JP2003282239A - Organic electroluminescence display panel and its manufacturing method - Google Patents

Organic electroluminescence display panel and its manufacturing method

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Publication number
JP2003282239A
JP2003282239A JP2002082511A JP2002082511A JP2003282239A JP 2003282239 A JP2003282239 A JP 2003282239A JP 2002082511 A JP2002082511 A JP 2002082511A JP 2002082511 A JP2002082511 A JP 2002082511A JP 2003282239 A JP2003282239 A JP 2003282239A
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Japan
Prior art keywords
organic
barrier layer
polymer compound
inorganic barrier
organic electroluminescent
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JP2002082511A
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Japanese (ja)
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JP4180831B2 (en
Inventor
Akira Sugimoto
晃 杉本
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Pioneer Electronic Corp
パイオニア株式会社
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Priority to JP2002082511A priority Critical patent/JP4180831B2/en
Publication of JP2003282239A publication Critical patent/JP2003282239A/en
Application granted granted Critical
Publication of JP4180831B2 publication Critical patent/JP4180831B2/en
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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
    • H01L51/52Details of devices
    • H01L51/5237Passivation; Containers; Encapsulation, e.g. against humidity
    • H01L51/5253Protective coatings
    • H01L51/5256Protective coatings having repetitive multilayer structures
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/28Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
    • H01L27/32Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
    • H01L27/3206Multi-colour light emission
    • H01L27/322Multi-colour light emission using colour filters or colour changing media [CCM]

Abstract

(57) [Problem] To provide a high-shielding organic electroluminescent element and an organic electroluminescent display panel in which light emission characteristics are hardly deteriorated. SOLUTION: Each of the first and second display electrodes and the first display electrode are provided.
And an organic electroluminescent element comprising at least one organic electroluminescent element comprising at least one organic functional layer comprising an organic compound sandwiched and laminated between the second display electrodes, and a substrate carrying the organic electroluminescent element. And at least between the organic electroluminescence element and the resin substrate, comprising a plurality of polymer compound layers dispersed in the film thickness direction and the vertical direction thereof, and an inclusion inorganic barrier layer in contact with the organic electroluminescence element, Have.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to one or more thin films (hereinafter, referred to as organic functional layers) including a light emitting layer made of an organic compound material exhibiting electroluminescence which emits light by current injection. In particular, the present invention relates to an organic electroluminescence display panel having a plurality of organic EL elements formed on a resin substrate (hereinafter, referred to as an organic EL display panel). 2. Description of the Related Art An organic EL device basically has an organic functional layer sandwiched between an anode and a cathode, and excitons formed when electrons and holes injected from both electrodes are recombined are formed. The light returns from the excited state to the ground state to generate light. For example, an organic EL element is formed by sequentially laminating a transparent electrode of an anode, an organic functional layer, and a metal electrode of a cathode on a transparent substrate, and emits light from the transparent substrate side. The organic functional layer may be a single layer of a light-emitting layer, or a three-layer structure of an organic hole-transport layer, a light-emitting layer and an organic electron-transport layer, or a two-layer structure of an organic hole-transport layer and a light-emitting layer. And a laminate in which an electron or hole injection layer or a carrier block layer is inserted. As an organic EL display panel, for example, a matrix display type panel and a panel having a predetermined light emitting pattern are known. Further, in order to make the organic EL display panel itself flexible, it has been proposed to use a synthetic resin, a plastic film, or the like for the substrate. [0004] The organic EL device is
