JP2003107130A - Inspection head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection head capable of acquiring quickly a stabilized state of a passing signal by reducing an inductance component, concerning an inspection head for electrically connecting to an inspection tester or the like by being made to abut on an inspection terminal 22 of an inspection device 20. SOLUTION: A through-hole 32 is formed on a wiring board 30, and a contact probe 34 is inserted into the through hole 32, and fixed and electrically connected, and a plunger 34a projecting from the contact probe 34 is allowed to abut on the inspection terminal 22 of the inspection device 20. The distance from the through hole 32 to the inspection terminal 22 is short, and thereby the inductance component can be reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection head which is brought into contact with an inspection terminal of an inspected device and electrically connected to an inspection tester or the like.

[0002]

2. Description of the Related Art An example of a conventional inspection head will be described with reference to FIGS. FIG. 4 is a vertical sectional view of an example of a conventional inspection head. FIG. 5 is a diagram showing a waveform obtained by using a conventional inspection head.

First, referring to FIG. 4, a conventional inspection head has a socket member 10 made of insulating resin or the like, which is 0.8
Or, a large number of through holes 12, 12 ... Are bored at a pitch of 0.5 mm, and contact probes 14, 14 ... With movable ends are inserted into these through holes 12, 12 ,. Fixed. And the socket member 10 in which the contact probes 14, 14 ... Are arranged.
However, the contact electrodes 16 and 1 with a pitch of 0.8 or 0.5 mm
6 are arranged and fixed in a laminated state on the wiring substrate 18. Here, it goes without saying that the contact probes 14, 14 ... Contact the contact electrodes 16, 16.

On the other hand, the device to be inspected 20 is also provided with an inspection terminal 2 such as a solder ball at a pitch of 0.8 or 0.5 mm.
2, 22, ... Are arranged. Then, when the device 20 to be inspected and the socket member 10 are appropriately aligned and relatively brought close to each other, the plungers 14b, 14b ... At the other end of the contact probes 14, 14 ...
Are abutted against each other.

An example of the structure of the contact probe 14 is
Plunger 1 is attached to both ends of tube 14c made of conductive material.
4a and 14b are respectively arranged so as to be movable in the axial direction so as not to come out, and to have abutting portions projected. And the two plungers 1 in the tube 14c
A spring 14d is contracted between 4a and 14b. Two
The end faces of the two plungers 14a and 14b with which the spring 14d abuts are bias-cut, and the plungers 14a and 14b are biased to slidably contact the inner peripheral surface of the tube 14c for electrical connection.

[0006]

In the inspection head having the above-mentioned structure, the contact electrode 16 of the wiring board 18 and the inspection terminal 22 of the device under inspection 20 are electrically connected by the contact probe 14. In this state, the dimension H1 between them is relatively long.

By the way, the contact probe 14 includes not only a resistance component but also an inductance component and a capacitance component as high-frequency electrical characteristics. And
The longer the contact probe 14 is, the larger the inductance component is.

FIG. 5 shows an actual waveform obtained by passing an ideal square pulse waveform through the conventional contact probe 14, and shows rise and fall delays due to the capacitance component and subsequent disturbances such as vibrations due to the inductance component. After, a stable waveform is obtained.

Therefore, there is a problem in the prior art that the inspection cannot be performed at a high speed because the inspection must be performed in a stable state after the disturbance such as the vibration is subsided. Further, when the inspection cannot be performed in a stable state, the obtained waveform includes distortion, and the inspection accuracy is lowered.

The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide an inspection head in which the inductance component is reduced and a stable state can be obtained quickly.

[0011]

In order to achieve the above object, the inspection head of the present invention is provided with a through hole in a wiring board, and a contact probe is inserted and fixed in the through hole and electrically connected to the contact. The plunger protruding from the probe is brought into contact with the inspection terminal of the device under inspection.

Further, it is also possible to dispose restraining plates for preventing the contact probe from coming off on both sides of the wiring board.

A flange is provided on the outer circumference of the tube of the contact probe so that the insertion into the through hole is regulated by the flange, and the contact probe is removed from the surface of the wiring board on the insertion side. A restraining plate for blocking may be arranged.

[0014]

DETAILED DESCRIPTION OF THE INVENTION A first embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a vertical sectional view of a first embodiment of the inspection head of the present invention. In FIG. 1, the same or equivalent members as those in FIG. 4 are designated by the same reference numerals, and duplicate description will be omitted.

In FIG. 1, a wiring board 30 is provided with a large number of through holes 32, 32 ... With a pitch of 0.8 or 0.5 mm. The movable contact probes 32, 32 ... Are press-fitted and fixed into the through holes 32, 32, respectively. Further, an upper holding plate 36 and a lower holding plate 38 for preventing the conductor probes 34, 34 ...
Here, it goes without saying that the plungers 34a, 34a, ... Of the contact probes 34, 34 ... Further, in the wiring board 30, similarly to the conventional wiring board 18 of FIG. 4, the through holes 32, 32 ... Are wired so as to be appropriately electrically connected to an unillustrated tester for inspection.

When the wiring board 30 and the device 20 to be inspected are properly aligned and relatively brought close to each other, the plungers 34a, 34 of the contact probes 34, 34 ...
a is brought into contact with the inspection terminals 22, 22 ,.

