JP2003068340A - Gas supply apparatus and inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas supply apparatus which humidifies the gas, and has compatibility between follow-up performance and stabilization of the gas temperature control, which has been difficult before. SOLUTION: The temperature of the gas introduced from a gas supply section 3 is adjusted by a first heater 7 and a cooler 8, wherein the first heater 7 is feedforward controlled and the cooler 8 is feedforward and feedback controlled by a controller 55. The temperature controlled gas flow is separated, one flow being fed to a humidifier 22 and humidified. The temperature of the water used in the humidifier 22 is controlled by feedback controlling a water cooler 49 and a water heater 50. Hence, since the cooling is made in addition to the heating, compatibility is obtained between follow-up performance and stabilization of the temperature control, and moreover, the feedforward control further improves the follow-up performance of the temperature control.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas supply device for supplying a gas such as hydrogen gas and an inspection system for inspecting the performance of a fuel cell by supplying the gas.

[0002]

2. Description of the Related Art In recent years, technology development for extracting clean energy has been advanced in place of an internal combustion engine such as an engine, and one of them is a fuel cell. A fuel cell combines hydrogen as a fuel with oxygen in the air to extract electric energy. In the research and development and production of such fuel cells, it is necessary to establish a system for inspecting the performance and the like.

Generally, the performance test of a fuel cell is conducted by supplying hydrogen gas or the like, and in such a test, factors such as temperature and humidity of hydrogen gas are important. In a system for applying a predetermined temperature and humidity to supplied hydrogen gas, a heater and a humidifier are provided in the middle of a flow path for supplying gas from a gas supply source to a fuel cell. ing. Then, in such a system, first, gas is introduced into the flow path from the gas supply source. The introduced gas is heated to the target temperature by the heater, and by the humidifier,
A predetermined humidity is applied to the heated gas. In this way, the heated and humidified gas is supplied to the fuel cell.

[0004]

SUMMARY OF THE INVENTION In the above technology,
In order to improve the followability when increasing the temperature of the supplied gas, the amount of heat generated by the heater is increased to quickly increase the temperature of the gas. However, once the temperature of the gas becomes higher than the target temperature, there is no choice but to lower the temperature by natural heat dissipation. Therefore, the stability at the time of temperature control may be deteriorated.
On the other hand, it is conceivable to gradually increase the amount of heat from the heater and raise the temperature of the gas over time, but in this case, it takes time to reach the target temperature.
That is, the followability when performing temperature control is deteriorated.

Further, even if the temperature of the gas is at the target temperature, the amount of gas supplied may be sharply reduced. In this case, the amount of heat from the heater cannot be quickly reduced only by natural heat dissipation as described above. Therefore, the temperature of the gas cannot be easily maintained at the target temperature, and the temperature control may become unstable as described above. As described above, conventionally, it has been difficult to achieve both the followability and stability of gas temperature control.
As a result, there is a risk of causing a defect that a thorough inspection cannot be performed.

The present invention has been made in view of the above-mentioned problems, and it is a main object of the present invention to provide a gas supply device which can achieve both the followability of gas temperature control, which has been difficult in the past, and the stability. It is one of the purposes. Further, when inspecting the performance of the supply target such as a fuel cell by using gas, it is possible to perform the inspection that was difficult in the past by making temperature control followability and stability of the supplied gas compatible. The main purpose is to provide an inspection system 1
I am sorry.

[0007]

Means for Solving the Problems and Effects Thereof The characteristic means for achieving the above object will be described below. Also,
Characteristic actions and effects of each means will be described as necessary.

Means 1. A gas supply source, a flow path for supplying a gas from the gas supply source to the supply target, a heating means provided in the middle of the flow path, for heating the gas,
A cooling means provided in the middle of the flow path for cooling the gas, a humidification means provided in the middle of the flow path for humidifying the gas, and water used in the humidification means A gas supply device comprising: a water heating means for cooling the water; and a water cooling means for cooling the water used in the humidifying means.

