JP2004043898A - Vapor deposition mask, and organic electroluminescence display device - Google Patents

Vapor deposition mask, and organic electroluminescence display device Download PDF

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Publication number
JP2004043898A
JP2004043898A JP2002203722A JP2002203722A JP2004043898A JP 2004043898 A JP2004043898 A JP 2004043898A JP 2002203722 A JP2002203722 A JP 2002203722A JP 2002203722 A JP2002203722 A JP 2002203722A JP 2004043898 A JP2004043898 A JP 2004043898A
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Japan
Prior art keywords
anode
mask
deposition mask
cathode
display device
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JP2002203722A
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Japanese (ja)
Inventor
Isamu Kawada
Tomomi Shimokawa
Kazuo Suzuki
Shigemi Suzuki
Junichi Takahashi
Tomoshi Takaoka
Munetoshi Yoshikawa
下川 知美
吉川 宗利
川田 勇
鈴木 一雄
鈴木 成己
高岡 智志
高橋 純一
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Canon Electronics Inc
キヤノン電子株式会社
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Priority to JP2002203722A priority Critical patent/JP2004043898A/en
Publication of JP2004043898A publication Critical patent/JP2004043898A/en
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Abstract

PROBLEM TO BE SOLVED: To provide a vapor deposition mask for consistently depositing electrodes of an organic EL display device having sectional shapes not to be raised from a surface to be vapor-deposited and preventing a vapor deposition film from going around with high accuracy, and the organic electroluminescence display device.
SOLUTION: The vapor deposition mask for depositing an anode and a cathode of an organic EL display device so as to be orthogonal to each other comprises a frame body 7 to demarcate a mask peripheral part, and a plurality of resin fiber parts 6 stretched between sides facing each other of the frame body 7 along one direction, and a surface in contact with surfaces to be vapor-deposited of the resin fiber parts 6 constitutes a flat portion.
COPYRIGHT: (C)2004,JPO

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は、蒸着法により有機エレクトロルミネセンス表示装置(以下、「有機EL表示装置」という。)の電極のパターン形成を行う蒸着用マスク、及びこれを用いて製造する有機EL表示装置に関する。 The present invention relates to an organic electroluminescent display device (hereinafter, "organic EL display device" hereinafter.) By evaporation deposition mask to form a pattern of electrodes, and an organic EL display device manufactured using the same.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
蒸着法によりパターン形成をおこなう場合には、複数の開孔を有する金属薄板製の蒸着用マスクが一般的に用いられている。 When performing pattern formation by an evaporation method, deposition mask metal thin plate having a plurality of apertures is generally used. 蒸着膜を成膜する際、蒸着源から飛散する粒子には方向性があるため、マスクの開孔部が小さくマスクの厚みが厚いと、飛散した粒子はマスクに遮蔽されるので蒸着され難い部分ができてしまい、蒸着膜にむらが生じてしまうことがある。 When forming the deposited film, since the particles scattered from the evaporation source is directional, the thick thickness of the opening is small mask in the mask, scattered particles less likely to be deposited because they are shielded by the mask portion will be able to, sometimes irregularity occurs in the deposited film.
【0003】 [0003]
また、金属製のマスクにおいては比重が大きいため、重力の影響でマスクが垂れ下がり、マスクの浮きにより膜厚むらができ、蒸着膜の幅も場所ごとに変わってしまう。 Further, in the metal mask for high specific gravity, mask sag under the influence of gravity, can thickness unevenness by floating of the mask, the width of the deposited film is also being changed for each location. 最悪の場合には、蒸着膜がマスクの浮き上がった部分に完全に回り込んで連続的に形成されてしまい、精度の良いパターン形成を行うことができなかった。 In the worst case, deposited film will be formed continuously goes around completely in the raised portion of the mask, it is impossible to perform an accurate pattern formation. そのため、マスクの断面形状に工夫を施したものが一般的に使用されている。 Therefore, those devised in the cross-sectional shape of the mask is generally used.
【0004】 [0004]
従来、蒸着用マスクの重力による歪みを減少するために、断面形状が丸い樹脂繊維マスクが用いられている。 Conventionally, in order to reduce the distortion due to gravity deposition mask, the cross-sectional shape are used round resin fiber mask. また、特開2000−182767号公報に開示されているように、断面が円状の繊維を用い、径の違う繊維を束ねて、断面形状の工夫により膜厚むらを防止する方法が提案されている。 Also, as disclosed in JP-A-2000-182767, cross reference to the circular fibers, by bundling fibers with different diameters, it is proposed a method of preventing the film thickness nonuniformity by devising the cross-sectional shape there.
【0005】 [0005]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
近年、表示装置の一つとして有機EL表示装置が提案され、実用化が進んでいる。 Recently, organic EL display devices have been proposed, practical use is progressing as one of the display device. この有機EL表示装置を構成する有機エレクトロルミネセンス素子(以下、「有機EL素子」という。)は、基板上に少なくとも陽極、有機物層、及び陰極を順次積層した構成を有しており、該積層体の陰極から電子を、陽極から正孔をそれぞれ注入し、印加した電場によって電子と正孔とが薄膜中を移動して、発光層としての有機物層内で再結合し、それにより生成した励起子の一部は熱失括し、一部は失括する際に発光する。 The organic electroluminescent element constituting the organic EL display device (hereinafter, referred to as. "Organic EL element") has at least an anode, an organic layer, and sequentially stacked constituting the cathode on the substrate, laminated electrons from the cathode body, a hole is injected respectively from the anode and an electron by an applied electric field and holes move in the thin film, recombine within the organic layer as a light emitting layer, produced by it excited some children with Netsushitsukuku, part emits light when Batch loss. すなわち、有機EL素子は、励起子が失括する際の光の放射現象を利用したものである。 That is, the organic EL device is one in which excitons using radiation phenomenon of light when Batch loss.
