JP2004047538A - Switching power supply, laser power supply, laser device, and method of controlling laser power supply - Google Patents

Switching power supply, laser power supply, laser device, and method of controlling laser power supply Download PDF

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Publication number
JP2004047538A
JP2004047538A JP2002199849A JP2002199849A JP2004047538A JP 2004047538 A JP2004047538 A JP 2004047538A JP 2002199849 A JP2002199849 A JP 2002199849A JP 2002199849 A JP2002199849 A JP 2002199849A JP 2004047538 A JP2004047538 A JP 2004047538A
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Prior art keywords
output
power supply
laser
boost converter
voltage
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JP2002199849A
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JP4135417B2 (en
Inventor
Hiroyasu Iwabuki
Akihiko Iwata
Hitoshi Kidokoro
Masato Matsubara
Akihiro Suzuki
城所 仁志
岩田 明彦
岩蕗 寛康
松原 真人
鈴木 昭弘
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Mitsubishi Electric Corp
三菱電機株式会社
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a switching power supply which provides a stable output. <P>SOLUTION: The switching power supply comprises a rectifying unit 100 for converting an AC voltage to a DC voltage, a step-up converter 10 for stepping up a DC voltage outputted from the rectifying unit 100, an inverter 110 for converting a DC output voltage Vo of the step-up converter 100 to a high-frequency voltage, a transformer unit 20 connected to the output side of the inverter unit 110, and an open loop control means for controlling an output voltage Vo of the step-up converter unit 10. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a switching power supply device, and more particularly to a laser power supply device, a laser device, and a method for controlling a laser power supply device.
[0002]
[Prior art]
FIG. 13 is a diagram showing a configuration of a conventional laser power supply device disclosed in Japanese Patent Application Laid-Open No. 9-232658. In FIG. 13, D1 is a rectifier for rectifying commercial power, 315 is a boost converter for boosting the power smoothed by the rectifier D1, 317 is an inverter for converting the power boosted by the boost converter to high frequency, 319 is an insulating transformer, 321 is a discharge electrode, and 323 is a matching unit for supplying a predetermined power.
[0003]
Next, the operation of the conventional laser power supply device will be described. A rectifier D1 for rectifying the commercial power converts the commercial power (AC power) into DC, and the boost converter 315 smoothes the DC converted by the rectifier D1 with a smoothing capacitor C1 and an inductor L1. The boost converter section 315 is provided with a switching element Q0 for performing boosting and power control, and is further provided with a diode D2 and a capacitor C2. The output voltage is boosted and the power is controlled by turning on / off the switching element Q0 by a method such as PWM (Pulse Width Modulation) or PFM (Pulse Frequency Modulation, Pulse Frequency Modulation).
[0004]
Inverter section 317 converts the DC voltage boosted and power-controlled by boost converter section 315 into a high-frequency voltage. This high-frequency voltage is applied to the discharge electrode 321 via the insulating transformer 319 and the matching section 323 whose impedance has been adjusted, and a current flows through the discharge electrode 321 to emit laser light.
[0005]
While boosting and power control are performed by switching element Q0 provided in boost converter section 315, a DC voltage of √2 times the commercial power supply voltage is supplied to inverter section 317 even when switching element Q0 is off and boosting and power control are not performed. Since the voltage is applied, a constant current always flows through the discharge electrode 321, and the matching section 323 maintains the state immediately before the discharge electrode 321 emits a laser beam by the discharge current. Since the switching element Q0 is not operating as described above in the state where the boosting and the power control are not performed, the loss of the switching element Q0 itself is zero.
[0006]
As described above, in the conventional laser power supply device, it is possible to minimize the switching loss in the switching element Q0 by stopping the power control of the injection power that is not output as the laser light, and to perform boosting at the time of laser output.
[0007]
In the conventional laser power supply device, boosting and power control are performed only by a method such as PWM or PFM by turning on / off the switching element Q0 of the boosting converter unit 315. Therefore, there was no need to use a step-up transformer. Further, the matching unit 323 is constituted only by a matching circuit for matching the internal impedance of the power supply with the load impedance and extracting the maximum power to the load, and has no voltage boosting ability.
[0008]
[Problems to be solved by the invention]
FIG. 14 shows an example of a discharge electrode having a laminated structure formed so as to cover a metal electrode with a dielectric material having a high non-dielectric constant such as glass or ceramics. In FIG. 14, reference numerals 1a and 1b denote a pair of opposed discharge electrodes, 2 denotes a laser medium composed of a laser gas in the case of a gas laser, 3 denotes a metal electrode, and 4 denotes a material having a high relative permittivity such as glass or ceramics. The discharge tube 5 is formed so as to be in close contact with the metal electrode 3 and cover the metal electrode 3 with the dielectric thus obtained. Reference numeral 6 denotes a dielectric material, which is an organic silicon resin that insulates the discharge tube 5. Reference numeral 7 denotes discharge, and 8 denotes a high-frequency power supply.
[0009]
When a discharge electrode having a laminated structure formed so as to cover a metal electrode with a dielectric material having a high relative dielectric constant such as glass or ceramics is used, the discharge electrode becomes a capacitive load. In order to use a pair of such discharge electrodes and maintain stable discharge with a large laser oscillator having a laser output of several kW, the electrode gap between the pair of discharge electrodes is set to 10 mm or more, and furthermore, a few It was necessary to apply a high voltage of kV to several tens of kV.
[0010]
In the conventional laser power supply device, boosting and power control are performed by a method such as PWM (pulse width modulation) or PFM (pulse frequency modulation) by turning on / off the switching element Q0 of the boost converter 315 as described above. When the commercial power supply is stepped up to a voltage (several kV to several tens of kV) applied to the discharge electrode 321 for the laser oscillator, the step-up converter unit 315 needs a switching element with a high withstand voltage. Further, when a general-purpose switching element is excessively multi-serialized in order to obtain a high voltage, there is a problem that a control circuit for each switching element becomes complicated.
[0011]
At the time of laser processing, it is necessary to pulse the laser output to 1 to several kHz depending on the processing target. During the high level period of the laser pulse during operation of the laser processing apparatus, laser light is output. On the other hand, during the laser pulse base period, that is, during the period when the laser light is not output, the laser light is not output as the laser light but the discharge itself is maintained so that the laser output can be easily obtained during the next high-level laser pulse period. (Hereinafter, the term “laser pulse base period” refers to a state in which laser light is not output, but discharge at the discharge electrode is continued). Therefore, during the laser pulse base period, the input power to the discharge electrode 321 needs to be reduced to a value that does not generate an output as laser light. In the power control using only the boost converter section 315, there is no problem because a voltage higher than 商用 2 times the commercial power supply voltage is applied to the inverter section 317 during the laser pulse high level period, but there is no problem during the laser pulse base period. Since a relatively low voltage of about √2 times the voltage is applied to the inverter section 317, it is difficult for power to be applied to the discharge electrode 321 and it becomes difficult to maintain discharge during the laser pulse base period, and the laser pulse operation mode is entered. In such a case, there is a problem that the discharge does not spread within the discharge electrode 321 and becomes unstable.
