JP2003242921A - Minute object moving method, and observation method and observation device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To continuously remove a plurality of minute objects on an observed surface of a specimen. <P>SOLUTION: An electron optical lens barrel 3 is mounted on an upper end part of a specimen chamber 2, and electron beam EB is irradiated on an observed surface S1 of a specimen S put on a driving stage 4. An extraction probe 11 and an exfoliation probe 10 are arranged in the upper part of the observed surface S1 of a specimen S. In the case that a plurality of minute objects are stuck on the observed surface S1, the plurality of minute objects are made to continuously stick to the extraction probe 11 and taken out by dint of a Coulomb attraction between the object and the extraction probe 11 to which, a positive electric potential is impressed, and a Coulomb repulsion between the object and the exfoliation probe 10 to which, a negative electric potential is impressed. The extraction probe 11 to which, the plurality of minute objects are stuck, is moved to another place in a state of being impressed with the positive electric potential, and the plurality of minute objects are dropped in a lump by switching to a negative electric potential after moving the extraction probe 11 to another place. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a minute object moving method for moving a minute object on an observed surface of a sample when observing the observed surface.

The present invention also relates to an observing method using the minute object moving method.

Furthermore, the present invention relates to an observing apparatus for carrying out the observing method.

[0004]

2. Description of the Related Art In an electron microscope such as a scanning electron microscope, a sample to be observed is placed in the electron microscope, and the surface to be observed of the sample is irradiated with an electron beam to detect the observed image. Is observed.

When observing a sample using such an electron microscope, a microscopic object made of an organic substance or the like may adhere to the surface to be observed of the sample. In such a case, the microscopic object exists. Therefore, this minute object is unnecessarily reflected in the observation image corresponding to the surface to be observed, which causes a problem when observing the observation image.

With respect to such improvements, Japanese Patent Laid-Open No.
Japanese Patent No. 115971 (hereinafter referred to as "publication") discloses an electron microscope equipped with a mechanism for extracting a minute object from a sample.

The above publication will be briefly described below.

In this publication, a manipulator having an operating needle is provided in a sample chamber of a scanning electron microscope, and the operating needle is moved by the operation of the manipulator to remove a minute object from a sample surface arranged in the sample chamber. It is shown.

More specifically, the sample is irradiated with an electron beam (electron beam), and the secondary electron image thereof is observed to confirm a minute object adhered to the sample surface. Then, operate the manipulator to bring the operating needle closer to the minute object on the sample surface,
A force (external force) is applied to the minute object by the operating needle through the operation mechanism of the manipulator, and the minute object is taken out from the sample surface. At that time, the operating needle is charged to a positive potential (positive potential), and the minute object which is irradiated with the electron beam and charged to a negative potential (negative potential) is attached to the tip of the operating needle and taken out. Then, the operation needle to which the minute object is attached is moved to another place, the operation needle is charged to a negative potential, and the minute object is irradiated with an electron beam to drop the minute object.

[0010]

Regarding the method and means for removing minute objects on the surface of the sample placed in the electron microscope, the methods disclosed in the above publications and the like are conceivable, but they are disclosed in the publication. The method did not take into account the point of removing multiple small objects continuously.

That is, since there is only a description of a method and means for extracting and removing one (single) minute object, when there are a plurality of minute objects on the surface of the sample, it is described in the publication. When the method described above is used, it is necessary to move the operation needle every time when the minute object is attached to the operating needle and is extracted, to move to the place where the attached minute object is dropped, and to drop the attached minute object.

If such a method is used, the operating needle has to be moved to the place where it is dropped for each minute object to be removed, and the entire minute object removing process takes time, which is not efficient. It was

The present invention has been made in view of the above points, and a method of moving a minute object capable of continuously removing a plurality of minute objects on a sample in an observation apparatus such as an electron microscope, and the like. It is an object of the present invention to provide an observation method and an observation device using the.

[0014]

A method for moving a minute object based on the present invention comprises: irradiating a first minute object on a sample with an electron beam to negatively charge the first minute object; The step of moving the probe to the first minute object, the step of moving the second probe to the first minute object, the step of applying a positive potential to the first probe, By the step of applying a negative potential to the second probe and the Coulomb attractive force with the first probe and the Coulomb repulsive force with the second probe,
A step of moving the first minute object to attach the first minute object to the first probe.