【0006】 [0006]
ところで、有機EL素子において、特に表示装置に用いる場合には、蒸着膜の膜厚の違いにより輝度差が生じ、ドット内での輝度差が生じることが分かった。 Incidentally, in the organic EL device, particularly when used in a display device, the luminance difference is generated, it was found that the luminance difference in the dot produced by the film thickness difference of the deposited film. これは、膜厚むらがあることにより、電子または正孔の注入効率が場所によって変化してしまうため、発光させた際の輝度ムラや非発光の原因となる。 This is because there is a thickness unevenness, since the injection efficiency of electrons or holes varies depending on the location, causing luminance unevenness and non-emission of when to emit light. したがって、特に膜厚分布に影響を与える蒸着用マスクの改良が必要である。 Therefore, there is a need particularly improvements in deposition mask affecting the film thickness distribution.
【0007】 [0007]
また、蒸着用マスクの浮き上がりに起因した蒸着膜の回り込みにより、電極線幅が場所ごとに変わるとドットの大きさがばらつき、ドットごとの輝度がばらついてしまう。 Further, the wraparound of the deposited film due to floating of the deposition mask, the electrode line width varies by location variation magnitude of the dot, resulting in variations in brightness for each dot. このことは、表示ディスプレイとして用いられる有機EL素子には致命的なことである。 This is the organic EL device used as the display displaying is fatal.
【0008】 [0008]
本発明は、上記の課題に鑑みて創案されたものであり、その目的は、被蒸着面から浮き上がることがなく、蒸着膜の回り込みがなく、有機EL表示装置の電極を精度良く、且つ、安定して形成することができる蒸着用マスク、およびこれを用いて製造する有機EL表示装置を提供することにある。 The present invention has been made in view of the above problems, and its object is without raised from the evaporation surface, no wraparound of the deposited film, accurately electrodes of the organic EL display device, and, stable it is to provide an organic EL display device manufactured using a deposition mask, and this can be to form.
【0009】 [0009]
【課題を解決するための手段】 In order to solve the problems]
上記の目的を達成すべく、本発明の蒸着用マスクは、基板上に、少なくとも陽極、発光材料を含有する有機物層、及び陰極を積層してなり、一方向に沿って複数列の陽極を配するとともに、該陽極と直交する方向に沿って複数行の陰極を配する有機EL表示装置の陽極および陰極を形成するために用いる蒸着用マスクにおいて、 To achieve the above object, the deposition mask of the present invention, on a substrate, at least an anode, an organic layer containing a light emitting material, and formed by laminating a cathode, a plurality of rows of anodes in one direction distribution as well as, in the deposition mask used to form the anode and cathode of the organic EL display device disposing a cathode multiline along a direction orthogonal to the anode,
マスク周辺部を区画する枠体と、該枠体の相対向する辺間に一方向に沿って並列に掛け亘たされた複数条の樹脂繊維部とを備えており、 A frame body defining the mask periphery, and a resin fibers of Wataru Tasa the plural rows over in parallel along one direction between the sides facing each of the frame body,
該樹脂繊維部の被蒸着面に接触する面が、平面部分を構成していることを特徴としている。 Surface contacting the deposition target surface of the resin fiber portion, is characterized in that it constitutes a flat portion.
【0010】 [0010]
上記蒸着用マスクにおいて、上記樹脂繊維部の断面形状は、上記被蒸着面に接触する平面部分の幅がこれに相対向する面部分の幅よりも大きく形成されていることが好ましい。 In the deposition mask, the cross-sectional shape of the resin fiber portion is preferably formed larger than the width of the surface portion where the width of the flat portion in contact with the deposition target surface opposed thereto.
【0011】 [0011]
また、上記樹脂繊維部の断面形状は、前記被蒸着面に接触する平面部分の幅が、前記被蒸着面と直交する厚み幅の最大値よりも大きく形成されていることが好ましい。 The cross-sectional shape of the resin fiber portion has a width of the flat portion in contact with the deposition target surface, which is preferably larger than the maximum value of the thickness width that is perpendicular to the deposition target surface.
【0012】 [0012]
さらに、上記樹脂繊維部の断面形状が、三角形、正方形、長方形、台形、多角形、あるいは半円形であることが好ましい。 Further, the sectional shape of the resin fiber section, triangular, square, rectangular, trapezoidal, is preferably polygonal, or semicircular.
【0013】 [0013]
そして、上記枠体と前記樹脂繊維部とが同種の樹脂材料により形成されていることが好ましい。 Then, it is preferable that the frame body and said resin fibers portion is formed of a resin material of the same kind.
