JP2003004425A - Optical shape-measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical shape-measuring apparatus for solving the problem of deterioration in shape measurement accuracy, by preventing the deterioration in the S/N of the quantity of light, in an optical shape measurement method for obtaining an illumination angle from information on the quantity of light of pattern light irradiated. SOLUTION: The optical shape-measuring apparatus comprises an illumination means 4 for illuminating each of a measurement region 15, that is divided into a plurality of slit-shaped partial regions without overlapping each other, a detection means 10 for detecting reflection light for each measurement region, a shape estimation means 11 for estimating the measurement regions 15-1 to 15-6, by utilizing the illumination means 4 and the parallax of the detection means according to the quantity of light 13 of each reflection light which is detected by the detection means 10, and a shape correction means 12 for obtaining shape data 14 without ambiguity in each partial region by removing the ambiguity in the partial region in the shape data 16 of the estimated measurement region.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical shape measuring apparatus for measuring the shape and distance of an object, and more specifically, for example, creating 3D contents such as Web, detecting abnormalities in a factory line, and objects. The present invention relates to an optical shape measuring device that can be suitably used for recognition, data input for 3D modeling, gesture recognition, and the like.

[0002]

2. Description of the Related Art Conventionally, as a shape measuring device for measuring the three-dimensional shape of an object, a slit laser beam is applied to an object to be measured, and the slit light is applied while scanning perpendicularly to the longitudinal direction of the slit. It is known to measure the deformation of slit light according to the shape of an object to be measured, which is caused by observing from a visual field different from the direction, as a shape by using the principle of triangulation.

For example, as shown in FIG. 20, a semiconductor laser unit 101, an irradiation optical system including a galvanometer mirror 102 and a cylindrical lens 103, and a detection optical system including an imaging lens 107 and a CCD 108 are provided.
A shape measuring device using the light section method is often used for industrial purposes. In this device, the semiconductor laser unit 101
The light radiated in the form of a beam is scanned by the galvano mirror 102 in the left-right direction in the figure, and the cylindrical lens 103
Then, it is enlarged in the vertical direction and becomes slit light 105 which is long in the vertical direction, and is irradiated on a measurement target object (hereinafter, referred to as a measurement object) 104.

At this time, the reflected light 1 reflected from the measurement object 104 through the imaging lens 107 from a position displaced in the scanning direction of the slit light 105, that is, the base line direction.
When 06 is observed by the CCD 108, which is a light receiving element, the linear slit light 105 is deformed and the imaging position moves on the CCD 108 according to the unevenness of the measurement object 104 in the depth direction. Observing the image of the reflected light 106 with the CCD 108 means that the position of each point of the measurement object 104 on which the reflected light 106 is incident on the imaging lens 107 is triangulated, and the position where the slit light 105 is irradiated is determined. If the position difference (baseline length) of the CCD 108 in the baseline direction is known in advance, the shape of the measurement object 104 in the portion irradiated with the slit light 105 can be measured from this deformation. By vibrating the galvanometer mirror 102, the shape of the entire measurement object 104 can be obtained by repeating the shape measurement while scanning the slit light 105 over the entire measurement object 104.

The principle of triangulation will be described in more detail with reference to FIG. 21. (In regard to this, for example, Toru Yoshizawa, "Optical three-dimensional measurement", pp.29-30, New Technology Communications, 1993. See). Slit light source 202 (see FIG. 20)
(Corresponding to the reflection position of the beam light of the galvanometer mirror 102) and the light receiver 205 (corresponding to the CCD 108 in FIG. 20) are separated by the baseline length (L) 201. The light emitted from the slit light source 202 at an angle θ is 203a.
If the light is reflected by the surface of the measurement object 203 at the position of, and is incident on the position of the light receiver 205 at an angle φ and forms an image, the relation Za = ((tan θ * tan φ) / (tan θ + tan φ) of the equation (1) is obtained. )) L (1) holds.

When the distance (d) 209 between the imaging lens 210 and the light receiver 205 and the distance (Za) 204a of the measuring object from the base line length to the vertical direction are known in advance, the incident angle φ can be obtained. If the measurement object 203 is located at the position 203b, x with respect to the image formation position on the light receiver 205
Ψ = arctan (x / d)
Since Ψ is known from the relationship, Zb 204b is obtained from the relationship Zb = (tan θ * tan (φ + Ψ)) / (tan θ + tan (φ + Ψ)) L (2) in the equation (2). By scanning the emission angle θ so as to irradiate the entire measurement object 203 with the slit light 202 and repeating the above procedure for each θ, the distance Z between each reflection point of the measurement object and the base line, that is, the shape is obtained.