According to the above means 1, the gas introduced into the flow path from the gas supply source is heated by the heating means provided in the middle of the flow path or cooled by the cooling means. Therefore, when increasing the temperature of the gas,
By increasing the amount of heat from the heating means, the temperature of the gas can be raised quickly. Further, at this time, since the gas can be forcibly cooled by the cooling means, it is possible to suppress the situation where the temperature of the gas rises too much. Therefore, the followability can be secured without impairing the stability of temperature control. Further, even when the amount of gas supplied is sharply reduced, it is possible to prevent the temperature from rising due to the amount of heat from the heating unit due to the presence of the cooling unit, and it is possible to maintain the target temperature. Therefore, the stability of temperature control can be improved. Then, the temperature-controlled gas is humidified by the humidifying means. At this time, the temperature of the water used in the humidifying means is adjusted by the water heating means and the water cooling means. Therefore, similar to the case of the temperature of the gas, it is possible to make the followability and stability compatible with each other, and it is also possible to make the followability and stability compatible with the temperature of the gas humidified by the humidifying means.

Means 2. A gas supply source, a flow path for supplying gas from the gas supply source to the supply target, and a branched flow configured to be branched into at least two in the middle of the flow path and to be merged on the downstream side. A passage, a heating means provided in the middle of the flow path before branching, for heating the gas, and a cooling means for cooling the gas provided in the middle of the flow path before branching, A humidifying means for humidifying the gas, which is provided in at least one flow path after branching, a water heating means for heating water used in the humidifying means, and water used in the humidifying means, A gas supply device comprising a water cooling means for cooling.

According to the above means 2, the gas introduced from the gas supply source into the flow path is heated by the heating means provided in the middle of the flow path or cooled by the cooling means. Therefore, when increasing the temperature of the gas,
By increasing the amount of heat from the heating means, the temperature of the gas can be raised quickly. Further, at this time, since the gas can be forcibly cooled by the cooling means, the situation where the temperature of the gas rises too much is suppressed. Therefore, the followability can be secured without impairing the stability of temperature control. Further, even when the amount of gas supplied is sharply reduced, it is possible to prevent the temperature from rising due to the amount of heat from the heating unit due to the presence of the cooling unit, and it is possible to maintain the target temperature. Therefore, the stability of temperature control can be improved. Then, the temperature-controlled gas is introduced into the flow path branched into at least two. In at least one of the branched flow paths, the gas is humidified by the humidifying means. At this time, the temperature of the water used in the humidifying means is adjusted by the water heating means and the water cooling means. Therefore, as in the case of the temperature of the gas, it is possible to make the followability and stability compatible with each other, and also with respect to the temperature of the gas humidified by the humidifying means, by making the followability and stability compatible, The target temperature can be maintained. The gas that does not pass through the humidifying means of the other branch flow passage maintains the temperature and humidity before the diversion. Next, the humidified gas and the non-humidified gas are combined on the downstream side. At this time, the temperature of the gas is maintained at the target temperature, while the humidity of the gas becomes a value between the humidity before the diversion and the humidity humidified by the humidifying means, depending on the distribution amount at the diversion. In addition, in the means 2, “a flow rate adjusting means for adjusting the flow rate of the gas may be provided in at least one of the branch channels”. With this configuration,
The humidity of the gas supplied to the supply target can be adjusted.

Means 3. 3. The gas supply device according to means 2, further comprising heating means for humidified gas, which is provided immediately before the humidifying means in the flow path after the branch and heats the gas humidified by the humidifying means.

According to the above means 3, the humidified gas humidifying means provided immediately before the humidifying means in the flow path after branching heats the divided gas and sends the gas to the humidifying means. Here, when the humidifying means humidifies the heat of the gas as the heat of evaporation of water, there is a concern that the temperature of the gas will be lower than that before the diversion. The temperature of the gas can be prevented from decreasing by supplementing the amount of heat to the gas by the humidifying gas heating means. Therefore, in addition to the temperature control of the humidifying gas by controlling the temperature of the water used in the humidifying means, the followability and stability of the temperature control of the humidifying gas can be further improved.

