging wall for blocking air along the ceiling of the room.

  An air conditioning method for a clean room according to the present invention is an air conditioning method for a clean room in which clean air is sent into a room by a fan filter unit from a ceiling chamber separated from the room and the room ceiling portion, and the room ceiling portion is moved from near the floor surface of the room. A return shaft extending to the inside of the ceiling chamber extending to the inside of the ceiling chamber, a first fan coil is provided inside the ceiling chamber above the return shaft, a temperature control opening is provided in the room ceiling, A second fan coil is provided above the temperature control opening inside the ceiling chamber, and a hanging wall is provided around the temperature control opening to block air along the indoor ceiling, and the fan filter A part of the room air sucked by the unit from near the floor in the room via the return shaft is transferred to the first fan coil. The second fan coil is configured to draw a part of the room air sucked by the suction force of the fan filter unit from the temperature control opening through the temperature control opening beyond the hanging wall. And the air is sent to the inside of the ceiling chamber so as to be mixed with the air flowing into the ceiling chamber from the opening for temperature adjustment as it is.

  In the clean room air conditioner and the clean room air conditioning method according to the present invention, the first fan coil sucks a part of the air near the floor in the room, which rises from the inside of the return shaft by the suction force of the fan filter unit. Sends conditioned air into the ceiling chamber. The second fan coil sucks a part of the room air rising by the suction force of the fan filter unit from the temperature control opening, and sends the temperature-controlled air into the ceiling chamber. At this time, the air along the ceiling of the room is blocked by the hanging wall, and only the air in the room that has passed over the hanging wall flows into the temperature control opening, and a part thereof is sucked into the second fan coil. For this reason, it is possible to prevent the clean air supplied from the fan filter unit into the room from being directly sucked into the fan filter unit through a short path, thereby improving the air conditioning efficiency. In the event of a fire, the circulation operation of the fan filter unit for cleaning is stopped, and smoke near the ceiling is exhausted by a separately installed smoke exhaust fan, but the hanging wall diffuses smoke from the temperature control opening into the ceiling. It can also provide a smoke-preventing effect that prevents smoke.

  The second fan coil sends the temperature-controlled air to be mixed with the fan filter unit suction air rising from the temperature-control opening. For this reason, both the circulating air of the return shaft and the circulating air of the temperature control opening are mixed with the temperature controlled air by the fan coil, and the air in the ceiling chamber becomes mixed air, so that the air conditioning effect can be enhanced.

  The air in the ceiling chamber is sent into the room by the fan filter unit, is sucked from the vicinity of the floor surface through the return shaft by the suction force of the fan filter unit, and part of the air is sucked or dripped by the first fan coil. The air is sucked in from the temperature control opening beyond the wall by the suction force of the fan filter unit, and a part of the air is sucked into the second fan coil and becomes air blown out from each fan coil in the ceiling chamber, and does not pass through each fan coil. Mixes and circulates with air. Thereby, it is possible to eliminate the temperature unevenness in the room.

  In the air conditioner for a clean room according to the present invention, the second fan coil is provided inside the ceiling chamber, and the return shaft is not provided below the second fan coil. Can be used. Further, since the first fan coil and the second fan coil can be hung in a row in the ceiling chamber, the cold water pipe can be installed on the return shaft at the shortest distance, and compared with the case where the fan coil is installed on the floor. The introduction cost can be reduced.

  Note that the first fan coil and the second fan coil are preferably arranged adjacent to or close to each other in order to facilitate mixing of the blown temperature-controlled air. The first fan coil and the second fan coil may be arranged such that the blowing directions of the temperature-regulated air are parallel or may intersect at a right angle or another angle.

  The air conditioner for a clean room according to the present invention is provided with an air flow controller in the temperature control opening, and the air flow controller is a louver for adjusting the direction of air flow from the room to the second fan coil, and from the room. It is preferable to have an openable and closable shutter for adjusting the amount of air supplied to the second fan coil.

