JP2004163004A - Construction method of clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a construction method of a clean room capable of preventing dew formation in the clean room under construction, and of dispensing with dew removal work. <P>SOLUTION: In this construction method of a clean room, dry air 3a is supplied into the clean room under construction. In particular, the dry air 3a is supplied after the interior construction of the clean room to prevent dew formation on an interior finish surface of the clean room. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for constructing a clean room used for semiconductor manufacturing and the like.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, clean rooms such as a semiconductor manufacturing factory and an operating room are known. In the construction of this clean room, measures are taken to clean the clean room from the building construction stage in order to reduce the cleanness of the clean room to the final level with a low cost and a short construction period. That is, daily cleaning during construction, thorough cleaning every lap, also, after the completion of the frame work, steel frame work, oblige the entry of shoes to the room entry to the room, after that, every time the construction proceeds, to the room entry Therefore, clean construction is required by wearing clean suits and obligating entry through an air shower.
[0003]
[Problems to be solved by the invention]
In the conventional clean room construction, ventilation during construction was performed by natural ventilation that allows outside air to pass through a predetermined ventilation port, especially in the summer season etc. There was a problem that the removal operation was difficult.
[0004]
[Means for Solving the Problems]
According to the method for constructing a clean room according to the present invention, during the construction of the clean room, dry air is supplied into the clean room being constructed, so that dew condensation in the clean room during construction can be prevented, and the work for removing dew condensation is unnecessary. become.
In particular, if dry air is supplied after the interior work of the clean room, dew condensation on the interior finish surface can be prevented.
[0005]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described below with reference to FIGS. First, an outline of a clean room in a semiconductor manufacturing plant according to the present embodiment will be described with reference to FIG. In general, a clean room has a structure divided into three areas. That is, it includes a process area 10 in which precision equipment necessary for semiconductor manufacture and inspection is installed, an underfloor area 20, and a ceiling area 30. The floor of the process area 10 is a perforated floor (grating) 11, and the ceiling of the process area 10 is a perforated ceiling 12. In the ceiling area 30, an air conditioner 31 and an air cleaning filter 32 are provided. An air circulation space 10A is provided beside the process area 10, whereby air is purified by the air washing filter 32 and circulates through the areas 10, 20, 30 as indicated by arrows. Further, a front room equipped with an air shower is provided between the entrance 40 and the outside, and a person entering the clean room enters the clean room after performing air cleaning in the front room. The front room is a closed space with the door 40a on the clean room side and the door on the outside. 41 is an entrance between the air circulation space 10A and the process area 10, 41a is a door of the entrance 41, 42 is a column, 42a is a steel joist of the perforated floor 11, 43 and 44 are refractory coated beams, 45 is Double windows, 46 is a corridor, 47 is a wiring pit for storing wiring.
[0006]
Next, a method for constructing a clean room according to the embodiment will be described step by step with reference to FIG. Here, an example in which the construction management is performed in six stages is shown.
・ Step 1
Carry out frame work and steel frame construction work. From step 1, the entrance and exit of the room, and the entrance of materials and the like are designated. Then, every time the daily work is completed and every circumference, the cleaning is performed.
Immediately after the completion of the skeleton work in step 1, as shown in FIG. 1, the sheet material 1 is laid on the skeleton floor 21 in the underfloor area 20, and the sprayer 2 sprays water into the clean room under construction.
As described above, immediately after the completion of the skeleton work, the sheet material 1 is laid on the skeleton floor 21 in the underfloor area 20, so that the floating of the dust due to dust generation from the skeleton floor 21 can be prevented, and further, the water is sprayed. By doing so, the dust floating in the clean room under construction adheres to the spray water 2a and falls on the sheet material 1, so that the dust floating in the space of the clean room under construction can be efficiently removed.
Note that the spray water 2a that has adhered to the dust and has fallen on the sheet material 1 is appropriately sucked by a vacuum cleaner. Spraying is performed every day, and the sheet material 1 is appropriately replaced depending on the degree of dirt.
The dust-proofing and dust-removing work by laying the sheet material 1 on the skeleton floor 21 and spraying water into the clean room under construction is performed until step 3 is performed.
・ Step 2
We perform scaffold assembly work, installation work of ALC plate and other concrete walls, underlaying boards, ceiling decks, fire-resistant coated calcical boards, fittings installation work, ceiling deck painting work, etc. From this step 2, the entry is obliged to enter the room by slippers. In addition, each time the daily work is completed and every circumference, cleaning is performed using a vacuum cleaner or the like.
・ Step 3
Scaffolding demolition work, floor painting work, cross pasting work, sealing work, fittings, steel frame painting work, etc. From this step 3, the fittings are always closed, and as shown in FIG. 1, the dry air 3a is sent into the clean room under construction using the temporary air conditioner 3 (for example, an air conditioner with a dustproof function). As a result, it is possible to prevent dew condensation in the clean room during the construction, in particular, dew condensation on an interior finishing surface such as a cloth surface or a painted surface. The supply of the dry air 3a by the temporary air conditioner 3 is continued until the air conditioner 31 is installed and operated in the ceiling area 30. Further, the same cleaning as in step 2 is performed.
・ Step 4
Perform perforated floor (grating) construction, ceiling area construction, power piping and wiring construction, air conditioning duct piping construction, etc. From this step 4, it is obliged that the wearer wear a clean suit (rough one). In addition, every time the daily work is completed and every circumference, cleaning with water is performed.
・ Step 5
The work of installing the inner wall panel of the process area 10, the work of installing underfloor facilities, the work of pure water piping, and the work of chemical liquid piping are performed. From step 5, entry through the regular entry route, that is, entry from the front room, is obligatory. In addition, in daily cleaning and simultaneous cleaning every lap, interior materials are wiped and cleaned with pure water.
・ Step 6
The installation work of the air conditioner 31 and the air cleaning filter 32, the construction of gas equipment, the trial operation (air circulation operation) of the air conditioner 31, and the like are performed. From step 6, it is mandatory to wear a regular clean suit and enter the room through an air shower. Further, the same cleaning as in step 5 is performed.
[0007]
In the above description, an example is shown in which the dry air 3a is supplied into the clean room under construction from step 3 onward, that is, from when the interior work is started. Dry air 3a may be supplied.
Further, for example, if a wet sheet impregnated with a liquid waterproofing agent is used as the sheet material 1, dust once dropped on the wet sheet can be prevented from soaring into the space and floating again. Since the waterproofing treatment is performed, it is possible to prevent the spray water 2a to which the dust is attached from penetrating into the skeleton floor 21 and soiling the skeleton floor 21.
In addition, the division of the work by each of the above steps is an example, and the present invention is not limited to this.
[0008]
【The invention's effect】
According to the first aspect of the present invention, it is possible to prevent dew condensation in the clean room during construction during construction of the clean room.
According to the second aspect, dew condensation on the interior finish surface of the clean room can be prevented.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram for explaining a method of constructing a clean room according to an embodiment of the present invention.
FIG. 2 is a sectional view showing an outline of a clean room constructed by the construction method according to the embodiment.
[Explanation of symbols]
3 air conditioner, 3a dry air.

Claims (2)

A method for constructing a clean room, wherein dry air is supplied into the clean room being constructed during construction of the clean room. 2. The method according to claim 1, wherein dry air is supplied after the interior work of the clean room.

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