[0012]
Further, when the power control is performed by the boost converter section 315, there is no problem under the condition that the discharge is turned on and a sufficient current is flowing through the inductor L1 of the boost converter section 315. When the boost converter 315 is operated in a case where the voltage is small, a sufficient current does not flow through the inductor L1 due to the no-load operation or the light-load operation, and the output voltage of the boost converter 315 greatly jumps, making power control difficult. Was a problem.
[0013]
The present invention has been made to solve the above-described problems, and a high voltage of several kV to several tens of kV required when a dielectric electrode as shown in FIG. 14 is used is applied to a discharge electrode. It is an object of the present invention to provide a switching power supply, a laser power supply device, a laser device, and a method for controlling a laser power supply device, which can stably obtain a laser output of several kW or more while maintaining a stable and controllable discharge while applying a voltage. .
[0014]
[Means for Solving the Problems]
The switching power supply according to the present invention includes a rectifying unit that converts an AC voltage into a DC voltage, a boost converter that boosts the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter that has a high frequency. An inverter for converting the voltage into a voltage, a boosting transformer for boosting the high frequency voltage output from the inverter, and a PWM or PFM control means for controlling the inverter based on the output of the boosting transformer are provided.
[0015]
In addition, the switching power supply according to the present invention includes a rectifier that converts an AC voltage into a DC voltage, a boost converter that boosts the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter. And a transformer connected to the output side of the inverter, and open-loop control means for controlling the output voltage Vo of the boost converter.
[0016]
Also, in the switching power supply according to the present invention, the open-loop control means may include a duty setting circuit for determining an on / off ratio of a switching element provided in the boost converter, and an output voltage Vo of the boost converter. And an overvoltage clamp circuit for controlling the output voltage Vo. The output signal of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less.
[0017]
In the switching power supply according to the present invention, the overvoltage clamp circuit operates so as to reduce the output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value.
[0018]
Further, in the switching power supply according to the present invention, the transformer section is a step-up transformer section that steps up a high-frequency voltage output from the inverter section, and the PWM section controls the inverter section based on an output of the step-up transformer section. Alternatively, PFM control means was provided.
[0019]
A laser power supply device according to the present invention includes a rectifier that converts an AC voltage into a DC voltage, a boost converter that boosts the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter that has a high frequency. An inverter unit for converting the voltage into a voltage, a transformer unit connected to the output side of the inverter unit, for supplying high-frequency power to the discharge electrode unit, and an open-loop control unit for controlling the output voltage Vo of the boost converter unit. , With.
[0020]
Further, in the laser power supply device according to the present invention, the open-loop control means determines an on / off ratio of a switching element provided in the boost converter section, and an output voltage Vo of the boost converter section. And an overvoltage clamp circuit for controlling the output voltage Vo. The output signal of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less.
[0021]
Further, in the laser power supply device according to the present invention, the overvoltage clamp circuit operates so as to reduce the output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value.
[0022]
Further, in the laser power supply device according to the present invention, the transformer section is a step-up transformer section that steps up a high-frequency voltage output from the inverter section, and a PWM or a PWM that controls the inverter section based on an output of the step-up transformer section. PFM control means was provided.
[0023]
In addition, the laser power supply device according to the present invention further includes a functioning circuit provided on an output side of the transformer unit and performing a functioning process based on an output signal of a discharge current detection circuit for detecting a discharge current, wherein the duty setting is performed. The output signal of the circuit is determined based on the output of the functionalized circuit.
[0024]
Further, the laser power supply device according to the present invention further includes an inverter duty lower limit value setting circuit for the inverter unit.
[0025]
Further, the laser power supply device according to the present invention further includes a linearization circuit provided between the discharge current detection circuit and the duty setting circuit.
[0026]
Further, the laser power supply device according to the present invention further includes a line voltage fluctuation correction circuit that sends an output signal to the linearization circuit based on the output voltage of the rectifier.
[0027]
The laser device according to the present invention uses the above-described laser power device as a power source.
[0028]
A control method of a laser power supply device according to the present invention includes a rectifier, a boost converter provided with a switching element for boosting a DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter. An inverter for converting to a high-frequency voltage; a boost transformer connected to the output side of the inverter for supplying high-frequency power to the discharge electrode; and an open-loop control for controlling an output voltage Vo of the boost converter. Means for controlling the laser power supply device, wherein the driving of the switching element is continued even when the laser is not lit and during the laser pulse base period.
[0029]
BEST MODE FOR CARRYING OUT THE INVENTION
First, the outline of the configuration of the laser power supply device of the present invention will be described. In the laser power supply device of the present invention, a rectifying unit that rectifies an external AC power supply to obtain a smooth DC, a boost converter that boosts the DC rectified by the rectifier, and a DC boosted by the boost converter An inverter unit for converting a voltage into a high-frequency voltage, and a boost transformer unit for boosting the high-frequency voltage converted to a high frequency by the inverter unit to a voltage applied to a discharge electrode for laser oscillation, and having a boost converter unit having an overvoltage clamp circuit. The laser output is controlled by performing open-loop control in which a set value is previously determined from the outside and further performing PWM control of the inverter unit.
[0030]
With the above configuration, the external AC power is boosted to the voltage required for the discharge electrode for the laser oscillator in two stages, the boost converter section and the boost transformer section. Therefore, it is possible to solve the problem of increasing the withstand voltage of the switching element or the problem that the control circuit of the switching element becomes complicated when a general-purpose switching element is excessively serialized in order to obtain a high voltage.
[0031]
In addition, by adding an overvoltage clamp circuit that sets the upper limit value of the boost voltage and performing open loop control of the boost converter, the inductor of the boost converter during the period before discharge lighting, during light-load operation or during no-load operation, Since it is possible to prevent the output voltage from jumping in the boost converter section when the flowing current is discontinuous, it is possible to reduce the load on the switching elements constituting the laser power supply device and prevent the switching elements from being destroyed. It becomes. Further, since the power adjustment is performed not only by the boost converter but also by the PWM control of the inverter, the power can be easily adjusted and the laser output can be stabilized.