Means 4. The control means comprises a first temperature detecting means for detecting the temperature of the gas immediately after passing through the humidifying gas heating means, and a control means for feedback controlling the humidifying gas heating means. , The first
The temperature detected by the temperature detecting means, the target temperature of the gas to be supplied to the supply target, the target humidity of the gas to be supplied to the supply target, and the flow rate of the gas to be supplied to the supply target. The gas supply device according to means 3, wherein the heating means for humidifying gas is controlled based on the above.

According to the above means 4, the temperature of the gas immediately after passing through the humidifying gas heating means is detected by the first temperature detecting means, and the temperature detected by the first temperature detecting means is detected. , The humidifying gas heating means is feedback-controlled by the control means based on the target temperature of the gas supplied to the supplied body, the target humidity of the gas supplied to the supplied body, and the flow rate of the gas supplied to the supplied body. To be done. Therefore, the amount of heat absorbed by the humidifying means is appropriately supplemented by the humidifying gas heating means, and the temperature of the gas can be more reliably maintained at the target temperature.

Means 5. A control means for feed-forward controlling the heating means is provided, and the control means includes a target temperature of the gas supplied to the supply target, a flow rate of the gas supplied to the supply target, and a flow path from the gas supply source. 5. The gas supply device according to any one of the means 1 to 4, characterized in that the heating means is controlled based on the temperature of the gas introduced into the.

According to the above-mentioned means 5, the target temperature of the gas supplied to the supplied body, the flow rate of the gas supplied to the supplied body,
The heating means is feedforward controlled by the control means based on the temperature of the gas introduced from the gas supply source to the flow path. Therefore, by following changes in the flow rate and temperature of the gas in advance, the followability of the gas temperature control can be improved.

Means 6. A second temperature detection means for detecting the temperature of the gas immediately before passing through the cooling means, and a control means for feedforward controlling the cooling means are provided, and the control means includes the second temperature. The cooling unit is controlled based on the temperature detected by the detection unit, the target temperature of the gas supplied to the supply target, and the flow rate of the gas supplied to the supply target. 5. The gas supply device according to any one of 5 to 5.

According to the above means 6, the temperature of the gas immediately before passing through the cooling means is detected by the second temperature detecting means, and the temperature detected by the second temperature detecting means and the supply target The cooling means is feedforward controlled by the control means based on the target temperature of the gas supplied to the supply target and the flow rate of the gas supplied to the supply target. Therefore, it is possible to perform cooling in advance corresponding to changes in the gas flow rate and temperature. Therefore, the followability of the gas temperature control can be further improved.

Means 7. A third temperature detecting means for detecting the temperature of the gas immediately after passing through the heating means and the cooling means, and a control means for feedback controlling the cooling means are provided, and the control means comprises: 7. The cooling means is controlled based on the temperature detected by the third temperature detecting means and the target temperature of the gas to be supplied to the supply target, according to any one of 1 to 6 above. Gas supply device.

According to the above means 7, the temperature of the gas immediately after passing through the heating means and the cooling means is detected by the third temperature detecting means, and the temperature detected by the third temperature detecting means is detected. The cooling means is feedback-controlled by the control means based on the target temperature of the gas supplied to the supply target. Therefore, the temperature of the gas can be more reliably maintained at the target temperature.

Means 8. A fourth temperature detecting means for detecting the temperature of the gas immediately after passing through the humidifying means, and a control means for feedback controlling the water heating means and the water cooling means are provided, and the control means comprises: A means for controlling the water heating means and the water cooling means on the basis of the temperature detected by the fourth temperature detecting means and the target temperature of the gas supplied to the supply target; The gas supply device according to any one of claims.

According to the above means 8, the temperature of the gas immediately after passing through the humidifying means is detected by the fourth temperature detecting means, and the temperature detected by the fourth temperature detecting means and the supplied body The water heating unit and the water cooling unit are feedback-controlled by the control unit based on the target temperature of the gas supplied to the unit. Therefore, by appropriately controlling the temperature of the water used by the humidifying means, it is possible to more reliably maintain the temperature of the gas at the target temperature.

