JP2003074617A - Fluid sealing type vibration isolator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve vibration isolation performance in a fluid sealing type vibration isolator disposed with a movable rubber plate between a pressure receiving chamber and an equilibrium chamber. SOLUTION: The movable rubber plate 86 is provided with a movable plate part 90 with large rigidity formed in its central part and a movable film part 92 with small rigidity formed in its outer circumferential part. An annular outer circumference clamping part 96 having the thickness dimension larger than the movable film part 92 is integrally formed in the outer circumferential edge part of the movable film part 92, while the whole circumferences of the outer circumferential edge part and the outer circumferential clamping part 96 of the movable plate part 90 are clamped into compressed states by retaining parts 72 and 74 respectively and elastically supported. The retaining parts 72 and 74 are provided with pressure receiving chamber side through holes 84 for applying the pressure of the pressure receiving chamber 56 to one surfaces of the movable plate part 90 and the movable film part 92, and equilibrium chamber side through holes 82 for applying the pressure of the equilibrium chamber 58 to the other surfaces of the movable plate part 90 and the movable film part 92.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a fluid filled type vibration damping device capable of exhibiting a vibration damping effect based on a flow action of an incompressible fluid sealed inside, for example, an engine mount or a body mount for an automobile. The present invention relates to a fluid filled type vibration damping device that can be suitably used as

[0002]

2. Description of the Related Art Conventionally, as a vibration-proof connecting body or a vibration-proof supporting body interposed between members constituting a vibration transmission system, a first mounting member attached to one member to be vibration-proof connected, A second mounting member attached to the other member for vibration-proof connection was connected by a main body rubber elastic body, and a part of the wall portion was constituted by the main body rubber elastic body, and an incompressible fluid was enclosed. A variable volume equilibrium chamber in which a non-compressible fluid is enclosed by forming a part of the wall portion with a pressure receiving chamber and a flexible membrane is formed, and the pressure receiving chamber and the equilibrium chamber are communicated with each other through an orifice passage. As a result, the vibration damping effect based on the flow action such as the resonance action of the fluid that is caused to flow through the orifice passage is exhibited against the input vibration between the first attachment metal member and the second attachment metal member. Fluid filled type vibration damping devices are known.

In such a fluid filled type vibration damping device, on the higher frequency side than the tuning frequency of the orifice passage, the orifice passage is caused to flow with a change in the phase difference between the input vibration and the pressure fluctuation of the pressure receiving chamber. Since a high dynamic spring is caused by the anti-resonance action of the fluid, there is a problem that the vibration isolation performance deteriorates in a frequency range higher than the tuning frequency of the orifice passage.

Therefore, in order to improve the vibration isolation performance in a frequency range higher than the tuning frequency range of the orifice passage,
(A) Japanese Patent Application Laid-Open No. 57-9340 and Japanese Utility Model Publication No. 1-149
No. 41, JP-A-1-49731, etc., a movable plate is arranged as a separate member formed separately so as to be movable between the pressure receiving chamber and the equilibrium chamber. A plate type hydraulic pressure absorption mechanism, and (b) JP-A-61-1
65934 and Japanese Patent Laid-Open No. 61-197836,
As described in Japanese Patent Application Laid-Open No. 4-321833, a movable membrane in which an outer peripheral edge portion is constrained is provided with a movable membrane which allows a predetermined amount of elastic deformation between the pressure receiving chamber and the equilibrium chamber. Each type of hydraulic absorption mechanism has been proposed. In these fluid pressure absorption mechanisms, the displacement or movement of the movable plate is based on the relative pressure fluctuations of the pressure-receiving chamber pressure exerted on one surface of the movable plate or the movable membrane and the equilibrium chamber pressure exerted on the other surface. By absorbing and reducing the pressure fluctuation of the pressure receiving chamber by the deformation of the membrane, it is possible to reduce or avoid the high dynamic spring on the higher frequency side than the tuning frequency range of the orifice passage.

However, as a result of the study by the present inventor, it became clear that the adoption of such a hydraulic pressure absorbing mechanism may adversely affect the vibration damping effect exerted by the orifice passage. There was still room for improvement.

That is, if the movable plate type hydraulic pressure absorbing mechanism of the former (a) is adopted, the frequency range where the vibration damping effect based on the resonance action of the fluid flowing in the orifice passage is effectively narrowed easily, When the latter (b) movable membrane type hydraulic pressure absorption mechanism is adopted, the magnitude of the vibration isolation effect (for example, the maximum value of the damping coefficient in the case of the damping effect) based on the resonance action of the fluid flowing in the orifice passage is increased. Since the fact that the liquid pressure is likely to decrease has been clarified, it has been difficult for any hydraulic pressure absorbing mechanism to sufficiently secure the desired vibration damping effect by the orifice passage.

When the latter (b) movable membrane type hydraulic pressure absorption mechanism is adopted, compared with the former (a) movable plate type hydraulic pressure absorption mechanism, the orifice passage It was also clarified that the effect of reducing high dynamic springs tends to be smaller on the higher frequency side than the tuning frequency range.

[0008]

The present invention has been made in view of the circumstances as described above, and a problem to be solved by the present invention is to sufficiently secure a vibration damping effect of an orifice passage while It is an object of the present invention to provide a fluid filled type vibration damping device having a novel structure, which can more effectively suppress the increase of dynamic springs in a frequency range higher than the tuning frequency.

[0009]

Aspects of the present invention made to solve such problems will be described below. The constituent elements used in each of the following aspects can be used in any combination as much as possible. Further, the aspects and technical features of the present invention are not limited to those described below, but are described in the entire specification and the drawings, or the invention idea that can be understood by those skilled in the art from those descriptions. It should be understood that it is recognized based on this.

That is, as a result of many experiments and studies conducted by the present inventor on each of the hydraulic pressure absorbing mechanisms of the movable plate type of (a) and the movable membrane type of (b), as a result of (a) movable plate type In the hydraulic pressure absorption mechanism, the reason why the frequency range in which the vibration damping effect of the orifice passage is effectively exhibited is narrowed is that when the input vibration frequency becomes high, the movable plate moves between the pressure receiving chamber and the equilibrium chamber due to flapping of the movable plate. It is thought that this is due to the fact that a short-circuit fluid flow that circulates around the outer peripheral side of the is generated, while (b) in the movable membrane type hydraulic pressure absorption mechanism, high movement on the higher frequency side than the tuning frequency of the orifice passage It is desirable to soften the spring characteristics of the movable membrane in order to suppress spring formation, but if the movable membrane is easily deformed, the pressure fluctuation in the pressure receiving chamber in the tuning frequency range of the orifice passage Since the amount of fluid flow through the orifice passage is reduced, the anti-vibration characteristics of the orifice passage in the tuning frequency range of the orifice passage conflict with the suppression of high dynamic springs in the higher frequency region. In addition, we have obtained new knowledge that it is considered that it is considered that it is extremely difficult to satisfy both of these characteristics at the same time.