[0032]
Further, as described above, since the open-loop control in which the set value is previously determined from the outside by the boost converter is performed, the output voltage of the boost converter is light during the period before the discharge lighting and the light pulse period during the laser pulse base period during the pulse operation. Is held higher than the external AC power supply voltage by a factor of √2 or more and within a range not higher than the clamp set voltage. In the laser power supply device of the present invention, since the output voltage of the boost converter is boosted again by the boost transformer, a voltage higher than the external AC power supply voltage can be applied to the discharge electrode even during the laser pulse base period. Also, electric power is easily supplied to the capacitive discharge electrode, and lighting and maintenance of discharge are facilitated. Further, since a high voltage is applied to the discharge electrode, the discharge easily spreads in the discharge electrode. As a result, the transition from the laser pulse base period to the laser pulse high level period becomes smooth, and the oscillation efficiency of the laser is improved.
[0033]
Embodiment 1 FIG.
FIG. 1 is a diagram showing a configuration of a laser power supply device according to Embodiment 1 of the present invention. As shown in FIG. 1, the laser power supply device according to the first embodiment rectifies a 200 V three-phase AC power supply, which is an external AC power supply, to obtain a pulsating flow by rectifying the 200 V three-phase AC power supply, and rectifies the rectification by a smoothing capacitor C1 and an inductor L1. A boost converter section 10 for smoothing the voltage to obtain a DC voltage and boosting the DC voltage, and a plurality of switching elements Q1 to Q4 for converting the DC output voltage Vo boosted by the boost converter section 10 into a high-frequency voltage. Inverter section 110 including Q4 and return diodes D3 to D6, and step-up transformer section 20 for boosting a high-frequency voltage converted into a high frequency by inverter section 110 to a voltage applied to laser oscillation discharge electrode section 120. I have.
[0034]
The boost converter 10 is provided with a switching element S1. The output voltage Vo of the boost converter 10 is set to a desired constant voltage by the duty of the switching element S1 determined by the duty setting circuit 200. You. Here, the duty and Don are defined by the following equations.
[0035]
Don = T ON / (T ON + T OFF (1)
(1) where T ON Is the ON time of the switching element S1, T OFF Represents the off time of the switching element S1. The output voltage Vo of the boost converter 10 is converted by the product of the boost ratio of the boost converter 10 and the boost ratio of the boost transformer 20 to the output (line voltage V) of the rectifier 100 to the discharge electrode unit 120 required for laser oscillation. The voltage value is set so as to be equal to or higher than the ratio of the applied voltage.
[0036]
When the clamp voltage is not set by the overvoltage clamp circuit 210, the output voltage Vo boosted by the boost converter unit 10 jumps above the withstand voltage of the switching element in a period before discharge lighting or a light load period. There was a defect. Therefore, in the laser power supply device according to the first embodiment, the upper limit value of the boosted voltage is limited by the overvoltage clamp circuit 210. The set voltage of overvoltage clamp circuit 210 is set to be equal to or lower than the withstand voltage of switching element S1 used in boost converter section 10 and switching elements Q1 to Q4 used in inverter section 110.
[0037]
The overvoltage clamp circuit 210 will be described in more detail. The duty setting circuit 200 applies an output signal to a control terminal (gate terminal) of the switching element S1 so that the switching element S1 of the boost converter section 10 is driven at a duty set in advance from outside. The overvoltage clamp circuit 210 outputs the output of the duty setting circuit 200 so as to reduce the duty of the switching element S1 determined by the duty setting circuit 200 when the output voltage Vo of the boost converter section 10 exceeds a predetermined clamp setting voltage value. By controlling the signal, it functions so that the output voltage Vo does not exceed the clamp set voltage value. That is, the open loop control of the boost converter unit 10 is performed via the overvoltage clamp circuit 210 and the duty setting circuit 200.
[0038]
FIG. 2 shows an example of the overvoltage clamp circuit 210. The overvoltage clamp circuit 210 is roughly divided into three parts, namely, a voltage detection unit 211, a voltage comparison unit 212, and an output selection unit 213. The voltage detector 211 detects the output voltage Vo of the boost converter 10, sets the detected voltage to an appropriate voltage value, and outputs the voltage to the next voltage comparator 212. The voltage comparison unit 212 compares the output voltage from the voltage detection unit 211 with a preset clamp set voltage value. In this case, the output signal from the voltage comparison unit 212 may be a signal obtained by amplifying the difference between the clamp setting voltage value and the output signal from the current detection unit 211 using an operational amplifier or the like. The output selection unit 213 selects, from the output signals from the current comparison unit 211, a signal only when the voltage exceeds the clamp set voltage value, and sets the selected signal as the final output signal of the overvoltage clamp circuit 210. The output signal generated from the overvoltage clamp circuit 210 is input to the duty setting circuit 200 to reduce the duty of the switching element S1 of the boost converter 10. The above three parts may be respectively constituted by operational amplifiers, for example.
[0039]
The inverter unit 110 includes four sets of switching elements Q1 to Q4, and converts the boosted output voltage Vo to a high-frequency voltage by alternately turning on / off a combination of Q1 and Q2 and a combination of Q3 and Q4 at a high frequency. . A desired discharge current is set by the laser output setting circuit 30, PWM control is performed by comparing the set current value with the output of the discharge current detection circuit 230, and the switching signal generation circuit 220 controls the switching elements Q 1 to Q 4 of the inverter unit 110. The power is adjusted by changing the inverter duty. The step-up transformer unit 20 steps up the voltage converted to a high frequency by the inverter unit 110 to a voltage value applied to the discharge electrode 120 for laser oscillation.
[0040]
In the above-described device configuration, as described above, the external AC power is boosted to the voltage applied to the discharge electrode 120 for the laser oscillator in two stages, the boost converter unit 10 and the boost transformer unit 20. As a result, with respect to the problem of increasing the withstand voltage of the switching element, which has been a problem in the conventional laser power supply device, it is not necessary to perform excessive boosting only by the boost converter unit 10 by applying the two-stage boosting. The situation where a high voltage is applied is eliminated. In addition, it is not necessary to excessively multiply general-purpose switching elements in order to obtain a high voltage. This is because if the switching elements are excessively multi-serialized, a control circuit for the switching elements becomes complicated.
[0041]
In addition to the above-described configuration, the overvoltage clamp circuit 210 is added to the boost converter unit 10 to perform open loop control on the boost converter unit 10, so that the boost converter unit can be used in a period before discharge lighting or in the case of a light load. Extremely high output voltage Vo can be prevented. As a result, the load on the switching elements S1 and Q1 to Q4 constituting the laser power supply device can be reduced, and the destruction of the switching element can be effectively prevented. As a result, the switching element can be used even if it is not a high withstand voltage switching element. This eliminates the need for a complicated control circuit. Further, power adjustment of the laser power supply device according to the first embodiment is performed not only by boost converter unit 10 but also by PWM control of inverter unit 110, so that adjustment of output power is facilitated and laser output is stabilized. Can be achieved.
