JP2003247935A - Surface plasmon resonance sensor chip and analysis method of sample using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface plasmon resonance sensor chip capable of a low-cost and accurate analysis and having high corrosion resistance. <P>SOLUTION: In this surface plasmon resonance sensor chip, an optical prism, a diffraction grating and a metal layer are formed in the vicinity of a sensor surface in contact with a sample, and a resonance region capable of generating a resonance phenomenon between a surface plasmon wave induced on the surface of the metal surface by irradiation of light and an evanescent wave generated by the action of the optical prism or the diffraction grating is formed on the sensor surface. In the surface plasmon resonance sensor chip, the chip is fabricated by forming the metal layer on a resin board, the metal layer contains 95-99.7 wt.% of Ag, and contains 0.3-5 wt.% of noble metal elements other than Ag. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a sensor chip (surface plasmon resonance sensor chip) for sample analysis using surface plasmon resonance (SPR), and more particularly to an optical prism as an optical structure for inducing an evanescent wave. Alternatively, the present invention relates to a structure of a sensor chip provided with a diffraction grating and a sample analysis method using the same.

[0002]

2. Description of the Related Art Conventionally, in the field of biochemistry, medical examination, etc., surface plasmon has been used as a quantitative and / or qualitative analysis method for a sample fluid containing a detected species such as a chemical species, a biochemical species or a biological species. An analysis method utilizing resonance (SPR) is known. Surface plasmon resonance is a phenomenon in which, when light is incident on a metal layer, a surface plasmon wave induced on the metal surface resonates with an evanescent wave generated by the incident light and is excited. Surface plasmon resonance depends on the wavelength and angle of incident light, and when surface plasmon resonance is excited, the light energy of a light component having a specific incident angle or a specific wavelength is transferred to a surface plasmon wave, The feature is that reflected light having a corresponding incident angle or wavelength is reduced.

In order to cause surface plasmon resonance, a metal having a specific surface plasmon wave and an optical structure for inducing an evanescent wave resonating with the surface plasmon wave are required. At present, two structures are known as optical structures that induce an evanescent wave. One is an optical structure that uses total reflection of an optical prism (hereinafter, simply referred to as a prism), and the other is an optical structure that uses a diffraction grating. An element obtained by combining the above metals with these optical structures is generally called a surface plasmon resonance sensor chip (hereinafter, simply referred to as a sensor chip).

Usually, a sensor chip has a structure in which a metal layer is laminated on a substrate, and a binding substance (ligand, molecular recognition element) that interacts with a specific detection species and specifically binds is formed on the metal layer. It is applied and fixed. By bringing the sample into contact with the surface of the metal layer on which this ligand is immobilized,
The detection species in the sample are captured by the ligand. Surface plasmon resonance also depends on the refractive index of the medium on the surface of the metal layer.If the refractive index of the medium changes, the resonance angle changes when the wavelength is constant, and when the incident angle is constant, resonance occurs. The wavelength changes. Therefore, the refractive index of the medium on the surface of the metal layer can be analyzed by examining the resonance angle or the resonance wavelength based on the intensity of the reflected light. In this case, since the change in the refractive index of the medium on the surface of the metal layer corresponds to the change in the amount of the detection species trapped by the ligand, that is, the change in the concentration of the detection species in the sample, surface plasmon resonance occurs. By examining the resonance angle or the resonance wavelength, the concentration of the detection species in the sample can be analyzed.

[0005]

The performance required for such a sensor chip is that the peak of the resonance curve at each resonance spot is sharp and the intensity is large, that is, the sensitivity to the shift of the resonance angle is good. It can be mentioned. Further, when performing simultaneous detection at multiple points (multiple spots), it is preferable that the variations in sensitivity among the spots are small. In order to evaluate the characteristics of such a chip, a resonance curve is taken without attaching the ligand as described above, and the full width at half maximum of the peak of the resonance curve is measured, which can be used as an index to some extent. . In that case,
In order to make the refractive indexes of the substances in contact with the chip surface uniform, it is possible to make a good evaluation when the water is kept at a constant temperature while being brought into contact with the chip surface. The narrower the full width at half maximum is, the better the sensitivity to the shift of the resonance angle is, which is preferable. Further, since one of the main uses of the present sensor chip is in the fields of biochemistry, medical examinations, etc., the measurement sample often contains a salt derived from a biomaterial, and therefore it is preferable that it has high corrosion resistance. As a method for evaluating such characteristics, there is a salt water test for observing the degree of corrosion in contact with salt water having a predetermined concentration. First, the metal layer used for the sensor chip described above is required to have a sufficiently high reflectance in the vicinity of the measurement wavelength, and thus a high reflectance metal is said to be desirable. Among them, Au is an excellent material because it has a narrow half width of the resonance curve, a large shift amount of the resonance angle, and a high corrosion resistance. However, since Au is extremely expensive, there has been a demand for a metal material that has the same properties as Au and is low in cost.