When exposed to the atmosphere, it is susceptible to deterioration under the influence of gases such as moisture and oxygen, and certain other molecules in the environment in which it is used. In particular, organic EL display panels using a plastic film substrate are significantly deteriorated in characteristics. There is a problem that light emission characteristics such as brightness, color, etc., are deteriorated. In order to prevent this, there has been proposed a method in which an inorganic substance or the like is formed as an inorganic barrier layer on the surface of a plastic substrate to block moisture that penetrates. However, pinhole generation is a problem in the inorganic barrier layer. Pinholes in the inorganic barrier layer may be caused by irregularities on the underlayer or foreign matter before film formation, or may occur during the formation of the inorganic barrier layer regardless of the underlayer. It is difficult to completely eliminate these in the process. [0005] Moisture that penetrates through the pinholes of the inorganic barrier layer causes deterioration of the organic EL element, causing a problem of causing display defects. SUMMARY OF THE INVENTION It is an object of the present invention to provide an organic EL device and an organic EL display panel whose luminescence characteristics are hardly deteriorated by moisture or the like. An organic electroluminescent display panel according to the present invention comprises first and second display electrodes and an organic compound sandwiched and laminated between the first and second display electrodes. An organic electroluminescence element comprising the above organic functional layer, and a resin substrate carrying the organic electroluminescence element, an organic electroluminescence display panel comprising, at least between the organic electroluminescence element and the resin substrate, the film thickness It is characterized by comprising a plurality of polymer compound layers dispersed in the direction and in the direction perpendicular thereto and having an inclusion inorganic barrier layer in contact with the organic electroluminescence element. In the organic electroluminescent display panel according to the present invention, the clathrate inorganic barrier layer is characterized by comprising an inorganic barrier layer sandwiching the polymer compound layers alternately. In the organic electroluminescent display panel according to the present invention, the polymer compound layers are formed at positions that do not coincide with each other in the film thickness direction. In the organic electroluminescent display panel according to the present invention, each of the polymer compound layers is formed by a dot pattern consisting of dots at regular intervals. Is a, the distance L between dots is a <L <
(3a / 2). In the organic electroluminescent display panel according to the present invention, the inorganic barrier layer is made of silicon nitride oxide. In the organic electroluminescent display panel according to the present invention, the inorganic barrier layer is formed by a sputtering method. In the organic electroluminescent display panel according to the present invention, the polymer compound layer is formed by a photolithography method or a printing method. The organic electroluminescent display panel according to the present invention is characterized in that the organic electroluminescent display panel includes a sealing film that covers the organic electroluminescent element from the back. In the organic electroluminescent display panel according to the present invention, the sealing film is an inorganic passivation film, and the entire organic electroluminescent element is hermetically covered with the inorganic barrier layer and the sealing film. It is characterized by. An organic electroluminescent display panel manufacturing method according to the present invention is a method for manufacturing an organic electroluminescent display panel including an organic electroluminescent element and a substrate carrying the organic electroluminescent element, the method including covering a surface of a resin substrate. An initial inorganic step of forming an initial inorganic barrier layer, an intermediate organic step of forming a plurality of first polymer compound layers dispersed in a direction perpendicular to a film thickness direction on the initial inorganic barrier layer, An intermediate inorganic step of forming an intermediate inorganic barrier layer that continuously covers the plurality of first polymer compound layers; and a plurality of second inorganic layers dispersed on the intermediate inorganic barrier layer in a direction perpendicular to the film thickness direction. An intermediate organic step of forming a polymer compound layer, and a topmost inorganic step of forming a topmost inorganic barrier layer that continuously covers the plurality of second polymer compound layers ,
Forming an organic electroluminescent element comprising first and second display electrodes and one or more organic functional layers made of an organic compound sandwiched and laminated between the first and second display electrodes on the outermost inorganic barrier layer. And a step of performing In the method for manufacturing an organic electroluminescent display panel according to the present invention, a set of the intermediate inorganic step and the intermediate organic step is repeated so that at least a portion between the organic electroluminescent element and the resin substrate is provided.