【0014】 [0014]
加えて、上記樹脂繊維部に張力をもたせるべく、前記枠体が補強枠により補強されていることが好ましい。 In addition, in order to impart tension to the resin fiber portion, it is preferable that the frame is reinforced by the reinforcing frame.
【0015】 [0015]
一方、本発明の有機EL表示装置は、基板上に、少なくとも陽極、発光材料を含有する有機物層、及び陰極を積層してなり、一方向に沿って複数列の陽極が配されるとともに、該陽極と直交する方向に沿って複数行の陰極が配されてなる有機EL表示装置において、 On the other hand, the organic EL display device of the present invention, on a substrate, at least an anode, an organic layer containing a light emitting material, and formed by laminating a cathode, with the anode of the plurality of rows are arranged in one direction, the in the organic EL display device having disposed cathode multiple rows along a direction perpendicular to the anodes,
上記のいずれかの蒸着用マスクを使用して、基板上に互いに直交するように陽極および陰極をパターン形成したことを特徴としている。 Using one of the deposition mask described above, it is characterized in that the anode and the cathode was patterned so as to be perpendicular to each other on the substrate.
【0016】 [0016]
【発明の実施の形態】 DETAILED DESCRIPTION OF THE INVENTION
以下、本発明の実施の形態を図面に基づいて説明するが、本発明は本実施形態に限るものではない。 Will be described below with reference to embodiments of the present invention with reference to the drawings, the present invention is not limited to this embodiment.
【0017】 [0017]
本発明の蒸着用マスクは、基板上に、少なくとも陽極、発光材料を含有する有機物層、及び陰極を積層してなり、一方向に沿って複数列の陽極を配するとともに、該陽極と直交する方向に沿って複数行の陰極を配する有機EL表示装置の製造に用いられ、該有機EL表示装置の陽極および陰極を互いに直交するように形成するためのマスクである。 Deposition mask of the present invention, on a substrate, at least an anode, an organic layer containing a light emitting material, and formed by laminating a cathode, together with arranging the anode of a plurality of rows along one direction, perpendicular to the anode used in the manufacture of an organic EL display device disposing a cathode multiline along a direction, a mask for forming so as to be perpendicular to the anode and cathode of the organic EL display device to each other.
【0018】 [0018]
本実施形態の蒸着用マスクは、マスクの周辺部を区画する枠体と、該枠体の相対向する辺間に一方向に沿って並列に掛け亘たされる複数条の樹脂繊維部とを備えている。 Deposition mask of the present embodiment includes a frame member defining the perimeter of the mask, and a plural rows of the resin fiber portion which Tasa Wataru over in parallel along one direction between the sides facing each of the frame bodies It is provided. すなわち、樹脂繊維部は枠体の相対向する辺間にストライプ状に平行に掛け亘たして張られており、この樹脂繊維部の被蒸着面としての基板に接触する面が平面部分を構成している。 That is, the resin fiber section are strung plus Wataru hung parallel in a stripe shape between the sides facing each of the frame, constituting the face plane portion in contact with the substrate as the deposition target surface of the resin fiber portion doing. そして、樹脂繊維部の断面形状は、被蒸着面としての基板に接触する平面部分の幅が、これに相対向する面部分の幅よりも大きく形成されていることが好ましい。 The cross-sectional shape of the resin fiber portion has a width of the flat portion in contact with the substrate as the evaporation surface, which is preferably larger than the width of the opposing surface section thereto. また、この樹脂繊維部の断面形状は、被蒸着面に接触する平面部分の幅が、被蒸着面と直交する厚み幅の最大値よりも大きく形成されていることが好ましい。 The cross-sectional shape of the resin fiber portion has a width of the flat portion in contact with the evaporation surface, which is preferably larger than the maximum value of the thickness width perpendicular to the evaporation surface. かかる条件を満たす蒸着用マスクとしては、例えば、図4(a)に示すような樹脂繊維部の断面形状が台形のマスクが挙げられる。 Such conditions are satisfied evaporation mask, for example, resin fiber portion of the cross-sectional shape as shown in FIG. 4 (a) include a trapezoidal mask. その他には、図4(b)に示すような半円形、正方形、長方形、三角形のマスクや、あるいは多角形などの形状を有するマスクを用いることができる。 Additional it is used a mask having a semi-circular shape shown in FIG. 4 (b), square, rectangular, masks or triangular, or a shape such as a polygon.
【0019】 [0019]
このような樹脂繊維部の被蒸着面に接触する面が平面部分を構成するマスクを用いることにより、マスクが被蒸着面に密着し易いので、蒸着膜の回り込みを防ぐことができ、特にエッジ部の膜厚むらを防ぐことが可能である。 By contacting surface deposition target surface of such a resin fiber portion using a mask which constitutes the flat portion, because the mask is brought into close contact with the evaporation surface easily, it is possible to prevent the wraparound of the deposited film, particularly an edge portion it is possible to prevent the film thickness non-uniformity. すなわち、蒸着用マスクの断面形状を工夫することにより、被蒸着面に達する前にマスクの出っ張りに阻害されて蒸着されなかった蒸着粒子を被蒸着面としての基板に蒸着させることが可能となる。 That is, by devising the cross-sectional shape of the deposition mask, it is possible to deposit the vapor deposition particles which have not been deposited are inhibited ledge of the mask before reaching the deposition target surface of the substrate as the evaporation surface.