The present invention was devised in view of such problems, and a surface plasmon resonance sensor chip having low cost, high-accuracy analysis and high corrosion resistance, and a sample analysis method using the same. The purpose is to provide.

[0007]

As a result of earnest studies, the inventors have found that a sensor chip in which a metal layer made of a specific silver alloy is laminated on a resin substrate can solve the above problems. . That is, the gist of the present invention is that an optical prism or a diffraction grating and a metal layer are provided in the vicinity of the sensor surface in contact with the sample, and the surface plasmon wave induced on the surface of the metal layer by irradiation of light and the optical prism. Alternatively, there is provided a surface plasmon resonance sensor chip in which a resonance region capable of causing a resonance phenomenon with an evanescent wave caused by the action of a diffraction grating is formed on the sensor surface, wherein the chip has a metal layer formed on a resin substrate. And the metal layer is Ag
In a surface plasmon resonance sensor chip characterized by containing 95 wt% or more and 99.7 wt% or less and a noble metal element other than Ag in an amount of 0.3 wt% or more and 5 wt% or less.

Another subject matter of the present invention is an analysis method for performing a quantitative and / or qualitative analysis of a sample using the surface plasmon resonance sensor chip, wherein the sample is brought into contact with the sensor surface. A step of irradiating irradiation light so as to illuminate the resonance region, a step of detecting reflected light from the surface plasmon resonance sensor chip, and a quantitative and / or qualitative analysis of the sample based on the intensity of the detected reflected light. And a step of performing a dynamic analysis.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below. In the present invention, the above-described sensor chip has a metal layer formed on a resin substrate, and the metal layer is Ag.
Is contained in an amount of 95 wt% or more and 99.7 wt% or less, and a noble metal element other than Ag is included in an amount of 0.3 wt% or more and 5 wt% or less. As a result, it is possible to provide a surface plasmon resonance sensor chip that can perform highly accurate analysis at low cost and has high corrosion resistance. The main component of the metal layer is Ag. In order to cause surface plasmon resonance, it is desirable that the ratio of the real part to the imaginary part of the complex permittivity of the metal layer is large and the coefficient of the real part is negative. In addition to Au, Ag satisfies this in the vicinity of the normally used laser wavelength. However, when Ag is used alone, it has a problem that it is inferior in corrosion resistance, and it is necessary to form an alloy with another metal. However, an alloy with any metal is not necessarily required. As a result of the study by the present inventors, Ag
It has been found that the oxidation resistance, the sulfidation resistance and the alkali resistance can be increased by including a predetermined amount of a noble metal element in the. As a result, it is possible to obtain a surface plasmon resonance sensor chip that can perform highly accurate analysis at low cost and has high corrosion resistance. In the present invention, the noble metal element means Au, Ag, P
Refers to t, Pd, Ru, Rh, Os, and Ir. Preferably, the noble metal element is Au, Pt or Pd. If an element other than a noble metal, such as Cu, is added alone, there is a problem in oxidation resistance and gas resistance. For composition ratio, see A
g is contained in an amount of 95% by weight or more and 99.7% by weight or less, and a noble metal element other than Ag is included in an amount of 0.3% by weight or more and 5% by weight or less. If the amount of the precious metal element is too small, the effect of improving the corrosion resistance is small, while if it is too large, the ratio of the real part and the imaginary part of the complex permittivity of the metal layer becomes small, and the performance as a surface plasmon resonance sensor chip deteriorates. . For example, the peak of the resonance curve becomes broad and the half-width becomes large.
In addition to these metals, if necessary, other metals may be contained in an amount of about 0.3 to 5% by weight. Addition of a rare earth element suppresses the growth of Ag crystal grains during film formation,
This is preferable because it improves the stability of the crystal structure of the film and improves the homogeneity of the film. Particularly preferred is either Nd or Y.

