JP2003329830A - Optical multilayered film filter, method for manufacturing the same and optical amplifier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical multilayered film filter which responds to spectral transmittance characteristics required for various purposes and can be manufactured in a short delivery period. <P>SOLUTION: The optical multilayered film filter 20 is produced by forming a basic multilayered film 22 having basic spectral transmittance characteristics which are identical characteristics for different requirements and a controlling multilayered film 23 deposited on a face different from the basic multilayered film 22 and compensating the basic spectral transmittance characteristics to obtain desired spectral transmittance characteristics suitable for each requirement. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical multi-layer film filter, a method for manufacturing the same, and an optical amplifier including the optical multi-layer film filter.

[0002]

2. Description of the Related Art In recent years, the spread and utilization of Internet communication and the like have advanced, and the communication volume of communication lines has been rapidly increasing. Therefore, optical communication using an optical fiber capable of handling a large amount of communication is becoming mainstream, and further, wavelength division multiplexing communication technology WDM and the like are also used. In an optical communication system using such an optical fiber, a high-refractive index material layer and a low-refractive index material are used to cut light of a predetermined wavelength, select a wavelength, or adjust a gain corresponding to a wavelength. An optical multilayer film filter made by alternately laminating layers is often used.

One of such optical multilayer filters is
Gain flattening filter GFF (GainFlattening Filte)
There is r). Optical amplifiers that amplify optical signals are used at predetermined intervals in optical communication systems. Since the amplification characteristics of this optical amplifier have wavelength dependence, the wavelength dependence is flattened when the optical amplifier is used. Is desired. As a means thereof, a GFF (that is, an optical multilayer film filter) made of a transparent substrate (for example, a glass substrate) on which an optical multilayer film having a spectral transmittance characteristic opposite to the amplification characteristic of an optical amplifier is formed is used. It is known to flatten the spectral transmittance characteristic of an optical amplifier. Note that there are GFFs formed by using fiber grading in addition to those formed by using an optical multilayer film as described above, but GFFs formed by using an optical multilayer film are superior in mass productivity. ing.

[0004]

However, the amplification characteristics of the optical amplifier differ from device to device, and the spectral transmittance characteristics required for the GFF are diverse, so that the GFF corresponding to the required spectral transmittance characteristics can be obtained. Since it has to be manufactured individually, it takes a lot of time to manufacture the GFF. When a GFF is constructed using an optical multilayer film, an optical multilayer film having a film thickness of several tens of μm formed by stacking several tens to 100 layers or more in order to flatten the wavelength dependence of the amplification characteristic of an optical amplifier. Needed. When manufacturing a GFF having such an optical multilayer film, the film forming speed of a thin film manufacturing apparatus is generally several Å.
Since it is / s to tens of Å / s, there is a problem that the manufacturing time becomes extremely long (for example, several hours to several tens hours).

The present invention has been made in view of the above problems, and an object of the present invention is to provide an optical multilayer film filter which can be manufactured in a shorter delivery time in response to a wide variety of required spectral transmittance characteristics. And Another object of the present invention is to provide a method for manufacturing such an optical multilayer filter.

[0006]

In order to achieve such an object, the optical multilayer filter of the invention according to claim 1 has a basic multilayer film having a basic spectral transmittance characteristic which is the same characteristic for different demands. And an adjustment multilayer film formed on a surface different from that of the basic multilayer film to correct the basic spectral transmittance characteristics and set the desired spectral transmittance characteristics suitable for each request. It is a filter.

The optical multilayer filter of the invention according to a second aspect is the optical multilayer filter according to the first aspect, wherein different demands are different desired spectral transmittance characteristics, respectively. It is characterized in that the basic spectral transmittance characteristic of the basic multilayer film is set corresponding to the characteristic having the largest spectral transmittance among the rate characteristics.

The optical multilayer filter of the invention according to claim 3 has a basic multilayer film having a basic spectral transmittance characteristic which is the same characteristic even for different requests, and a basic spectral transmittance characteristic corrected to satisfy each request. The optical multi-layer film filter is composed of an adjustment multi-layer film formed on the upper surface of the basic multi-layer film in order to set a desired spectral transmittance characteristic suitable for each.