Further, another micro object moving method based on the present invention comprises the step of irradiating the first micro object on the sample with an electron beam to negatively charge the first micro object, and the first micro object. A step of arranging a first probe and a second probe to face each other with a minute object sandwiched therebetween, and a positive potential applied to the first probe and applied to the second probe. The Coulomb attractive force with the first probe and the Coulomb repulsive force with the second probe caused by the negative potential generated cause the first minute object to move and be attached to the first probe. Characterize.

Further, in the observation method according to the present invention, the step of irradiating the first minute object on the sample with the electron beam to negatively charge the first minute object, and the first probe with the first probe 1
The step of approaching the minute object of
To approach the minute object, a step of applying a positive potential to the first probe, a step of applying a negative potential to the second probe, a Coulomb attractive force with the first probe, Coulomb repulsive force with the second probe moves the first micro object to attach it to the first probe, thereby moving the first micro object from the surface to be observed of the sample. And a step of irradiating an observation surface of the sample with an electron beam to observe the observation surface.

The observation apparatus according to the present invention is provided with a mounting table for mounting a sample, an electron beam irradiation means for irradiating an observed surface of the sample with an electron beam, and an electron beam. A means for detecting an observation image of the surface to be observed in response to the surface to be observed of the sample, and a micro-object that is accessible to a minute object located on the surface to be observed of the sample and is capable of applying a positive potential No. 1 probe, a first voltage applying unit for applying a voltage to the first probe, and a micro object located on the observed surface of the sample, and
It is characterized by comprising a second probe to which a negative potential can be applied and a second voltage applying means for applying a voltage to the second probe.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a schematic configuration diagram showing an observation apparatus according to the present invention. In the figure, the observation apparatus 1 is a scanning electron microscope, and has a sample chamber 2 in which a sample S, which is an object to be observed, is arranged. An electron optical lens barrel 3 for supplying an electron beam EB is provided at one end (upper end) of the sample chamber 2, and a sample S is mounted at the other end (lower end). A drive stage (mounting table) 4 for placing and supporting it is provided. Electron optical lens barrel 3
The electron beam EB generated from the electron gun 3a therein is irradiated onto the surface S1 to be observed corresponding to the upper surface of the sample S on the drive stage 4 via the focusing lens 3b, the deflection coil 3c, and the objective lens 34c. To be scanned. Here, the electron gun 3a, the focusing lens b, the deflection coil c, the objective lens d, and the like constitute an electron beam irradiation means. The interior of the sample chamber 2 and the electron optical lens barrel 3 is configured to be evacuated to a predetermined degree of vacuum by exhaust means (not shown).

Secondary electrons or reflected electrons which are detected electrons are generated from the observed surface S1 of the sample S which is irradiated and scanned with the electron beam EB, and the detected electrons are detected by the detector 5. . After detecting the detected electrons, the detector 5 sends the detection result as detection data to the amplifier 6, and the detection data is amplified by the amplifier 6 and sent to the bus line 7.

An image processing unit 8 is connected to the bus line 7, and the amplified detection data described above is sent to the image processing unit 8 via the bus line 7. The image processing unit 8 performs image processing on the received detection data and forms observation image data according to the detection data. Therefore, in response to the observed surface S1 of the sample S irradiated with the electron beam EB,
An observation image of the observed surface S1 is detected.

Observation image data created by image processing in the image processing unit 8 is sent to the image display unit 9 and displayed as an observation image.

Above the drive stage 4 in the sample chamber 2, a peeling probe (second probe) 10 and an extracting probe (first probe) are provided.
Probe) 11 and the two probes 1
0 and 11 are attached to the drive units 12 and 13, respectively. Here, the tip of the stripping probe 10 has a pointed and sharp shape as described later, whereas the tip of the extraction probe 11 is not pointed and a predetermined flat surface portion is formed. Has been done. The drive units 12 and 13 are drive mechanisms for driving the corresponding horizontal movements and vertical movements of the corresponding probes 10 and 11. Each drive unit 1
2 and 13 are connected to the bus line 7 via the corresponding drive control units 14 and 15, respectively. A stage drive control unit 18 is connected to the drive stage 4, and the stage 18 is connected to the bus line 7.

A manual operation unit 19 is connected to the bus line 7, and a manual operation (manual operation) by an operator (observer) through the manual operation unit 19 allows the drive units 12, 13 and the drive stage 4 to be operated. It is configured to control the drive. Therefore, as a result, the positional relationship between the surface S1 to be observed of the sample S and the peeling probe 10 and the extracting probe 11 can be appropriately controlled by a manual operation.