It comprises a dispersed polymer compound layer including a plurality of first and second polymer compound layers dispersed in a film thickness direction and a vertical direction thereof, and forms an inclusion inorganic barrier layer in contact with the organic electroluminescence element. And In the method for manufacturing an organic electroluminescent display panel according to the present invention, the dispersed polymer compound layers in the intermediate organic step are formed at positions that do not coincide with each other in a film thickness direction. In the method for manufacturing an organic electroluminescent display panel of the present invention, each of the dispersed polymer compound layers in the intermediate organic step is formed by a dot pattern composed of dots at regular intervals, and the three polymer compound layers are formed. In this case, if the diameter of the dot is a, the distance L between dots is a <L <(3a / 2). In the method of manufacturing an organic electroluminescent display panel according to the present invention, the inorganic barrier layer is made of silicon nitride oxide. In the method of manufacturing an organic electroluminescent display panel according to the present invention, the inorganic barrier layer is formed by a sputtering method. In the method for manufacturing an organic electroluminescent display panel according to the present invention, the polymer compound layer is formed by a photolithography method or a printing method. Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the organic EL device of the embodiment includes a polymer compound layer 12PA, 1
Inclusion inorganic barrier layer 12 in which 2PB and 12PC are embedded
Resin substrate 10 on which is formed and clathrate inorganic barrier layer 12
(The outermost inorganic barrier layer 12S4) is composed of a main body organic EL element D formed on the surface. The organic EL element D of the main body has a first display electrode 13 (anode of a transparent electrode), one or more organic functional layers 14 including a light emitting layer made of an organic compound, and a second display electrode on the surface of the outermost inorganic barrier layer 12S4. 1
5 (cathodes of metal electrodes) are sequentially laminated. In addition, the organic EL element has a sealing film 16 that covers the back surface of the second display electrode 15. Further, a further polymer compound layer can be provided between the resin substrates 10 immediately below the initial inorganic barrier layer 12S1 on the side not in contact with the organic EL element. The inclusion inorganic barrier layer 12 includes an initial inorganic barrier layer 12S1 and a dot-like polymer compound layer 1 from the substrate side.
2PA group A, intermediate inorganic barrier layer 12S2, dot-shaped polymer compound layer 12PB group B, intermediate inorganic barrier layer 12S3, dot-shaped polymer compound layer 12PC group C, and outermost inorganic barrier layer The layers 12S4 are sequentially laminated. That is, the clathrate inorganic barrier layer 12
Are polymer compound layers 12PA, 12PB, 12PC alternately laminated between the initial inorganic barrier layer 12S1 on the substrate side and the outermost inorganic barrier layer 12S4 on the organic EL element side, and the intermediate inorganic barrier layers 12S2, 12S3. Is a laminate. The inclusion inorganic barrier layer 12 is disposed at least between the organic EL element and the resin substrate. This is for preventing moisture and the like from entering the organic EL element. The plurality of polymer compound layers 12PA, 12PB, and 12PC are formed so as to be dispersed between the inorganic barrier layers in the thickness direction and the vertical direction thereof. That is, the polymer compound layers 12PA, 12PB, 1
The 2PC has a structure in which each layer is dispersed and arranged in each layer, and an intermediate inorganic barrier layer alternately sandwiches the polymer compound layer. At this time, the dots in the respective polymer compound layer groups are arranged so as not to contact each other by the intermediate inorganic barrier layer. For example, as shown in an enlarged plan view of the organic EL element resin substrate in FIG.
So that the portions respectively occupied by the polymer compound layer group A, the second polymer compound layer group B, and the third polymer compound layer group C complement each other when viewed from the upper surface direction (thickness direction). The diameters and pitches of the circular dots are adjusted so as to fill the light emitting display areas of all the organic EL elements. Thus, the polymer compound layer 12P
A, 12PB, and 12PC are formed at positions that do not coincide with each other in the film thickness direction because the polymer compound layers 12PA, 12PB, and 12P are formed when moisture or the like enters.
C is trapped in any one of C, and diffuses moisture and the like in the polymer compound layer to prevent the water from reaching the organic EL element. With this structure, even when a pinhole is present in the inorganic barrier layer, an infiltration path for moisture or the like is blocked, and a highly reliable organic EL element and organic EL display panel can be provided. As shown in FIG. 2, each of the polymer compound layers is formed by a dot pattern consisting of dots at regular intervals, and when the polymer compound layer group is composed of three layers, if the dot diameter (diameter) is a, It is appropriate to calculate geometrically that the distance L between dot centers is a <L <(3a / 2).
Although the dot diameter is appropriate, a realistic numerical value is 1
It is considered to be about 0 μm to 1 mm. By forming a pair of the intermediate inorganic barrier layer and the dispersed polymer compound layer into a multilayer, even if a pinhole is present in the lowermost initial inorganic barrier layer 12S1, a small amount of water or the like penetrated therefrom. Is diffused in the intermediate polymer compound layer, and even if there is a pinhole in the next inorganic barrier layer, the effect can be greatly reduced.