Means 9. A fifth temperature detecting means for detecting the temperature of the water immediately after passing through the water heating means and the water cooling means, and a control means for feedback controlling the water heating means and the water cooling means, The control means includes the temperature detected by the fifth temperature detection means, the target temperature of the gas supplied to the supply target, the target humidity of the gas supplied to the supply target, and the supply target. 9. The gas supply apparatus according to any one of 1 to 8, wherein the water heating means and the water cooling means are controlled based on a flow rate of gas supplied to the water supply means.

According to the above means 9, the temperature of the water immediately after passing through the water heating means and the water cooling means is detected by the fifth temperature detecting means, and is detected by the fifth temperature detecting means. The water heating unit and the water cooling unit perform feedback control based on the temperature, the target temperature of the gas supplied to the supply target, the target humidity of the gas supplied to the supply target, and the flow rate of the gas supplied to the supply target. To be done. Therefore, the temperature of the water used in the humidifying means can be adjusted with certainty, and the temperature of the gas can be more reliably maintained at the target temperature.

Means 10. An inspection system for inspecting the performance of the supply target based on supplying gas from the gas supply device according to any one of the means 1 to 9 to the supply target.

According to the above means 10, the inspection system is
By supplying the gas having both the followability of temperature control and the stability from the gas supply device to the supply target, the performance of the supply target by the gas can be inspected.

Means 11. The gas supply source of the gas supply device according to any one of means 1 to 9 is capable of supplying a fuel gas containing hydrogen, and the supply target is a fuel cell, and is supplied from at least the fuel cell. An inspection system characterized by inspecting the performance of a fuel cell based on the electric power supplied.

According to the above means 11, the gas supply device is
A fuel gas containing hydrogen, which is humidified and has a predetermined temperature, can be supplied to the fuel cell. The inspection system can inspect the performance of the fuel cell, which has been difficult in the past, on the basis of the electric power extracted from the fuel cell supplied with the gas by the gas supply device. In addition, the action and effect of each of the above-described means are exhibited in such an inspection.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION First, a schematic configuration of a fuel cell as an object to be inspected in the inspection system of the present embodiment will be described. The fuel cell includes a casing, a pair of electrodes, and an electrolytic solution interposed between the electrodes. In such a fuel cell, humidified hydrogen gas is supplied to one electrode side. On the electrode, hydrogen is decomposed into hydrogen ions and electrons, and the electrons flow to an external circuit. Hydrogen ions move to the other electrode side through the electrolytic solution, and the moved hydrogen ions react with oxygen in the air supplied to the other electrode side and electrons flowing from the external circuit, Produces water. Then, the flow of the electrons is taken out as electric power.

Next, an inspection system (gas supply device 2) for inspecting the fuel cell 1 configured as described above will be described with reference to FIG. The fuel cell 1 is basically supplied with fuel gas (hydrogen gas, air) from a gas supply unit 3 as a gas supply source, and the flow of the fuel gas supplied from the gas supply unit 3 is increased. An on-off valve 6 for opening and closing the flow path 4, a first heater 7 as a heating means for heating the gas, and a cooler 8 as a cooling means for cooling the gas are arranged in the middle of the path 4. The cooler 8 includes an adjusting valve 9 for adjusting the supply amount of the cooling water supplied. Further, the flow path 4 is provided with thermometers 10 and 11 as second and third temperature detecting means for detecting the temperature on the downstream side of the first heater 7 and the downstream side of the cooler 8, respectively. There is.

After passing through the thermometer 11, the flow path 4 is branched into two flow paths 16 and 17. A first control valve 18 for adjusting the flow rate is arranged in one of the branched flow paths 16, and a second control valve 18 is provided in the other flow path 17 as a humidified gas heating means for heating the divided gas. A heater 19, a thermometer 20 as a first temperature detecting means for detecting the temperature after heating, an opening / closing valve 21 for opening / closing the flow path 17, a humidifying means 22 for humidifying gas, and a humidifying means 23 as a fourth temperature detecting means for detecting the temperature of the
And a second control valve 24 for adjusting the flow rate of the humidifying gas flowing through the flow path 17.