Here, the present invention has been completed based on the newly obtained knowledge as described above, and in a first aspect thereof, a first mounting member and a second mounting member are made of a main body rubber. A pressure receiving chamber that is connected by an elastic body and has a wall part formed of the main rubber elastic body, and causes a pressure fluctuation when a vibration is input between the first mounting member and the second mounting member. A part of the wall portion is formed of a flexible film to form an equilibrium chamber in which the volume change is allowed, and incompressible fluid is enclosed in the pressure-receiving chamber and the equilibrium chamber, while the pressure-receiving chamber and the An orifice passage that connects the equilibrium chambers to each other is provided, and a movable rubber plate is disposed between the pressure receiving chamber and the equilibrium chamber so that the pressure of the pressure receiving chamber is exerted on one surface of the movable rubber plate. , The pressure of the equilibrium chamber is exerted on the other surface of the movable rubber plate, In a fluid filled type vibration damping device adapted to reduce small amplitude pressure fluctuations of the pressure receiving chamber at the time of vibration input based on displacement or deformation of the plate, a movable plate part having a large rigidity at the central portion of the movable rubber plate. In addition, the outer peripheral portion of the movable rubber plate is formed as a movable film portion having low rigidity, and an annular outer peripheral sandwiching portion having a larger thickness dimension than the movable film portion is integrally formed on the outer peripheral edge portion of the movable film portion. On the other hand, a holding portion for holding the movable rubber plate from both sides in the thickness direction is provided on the second mounting member, and the outer peripheral edge portion of the movable plate portion is compressed in the thickness direction by the holding portion over the entire circumference. In the state of being sandwiched and elastically supported, the outer peripheral sandwiching portion is sandwiched in the thickness direction by the holding portion in the thickness direction so as to be fluid-tightly supported, and further, in the movable rubber plate with respect to the holding portion. The movable plate portion and the movable film portion A pressure-receiving chamber-side through hole for exerting the pressure of the pressure-receiving chamber on each one surface, and an equilibrium-chamber-side through hole for exerting the pressure of the equilibrium chamber on the other surface of each of the movable plate portion and the movable film portion, That we have
Characterize.

That is, in this embodiment, the central portion of the movable rubber plate, which tends to have a large elastic deformation amount, is the movable plate portion having high rigidity, and the outer peripheral edge portion of the movable plate portion is elastically supported by the holding portion. By doing so, it is possible to give the movable rubber plate the characteristics of a movable plate. On the other hand, the outer peripheral portion of the movable rubber plate is a movable film portion with low rigidity, and the inner and outer peripheral edge portions of the movable film portion are movable plate portions. By supporting the outer peripheral sandwiching portion with respect to the holding portion, the initial spring characteristics are soft and the elastic deformation amount is suppressed to be small, and a short circuit between the pressure receiving chamber and the equilibrium chamber due to the entrainment of the enclosed fluid is prevented. That is, the movable rubber plate can have such characteristics.

As a result, in the fluid filled type vibration damping device having the structure according to the present embodiment, (i) when the vibration input in the frequency range higher than the tuning frequency of the orifice passage is input, the movable plate portion of the movable rubber plate becomes minute. Displacement and minute deformation of the movable membrane are easily allowed, and pressure fluctuations in the pressure receiving chamber are effectively absorbed, thereby avoiding a significantly high dynamic spring due to an increase in flow resistance of the orifice passage. And good vibration damping effect can be exerted, and on the other hand,
(Ii) When vibration of the orifice passage in the tuning frequency range is input, the displacement amount or deformation amount of the movable plate portion is limited by the large rigidity of the movable plate portion itself, and at the same time, between the movable plate portion and the outer peripheral sandwiching portion. The free length of the movable membrane is reduced and the amount of deformation of the movable membrane is limited. Moreover, the generation of a flow path that wraps around the outer peripheral edge of the movable rubber plate and short-circuits the pressure receiving chamber and the equilibrium chamber is prevented. As a result, pressure fluctuations are efficiently generated in the pressure receiving chamber and a sufficient amount of fluid flow through the orifice passage is ensured.
The intended vibration damping effect of the orifice passage can be effectively exhibited.

Therefore, in the fluid filled type vibration damping device according to the present embodiment, in the low frequency range where the orifice passage is tuned, the vibration damping effect based on the resonance action of the fluid flowing in the orifice passage is spread over a wide frequency range. Not only can it be exerted advantageously over a long period of time, but also a significant increase in dynamic spring in a frequency range higher than the tuning frequency of the orifice passage can be effectively suppressed, resulting in an excellent vibration isolation effect (vibration insulation effect) even in a high frequency range. It can be demonstrated. More specifically, in the fluid filled type vibration damping device having the structure according to the present embodiment, for example, due to the resonance action of the fluid flowing in the orifice passage, the vibration is generated in the shake or a slightly higher frequency range. With respect to low-frequency vibrations such as low-order idling vibrations, the effective vibration damping effect based on the high damping characteristics can be obtained,
It is possible to obtain an excellent vibration insulation effect based on the hydraulic pressure absorption effect of the movable rubber plate, even for high-order idling vibrations that occur in higher frequency ranges and high-frequency vibrations such as low-speed muffled noise. is there.

In the present embodiment, the "movable plate portion having high rigidity" and the "movable film portion having low rigidity" are the movable plate portion and the movable film portion with respect to the relative rigidity difference between the movable plate portion and the movable film portion. It means that the parts have higher rigidity, and the absolute values of the rigidity of the movable plate part and the movable film part are not limited, and in consideration of the anti-vibration characteristics required for the anti-vibration device, etc. It can be set appropriately. Further, the outer peripheral edge portion of the movable plate portion may be elastically supported in a compressed state by the holding portion in a stationary state, and the amount of compression by the holding portion at the outer peripheral edge portion of the movable plate portion is required. It is appropriately set according to the vibration isolation characteristics, etc., and for example, when the movable plate portion is displaced due to the vibration input, the elastic deformation of the movable plate portion causes one of the movable plate portions to move. The amount of compression by the holding portion at the outer peripheral edge of the movable plate portion may be set to such an extent that the surface is separated from the holding portion.

A second aspect of the present invention is the fluid filled type vibration damping device having the structure according to the first aspect,
That the outer peripheral sandwiching portion is supported by a greater sandwiching force in the thickness direction than the outer peripheral edge portion of the movable plate portion,
Characterize. In the fluid filled type vibration damping device having the structure according to the present mode, the pressure receiving chamber generated around the outer peripheral edge portion of the movable rubber plate while advantageously ensuring a minute displacement amount of the movable plate portion. The formation of a short-circuit flow path between the equilibrium and the equilibrium chamber can be prevented more effectively.

