JP2004130248A - Ultrasonic cleaner, vibration plate for ultrasonic cleaner, and ultrasonic wave application apparatus for ultrasonic cleaner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ultrasonic cleaner with a high washing power and ability of carrying out washing evenly. <P>SOLUTION: The ultrasonic cleaner comprises one or more ultrasonic vibrators whose ultrasonic radiation faces are fixed in a bottom or side face of the outer side of a washing tank and flat plate type fiber-reinforced resin materials each of which has a larger surface area than the surface area of the ultrasonic radiation face of one ultrasonic vibrator or the total surface area of the ultrasonic radiation faces of two or more ultrasonic vibrators and each of which is composed of binder resin and a plurality of highly elastic fibers arranged in the binder resin parallel to the flat plate faces. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultrasonic cleaner, a vibration plate for the ultrasonic cleaner, and an ultrasonic wave applying device for the ultrasonic cleaner.
[0002]
[Prior art]
Ultrasonic cleaners are used for cleaning various articles such as daily necessities such as glasses and rings, precision mechanical parts used for cameras and watches, and wafers used for manufacturing semiconductor elements. An ultrasonic cleaner is an instrument for immersing an article to be washed in a washing liquid contained in a container (washing tank) and applying ultrasonic waves to the washing liquid to remove dirt attached to the article. The ultrasonic cleaning device includes a cleaning tank for storing a cleaning liquid, an ultrasonic vibrator for applying ultrasonic waves to the cleaning liquid, and the like. As the cleaning liquid, water, an organic solvent, a mixed solvent of water and an organic solvent, an acidic solution, an alkaline solution, or the like is used depending on the type of dirt attached to the article.
[0003]
1 to 3 are cross-sectional views showing a typical configuration of a conventional ultrasonic cleaner. The ultrasonic cleaning device of FIG. 1 is called a cleaning tank type, and has a configuration in which an ultrasonic vibrator 13 is fixed to a bottom surface of a cleaning tank 12 into which a cleaning liquid 11 is charged. The ultrasonic cleaner of FIG. 2 is called a diaphragm type, and has a configuration in which a diaphragm in which an ultrasonic vibrator 23 is fixed to a diaphragm member 25 is provided at the bottom of the cleaning tank 22. I have. A packing 25 is provided at the bottom of the cleaning tank 22 so that the cleaning liquid 11 does not leak from the cleaning tank. The diaphragm is fixed to the cleaning tank by fixing tools such as bolts 27 and nuts 28. The ultrasonic cleaning device of FIG. 3 is called an injection vibrator type, and an ultrasonic wave applying device in which an ultrasonic vibrator 33 is fixed to an inner surface of a watertight container 35 is disposed inside a cleaning tank 32. Configuration. In addition to the ultrasonic cleaners shown in FIGS. 1 to 3, various types of ultrasonic cleaners, such as an ultrasonic vibrator attached to a side surface of a cleaning tank, are known (for example, non-patented). Reference 1, pages 228-232).
[0004]
In an ultrasonic cleaning device, it is generally estimated that cleaning is performed by the following three actions (see Non-Patent Document 1, pages 223-224).
[0005]
(1) Cavitation
When ultrasonic waves are applied to the cleaning liquid, a pressure reduction force and a pressing force are repeatedly applied to the cleaning liquid by the ultrasonic vibration. Due to this reduced pressure, bubbles are generated in the cleaning liquid (this phenomenon is called cavitation). The dirt adhering to the article is removed by a shock wave generated when the bubbles disappear due to the pressing force. The sound pressure of the ultrasonic wave decreases as the frequency increases. Therefore, the lower the frequency of the ultrasonic wave applied to the cleaning liquid, the stronger the cleaning power based on cavitation. On the other hand, if the frequency of the ultrasonic wave is low, the surface of the article to be cleaned may be damaged.
[0006]
(2) acceleration
When ultrasonic waves are applied to the cleaning liquid, the cleaning liquid vibrates due to ultrasonic vibration. The dirt adhering to the article is removed by the force of the acceleration of the vibration of the cleaning liquid. Therefore, the higher the frequency of the ultrasonic wave applied to the cleaning liquid, the stronger the cleaning power due to the acceleration.
[0007]
(3) Straight flow
When ultrasonic waves are applied to the cleaning liquid, a flow of the cleaning liquid occurs in the direction in which the ultrasonic waves propagate. The flow of the cleaning liquid agitates the cleaning liquid near the article surface, and removes the dirt attached to the article.
[0008]
Hereinafter, a conventional ultrasonic cleaning device will be described by taking a cleaning tank type ultrasonic cleaning device (see FIG. 1) generally and widely used as an example. In the ultrasonic cleaning device of FIG. 1, one or more ultrasonic vibrators 13 are attached to the bottom of the cleaning tank in order to transmit sufficient ultrasonic waves to the cleaning liquid 11 placed in the cleaning tank 12. .