Next, the branched flow paths 16 and 17 are
They are joined at the downstream side of the first control valve 18 and the downstream side of the second control valve 24, respectively. A hygrometer 28 for detecting humidity, a thermometer 29 for detecting temperature, and an open / close valve 34 for opening and closing the flow path 27 are arranged in the combined flow path 27. Further, the on-off valve 34
The fuel cell 1 can be connected downstream of the
The end of the flow path 35 on the downstream side of the fuel cell 1 is open to the atmosphere.

Next, the structure of the humidifying means 22 will be described with reference to FIG. The humidifying means 22 is provided with a tank 36 whose inside is isolated from the outside air, and the humidifying means 22 has a water outlet part 37 for discharging water from the bottom of the tank 36 in order from the bottom to the top. A gas introducing portion 38 to which the upstream side portion of the branch flow path 17 is connected, and a filling material 39.
Is installed, a water sprinkling section 41 for sprinkling hot water, and a gas outlet section 42 connected to a downstream side portion of the branch flow path 17.

From the water outlet 37, a water storage tank 45
Water is being sent to. The water storage tank 45
A water supply flow path 46 and a water delivery flow path 47 are connected to. Water is supplied from the water supply passage 46 so that a predetermined amount of water can be stored in the water storage tank 45. On the other hand, the base end portion of the water delivery channel 47 is connected to the water storage tank 45, and the tip end portion is connected to the water sprinkling portion 41 above the humidifying means 22. The flow path 47
In the middle of the process, a pump 48 for sending water, a water cooler 49 as water cooling means, a water heater 50 as water heating means, and a thermometer 51 as fifth temperature detecting means for detecting water temperature. And are arranged. The water cooler 49 is
Adjustment valve 52 for adjusting the amount of cooling water supplied
Is equipped with.

In the sprinkling section 41, a nozzle 53 is provided at the tip of the water delivery channel 47, and the nozzle 5
From 3, the droplet-shaped water is sprinkled on almost the entire upper surface of the filler 39. The filling material 39 is the humidifying means 2
It is provided on the inner surface of the side wall of the second tank 36 with almost no gap, and is composed of, for example, a large number of meshes that are stacked in the horizontal direction. The water sprinkled from the nozzle 53 adheres to each mesh while dropping. Then, the water falling from the lowermost mesh is led out from the water lead-out portion 37 and stored in the water storage tank 45.

On the other hand, the gas introduced from the gas introduction part 38 passes through the filling material 39 from the lower side to the upper side. At the time of this passage, the gas comes into contact with water,
Humidified.

As shown in FIG. 3, signals of measured values from the above-mentioned measuring instruments, that is, the thermometers 10, 11, 20, 23, 29, 51, the hygrometer 28, etc., are sent to the controller 55 as a control means. It will be sent. Further, the controller 55 controls the opening / closing valves 6, 21, 34, the first and second heaters 7, 19, the water heater 50, and the cooler 8.
Also, the adjusting valves 9 and 52 of the water cooler 49, the first and second control valves 18 and 24, the pump 48 and the like are controlled.

Next, the function and effect of supplying gas to the fuel cell 1 in the inspection system (gas supply device 2) having the above-described structure will be described.

First, the controller 55 is input with the target temperature and target humidity of the gas finally supplied to the fuel cell 1, the introduction temperature and the total flow rate of the gas introduced into the flow path 4 from the gas supply unit 3. ing. From the gas supply unit 3, a dry gas containing hydrogen and having a humidity of 0% RH (relative humidity) is introduced. The first heater 7 is feedforward-controlled so that the introduced gas is heated and reaches the target temperature. Specifically, the necessary heat quantity is calculated based on the target temperature, the introduction temperature, and the total flow rate, and the output of the first heater 7 is instructed. By following the change in advance by such feed-forward control, it is possible to improve the followability of the gas temperature control.