【0020】 [0020]
さらに、樹脂製のマスクは、金属で構成されているマスクよりも重量を軽くすることが可能であり、重力による弛みがより少なく、マスクを張った状態に保つことができる。 Further, the mask made of resin, it is possible to reduce the weight than the mask, which is made of metal, the slack due to gravity less, it can be kept taut mask. このことにより、蒸着用マスクの浮き上がりによる蒸着膜の回り込みを減少させることも可能となる。 Thus, it is possible to reduce the wraparound of the deposited film by lifting the deposition mask. その結果、所定寸法に合致した正確なパターン形成が可能となる。 As a result, it is possible to correct the pattern formed conforming to a predetermined size.
【0021】 [0021]
本発明の蒸着用マスクの作成方法としては、光硬化樹脂を用いたフォトリソグラフィ技術や射出成形法などの様々な方法が挙げられる。 As it creates a deposition mask of the present invention, the photolithography technique and various methods such as injection molding method using a photocurable resin. 以下、光硬化樹脂を用いたフォトリソグラフィ技術を例に挙げて説明するが、本発明は蒸着用マスクの形状が重要であって、作成方法や材料にはよらない。 Will now be described by way of photolithography using a photocurable resin as an example, the present invention is an important shape of the deposition mask, it does not depend on creating and materials.
【0022】 [0022]
光硬化樹脂、ここでは例としてポジフォトレジストで作成する蒸着用マスクについて、図1を用いて説明する。 Photocurable resin, wherein the deposition mask to create a positive photoresist as an example will be described with reference to FIG.
【0023】 [0023]
まず、図1(a)に示すように、基板1上に光硬化樹脂2をスピンコートなどの成膜技術を用いて成膜し、この光硬化樹脂2上に照射光を透過するような基板にパターン化した遮光マスク3を載せて感光させる。 First, as shown in FIG. 1 (a), a substrate such as a photocurable resin 2 formed using a deposition technique such as spin coating on the substrate 1, it transmits illumination light on the photocurable resin 2 is photosensitive put the light-shielding mask 3 was patterned.
【0024】 [0024]
すると、図1(b)に示すように、光照射したところは硬化して光硬化部4となり、光の当たっていないところは非硬化部5となる。 Then, as shown in FIG. 1 (b), cured to photocuring unit 4 becomes the place where light irradiation, where no light struck becomes non-hardened portion 5.
【0025】 [0025]
その後、図1(c)に示すように、遮光マスク3を剥し、非硬化部5をエッチング液で溶かすと、基板1上には硬化樹脂としての光硬化部4が残る。 Thereafter, as shown in FIG. 1 (c), a light-shielding mask 3 peeling, when melting the uncured portion 5 in the etching solution, the light-curing unit 4 as a curing resin remains on the substrate 1.
【0026】 [0026]
そして、図1(d)に示すように、基板1と光硬化部4との接着部を剥すか、もしくは基板1をエッチング液で溶かすことにより、蒸着用マスク(光硬化部)4の作成を終了する。 Then, as shown in FIG. 1 (d), or peeled off bonding portion between the substrate 1 and the light-curing unit 4, or by dissolving the substrate 1 in an etching solution, the creation of the deposition mask (photocured sections) 4 finish.
【0027】 [0027]
このとき樹脂繊維部(以下、「マスクライン」という。)のみを作成するのではなく、図2(a)、(b)に示すように、マスクライン6のピッチや形状を保持する枠7も同時に作成すると良い。 In this case resin fiber unit (hereinafter, referred to as "mask line".) Rather than creating only, FIG. 2 (a), the (b), the frame 7 for holding the pitch and shape of the mask line 6 also it may be created at the same time. なぜならば、マスクライン6を固定する枠7を別に作成するとしたならば、マスクライン6のピッチを一本ずつ合わせて正確に枠7の相対向する辺間に掛け亘さなければならないからである。 This is because, if set to create a frame 7 for fixing the mask lines 6 separately, because there must Is Wataru suspended between the sides facing each exactly the frame 7 together pitch of the mask line 6 one by one . 枠7をマスクライン6の作成と同時作成しておけば、基板1から剥がした時点で、既に枠7とマスクライン6が一体化しており、所定のピッチに固定できているからである。 If the frame 7 by creating creation and simultaneous mask line 6, at the time of peeling off from the substrate 1, already integrated frame 7 and the mask line 6, it is because it can be fixed to a predetermined pitch. このことは、他の作成方法にも言えることである。 This is also true for other how to create. また、テーパー形成も光の集光具合を変えることにより容易に形成可能である。 Further, a taper form is also easily formed by changing the condensing of the light condition. 射出成型などにおいては、型の設計をしっかりと行うことにより、テーパーをつけた精度の良いマスクを作成可能である。 In such injection molding, by performing firmly the type of design, it is possible to create an accurate mask tapered. 枠7をマスクライン6と同時作成する観点から、これら枠体7とマスクライン(樹脂繊維部)6とを同種の樹脂材料により形成することが好ましい。 The frame 7 from the viewpoint of creating simultaneous and mask line 6, it is preferable that the these frame 7 and the mask lines (resin fiber unit) 6 is formed of a resin material of the same kind.