A third aspect of the present invention is a fluid filled type vibration damping device having a structure according to the first or second aspect, wherein both sides of a central portion of the movable plate portion are sandwiched in a thickness direction. The holding portion forms a stopper portion that is separated from each other by a predetermined distance and limits the amount of displacement of the movable plate portion by abutting the movable plate portion.
In the fluid filled type vibration damping device having the structure according to the present mode as described above, it is possible to improve the durability of the movable rubber plate and thus the vibration damping device by preventing the movable plate from being excessively displaced or deformed. Can be done.

A fourth aspect of the present invention is a fluid filled type vibration damping device having a structure according to any one of the first to third aspects, wherein the movable rubber plate is made of only a rubber elastic material. At the same time, the thickness of the movable plate portion formed in the central portion of the movable rubber plate is twice or more the thickness of the movable film portion over the entire surface. In the fluid filled type vibration damping device having the structure according to the present embodiment, only the predetermined rubber elastic material is used.
Both the movable plate portion having the movable plate-like characteristics and the movable film portion having the movable film-like characteristics can be advantageously formed.

A fifth aspect of the present invention is the fluid filled type vibration damping device having the structure according to any one of the first to fourth aspects, wherein the movable plate portion is located at the outer peripheral edge portion. ,
It is characterized in that annular elastic pressing projections, which respectively project on both sides in the thickness direction, are integrally formed, and the elastic pressing projections are sandwiched and supported by the holding portion. In the fluid filled type vibration damping device having the structure according to the present embodiment, the elastic tip of the elastic pinching projection is brought into contact with the holding portion to elastically move the outer peripheral edge portion of the movable plate portion by the holding portion. It is possible to easily and stably set various supporting conditions, stabilize the vibration-proof characteristics, and adjust the shape and size of the elastic pinching projections to adjust the movable plate part. It is possible to easily tune the support conditions by the holding portion at the outer peripheral edge portion, and hence the vibration damping characteristics.

A sixth aspect of the present invention is the fluid filled type vibration damping device having the structure according to any one of the first to fifth aspects, wherein the second mounting member is provided with a tubular portion. And the first mounting member is disposed on one opening side of the tubular portion, and the main rubber elastic body that elastically connects the first mounting member to the second mounting member is used for the barrel. The one opening of the tubular portion is fluid-tightly closed, while the other opening of the tubular portion is fluid-tightly closed with the flexible membrane,
Further, a partition member is accommodated in the tubular portion to form the pressure receiving chamber on one side of the partition member, and the equilibrium chamber is formed on the other side of the partition member. The orifice passage is formed in the outer peripheral portion of the partition member, the movable rubber plate is disposed in the central portion of the partition member, and the holding portion is configured to support the movable rubber plate by the partition member. Is characterized. In the fluid filled type vibration damping device having the structure according to the present mode, it is possible to make good use of the partition member forming the orifice passage to form the holding portion for supporting the movable rubber plate. As a result, the intended fluid filled type vibration damping device can be realized with a simple structure and a compact size.

A seventh aspect of the present invention is a fluid filled type vibration damping device having a structure according to any one of the first to sixth aspects, wherein the movable rubber plate is provided on at least one side thereof. Forming a second orifice passage in which a fluid flow is generated due to displacement or deformation of the movable rubber plate, and tuning the second orifice passage to a higher frequency side than the tuning frequency of the orifice passage, Characterize. In the fluid filled type vibration damping device having the structure according to the present embodiment, the fluid flow through the second orifice passage is caused by the deformation or displacement of the movable rubber plate, and the fluid flow is prevented from occurring. On the basis of,
The vibration isolation effect in a frequency range higher than the tuning frequency of the orifice passage can be improved more advantageously.

Therefore, according to the seventh aspect, when the present invention is applied to, for example, an automobile engine mount, the orifice passage is tuned to low-frequency vibration such as shake, while the second orifice is tuned. By tuning the passage to high-frequency vibration such as high-order idling vibration, it is possible to obtain a high damping effect based on the resonance action of the fluid that is made to flow in the orifice passage against shaking, and also to the high-order idling vibration. On the other hand, the vibration isolation effect based on the resonance action of the fluid flowing in the second orifice passage can be obtained more advantageously. In this aspect, the second orifice passage is formed in cooperation with the pressure receiving chamber side through hole and the equilibrium chamber side through hole for exerting pressure on both surfaces of the movable plate portion and the movable film portion of the movable rubber plate. It is desirable that

An eighth aspect of the present invention is a fluid filled type vibration damping device having a structure according to the seventh aspect,
Between the movable rubber plate and the second orifice passage, an intermediate chamber having a predetermined volume, which is made independent of both the pressure receiving chamber and the equilibrium chamber and has a part of the wall portion made of the movable rubber plate. Is formed. In this aspect, by forming the intermediate chamber, for example, the degree of freedom in design regarding the formation position and structure of the second orifice passage can be improved, and the degree of freedom in tuning the vibration damping characteristics can be improved. is there. Wherein, the second orifice passage is, for example, by utilizing a part of the orifice passage by connecting a lengthwise intermediate portion of the orifice passage connecting the pressure receiving chamber and the equilibrium chamber to the intermediate chamber,
It is also possible to form. By thus forming the second orifice passage by using a part of the orifice passage, the second orifice passage can be formed with a simple structure and excellent space efficiency.

[0024]

Embodiments of the present invention will now be described in detail with reference to the drawings in order to more specifically clarify the present invention.

First, FIG. 1 shows an automobile engine mount 10 as a first embodiment of the present invention. In this engine mount 10, a first mounting member 12 as a first mounting member mounted on the power unit side and a second mounting member 14 as a second mounting member mounted on the body side are interposed between them. It is elastically connected by the mounted main body rubber elastic body 16 and is interposed between the power unit and the body so as to support the power unit against vibration.
In addition, in the engine mount 10 of the present embodiment,
In the mounted state, the power unit load is input in the substantially vertical direction in FIG. 1, and an effective vibration damping effect can be exerted against the vibration in the substantially vertical direction in FIG. In addition, in the following description, the vertical direction means the vertical direction in FIG. 1 in principle.

More specifically, the first mounting member 12 has a substantially disc shape, and a mounting bolt 18 projecting upward is fixedly provided at the center thereof. Then, the first mounting bracket 12 is mounted on the power unit side of an automobile (not shown) by the mounting bolts 18.