[0009]
In the ultrasonic cleaning device, the bottom of the cleaning tank 12 is evenly piston-vibrated (vertically vibrated) by the ultrasonic vibrator 13 in order to reduce unevenness in cleaning the articles, that is, to uniformly transmit ultrasonic waves to the cleaning liquid. ). Further, in order to increase the cleaning power of the ultrasonic cleaning device, that is, to efficiently transmit the ultrasonic waves radiated from the ultrasonic vibrator to the cleaning liquid, the ultrasonic vibrator 13 makes the bottom surface of the cleaning tank 12 uniform. It is preferable to cause the piston to vibrate. When the bottom surface of the cleaning tank 12 is uniformly vibrated by the piston, the vibration (ultrasonic) component emitted in the direction along the bottom surface of the cleaning tank is hardly generated in the ultrasonic wave radiated from the ultrasonic transducer and transmitted through the bottom plate of the cleaning tank. ,preferable. That is, if such a vibration component is present, it becomes difficult for the ultrasonic wave to be efficiently transmitted to the cleaning liquid. Therefore, it is preferable that the ultrasonic vibrators are fixed as densely as possible on the bottom surface of the cleaning tank 12. Practically, in consideration of the manufacturing cost of the ultrasonic cleaning device, an appropriate number of ultrasonic transducers are fixed to the bottom surface of the cleaning tank 12 (see Non-Patent Document 2, p247-248).
[0010]
Ultrasonic cleaners in which an acoustic matching layer is provided between a cleaning tank and an ultrasonic vibrator in order to efficiently transmit ultrasonic waves radiated from an ultrasonic vibrator to a cleaning liquid are known (for example, Patent Document 1, FIG. 1). By providing the acoustic matching layer, the reflection of the ultrasonic waves radiated from the ultrasonic transducer at the bottom of the cleaning tank is suppressed, and the ultrasonic waves are easily transmitted to the cleaning liquid efficiently.
[0011]
Also, it is known that by providing a fiber reinforced resin material on the ultrasonic wave emitting surface of the ultrasonic vibrator, it is possible to strongly generate ultrasonic waves transmitted in a direction perpendicular to the high elastic fiber in the fiber reinforced resin material (for example, , Patent Document 2). Patent Literature 2 suggests using an ultrasonic vibrator having a fiber reinforced resin material on an ultrasonic radiation surface for an ultrasonic cleaner.
[0012]
Conventional ultrasonic cleaners include an ultrasonic cleaner using an ultrasonic wave having a frequency of 20 to 50 kHz (hereinafter, referred to as a low-frequency ultrasonic cleaner) depending on the frequency of the ultrasonic wave used for cleaning. Are generally classified into ultrasonic cleaners using ultrasonic waves of several MHz (hereinafter, referred to as high-frequency type ultrasonic cleaners).
[0013]
It is known that a low-frequency ultrasonic cleaner mainly performs cleaning by cavitation, and has a strong cleaning power, but easily damages the surface of an article to be cleaned. On the other hand, in a high-frequency type ultrasonic cleaner, cavitation hardly occurs, and cleaning is mainly performed mainly by the acceleration force of the cleaning liquid. It is known that the surface is hardly damaged and fine dirt is easily removed.
[0014]
Therefore, in general, the low-frequency type ultrasonic cleaner is used for cleaning daily necessities such as eyeglasses that need to remove large stains, and the high-frequency type ultrasonic cleaner does not damage the article surface. In addition, they are used for cleaning wafers and precision machine parts for producing semiconductor elements, which need to remove fine dirt.
[0015]
Ultrasonic cleaners suitable for cleaning contact lenses using ultrasonic waves having a frequency between the frequencies used for such low-frequency and high-frequency ultrasonic cleaners are known (for example, Patent Document 3). In this ultrasonic cleaner, an ultrasonic wave having a frequency of 60 to 800 kHz is used to remove fine dirt attached to the contact lens.
[0016]
[Non-patent document 1]
Hiroyuki Futashi, "Latest Ultrasonic Technology", First Edition, Sogo Gijutsu Center, September 1987, p. 223-224, p. 228-232
[Non-patent document 2]
(Japan) Electronic Machinery Manufacturers Association, "Ultrasonic Engineering", first edition, Corona Co., Ltd., January 1993, p. 247-248
[Patent Document 1]
JP 2001-29907 A (FIG. 1)
[Patent Document 2]
JP-A-7-284198
[Patent Document 3]
JP-A-59-183882
[0017]
[Problems to be solved by the invention]
In conventional ultrasonic cleaners, the use of an acoustic matching layer and an ultrasonic vibrator with a fiber-reinforced resin material on the ultrasonic radiation surface allows for efficient transmission of ultrasonic waves to the cleaning liquid to enhance the cleaning power. Despite this, a large number of ultrasonic vibrators must be attached to the bottom of the cleaning tank to make the bottom of the cleaning tank evenly vibrate with a piston to reduce uneven cleaning or increase the cleaning power. There are issues that need to be addressed.