In the inspection head having such a structure, the through hole 32 of the wiring board 30 and the inspection terminal 22 of the device under inspection 20 are electrically connected by the contact probe 34, and the dimension H2 therebetween is: Very short compared to conventional devices. As a result, the inductance component is suppressed to be extremely small, the distortion of the waveform passing through the inspection head of the present invention is small, and the time until it stabilizes even if it is disturbed is short. Therefore, the inspection can be performed at a higher speed than in the past, and the inspection can be performed accurately.

Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a vertical sectional view of a second embodiment of the inspection head of the present invention. In FIG. 2, members that are the same as or equivalent to those in FIG. 1 are assigned the same reference numerals and duplicate explanations are omitted.

In the second embodiment shown in FIG. 2, the first embodiment shown in FIG.
Differences from the embodiment are in the following points. The flange 34 is formed on the outer circumference of the tube 34c of the contact probe 34 on the axially proximal end side (the side opposite to the side where the plunger 34a projects).
e is provided. Then, the contact probe 34 is inserted into the through hole 32 of the wiring board 30 from the back surface side with the plunger 34a at the front, and the insertion is restricted by the flange 34e. Then, the lower holding plate 38 is provided on the back surface of the wiring board 30 to prevent the contact probe 34 from coming out to the back surface side.

In the structure of the second embodiment, the wiring board 3
0 on the front side of the upper holding plate 36 as in the first embodiment of FIG.
Is unnecessary, and the dimension H3 between the inspection terminal 22 and the through hole 32 can be set shorter accordingly.

Further, a third embodiment of the present invention will be described with reference to FIG. FIG. 3 is a vertical sectional view of a third embodiment of the inspection head of the present invention. In FIG. 3, FIG. 1 and FIG.
The same or equivalent members will be assigned the same reference numerals and overlapping description will be omitted. .

In the third embodiment shown in FIG. 3, the first embodiment shown in FIG.
Differences from the embodiment are in the following points. A flange 34e is provided on the outer circumference of the tube 34c of the contact probe 34 on the axially front end side (the side on which the plunger 34a projects). Then, in the through hole 32 of the wiring board 30,
The contact probe 34 is inserted from the front surface side, and the insertion is restricted by the flange 34e. Then, the wiring board 30
An upper restraint plate 36 is disposed on the surface of the contact probe 34 to prevent the contact probe 34 from slipping out to the surface side.

In the structure of the third embodiment, the dimension H4 between the inspection terminal 22 and the through hole 32 is almost the same as the structure of the first embodiment. However, the contact probe 34 can be replaced on the front surface side of the wiring board 30, and maintenance management is easy.

In the above embodiment, the contact probe 34 is prevented from coming out of the through hole 32 by the upper restraint plate 36, the lower restraint plate 38, the flange 34e, etc. On the back surface side, the end of the through hole 32 and the base end of the contact probe 34 may be soldered or the like to prevent the removal, and any structure for preventing the removal may be used. Further, the contact probe 34 only needs to be movable at least once, and the structure thereof is not limited to the above embodiment. The pitch at which the contact probes 34 are arranged is not limited to the numerical values of the above-mentioned embodiment, but 1.27 mm, 1.25 mm, 1.0 mm,
Of course, any pitch such as 0.75 mm may be used.

[0025]

Since the inspection head of the present invention is constructed as described above, the following special effects are obtained.

In the inspection head according to claim 1,
The inductance component of the path of the electric signal can be made extremely small, and the signal passing through the inspection head has less distortion. Therefore, the time until the signal becomes stable is short, and the inspection can be performed at high speed, and the inspection can be performed with high accuracy due to the small distortion.

In the inspection head according to claim 2,
Since the pressing plates are provided on both sides of the wiring board, the contact probe does not come out of the through hole. Moreover, both sides of the wiring board can be covered with the restraining plate, and the wiring on the surface can be protected from dust.

In the inspection head according to claim 3,
The contact probe can be replaced on one side of the wiring board and maintenance is easy. Moreover, if the holding plate is provided on the surface on which the wiring is provided, the wiring can be protected from dust.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a first embodiment of an inspection head of the present invention.

FIG. 2 is a vertical sectional view of a second embodiment of the inspection head of the present invention.

FIG. 3 is a vertical sectional view of a third embodiment of the inspection head of the present invention.

FIG. 4 is a vertical cross-sectional view of an example of a conventional inspection head.

FIG. 5 is a diagram showing a waveform obtained by using a conventional inspection head.

[Explanation of symbols] 14,34 contact probe 14a, 14b, 34a Plunger 14c, 34c tubes 18,30 wiring board 20 Inspected device 22 Inspection terminal 32 through holes 34e flange 36 Upper restraint plate 38 Lower restraint plate

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G011 AA16 AB03 AB05 AC06 AC13                       AC32 AE01 AF07                 2G132 AB01 AE30 AF00 AF06 AL09                       AL11                 4M106 BA01 DD03 DD09 DD30

Claims (3)

[Claims] 1. A through hole is provided in a wiring board, a contact probe is inserted and fixed in the through hole and electrically connected, and a plunger protruding from the contact probe is brought into contact with an inspection terminal of a device under inspection. An inspection head characterized by being configured. 2. The inspection head according to claim 1, wherein
An inspection head, characterized in that pressing plates for preventing the contact probe from coming off are provided on both sides of the wiring board. 3. The inspection head according to claim 1, wherein
A flange is provided on the outer circumference of the tube of the contact probe so that the insertion into the through hole is regulated by the flange, and a suppressing plate that prevents the contact probe from coming off is provided on the surface of the wiring board on the insertion side. An inspection head characterized by being arranged.