On the other hand, the second mounting member 14 is a tubular member 20.
And a bottom fitting 22 are included, and the overall shape is a substantially bottomed cylindrical shape. The tubular fitting 20 includes a tubular portion 24 having a large-diameter cylindrical shape as a whole, and an axially upper end portion of the tubular portion 24 is integrally formed with a taper portion 26 that gradually increases in diameter upward. And the tubular portion 24
A step portion 28 that expands radially outward is provided on the peripheral edge of the lower opening.
A cylindrical caulking portion 30 that extends downward in the axial direction from the outer peripheral edge portion of the step portion 28 is integrally formed therewith.

On the other hand, the bottom metal member 22 has a substantially circular shallow dish shape as a whole, and an annular plate-shaped flange portion 31 that expands radially outward is integrally formed at the peripheral edge of the opening. Has been formed. Then, the tubular metal fitting 20 is superposed on the bottom metal fitting 22 from above in the axial direction on the same central axis, and the step portion 28 of the tubular metal fitting 20 is placed on the flange portion 31 of the bottom metal fitting 22. The caulking portion 30 of the tubular metal fitting 20 is caulked and fixed to the flange portion 31 of the bottom metal fitting 22, thereby forming the second mounting metal fitting 14 having a deep bottom and a substantially bottomed cylindrical shape as a whole. There is.

Further, the bottom mounting member 2 is attached to the second mounting member 14.
A through hole 32 is formed in the central portion of the recess in 2, and a mounting bolt 34 is press-fitted and fixed in the through hole 32 so as to project downward. And this mounting bolt 34
Thus, the second mounting member 14 is mounted on the body side of an automobile (not shown).

Further, the second mounting member 14 is provided with a first mounting member 12 facing each other at an opening side thereof, and the first mounting member 12 and the second mounting member 14 are spaced apart from each other.
Are elastically connected by the main rubber elastic body 16. The main rubber elastic body 16 has a substantially frustoconical shape as a whole, and a large-diameter recess 36 opening to the central portion is formed on the large-diameter side end surface thereof. Then, the first mounting member 12 is superposed and vulcanized and bonded to the small-diameter side end surface of the main rubber elastic body 16, and at the same time, to the outer peripheral surface of the large-diameter side end portion of the main rubber elastic body 16. Then, the inner peripheral surface of the taper portion 26 of the tubular metal fitting 20 constituting the second mounting metal fitting 14 is overlapped and vulcanized and adhered, whereby one opening (upward in the axial direction) of the tubular portion 24 is opened. The part is covered in a fluid-tight manner. Further, a seal rubber 38 integrally formed with the main rubber elastic body 16 is attached to the entire inner peripheral surface of the tubular portion 24 of the tubular fitting 20.

A diaphragm 40 as a flexible film is arranged in the other opening (downward in the axial direction) of the tubular portion 24 of the tubular fitting 20. This diaphragm 40
Is formed of a thin rubber film that is easily deformable, and has a thin disk-like shape as a whole, and a substantially ring-shaped fixing metal fitting 42 is vulcanized and adhered to the outer peripheral edge thereof. ing. The central portion of the diaphragm 40 is provided with slack so that it can be easily deformed. The fixing metal fitting 42 is superposed on the step portion 28 of the tubular metal fitting 20, and is caulked and fixed by the caulking portion 30 together with the flange portion 31 of the bottom metal fitting 22. by this,
The fixing member 42 is fixedly assembled to the second mounting member 14, and the other opening (downward in the axial direction) of the tubular portion 24 is fluid-tightly covered by the diaphragm 40. Inside the second mounting bracket 14, the main rubber elastic body 1
A sealed area is formed including the inside of the recess 36 provided in the base plate 6. Then, water, an incompressible fluid such as alkylene glycol, polyalkylene glycol, or silicone oil is enclosed in the sealed area. As such an incompressible fluid, a low-viscosity fluid having a viscosity of 0.1 Pa · s or less is preferably used in order to advantageously obtain a vibration damping effect based on the resonance action of the fluid described later. In addition,
An air chamber 43 that allows elastic deformation of the diaphragm 40 is formed between the diaphragm 40 and the bottom metal member 22.

The second mounting member 14 has a cylindrical portion 2
A partition member 44 having a substantially inverted cup shape is accommodated in the inside of the container 4. The partition member 44 is formed integrally with a hard material such as a synthetic resin or a metal, as shown in FIGS. 2 and 3, with respect to the upper bottom portion 48 of the partition member main body 46 having a substantially inverted cup shape as shown in FIGS. A cover member 50 having a substantially disc shape as shown in FIGS. 5 and 5 is superposed and fixed from above. In addition, the cylindrical wall portion 52 of the partition member main body 46
A flange-shaped fixing piece 54, which slightly extends axially downward from the outer peripheral edge portion and spreads radially outward, is integrally formed in the lower end opening of the. And the partition member 44 is
The cylindrical wall portion 52 of the partition member main body 46 is press-fitted from below in the axial direction with respect to the cylindrical metal member 20 that constitutes the second mounting member 14, and the cylindrical wall member 52 is inserted through the seal rubber 38.
And the fixing piece 54 of the partition member main body 46 is superposed on the step portion 28 of the tubular metal fitting 20, and the bottom metal fitting 2
It is fixedly assembled to the second mounting member 14 by being caulked and fixed by the caulking portion 30 together with the second flange portion 31.

As a result, the sealed area formed inside the second mounting member 14 is divided into upper and lower parts by the partition member 44, so that a part of the wall portion is provided above the partition member 44 as the main body. The pressure receiving chamber 56 is formed of the rubber elastic body 16 and causes a pressure fluctuation due to elastic deformation of the main rubber elastic body 16 at the time of inputting vibration.
On the lower side of 4, a part of the wall portion is composed of the diaphragm 40, and an equilibrium chamber 58 is formed in which the volume change is easily allowed based on the elastic deformation of the diaphragm 40.

The partition member 44 includes the partition member body 4
A circumferential groove 59 that is open to the outer peripheral surface and extends in a substantially spiral shape in the circumferential direction and extends for a length of one round or more is formed on the tubular wall portion 52 of No. 6. The opening on the outer peripheral side of the circumferential groove 59 is fluid-tightly covered by the tubular fitting 20 over the entire length, and one end of the circumferential groove 59 is opened to the upper surface in the axial direction through the communication hole 60. While being connected to the pressure receiving chamber 56, the other end is opened to the lower surface in the axial direction through the communication hole 62 and connected to the equilibrium chamber 58. As a result, the second mounting member 14 extends along the inner peripheral surface of the tubular member 20 in the circumferential direction by a length of less than two rounds, and the pressure receiving chamber 5
An orifice passage 64 is formed which interconnects 6 and the equilibrium chamber 58.