[0018]
Another problem is that it is difficult to clean an article with a conventional ultrasonic cleaner without damaging its surface and with a certain level of cleaning power. Depending on the application (for example, in the case of a wafer, when the degree of integration of the semiconductor element formed on the wafer is low) in a wafer for manufacturing a semiconductor device or a precision machine component, the surface can be compared without damaging the surface. It may be necessary to remove very large debris. In such a case, it is considered preferable to set the frequency of the ultrasonic wave to a value between the frequencies used in the low-frequency type and high-frequency type ultrasonic cleaners (about 80 to 500 kHz). However, only by setting the frequency of the ultrasonic waves high, as in the case of the ultrasonic cleaning device for contact lenses, cavitation is unlikely to occur as the frequency increases, which is sufficient for the wafers and precision parts for producing the semiconductor element. It is considered that it is difficult to obtain a good detergency.
[0019]
In an ultrasonic cleaning device, if the ultrasonic waves can be efficiently transmitted to the cleaning liquid without increasing the number of ultrasonic transducers as much as possible, ultrasonic waves having a frequency (about 80 to 500 kHz) that does not easily damage the article surface are used. It is considered that a practical ultrasonic cleaner having a certain level of cleaning power can be realized.
[0020]
An object of the present invention is to provide an ultrasonic cleaner having less cleaning unevenness and high cleaning power without increasing the number of ultrasonic transducers as much as possible.
It is also an object of the present invention to provide an ultrasonic cleaner that has less damage to the surface of the article to be cleaned and has a strong cleaning power.
[0021]
[Means for Solving the Problems]
The present inventor has proposed that the number and arrangement of the ultrasonic vibrators fixed to the bottom of the cleaning tank of the ultrasonic cleaning device, and further, the shape of the cleaning tank, and the like, allows the bottom of the cleaning tank to be reduced by a small number of ultrasonic vibrators. Were examined to reduce the unevenness of cleaning and to increase the cleaning power, but could not obtain sufficient results. For this reason, the present inventor further does not devise the number or arrangement of the ultrasonic vibrators, but when the ultrasonic waves radiated from the ultrasonic vibrators propagate through the bottom plate of the cleaning tank, the ultrasonic waves along the bottom surface of the bottom plate. A study was conducted to make the bottom of the cleaning tank evenly vibrate by suppressing the generation of vibration in the direction. As a result, by attaching the fiber reinforced resin material to the bottom plate of the cleaning tank, the generation of vibration in the direction along the bottom surface of the bottom plate is suppressed, and the cleaning unevenness is reduced without increasing the number of ultrasonic vibrators. And an ultrasonic cleaner having a strong detergency can be provided.
[0022]
The present invention is directed to an ultrasonic cleaner in which one or two or more ultrasonic vibrators are fixed to the bottom or side surface of the outer surface of the cleaning tank at the ultrasonic radiation surface thereof, wherein the ultrasonic vibrator is fixed. On the outer surface or inner surface of the cleaning tank corresponding to the position, the area larger than the area of the ultrasonic emission surface of the one ultrasonic oscillator or the total area of the ultrasonic emission surfaces of the two or more ultrasonic oscillators Ultrasonic cleaning characterized by having a flat fiber-reinforced resin material comprising a binder resin and a plurality of high-elasticity fibers arranged in parallel with the plane in the binder resin. In the bowl.
[0023]
The present invention also provides a cleaning liquid in the cleaning tank of the ultrasonic cleaning device of the present invention, then immerses the article in the cleaning liquid, and applies ultrasonic waves having a frequency of 80 to 500 kHz by the ultrasonic vibrator of the ultrasonic cleaning device. There is also an ultrasonic cleaning method characterized by cleaning the article by emitting the inside.
[0024]
The present invention also provides a diaphragm for an ultrasonic cleaning device in which one or two or more ultrasonic vibrators are fixed on the lower surface of a diaphragm member on the ultrasonic radiation surface thereof, wherein the ultrasonic vibrator is fixed. On the upper surface or the lower surface of the diaphragm member corresponding to the position, the area of the ultrasonic radiation surface of the one ultrasonic transducer or the area larger than the total area of the ultrasonic radiation surfaces of the two or more ultrasonic transducers For an ultrasonic cleaning device, having a flat surface, a flat-plate fiber reinforced resin material comprising a binder resin and a plurality of high elastic fibers arranged in parallel with the flat surface in the binder resin is provided. There is also a diaphragm.