【0028】 [0028]
このようにして作成した樹脂繊維マスクをある程度の強度で引っ張りながら、図3(a)、(b)に示すように、金属乃至何らかの剛性のある補強枠8に貼り付けることによってマスクライン6に張力を与えることができ、重力による撓みがなく、精度の良い蒸着用マスクが作成可能となる。 While pulling Thus the resin fibers mask created at a certain intensity, as shown in FIG. 3 (a), (b), the tension in the mask line 6 by attaching the metal to the reinforcement frame 8 with some rigidity can give, there is no deflection due to gravity, good deposition mask is made possible to create accurate.
【0029】 [0029]
次に、蒸着用マスクの構成材料となる樹脂繊維について説明する。 Next, a description will be given resin fibers as the constituent material of the deposition mask.
【0030】 [0030]
蒸着用マスクの作成に用いる材料としては、ナイロン系、ポリエステル系、ポリエチレン系、ポリプロピレン系、ポリスチレン系、ウレタン系、エポキシ系、フェノール系、メラミン系、ユリア系、シリコン系、ポリイミド系、アクリル系、ビニル系、アリル系ABS樹脂、またはこれらのハロゲン化物など、様々な合成繊維や天然繊維が利用可能であり、単繊維または複繊維とすることができる。 As a material used for the creation of the deposition mask, nylon, polyester, polyethylene, polypropylene, polystyrene, urethane, epoxy, phenolic, melamine, urea-based, silicon-based, polyimide, acrylic, vinyl, allyl-based ABS resin or their halides, a variety of synthetic fibers and natural fibers are available, it can be a single fiber or multiple fibers.
【0031】 [0031]
しかし、蒸着する際の温度上昇による熱膨張や分解、軟化などの制限がある。 However, thermal expansion or decomposition due to a temperature rise at the time of deposition, there are limitations such as softening. 温度上昇を抑えることができれば、どのような高分子でも可能である。 If it is possible to suppress the temperature rise, it is possible in any polymer. 温度上昇を抑える方法として、例えば、マスクを冷やしながら蒸着を行うなどの方法があり、他には、蒸着源の輻射熱を遮断するため、輻射熱を通さない板にスリットを付けたものを蒸着源とマスクとの間に介在させ、そのスリットから蒸着粒子が出てくるようにした方法も考えられる。 As a method of suppressing the temperature rise, for example, there are methods such as vapor deposition is performed while cooling the mask, the other, in order to block the radiant heat of the deposition source, the deposition source those with a slit in a plate impervious to radiation heat is interposed between the mask and is also conceivable that the come out vapor deposition particles from the slit. すなわち、基本的にはどのような高分子でも利用可能であることが分かる。 That is, it can be seen basically available in any polymer.
【0032】 [0032]
また、マスクの作成時には、マスクの弛みを最小限に抑える必要があるので、図3(a)に示した補強板8に貼り付ける際、ある程度マスクに張力を与える方が有利である。 Further, when creating a mask, it is necessary to minimize the slack of the mask, when paste to the reinforcing plate 8 shown in FIG. 3 (a), it is advantageous to apply tension to some extent mask. ただし、しっかりした強度のマスクが作成されていれば、例えば膜厚が十分厚いマスクであれば、補強枠8を貼り付ける必要はない。 However, if it is created firm strength mask of, for example, if the film thickness is sufficiently thick mask, there is no need to paste the reinforcing frame 8.
【0033】 [0033]
マスクを冷やしたり、輻射熱を気にしたりすることを必要としない方がプロセスやコスト的に有利である。 Or cool the mask, it is a process and cost-effective If you do not need to be or to worry about the radiant heat. また、蒸着用マスクは一度だけの使い捨てよりは、むしろ洗浄してマスクについた膜を取り除いて、再使用できる方がコスト的には有利であるので、ここでは特に、引っ張り強度140kg/cm や熱耐久性(熱変形も含む)70℃以上、耐薬品性などを考慮した、エポキシ系、シリコン系、アリル系、ポリエステル系、フェノール系、ポリカーボーネート系、ポリアセタール系、ナイロン(ポリアミド)系、フッ素系、ポリプロピレン系、ポリイミド系、ユリア系、メラミン系を選んでいる(プラスチックデータハンドブック 株式会社工業調査会 p6−p11のデータ参照)。 Further, from the disposable only deposition mask once, remove the film attached to the mask by washing rather, the person who can re-use is advantageous in cost, here in particular, Ya tensile strength 140 kg / cm 2 endurance (thermal deformation including) 70 ° C. or higher, considering chemical resistance, epoxy, silicon, allylic, polyester, phenolic, polycarbonate chromatography titanate-based, polyacetal, nylon (polyamide) series, fluorine-based, polypropylene-based, polyimide-based, urea-based, they are choosing the melamine-based (see data of plastic data Handbook Co., Ltd. industry Committee p6-p11).
【0034】 [0034]
これ以外の高分子によりマスクを作成することは可能であるし、蒸着することもできるが、その中でも性能が良いと思われるものを選択したものである。 It is possible to create other masked by polymers, can also be deposited is obtained by selecting those performance among them it seems to be.
【0035】 [0035]
次に、本発明の蒸着用マスクを用いて、モノカラーでパッシブ駆動の有機ELパネルの製造について説明するが、これ以外にも本発明の蒸着用マスクを利用することは可能である。 Next, using the deposition mask of the present invention will be described for manufacturing the organic EL panel of a passive drive in monochrome, it is possible also to utilize the deposition mask of the present invention in addition to this.