Further, at the center of the upper bottom portion 48 of the partition member body 46, there is a fitting recess 66 which opens upward in the axial direction.
Is formed over the entire size of the upper bottom portion 48, and a lid member 50 having a substantially disc shape is fitted and fixed in the fitting recess 66. Also, these upper bottom 4
8 and the lid member 50 have axially opposing surfaces formed with large-diameter circular housing recesses 68, 70 opening toward the facing surface side, and outer peripheral wall portions of the circular housing recesses 68, 70. Thus, annular holding portions 72 and 74 are formed to face each other in the axial direction with a slight holding gap 76 therebetween.

The circular housing recess 6 in the upper bottom portion 48
8 and the circular accommodating recess 7 in the lid member 50.
The upper and lower wall portions 80 of 0 each have a substantially shallow dish shape with a central portion protruding outward in the axial direction,
The distance between the facing surfaces of the bottom wall portion 78 and the upper bottom wall portion 80 is larger in the central portion than in the outer peripheral portion. Further, the bottom wall portion 78 of the upper bottom portion 48 and the upper bottom wall portion 80 of the lid member 50 are
Equilibrium-chamber-side through-holes and through-holes 82 and 84 are formed as pressure-receiving-chamber-side through-holes that pass through in the plate thickness direction. 58 and the pressure receiving chamber 56 are communicated with each other. In addition, the lid member 50 that allows the circular accommodation recess 70 to communicate with the pressure receiving chamber 56.
The through hole 84 and the through hole 82 of the upper bottom portion 48 that connects the circular accommodation recess 68 to the equilibrium chamber 58 are independent of each other in the central portion and the outer peripheral portion of the bottom wall portion 78 and the upper bottom wall portion 80. It is constituted by a plurality of through holes formed by. Furthermore, the sandwiching gap 76 formed between the opposing surfaces of the annular sandwiching portions 72, 74 has a larger gap size in the outer peripheral portion than in the inner peripheral portion, and the inner peripheral edge portion is radially inward. The circular accommodation recesses 68 and 70 are opened toward the side.

The upper bottom portion 4 of the partition member body 46
A rubber elastic plate 86 is accommodated in the circular accommodating recesses 68 and 70 formed in the cover 8 and the lid member 50, and is arranged so as to spread in the direction perpendicular to the axis. This rubber elastic plate 86 is shown in FIGS.
As also shown in Fig. 1, it is formed by an integrally molded product of a rubber elastic body made only of a known rubber elastic material such as natural rubber selected in consideration of the resistance to the enclosed fluid and the required vibration damping characteristics. The central portion is a thick portion 90 as a movable plate portion having a thick disc shape, and the outer peripheral portion is a thin portion 92 as a movable film portion having a thin annular disc shape. A thin portion 92 is provided so as to project radially outward from the approximate center in the thickness direction on the outer peripheral surface of the thick portion 90. The thick-walled portion 90 and the thin-walled portion 92 are spread over the entire body in a substantially constant thickness dimension in a direction perpendicular to the axis, and the thickness of the thick-walled portion 90 is equal to the thickness of the thin-walled portion 92. It is preferably set to 2 times or more, more preferably 2 to 4 times.

Further, the thick portion 90 has an outer diameter dimension smaller than the inner diameter dimension of the circular accommodation recesses 68, 70 formed in the partition member 44, and preferably the circular accommodation recess 68, 70. The outer diameter of 70 is 60 to 95%, more preferably 70 to 90% of the inner diameter. Further, on the outer peripheral edge of the thick portion 90, elastic ridges 94, 94 as elastic pinching projections projecting toward both sides in the axial direction at predetermined heights are formed in a substantially chevron section over the entire circumference in the circumferential direction. Are integrally formed with an annular shape extending continuously. On the other hand, the outer diameter of the thin portion 92 is larger than the inner diameter of the circular accommodation recesses 68 and 70, and
An annular holding portion 96, which is thicker than the thin portion 92 and protrudes axially on both sides and continuously extends over the entire circumference in the circumferential direction, is integrally formed on the outer peripheral edge portion of the thin portion 92. .

The thickness dimension of the thick wall portion 90 is such that the bottom wall portion 7 is positioned so as to face each other with the circular housing recesses 68 and 70 interposed therebetween.
8 and the distance between the facing surfaces in the central portion of the upper bottom wall portion 80, and the protruding tips of the elastic ridges 94, 94 that are provided on both the front and back sides at the outer peripheral edge of the thick portion 90. The distance between the bottom wall portion 78 and the upper bottom wall portion 80 is larger than the distance between the facing surfaces of the outer peripheral portions of the bottom wall portion 78 and the top bottom wall portion 80. It is brought into contact with the portion 80. As a result, the partition member 44 is subjected to a predetermined compressive force in the thickness direction of the outer peripheral edge portion of the thick portion 90 via the elastic ridges 94, 94.
Is elastically supported by the elastic protrusions 94, in the central portion of the thick wall portion 90 between the opposing surfaces of the bottom wall portion 78 and the upper bottom wall portion 80 under such an arrangement state. Based on the elasticity of 94 and the thick portion 90 itself, elastic displacement or elastic deformation in the axial direction is allowed.

Furthermore, the annular sandwiching portion 96 has a thickness dimension in the axial direction which is defined by the sandwiching gap 7 formed between the sandwiching portions 72 and 74.
It is made larger than the inner dimension of 6 by a predetermined amount, whereby the annular holding portion 96 is elastically supported by the partition member 44 in a state where a predetermined compressive force is exerted in the axial direction. Further, the thickness dimension of the thin wall portion 92 is such that the bottom wall portion 7 is positioned to face each other with the circular housing recesses 68 and 70 interposed therebetween.
8 is sufficiently smaller than the distance between the facing surfaces of the upper bottom wall 80. As a result, the thin-walled portion 92 has its inner and outer peripheral edge portions respectively the outer peripheral edge portion of the thick-walled portion 90 and the annular holding portion 9.
6 is supported by the partition member 44, and thus the thin wall portion 92 is based on its own elasticity.
Axial elastic deformation is allowed between the facing surfaces of the bottom wall portion 78 and the upper bottom wall portion 80.