  In this case, the air flow direction from the room to the second fan coil is adjusted by the louver of the air volume controller, and the supply amount of air to the fan filter unit and the second fan coil is adjusted by opening and closing the shutter to control the temperature-controlled air. Balance can be adjusted.

  Advantageous Effects of Invention According to the present invention, it is possible to provide a clean room air conditioner and an air conditioning method for effectively utilizing a floor surface in a room, reducing introduction costs, improving air conditioning efficiency, and eliminating temperature unevenness.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 4 show an embodiment of the present invention.
As shown in FIGS. 2 and 3, the clean room 1 is surrounded by a floor 1a, a wall 1b, and an upper floor slab lower surface 1c so as to be able to be hermetically sealed. The clean room 1 is separated by a ceiling part 2 and is divided into a ceiling chamber 3 on the upper side and a room 4 on the lower side. A plurality of fan filter units 5 (FFU) are arranged in the ceiling chamber 3, and clean air is sent to the room 4 through an opening provided in the ceiling 2.

  As shown in FIG. 1, the clean room air conditioner 10 includes a return shaft 11, a first fan coil 12, a second fan coil 13, a hanging wall 14, and an air volume controller 15.

  The return shaft 11 is formed of a cylindrical body having a rectangular cross section, and has openings 11a and 11b at both upper and lower ends. The return shaft 11 has legs 11c and is installed at an interval from the floor of the room 4. As the return shaft 11, a shaft having a smaller sectional area than that used in the related art can be used. The return shaft 11 has a wire mesh 11d at its lower end to close the opening 11b so that a clean towel or the like is not inadvertently sucked and carried to the ceiling. For example, a wire mesh having a mesh size of about 1 cm can be used as the wire mesh 11d. An opening 2 a that matches the opening 11 a of the return shaft 11 is provided in the ceiling 2 above the return shaft 11. The return shaft 11 extends from near the floor of the room 4 to the ceiling 2, is connected to the opening 2 a, and communicates with the interior of the ceiling chamber 3.

  The first fan coil 12 is suspended and fixed to the upper floor slab lower surface 1 c above the return shaft 11, and is provided inside the ceiling chamber 3. As shown in FIG. 1, the first fan coil 12 has an air inlet 12a at a lower part and a blower port 12b at a side part. The first fan coil 12 has a built-in fan, sucks a part of the air from the inside of the return shaft 11 through the air inlet 12a, and sends temperature-controlled air from the blower port 12b to the inside of the ceiling chamber 3. ing. In one example, the first fan coil 12 is arranged 500 mm above the opening 11 a of the return shaft 11.

  As shown in FIGS. 1 and 4, the second fan coil 13 is suspended and fixed to the lower surface 1 c of the upper floor slab in parallel with the first fan coil 12 in proximity to the first fan coil 12. It is provided inside. The second fan coil 13 is composed of the same type of device as the first fan coil 12, has an air suction port 13a at a lower part, and has a blower port 13b at a side part. The air outlet 13b of the second fan coil 13 faces the same direction as the air outlet 12b of the first fan coil 12, and the air blowing direction is parallel. A temperature control opening 2b is provided in the ceiling 2 below the second fan coil 13. The second fan coil 13 has a built-in fan. The second fan coil 13 sucks air from the temperature control opening 2b through the air inlet 13a, and sends temperature-controlled air from the blower port 13b to the inside of the ceiling chamber 3. The temperature-controlled air sent by the second fan coil 13 is mixed with the air flowing into the ceiling chamber 3 as it is by the suction force of the fan filter unit 5.

  The hanging wall 14 is provided perpendicular to the ceiling 2 around the temperature control opening 2b, and is disposed on the room 4 side. The hanging wall 14 blocks the air along the ceiling 2. The hanging wall 14 is made of a transparent heat-resistant tempered glass plate.