[0025]
The present invention also provides a cleaning tank, in which the above-mentioned diaphragm of the present invention is fixed as a bottom plate, and then the cleaning liquid is poured into the cleaning tank, and then the article is immersed in the cleaning liquid, and the ultrasonic vibrator of the diaphragm has a frequency of 80 to 500 kHz. There is also an ultrasonic cleaning method characterized in that an article is cleaned by emitting a sound wave in a cleaning liquid.
[0026]
The present invention also provides an ultrasonic wave applicator for an ultrasonic cleaning device having one or two or more ultrasonic transducers fixed on at least one inner surface of a watertight container at its ultrasonic radiation surface. On the outer surface or inner surface of the watertight container corresponding to the fixed position of the ultrasonic transducer, the area of the ultrasonic radiation surface of the one ultrasonic transducer or the total of the ultrasonic radiation surfaces of the two or more ultrasonic transducers A flat fiber-reinforced resin material having a plane having an area larger than the area, and comprising a binder resin and a plurality of high elastic fibers arranged in parallel with the plane in the binder resin is provided. There is also an ultrasonic wave applying device for an ultrasonic cleaner.
[0027]
In the present invention, the cleaning liquid and the ultrasonic applying apparatus of the present invention are put into a cleaning tank, and then the article is immersed in the cleaning liquid, and the ultrasonic vibrator of the ultrasonic applying apparatus applies ultrasonic waves having a frequency of 80 to 500 kHz to the cleaning liquid. There is also an ultrasonic cleaning method characterized by cleaning the article by emitting the inside.
[0028]
BEST MODE FOR CARRYING OUT THE INVENTION
The ultrasonic cleaner according to the present invention will be described with reference to the accompanying drawings. FIG. 4 is a cross-sectional view showing the configuration of an example of the ultrasonic cleaner according to the present invention, and FIG. 5 is a bottom view of the ultrasonic cleaner of FIG. The ultrasonic cleaner shown in FIGS. 4 and 5 is an ultrasonic cleaner in which nine ultrasonic vibrators 43 are fixed on the bottom surface of a cleaning tank 42 containing a cleaning liquid 41 at the ultrasonic radiation surface thereof. A flat fiber-reinforced resin having a plane having an area larger than the total area of the ultrasonic radiation surfaces of the nine ultrasonic transducers 43 on the outer surface of the cleaning tank 42 corresponding to the fixing position of the ultrasonic transducer 43. It has a configuration in which a member 44 is provided.
[0029]
The flat fiber-reinforced resin material 44 is composed of a binder resin and a plurality of high-elastic fibers (not shown) arranged in the binder resin in parallel with the plane. The fiber reinforced resin material 44 having such a configuration is unlikely to expand and contract in the direction along the length direction of the high elasticity fiber, that is, in the direction along the plane of the flat fiber reinforced resin material. By providing such a fiber reinforced resin material 44, the bottom plate of the cleaning tank 42 is less likely to expand and contract in the direction along the bottom surface, and when ultrasonic waves radiated from the ultrasonic vibrator 43 propagate through the bottom plate of the cleaning layer 42. In addition, the generation of vibration along the bottom surface of the bottom plate is suppressed. Therefore, even if the number of ultrasonic vibrators is not increased, uniform piston vibration on the bottom of the cleaning tank is promoted, cleaning unevenness of the ultrasonic cleaning device is reduced, and cleaning power is also increased.
[0030]
In addition, according to the wavelength of the ultrasonic wave propagating through the cleaning liquid, the cleaning liquid put in the cleaning tank has a periodic fluctuation in sound pressure in a direction perpendicular to the ultrasonic wave emitting surface of the ultrasonic vibrator. It is known that periodic cleaning unevenness corresponding to the fluctuation occurs. With respect to the periodic cleaning unevenness corresponding to such a sound pressure fluctuation, many solutions are known such as an arrangement of an ultrasonic oscillator and a modulation of an AC voltage applied to the ultrasonic oscillator (for example, , Non-Patent Document 1, p231, p236-237). In the present specification, the description of the cleaning unevenness in the direction perpendicular to the ultrasonic wave emitting surface of the ultrasonic transducer (in the case of the ultrasonic cleaning device of FIG. 4, the depth direction of the cleaning tank) is described. Abbreviate. In the ultrasonic cleaning device of the present invention, the problem of periodic cleaning unevenness corresponding to such sound pressure fluctuation can be similarly solved based on the description of Non-Patent Document 1.
[0031]
In order to uniformly oscillate the piston of the bottom surface of the cleaning tank 42, it is preferable to increase the area of the plane of the fiber-reinforced resin material 44 as much as possible so as to coincide with the bottom surface of the cleaning tank. By simply attaching an ultrasonic vibrator provided with a fiber-reinforced resin material having a plane having the same area as the ultrasonic radiation surface described in Patent Document 2 to the cleaning tank, the bottom surface of the cleaning tank bottom plate is made uniform. The effect of vibrating the piston is small. In the present invention, it is necessary to attach a fiber-reinforced resin material having a plane having an area larger than at least the ultrasonic wave emitting surface of the ultrasonic transducer to the cleaning tank.