An optical multilayer filter according to a fourth aspect of the present invention is the optical multilayer filter according to the third aspect, in which different requirements are different desired spectral transmittance characteristics, and the desired spectral transmittances of the plurality of desired spectral transmittances are different. It is characterized in that the basic spectral transmittance characteristic of the basic multilayer film is set corresponding to a characteristic having an intermediate spectral transmittance among the characteristics.

An optical multilayer filter according to a fifth aspect of the present invention comprises a first transparent substrate having a basic multilayer film having a basic spectral transmittance characteristic formed on one surface thereof, and a second transparent substrate. An optical multilayer filter including a second filter having an adjustment multilayer film formed on one surface to correct the basic spectral transmittance characteristic and set a desired spectral transmittance characteristic suitable for each request. Has become.

In the method for manufacturing an optical multilayer film filter according to the sixth aspect of the present invention, a basic multilayer film having basic spectral transmittance characteristics which are the same characteristics for different requirements is formed, and the basic spectral transmittance characteristics are corrected. Then, the adjusted spectral transmittance characteristic required to obtain the desired spectral transmittance characteristic suitable for each request is obtained, and the basic multilayer film is formed as the adjusted multilayer film having the adjusted spectral transmittance characteristic. It is characterized in that it is manufactured by forming it on a surface different from the surface on which it is formed.

According to a seventh aspect of the present invention, there is provided a method of manufacturing an optical multilayer filter according to the sixth aspect, wherein different requirements are different desired spectral transmittance characteristics. The basic spectral transmittance characteristic of the basic multilayer film is set corresponding to the characteristic having the largest spectral transmittance among the plurality of desired spectral transmittance characteristics. The surface on which the basic multilayer film is formed according to the adjusted spectral transmittance characteristics, and the adjusted spectral transmittance characteristics required to set the desired spectral transmittance characteristics by correcting the basic spectral transmittance characteristics according to the characteristics. It is characterized in that an adjustment multilayer film is formed on a surface different from that.

In the method for manufacturing an optical multilayer filter according to the eighth aspect of the present invention, the basic multilayer film having the basic spectral transmittance characteristic which is the same characteristic for different requirements is formed, and the basic spectral transmittance characteristic is corrected. The adjustment multilayer film is formed on the upper surface of the basic multilayer film so as to obtain a desired spectral transmittance characteristic suitable for each request, and is manufactured.

According to a ninth aspect of the present invention, there is provided a method of manufacturing an optical multilayer filter according to the eighth aspect, wherein different demands are different desired spectral transmittance characteristics. The basic spectral transmittance characteristic of the basic multilayer film is set corresponding to the characteristic having an intermediate spectral transmittance among the plurality of desired spectral transmittance characteristics. It is characterized in that the adjustment multilayer film is formed on the upper surface of the basic multilayer film so that the desired spectral transmittance characteristic is obtained by correcting the basic spectral transmittance characteristic according to the rate characteristic.

An optical amplifier according to a tenth aspect of the present invention is an optical amplifier section for amplifying light, and the light amplified by the optical amplifier section is incident on the optical amplifier section. And an optical multilayer filter.

An optical amplifier according to an eleventh aspect of the present invention is the optical amplifier according to the tenth aspect, wherein the optical amplifying section is formed by doping an amplifying medium in a core section or a waveguide of an optical fiber through which light propagates. It is characterized by comprising an optical amplifying means, and amplifying the light by radiating light having a wavelength excited by the amplification medium to the optical amplifying means.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 2 shows a schematic configuration of an optical amplifier configured using an optical filter module including the optical multilayer film filter according to the present invention. The optical amplifier 5 is provided in the middle of a communication line using an optical fiber and is for amplifying an optical signal transmitted through the optical fiber. The optical amplifier 5 is connected to the optical signal transmitting optical fiber 1a. The optical filter module 10 includes a section 2 and an optical filter module 10 connected to the optical amplification section 2 via a connecting optical fiber 1b. The optical signal transmitting optical fiber 1c is connected to the optical filter module 10.