The sensor chip of the present invention can be applied to any diffraction grating type or prism type sensor chip as long as it has a structure having a metal layer on a resin substrate. However, a diffraction grating type sensor chip is preferable. The prism type sensor chip is generally composed of a sensor chip body (a transparent substrate on which a metal layer is laminated) and a prism. The sensor chip is basically disposable, but since the prism is expensive, the measurement cost becomes very high if not only the sensor chip body but also the prism is disposable. Therefore, in this type of sensor chip, the sensor chip body and the prism are generally different,
At the time of use, the prism is brought into close contact with the main body of the sensor chip, light is incident on the prism, and reflected light is detected and measured.

As described above, when the sensor chip body and the prism are separate from each other, in use, matching oil is often sandwiched between the sensor chip body and the prism in order to improve the adhesion. However, it is very difficult to bring the same state into close contact with each other every time, and there is a problem that the degree of close contact varies greatly at each measurement, and therefore the variation of the measured values is large. As an example of this measure, Japanese Patent Laid-Open No. 2000-12
As disclosed in Japanese Patent No. 1551, a method has been proposed in which a standard solution for correction is measured to correct variations in measured values between sensor chips. However, in this case, a new liquid supply system for supplying the standard solution is required, and the sensor chip body also needs a special structure so that the standard solution can be supplied.

On the other hand, the diffraction grating type sensor chip has a structure in which a metal layer is laminated on a transparent substrate having an uneven shape (grating) on the surface. By stacking the metal layer on the uneven shape, the uneven shape appears on the surface of the metal layer, and the uneven shape of the surface of the metal layer functions as a diffraction grating. This type of sensor chip is inexpensive and disposable as it does not use an expensive prism unlike the prism type. Further, unlike the prism type, there is no need to bring the prism and the sensor chip main body into close contact with each other, so that there is an advantage that the reproducibility of measured values is good without a problem such as a variation in the degree of close contact.

Further, in the prism type sensor chip, there are restrictions on the diameter of the beam and the area where the beam can be irradiated due to the structure that the prism is used as the path of the incident light and the reflected light. There is no such limitation, a large-diameter beam can be used, and the beam can be irradiated to any position. Therefore, the diffraction grating type has an advantage that a large area can be inspected at once and an arbitrary position on the sensor chip can be inspected as compared with the prism type.

Today, in order to speed up the analysis process, multi-item measurement is performed in which a large number of measurement points (spots) are measured on one sensor chip, and moreover, simultaneous measurement is performed for all spots. Measurement is demanded, but even in view of such demand, it is possible to inspect a large area at once, and it is also useful to use a diffraction grating type sensor chip that can inspect any position on the metal surface. The nature is high.

As a method for producing a diffraction grating type sensor chip, there are a method using a 2P method using an ultraviolet curable resin as a substrate material and a method using a thermoplastic resin. In the former method, a stamper having a desired diffraction grating pattern and a pattern with a concavo-convex reverse (negative image) is created, and an ultraviolet curable resin is evenly applied on a transparent support base (glass or plastic), and then it is applied. The stamper is pressure-bonded and the transparent support base side is irradiated with ultraviolet rays. When the stamper is peeled off after the ultraviolet curable resin is cured, a substrate with an ultraviolet curable resin layer having a desired diffraction grating pattern is obtained. Further, a thin metal film is formed thereon by vapor deposition or sputtering. A sensor chip is obtained by processing this so as to match the size of the detection device. However, the acrylic UV-curable resin and the polyester UV-curable resin, which are typical UV-curable resins, generally have insufficient adhesion to the metal film. As a measure against this, instead of forming a metal film directly on the ultraviolet curable resin, form an intermediate layer made of a material with good adhesion such as chromium between them, or prepare a middle layer to improve the adhesion. It is possible that However, this may deteriorate the surface properties of the chip and increase the cost.

On the other hand, since the thermoplastic resin is generally superior in adhesiveness to the metal film as compared with the conventional ultraviolet-curing resin, it is possible to sandwich the chrome layer or to perform the pretreatment for improving the adhesiveness. The metal layers mentioned above can be laminated directly. Therefore, the surface property of the chip is good, and a good surface plasmon resonance signal can be obtained. Further, it can be manufactured at low cost without increasing the number of steps during manufacturing. Further, by using a thermoplastic resin, it is possible to obtain a large number of surface plasmon resonance sensor chips each having a diffraction grating formed on the surface in a short time by various molding methods such as injection molding method using a stamper, pressure bonding method, and transfer method. You can For a substrate made of thermoplastic resin, once the precise mold and stamper are made, the pattern arrangement and the thickness of the substrate can be controlled accurately, so not only the position of the diffraction grating is accurate, but also on the substrate surface. Since no inclination occurs, the sample analysis method using such a sensor chip enables more accurate analysis.