【0036】 [0036]
図5は、本実施形態における有機ELパネルの断面構造を示しており、透明基板からなる基板9上には、陽極10、発光材料を含有する有機物層11、及び陰極12が順次積層されている。 Figure 5 shows the cross-sectional structure of an organic EL panel in the present embodiment, on a substrate 9 made of a transparent substrate, an anode 10, organic layer 11 containing a light emitting material, and a cathode 12 are sequentially stacked . すなわち、図6に示すように、ガラス基板9上に複数の陽極(第1電極)10をストライプ状にパターニングし、発光層となる有機物層11を全面蒸着し、最後に本発明の蒸着用マスクを用いて、陽極10に直交するように陰極12(第2電極)を順次蒸着し、陽極10、有機層11、及び陰極12の積層構造を構成している。 That is, as shown in FIG. 6, a plurality of anodes (first electrode) 10 on the glass substrate 9 is patterned in stripes, the organic layer 11 as a light-emitting layer was entirely deposited, deposition mask finally present invention using sequentially depositing a cathode 12 (second electrode) to be perpendicular to the anode 10, the anode 10 constitute the organic layer 11, and the laminated structure of the cathode 12. このとき、陽極10及び陰極12の各々が互いに対向して直交する交差部を1画素として、各層がマトリクス状に形成、配列されている。 In this case, the intersection of each of the anode 10 and cathode 12 are perpendicular to face each other as one pixel, each layer formed in a matrix, are arranged. また、解り易いように、有機EL表示装置を作成する際における陽極10及び有機物層11を積層した基板9と蒸着用マスク13と陰極蒸着源との位置関係を図7に示している。 Also, easy way to understand, is shown in Figure 7 the positional relationship between the substrate 9 and the deposition mask 13 and the cathode evaporation source formed by laminating an anode 10 and organic layer 11 at the time of creating an organic EL display device.
【0037】 [0037]
さらに、陽極10、発光材料を含有する有機物層11、及び陰極12について説明する。 Further, the anode 10, organic layer 11 containing a light emitting material, and the cathode 12 will be described.
【0038】 [0038]
陽極としては、発光層となる有機物層11からの光を取り出すために透明であることが必要であり、仕事関数の大きい金属、合金、電気伝導性化合物、またはこれらの混合物を電極物質とするものが好ましく、具体的には金、ITO、CuI、酸化錫、酸化インジウム、亜鉛酸化物、クロム、アルミニウム、銀などが使用される。 As an anode, it is necessary to be transparent in order to extract light from the organic material layer 11 serving as a light-emitting layer, which metal having a large work function, an alloy, an electrically conductive compound, or mixtures thereof with electrode material preferably, gold specifically, ITO, CuI, tin oxide, indium oxide, zinc oxide, chromium, aluminum, silver, etc. is used. この陽極は蒸着法やスパッタリング法により成膜することができる。 The anode can be formed by vapor deposition or sputtering.
【0039】 [0039]
また、有機物層11は、例えば、正孔輸送層と有機発光層との2層構造からなるが、本構成に限定されるものではなく、発光層1層のみの構成や正孔注入層、電子輸送層、電子注入層等をさらに形成して多層構造としても良い。 Further, the organic material layer 11 is, for example, a two-layer structure of a hole transport layer and the organic light emitting layer is not limited to this structure, the light emitting layer only one layer of the structure and the hole injection layer, an electron transport layer, may have a multilayer structure to further form an electron injection layer.
【0040】 [0040]
正孔輸送層を形成する材料としては特に限定されず、従来から正孔輸送材料として使用されている化合物、もしくは新規化合物などが使用可能である。 Is not particularly limited as material for forming the hole transport layer, compounds are used as hole transport material conventionally or novel compounds and the like are usable. 例えば、α−NPD{N,N'−ジ(α−ナフチル)−N,N'−ジフェニル−1,1'−ビフェニル−4,4'−ジアミン}、MTDATA{4−4'−4”−トリス(N−(3−メチルフェニル)−N−フェニルアミノ)トリフェニルアミン}、TPD{N、N'−ジフェニル−N、N'−ビス(3−フェニル)−1,1'−ビフェニル−ビフェニル−4,4'−ジアミン}などが挙げられる。 For example, α-NPD {N, N'- di (alpha-naphthyl) -N, N'-diphenyl-1,1'-biphenyl-4,4'-diamine}, MTDATA {4-4'-4 "- tris (N- (3- methylphenyl) -N- phenylamino) triphenylamine}, TPD {N, N'- diphenyl -N, N'-bis (3-phenyl) -1,1'-biphenyl - biphenyl -4,4'-diamine}, and the like.