[0042]
In the boost converter 10 that temporarily boosts the DC rectified by the rectifier 100, the duty of the switching element S1 of the boost converter 10 is controlled in accordance with the laser output. Note that the laser power supply device of the first embodiment does not perform feedback control such as adjusting the boost converter output voltage Vo. If feedback control is performed during the laser pulse base period, a state in which a high voltage is applied to the discharge electrode unit 120 cannot be realized.
[0043]
As described above, in the laser power supply device according to the first embodiment, the duty of switching element S1 is determined in advance to operate boost converter section 10, and output voltage Vo of boost converter section 10 is a load, that is, discharge electrode section in this case. Since the open loop control is performed irrespective of the fluctuation of the power supply 120, the output voltage Vo of the boost converter unit 10 is reduced during the period before the discharge lighting and during the light load in the laser pulse base period when the power supply is pulsed. It is possible to apply a high voltage to the discharge electrode 120 within a range jumping below the clamp set voltage when the external AC power supply voltage is more than √2 times the external AC power supply voltage. In addition, since the output voltage Vo of the boost converter section 10 is further boosted by the boost transformer section 20 in two stages, a higher voltage than during discharge lighting is applied to the discharge electrode 120 during the laser pulse base period. As a result, electric power easily enters the discharge electrode 120, and as a result, the discharge easily spreads in the discharge electrode, and the maintenance of the discharge becomes easy. As a result, the transition from the standby state before the discharge lighting to the discharge lighting and the transition from the laser pulse base period to the laser pulse high level period during the laser pulse operation become smooth, and the laser oscillation efficiency is improved.
[0044]
Embodiment 2 FIG.
In the control method of the laser power supply device according to the second embodiment of the present invention, in the laser power supply device according to the first embodiment, the boost converter unit 10 is continuously operated even when the discharge is not lit and during the laser pulse base period. It is characterized by. FIG. 3 is a diagram showing a control method of the laser power supply device according to the second embodiment, and shows a voltage and an output in each part of the device configuration.
[0045]
The laser power supply device is required to smoothly shift from discharge non-lighting to discharge lighting. In the standby state before the discharge lighting as in the control method of the conventional laser power supply apparatus, when the discharge lighting is performed from the stop state of the boost converter section 10, the charging time of the output capacitor C2 in the boost converter section 10 is required. , The time response is delayed, and it is not possible to smoothly shift to discharge lighting.
[0046]
When the laser output needs to be pulsed to 1 to several kHz, the laser output is obtained during the laser pulse high-level period, but easily when the next laser pulse high-level period is reached even during the laser pulse base period. In order to obtain a high-power laser beam, the laser beam is not output as a laser beam, but the discharge itself needs to be maintained. At this time, the input power to the discharge electrode unit 120 needs to be reduced to a value that does not generate an output as laser light. Here, since the discharge electrode unit 120 has a dielectric structure, it is a capacitive load. Accordingly, even if a relatively low voltage of about 部 2 times the external AC power supply voltage is applied to the discharge electrode during the laser pulse base period, power is supplied to the discharge electrode unit 120 by the power control only by the boost converter unit 10. Therefore, there is a problem that it is difficult to maintain the discharge at the discharge electrode by the conventional control method of the laser power supply device.
[0047]
Therefore, in the control method of the laser power supply device according to the second embodiment, boost converter unit 10 is continuously operated, that is, switching element S1 is operated even during the discharge pulse non-lighting and the discharge pulse lighting laser pulse base periods. At this time, the output voltage Vo from the boost converter 10 is controlled by performing open loop control for setting the duty of the switching element S1 of the boost converter 10 in advance.
[0048]
A control method of the laser power supply device according to the second embodiment will be described with reference to FIG. FIG. 3 shows the input / output voltages Vi and Vo of the step-up converter unit 10, the output voltage of the inverter unit 110, the input power to the discharge electrode unit 120, and the average laser output when the laser light is pulse-output. is there.
[0049]
During standby before discharge lighting, a boost operation is performed. In this case, since the discharge current in the discharge electrode unit 120 is suppressed by reducing the inverter duty of the inverter unit 110, the input power to the discharge electrode unit 120 is extremely small and is equal to or less than the threshold value of laser oscillation. Naturally, the laser output is zero. Since the discharge current is small, the output voltage Vo of the boost converter 10 jumps up to the clamp set voltage value set in the overvoltage clamp circuit 210. Therefore, since the voltage applied to the discharge electrode unit 120 is maintained at a high voltage, discharge lighting at the start of laser oscillation becomes easy.
[0050]
When the laser oscillation starts, the input power to the discharge electrode unit 120 increases. In this case, since the discharge current increases, the output voltage Vo of the boost converter 10 becomes
Vo = Vi / (1-Don) (2)
A desired voltage value can be determined by setting Don based on the expression represented by The output voltage Vo is in the range of not less than √2 times the external AC power supply voltage and not more than the clamp set voltage. At this time, the inverter duty is increased by the PWM control, and the discharge current is also increased. As a result, power for laser oscillation exceeding the threshold is input to the discharge electrode unit 120, so that laser oscillation is started and a desired laser output can be obtained.
[0051]
Next, in the laser pulse base period, the input power is suppressed to a power equal to or lower than a threshold value at which discharge is turned on but not output as laser light. Also in this case, the discharge current is higher than during laser oscillation because the load is light as in the standby state until the discharge is turned on. As a result, when the conventional laser power supply uses a discharge electrode having a capacitive load as shown in FIG. 14, when the voltage applied to the discharge electrode is reduced during the laser pulse base period, the discharge electrode However, in the driving method of the laser power supply device according to the present embodiment, a voltage higher than the external AC power supply voltage is easily applied to the discharge electrode unit 120 even during the laser pulse base period. This makes it easier for power to enter the discharge electrode unit 120, and facilitates maintenance of discharge. Therefore, since a high voltage is applied to the discharge electrode, the discharge easily spreads in the electrode, and as a result, the oscillation efficiency of the laser is improved.
