JP2003021579A - Diagnostic method for abnormality of machine - Google Patents

Diagnostic method for abnormality of machine

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Publication number
JP2003021579A
JP2003021579A JP2001207973A JP2001207973A JP2003021579A JP 2003021579 A JP2003021579 A JP 2003021579A JP 2001207973 A JP2001207973 A JP 2001207973A JP 2001207973 A JP2001207973 A JP 2001207973A JP 2003021579 A JP2003021579 A JP 2003021579A
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Japan
Prior art keywords
machine
response
speed
abnormality
acceleration
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Application number
JP2001207973A
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Japanese (ja)
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JP4721030B2 (en
Inventor
Masaru Nakano
Kazuo Sato
中野  勝
一男 佐藤
Original Assignee
Yaskawa Electric Corp
株式会社安川電機
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Application filed by Yaskawa Electric Corp, 株式会社安川電機 filed Critical Yaskawa Electric Corp
Priority to JP2001207973A priority Critical patent/JP4721030B2/en
Publication of JP2003021579A publication Critical patent/JP2003021579A/en
Application granted granted Critical
Publication of JP4721030B2 publication Critical patent/JP4721030B2/en
Application status is Expired - Fee Related legal-status Critical
Anticipated expiration legal-status Critical

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Abstract

PROBLEM TO BE SOLVED: To provide a method, in which the abnormality caused by the abrasion or the deterioration due to aging of a machine is diagnosed, without using an dedicated exciting unit. SOLUTION: A command, which periodically changes the rotational speed or the torque of an electric motor 2, is given to the electric motor 2, the speed or the torque of the electric motor 2 is periodically changed, the machine 3 is excited, the response speed or the response acceleration of the machine 3 due to its excitation is measured, and the abnormality of the machine is diagnosed, while the response speed or the response acceleration is used as a reference.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric motor, and more particularly to a method for diagnosing abnormalities of a machine driven by a servomotor whose speed and torque can be freely controlled. 2. Description of the Related Art As a method for diagnosing a machine abnormality caused by wear or aging, a method utilizing a change in vibration characteristics of a machine (for example, Japanese Patent Application Laid-Open No. 8-15100) is known. [0003] However, in the conventional method, a vibrator must be attached to the machine to be diagnosed each time, so that a considerable amount of time and labor is required for attaching and detaching the vibrator. There was a problem of cost. Further, since the shaker itself is an expensive device, there is a problem that the abnormality diagnosis device is also expensive. Therefore, an object of the present invention is to provide a method of diagnosing an abnormality caused by wear or aging of a machine without using a dedicated shaker. In order to solve the above-mentioned problems, the present invention provides a method for diagnosing an abnormality of a machine driven by an electric motor, wherein the rotational speed or the torque of the electric motor is periodically changed. A command is given to the motor to vibrate the machine by periodically varying the speed or torque of the motor, and the response amplitude or response speed or the response acceleration of the machine due to the vibration is measured. The abnormality of the machine is diagnosed based on the amplitude or the response speed or the response acceleration. Further, the machine is a machine driven by a plurality of electric motors, and an arbitrary vibration mode is obtained by simultaneously exciting the plurality of electric motors. Further, the response amplitude, the response speed, or the response acceleration of the machine is measured in advance, and the response amplitude, the response acceleration, or the response acceleration is compared with the response amplitude, the response speed, or the response acceleration obtained by the preliminary measurement. Is used to diagnose an abnormality of the machine. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a machine showing an embodiment of the present invention. In the figure, reference numeral 1 denotes a motor control device, which is a device for instructing the speed and torque of a motor. Reference numeral 2 denotes a servomotor, which is a motor whose start, stop, acceleration, deceleration, and the like are freely controlled by a command from the motor control device 1. Reference numeral 3 denotes an encoder that detects the rotation angle of the servo motor 2 and feeds it back to the motor control device 1. The motor control device 1 can obtain the rotation speed and the rotation acceleration of the servo motor 2 by differentiating the rotation angle obtained from the encoder 3 with time. Reference numeral 4 denotes a machine driven by the servo motor 2. Next, a method of diagnosing abnormality of the machine will be described. (1) A command to periodically fluctuate the speed or torque of the servomotor 2 from the motor control device 1 when a new machine is manufactured or when repair adjustment is completed, that is, when the machine is in an initial state and is in a normal state. (This command, that is, the excitation waveform is stored in the motor control device 1), and the machine 4 is excited, and the amplitude or speed or acceleration of the vibration of the machine 4 at this time, that is, the response amplitude or response The speed or response acceleration is measured and recorded by the encoder 3. By changing the fluctuation cycle of the speed or torque of the servo motor 2,
Measurement and recording may be performed a plurality of times. (2) After a predetermined operation of the machine or when it is necessary to perform abnormality diagnosis, a command for periodically changing the same speed or torque as used in the measurement in the initial state is issued to the motor control. From the device 1 to the servomotor 2,
The machine 4 is vibrated, and the amplitude, speed, or acceleration of the vibration of the machine 4 at this time, that is, the response amplitude, response speed, or response acceleration is measured by the encoder 3, and the result is compared with the measurement result in the initial state. If there is no change in the measurement result, it is diagnosed that there is no abnormality, and if there is a change, it is diagnosed that there is abnormality. FIG. 2 is an explanatory view showing an example in which the abnormality diagnosis method of the present invention is applied to a table driven by a ball screw. The horizontal axis indicates the vibration frequency, and the vertical axis indicates the table based on the vibration frequency. The amplitude (response amplitude) of the generated vibration is taken. The solid curve shows the characteristic of the vibration frequency-response amplitude when an abnormality occurs, and the broken curve shows the characteristic in the initial state (normal state). FIG. 2A shows a state in which the preload of the nut of the ball screw is reduced, and the resonance frequency is lowered. Therefore, the peak of the response amplitude is shifted to a lower frequency side as compared with the initial state. FIG. 2B shows a state in which the ball of the ball screw is worn, and the resonance frequency is increased. Therefore, the peak of the response amplitude is shifted to a higher frequency side as compared with the initial state. In a machine having a plurality of motors and drive shafts, a vibration mode suitable for abnormality diagnosis can be generated by periodically varying the speed or torque of each motor. By performing measurement and comparison of vibration characteristics for a plurality of vibration modes, more precise abnormality diagnosis can be expected. In the embodiment, the example of the table driven by the ball screw is described. However, the opportunity to apply the present invention is not limited to the device driven by the ball screw, and wear and aging such as gear and belt pulley drive (for example, deterioration of the material) Needless to say, the present invention can be widely applied to a mechanical device having an element whose vibration characteristic changes due to a change in a spring constant caused by the change in the spring constant. As described above, according to the present invention, a desired vibration is performed by the driving motor of the machine, and the abnormality of the machine is diagnosed by the response at that time. Therefore, there is an effect that the abnormality of the machine can be easily diagnosed at low cost.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram of a machine showing an embodiment of the present invention. FIGS. 2A and 2B are explanatory views showing an example in which the present invention is applied to a ball screw driven table. FIG. 2A shows a state in which the preload of a nut of the ball screw is reduced, and FIG. Indicates a worn state. [Description of Signs] 1: Motor control device 2: Servo motor 3: Encoder 4: Machine

Claims (1)