[0032]
When the article to be washed is large, the washing tank becomes large and the area of the bottom surface also becomes large. When a fiber-reinforced resin material is attached to the bottom surface of a large-sized washing tank, a plurality of fiber-reinforced resin materials may be attached along the bottom surface of the washing tank. The plurality of fiber-reinforced resin materials may be provided in a state where they are spaced from each other.
[0033]
The thickness of the fiber-reinforced resin material is substantially equal to the wavelength of the ultrasonic wave transmitted through the fiber-reinforced resin material in a direction perpendicular to the plane of the cleaning tank in order to suppress the reflection of the ultrasonic waves radiated from the ultrasonic transducer at the bottom of the cleaning tank. The thickness is preferably 1/4. Further, when the attenuation of the ultrasonic wave in the fiber reinforced resin material is large, it is preferable that the thickness of the fiber reinforced resin material is further thinner than 厚 み of the wavelength.
[0034]
The arrangement of the plurality of high elasticity fibers of the fiber reinforced resin material is not particularly limited as long as they are arranged in parallel with the plane of the fiber reinforced resin material. The plurality of high-elastic fibers are preferably arranged in one direction parallel to the plane of the fiber-reinforced resin material, and two directions parallel to the plane and such that the high-elastic fibers are orthogonal to each other. More preferably, they are arranged in a line.
[0035]
Examples of the binder resin include an epoxy resin, a polyamide resin, a polyimide resin, a PEEK (polyetheretherketone) resin, a phenol resin, an unsaturated polyester resin, a polyamide resin, a polycarbonate resin, and a polyamideimide resin. Examples of the high elasticity fiber include carbon fiber, silicon carbide fiber, polyamide fiber, and aramid fiber.
[0036]
In the ultrasonic cleaning device shown in FIG. 4, each of the ultrasonic vibrators 43 is configured such that two piezoelectric vibrators 45a and 45b are bolted while being sandwiched between an upper metal member 46a and a lower metal member 46b. Langevin type vibrator is used. In the cross-sectional view of FIG. 4, the description of the bolts and nuts for fastening the upper metal member 46a and the lower metal member 46b is omitted. When electric energy is supplied to the electrode layers provided on the upper and lower surfaces of each piezoelectric vibrator to vibrate each piezoelectric vibrator, ultrasonic waves are generated from the top surface of the upper metal member 46a of the ultrasonic vibrator 43. Radiated.
[0037]
Examples of the ultrasonic vibrator include an electrostrictive vibrator and a magnetostrictive vibrator. Examples of the electrostrictive vibrator include a piezoelectric vibrator and a Langevin type vibrator in which the piezoelectric vibrator is bolted with a pair of metal members. Examples of the magnetostrictive vibrator include a metal magnetostrictive vibrator and a ferrite vibrator. As the ultrasonic vibrator, it is preferable to use an electrostrictive vibrator because its configuration is simple.
[0038]
The cleaning tank 42 is generally formed of a metal material such as stainless steel in consideration of corrosion resistance to a cleaning liquid. When a highly corrosive liquid such as an acidic solution or an alkaline solution is used as the cleaning liquid, the cleaning tank is preferably formed from a resin (eg, vinyl chloride resin, fluororesin), glass, ceramics, or the like. Further, when the cleaning tank is formed of a metal material, the cleaning tank may be provided with a fiber-reinforced resin material via an insulating material in order to prevent electrical conduction between the cleaning tank and the fiber-reinforced resin material. good. Examples of the insulating material include a resin material and a glass epoxy material. The thickness of the insulating material is preferably 1 mm or less, preferably 0.5 mm or less.
[0039]
Next, an ultrasonic cleaning method of an article using the ultrasonic cleaner of FIG. 4 will be described. First, a cleaning liquid 41 is put into a cleaning tank 42 of an ultrasonic cleaning device, then an article (not shown) is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are applied by an ultrasonic vibrator 43 of the ultrasonic cleaning device. The product is ultrasonically cleaned by emitting in a cleaning solution. By using ultrasonic waves of such a frequency, damage to the surface of the article can be suppressed, and the article can be ultrasonically cleaned with a strong cleaning power.
[0040]
FIG. 6 is a sectional view showing a configuration of another example of the ultrasonic cleaner according to the present invention. The configuration of the ultrasonic cleaner of FIG. 6 is the same as the ultrasonic cleaner of FIG. 4 except that the fiber reinforced resin material 44 is provided on the inner surface of the cleaning tank 42. As described above, by providing the fiber reinforced resin material 44 on the inner surface of the cleaning tank 42, the generation of vibration in the direction along the bottom surface of the cleaning tank bottom plate can be suppressed.