[0052]
The step-up converter unit 10 is continuously operated even during a light load during a period from a standby state before discharge lighting to a discharge lighting and a laser pulse base period during a pulse operation, so that the voltage is clamped at √2 times or more of the external AC power supply voltage. A relatively high output voltage Vo of the step-up converter unit 10 within a range equal to or lower than the set voltage is applied to the inverter unit 110, and the voltage converted to a high frequency by the inverter unit 110 is boosted by the step-up transformer unit 20, and discharged. Applied to the unit 120. As a result of the application of the high voltage, the charging of the output capacitor C2 of the boost converter unit 10 does not require a charging time, the time response of the discharge lighting becomes fast, and the transition to the discharge lighting can be smoothly performed. That is, the discharge is stably lit.
[0053]
Embodiment 3 FIG.
In the laser power supply device according to Embodiment 3 of the present invention, as shown in the device configuration of FIG. 4, the discharge current detection circuit 230 detects a discharge current (laser output current) generated on the output side of the step-up transformer section 20. And a functioning circuit 240 set so as to determine the duty of switching element S1 of boost converter section 10 in accordance with the output signal of discharging current detection circuit 230. The output signal of functioning circuit 240 is To control the output voltage Vo of the step-up converter unit 10, and further control the laser output by PWM-controlling the inverter switching elements Q1 to Q4 of the inverter unit 110. Note that, like the laser power supply device according to the first embodiment, an overvoltage clamp circuit 210 is provided to limit the output voltage Vo of the boost converter 10 to a certain voltage or less.
[0054]
When performing PWM control of the inverter unit 110 to adjust the laser output, if the inverter duty of the inverter switching elements Q1 to Q4 is reduced in order to reduce the laser output, the inverter switching elements Q1 to Q4 constituting the inverter unit 110 are reduced. In a so-called diode recovery mode, in which a reverse voltage is applied while a forward current is flowing through the parasitic diode or the externally connected inverter return diodes D3 to D6, a diode recovery current flows. The loss of the switching elements Q1 to Q4 or the external freewheeling diodes D3 to D6 increases, and in some cases, a problem may occur that the switching elements are broken.
[0055]
Therefore, as shown in the relationship between the output voltage Vo of the boost converter 10 and the laser output current in FIG. 5, at the point A where the laser output is small, the duty of the switching element S1 is set to be lower and the output voltage Vo of the boost converter 10 is set. At the point B where the laser output is large, the duty of the switching element S1 is increased so that the duty of the switching element S1 is determined in advance according to the discharge current so that the output voltage Vo is increased. The output voltage Vo is applied to the inverter unit 110. The function of the functioning circuit 240 is set so that the inverter duty of the inverter switching elements Q1 to Q4 is not reduced and the diode recovery mode is set when the output is reduced during the laser pulse base period when the inverter unit 110 performs the PWM control. I do.
[0056]
Due to the operation of the functioning circuit 240, when performing PWM control on the inverter unit 110 to reduce the laser output, the inverter duty of the inverter switching elements Q1 to Q4 becomes too low, and the diode enters the diode recovery mode. Can be avoided, so that an increase or destruction of the loss of the switching elements Q1 to Q4 of the inverter unit 110 or the return diodes D3 to D6 can be prevented. Further, by performing the output control of the entire laser power supply device by combining the PWM control of the inverter unit with the open loop control of the boost converter unit, the output fluctuation can be suppressed more easily than the output control by the PWM control of the inverter unit alone. And a stable laser output can be obtained.
[0057]
Embodiment 4 FIG.
In the laser power supply device according to Embodiment 4 of the present invention, as shown in the device configuration of FIG. 6, an inverter duty lower limit value setting circuit for setting the inverter duty lower limit value of inverter switching elements Q1 to Q4 of inverter unit 10 250, and further performs PWM control on the inverter switching elements Q1 to Q4.
[0058]
In the laser power supply device according to Embodiment 4 of the present invention, an inverter duty lower limit value setting circuit for setting the inverter duty lower limit value of inverter switching elements Q1-Q4 in order to prevent the diode recovery mode mentioned in Embodiment 3. 250 are provided. By setting the lower limit value of the inverter duty in a region that does not enter the diode recovery by the function of the additional circuit, the return diodes D3 to D6 are prevented from entering the recovery mode, and as a result, the loss of the inverter switching element is reduced. And destruction can be prevented. The inverter duty lower limit value setting circuit 250 may be a circuit that sets the inverter duty lower limit value in advance, or may have a circuit configuration in which a return current is detected by the return diodes D3 to D6, and a decrease in the inverter duty of the inverter unit 10 is thereby stopped. .
[0059]
When the inverter duty of the inverter unit 110 is reduced during the laser pulse base period during the time of reducing the power for laser light or the pulse operation, the lower limit value of the inverter duty is set and does not become lower than the lower limit value. Power may be too high. Therefore, in these cases, similarly to the laser power supply device according to the third embodiment, boost converter output voltage Vo that has been converted into a function with respect to the discharge current is applied to inverter unit 110 in advance. This prevents the free-wheeling diodes D3 to D6 of the inverter unit 10 from entering the diode recovery, thereby reducing the loss and preventing the destruction of the switching element, and controlling the open loop control in the boost converter unit 10 and the inverter unit 110. Laser output control combined with PWM control can more easily suppress fluctuations in laser output than laser output control based on only PWM control of the inverter unit, so that a stable laser output can be obtained.
[0060]
Embodiment 5 FIG.
In the laser power supply device according to Embodiment 5 of the present invention, as shown in FIG. 7, a linearization circuit 260 for linearizing the output voltage Vo of the boost converter 10 with respect to the duty of the switching element S1 of the boost converter 10 is provided. It is characterized by having.
[0061]
During a period in which the current flowing through the inductor L1 of the boost converter 10 is continuous, the output voltage Vo of the boost converter 10 increases according to the equation (2) with respect to the increase in the duty and Don of the switching element S1. The calculation result based on the equation (2) is shown by a broken line in FIG. As shown in FIG. 8, as the duty of the switching element S1 of the boost converter 10 increases, the output voltage Vo of the boost converter 10 rapidly changes greatly with a small change in the duty. Therefore, when the boost converter 10 is operated in a region where the duty of the switching element S1 of the boost converter 10 is large, the laser output also fluctuates due to the fluctuation of the output voltage Vo of the boost converter 10, and a stable laser output can be obtained. There was a problem that it could not be done.
[0062]
Therefore, in order to prevent such a problem, in the laser power supply device according to the fifth embodiment, a linearization circuit 260 for linearizing the output voltage Vo of the boost converter section 10 with respect to the duty of the switching element S1 is provided. 7, the duty of the switching element S1 of the boost converter 10 is determined based on the output signal of the functionalization circuit 240. On the other hand, the output signal of the functioning circuit 240 depends on the output signal of the discharge current detection circuit 230 that converts the discharge current signal into a voltage. Therefore, by calculating the output signal of the functioning circuit 240, it is possible to suppress the laser output fluctuation with respect to the duty fluctuation in the region where the boost ratio is high. However, the functioning circuit 240 is not always necessary, and the output signal of the discharge current detection circuit 230 may be directly calculated in the linearization circuit 260.