Next, the temperature of the gas heated by the heater 7 is detected by the thermometer 10. Furthermore, the thermometer 11
Thus, the temperature of the gas after passing through the cooler 8 is detected. The cooler 8 (adjustment valve 9) is controlled by the controller 55 as follows. That is, in the controller 55, the temperature detected by the thermometer 10
A first manipulated variable for feedforward controlling the regulating valve 9 of the cooler 8 is calculated based on the target temperature and the total flow rate. In addition, based on the temperature detected by the thermometer 11 and the target temperature, a second manipulated variable for feedback controlling the adjustment valve 9 is calculated. Then, the adjusting valve 9 is controlled by the operation amount that is the sum of the first and second operation amounts, and thus the supply amount of the cooling water is adjusted.

As described above, the gas cooling function facilitates gas temperature control. Specifically, for example, when the flow rate of the gas to be introduced is reduced or the target temperature is changed to a low value, the amount of heat retained by the heater 7 may cause the gas to become higher than the target temperature. On the other hand, in the present embodiment, the cooler 8 can forcibly cool the gas so as to keep it at the target temperature without waiting until the temperature of the gas decreases. Therefore, the followability and stability of the gas temperature control can be improved. Further, the heater 7 and the cooler 8 are feed-forward controlled, so that the temperature adjustment corresponding to the change in the flow rate and the temperature can be performed.
Therefore, the followability of the gas temperature control can be further improved.

Further, the cooled gas is branched into two flow paths 16 and 17. The gas flowing through one flow path 16 is sent as it is as a dry gas, and the flow rate is adjusted by the first control valve 18. In the other flow path 17, the on-off valve 21
Is opened to allow gas to flow, and the second control valve 24 adjusts the flow rate. The gas flowing through the flow path 17 is heated again by the second heater 19 and then sent to the humidifying means 22. The heater 19 is feedback-controlled so that the temperature detected by the thermometer 20 reaches a predetermined set temperature. This set temperature is calculated based on the target temperature, the target humidity, and the total flow rate, and the heat amount of the gas taken as the evaporation heat amount during humidification is taken into consideration in the temperature in advance. In this way, by heating with the heater 19, the temperature of the gas after humidification can be maintained at the target temperature.

In the heating means 22, the gas is humidified to almost 100% RH. Here, the mechanism of humidifying the gas into a saturated gas having a humidity of almost 100% RH in the humidifying means 22 and the contents of temperature control will be described. The water supplied from the water supply passage 46 to the water storage tank 45 is sent out to the water sprinkling section 41 by the pump 48 through the water delivery passage 47. Here, the water passing through the flow path 47 is cooled by the water cooler 49, and the water heater 50
Is heated in.

At this time, in the controller 55, based on the temperature of the humidified gas detected by the thermometer 23 and the target temperature, the water cooler 49 is controlled so that the temperature of the humidified gas becomes the target temperature. And a third manipulated variable for feedback controlling the water heater 50 is calculated. Furthermore, on the other hand, based on the water temperature after heating detected by the thermometer 51 and the target temperature, a fourth control for feedback controlling the cooler 49 and the heater 50 so that the temperature of the gas becomes the target temperature. The manipulated variable is calculated. And
The smaller operation amount of the third and fourth operation amounts is used as the operation amounts of the cooler 49 and the heater 50, and the temperature of the water is adjusted. As described above, the water cooling function allows the water temperature to be adjusted so that the heater 50 does not heat the water to a temperature higher than the target temperature. Therefore, the stability of the temperature control of the water can be improved, and the stability of the temperature of the water during humidification can be stabilized, and the stability of the temperature control of the gas can be improved.