Voltage applying units 16 and 17 are connected to the peeling probe 10 and the extracting probe 11, respectively, and the voltage applying units 16 and 17 are connected to the bus line 7.
As a result, the peeling probe 10 and the extracting probe 11 are
Applied voltages corresponding to the control signals sent from the bus line 7 to the voltage application units 16 and 17 are applied.

A reading circuit 20 is provided on the bus line 7.
A mouse (pointing device) 21 is connected via the mouse, and a manual operation via the mouse 21 can be performed instead of the manual operation via the manual operation unit 19.

Each of the above-mentioned components is appropriately controlled by the system controller 22 connected to the bus line 7, and the system controller 22 is also configured to perform necessary arithmetic operations in each control. .

Next, referring to FIGS. 1 and 2, an observation method including a method for moving a minute object according to the present invention will be described.

The sample S is placed at a predetermined position on the drive stage 4 in the sample chamber 2. At this time, the upper surface of the sample S is the observed surface S1. Then, the inside of the sample chamber 2 and the electron optical lens barrel 3 is evacuated to a predetermined degree of vacuum by exhaust means (not shown). With the interior of the sample chamber 2 and the electron optical lens barrel 3 being evacuated to a predetermined degree of vacuum, the electron beam EB is emitted from the electron gun 3a through the focusing lens 3b, the deflection coil 3c, and the objective lens 3d. The observation surface S1 is irradiated to observe the observation surface S1. At this time, the detector 5 detects the detected electrons from the observed surface S1 of the sample S due to the irradiation of the electron beam EB, and the amplifier 6 amplifies the detection data based on the detection result and sends it to the bus line 7. . The detection data sent to the bus line 7 is image-processed by the image processing unit 8 to create observation image data. The created observation image data is displayed as an observation image on the image display unit 9.

Hereinafter, each step shown in FIGS. 2A to 2H, which will be described later, is performed while the operator visually confirms (observes) the observation image displayed on the image display section 9. When the observation image at the time of the current observation is displayed on the image display unit 9, the observed surface S1 of the sample S is irradiated with the electron beam EB, and the detected electrons from the observed surface S1 are detected. As a result, the observed image is detected in response to the surface S1 to be observed.

Here, when the operator visually observes the observation image displayed on the image display section 9, a plurality of unnecessary minute objects adhering to the observed surface S1 of the sample S may be confirmed. is there. In this case, first, one of the plurality of minute objects (first minute object) 31 [FIG.
(See (A)]. Then, the peeling probe 10 is operated by a manual operation via the manual operation unit 19 so that the tip end portion thereof approaches the first minute object. At this time, the potential applied to the peeling probe 10 is set to zero potential, and the drive unit 12 is controlled by the drive control unit 14 to operate to move the peeling probe 10 appropriately in the horizontal direction and the vertical direction. .

Then, as shown in FIG.
The tip portion of the peeling probe 10 is brought into contact with the first minute object 31 on the surface S1 to be observed, and the peeling probe 10 concerned
The first minute object 31 is hooked on the tip of the peeling probe 10 and peeled by moving the tip of the tip diagonally upward. Here, the tip part of the peeling probe 10 is shown in FIG.
As shown in (A), it is sharply pointed, and a minute object attached to the surface S1 to be observed of the sample S is hooked by the tip portion,
It is configured such that the minute object can be peeled off from the sample S. The peeled first minute object 3
As shown in FIG. 2 (B), reference numeral 1 denotes an observed surface S1 of the sample S.
You are just riding on top. The potential applied to the peeling probe 10 at this time is zero potential.

Next, the peeled first minute object 31 is confirmed by visually observing the operator's observation image, and the manual operation unit 19 is operated.
The extraction probe 11 is operated by manual operation via the, to bring the tip of the extraction probe 11 close to the first minute object 31, as shown in FIG. 2 (C). At this time, the drive unit 13 is controlled and operated via the drive control unit 15 to appropriately move the extraction probe 11 in the horizontal direction and the vertical direction. At the same time, the peeling probe 10 is also brought close to the first minute object 31 by a manual operation. As a result, the extraction probe 11 and the separation probe 10 are arranged to face each other with the first minute object 31 interposed therebetween.

Thereafter, a predetermined positive voltage (positive potential) is applied to the extraction probe 11 by the corresponding voltage application section 17,
Further, a predetermined negative voltage (negative potential) is applied to the peeling probe 10 by the corresponding voltage applying unit 16. In addition, a plurality of flat portions 11a are formed at the tip of the extraction probe 11 as shown in FIG. 2C, and a plurality of minute objects are held on the flat portion 11a as described later. It is configured so that it can be attached.