  The air volume controller 15 is provided in the temperature control opening 2 b inside the hanging wall 14. The air volume controller 15 is a manual type, and controls a louver 15 a for adjusting the air flow direction from the room 4 to the second fan coil 13 and a supply amount of air from the room 4 to the second fan coil 13. And an openable and closable shutter 15b for adjustment. The louver 15a is provided in the ventilation opening 15c and can be manually adjusted to an arbitrary angle. The shutter 15b is provided so as to cover the louver 15a, and the size of the ventilation opening 15c can be adjusted to an arbitrary size by manually opening and closing when adjusting the test operation of the chamber.

Next, the operation will be described.
As shown in FIG. 1, in the clean room air conditioner 10, the first fan coil 12 sucks a part of the air near the floor of the room 4 rising from the inside of the return shaft 11 by the suction force of the fan filter unit 5. To send temperature-controlled air into the ceiling chamber 3. The second fan coil 13 sucks a part of the air in the room 4 rising by the suction force of the fan filter unit 5 from the temperature control opening 2 b and sends the temperature-controlled air into the ceiling chamber 3. At the initial stage of the operation, the direction of air flow from the room 4 to the second fan coil 13 is adjusted by the louver 15a of the air volume controller 15, and the amount of air supplied to the second fan coil 13 is adjusted by opening and closing the shutter 15b. Then, the temperature distribution in the room is adjusted.

  When air is blown by the second fan coil 13, the air along the ceiling 2 is blocked by the hanging wall 14, and only a part of the air in the room 4 beyond the hanging wall 14 is sucked into the second fan coil 13. For this reason, the clean air supplied from the fan filter unit 5 to the room 4 is directly sucked into the fan filter unit 5 again in a short path, and the influence of the short circuit or the vortex generated in the ceiling 2 is prevented, and the air conditioning efficiency is improved. be able to. In the event of a fire, the circulation operation of the fan filter unit 5 for cleaning is stopped, and smoke near the ceiling is discharged by a separately installed smoke exhaust fan. However, the hanging wall 14 extends from the temperature control opening 2b into the ceiling. It can also provide a smoke prevention effect that prevents the diffusion of smoke.

  The second fan coil 13 sends the temperature-regulated air so as to be mixed with the air flowing into the ceiling chamber 3 as it is by the suction force of the fan filter unit 5. For this reason, both the circulating air of the return shaft 11 and the circulating air of the temperature control opening 2b are mixed with the temperature controlled air by the fan coil, and the air in the ceiling chamber 3 becomes mixed air to enhance the air conditioning effect. be able to.

  The air in the ceiling chamber 3 is sent into the room 4 by the fan filter unit 5 and is sucked from near the floor surface through the return shaft 11 by the suction force of the fan filter unit 5, and a part of the air is sucked into the first fan coil 12. Or is sucked by the suction force of the fan filter unit 5 from the temperature control opening 2b over the hanging wall 14 and a part thereof is sucked into the second fan coil 13 so that each fan coil The air is blown out of the fan coils 12 and 13 and is mixed with air that does not pass through the fan coils 12 and 13 and circulates. Thereby, the temperature unevenness of the room 4 can be eliminated.

  In the air conditioner 10 for a clean room, the second fan coil 13 is provided inside the ceiling chamber 3 and the return shaft 11 is not provided below the second fan coil 13. It can be used effectively. For example, when the layout of the clean room 1 is performed, a return shaft 11 is installed on a floor where the clean room 1 can be installed. 13, the temperature can be controlled and uniform temperature can be ensured.

  As shown in FIGS. 5 and 6, in the related art in which the fan coil 21 is provided below the return shaft 11, a part of the air sucked by the fan filter unit 5 is sucked by the fan coil 21. 11 needs to be installed by extending its total plane integral to near the floor in the room. Further, it is difficult to secure the flat area due to the layout of the room, and the return shaft 11 must be installed in various places in the room. Therefore, in order to route the cold water pipe 22 connected to the fan coil 21 installed at the lower portion of the return shaft 11 to various places over a long distance, it is necessary to extend the branch pipes to various places in the ceiling and stand down. For these reasons, material costs and laborious construction costs were incurred. Further, there is a problem that the return shaft 11 extended to near the floor hinders effective use of the room. Such a problem can be solved by the clean room air conditioner 10.