[0063]
The above-described linearization circuit 260 may be a circuit that converts the duty of the switching element S1 into a route, for example. Here, the output voltage Vo of the boost converter unit 10 is determined by the duty of the switching element S1 and Don.
Vo = Vi / (1−a√Don) (3)
And Here, a is a constant, and the duty is route-transformed by the functioning circuit 240 and an operation is performed to multiply the duty by a. The relationship of the boost ratio with respect to the switching element S1 for the boost converter in this circuit configuration is shown by the solid line in FIG. In this case, although not completely linear, the output voltage Vo of the boost converter unit 10 can be substantially linearized with respect to the duty of the switching element S1 if the boost ratio is 1 to 3 times.
[0064]
Further, the linearization circuit 260 may be, for example, an addition / subtraction operation circuit for a difference from an output signal of the functioning circuit 240 or the discharge current detection circuit 230 to a target straight line. Further, a method may be used in which the output signal of the functioning circuit 240 or the discharge current detection circuit 230 is log-converted, and this output is linearized by four arithmetic operations. FIG. 8B shows the relationship between the duty ratio of the boosting converter unit 10 and the boosting ratio in this case.
[0065]
By having the linearization circuit 260 in this manner, laser output fluctuations with respect to duty fluctuations in a region where the boost ratio is high can be suppressed, so that a stable laser output can be obtained.
[0066]
Embodiment 6 FIG.
In the laser power supply device according to Embodiment 6 of the present invention, the operating point of the laser pulse base period is provided on the line of the duty of the boost converter unit and the output voltage characteristic of the boost converter at the time of laser oscillation in the linearization circuit 260. It is characterized in that the boost converter operation is performed during the period.
[0067]
When the operating point in the laser pulse base period deviates from the line between the duty of the boost converter unit 10 and the boost converter output voltage characteristic at the time of laser oscillation in the linearization circuit 260 and the boost converter output voltage Vo increases, the inverter switching of the inverter unit 110 occurs. Since the inverter duty of the devices Q1 to Q4 is reduced and the device enters the diode recovery mode, the loss of each switching device increases, and in some cases, the switching device is destroyed. Further, when the inverter duty lower limit value setting circuit 250 is set, since the inverter duty cannot be lower than the lower limit value, the power is excessively supplied during the laser pulse base period, so that a laser oscillation may occur. .
[0068]
On the other hand, if the output voltage Vo of the boost converter 10 is low when the duty of the boost converter 10 and the output voltage characteristic of the boost converter 10 during the laser oscillation in the linearization circuit 260 are not on the line, the inverter 110 The inverter duty of the inverter switching elements Q1 to Q4 becomes 100% when the laser output is low, making laser output control difficult. Further, since the output voltage Vo of the boost converter unit 10 is low, it becomes difficult to maintain the discharge in the laser pulse base period.
[0069]
Therefore, as shown in FIG. 9, an operating point C in the laser pulse base period is provided on the approximate line of the duty of the boost converter unit 10 and the output voltage characteristics of the boost converter at the time of laser oscillation in the linearization circuit 260. The converter unit 10 is operated. As a result, since the transition from the laser pulse base period to the laser pulse high level period is smooth, the setting and control of the laser output becomes easy, the discharge itself is stabilized, and the oscillation efficiency is improved. Further, by entering the diode recovery mode, the loss of the switching element is increased, and the problem of destruction of the switching element is eliminated.
[0070]
Embodiment 7 FIG.
The laser power supply device according to Embodiment 7 of the present invention includes a line voltage fluctuation correction circuit 270 that changes the duty of the boost converter in accordance with the fluctuation of the rectifier output voltage Vi as shown in FIG. . Here, the line voltage V indicates the voltage of an external AC power supply.
[0071]
When the output voltage Vi of the rectifier 100 fluctuates due to the decrease or rise of the line voltage V, the output voltage Vo of the boost converter 10 fluctuates, and as a result, the laser output also fluctuates. Therefore, in the laser power supply device according to the seventh embodiment, a line voltage fluctuation correction circuit 270 is provided as shown in FIG. Assuming that the reference point of the line voltage V is F as shown in FIG. 11, when the output voltage Vi of the rectifier 100 decreases due to the decrease of the line voltage V as at the point E, the switching element S1 of the boost converter 10 Is increased and the output voltage Vi of the rectifier 100 rises as shown at point G, the fluctuation of the output voltage Vi of the rectifier 100 is reduced so that the duty of the switching element S1 of the boost converter 10 is reduced. The duty of the boost converter 10 is changed in accordance with. As a result, the output voltage Vo of the boost converter section 10 can always be kept constant, so that a stable laser output can be obtained.
[0072]
Embodiment 8 FIG.
FIG. 12 shows a configuration diagram of a laser device according to Embodiment 8 of the present invention. In the figure, reference numeral 280 denotes a laser power supply according to any one of the first to seventh embodiments of the present invention. 281 is a laser oscillation tube, 282 is a pair of discharge electrodes provided inside the laser oscillation tube, 283 is a laser gas supply system, 284 is a laser gas exhaust system, 285 is an output window provided at both ends of the laser oscillation tube, and 286 is a whole. A reflecting mirror, 287 is an output mirror, 288 is a beam splitter, 289 is a laser output, 290 is a laser power meter, and 291 is a laser output control device.
[0073]
Next, the operation of the laser device according to Embodiment 8 of the present invention will be described. When an output voltage of a predetermined value or more is applied to discharge electrode 282 from laser power supply device 280 according to any one of the first to seventh embodiments of the present invention, laser light is generated in laser oscillation tube 281. The laser oscillation tube 281 is filled with a laser gas introduced from a laser gas supply system 283, and is circulated as appropriate by a laser gas exhaust system 284.
[0074]
The laser light is amplified by passing through output windows 285 provided at both ends of the laser oscillation tube 281 and reciprocating between the total reflection mirror 286 and the output mirror, and a part thereof is extracted as a laser output 289 to the outside. A part of the laser output 289 is received by the laser power meter 290 by the beam splitter 288 and is converted into an electric signal. The electric signal is input to the laser output control device 291. The laser output control device 291 transmits an output signal for controlling the laser power supply device 280 to the laser power supply device 280 based on the input signal and the like.