【0041】 [0041]
有機発光層には、アントラセンやピレン、トリス(8−キノリノラト)アルミニウム錯体及びその誘導体、キノリノール、キノリン誘導体、ビススチルアントラセン誘導体、クマリン誘導体、ペリノン誘導体、テトラフェニルブタジエン誘導体、オキサジアゾール誘導体、フタルイミド誘導体、アルダジン誘導体、ピラジリン誘導体、シクロペンタジエン誘導体、ピロロピリジン誘導体、スチリルアミン誘導体、アルダジン誘導体、ナフタルイミド誘導体、ジスチルベンゼン誘導体、チアジアゾロピリジン誘導体などがある。 The organic light-emitting layer, anthracene and pyrene, tris (8-quinolinolato) aluminum complex and its derivatives, quinolinol, quinoline derivatives, bis still anthracene derivatives, coumarin derivatives, perinone derivatives, tetraphenyl butadiene derivatives, oxadiazole derivatives, phthalimide derivatives , aldazine derivatives, Pirajirin derivatives, cyclopentadiene derivatives, pyrrolopyridine derivatives, styrylamine derivatives, aldazine derivatives, naphthalimide derivatives, distyrylbenzene derivatives, and the like thiadiazopyridine derivatives. また、ポリマー系では、ポリフェニレンビニレン誘導体、ポリパラフェニレン誘導体、ポリチオフェン誘導体などを使用することができる。 Further, the polymer system can be used polyphenylene vinylene derivatives, polyparaphenylene derivatives, and polythiophene derivatives.
【0042】 [0042]
さらに、発光効率を向上させたり、発光寿命を延ばす目的で、有機発光層中に微量の不純物を意図的に混入させてもよい。 Additionally, or improve the luminous efficiency, in order to extend the emission lifetime may be intentionally mixed a small amount of impurities in the organic light-emitting layer. 具体的には、ルブレン、キナクリドン誘導体、フェノキサゾン660、ジシアノメチレンスチルピラン誘導体、ペリノン、ペリレン、クマリン誘導体、ジメチルアミノピラジンカルボニトリル誘導体、Nile Red、ローダミン誘導体などから選択される。 Specifically, rubrene, quinacridone derivatives, phenoxazone 660, dicyanomethylene still pyran derivatives, perinone, perylene, coumarin derivatives, dimethylamino pyrazinecarbonitrile derivatives,, Nile Red, is selected from rhodamine derivatives.
【0043】 [0043]
上記有機物層11の形成は、主に真空蒸着法によって行われるが、電子ビーム蒸着、スパッタリング法、分子積層法、溶媒からのコーティングも可能である。 Formation of the organic layer 11 is carried out mainly by vacuum deposition, electron beam evaporation, sputtering, molecular lamination method, a coating can also be from the solvent.
【0044】 [0044]
陰極12としては、効率よく電子を発光層に伝達させるため、仕事関数の低い金属が好ましく、具体的にはアルミニウム、錫、インジウム、鉛、マグネシウム、銀、銅、モリブデン、ニッケル、タングステン、希土類単体、アルカリ金属、またはこれら金属の合金が使用される。 As the cathode 12, in order to transmit efficiently electrons into the light emitting layer, a low metals are preferred work function, specifically aluminum, tin, indium, lead, magnesium, silver, copper, molybdenum, nickel, tungsten, rare earth alone , an alkali metal or an alloy of these metals, is used. また、陰極12は蒸着法やスパッタリング法により成膜される。 The cathode 12 is formed by vapor deposition or sputtering. このとき、膜厚がドット内で均一で、且つ、ドットの面積を一定に保つためには、本発明による蒸着用マスクが有効である。 At this time, a uniform film thickness in the dot, and, in order to keep the area of ​​the dot constant, the deposition mask according to the present invention is effective.
【0045】 [0045]
【発明の効果】 【Effect of the invention】
以上説明したように、本発明によれば、蒸着用マスクが被蒸着面から浮き上がることのない形状を有しており、蒸着膜の回り込みがないので電極間のショートがなく、ピッチ精度の良い電極パターンの形成が可能となる。 As described above, according to the present invention, deposition mask has a shape not to float from the evaporation surface, no short circuit between the electrodes because there is no wraparound of the deposited film, good electrode pitch accuracy the formation of the pattern becomes possible. したがって、有機EL表示装置の電極を精度良く、且つ、安定して形成することができるものである。 Therefore, the electrode of the organic EL display device accurately, and, those that can be formed stably.
【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS
【図1】本発明の蒸着用マスクの作成方法を示しており、(a)から(d)は作成手順の説明図である。 [1] shows how to create a deposition mask of the present invention, from (a) (d) are explanatory views of a creation procedure.
【図2】本発明の蒸着用マスクの完成品を示す図である。 2 is a diagram showing the finished product of the deposition mask of the present invention. (a)は完成品の平面図である。 (A) is a plan view of the finished product. (b)は(a)のA−B断面図である。 (B) is a A-B cross-sectional view of (a).
【図3】本発明の蒸着マスクを補強するための補強枠を示す図である。 3 is a diagram showing a reinforcing frame for reinforcing the deposition mask of the present invention. (a)は補強枠の平面図である。 (A) is a plan view of a reinforcing frame. (b)は補強枠に樹脂マスクを貼り付けた状態の断面図である。 (B) is a cross sectional view showing a state in which paste resin mask the reinforcing frame.
【図4】本発明の蒸着用マスクの断面形状を示す説明図である。 4 is an explanatory diagram showing a cross-sectional shape of the deposition mask of the present invention. (a)は断面台形の場合の蒸着用マスクである。 (A) is a deposition mask in the case of trapezoidal cross-section. (b)はその他の断面の例を示す図である。 (B) is a diagram showing an example of other cross-section.