The outer peripheral portion of the thin portion 92 has a holding portion 7
It may be disposed in an elastically compressed state in the sandwiching gap 76 between the two and 74, or may be disposed in a non-compressed state with a slight gap. Further, the through holes 82, 84 in the bottom wall portion 78 and the upper bottom wall portion 80 that define the circular accommodation recesses 68, 70 are the contact portions of the elastic protrusions 94 in the bottom wall portion 78 and the upper bottom wall portion 80. And the rubber elastic plate 86 is formed independently on the inner peripheral side and the outer peripheral side of the abutting portion of the elastic protrusion 94.
Elastic ridges 94, 94 of the rubber elastic plate 86 are brought into contact with the upper bottom wall portion 80 and the bottom wall portion 78, respectively, and the thick wall portion 90 and the thin wall portion 92 of the rubber elastic plate 86. The pressure of the pressure receiving chamber 56 and the pressure of the equilibrium chamber 58 are applied to the upper and lower surfaces through the through holes 84 and 82 formed in the upper bottom wall portion 80 and the bottom wall portion 78, respectively. Further, a bottom wall portion 78 and an upper bottom wall portion 80 are spaced apart by a predetermined distance on both sides of the rubber elastic plate 86 sandwiched in the thickness direction. The wall portion 80 forms a stopper portion that limits an excessive displacement amount or deformation amount of the thick portion 90.

In the engine mount 10 having the above-described structure, substantially axial vibration is input between the first mounting member 12 and the second mounting member 14 when mounted on the vehicle as described above. Then, the pressure fluctuation is exerted on the pressure receiving chamber 56 due to the elastic deformation of the main rubber elastic body 16, and as a result, based on the pressure difference between the pressure receiving chamber 56 and the equilibrium chamber 58, the pressure between the chambers 56, 58 is increased. A fluid flow is generated in the orifice passage 64 formed over the chamber, and elastic deformation or elastic displacement is generated in the rubber elastic plate 86 arranged between the chambers 56 and 58. It will be tightened.

Here, in this embodiment, the orifice passage is so arranged that the resonance action of the fluid caused to flow through the orifice passage 64 is generated in the low frequency region of about 10 Hz corresponding to engine shake, low-order idling vibration and the like. The passage length, the cross-sectional area, and the like of 64 are tuned. Therefore, an excellent damping effect can be exerted on the input vibration in the low frequency region based on the resonance action of the fluid flowing in the orifice passage 64. Of.

When the vibration in the low frequency range is input, an external force based on the pressure difference between the pressure receiving chamber 56 and the equilibrium chamber 58 is also exerted on the rubber elastic plate 86, but the elastic deformation or elastic displacement of the thick portion 90 is The rigidity of the thick portion 90 itself having a sufficient thickness is suppressed, and the elastic deformation of the thin portion 92 is also free in the radial direction because its inner and outer peripheral edges are substantially constrained by the thick portion 90 and the annular support portion 96. Since the length can be suppressed by being set small, it is possible to prevent the displacement or deformation of the rubber elastic plate 86 that is large enough to absorb the pressure fluctuation of the pressure receiving chamber 56 due to the low frequency vibration having a large amplitude. Therefore, the pressure fluctuation between the pressure receiving chamber 56 and the equilibrium chamber 58 is efficiently generated, and the flow rate of the fluid flowing through the orifice passage 64 is sufficiently secured. Based on the resonance action of the fluid flowing through the road 64, the intended vibration damping effect such as described above is as it can be advantageously exhibited with a large damping coefficient sufficiently.

Moreover, since the rubber elastic plate 86 has its outer peripheral edge portion sealed by the clamping pressure of the annular clamping portion 96, a short circuit between the pressure receiving chamber 56 and the equilibrium chamber 58 which wraps around the outer peripheral side of the rubber elastic plate 86. Since it can be advantageously prevented, the pressure receiving chamber 56 and the equilibrium chamber 58 resulting from the generation of such a short circuit flow path.
It is possible to avoid a decrease in pressure fluctuation between the two, and the vibration isolation effect as described above based on the resonance action of the fluid that flows in the orifice passage 64 becomes more effective and stable over a sufficiently wide frequency range. Can be demonstrated.

On the other hand, when high-order idling vibrations ranging from 15 Hz to several tens of Hz or high-frequency vibrations such as low-speed muffled noise are input, the fluid flow resistance through the orifice passage 64 becomes extremely large due to a change in phase difference or the like. Although the spring constant tends to increase, the pressure fluctuation of the pressure receiving chamber 56 due to the high-frequency vibration having a small amplitude causes the thin portion 92 to be deformed in addition to the displacement or deformation of the thick portion 90 of the rubber elastic plate 86. As a result, the pressure fluctuation of the pressure receiving chamber 56 can be advantageously reduced or eliminated, and the increase of the dynamic spring constant in the high frequency range can be suppressed. Therefore, an excellent vibration damping effect can be exhibited based on the low dynamic spring characteristics.

In this embodiment, when the high frequency vibration is input, the elastic protrusions 94, 94 provided on the outer peripheral edge of the thick portion 90 are brought into contact with the bottom wall portion 78 and the upper bottom wall portion 80. Although the state is maintained, the elastic ridges 94, 94 are formed by the bottom wall portion 78 during vibration input depending on the required vibration isolation characteristics.
The contact force of the bottom wall portion 78 and the upper bottom wall portion 80 with respect to the elastic protrusions 94, 94 may be set to such an extent that they can be separated from the upper bottom wall portion 80.

Further, in this embodiment, the orifice passage 64 is formed in the outer peripheral portion of the partition member 44, and
Since the rubber elastic plate 86 is arranged in the central portion of the partition member 44, the degree of freedom in setting the passage length of the orifice passage 64 can be advantageously ensured, and the arrangement space of the rubber elastic plate 86 can be made more efficient. It is possible to secure it.

Incidentally, FIG. 8 shows, as an example, the result of measuring the frequency characteristic of the vibration isolation performance of the engine mount 10 having the above-mentioned structure. In addition, in such a measurement test, under the condition that a static initial load (1400 N) corresponding to the shared supporting load of the power unit exerted on the engine mount 10 in the mounted state is applied, the first mounting bracket is vibrated by the vibrating means. The oscillating force exerted on the central axis 12 of FIG. 12 was measured by performing a frequency sweep with the amplitude kept substantially constant at 0.05 mm and detecting the vibration state of the second mounting member 14. Further, as a comparative example, the thick portion (9
0) is not provided and the whole is formed as a thin portion (92), so that a conventional movable membrane type rubber elastic plate in which free elastic deformation that is not restricted by the partition member 44 is allowed over the whole is provided. The engine mount having the adopted structure was adopted, and the result of measurement of the same vibration isolation performance as that of the present embodiment was performed on the engine mount as a comparative example.
Also shown in.