[0041]
FIG. 7 is a cross-sectional view showing a configuration of an example of a diaphragm for an ultrasonic cleaning device according to the present invention and a mode of use thereof. The vibration plate for the ultrasonic cleaning device of FIG. 7 has a structure in which nine ultrasonic vibrators (piezoelectric vibrators) 73 are fixed on the lower surface of the vibration plate member 75 on the ultrasonic radiation surface thereof. In the diaphragm, a flat fiber having a plane having an area larger than the total area of the ultrasonic radiation surfaces of the nine ultrasonic transducers on the lower surface of the diaphragm member corresponding to the fixing position of the ultrasonic transducer. It has a configuration in which a reinforced resin material 74 is provided. The flat fiber-reinforced resin material 74 is composed of a binder resin and a plurality of high elastic fibers arranged in the binder resin in parallel with the plane.
[0042]
By the provision of the fiber reinforced resin material 74, as in the case of the ultrasonic cleaner of FIG. 4, the generation of vibration in the direction along the plane of the diaphragm member 75 is suppressed, and the cleaning liquid put in the cleaning layer 72 is evenly dispersed. , And can transmit ultrasonic waves efficiently. The ultrasonic cleaning device of FIG. 7 has an advantage that the maintenance of the ultrasonic cleaning device is easy because the diaphragm provided with the ultrasonic vibrator 73 is replaceable.
[0043]
Next, an ultrasonic cleaning method of an article using the ultrasonic cleaning device of FIG. 7 will be described. First, after the diaphragm is fixed as the bottom plate in the cleaning tank 72, the cleaning liquid 41 is put therein, then the article is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are introduced into the cleaning liquid by the ultrasonic vibrator 73 of the vibration plate. Emit and ultrasonically clean the article. By using ultrasonic waves of such a frequency, damage to the surface of the article can be suppressed, and the article can be ultrasonically cleaned with a strong cleaning power.
[0044]
FIG. 8 is a cross-sectional view showing a configuration of another example of the vibration plate for an ultrasonic cleaning device according to the present invention, and a mode of use thereof. The configuration of the diaphragm for the ultrasonic cleaner of FIG. 8 is the same as that of the diaphragm of FIG. 7 except that the fiber reinforced resin material 74 is provided on the upper surface of the diaphragm member 75. In this way, by providing the fiber reinforced resin material 74 on the upper surface of the diaphragm member 75, the generation of vibration in the direction along the plane of the diaphragm member 75 can be suppressed.
[0045]
FIG. 9 is a cross-sectional view showing an example of the configuration of an ultrasonic wave applying apparatus for an ultrasonic cleaning device according to the present invention, and a mode of use thereof. The ultrasonic wave applicator for an ultrasonic cleaning device shown in FIG. 9 includes an ultrasonic wave fixing device having nine ultrasonic vibrators (piezoelectric vibrators) 93 fixed on one surface of the inner surface of a watertight container 95 at the ultrasonic radiation surface. In the ultrasonic wave applicator for the ultrasonic cleaner, the inner surface of the watertight container corresponding to the fixing position of the ultrasonic vibrator, a plane having an area larger than the total area of the ultrasonic radiation surfaces of the nine ultrasonic vibrators. And a flat-plate-shaped fiber-reinforced resin material 94 having the following configuration. The flat fiber-reinforced resin material 94 is composed of a binder resin and a plurality of high elastic fibers arranged in the binder resin in parallel with the plane. Further, a lead wire 96 is connected to each of the ultrasonic vibrators 93 to supply electric energy to the ultrasonic vibrators 93.
[0046]
By the provision of the fiber reinforced resin material 94, the generation of vibration in the direction along the ultrasonic vibrator mounting surface of the watertight container 95 is suppressed as in the case of the ultrasonic cleaning device of FIG. Ultrasonic waves can be transmitted uniformly and efficiently to the cleaning liquid. The ultrasonic cleaning device of FIG. 9 has an advantage that an existing container can be used as the cleaning tank 92.
[0047]
Next, an ultrasonic cleaning method of an article using the ultrasonic cleaning device of FIG. 9 will be described. First, the cleaning liquid 41 and the ultrasonic wave applicator are put into the cleaning tank 92, then the article is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are emitted into the cleaning liquid by the ultrasonic vibrator 93 of the ultrasonic wave applicator. Is ultrasonically cleaned. By using ultrasonic waves of such a frequency, damage to the surface of the article can be suppressed, and the article can be ultrasonically cleaned with a strong cleaning power.
