JP2004053219A - Combustion detoxifying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a combustion detoxifying device improving the combustion detoxifying efficiency by elongating a retention time of a treated gas in a combustion cylinder, to save a space and to reduce the operation cost. <P>SOLUTION: A current plate 19 for guiding the treated gas introduced into a combustion cylinder from a treated gas introduction nozzle, to the direction different from a combustion axial direction, is mounted on a combustion cylinder opening part (gas inlet 18) of the treated gas introduction nozzle 14 for introducing the treated gas into the combustion cylinder 13 of the combustion detoxifying device. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a combustion abatement apparatus, and more specifically, harmful substances such as silane, ammonia, nitrous oxide, and various other special material gases used in a semiconductor manufacturing process and a liquid crystal manufacturing process, and global warming. Exhaust gas containing methane tetrafluoride, ethane hexafluoride, and nitrogen trifluoride having both properties, which have an adverse effect on the environment, is introduced into a combustion cylinder equipped with a burner, and the high temperature generated by the burner The present invention relates to a combustion abatement apparatus that performs such abatement treatment or removal treatment by burning or heating harmful components in an atmosphere.
[0002]
[Prior art]
Harmful gases such as toxic gas, corrosive gas, flammable gas, non-flammable gas and flammable gas which adversely affect the global environment are contained in exhaust gas discharged from semiconductor manufacturing processes such as semiconductor manufacturing equipment and LCD manufacturing equipment. Since the components are contained, it is necessary to perform the detoxification (detoxification, removal) treatment of these harmful components before discharging the exhaust gas. As one of the devices for removing such exhaust gas, a combustion type removing device is known.
[0003]
This combustion type abatement system removes various harmful components contained in the exhaust gas introduced into the combustion cylinder by burning or pyrolyzing them in a combustion cylinder heated to a high temperature by the flame of the main burner. For example, Japanese Patent Application Laid-Open No. H10-110926 discloses various shapes.
[0004]
[Problems to be solved by the invention]
In such a combustion abatement apparatus, the exhaust gas introduced into the combustion cylinder, that is, the gas to be treated, is rendered harmless by passing through the high-temperature atmosphere portion in the combustion cylinder. Normally, the combustion abatement efficiency is inversely proportional to the flow velocity and residence time of the gas passing through the combustion cylinder, and it is difficult to efficiently burn and abate the gas to be treated as the flow rate of the gas to be treated increases. It is becoming. Therefore, in order to obtain the desired combustion abatement efficiency, it is necessary to increase the size of the combustion cylinder or raise the temperature inside the combustion cylinder, which causes a space problem and an economic problem such as fuel. become.
[0005]
Therefore, the present invention provides a combustion abatement apparatus that can improve the combustion abatement efficiency by extending the residence time of a gas to be treated in a combustion cylinder, thereby saving space and reducing operating costs. It is intended to be.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the combustion abatement apparatus of the present invention introduces a gas to be treated containing a harmful component into a combustion cylinder provided with a burner, and performs a combustion treatment or a heat treatment of the harmful component in the combustion cylinder. In the combustion abatement apparatus for performing abatement processing of harmful components by the above, in the opening in the combustion cylinder of the to-be-treated gas introduction nozzle for introducing the to-be-treated gas into the combustion cylinder, from the to-be-treated gas introduction nozzle into the combustion cylinder A rectifying plate is provided for guiding the gas to be introduced in a direction different from the axial direction of the combustion cylinder.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
1 to 3 show one embodiment of the combustion abatement apparatus of the present invention. FIG. 1 is a partially sectional front view, FIG. 2 is a sectional view taken along line II-II of FIG. 3, and FIG. It is a bottom view of the lid provided with.
[0008]
First, the combustion abatement apparatus shown in the present embodiment has a lid 11 at the upper end and a lower end communicating with the inside of the cooling cylinder 12, and a combustion cylinder 13 attached to the lid 11 to cover the interior of the combustion cylinder 13. A gas introduction nozzle 14 for introducing a processing gas (for example, exhaust gas discharged from a semiconductor manufacturing apparatus or an LCD manufacturing apparatus), and a flame for burning and / or thermally decomposing the processing gas in the combustion tube 13 And a main burner 15 that forms In addition, illustration of auxiliary equipment normally installed in the combustion tube 13 such as a pilot burner and a temperature measuring unit is omitted.
[0009]
The main burner 15 is an annular body having an inner peripheral surface formed in a V-shaped peripheral groove, and the fuel supplied from the fuel gas supply pipe 16 to one surface forming the V-shaped peripheral groove. A fuel gas ejection nozzle 16a for ejecting gas and a plurality of combustion-supporting gas ejection nozzles 17a for ejecting combustion-supplying gas supplied from the combustion-supplying gas supply pipe 17 are opened on the other surface. In addition, the nozzle axes of the two ejection nozzles 16a and 17a are set to be directed toward the center of the burner 15 and to intersect in the combustion cylinder 13.