Here, the electron beam for observing the surface S1 to be observed of the sample S is continuously irradiated to the first minute object, and the first minute object 31 has a predetermined positive potential. When the extraction probe 11 to which is applied and the stripping probe 10 to which a predetermined negative potential is applied are arranged so as to face each other with the first minute object 31 sandwiched therebetween, an electron beam is applied to the negative probe. Charged first minute object 31 and extraction probe 1
1 and the Coulomb attractive force due to the positive potential applied to the extraction probe act on the first micro object 31.
A Coulomb repulsive force due to the negative potential applied to the peeling probe acts between the peeling probe 10 and the peeling probe 10. Therefore, the first minute object 31 moves and moves by the Coulomb attractive force and the Coulomb repulsive force, and as shown in FIG.
The minute object 31 reaches the tip of the extraction probe 11 and is held by the flat surface portion 11a of the tip. As a result, the first minute object adheres to the extraction probe 11,
The extraction of the first minute object is completed.

Next, the operator visually observes the observation image displayed on the image display unit 9, and another minute object (second minute object) 32 (FIG. 2) on the surface S1 to be observed of the sample S is used. (E)
Reference] is specified. Then, similarly to the above-described step, the peeling probe 10 is operated by the manual operation via the manual operation unit 19 to bring the tip end thereof close to the second minute object 32.

Then, as shown in FIG.
The tip of the peeling probe 10 is brought into contact with the second minute object 32 on the surface S1 to be observed, and the peeling probe 10 is further contacted.
The second minute object 32 is hooked on the tip of the peeling probe 10 and peeled by moving the tip of the second diagonally upward. Here, the peeling probe 10 is returned from the state in which the negative potential was applied in the previous step to the state in which the zero potential is applied. The separated second minute object 32 is shown in FIG.
As shown in (F), the sample S is simply placed on the observed surface S1.

Next, the peeled second minute object 32 is confirmed by visually observing the observation image of the operator, and the manual operation section 19 is operated.
The extraction probe 11 is operated by manual operation via the, to bring the tip of the extraction probe 11 closer to the second minute object 32, as shown in FIG. At this time, the extraction probe 11 is continuously applied with the predetermined positive potential applied in the previous step, so that the flat surface portion 11 at the tip portion thereof is applied.
The first minute object 31 extracted in the previous step is attached (held) to a. At the same time, the peeling probe 10 is also manually operated to move the second minute object 3
Get closer to 2. As a result, the extraction probe 11 and the separation probe 10 are arranged to face each other with the second minute object 32 interposed therebetween.

After that, a predetermined negative potential is applied to the peeling probe 10 by switching from zero potential by the corresponding voltage applying section 16.

The extraction probe 11 to which a predetermined positive potential is applied and the peeling probe 10 to which a predetermined negative potential is applied to the second minute object 32 are When they are opposed to each other with being sandwiched therebetween, as in the previous step, the extraction probe 11 is applied between the second minute object 32 that is negatively charged by the electron beam irradiation and the extraction probe 11. Coulomb attraction due to the positive electric potential acts on the second
Between the minute object 32 and the peeling probe 10 of the peeling probe 1
Coulomb repulsion acts due to the negative potential applied to zero. Therefore, the second minute object 32 moves and moves by the Coulomb attractive force and the Coulomb repulsive force, and the first minute object 32 reaches the tip portion of the extraction probe 11 as shown in FIG. It is held by the flat surface portion 11a of the tip portion. As a result, the second minute object is attached to the extraction probe 11, and the extraction of the second minute object is completed. Then, if necessary, another minute object is similarly sequentially attached to the extraction probe 11 to which a predetermined positive potential is applied, so that a plurality of minute objects on the surface S1 to be observed of the sample S are continuously applied. To extract.

Through the steps as described above, the predetermined positive potential is applied while visually observing the observation image of the extraction probe 11 having a plurality of minute objects attached and holding them. It is moved in a state and moved to a place where the minute object is dropped. Then, the voltage application unit 17 is controlled to set the potential applied to the extraction probe 11 to a negative potential. At this time,
The plurality of minute objects attached to the extracting probe 11 are irradiated with the electron beam EB for observation, and the minute objects are negatively charged by the electron beam EB for observation.
The Coulomb repulsive force between the micro object and the micro object causes the micro object to fall apart from the extraction probe 11.