The optical amplification section 2 is provided with a fiber amplifier section 3 to which a rare earth element such as erbium (Er) is added, and pumping light is supplied into the fiber amplifier section 3 by a wavelength division multiplexer (not shown) or the like. By exciting the rare earth element, an inversion distribution is formed with respect to the energy levels of the outer shell electrons of the rare earth element, and the signal light incident from the optical fiber 1a for optical signal transmission to the fiber amplifier section 3 is amplified. Instead of configuring the optical amplifying section 2 by an optical fiber type amplifier, an amplifying optical waveguide is formed on a glass substrate to which a rare earth element such as erbium is added, and the optical waveguide for amplifying is formed by a wavelength division multiplexer or the like. The pumping light may be supplied to the optical fiber, the signal light from the optical signal transmitting optical fiber 1a may be passed therethrough, and the signal light may be amplified. That is, the optical amplification unit may be configured by an optical fiber type optical amplifier or an optical waveguide type optical amplifier.

The optical signal thus amplified by the optical amplifying section 2 is guided into the optical filter module 10 through the connecting optical fiber 1b. The configuration of the optical filter module 10 is shown in an enlarged scale in FIG. 1, and the optical filter module 10 will be described with reference to this figure as well. The optical filter module 10 includes an optical multilayer filter 20 that performs a gain adjustment process corresponding to wavelengths, a first collimator lens 11 and a second collimator lens 12 that make passing light into a parallel light flux, an optical multilayer filter 20, and a first multilayer filter 20. It has a metal case 13 that houses and holds the collimator lens 11 and the second collimator lens 12.

In the optical filter module 10 having such a configuration, the optical signal transmitted through the connecting optical fiber 1b is emitted from the connecting optical fiber 1b into the case 13. Next, the optical signal emitted from the end of the coupling optical fiber 1b is made into a parallel light flux by the first collimator lens 11, passes through the optical multilayer film filter 20, and the wavelength-corresponding gain adjustment processing is performed. The optical signal that has passed through the optical multilayer film filter 20 is converged by the second collimator lens 12 and guided to the optical signal transmitting optical fiber 1c.

Here, the wavelength-corresponding gain adjustment processing is processing for flattening the wavelength dependence of the amplification characteristic of the optical amplifier 5 for amplifying the optical signal, and the filter for performing such processing is gain flattening. Filter GFF (Gain Flattenin
g Filter) is called. Such a GFF, that is, the optical multilayer film filter 20, includes an optical multilayer film having a spectral transmittance characteristic opposite to the amplification characteristic of the optical amplification section 2 and a glass substrate which is a transparent substrate on which the optical multilayer film is formed. However, since the amplification characteristic of the optical amplifier 5 is different for each device, as shown in FIG. 3, the GFF, that is, the spectral transmittance characteristic required for the optical multilayer film filter 20 is various. ing.

Therefore, the optical multi-layer film filter 20 is formed on the transparent glass substrate 21 and one surface of the glass substrate 21, and has a basic multi-layer film having the same basic spectral transmittance characteristic for different requirements. 22 and the glass substrate 21
An adjustment multilayer film 23 formed on the other surface of the adjustment multilayer film 23 for correcting the basic spectral transmittance characteristic and setting the desired spectral transmittance characteristic.
And is configured.

Although not shown in detail, the basic multilayer film 22 is formed by alternately laminating a large number of high-refractive index material layers and low-refractive index material layers on one surface of the glass substrate 21. As shown, it has the same basic spectral transmittance characteristics for different demands. The high refractive index material layer and the low refractive index material layer forming the basic multilayer film 22 are made of tantalum pentoxide Ta ₂ O ₅ as the high refractive index material layer and silicon dioxide SiO ₂ as the low refractive index material layer.
₂ is used. The basic multilayer film 22 is formed so as to have the structure shown in Table 1 below.
The number of layers is 83, and the film thickness is 20.9 μm.

