JP2003507882A5 - - Google Patents

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Publication number
JP2003507882A5
JP2003507882A5 JP2001517181A JP2001517181A JP2003507882A5 JP 2003507882 A5 JP2003507882 A5 JP 2003507882A5 JP 2001517181 A JP2001517181 A JP 2001517181A JP 2001517181 A JP2001517181 A JP 2001517181A JP 2003507882 A5 JP2003507882 A5 JP 2003507882A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2001517181A
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JP2003507882A (ja
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Priority claimed from US09/376,759 external-priority patent/US6468098B1/en
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Publication of JP2003507882A publication Critical patent/JP2003507882A/ja
Publication of JP2003507882A5 publication Critical patent/JP2003507882A5/ja
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JP2001517181A 1999-08-17 2000-08-10 電気接触器、特に流体圧力を用いるウェーハレベルの接触器 Pending JP2003507882A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/376,759 US6468098B1 (en) 1999-08-17 1999-08-17 Electrical contactor especially wafer level contactor using fluid pressure
US09/376,759 1999-08-17
PCT/US2000/022146 WO2001013130A1 (en) 1999-08-17 2000-08-10 Electrical contactor, especially wafer level contactor, using fluid pressure

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010251634A Division JP2011091412A (ja) 1999-08-17 2010-11-10 電気接触器、特に流体圧力を用いるウェーハレベルの接触器

Publications (2)

Publication Number Publication Date
JP2003507882A JP2003507882A (ja) 2003-02-25
JP2003507882A5 true JP2003507882A5 (ja) 2007-11-15

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001517181A Pending JP2003507882A (ja) 1999-08-17 2000-08-10 電気接触器、特に流体圧力を用いるウェーハレベルの接触器
JP2010251634A Pending JP2011091412A (ja) 1999-08-17 2010-11-10 電気接触器、特に流体圧力を用いるウェーハレベルの接触器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010251634A Pending JP2011091412A (ja) 1999-08-17 2010-11-10 電気接触器、特に流体圧力を用いるウェーハレベルの接触器

Country Status (8)

Country Link
US (5) US6468098B1 (ja)
EP (2) EP1418436A3 (ja)
JP (2) JP2003507882A (ja)
KR (3) KR100915927B1 (ja)
AU (1) AU6903300A (ja)
DE (1) DE60007999T2 (ja)
TW (1) TW460918B (ja)
WO (1) WO2001013130A1 (ja)

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