[0075]
In the laser device according to the eighth embodiment of the present invention, since the laser power supply device 280 according to any one of the first to seventh embodiments is used as a power supply for generating a laser output, an extremely stable laser output with excellent controllability is obtained. Can be
[0076]
As described above, in each embodiment, the laser power supply device is described as an example. However, any switching power supply device for supplying a high-frequency voltage is not limited to the laser power supply device, and may be used as a power supply device for other applications. It can be easily applied, and as a result, there is an effect that an extremely stable switching voltage with excellent controllability can be obtained.
[0077]
Although the switching element S1 of the boost converter section 10 in each embodiment has been described with a single switching element for convenience of description, a switching element including a plurality of elements can be applied.
[0078]
As described above, in each embodiment, the PWM control has been described as an example of the method of controlling the inverter unit. However, the same effect can be obtained by the PFM control.
[0079]
【The invention's effect】
In the switching power supply according to the present invention, a rectifier for converting an AC voltage to a DC voltage, a boost converter for boosting the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter for high frequency. An inverter for converting the voltage into a voltage, a boosting transformer for boosting the high-frequency voltage output from the inverter, and PWM or PFM control means for controlling the inverter based on the output of the boosting transformer. 2. By applying the two-stage boosting, it is not necessary to perform excessive boosting only in the boosting converter section, so that a situation where a high voltage is applied to the switching element is eliminated, and a general-purpose switching element is used to obtain the high voltage. There is no need for excessive multi-serialization.
[0080]
Further, in the switching power supply device according to the present invention, a rectifier for converting an AC voltage to a DC voltage, a boost converter for boosting the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter. To a high-frequency voltage, a transformer connected to the output side of the inverter, and open-loop control means for controlling the output voltage Vo of the boost converter. In order to prevent an extreme jump of the output voltage Vo, it is possible to reduce the load on the switching elements constituting the switching power supply device and effectively prevent the destruction of the switching elements. It becomes possible, and a complicated control circuit for the switching element becomes unnecessary.
[0081]
Further, in the switching power supply device according to the present invention, the open loop control means includes a duty setting circuit that determines an on / off ratio of a switching element provided in the boost converter section, and an output voltage Vo of the boost converter section. An output voltage of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less. It is possible to control it below the value.
[0082]
In the switching power supply according to the present invention, the overvoltage clamp circuit operates to reduce the output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value. Vo can be easily controlled to a predetermined voltage value or less.
[0083]
Further, in the switching power supply device according to the present invention, the transformer section is a step-up transformer section that steps up a high-frequency voltage output from the inverter section, and the PWM section controls the inverter section based on an output of the step-up transformer section. Since the PFM control unit is provided, it is not necessary to perform excessive boosting only by the boost converter unit by applying the two-stage boosting, so that a situation where a high voltage is applied to the switching element is eliminated, and a high voltage is obtained. Therefore, it is not necessary to excessively serialize the general-purpose switching elements.
[0084]
In the laser power supply device according to the present invention, a rectifier for converting an AC voltage to a DC voltage, a boost converter for boosting the DC voltage output from the rectifier, and a DC output voltage Vo of the boost converter for high frequency. An inverter unit for converting the voltage into a voltage, a transformer unit connected to the output side of the inverter unit, for supplying high-frequency power to the discharge electrode unit, and an open-loop control unit for controlling the output voltage Vo of the boost converter unit. Therefore, in order to prevent the output voltage Vo of the boost converter from excessively jumping in the period before the discharge lighting or in the case of a light load, the load on the switching elements constituting the laser power supply device is reduced, and the switching is performed. As a result of effectively preventing the destruction of the element, it can be used even if it is not a switching element with a high withstand voltage. Complex control circuit is also unnecessary.
[0085]
Further, in the laser power supply device according to the present invention, the open loop control means includes a duty setting circuit for determining an on / off ratio of a switching element provided in the boost converter section, and an output voltage Vo of the boost converter section. An output voltage of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less. It is possible to control it below the value.
[0086]
Also, in the laser power supply device according to the present invention, the overvoltage clamp circuit operates to reduce the output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value. Can be stably controlled to a predetermined voltage value or less.
[0087]
Further, in the laser power supply device according to the present invention, the transformer section is a step-up transformer section that steps up a high-frequency voltage output from the inverter section, and a PWM or a PWM that controls the inverter section based on an output of the step-up transformer section. Since the PFM control unit is provided, it is not necessary to perform excessive boosting only by the boost converter unit by applying the two-stage boosting, so that a situation where a high voltage is applied to the switching element is eliminated, and a high voltage is obtained. Therefore, it is not necessary to excessively serialize the general-purpose switching elements.
[0088]
Further, the laser power supply device according to the present invention further includes a functioning circuit provided on the output side of the transformer section, the functioning circuit performing a functioning process based on an output signal of a discharge current detection circuit for detecting a discharge current, and Since the output signal of the circuit is determined based on the output of the functioning circuit, it can be prevented from entering the diode recovery mode, and the output fluctuation can be easily suppressed, so that a stable laser output can be obtained.
[0089]
In addition, the laser power supply device according to the present invention further includes the inverter duty lower limit value setting circuit for the inverter unit, so that the fluctuation of the laser output can be suppressed more easily than the laser output control only by the PWM control of the inverter unit. Therefore, a stable laser output can be obtained.
[0090]
Further, the laser power supply device according to the present invention further includes a linearization circuit provided between the discharge current detection circuit and the duty setting circuit, so that a laser output variation with respect to a duty variation in a high boost ratio region is suppressed. Therefore, a stable laser output can be obtained.
[0091]
Further, the laser power supply device according to the present invention further includes a line voltage fluctuation correction circuit that sends an output signal to the linearization circuit based on the output voltage of the rectification unit, so that the output voltage of the boost converter is always kept constant. Therefore, a stable laser output can be obtained.
[0092]
In the laser device according to the present invention, since the above-described laser power device is used as a power source, a stable laser output can be obtained because the laser power source is stable.
[0093]
In the control method of the laser power supply device according to the present invention, the rectifier, the boost converter provided with a switching element to boost the DC voltage output from the rectifier, and the DC output voltage Vo of the boost converter are provided. An inverter for converting to a high-frequency voltage; a boost transformer connected to the output side of the inverter for supplying high-frequency power to the discharge electrode; and an open-loop control for controlling an output voltage Vo of the boost converter. Means for controlling the laser power supply device, wherein the driving of the switching element is continued even when the laser is not lit and during the laser pulse base period. Since a voltage higher than the voltage can be easily applied to the discharge electrode portion, power is easily applied to the discharge electrode portion, and the discharge electrode portion is discharged. In addition to maintaining is facilitated, since a high voltage is applied to the discharge electrode, discharge is easily spread in the electrode, thereby improving oscillation efficiency of the laser.