Further, according to the present invention, since the polymer compound layer is sandwiched between the inorganic barrier layers in a multilayer structure as a buffer layer, the occurrence of cracks can be suppressed. When the end face of the polymer compound layer between the inorganic barrier layers is exposed to the outside, it is conceivable that moisture or the like may enter therefrom. The influence of the exposure of the end surface of the polymer compound layer is large, and the moisture taken in from the end surface passes through the pinhole of the uppermost inorganic barrier layer and causes deterioration of the organic EL element. As a collection of discontinuous regions of the polymer compound layer, since a plurality of island-like polymer compound layers are dispersed in the inorganic barrier layer, even if the end faces of the discrete polymer compound layer are exposed,
If it is dispersed and not connected to the light emitting display area of the organic EL element, moisture and the like cannot penetrate to the light emitting display area, and the element does not deteriorate. However, in a further embodiment of the present invention, as shown in FIG. 3, the inorganic barrier layers 12S1, 12S
4 high molecular compound layers 12PA, 12PB, 12P
The outermost inorganic barrier layer 12 so that the end face of C is not exposed.
By patterning S4, intrusion of moisture and the like can be further suppressed to a level that does not affect the organic EL element. In addition, as a method of applying the polymer compound layer group, a printing method, a photolithography method, an ink-jet method, and the like are conceivable, and any method can arrange dots at diameters and intervals effective for the present invention. It is. In the above embodiment, the number of layers of the polymer compound layer group is three. However, in other embodiments, the number of layers may be two, and there is no problem if there are more than these layers. Also, each of the polymer compound layers was a circular dot, for example,
As shown in FIG. 4, the portions occupied by the first rectangular polymer compound layer group A and the second rectangular polymer compound layer group B as the two-layer polymer compound layer are in the upper surface direction (thickness direction). The organic EL elements can be arranged so as to complement each other as viewed from the side, and to fill up the light emitting display areas of all the organic EL elements. The initial, intermediate and outermost inorganic barrier layers 12S
1, 12, S2, 12S3, and 12S4 are made of, for example, silicon nitride oxide. These inorganic barrier layers are formed by, for example, a sputtering method. Polymer compound layer 12PA, 12P
B and 12PC are formed, for example, by a printing method. Examples of the material of the resin substrate 10 include polyethylene terephthalate, polyethylene-2,6-naphthalate, polycarbonate, polysulfone, polyethersulfone, polyetheretherketone, polyphenoxyether, polyarylate, fluororesin, polypropylene, polyethylenenaphthalate, and polyolefin. Film is applicable. As the material of the polymer compound layer 12P1, an ultraviolet (UV) curable resin, a thermosetting resin, or the like can be used. In another embodiment, by using a color filter or a color conversion material for the polymer compound layer portion, the function itself can be added as a substrate for a color panel. For example, as shown in FIG. 5, a polymer compound layer group R made of a color conversion material for red light emission, a polymer compound layer group made of a color conversion material for green light emission, and a polymer compound layer made of a color conversion material for blue light emission The light emitting display of all the organic EL elements is arranged such that the group B is interposed between the groups B with an intermediate inorganic barrier layer interposed therebetween so that the layer group portions occupied with each other complement each other when viewed from the upper surface direction (thickness direction). The organic EL device color panel substrate can be formed by adjusting the circular dot diameter and pitch of the polymer compound layer so as to fill the area. Further, by forming an inorganic barrier layer on the front surface of the resin substrate on the opposite side of the inclusion inorganic barrier layer and covering both surfaces of the substrate with the inorganic barrier layer, warpage of the resin substrate can be prevented. In the organic EL element D, for example, a transparent electrode (first display electrode) 13 made of indium tin oxide (ITO) is formed on a transparent resin substrate 10 by vapor deposition or sputtering. On top of this, a hole injection layer made of copper phthalocyanine, a hole transport layer made of TPD (triphenylamine derivative), a light emitting layer made of Alq 3 (aluminum chelate complex), and electron injection made of Li 2 O (lithium oxide) The layers are sequentially formed by a vapor deposition method, and these constitute the organic functional layer 14. Furthermore, on this electron injection layer by a vapor deposition method,
A metal electrode (second display electrode) 15 made of Al is formed so as to face the electrode pattern of the transparent electrode 13. Next, a method of manufacturing an organic EL device in which an inclusion inorganic barrier layer formed by embedding three polymer compound layers is provided on a resin substrate will be described. As shown in FIG. 6, a flowable U is placed on a base, for example, a polycarbonate resin substrate 10.