Further, in the substrate using the thermoplastic resin, since the diffraction grating is formed on the substrate itself, there is no interface between the support base and the UV-curable resin layer as in the 2P method, and therefore, there is no impact due to impact or the like. It is possible to obtain a surface plasmon resonance sensor chip which is free from peeling and is more excellent in impact resistance and environment resistance.

The thermoplastic resin used for the substrate may be of any type as long as it can transfer the diffraction grating pattern to the surface, and examples thereof include polycarbonate resin, acrylic resin, polystyrene resin, vinyl chloride resin, epoxy resin and polyester resin. , Amorphous polyolefin and the like can be used. Polycarbonate resin has low hygroscopicity, excellent dimensional stability, good adhesion to the metal film on the surface, and is widely used in various optical parts, so it has higher quality than other resins. It is desirable because it can be obtained at a low price.

Preferably, the SPR chip substrate is manufactured by injection molding a thermoplastic resin. That is, a transparent plastic substrate having a diffraction grating pattern on its surface is formed by injection molding using a stamper having a desired diffraction grating pattern and a concavo-convex pattern (negative image).
A metal film is formed thereon to form an SPR chip. According to this, it is possible to obtain a chip having particularly excellent dimensional stability, that is, a difference in size between individual chips is very small and having excellent characteristics. Therefore, a plurality of chips, for example 400 (400
Even if the chip has a minute resonance region of a cell or more, there is an advantage that an excellent chip that can obtain a good SPR signal from each resonance region can be manufactured. Furthermore,
There is also an advantage that many chips can be manufactured in a short time at low cost.

Next, a method of manufacturing the sensor chip of the present invention will be described in detail. First, according to a conventional method, a stamper having a desired diffraction grating pattern and a pattern of concavo-convex reverse (negative image) is prepared. For example, after applying a photoresist on a glass substrate, it is exposed to laser light and developed to form a predetermined uneven pattern, and using this as a master, a diffraction grating stamper made of metal such as nickel is produced by sputtering, plating, etc. .

Next, injection molding of a thermoplastic resin is carried out based on this stamper. The injection molding conditions will be described in detail. Although the conditions vary depending on the properties of each resin, the polycarbonate resin is as follows as an example. The injection molding machine used includes a stamper and a mold (movable side,
Any device can be used as long as it can transfer the shape of the stamper to the molded product by using the (fixed side), and a device generally used for optical disks can be used in terms of flatness and transfer accuracy. Since the uneven shape to be formed on the surface of the chip is extremely fine, the mold temperature is 125 to 130 degrees on both the movable side and the fixed side, and the resin temperature is 360 to 390.
It is desirable that the mold clamping thickness is 30 to 70 tons.

The shape of the molded piece obtained by injection molding may be molded to the size of the chip substrate from the beginning,
It may be molded to be larger than the chip, and may be punched by a method using a cutter, ultrasonic waves, heat or the like after the molding or after the metal film is formed. The thickness of the molded piece (substrate) may be any thickness as long as it can be attached to the surface plasmon resonance measuring device as an SPR chip, and may be designed according to the measuring device used, but the flatness and the injection molding speed are ensured. Considering the above, a thickness of 0.4 to 3 mm is desirable.

After molding, a metal layer is formed on the surface of the molded piece (substrate). The metal layer is formed by a vapor deposition method, a sputtering method, an ion plating method, or the like. The metal material is as described above. A first intermediate layer may be provided between the metal layer and the substrate for the purpose of further improving the adhesion between the layers or for the purpose of increasing the reflectance or the intensity of the resonance peak.

The thickness of the metal layer is preferably 40 nm or more, more preferably 70 nm or more for the purpose of making the thickness of the formed film uniform and reducing the transmission of light to the substrate resin. is there. Further, even if the thickness is further increased, the refractive index of the metal layer hardly changes and the contribution to the SPR resonance curve is small.
The following is preferable, and 200 nm or less is more preferable.

If necessary, a substance (ligand that specifically binds to the substance to be detected on the surface of the chip directly on the metal layer or via the second intermediate layer for enhancing the adhesiveness and stability (ligand) ) Is attached. The attachment of the ligand is performed using a spotter or the like in the form of spots having a diameter of several tens to several hundreds of μm. An example of the SPR measuring method by the measuring device using the SPR chip according to the present invention will be described.