[0048]
FIG. 10 is a cross-sectional view showing the configuration of another example of the ultrasonic wave applying device for an ultrasonic cleaning device according to the present invention, and the mode of use thereof. The configuration of the ultrasonic wave application device for the ultrasonic cleaning device in FIG. 10 is the same as that of the ultrasonic wave application device in FIG. 9 except that the fiber-reinforced resin material 94 is provided on the outer surface of the watertight container 95. In this way, by providing the fiber reinforced resin material 94 on the outer surface of the watertight container 95, it is possible to suppress the generation of vibration in the direction along the ultrasonic vibrator mounting surface of the watertight container.
[0049]
In the present invention, by providing a fiber reinforced resin material, in order to confirm that ultrasonic waves are transmitted uniformly and efficiently to the cleaning liquid, as an example, an ultrasonic vibrator of a cleaning tank type ultrasonic cleaning device is used. Computer simulation was performed on the sound pressure distribution in the cleaning liquid when vibrated. For the simulation, software "ANSSYS" (manufactured by ANSYS) for analysis using the finite element method was used.
[0050]
FIG. 11 shows a configuration of a conventional ultrasonic cleaner used for the simulation. FIG. 11 (a) is a bottom view of the ultrasonic cleaner, and FIG. 11 (b) is a side view thereof. The cleaning tank 112 was configured such that a bottom plate having a diameter of 144 mm and a thickness of 2 mm was attached to one end of a cylindrical member having an outer diameter of 144 mm, an inner diameter of 140 mm, and a length of 70 mm. The material forming the cleaning tank 112 was stainless steel. A piezoelectric vibrator 113 having a diameter of 18 mm and a thickness of 3 mm was fixed as an ultrasonic vibrator at the center of the bottom of the cleaning tank 112. In the simulation, water was used as the cleaning liquid, and the water was filled up to the upper end of the cleaning tank 112.
[0051]
The sound pressure distribution in the water placed in the cleaning tank when an alternating voltage having a frequency of 118 kHz and an amplitude of 1 V was applied to the piezoelectric vibrator 113 was simulated. As a result, it was confirmed that the underwater sound pressure was high above the piezoelectric vibrator, and the sound pressure was low in other places.
[0052]
FIG. 12 shows the configuration of the ultrasonic cleaner according to the present invention used in the simulation. FIG. 12A is a bottom view of the ultrasonic cleaner, and FIG. 12B is a side view thereof. The cleaning tank 112 and the piezoelectric vibrator 113 have the same configuration as the ultrasonic cleaning device of FIG. A fiber reinforced resin material 124 having a diameter of 84 mm and a thickness of 6 mm was provided on the bottom surface of the cleaning tank 112. The binder resin of the fiber reinforced resin material 124 was an epoxy resin, and the high elasticity fiber was a carbon fiber. The thickness of the fiber reinforced resin material was set to about ４ of the thickness of the ultrasonic wave transmitted through the fiber reinforced resin material in a direction perpendicular to the plane thereof was 25 mm.
[0053]
Then, the sound pressure distribution in the water placed in the cleaning tank when an AC voltage having a frequency of 114 kHz and an amplitude of 1 V was applied to the piezoelectric vibrator 113 was simulated. As a result, it was confirmed that the sound pressure distribution in the water was uniform as compared with the ultrasonic cleaner of FIG. Also, the maximum value of the sound pressure in water was about three times stronger, and it was confirmed that the ultrasonic wave was efficiently transmitted from the ultrasonic vibrator to the cleaning liquid.
[0054]
From the above simulation results, it was confirmed that the ultrasonic waves emitted from the ultrasonic vibrator can be uniformly and efficiently transmitted to the cleaning liquid by attaching the fiber reinforced resin material to the ultrasonic cleaning device.
[0055]
The sound pressure distribution in the cleaning liquid (water) was similarly simulated using the planar area of the fiber-reinforced resin material of the ultrasonic cleaner of FIG. 12 as a parameter. As a result, it was also confirmed that the plane area of the fiber-reinforced resin material is preferably 30% or more of the area of the bottom surface of the inner surface of the cleaning tank in order to make the sound pressure distribution in the cleaning liquid uniform. did it.
[0056]
【The invention's effect】
The ultrasonic cleaning device of the present invention, or the ultrasonic cleaning device using the vibration plate or the ultrasonic applying device of the present invention has less cleaning unevenness and a stronger cleaning power. In such an ultrasonic cleaner, it is particularly preferable to use ultrasonic waves having a frequency of about 80 to 500 kHz for cleaning. The ultrasonic cleaner using the ultrasonic waves having such a frequency can be particularly preferably used for cleaning an article which is easily damaged on the surface such as a wafer for manufacturing a semiconductor element and a precision machine part.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating a configuration of an example of a conventional ultrasonic cleaning device.
FIG. 2 is a cross-sectional view showing the configuration of another example of the conventional ultrasonic cleaner.
FIG. 3 is a cross-sectional view illustrating a configuration of still another example of the conventional ultrasonic cleaner.