V-curing resin is applied and cured by ultraviolet irradiation.
A polymer compound layer 11 is formed as a buffer layer made of a V-cured resin. Next, as shown in FIG. 7, a silicon nitride oxide film is formed on the polymer compound layer 11 by RF sputtering, and an initial inorganic barrier layer 12S1 is formed on the entire surface.
Next, as shown in FIG. 8, on the initial inorganic barrier layer 12S1, a fluid UV curable resin is applied in a predetermined dot pattern by a printing method and then cured to form a polymer compound layer 12PA to be embedded. . Next, as shown in FIG. 9, a silicon nitride oxide film is formed on the polymer compound layer 12PA and the initial inorganic barrier layer 12S1 by RF sputtering, and the intermediate inorganic barrier layer 12S2 is formed on the entire surface. . Next, as shown in FIG. 10, a flowable UV is formed on the intermediate inorganic barrier layer 12S2.
After the cured resin is applied in a predetermined dot pattern by a printing method, the cured resin is cured to form a polymer compound layer 12PB to be embedded.
Is formed. Next, as shown in FIG. 11, a silicon nitride oxide film is formed on the polymer compound layer 12PB and the intermediate inorganic barrier layer 12S2 by RF sputtering, and the intermediate inorganic barrier layer 12S3 is formed on the entire surface. . Next, as shown in FIG. 12, a flowable UV is formed on the inorganic barrier layer 12S3.
After applying a cured resin in a predetermined dot pattern by a printing method, the cured resin is cured to form a polymer compound layer 12PC to be embedded.
Is formed. Next, as shown in FIG. 13, on the entire surface of the polymer compound layer 12PC and the intermediate inorganic barrier layer 12S3,
Silicon nitride oxide is formed as the outermost surface inorganic barrier layer 12S4. Thereafter, on the surface of the outermost inorganic barrier layer 12S4, the first display electrode 13 (anode of a transparent electrode), a predetermined organic functional layer 14, a second display electrode 15 (a cathode of a metal electrode), and a sealing film 16 covering these. Are sequentially stacked to produce an organic EL device D as shown in FIG. In the example of the manufactured organic EL device shown in FIG. 14, the polymer compound layer 11 as the buffer layer is provided in advance, but as shown in FIG. 1, the adhesion between the resin substrate 10 and the initial inorganic barrier layer 12S1 is increased. If this is ensured, the polymer compound layer 11 of the buffer layer can be omitted. In another embodiment, if necessary, three or more intermediate inorganic barrier layers can be stacked. In each case, a polymer compound layer is formed between the intermediate inorganic barrier layers, and the inorganic barrier layer is disposed on the outermost surface. FIG. 15 shows a plurality of organic E layers according to another embodiment.
FIG. 2 is a partially enlarged rear view of an organic EL display panel including an L element. The organic EL display panel includes a plurality of organic EL elements arranged in a matrix on a resin substrate 10 covered with an inclusion inorganic barrier layer. A row electrode 13 including a transparent electrode layer (a first display electrode as an anode), an organic functional layer, and a column electrode 15 including a metal electrode layer intersecting the row electrode (a second display electrode) are formed of a silicon nitride oxide film. It is configured by being sequentially laminated on the top. The row electrodes are each formed in a strip shape, and are arranged so as to be parallel to each other at a predetermined interval. The same applies to the column electrodes. As described above, the display panel of the matrix display type has an image display array including the light-emitting pixels of the plurality of organic EL elements formed at the intersections of the electrodes in the rows and columns. The first display electrode 13 can be formed of a metal bus line that electrically connects the island-shaped transparent electrodes in the horizontal direction. Organic EL display panel is resin substrate 1
A plurality of barrier ribs 7 provided between the organic EL elements on the silicon oxynitride film can be provided. A sealing film 16 is formed on the second display electrode 15 and the partition 7.