As is clear from the measurement results shown in FIG. 8, in the engine mount 10 (embodiment) of this embodiment,
It is recognized that a high damping coefficient is ensured in the low frequency range (8 to 12 Hz) where low-order idling vibrations and engine shakes occur, and high-order idling vibrations and running muffled noises are high. It can be seen that in the frequency range (25 to 35 Hz), high dynamic springs are suppressed and low dynamic spring characteristics are exhibited. On the other hand, in the engine mount of the comparative example, it was confirmed that a sufficiently large damping coefficient was not exhibited in the low frequency range, and that a large dynamic spring was induced in the high frequency range. To be

Next, FIG. 9 shows an engine mount 106 as a second embodiment of the present invention. In the following description, members and parts having the same structure as in the first embodiment will be denoted by the same reference numerals in the drawings as those in the first embodiment, and detailed description thereof will be omitted. To do.

More specifically, a partition metal fitting 108 is fixedly attached to the lower opening of the partition member 44 in the engine mount 106 of this embodiment. The partition fitting 108 has a thin inverted cup shape as a whole, and an annular plate-shaped brim portion 110 spreading radially outward is integrally formed on the peripheral edge portion of the opening. The partition metal fitting 108 is press-fitted into the cylindrical wall portion 52 of the partition member main body 46, and the collar portion 110 is superposed on the lower end surface of the cylindrical wall portion 52, thereby fluidizing the lower opening of the partition member 44. It is fitted and fixed in a tightly closed state.

As a result, in the partition member 44, between the upper bottom portion 48 of the partition member main body 46 and the facing surface of the partition fitting 108, independently of either the pressure receiving chamber 56 or the equilibrium chamber 58,
An intermediate chamber 112 is formed in which an incompressible fluid is enclosed. A plurality of through holes 82 formed in the upper bottom portion 48 are opened in the intermediate chamber 112.

Further, the cylindrical wall portion 52 of the partition member main body 46 which constitutes the peripheral wall portion of the intermediate chamber 112 is provided with a connection hole 114 which is open to the bottom surface of the circumferential groove 59. The longitudinal intermediate portion of the orifice passage 64 is connected to the intermediate chamber 112. This allows
The intermediate chamber 112 includes a connection hole 114 and an orifice passage 64.
Is connected to the equilibrium chamber 58 through a part of the equilibrium chamber 58 side of the intermediate chamber 112 through the communication hole 62. A second orifice passage 116 is formed to allow fluid flow between the equilibration chambers 58.

The second orifice passage 116 is also provided.
Is tuned to a higher frequency range than the orifice passage 64 because it has a passage cross-sectional area substantially the same as the orifice passage 64 and the passage length is set shorter than the orifice passage 64. In form,
The passage of the second orifice passage 116 so that a low dynamic spring effect can be exerted on the higher order idling vibration of 25 to 30 Hz based on the resonance action of the fluid made to flow through the second orifice passage 116. Length, cross-sectional area, etc. are set.

Also in the engine mount 106 having such a structure, by adopting the rubber elastic plate 86 having a specific structure similar to that of the first embodiment, the same effect as that of the first embodiment can be obtained. In addition to this, particularly in the present embodiment, the rubber elastic plate 86 is based on the relative pressure fluctuation caused between the pressure receiving chamber 56 and the equilibrium chamber 58 at the time of vibration input in the high frequency range. Thick part 9
0 and the thin portion 92 are displaced or deformed, whereby the fluid passing through the second orifice passage 116 through the intermediate chamber 112 is accompanied by a relative volume change between the pressure receiving chamber 56 and the equilibrium chamber 58. Since the flow is generated, the low dynamic spring effect based on the resonance action of the fluid that causes the second orifice passage 116 to flow is utilized,
It is possible to obtain a further excellent vibration damping effect against high frequency vibration.

The embodiments of the present invention have been described in detail above, but these are merely examples, and the present invention is
Depending on the specific description in such an embodiment,
It should not be construed as limiting.

For example, the cross-sectional shape of the orifice passage and the second orifice passage, the structure such as the passage length, the tuning frequency, etc., are determined according to the vibration frequency to be isolated.
The values are appropriately set and changed, and are not limited to those in the first and second embodiments.

In the second embodiment, the second orifice passage 116 is formed by utilizing a part of the orifice passage 84. However, the second orifice passage 116 is formed without utilizing a part of the orifice passage, that is, the orifice. It is of course possible to form the second orifice passage in parallel with a passage structure independent of the passage. Furthermore, the second orifice passage 116 may be formed using the through holes 82 and 84 formed in the partition member 44 depending on the required vibration isolation characteristics and the like. Further, the second orifice passage may be formed on the pressure receiving chamber 56 side with respect to the rubber elastic plate 86.

In the first and second embodiments,
The movable rubber plate is made only of rubber elastic material, and the thickness of the central portion is made larger than the thickness of the outer peripheral portion, so that the central portion of the movable rubber plate becomes a highly rigid movable plate portion. Although the thick portion 90 of the movable rubber plate is formed, for example, a reinforcing material such as a plate made of a hard material such as a resin or a metal is fixed to the central portion of the movable rubber plate to dispose the central portion of the movable rubber plate. A movable plate portion having high rigidity may be formed in the portion, and in such a case, it is not necessary to make the central portion having high rigidity thicker than the outer peripheral portion having low rigidity.

Further, in the first and second embodiments, the size and shape of the elastic ridges 94, 94 formed on the thick portion 90 of the rubber elastic plate 86, the protruding size, etc. are required to be the vibration proof. It is appropriately determined according to the characteristics and the like and is not limited in any way. Furthermore, it is not always necessary to provide such elastic ridges 94, 94, and the outer peripheral edge portion of the thick portion 90 is formed on the upper bottom portion 48 of the partition member body 46 and the lid member 50.
Alternatively, it may be directly elastically supported by pinching.
In that case, for example, an annular ridge is formed so as to project from the upper bottom portion 48 and the lid member 50 of the partition member main body 46 to elastically clamp and support the outer peripheral edge portion of the thick portion 90. Is desirable.

In addition, in the above-mentioned embodiment, one specific example of the present invention applied to an engine mount for automobiles is shown. However, in addition to this, the present invention is also applicable to engine mounts of various structures or protections other than engine mounts. The present invention is also applicable to a vibration device, for example, a cylindrical fluid-filled vibration damping device used in an engine mount for an FF type vehicle such as disclosed in JP-A-10-184770.
Of course, the present invention is applicable to not only the body mount and differential mount for automobiles but also the fluid filled type vibration damping device in various devices other than automobiles.

Although not listed one by one, the present invention is
Based on the knowledge of those skilled in the art, it can be implemented in various modified, modified, and improved modes, and
It goes without saying that all such embodiments are included in the scope of the present invention without departing from the spirit of the present invention.