A ligand is uniformly attached to a predetermined position on the diffraction grating, and the SPR resonance curve in that state is measured.
There are a method of changing the wavelength of the incident light and a case of changing the angle of the incident light. Below, a case of changing the angle of the incident light will be described. The surface plasmon resonance (SPR) occurs, the intensity of the diffracted light from the diffraction grating decreases, and the incident light angle at the position where the intensity decreases to the maximum is called the “resonance angle”. When an incident light angle-intensity curve (hereinafter referred to as "resonance curve") is drawn before and after the resonance angle, peaks occur around the resonance angle, and the deeper the peak depth and the narrower the half width, the better the detection. It is supposed to be done.

First, a resonance curve is drawn in the state of only the ligand to obtain the resonance angle. Then, water, a buffer, a solvent, etc. containing the substance to be detected are brought into contact therewith to bond with the ligand on the chip. When the resonance curve is taken after that, when the ligand and the detection species bind, the phenomenon that the resonance angle shifts is seen, and the binding occurred depending on the presence or absence of the deviation, and the amount of the detection species bound depending on the amount of the deviation. be able to.

In the case of multipoint simultaneous measurement, a large number of detection spots are arranged in the spot of incident light to diffract the diffracted light.
It is possible to detect several tens to several hundreds of spots at the same time by dividing and detecting with a camera. As the performance required for the chip, the peak of the resonance curve at each spot is sharp and the intensity is large, that is, the sensitivity to the deviation of the resonance angle is good, and when divided into multiple points, The small variation in sensitivity can be raised. The resonance curve becomes a curve similar to the Gaussian distribution as shown in FIG. In the figure, the (maximum) signal amplitude is A, and the angle at which the amplitude A is obtained is the resonance angle θmax (deg)
And the width of the region where the signal value is A / e is the half width σ (de
g). Generally, the smaller the half-value width σ and the larger the amplitude A, the higher the angular resolution, which is preferable. Since an actual resonance curve does not necessarily have a Gaussian distribution, curve fitting is performed using a Gaussian function to approximate the Gaussian curve to obtain the amplitude A and the resonance angle θmax.
(Deg) and half-width σ (deg) are obtained.

In order to evaluate the characteristics of such a chip, it is possible to obtain a certain index by taking only the resonance curve in the state where the ligand is not attached. In that case, in order to make the refractive indexes of the substances in contact with the chip surface uniform, it is possible to make a good evaluation if the water is kept at a constant temperature while being brought into contact with the chip surface.

[0030]

EXAMPLES The present invention will be described in detail with reference to examples. However, the present invention is not limited to the following examples unless it exceeds the gist. [Production of Sensor Chip] Polycarbonate resin was used for injection molding. The mold has a diameter of 130 mm and a thickness of 1.2
A molding die capable of molding a mm disk was used. The stamper has a disk shape with a diameter of 130 mm and has a hole with a diameter of 35.4 mm at the center.
Pitch 0.8 μm, length 25 m in the range of × 25 mm
A diffraction grating pattern formed of parallel grooves having a depth of m and a depth of 40 nm was used.

The injection molding conditions are fixed mold temperature 127-
128 ℃, movable mold (stamper attached) temperature 12
It was 5 degreeC and the resin temperature was 360-370 degreeC. The compression pressure was 140 kgf / cm ^{2 at the} maximum, the pressure holding time was 1 second, the cooling time was 10 seconds, and the injection speed was 105 mm / sec. By this molding, a polycarbonate disc having the above diffraction grating pattern was obtained on a transparent substrate having a diameter of 130 mm and a thickness of 1.2 mm.

Next, on the side of the disk having the diffraction grating pattern, the ultimate vacuum: 2.0 × 10 ⁻³ Pa or less, sputtering gas: Ar, gas pressure: 0.45 to 0.55 Pa, voltage 405 to 445 V. , Current value 0.8A, film formation time 3-4
Under a condition of 1 minute, the metal layers shown in Table 1 were each subjected to DC magnetron sputtering to have a film thickness of 100 nm to 1
It was formed to have a thickness of 10 nm. From the disk with the metal layer formed in this way, 25 mm x 25 m including the diffraction grating
The portion of m was cut out and used as a sensor chip.