The organic functional layer materials may be selected and laminated as appropriate to form red, green G, and blue B light emitting units. Further, the organic EL display panel is an organic EL display panel.
An inorganic passivation film may be provided as a part of the sealing film 16 that covers the element and the partition wall 7 from the back. This keeps moisture proof, so that a sealing film made of resin can be provided on the inorganic passivation film. Further, an inorganic passivation film made of an inorganic material can be provided again on the outermost surface of the resin sealing film. The inorganic passivation film is made of a nitride such as silicon nitride oxide or silicon nitride, or an inorganic material such as oxide or carbon. As a resin constituting the sealing film, a fluorine-based or silicon-based resin, or a synthetic resin such as a photoresist or polyimide is used. Even after the organic EL display panel on which the sealing structure is formed is left at room temperature and at a high temperature and high humidity (60 ° C., 95%) for 260 hours, cracks and peeling are not formed on the sealing structure. No light emission occurred, and the light emitting operation of the organic EL display panel was stable. In the above-described example, a sputtering method was used as a method for producing an inorganic barrier layer for blocking moisture, but the method is not limited to this, and the plasma C
VD (Chemical Vapor Deposit)
A vapor phase growth method such as an ion (ion) method and a vacuum evaporation method can also be applied. Further, in the above-described embodiment, the organic EL layer of the simple matrix display type comprising the organic functional layer 14 at the intersection of the plurality of transparent electrodes 13 and the metal electrode 15 on the transparent resin substrate 10, ie, the light emitting portion. However, in the present invention, the inclusion inorganic barrier layer can be applied to a substrate of an active matrix display type panel. According to the present invention, even when pinholes exist in the inorganic barrier layer, the inorganic barrier layer and the inorganic barrier layer can be formed by forming a polymer compound layer embedded and dispersed between the inorganic barrier layers. Even if pinholes are present in the lower inorganic barrier layer, a small amount of water penetrating therefrom diffuses in the polymer compound layer and forms an upper inorganic barrier layer by forming the polymer compound layers alternately in multiple layers. Similarly, even when there is a pinhole, the effect can be greatly reduced, and it becomes possible to block intrusion of moisture and the like into the element portion. Therefore, a highly reliable organic EL element and organic EL display panel can be provided. In addition, by using a color filter or a color conversion material for the polymer compound layer, the function itself can be added as a substrate for a color panel. Further, since the polymer compound layer functions as a buffer, cracks in the multilayer inorganic barrier layer can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic sectional view of an organic EL device according to an embodiment of the present invention. FIG. 2 is an enlarged plan view of an organic EL element substrate according to an embodiment of the present invention. FIG. 3 is a schematic sectional view of an organic EL device according to another embodiment of the present invention. FIG. 4 is a schematic sectional view of an organic EL device according to another embodiment of the present invention. FIG. 5 is a schematic sectional view of an organic EL device according to another embodiment of the present invention. FIG. 6 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 7 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 8 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 9 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 10 is a schematic cross-sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 11 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 12 is a schematic cross-sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 13 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 14 is a schematic sectional view of a substrate in an organic EL display panel manufacturing process according to the present invention. FIG. 15 shows a plurality of organic Es according to another embodiment of the present invention.