After that, the observation surface S1 of the sample S from which the plurality of minute objects have been removed in this manner is observed while the electron beam EB is continuously irradiated.

As described above, in the embodiment of the present invention, the extraction probe is provided separately from the peeling probe, and a flat surface portion is formed at the tip end portion of the extraction probe and a plurality of flat surface portions are formed. Since the minute objects can be attached and held, a plurality of minute objects on the observed surface of the sample can be continuously extracted. That is, in one probe that is both for peeling and extracting as in the prior art, the tip of the probe needs to have a sharp shape for peeling a minute object. It was difficult to continuously hold and extract a plurality of minute objects with a sharp tip, but in the present invention, a tip having a flat surface is formed in addition to the peeling probe having the sharp tip. Since the extraction probe having the portion is provided, it is possible to easily perform continuous extraction of a minute object, which has been difficult with the prior art. Therefore, it is not necessary to move the probe for each minute object to be removed to the place where the minute object is dropped. Instead, move the probe after a plurality of minute objects are continuously attached to the probe and extracted. As a result, the minute objects are collectively moved to the place where they are dropped, so that the time required for the removal process of the entire minute objects is shortened, which is efficient.

In the above-described embodiment, a function generator having pulse voltage generating means is used as the voltage applying units 16 and 17 for applying a predetermined potential to the peeling probe 10 and the extracting probe 11. be able to. In this case, a pulse potential (pulse voltage) is appropriately applied to the peeling probe 10, and the minute object on the sample is gradually brought closer to the extracting probe 11, and the minute object is attached to the extracting probe. You can

A modified example of this example will be described below with reference to FIGS.

First, the observed surface S1 of the sample S is irradiated with an electron beam and observed to specify the minute object 31 on the observed surface S1. Then, as shown in FIG. 3A, the separation probe 10 and the extraction probe 11 are arranged to face each other with the specified minute object 31 interposed therebetween. At this time,
The peeling probe 11 is arranged near the minute object 31. Thereafter, if necessary, an external force is applied to the minute object 31 by the peeling probe 11 to peel the minute object 31 from the surface S1 to be observed, and the peeling probe 11 is again peeled off from the peeled minute object 31.
Place near the. The potentials applied to the peeling probe 10 and the extracting probe 11 at this time are both set to zero potential.

Then, a predetermined negative potential is applied to the peeling probe 10 and a predetermined positive potential is applied to the extraction probe 11. By doing so, the minute object 31 in the vicinity of the peeling probe 10 is irradiated with the electron beam at the time of observation and is negatively charged, so that the Coulomb attractive force and the Coulomb repulsive force cause a change in the state shown in FIG. As shown, it moves to the extraction probe 11 side.

After that, as shown in FIG. 3C, the potential applied to the peeling probe 10 and the extracting probe 11 is once set to zero, and the position of the moved minute object is confirmed by observation.

Then, again, a predetermined negative potential is applied to the peeling probe 10 and a predetermined positive potential is applied to the extraction probe 11. When the electric potential is applied in this way, the Coulomb attractive force and the Coulomb repulsive force act in the same manner as described above, and FIG.
As shown in (D), the minute object 31 is again extracted with the extraction probe 11.
It moves to the side and adheres to the extraction probe 11.

After that, the potential applied to the peeling probe 10 is returned to zero potential, and the positive potential applied to the extracting probe 11 is continuously applied, and the minute object 31 is held by the extracting probe 11. To be done.

FIG. 4 shows a time chart showing changes in the potential applied to the peeling probe 10 and the potential applied to the extraction probe 11 described above. Sections A to E in the figure correspond to the respective steps of FIGS. 3A to 3E, respectively.

According to the above-described modification, the peeling probe 10 is brought closer to the minute object 31 located far from the extracting probe 11 to easily extract the minute object 31. You can

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing an observation device according to an embodiment of the present invention.

FIG. 2 is a diagram showing each step of the minute object moving method according to the embodiment of the present invention.

FIG. 3 is a diagram showing each step of a minute object moving method according to a modified example of the present invention.

FIG. 4 is a time chart showing changes in applied potential in a modification of the present invention.

