JP2004068940A5 - - Google Patents

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Publication number
JP2004068940A5
JP2004068940A5 JP2002229724A JP2002229724A JP2004068940A5 JP 2004068940 A5 JP2004068940 A5 JP 2004068940A5 JP 2002229724 A JP2002229724 A JP 2002229724A JP 2002229724 A JP2002229724 A JP 2002229724A JP 2004068940 A5 JP2004068940 A5 JP 2004068940A5
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JP
Japan
Prior art keywords
suction
gas
ejection
fixed body
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002229724A
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English (en)
Japanese (ja)
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JP3753108B2 (ja
JP2004068940A (ja
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Priority to JP2002229724A priority Critical patent/JP3753108B2/ja
Priority claimed from JP2002229724A external-priority patent/JP3753108B2/ja
Publication of JP2004068940A publication Critical patent/JP2004068940A/ja
Publication of JP2004068940A5 publication Critical patent/JP2004068940A5/ja
Application granted granted Critical
Publication of JP3753108B2 publication Critical patent/JP3753108B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002229724A 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置 Expired - Lifetime JP3753108B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002229724A JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002229724A JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005249754A Division JP4318185B2 (ja) 2005-08-30 2005-08-30 マスク検査装置

Publications (3)

Publication Number Publication Date
JP2004068940A JP2004068940A (ja) 2004-03-04
JP2004068940A5 true JP2004068940A5 (https=) 2005-06-30
JP3753108B2 JP3753108B2 (ja) 2006-03-08

Family

ID=32016011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002229724A Expired - Lifetime JP3753108B2 (ja) 2002-08-07 2002-08-07 直線案内装置及びそれを用いたマスク検査装置

Country Status (1)

Country Link
JP (1) JP3753108B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547562B2 (ja) * 2005-01-17 2010-09-22 レーザーテック株式会社 検査装置
JP4592445B2 (ja) * 2005-02-25 2010-12-01 黒田精工株式会社 薄板の表面形状測定装置
JP4755429B2 (ja) * 2005-03-04 2011-08-24 株式会社ミツトヨ 検出器駆動装置
JP5269332B2 (ja) * 2007-03-22 2013-08-21 株式会社ミツトヨ 垂直直動装置
JP4590572B2 (ja) * 2007-12-14 2010-12-01 レーザーテック株式会社 基板保持装置、基板検査装置、及び基板の検査方法
JP6669481B2 (ja) * 2015-12-04 2020-03-18 株式会社ブイ・テクノロジー 検査装置

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