  1. Claims: 1. An abnormality diagnosis method for a machine driven by an electric motor, wherein a command to periodically fluctuate the rotation speed or the torque of the electric motor is given to the electric motor, and the speed or the torque of the electric motor is controlled. To periodically vibrate the machine, measure the response amplitude or response speed or the response acceleration of the machine by the vibration, and measure the response amplitude or the response speed or the response acceleration of the machine based on the response amplitude or the response speed or the response acceleration. An abnormality diagnosis method for machines that diagnose abnormalities. 2. The machine according to claim 1, wherein the machine is a machine driven by a plurality of electric motors, and an arbitrary vibration mode is obtained by simultaneously exciting the plurality of electric motors. Abnormal diagnosis method. 3. A response amplitude, a response speed, or a response acceleration of the machine is measured in advance, and the response amplitude, the response speed, or the response acceleration is determined as a response amplitude, a response speed, or a response acceleration obtained by the preliminary measurement. The abnormality diagnosis method for a machine according to claim 1, wherein the abnormality of the machine is diagnosed by comparing.
JP2001207973A 2001-07-09 2001-07-09 Machine abnormality diagnosis device Expired - Fee Related JP4721030B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001207973A JP4721030B2 (en) 2001-07-09 2001-07-09 Machine abnormality diagnosis device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001207973A JP4721030B2 (en) 2001-07-09 2001-07-09 Machine abnormality diagnosis device

Publications (2)

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JP2003021579A true JP2003021579A (en) 2003-01-24
JP4721030B2 JP4721030B2 (en) 2011-07-13

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JP2001207973A Expired - Fee Related JP4721030B2 (en) 2001-07-09 2001-07-09 Machine abnormality diagnosis device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100760637B1 (en) * 2005-03-11 2007-09-20 캐논 가부시끼가이샤 Optical system and image projection apparatus

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5523432A (en) * 1978-08-09 1980-02-19 Toshiba Corp Abnormality diagnostic unit for rotary machine
JPS62100148A (en) * 1985-10-26 1987-05-09 Mitsubishi Heavy Ind Ltd Testing method for bearing performance of motor
JPS6385318A (en) * 1986-09-30 1988-04-15 Nec Corp Apparatus trouble diagnostic circuit
JPH03174910A (en) * 1989-12-01 1991-07-30 Kobe Steel Ltd Deterioration diagnostic method for hydraulic servo system of press machine
JPH04372840A (en) * 1991-06-24 1992-12-25 Shinko Electric Co Ltd Torsional shaker
JPH07311124A (en) * 1994-03-23 1995-11-28 Shinko Electric Co Ltd Vibration controller
JPH0815100A (en) * 1994-06-28 1996-01-19 Mitsubishi Heavy Ind Ltd Vibration diagnosing device with exciting function
JPH08249031A (en) * 1995-03-09 1996-09-27 Fanuc Ltd Inertia and frictional characteristic estimation method for motor-driven mechanical system
JPH10274558A (en) * 1997-01-28 1998-10-13 Matsushita Electric Works Ltd Rotating equipment abnormality diagnostic method and device therefor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5523432A (en) * 1978-08-09 1980-02-19 Toshiba Corp Abnormality diagnostic unit for rotary machine
JPS62100148A (en) * 1985-10-26 1987-05-09 Mitsubishi Heavy Ind Ltd Testing method for bearing performance of motor
JPS6385318A (en) * 1986-09-30 1988-04-15 Nec Corp Apparatus trouble diagnostic circuit
JPH03174910A (en) * 1989-12-01 1991-07-30 Kobe Steel Ltd Deterioration diagnostic method for hydraulic servo system of press machine
JPH04372840A (en) * 1991-06-24 1992-12-25 Shinko Electric Co Ltd Torsional shaker
JPH07311124A (en) * 1994-03-23 1995-11-28 Shinko Electric Co Ltd Vibration controller
JPH0815100A (en) * 1994-06-28 1996-01-19 Mitsubishi Heavy Ind Ltd Vibration diagnosing device with exciting function
JPH08249031A (en) * 1995-03-09 1996-09-27 Fanuc Ltd Inertia and frictional characteristic estimation method for motor-driven mechanical system
JPH10274558A (en) * 1997-01-28 1998-10-13 Matsushita Electric Works Ltd Rotating equipment abnormality diagnostic method and device therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100760637B1 (en) * 2005-03-11 2007-09-20 캐논 가부시끼가이샤 Optical system and image projection apparatus

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