[0010]
Note that a hydrocarbon gas such as LPG or hydrogen gas is used as the fuel gas, and any of air, a mixed gas of air and oxygen gas, or oxygen gas is used as the supporting gas. From such a main burner 15, a flat flame which crosses the inside of the combustion cylinder 13 in the radial direction is formed, and the gas to be processed flowing downward in the combustion cylinder always crosses the flame.
[0011]
The cover 11 is provided with a gas inlet 18 serving as an opening in the combustion cylinder of the gas to be treated nozzle 14 so as to correspond to each gas to be treated nozzle 14. Below the rectifying plates 19 for controlling the flow of the gas to be processed are provided, respectively.
[0012]
The current plate 19 guides the gas to be treated introduced into the combustion cylinder 13 from the gas introduction nozzle 14 in a direction different from the axial direction of the combustion cylinder. With the provision, the flow direction and flow velocity of the gas to be treated in the combustion cylinder 13 can be controlled, and the gas to be treated flowing into the combustion cylinder 13 can be suppressed from instantaneously passing through the combustion cylinder 13. That is, the residence time of the gas to be treated in the high-temperature atmosphere portion in the combustion tube 13 can be extended, and the efficiency of burning and removing harmful components in the gas to be treated can be increased.
[0013]
The shape and installation state of the current plate 19 can be appropriately set according to the shape of the combustion cylinder 13, the configuration of the main burner 15, the size of the gas inlet 18, the inflow amount of the gas to be treated, and other conditions. For example, as shown in the present embodiment, the gas to be treated flowing into the combustion cylinder 13 from the gas introduction port 18 forms a swirling flow in the combustion cylinder 13 or has a plurality of gas introduction ports 18. In this case, the state in which the gas to be processed passes through in the axial direction of the combustion cylinder can be avoided by causing the gases to be processed flowing into the combustion cylinder 13 to collide with each other. In addition, a perforated plate, a grid-like or mesh-like plate can be used as the current plate 19, and a plurality of current plates can be combined with one gas inlet 18.
[0014]
Note that the combustion cylinder 13, the main burner 15, the cooling cylinder 12, and the like can be configured in the same manner as a conventional general combustion abatement apparatus, and there is only one gas introduction nozzle 14 to be treated. Is also good.
[0015]
【Example】
Below the four gas inlets 18 having a diameter of 5 cm provided on the lid 11, as shown in FIGS. 2 and 3, a straightening plate 19 made of a metal plate of 10 cm × 15 cm is obliquely attached. The gas to be treated, which has flowed into the combustion cylinder 13 from above, forms a swirling flow in the combustion cylinder 13. Further, as a comparison, an experiment was conducted in which a lid without the rectifying plate 19 was prepared, and the effect of the rectifying plate 19 was confirmed by exchanging both lids. As the gas to be treated, a nitrogen gas containing ethane hexafluoride as a harmful component was used. The conditions other than the presence or absence of the current plate 19 were all the same.
[0016]
First, a total of 1 liter of ethane hexafluoride per minute and 600 liters of nitrogen gas per minute were introduced into the combustion cylinder 13 from the four gas inlets 18. As a result, the combustion abatement efficiency was 99% when the current plate 19 was provided, whereas the combustion abatement efficiency was 90% when the current plate 19 was not provided. When the nitrogen gas was increased to 800 liters per minute, the combustion abatement efficiency was 90% with the straightening plate 19 provided, whereas the combustion abatement efficiency was 70% without the straightening plate 19. It became.
[0017]
【The invention's effect】
As described above, according to the combustion abatement apparatus of the present invention, the residence time of the gas to be treated in the combustion cylinder can be extended, so that the combustion abatement efficiency can be improved. Therefore, the size of the apparatus can be reduced, and the temperature in the combustion cylinder can be lowered, so that the operating cost required for fuel and the like can be reduced.
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional front view showing one embodiment of a combustion abatement apparatus of the present invention.
FIG. 2 is a sectional view taken along line II-II of FIG.
FIG. 3 is a bottom view of a lid provided with a current plate.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 ... Lid, 12 ... Cooling cylinder, 13 ... Combustion cylinder, 14 ... Target gas introduction nozzle, 15 ... Main burner, 16 ... Fuel gas supply pipe, 17 ... Combustible gas supply pipe, 18 ... Gas introduction port, 19 ... Rectifier plate

Claims (1)

In the combustion abatement apparatus for introducing a gas to be treated containing a harmful component into a combustion cylinder provided with a burner, and performing a harmful component elimination process by burning or heating the harmful component in the combustion cylinder, The gas to be treated introduced into the combustion cylinder from the gas introduction nozzle to be treated is introduced into the combustion cylinder at the opening inside the combustion cylinder of the gas introduction nozzle for introducing the gas to be treated into the combustion cylinder in a direction different from the axial direction of the combustion cylinder. A combustion abatement apparatus characterized in that a straightening plate for guiding is provided.

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