[0024]

[Table 1]

On the other hand, the adjustment multilayer film 23 is the basic multilayer film 22.
Similarly, the high refractive index material layers and the low refractive index material layers are alternately laminated on the other surface of the glass substrate 21 to form a spectral transmittance characteristic (hereinafter, referred to as an adjusted spectral transmittance characteristic).
Is for correcting the basic spectral transmittance characteristic of the basic multilayer film 22 so that the optical multilayer filter 20 can obtain a desired spectral transmittance characteristic. For example, when the optical multilayer filter 20 having the spectral transmittance characteristics shown by the plot of ∘ in FIG. 4 is produced, the spectral transmittance characteristics of the adjustment multilayer film 23 are as shown by the plot of ∘ in FIG. The high refractive index substance layer and the low refractive index substance layer forming the adjustment multilayer film 23 are made of tantalum pentoxide Ta ₂ O ₅ as the high refractive index substance layer and have a low refractive index, as in the basic multilayer film 22. Silicon dioxide SiO ₂ is used as the index material layer. The adjustment multilayer film 23 is formed to have the configuration shown in Table 2 below, and the adjustment multilayer film 23 has 57 layers and a thickness of 13.4 μm.

[0026]

[Table 2]

The optical multilayer filter 20 having such a structure
In, the optical signal that has passed through the first collimator lens 11 passes through the basic multilayer film 22 to be subjected to the first wavelength-corresponding gain adjustment process, and then passes through the glass substrate 21 and then the adjusted multilayer film 23. After the second wavelength-corresponding gain adjustment process is performed, the process proceeds to the second collimator lens 12.
At this time, as shown in FIG. 4, the spectral transmittance characteristics of the optical multilayer filter 20 (marked by ▲) are the same as the basic spectral transmittance characteristics of the basic multilayer film 22 (marked by ♦) and the adjusted multilayer by the principle of superposition. 23 and the adjusted spectral transmittance characteristics (marked with ■) are synergistic.

As can be seen from the above, the spectral transmittance characteristics obtained by using the basic spectral transmittance characteristics are limited to a region below the basic spectral transmittance characteristics in FIG. 4, that is, a value smaller than the basic spectral transmittance characteristics. To be Therefore, the basic spectral transmittance characteristic has the highest spectral transmittance among the various desired spectral transmittance characteristics required for the optical multilayer film filter 20 so that more spectral transmittance characteristics can be accommodated. It is set according to the characteristics.

Further, when an optical multilayer film (not shown) having the same characteristics as the spectral transmittance characteristics shown in the plot of ▲ in FIG. 4 is formed on only one surface of the glass substrate 21, the following Table 3 is obtained. As shown in the figure, the number of optical multilayer films is 121, and the film thickness is 30.8 μm.

[0030]

[Table 3]

On the other hand, the optical multilayer film filter 20 of this embodiment.
Since the number of layers of the adjusting multilayer film 23 in 57 is 57 and the thickness thereof is 13.4 μm, the number of layers and the film thickness of the adjusting multilayer film 23 are smaller than those of the optical multilayer film described above. You can see that it is small. Therefore, it is better to form only the basic multilayer film 22 on one surface of the glass substrate 21 in advance and to form the adjustment multilayer film 23 on the other surface of the glass substrate 21 after the desired spectral transmittance characteristic is determined. The delivery time is shorter than the case where the optical multilayer film is formed on only one surface of the glass substrate 21 after the transmittance characteristic is determined.

As a result, only the basic multilayer film 22 is formed in advance, and after the desired spectral transmittance characteristic is determined, the adjustment multilayer film 23 for correcting the basic spectral transmittance characteristic is formed on the surface on which the basic multilayer film 22 is formed. It is possible to provide the optical multilayer film filter 20 that can be manufactured in a shorter delivery time while corresponding to a wide variety of required spectral transmittance characteristics by forming it on a surface different from the above. Further, by setting the basic spectral transmittance characteristic corresponding to the characteristic having the largest spectral transmittance among the plurality of desired spectral transmittance characteristics, it is possible to cope with more spectral transmittance characteristics. Furthermore, by configuring the optical amplifier 5 with the optical multilayer filter 20 according to the present invention, it is possible to provide the optical amplifier 5 that can be manufactured in a shorter delivery time.