FIG. 2 is a partially enlarged rear view of an organic EL display panel including an L element. [Description of Signs] 10 Resin substrate 13 First display electrode (transparent electrode) 14 Organic function layer (light emitting layer) 15 Second display electrode (metal electrode) 16 Sealing film 12S1 Initial inorganic barrier layers 12S2, 12S3 Intermediate inorganic barrier layer 12S4 Outermost inorganic barrier layer 12PA, 12PB, 12PC Polymer compound layer

Claims (1)

  1. Claims: 1. An organic electroluminescent device comprising first and second display electrodes and one or more organic functional layers made of an organic compound sandwiched and laminated between the first and second display electrodes. And a resin substrate carrying the organic electroluminescent element, wherein at least the organic electroluminescent element and the resin substrate are provided with a plurality of heights dispersed in a film thickness direction and a vertical direction thereof between the organic electroluminescence element and the resin substrate. An organic electroluminescent display panel comprising a molecular compound layer and an inclusion inorganic barrier layer in contact with the organic electroluminescent element. 2. The organic electroluminescent display panel according to claim 1, wherein said clathrate inorganic barrier layer comprises an inorganic barrier layer sandwiching said polymer compound layers alternately. 3. The organic electroluminescent display panel according to claim 2, wherein the polymer compound layers are formed at positions that do not coincide with each other in the film thickness direction. 4. Each of the polymer compound layers is formed by a dot pattern consisting of dots at regular intervals, and when three polymer compound layers are formed, if the diameter of the dots is a, the distance between the dots is The distance L is a <L <(3a /
    4. The organic electroluminescent display panel according to claim 3, wherein 2). 5. The method according to claim 1, wherein said inorganic barrier layer is made of silicon nitride oxide.
    The organic electroluminescent display panel according to any one of the above items. 6. The organic electroluminescent display panel according to claim 1, wherein said inorganic barrier layer is formed by a sputtering method. 7. The organic electroluminescent display panel according to claim 1, wherein the polymer compound layer is formed by a photolithography method or a printing method. 8. The organic electroluminescent display panel according to claim 1, further comprising a sealing film covering the organic electroluminescent element from the back. 9. The organic EL device according to claim 8, wherein the sealing film is an inorganic passivation film, and the entire organic electroluminescence element is hermetically covered with the inorganic barrier layer and the sealing film. Organic electroluminescence display panel. 10. A method for manufacturing an organic electroluminescence display panel, comprising: an organic electroluminescence element; and a substrate supporting the organic electroluminescence element, wherein an initial inorganic barrier layer is formed so as to cover the surface of the resin substrate. An initial inorganic step of forming a film; an intermediate organic step of forming a plurality of first polymer compound layers dispersed in a direction perpendicular to a film thickness direction on the initial inorganic barrier layer; and the plurality of first polymer compounds. An intermediate inorganic step of forming an intermediate inorganic barrier layer that continuously covers the layers; and forming a plurality of second polymer compound layers dispersed in a direction perpendicular to the film thickness direction on the intermediate inorganic barrier layer. An intermediate organic step, a topmost inorganic step of forming a topmost inorganic barrier layer that continuously covers the plurality of second polymer compound layers, and a first and a second step on the topmost inorganic barrier layer. Forming an organic electroluminescent element comprising a second display electrode and at least one organic functional layer comprising an organic compound sandwiched and laminated between the first and second display electrodes. Method. 11. The method according to claim 1, further comprising: repeating a step of the intermediate inorganic step and the intermediate organic step to form a plurality of first and second layers dispersed at least between the organic electroluminescent element and the resin substrate in a film thickness direction and a vertical direction thereof. 11. The method according to claim 10, further comprising forming an inclusion inorganic barrier layer including a dispersed polymer compound layer including two polymer compound layers and contacting the organic electroluminescence device. 12. The manufacturing method according to claim 11, wherein the dispersed polymer compound layers in the intermediate organic step are formed at positions that do not coincide with each other in a film thickness direction. 13. In the intermediate organic step, each of the dispersed polymer compound layers is formed by a dot pattern consisting of dots at regular intervals, and when three polymer compound layers are formed, the diameter of the dots is reduced. 13. The method according to claim 12, wherein the distance L between dots satisfies a <L <(3a / 2). 14. The semiconductor device according to claim 10, wherein the inorganic barrier layer is made of silicon nitride oxide.
    14. The production method according to any one of items 13 to 13. 15. The method according to claim 10, wherein the inorganic barrier layer is formed by a sputtering method. 16. The method according to claim 10, wherein the polymer compound layer is formed by a photolithography method or a printing method.
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