FIG. 4 is a sectional view showing a configuration of an example of an ultrasonic cleaner according to the present invention.
FIG. 5 is a bottom view of the ultrasonic cleaner of FIG. 4;
FIG. 6 is a sectional view showing a configuration of another example of the ultrasonic cleaner according to the present invention.
FIG. 7 is a cross-sectional view showing a configuration of an example of a vibration plate for an ultrasonic cleaning device according to the present invention and a mode of use thereof.
FIG. 8 is a cross-sectional view showing a configuration of another example of a diaphragm for an ultrasonic cleaning device according to the present invention, and an aspect of its use.
FIG. 9 is a sectional view showing a configuration of an example of an ultrasonic wave applying device for an ultrasonic cleaning device according to the present invention and a mode of use thereof.
FIG. 10 is a cross-sectional view showing the configuration of another example of the ultrasonic wave applying device for an ultrasonic cleaning device according to the present invention and the mode of use thereof.
FIG. 11 is a diagram showing a configuration of an ultrasonic cleaning device subjected to computer simulation.
FIG. 12 is a diagram showing a configuration of an ultrasonic cleaning device subjected to computer simulation.
[Explanation of symbols]
11 Cleaning liquid
12, 22, 32 Cleaning tank
13,23,33 Ultrasonic transducer
25 diaphragm member
26 Packing
27 volts
28 nuts
35 Watertight container
36 Lead wire
41 Cleaning liquid
42, 72, 92 Cleaning tank
43 Ultrasonic transducer
44, 74, 94 Fiber reinforced resin material
45a, 45b piezoelectric vibrator
46a Upper metal member
46b Lower metal member
73, 93 ultrasonic transducer
75 diaphragm member
76 Packing
77 volts
78 nut
95 Watertight container
112 Cleaning tank
113 Piezoelectric vibrator
124 fiber reinforced resin material

Claims (6)

In an ultrasonic cleaner in which one or two or more ultrasonic vibrators are fixed on the ultrasonic radiation surface on the bottom surface or side surface of the outer surface of the cleaning tank, the ultrasonic vibrator corresponds to a fixing position of the ultrasonic vibrator. The outer surface or the inner surface of the cleaning tank has a plane having an area larger than the area of the ultrasonic radiation surface of the one ultrasonic transducer or the total area of the ultrasonic radiation surfaces of the two or more ultrasonic transducers. An ultrasonic cleaner comprising: a binder resin; and a flat fiber-reinforced resin material including a plurality of high-elastic fibers arranged in parallel with the plane in the binder resin. A cleaning liquid is poured into the cleaning tank of the ultrasonic cleaning device according to claim 1, and then the article is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are emitted into the cleaning liquid by the ultrasonic vibrator of the cleaning device. An ultrasonic cleaning method, characterized by cleaning the substrate. In a vibration plate for an ultrasonic cleaning device in which one or two or more ultrasonic vibrators are fixed on the lower surface of a vibration plate member at its ultrasonic radiation surface, a vibration corresponding to a fixing position of the ultrasonic vibrator is provided. On the upper surface or the lower surface of the plate member, a plane having an area larger than the area of the ultrasonic radiation surface of the one ultrasonic transducer or the total area of the ultrasonic radiation surfaces of the two or more ultrasonic transducers, A diaphragm for an ultrasonic cleaning device, comprising: a binder resin; and a flat fiber-reinforced resin material made of a plurality of high-elastic fibers arranged in parallel with the plane in the binder resin. After fixing the diaphragm according to claim 3 as a bottom plate in the cleaning tank, the cleaning liquid is poured into the cleaning tank, and then the article is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are transmitted by the ultrasonic vibrator of the vibration plate. An ultrasonic cleaning method characterized by cleaning the article by emitting in a cleaning liquid. In at least one surface of the inner surface of the watertight container, one or two or more ultrasonic transducers are fixed on the ultrasonic radiation surface thereof in an ultrasonic wave applying device for an ultrasonic cleaning device, wherein the ultrasonic transducer is fixed. On the outer surface or inner surface of the watertight container corresponding to the position, the area larger than the area of the ultrasonic radiation surface of the one ultrasonic transducer or the total area of the ultrasonic radiation surfaces of the two or more ultrasonic transducers Wherein a flat fiber-reinforced resin material comprising a binder resin and a plurality of high-elastic fibers aligned in parallel with the plane is provided in the binder resin. Ultrasonic wave application device for washing machine. The cleaning liquid and the ultrasonic wave applying device according to claim 5 are put in the cleaning tank, and then the article is immersed in the cleaning liquid, and ultrasonic waves having a frequency of 80 to 500 kHz are introduced into the cleaning liquid by the ultrasonic vibrator of the ultrasonic wave applying device. An ultrasonic cleaning method characterized by emitting and cleaning the article.

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