Next, the optical multilayer filter 2 as described above.
The manufacturing method of 0 will be described. First, the glass substrate 21
A basic multi-layered film 22 in which a large number of high-refractive index material layers and low-refractive index material layers are alternately laminated is provided on one surface of the one surface, and the same basic spectral transmittance characteristics can be obtained for different requests. Thus, it is formed by sputtering, vapor deposition or the like. At this time, the basic spectral transmittance characteristic is set in correspondence with the characteristic having the largest spectral transmittance among the various desired spectral transmittance characteristics required for the optical multilayer filter 20.

Next, on the other surface of the glass substrate 21, the adjusted spectral transmission necessary for correcting the basic spectral transmittance characteristic of the basic multilayer film 22 and setting the desired spectral transmittance characteristic of the optical multilayer filter 20. Calculate rate characteristics. Then, on the other surface of the glass substrate 21, an adjustment multilayer film 23 formed by alternately laminating a large number of high refractive index substance layers and low refractive index substance layers.
In order to obtain the adjusted spectral transmittance characteristics previously obtained,
The production of the optical multilayer filter 20 is completed by forming it by sputtering, vapor deposition, or the like.

As a result, only the basic multilayer film 22 is formed in advance, and after the desired spectral transmittance characteristic is determined, it is necessary to correct the basic spectral transmittance characteristic to obtain the desired spectral transmittance characteristic as desired. The adjusted spectral transmittance characteristic is obtained, and the adjusted multilayer film 23 having the adjusted spectral transmittance characteristic is used as the basic multilayer film 22.
By forming it on a surface different from the surface on which the film is formed, it is possible to manufacture the optical multilayer filter 20 with a shorter delivery time in response to variously required spectral transmittance characteristics.
Further, by setting the basic spectral transmittance characteristic in correspondence with the characteristic having the largest spectral transmittance among the plurality of desired spectral transmittance characteristics, the optical multilayer film filter 20 corresponding to more spectral transmittance characteristics. Can be manufactured.

Next, a second embodiment of the optical multilayer filter will be described with reference to FIG. Here, FIG. 5 is an enlarged view showing the configuration of the optical filter module 40 including the optical multilayer filter 50 according to the present embodiment. In the present embodiment, the device configuration other than the optical multilayer filter 50 is the same as that of the above-described first embodiment, and therefore, the same parts will be denoted by the same reference numerals and redundant description will be omitted.

Optical multilayer filter 5 in this embodiment
0 is a transparent glass substrate 51, a basic multilayer film 52 formed on one surface of the glass substrate 51 and having a basic spectral transmittance characteristic which is the same characteristic for different requests, and an upper surface of the basic multilayer film 52. And the adjustment multilayer film 53 for correcting the basic spectral transmittance characteristic and setting the desired spectral transmittance characteristic. Then, by forming the adjusting multilayer film 53 on the upper surface of the basic multilayer film 52, one optical multilayer film 54 is formed on one surface of the glass substrate 51. An antireflection film (not shown) is formed on the surface of the glass substrate 51 opposite to the surface on which the basic multilayer film 52 is formed. In addition, the cross section of the glass substrate 51 is slightly wedge-shaped, and it is difficult for unnecessary interference to occur due to the reflected light from the facing surface.

Although not shown in detail, the basic multilayer film 52 is formed by alternately laminating a large number of high refractive index substance layers and low refractive index substance layers on one surface of the glass substrate 51. As shown, it has the same basic spectral transmittance characteristics for different demands. The high refractive index material layer and the low refractive index material layer forming the basic multilayer film 52 are made of tantalum pentoxide Ta ₂ O ₅ as the high refractive index material layer and silicon dioxide SiO ₂ as the low refractive index material layer.
₂ is used. The basic multilayer film 52 is formed so as to have the structure shown in Table 4 below.
The number of layers is 71 and the film thickness is 17.2 μm.