From the water sprinkling portion 41 (nozzle 53), the temperature-adjusted hot water is sprinkled on the upper surface of the filling material 39. In the filler 39, the sprinkled hot water or the hot water dropped from the upper mesh is attached to each mesh. Therefore, the gas introduced from the gas introduction unit 38 passes through while efficiently contacting the hot water attached to the mesh. At that time, water is taken into the gas while evaporating, and in the present embodiment, the dry gas having a humidity of 0% RH is introduced into the humidifying means 22 and becomes a saturated gas having a humidity of almost 100% RH at the time of derivation. To be made.

After being humidified as described above, the branched flow paths 16 and 17 are joined to the flow path 27, and the dry gas and the saturated gas are mixed. The distribution amount of each gas is adjusted by previously controlling the first and second control valves 18 and 24 according to the target humidity. Further, based on the humidity of the mixed gas detected by the hygrometer 28, the first and second control valves 18,
The opening degree of 24 is feedback-controlled. This allows
The distribution amount of the dry gas and the saturated gas is adjusted, and the humidity of the gas can be adjusted to the target humidity.

Further, the mixed gas is supplied to the fuel cell 1 through the flow path 27. Then, the gas used in the fuel cell 1 is discharged.
As described above, the performance of the fuel cell 1 can be inspected by measuring the current value and the like after adjusting the temperature and humidity of the gas supplied to the fuel cell 1.

As described in detail above, in the present embodiment,
In addition to the heater 7 for heating the gas introduced into the flow path 4, a cooler 8 for cooling is provided. Therefore, the followability and stability of the gas temperature control can be improved.

Further, feedforward control of the heater 7 and the cooler 8 can further improve the followability of temperature control. Furthermore, the humidifier 2
In addition to the water heater 50 that heats water, a water cooler 49 is also provided in the water delivery flow path of the water supplied to the water. Therefore, the stability of the temperature control of water can be improved, and by extension, the stability of the temperature control of gas can be improved. Therefore, it is possible to perform an inspection under various conditions that have been difficult in the past. As a result, the inspection can be significantly enhanced.

It should be noted that the present invention is not limited to the contents described in the above embodiment, but may be carried out as follows, for example.

(A) The gas supplied from the gas supply unit 3 may not be a gas containing hydrogen but another type of gas such as air.

(B) Instead of the fuel cell 1 of the gas supply device of the above embodiment, it may be connected to a tank having a predetermined structure. With such a configuration, the temperature and humidity inside the tank can be kept constant, and thus the tank can be used as a constant temperature and constant humidity tank.

(C) Instead of the target humidity in the above embodiment, the dew point temperature may be used as the target value. In that case, a dew point thermometer may be provided instead of the hygrometer 28.

(D) In the above embodiment, the number of the flow passages 17 for humidification is one, but the flow passages 17 may be plural and each flow passage may be provided with the humidifying means 22 and the on-off valve 21. .

(E) The humidifying means 22 is not limited to the one shown in the above-mentioned embodiment, and may be another humidifying means such as a humidifier for passing gas through hot water to humidify.

(F) The arrangement order of the water cooler 49 and the water heater 50 may be reversed.

(G) The heater 7 may be feedback-controlled based on the temperature detected by the thermometer 10.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing a configuration of an inspection system in an embodiment.

FIG. 2 is a schematic cross-sectional view of a humidifying means for explaining a mechanism of humidifying gas.

FIG. 3 is a block diagram showing an electrical configuration of a gas supply device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Fuel cell as supplied body, 2 ... Gas supply device, 3
... Gas supply section as gas supply source, 4 ... Flow path, 7 ... First heater as heating means, 8 ... Cooler as cooling means, 9 ... Regulator valve, 10 ... Temperature as second temperature detecting means Meter stage, 11 ... Thermometer stage as third temperature detecting means,
16, 17 ... Flow path, 18 ... First control valve, 19 ... Second heater as heating means for humidified gas, 20 ... Thermometer as first temperature detecting means, 22 ... Humidifying means, 23 ... Fourth Thermometer as temperature detecting means, 24 ... Second control valve, 27 ...
Flow path, 28 ... Hygrometer, 29 ... Thermometer, 36 ... Tank, 3
9 ... Filling material, 45 ... Water storage tank, 48 ... Pump, 49 ...
Water cooler as water cooling means, 50 ... Water heater as water heating means, 51 ... Thermometer as fifth temperature detecting means, 52 ... Regulator valve, 53 ... Nozzle.