  Further, in the clean room 1 having such a high degree of cleanliness and a medium circulation air volume, the first fan coil 12 and the second fan coil 13 can be arranged in a row in the ceiling, and the length of the cold water pipe can be minimized. As a result, no labor is required for the connection, so that the introduction cost can be reduced.

  In the air conditioner 10 for a clean room, the first fan coil 12 and the second fan coil 13 are provided inside the ceiling chamber 3, so that the fan coils are separately installed below the return shaft 11 at each position of the chamber. Inspection is easier than in the case of

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the air conditioner for clean rooms of embodiment of this invention. It is a top view of the clean room in which the air conditioner for clean rooms shown in FIG. 1 was installed. It is a longitudinal cross-sectional view of the clean room in which the air conditioner for clean rooms shown in FIG. 1 was installed. FIG. 2A is a plan view and FIG. 2B is a longitudinal sectional view of a temperature control opening of the air conditioner for a clean room shown in FIG. 1. It is a longitudinal section of the clean room where the conventional clean room air conditioner was installed. It is a top view of the clean room where the conventional air conditioner for clean rooms was installed.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 Clean room 2 Ceiling part 2a opening 2b Temperature control opening part 3 Ceiling chamber 4 Room 5 Fan filter unit 10 Clean room air conditioner 11 Return shaft 12 First fan coil 12a Air suction port 12b Air blowing port 13 Second fan coil 13a Air suction port 13b Ventilation port 14 Hanging wall 15 Air volume controller 15a Louver 15b Shutter 15c Ventilation opening

Claims (3)

An air conditioner for a clean room that sends clean air into a room by a fan filter unit from a ceiling chamber separated from a room and a room ceiling,
A return shaft having openings at both upper and lower ends, extending from near the floor of the room to the ceiling of the room, and communicating with the interior of the ceiling chamber;
It is provided inside the ceiling chamber above the return shaft, sucks a part of air from inside the return shaft, sends temperature-controlled air into the ceiling chamber, and directly sucks the air by the suction force of the fan filter unit. A first fan coil which is sent to be mixed with air flowing into the ceiling chamber;
Temperature-controlled air that sucks a part of the air from a temperature control opening provided in the indoor ceiling and mixes it with the air flowing into the ceiling chamber as it is by the suction force of the fan filter unit into the ceiling chamber. A second fan coil installed above the temperature control opening;
A hanging wall that is provided around the temperature control opening and blocks air along the indoor ceiling,
An air conditioner for a clean room, comprising:   An air volume controller is provided in the temperature control opening, and the air volume controller is a louver for adjusting the direction of air flow from the room to the second fan coil, and supplies air from the room to the second fan coil. The air conditioner for a clean room according to claim 1, further comprising an openable / closable shutter for adjusting the amount. An air conditioning method for a clean room that sends clean air into a room by a fan filter unit from a ceiling chamber separated by a room and a room ceiling,
A return shaft extending from the vicinity of the floor in the room to the ceiling of the room and communicating with the interior of the ceiling chamber; a first fan coil provided in the ceiling chamber above the return shaft; A temperature control opening is provided in the ceiling chamber, a second fan coil is provided above the temperature control opening inside the ceiling chamber, and a droop that blocks air along the indoor ceiling around the temperature control opening. There are walls,
A part of room air sucked by the fan filter unit from near the floor of the room through the return shaft, sucked by the first fan coil and sent to the inside of the ceiling chamber as temperature-controlled air,
Part of the room air sucked by the suction force of the fan filter unit from the temperature control opening beyond the hanging wall is sucked into the temperature-controlled air by the second fan coil, and the temperature-controlled air is used for the temperature control. Sending the interior of the ceiling chamber so as to be mixed with the air flowing into the ceiling chamber as it is from the opening,
A characteristic air conditioning method for clean rooms.

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