[0033]

[Table 1]

[Measurement of full width at half maximum of resonance curve] The above chip was attached to a surface plasmon resonance measuring device (manufactured by HTS) via a silicon gasket around the measurement region of the chip. Laser light with a wavelength of 876 nm is about 10 mm in diameter, with water at 30 ° C uniformly contacting the chip surface.
Irradiate in spot form. A resonance curve was obtained by measuring the intensity of the diffracted light while scanning the incident angle of the laser light near the resonance angle. Table 1 shows the evaluation results of the full width at half maximum of the resonance curve. The smaller the full width at half maximum is, the more sensitive the resonance angle shift is to sensitivity, which is desirable, and a value of 0.6 or less is suitable for analysis.

[Salt Water Test] Next, the corrosion resistance of this sensor chip was evaluated. The sensor chip having the metal film shown in Table 1 formed on the surface was immersed in a 5% NaCl aqueous solution for 12 hours. It was taken out, washed with tap water, dried, and then the surface was observed. Table 1 shows the evaluation results of the corrosion resistance by the salt water test. ○: No corrosion, no peeling of the film was observed, △: No corrosion, but the film was partially peeled, ×: Corrosion occurred and the metal film was peeled from the substrate Is. [Comprehensive judgment] Table-1 shows the result of the comprehensive judgment. A chip having a resonance curve with a half width of 0.6 or less and a salt water test of Δ or more is regarded as a chip that can withstand actual use.

[0036]

As described above, according to the present invention, it is possible to provide a surface plasmon resonance sensor chip capable of performing highly accurate analysis at low cost and having high corrosion resistance. Further, according to the sample analysis method using this, it is possible to perform highly accurate analysis, and it is possible to obtain a uniform SPR curve without variations even in the case of multipoint simultaneous measurement.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a resonance curve measured by a surface plasmon resonance device.

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Claims (7)

[Claims] 1. An optical prism or a diffraction grating and a metal layer are provided in the vicinity of a sensor surface in contact with a sample, and a surface plasmon wave induced on the surface of the metal layer by irradiation of light and the optical prism or diffraction. A surface plasmon resonance sensor chip in which a resonance region in which a resonance phenomenon with an evanescent wave caused by the action of a lattice can occur is formed on the sensor surface, wherein the chip is formed by forming the metal layer on a resin substrate,
The metal layer contains Ag in an amount of 95 wt% or more and 99.7 wt% or less, and a noble metal element other than Ag in an amount of 0.3 wt% or more and 5 wt% or less.
A surface plasmon resonance sensor chip comprising: 2. The surface plasmon resonance sensor chip according to claim 1, wherein the noble metal element is any one of Au, Pt and Pd. 3. The chip has the metal layer formed on a resin substrate on which a diffraction grating is formed, and the action of the surface plasmon wave induced on the surface of the metal layer by light irradiation and the action of the diffraction grating. The surface plasmon resonance sensor chip according to claim 1 or 2, wherein a resonance region in which a resonance phenomenon with an evanescent wave caused by is generated is formed on the sensor surface. 4. The substrate according to claim 1, which is made of a thermoplastic resin.
4. A surface plasmon resonance sensor chip according to any one of 3 to 3. 5. An analysis method for quantitatively and / or qualitatively analyzing a sample using the surface plasmon resonance sensor chip according to claim 1. The step of bringing the sample into contact with the sample, the step of irradiating the sample with irradiation light so as to illuminate the resonance region, the step of detecting the reflected light from the surface plasmon resonance sensor chip, and the step of measuring the sample based on the intensity of the detected reflected light. And a step of performing a quantitative and / or qualitative analysis. 6. The analysis method according to claim 5, wherein the chip is formed with a plurality of resonance regions, the step of bringing the sample into contact with the sensor surface, and illuminating the whole of the plurality of resonance regions. Irradiating light as described above, detecting reflected light from the surface plasmon resonance sensor chip, extracting reflected light from each resonance region from the detected reflected light, and extracting from each resonance region And a step of quantitatively and / or qualitatively analyzing the sample based on the intensity of the reflected light. 7. The analysis method according to claim 5, wherein a binding substance that specifically binds to the detection species in the sample is immobilized on the sensor surface so as to cover the resonance region. , Contacting the sample with the sensor surface, irradiating irradiation light so as to illuminate the resonance region, detecting reflected light from the surface plasmon resonance sensor chip, and detecting reflected light An analysis comprising: a step of extracting reflected light from the resonance region; and a step of performing a quantitative and / or qualitative analysis of the sample based on the intensity of the reflected light extracted from each resonance region. Method.