[Brief description of the drawings]
FIG. 1 is a diagram for explaining a laser power supply device according to a first embodiment.
FIG. 2 is a diagram illustrating a configuration of an overvoltage clamp circuit in the laser power supply device according to the first embodiment.
FIG. 3 is a diagram illustrating a control method of a laser power supply device according to a second embodiment.
FIG. 4 is a diagram for explaining a laser power supply device according to a third embodiment.
FIG. 5 is a diagram illustrating a relationship between an output voltage Vo of a boost converter of a laser power supply device according to a third embodiment and a laser output current.
FIG. 6 is a diagram illustrating a laser power supply device according to a fourth embodiment.
FIG. 7 is a diagram for explaining a laser power supply device according to a fifth embodiment.
FIG. 8 is a diagram illustrating a relationship between an output voltage Vo of a boost converter of a laser power supply device according to a fifth embodiment and a boost ratio.
FIG. 9 is a diagram illustrating a relationship between a duty of a boost converter unit of a laser power supply device according to a sixth embodiment and an output voltage Vo of the boost converter.
FIG. 10 is a diagram illustrating a laser power supply device according to a seventh embodiment.
FIG. 11 is a diagram illustrating a relationship between a line voltage of the laser power supply device according to the seventh embodiment and a duty of a boost converter.
FIG. 12 is a configuration diagram of a laser device according to an eighth embodiment.
FIG. 13 is a diagram for explaining a conventional laser power supply device.
FIG. 14 is an example of a discharge electrode in a laser power supply device.
[Explanation of symbols]
1a, 1b a pair of opposed discharge electrodes, 2 laser medium, 3 metal electrode, 4 dielectric, 5 discharge tube, 6 silicon resin, 7 discharge, 8 high frequency power supply, 10 boost converter section, 20 boost transformer section, 30 laser output Setting circuit, 100 rectifier, 110 inverter, 120 discharge electrode, 200 duty setting circuit, 210 overvoltage clamp circuit, 211 voltage detector, 212 voltage comparator, 213 output selector, 220 switching signal generation circuit, 230 discharge current Detection circuit, 240 function circuit, 250 inverter duty lower limit value setting circuit, 260 linearization circuit, 270 line voltage fluctuation correction circuit, 281 laser oscillation tube, 282 discharge electrode, 283 laser gas supply system, 284 laser gas exhaust system, 285 output window , 286 total reflection mirror, 2 7 output mirror, 288 a beam splitter, 289 a laser output, 290 laser power meter, 291 a laser output control device, 315 boost converter, 317 inverter, 319 insulation transformer, 321 discharge electrodes 323 matching unit.

Claims (15)

  1. A rectifier for converting an AC voltage to a DC voltage,
    A boost converter for boosting the DC voltage output from the rectifier,
    An inverter unit for converting the DC output voltage Vo of the boost converter unit to a high-frequency voltage;
    A step-up transformer section that steps up a high-frequency voltage output from the inverter section;
    PWM or PFM control means for controlling the inverter section based on the output of the step-up transformer section;
    A switching power supply device comprising:
  2. A rectifier for converting an AC voltage to a DC voltage,
    A boost converter for boosting the DC voltage output from the rectifier,
    An inverter unit for converting the DC output voltage Vo of the boost converter unit to a high-frequency voltage;
    A transformer unit connected to an output side of the inverter unit,
    Open loop control means for controlling the output voltage Vo of the boost converter section;
    A switching power supply device comprising:
  3. The open-loop control means includes: a duty setting circuit that determines an on / off ratio of a switching element provided in the boost converter; and an overvoltage clamp circuit that controls an output voltage Vo of the boost converter.
    3. The switching power supply according to claim 2, wherein an output signal of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less.
  4. 4. The switching power supply device according to claim 3, wherein the overvoltage clamp circuit operates to reduce an output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value.
  5. The transformer unit is a step-up transformer unit that steps up a high-frequency voltage output from the inverter unit, and includes a PWM or PFM control unit that controls the inverter unit based on an output of the step-up transformer unit. The switching power supply according to claim 2.
  6. A rectifier for converting an AC voltage to a DC voltage,
    A boost converter for boosting the DC voltage output from the rectifier,
    An inverter unit for converting the DC output voltage Vo of the boost converter unit to a high-frequency voltage;
    A transformer unit connected to the output side of the inverter unit and supplying high-frequency power to the discharge electrode unit;
    Open loop control means for controlling the output voltage Vo of the boost converter section;
    A laser power supply device comprising:
  7. The open-loop control means includes: a duty setting circuit that determines an on / off ratio of a switching element provided in the boost converter; and an overvoltage clamp circuit that controls an output voltage Vo of the boost converter.
    7. The laser power supply device according to claim 6, wherein an output signal of the duty setting circuit is controlled by the overvoltage clamp circuit so as to limit the output voltage Vo to a predetermined value or less.
  8. The laser power supply device according to claim 7, wherein the overvoltage clamp circuit operates to reduce an output signal of the duty setting circuit when the output voltage Vo exceeds a predetermined value.
  9. The transformer section is a step-up transformer section that steps up a high-frequency voltage output from the inverter section,
    7. The laser power supply device according to claim 6, further comprising PWM or PFM control means for controlling said inverter unit based on an output of said step-up transformer unit.
  10. A functioning circuit that is provided on the output side of the transformer unit and performs a functioning process based on an output signal of a discharge current detection circuit that detects a discharge current; and an output signal of the duty setting circuit is an output of the functioning circuit. The laser power supply device according to claim 7, wherein the laser power supply device is determined based on:
  11. The laser power supply device according to claim 7, further comprising an inverter duty lower limit value setting circuit for the inverter unit.
  12. The laser power supply according to claim 10, further comprising a linearization circuit provided between the discharge current detection circuit and the duty setting circuit.
  13. 13. The laser power supply device according to claim 12, further comprising a line voltage fluctuation correction circuit that sends an output signal to the linearization circuit based on an output voltage of the rectifier.
  14. A laser device using the laser power supply device according to claim 6.
  15. A rectifier, a boost converter provided with a switching element for boosting a DC voltage output from the rectifier, an inverter for converting a DC output voltage Vo of the boost converter to a high-frequency voltage, and the inverter A control method for a laser power supply device, comprising: a boosting transformer connected to the output side of the power supply and supplying high-frequency power to a discharge electrode; and an open-loop controller for controlling an output voltage Vo of the boosting converter. And controlling the switching element even when the laser is not turned on and during the laser pulse base period.
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