[0039]

[Table 4]

On the other hand, the adjustment multilayer film 53 is the basic multilayer film 52.
Is formed by alternately stacking a plurality of high-refractive index material layers and low-refractive index material layers on its upper surface, and its adjusted spectral transmittance characteristics are basically adjusted so that the optical multilayer film filter 50 can obtain desired spectral transmittance characteristics. The basic spectral transmittance characteristics of the multilayer film 52 are corrected. The high refractive index material layer and the low refractive index material layer forming the adjustment multilayer film 53 are made of tantalum pentoxide Ta ₂ as the high refractive index material layer, as in the basic multilayer film 52.
O ₅ is used, and silicon dioxide SiO ₂ is used as the low refractive index material layer. An optical multilayer film 54 in which the adjustment multilayer film 53 is formed on the upper surface of the basic multilayer film 52
Are formed so as to have the structure shown in Table 5 below. The number of layers of the optical multilayer film 54 is 109, and the film thickness thereof is 27.6 μm.
Has become. That is, the adjustment multilayer film 53 has 38 layers.
The layer has a thickness of 10.4 μm.

[0041]

[Table 5]

The optical multilayer film filter 50 having such a configuration.
In FIG. 3, the optical signal that has passed through the first collimator lens 11 passes through the adjustment multilayer film 53 and the basic multilayer film 52 (that is, the optical multilayer film 54) to perform the gain adjustment processing corresponding to the wavelength, and then passes through the glass substrate 51. After that, it goes to the second collimator lens 12. At this time, the spectral transmittance characteristics of the optical multilayer film filter 50 have a form as indicated by a black square mark in FIG.

In FIG. 6, the spectral transmittance characteristic of the optical multilayer film filter 50 has a portion exhibiting a greater spectral transmittance than the basic spectral transmittance characteristic. This is the basic multilayer film 5
Light from the interface of the multilayer film formed in 2 and the adjusting multilayer film 5
This is due to the interference effect of light from the interface of the multilayer film newly formed in No. 3, so that the basic spectral transmittance characteristics are required for the optical multilayer film filter 50 so that more spectral transmittance characteristics can be dealt with. It is set in correspondence with the characteristic having an intermediate spectral transmittance among the various desired spectral transmittance characteristics.

Further, the number of layers of the optical multilayer film 54 in which the adjustment multilayer film 53 is formed on the upper surface of the basic multilayer film 52 is 109 layers, and the thickness thereof is 27.6 μm. On the other hand, since the number of layers of the adjustment multilayer film 53 is 38 and the thickness thereof is 10.4 μm, the number of layers and the film thickness of the adjustment multilayer film 53 are smaller than the number and the thickness of the optical multilayer film 54. You can see that it is small.
Therefore, it is better to form only the basic multilayer film 52 on one surface of the glass substrate 51 in advance and to form the adjustment multilayer film 53 on the upper surface of the basic multilayer film 52 after the desired spectral transmittance characteristic is determined. The delivery time is shorter than the case where the optical multilayer film 54 is formed on one surface of the glass substrate 51 at once after the determination of the rate characteristics.

As a result, the adjustment multilayer film 53 is replaced with the basic multilayer film 5.
By providing the optical multilayer film filter 50 on the upper surface of No. 2, it is possible to provide an optical multilayer film filter 50 that can be manufactured in a shorter delivery time while responding to variously required spectral transmittance characteristics, like the optical multilayer film filter 20 in the first embodiment. can do. Also,
By setting the basic spectral transmittance characteristic in correspondence with the characteristic having the intermediate spectral transmittance among the plurality of desired spectral transmittance characteristics, it is possible to cope with more spectral transmittance characteristics.

Next, the optical multilayer film filter 5 as described above.
The manufacturing method of 0 will be described. First, the glass substrate 51
On one surface, a basic multi-layered film 52 in which a large number of high refractive index material layers and low refractive index material layers are alternately laminated can be obtained with the same basic spectral transmittance characteristics for different demands. Thus, it is formed by sputtering, vapor deposition or the like. At this time, the basic spectral transmittance characteristic is set corresponding to a characteristic having an intermediate spectral transmittance among the various desired spectral transmittance characteristics required for the optical multilayer film filter 50.

Next, on the upper surface of the basic multilayer film 52, the remaining adjustment multilayers necessary for correcting the basic spectral transmittance characteristics of the basic multilayer film 52 and setting the desired spectral transmittance characteristics of the optical multilayer film filter 50. Find the composition of the membrane. Then, an adjustment multilayer film 53 formed by alternately stacking a large number of high refractive index material layers and low refractive index material layers is formed on the upper surface of the basic multilayer film 52 by sputtering, vapor deposition, or the like, thereby forming an optical multilayer film filter. The manufacture of 50 is complete.