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Claims (11)

[Claims] 1. A gas supply source, a flow path for supplying a gas from the gas supply source to a supply target, a heating means provided in the middle of the flow path for heating the gas, A cooling means provided in the middle of the flow path for cooling the gas, a humidification means provided in the middle of the flow path for humidifying the gas, and water used in the humidification means. And a water cooling unit for cooling the water used in the humidifying unit. 2. A gas supply source, a flow path for supplying a gas from the gas supply source to a supply target, and at least two branches in the middle of the flow path,
A branch flow path configured to be merged on the downstream side, provided in the middle of the flow path before the branch, a heating unit for heating the gas, and provided in the middle of the flow path before the branch, Cooling means for cooling the gas, humidifying means for humidifying the gas, which is provided in at least one flow path after the branching, and water heating for heating water used in the humidifying means. And a water cooling unit for cooling the water used in the humidifying unit. 3. The humidifying gas heating means for heating the gas humidified by the humidifying means, which is provided immediately before the humidifying means in the flow path after the branching. Gas supply device. 4. A first temperature detecting means for detecting the temperature of the gas immediately after passing through the humidifying gas heating means, and a control means for feedback controlling the humidifying gas heating means. The control means includes a temperature detected by the first temperature detecting means, a target temperature of gas supplied to the supply target, a target humidity of gas supplied to the supply target, and the supply target. The gas supply device according to claim 3, wherein the heating means for the humidified gas is controlled based on the flow rate of the gas supplied to the body. 5. A control means for feed-forward controlling the heating means is provided, wherein the control means includes a target temperature of gas to be supplied to the supply target, a flow rate of gas to be supplied to the supply target, and the gas. The heating means is controlled based on the temperature of the gas introduced from the supply source to the flow path.
The gas supply device according to any one of 1. 6. A second temperature detection means for detecting the temperature of the gas immediately before passing through the cooling means, and a control means for feedforward controlling the cooling means, the control means comprising: Controlling the cooling means based on the temperature detected by the second temperature detecting means, the target temperature of the gas to be supplied to the supplied body, and the flow rate of the gas to be supplied to the supplied body. The gas supply device according to any one of claims 1 to 5, which is characterized. 7. A third temperature detecting means for detecting the temperature of the gas immediately after passing through the heating means and the cooling means, and a control means for feedback controlling the cooling means, 7. The control unit controls the cooling unit based on the temperature detected by the third temperature detection unit and the target temperature of the gas supplied to the supply target. The gas supply device according to any one of 1. 8. A fourth temperature detecting means for detecting the temperature of the gas immediately after passing through the humidifying means, and a control means for feedback controlling the water heating means and the water cooling means, The control means controls the water heating means and the water cooling means based on the temperature detected by the fourth temperature detecting means and the target temperature of the gas supplied to the supply target. The gas supply device according to any one of claims 1 to 7. 9. A fifth temperature detecting means for detecting the temperature of water immediately after passing through the water heating means and the water cooling means, and a control for feedback controlling the water heating means and the water cooling means. The control means includes a temperature detected by the fifth temperature detection means, a target temperature of the gas supplied to the supply target, and a target humidity of the gas supplied to the supply target. The gas supply device according to any one of claims 1 to 8, wherein the water heating means and the water cooling means are controlled based on a flow rate of gas supplied to the supply target. 10. An inspection system for inspecting the performance of the supply target based on supplying gas to the supply supply from the gas supply device according to claim 1. 11. The gas supply source of the gas supply device according to claim 1, wherein the gas supply source can supply a fuel gas containing hydrogen, and the supply target is a fuel cell. An inspection system for inspecting the performance of a fuel cell based on at least the electric power extracted from the fuel cell.