【図5】本発明の有機EL表示装置における層構成の一例を示す断面図である。 Is a cross-sectional view showing an example of the layer structure of the organic EL display device of the present invention; FIG.
【図6】本発明の有機EL表示装置における陽極のパターン形状を示す模式図である。 6 is a schematic view showing a pattern shape of the anode in the organic EL display device of the present invention.
【図7】本発明の有機EL表示装置を作成する際の基板と蒸着用マスクと陰極蒸着源との位置関係を示す模式図である。 7 is a schematic diagram showing the positional relationship between the substrate for creating an organic EL display device and the deposition mask and the cathode evaporation source of the present invention.
【符号の説明】 DESCRIPTION OF SYMBOLS
1 基板2 光硬化樹脂3 遮光マスク4 光硬化部5 非硬化部6 マスクライン7 枠8 補強枠9 基板(透明基板) 1 substrate 2 photocurable resin 3 shielding mask 4 photocured sections 5 uncured portion 6 mask line 7 frame 8 reinforcing frame 9 substrate (transparent substrate)
10 陽極11 有機物層12 陰極13 蒸着用マスク 10 anode 11 organic layer 12 cathode 13 deposition mask

Claims (7)

  1. 基板上に、少なくとも陽極、発光材料を含有する有機物層、及び陰極を積層してなり、一方向に沿って複数列の陽極を配するとともに、該陽極と直交する方向に沿って複数行の陰極を配する有機エレクトロルミネセンス表示装置の陽極および陰極を形成するために用いる蒸着用マスクにおいて、 On a substrate, at least an anode, an organic layer containing a light emitting material, and formed by laminating a cathode, together with arranging the anode of a plurality of rows along one direction, the cathode of the plurality of rows along a direction perpendicular to the anode in the deposition mask used to form the anode and cathode of the organic electroluminescent display device disposing a,
    マスク周辺部を区画する枠体と、該枠体の相対向する辺間に一方向に沿って並列に掛け亘たされた複数条の樹脂繊維部とを備えており、 A frame body defining the mask periphery, and a resin fibers of Wataru Tasa the plural rows over in parallel along one direction between the sides facing each of the frame body,
    該樹脂繊維部の被蒸着面に接触する面が、平面部分を構成していることを特徴とする蒸着用マスク。 Deposition mask surface that contact with the deposition surface of the resin fiber portion, characterized in that it constitutes a flat portion.
  2. 前記樹脂繊維部の断面形状は、前記被蒸着面に接触する平面部分の幅がこれに相対向する面部分の幅よりも大きく形成されていることを特徴とする請求項1に記載の蒸着用マスク。 Cross-sectional shape of the resin fiber unit, for deposition according to claim 1, characterized in that it is larger than the width of the face portion where the width of the flat portion in contact with the evaporation surface opposed thereto mask.
  3. 前記樹脂繊維部の断面形状は、前記被蒸着面に接触する平面部分の幅が、前記被蒸着面と直交する厚み幅の最大値よりも大きく形成されていることを特徴とする請求項1または2に記載の蒸着用マスク。 Cross-sectional shape of the resin fiber portion, said width of the flat portion in contact with the evaporation surface, the claim 1 or, characterized in that it is formed larger than the maximum value of the thickness width perpendicular to the evaporation surface deposition mask according to 2.
  4. 前記樹脂繊維部の断面形状が、三角形、正方形、長方形、台形、多角形、あるいは半円形であることを特徴とする請求項1から3のいずれかに記載の蒸着用マスク。 The cross-sectional shape of the resin fiber section, triangular, square, rectangular, trapezoidal, polygonal or deposition mask according to any one of claims 1 to 3, characterized in that the semi-circular.
  5. 前記枠体と前記樹脂繊維部とが同種の樹脂材料により形成されていることを特徴とする請求項1から4のいずれかに記載の蒸着用マスク。 Deposition mask according to any one of claims 1 to 4, characterized in that said frame body and said resin fiber portion is formed of a resin material of the same kind.
  6. 前記樹脂繊維部に張力をもたせるべく、前記枠体が補強枠により補強されていることを特徴とする請求項1から5のいずれかに記載の蒸着用マスク。 The so imparted to the resin fiber unit tension, vapor deposition mask according to any one of claims 1 to 5, wherein said frame is characterized in that it is reinforced by the reinforcing frame.
  7. 基板上に、少なくとも陽極、発光材料を含有する有機物層、及び陰極を積層してなり、一方向に沿って複数列の陽極が配されるとともに、該陽極と直交する方向に沿って複数行の陰極が配されてなる有機エレクトロルミネセンス表示装置において、 On a substrate, at least an anode, an organic layer containing a light emitting material, and formed by laminating a cathode, with the anode of the plurality of rows are arranged along one direction, a plurality of rows along a direction perpendicular to the anode in the organic electroluminescent display device in which the cathode is disposed,
    請求項1から6のいずれかの蒸着用マスクを使用して、基板上に互いに直交するように陽極および陰極をパターン形成したことを特徴とする有機エレクトロルミネセンス表示装置。 Using one of the deposition mask of claims 1 to 6, the organic electroluminescent display device, characterized in that the anode and the cathode was patterned so as to be perpendicular to each other on the substrate.
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