As a result, the adjustment multilayer film 53 is replaced with the basic multilayer film 5.
By forming it on the upper surface of No. 2, as in the optical multilayer film filter 20 in the first embodiment, it is possible to manufacture the optical multilayer film filter 50 with a shorter lead time while responding to variously required spectral transmittance characteristics. You can Further, by setting the basic spectral transmittance characteristic in correspondence with a characteristic having an intermediate spectral transmittance among a plurality of desired spectral transmittance characteristics, an optical multilayer film filter corresponding to more spectral transmittance characteristics. 5
0 can be produced.

In the above-described first embodiment, the optical filter module 10 has a transparent glass substrate 21 and a basic multilayer film 22 formed on one surface of the glass substrate 21.
7 and the adjustment multilayer film 23 formed on the other surface of the glass substrate 21, the optical multilayer film filter 20 is provided, but the invention is not limited to this, and FIG.
As shown in FIG. 1, the optical filter module 70 includes a first transparent substrate 81a having a basic multilayer film 82 having a basic spectral transmittance characteristic formed on one surface of the first transparent substrate 81a.
And a second filter 80 having an adjustment multilayer film 83 formed on one surface of the second transparent substrate 81b for correcting the basic spectral transmittance characteristic to obtain a desired spectral transmittance characteristic as desired.
An optical multilayer filter 80 composed of b and b may be provided. Also in this case, an antireflection film is formed on the surface opposite to the surface on which each multilayer film is formed so that the transmitted light intensity of the optical filter module 70 does not decrease.

By doing so, similarly to the optical multilayer film filter 20 in the first embodiment, an optical multilayer film filter 80 that can be manufactured in a shorter delivery time while responding to variously required spectral transmittance characteristics is provided. can do.

[0051]

As described above, according to the present invention,
It is possible to provide an optical multilayer film filter which can be manufactured in a shorter delivery time while corresponding to a wide variety of required spectral transmittance characteristics. Further, according to the manufacturing method of the present invention, it is possible to manufacture an optical multilayer filter with a shorter delivery time while complying with variously required spectral transmittance characteristics.

[Brief description of drawings]

FIG. 1 is an enlarged view showing a device configuration of an optical filter module including an optical multilayer filter according to the present invention.

FIG. 2 is a schematic diagram showing a configuration of an optical amplifier configured by using an optical filter module including an optical multilayer film filter according to the present invention.

FIG. 3 is a graph showing a plurality of spectral transmittance characteristics required for the optical multilayer filter according to the present invention.

FIG. 4 is a graph showing the spectral transmittance characteristics of the basic multilayer film, the adjusted multilayer film, and the optical multilayer film including the basic multilayer film and the adjusted multilayer film of the optical multilayer filter according to the present invention.

FIG. 5 is an enlarged view showing a device configuration of an optical filter module including an optical multilayer filter according to another aspect of the present invention.

FIG. 6 is a graph showing a spectral transmittance characteristic of a basic multilayer film of an optical multilayer filter according to another embodiment of the present invention and an optical multilayer film including the basic multilayer film and the adjustment multilayer film.

FIG. 7 is an enlarged view showing a device configuration of an optical filter module including an optical multilayer filter according to yet another aspect of the present invention.

[Explanation of symbols]

1a Optical fiber for optical signal transmission 1b Optical fiber for connection 1c Optical fiber for optical signal transmission 2 Optical amplifier 3 Fiber amplifier section 5 optical amplifier 20 Optical multilayer filter (first embodiment) 21 glass substrate 22 Basic multilayer film 23 Adjusting multilayer film 50 Optical Multilayer Film Filter (Second Embodiment) 51 glass substrate 52 Basic multilayer film 53 Adjustable multilayer film 80 Optical multilayer filter (another form of the first embodiment) 80a First filter 80b Second filter 81a First transparent substrate 81b Second transparent substrate 82 Basic multilayer film 83 Controlled multilayer film

Claims (11)