[0064]

As is apparent from the above description, in the fluid filled type vibration damping device having the structure according to the present invention, the movable plate portion having high rigidity is provided in the central portion, and the movable plate portion having low rigidity is provided in the outer peripheral portion. An orifice passage was tuned by adopting a movable rubber plate of a specific structure having a membrane portion, and disposing the movable rubber plate between a pressure receiving chamber and an equilibrium chamber which are communicated with each other by an orifice passage. When inputting low-frequency large-amplitude vibration, the vibration damping effect of the orifice passage can be efficiently exerted over a wide frequency range, and when inputting high-frequency small-amplitude vibration exceeding the tuning frequency of the orifice passage, The increase in the spring constant can be effectively suppressed, and the vibration damping effect due to the low dynamic spring characteristics can be advantageously exhibited.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing an engine mount as a first embodiment of the present invention.

FIG. 2 is a plan view of a partition member main body which constitutes the engine mount shown in FIG.

FIG. 3 is a sectional view taken along line III-III in FIG.

4 is a plan view of a lid member that constitutes the engine mount shown in FIG. 1. FIG.

5 is a sectional view taken along line VV in FIG.

6 is a plan view of a rubber elastic plate forming the engine mount shown in FIG. 1. FIG.

7 is a sectional view taken along line VII-VII in FIG.

8 is a graph showing the frequency dependence of the vibration isolation characteristics of the engine mount shown in FIG.

FIG. 9 is a vertical cross-sectional view showing an engine mount as a second embodiment of the present invention.

[Explanation of symbols]

10 engine mount 12 First mounting bracket 14 Second mounting bracket 16 Rubber elastic body 40 diaphragm 44 Partition member 48 Top bottom 50 Lid member 56 Pressure chamber 58 Equilibrium chamber 64 orifice passage 72 clamping part 74 clamping part 82 through holes 84 through hole 86 rubber elastic plate 90 Thick part 92 Thin part 96 Annular clamping part

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hideki Maebashi             Tokai Rubber Works, Higashi 3-chome, Komaki City, Aichi Prefecture             Business F-term (reference) 3D035 CA05 CA23 CA43                 3J047 AA03 AB01 CA04 CA06 CB06                       DA01 FA02 GA03

Claims (9)

[Claims] 1. The first mounting member and the second mounting member are connected by a main body rubber elastic body, and a part of a wall portion is constituted by the main body rubber elastic body, and the first mounting member and the second mounting member. A pressure-receiving chamber that causes a pressure fluctuation when a vibration is input between the two mounting members, and a balance chamber in which a part of the wall portion is configured by a flexible film to allow a volume change, and these pressure-receiving chambers are received. A non-compressible fluid is sealed in the chamber and the equilibrium chamber, an orifice passage is provided to connect the pressure receiving chamber and the equilibrium chamber to each other, and a movable rubber plate is disposed between the pressure receiving chamber and the equilibrium chamber. , The displacement or deformation of the movable rubber plate is made such that the pressure of the pressure receiving chamber is exerted on one surface of the movable rubber plate and the pressure of the equilibrium chamber is exerted on the other surface of the movable rubber plate. The flow is designed to reduce small-amplitude pressure fluctuations in the pressure receiving chamber during vibration input. In the body-enclosed vibration isolator, the central portion of the movable rubber plate is a movable plate portion with high rigidity, the outer peripheral portion of the movable rubber plate is a movable film portion with low rigidity, and the outer peripheral edge of the movable film portion is further An annular outer peripheral sandwiching portion having a thickness larger than that of the movable film portion is integrally formed on the portion, and a holding portion for holding the movable rubber plate from both sides in the thickness direction is provided on the second mounting member, The outer peripheral edge portion of the movable plate portion is sandwiched by the holding portion in the thickness direction in a compressed state in the thickness direction so as to be elastically supported, and the outer circumferential holding portion is held by the holding portion in the thickness direction over the entire circumference. A pressure-receiving chamber side through hole for sandwiching and supporting in a fluid-tight manner, and for applying a pressure of the pressure-receiving chamber to one surface of each of the movable plate portion and the movable film portion of the movable rubber plate with respect to the holding portion. When,
A fluid filled type vibration damping device, characterized in that equilibrium chamber side through holes for exerting the pressure of the equilibrium chamber are respectively provided on the other surfaces of the movable plate portion and the movable film portion. 2. The fluid filled type vibration damping device according to claim 1, wherein the outer peripheral sandwiching portion is supported by a sandwiching force in a greater thickness direction than the outer peripheral edge portion of the movable plate portion. 3. A stopper portion which is located at a predetermined distance on both sides of the central portion of the movable plate portion in the thickness direction and which limits the amount of displacement of the movable plate portion by abutting the movable plate portion. Is formed by the holding portion.
The fluid filled type vibration damping device according to. 4. The movable rubber plate is formed of only a rubber elastic material, and the thickness of the movable plate portion formed in the central portion of the movable rubber plate is the entire thickness of the movable film portion. The fluid filled type vibration damping device according to any one of claims 1 to 3, wherein the thickness is at least twice as large as the wall thickness dimension. 5. An annular elastic pinch projection, which is located at an outer peripheral edge of the movable plate part and projects on both sides in the thickness direction, is integrally formed, and the elastic pinch projection is sandwiched between the holding parts. The fluid filled type vibration damping device according to any one of claims 1 to 4, which is supported. 6. A tubular portion is provided on the second mounting member,
The first mounting member is disposed on one opening side of the tubular portion, and the tubular rubber portion is elastically connected to the second mounting member by the main body rubber elastic body. While closing one of the openings in a fluid-tight manner, the other opening of the tubular portion is closed in a fluid-tight manner with the flexible membrane, and a partition member is housed and arranged in the tubular portion, The pressure receiving chamber is formed on one side of the partition member, and the equilibrium chamber is formed on the other side of the partition member to form the orifice passage in the outer peripheral portion of the partition member. The fluid-filled protection according to any one of claims 1 to 5, wherein the movable rubber plate is disposed in a central portion of the partition member, and the holding portion configured to support the movable rubber plate by the partition member is formed. Shaking device. 7. A second orifice passage is formed on at least one side of the movable rubber plate so that a fluid flow is generated by displacement or deformation of the movable rubber plate. 7. The fluid filled type vibration damping device according to claim 1, wherein the vibration is tuned to a frequency higher than the tuning frequency of the orifice passage. 8. The movable rubber plate and the second orifice passage are provided so as to be independent of both the pressure receiving chamber and the equilibrium chamber, and a part of a wall portion is formed of the movable rubber plate. The fluid filled type vibration damping device according to claim 7, wherein an intermediate chamber having a predetermined volume is formed. 9. The fluid according to claim 8, wherein the second orifice passage is formed by utilizing a part of the orifice passage by connecting a longitudinal intermediate portion of the orifice passage to the intermediate chamber. Enclosed anti-vibration device.