[Explanation of symbols]

1 ... Observation device, 2 ... Sample chamber 2, 3 ... Electron gun, 4 ...
Drive stage, 10 ... Stripping probe, 11 ... Extracting probe, EB ... Electron beam, S ... Sample, S1 ... Observed surface

Claims (15)

[Claims] 1. A step of irradiating a first minute object on a sample with an electron beam to negatively charge the first minute object,
A step of bringing a first probe close to the first minute object;
A step of bringing a second probe close to the first minute object;
Applying a positive potential to the first probe, applying a negative potential to the second probe, Coulomb attractive force with the first probe, and Coulomb with the second probe. And a step of moving the first micro object by a repulsive force to attach the first micro object to the first probe. 2. The method for moving a micro object according to claim 1, further comprising the step of applying an external force by the second probe to separate the first micro object from the sample. 3. A step of identifying a second minute object on a sample; a step of irradiating the second minute object with an electron beam to negatively charge the second minute object; A step of bringing the first probe, to which a minute object is attached and a positive potential is applied, close to the second minute object; and a step of bringing the second probe to approach the second minute object. The second
The step of applying a negative potential to the second probe, and the Coulomb repulsive force with the first probe and the Coulomb repulsive force with the second probe move the second minute object to move the first probe. The method for moving a micro object according to claim 1, further comprising: 4. The method for moving a micro object according to claim 3, further comprising the step of applying an external force from the second probe to separate the second micro object from the sample. 5. A step of irradiating a first minute object on the sample with an electron beam to negatively charge the first minute object,
A step of disposing the first probe and the second probe so as to face each other with the first minute object interposed therebetween, and the positive potential applied to the first probe and the second probe. By the Coulomb attractive force with the first probe and the Coulomb repulsive force with the second probe due to the negative potential applied to the probe, the first micro object is moved to the first probe. A method for moving a minute object, characterized in that it is attached. 6. The method for moving a micro object according to claim 5, further comprising the step of applying an external force by the second probe to separate the first micro object from the sample. 7. A step of identifying a second minute object on a sample; a step of irradiating the second minute object with an electron beam to negatively charge the second minute object; The method further comprises the step of disposing the first probe and the second probe so as to face each other with a minute object interposed therebetween, and the positive potential applied to the first probe and the second probe A step of moving the second minute object to attach it to the first probe by a Coulomb attractive force with the first probe and a Coulomb repulsive force with the second probe due to the applied negative potential. Claim 5 which has and
Alternatively, the method for moving a minute object according to item 6. 8. The micro object moving method according to claim 7, further comprising a step of applying an external force by the second probe to separate the second micro object from the sample. 9. The method according to claim 5, wherein a pulse potential is applied to at least one of the first probe and the second probe. 10. A step of irradiating a first minute object on a sample with an electron beam to negatively charge the first minute object, and a step of bringing a first probe close to the first minute object. A step of bringing a second probe closer to the first minute object, a step of applying a positive potential to the first probe, and a step of applying a negative potential to the second probe, By the Coulomb attractive force with the first probe and the Coulomb repulsive force with the second probe, the first micro object is moved to be attached to the first probe, thereby the first micro object. An observation method comprising the steps of moving the observation surface of the sample from the observation surface, and observing the observation surface by irradiating the observation surface of the sample with an electron beam. 11. The observation method according to claim 10, further comprising the step of applying an external force by the second probe to peel the first minute object from the sample. 12. A step of identifying a second minute object on a sample, a step of irradiating the second minute object with an electron beam to negatively charge the second minute object, and the first step. A step of bringing the first probe, to which a minute object is attached and a positive potential is applied, close to the second minute object; and a step of bringing the second probe to approach the second minute object. The step of applying a negative potential to the second probe, and the Coulomb repulsive force with the first probe and the Coulomb repulsive force with the second probe move the second micro object to move the first micro object. 12. The observing method according to claim 10, further comprising the step of adhering the probe to the probe and moving the second minute object from the surface to be observed of the sample. 13. The observation method according to claim 12, further comprising the step of applying an external force by the second probe to separate the second minute object from the sample. 14. A mounting table for mounting a sample, an electron beam irradiation means for irradiating an observed surface of the sample with an electron beam, and a response to the observed surface of the sample irradiated with the electron beam. And means for detecting an observation image of the surface to be observed, a first probe capable of approaching a minute object located on the surface to be observed of the sample and capable of applying a positive potential, and the first probe. A first voltage applying means for applying a voltage to the first probe, and a second probe capable of approaching a minute object located on the surface to be observed of the sample and capable of applying a negative potential. And an observation device including a second voltage applying unit for applying a voltage to the second probe. 15. The first voltage applying means and the second voltage applying means
15. The observation apparatus according to claim 14, wherein at least one of the voltage applying means of claim 1 includes a pulse voltage generating means.