[Claims] 1. A basic multilayer film having basic spectral transmittance characteristics which are the same characteristics for different requests, and a basic multilayer film formed on a surface different from the basic multilayer film, and the basic spectral transmittance characteristics are corrected respectively. An optical multi-layer film filter including an adjustment multi-layer film for setting a desired spectral transmittance characteristic suitable for each request. 2. The different demands are a plurality of the desired spectral transmittance characteristics that are different from each other, and the basic multi-layered film of the basic multilayer film corresponding to the characteristic having the largest spectral transmittance among the plurality of desired spectral transmittance characteristics. The optical multilayer filter according to claim 1, wherein a spectral transmittance characteristic is set. 3. A basic multilayer film having a basic spectral transmittance characteristic which is the same for different requests, and a desired spectral transmittance characteristic suitable for each request by correcting the basic spectral transmittance characteristic. An optical multilayer filter comprising an adjustment multilayer film formed on the upper surface of the basic multilayer film for setting. 4. The different requests are a plurality of the desired spectral transmittance characteristics that are different from each other, and the characteristics of the basic multilayer film corresponding to a characteristic having an intermediate spectral transmittance among the plurality of desired spectral transmittance characteristics. The optical multilayer filter according to claim 3, wherein a basic spectral transmittance characteristic is set. 5. A first filter having a basic multilayer film having a basic spectral transmittance characteristic formed on one surface of a first transparent substrate, and the basic spectral transmittance characteristic on one surface of a second transparent substrate. A second multilayer control film for adjusting and setting a desired spectral transmittance characteristic suitable for each request.
An optical multilayer filter composed of a filter. 6. A desired spectral transmittance suitable for each request by forming a basic multilayer film having the same basic spectral transmittance characteristic for different requests and correcting the basic spectral transmittance characteristic. The adjusted spectral transmittance characteristics required to obtain the characteristics are obtained, and an adjusted multilayer film having the adjusted spectral transmittance characteristics is formed on a surface different from the surface on which the basic multilayer film is formed. A method of manufacturing an optical multilayer filter, comprising: 7. The different demands are a plurality of the desired spectral transmittance characteristics that are different from each other. Corresponding to the characteristic having the largest spectral transmittance among the plurality of desired spectral transmittance characteristics, the basic multi-layer film basic Spectral transmittance characteristics are set, and it is necessary to form the basic multilayer film in advance and correct the basic spectral transmittance characteristics according to the desired spectral transmittance characteristics to set the desired spectral transmittance characteristics. 7. The adjusted multilayer transmittance characteristic is obtained, and the adjusted multilayer film is formed on a surface different from the surface on which the basic multilayer film is formed according to the adjusted spectral transmittance characteristic. Method for manufacturing optical multilayer filter. 8. A desired spectral transmission suitable for each request by forming a basic multilayer film having a basic spectral transmittance characteristic that is the same for different requests and correcting the basic spectral transmittance characteristic. A method of manufacturing an optical multilayer film filter, which comprises manufacturing an adjustment multilayer film on the upper surface of the basic multilayer film so as to obtain rate characteristics. 9. The different demands are a plurality of the desired spectral transmittance characteristics which are different from each other, and a characteristic of the basic multilayer film corresponding to a characteristic having an intermediate spectral transmittance among the plurality of desired spectral transmittance characteristics. Basic spectral transmittance characteristics are set, the basic multilayer film is formed in advance, and the basic spectral transmittance characteristics are corrected according to the desired spectral transmittance characteristics so that the desired spectral transmittance characteristics can be obtained. 9. The method for manufacturing an optical multilayer filter according to claim 8, wherein an adjustment multilayer film is formed on the upper surface of the basic multilayer film. 10. An optical amplifying unit for amplifying light, and the optical multilayer filter according to claim 1, wherein the light amplified by the optical amplifying unit is incident. Optical amplifier characterized by. 11. The optical amplifying section comprises optical amplifying means in which an amplifying medium is doped in a core portion or a waveguide of an optical fiber through which light propagates, and the light having a wavelength excited by the amplifying medium is transmitted. The optical amplifier according to claim 10, wherein the light is amplified by being radiated to the optical amplification means.