A disadvantage of the light cutting method of sequentially scanning the slit light on the measuring object is that an optical scanning optical system for scanning each slit light is required, and normally, a movable part such as the galvanometer mirror 102 of FIG. 20 is used. Therefore, it becomes vulnerable to the vibration of the device and it is necessary to repeat the shape measurement for each angle θ.
The measurement time is long. Further, the amount of light observed by the light receiver 205 varies depending on the reflectance of the surface of the measurement object, and the position of the image of the measurement object on the light receiver is determined from the maximum value of the image formation light amount or the like. It is necessary to estimate.

As a shape measuring method which is an improvement of the defect of the light cutting method that it is necessary to sequentially scan the slit light,
There is a pattern projection method. This is a method in which instead of scanning the slit light, the entire slit light is arranged on the surface and the measurement object is collectively irradiated as one pattern light. However, since it is not possible to know which position of the pattern light corresponds to which slit light as it is, it is necessary to add information to the irradiated pattern light in advance by some method in correspondence with the slit light, that is, at which irradiation angle. Keep it.

As one type of pattern projection method, there is a method of collectively projecting a spectral spectrum pattern onto a measuring cormorant object (hereinafter referred to as a rainbow method) (for example, Japanese Patent Laid-Open No. Sho 6-62).
1-75210). This will be described with reference to FIG. The light transmitted from the light source 312 through the slit 313 is dispersed by the prism 314 and is irradiated with a rainbow-like light pattern so as to cover the object surface 305. Depending on the arrangement of the prism 314 and the slit 313, the radiation angle α
Since the color distribution depending on is determined, the light reflected on the surface of the object 305 is converted by the lens 308 into an image plane 309 on the object plane.
The incident light α can be determined from the color observed by the camera 307 of the image formed on the camera. Since the light source 312 and the camera 307 are separated by the distance D, if the emission angle α is known, the shape of the object plane 305 can be obtained by triangulation from the information. Color identification is performed by changing the transmission wavelength of the filter 315 and obtaining the ratio of two types of wavelengths among the reflected light at each point on the object plane 305.

In this method, it is not necessary to sequentially scan the slit light as in the light cutting method, and the rainbow-shaped light is projected onto the measurement object in a batch, and the reflection pattern can be captured in a batch by the color camera. Since there is no mechanically fragile moving part that scans the slit light, the shape measurement time can be shortened. On the other hand, since the emission direction α of the irradiation light is determined by taking the ratio of the reflected light of two wavelengths by the filter 315, if this accuracy is low, the accuracy of the shape data in the depth direction is lowered. In order to improve the measurement accuracy of the reflected light, it is necessary to increase the S / N ratio of the reflected light amount that is the signal light with respect to the background light amount that is the noise. If the transmission wavelength width of the filter is narrowed, it is possible to eliminate the influence of background light, but since the signal light is also reduced at the same time, the S / N is improved, that is, the resolution is limited.

Another pattern projection method is the Intensity Ratio method (for example, B. Carri
hill and R. Hummel, "Experiments with the Intensit
y Ratio Depth Sensor ", Computer Vision, Graphics,
and Image Processing, vol.32, pp. 337-358, 1985).

The intensity ratio method will be described with reference to FIG. The horizontal direction in FIG. 23 is the baseline direction, and the pattern light source 401 (corresponding to the slit light source 202 in FIG. 21) is the same as in FIG.
And the light receiver 404 (corresponding to the light receiver 205 in FIG. 21) are at different positions with respect to the baseline direction 406. Pattern light source 4
From 01, a planar light pattern for simultaneously irradiating the entire measurement surface 403 having a light amount distribution in the base line direction 406 is irradiated. When the intensity distributions of the two light patterns with respect to the radiation angle θ are G1 (θ) and G2 (θ), the light is reflected by a point having a reflectance σ on the measurement surface for each intensity distribution and received by the light receiver 404. P1, P2, the patterned light source 4
When the light quantity of 01 is S, the relation P1 = K · σ · G1 (θ) · S (3a) P2 = K · σ · G2 (θ) · S (3b) in the equations (3a) and (3b) holds. . Here, K is a coefficient determined by the positional relationship among the pattern light source 401, the light receiver 404, and the measurement surface 403.

The reflectance σ of the measurement surface 403 depends on the characteristics of the surface of the measurement surface and cannot be determined in advance. However, if the ratio of the expressions (3a) and (3b) is taken, the relation P2 of the expression (4) is obtained. / P1 = G2 (θ) / G1 (θ) (4), and it can be seen that the ratio of P2 and P1 depends only on the radiation angle θ. Two intensity distribution lights G1 (θ) and G2 (θ)
By irradiating the measurement surface with a light pattern having and measuring P2 / P1, it is possible to uniquely obtain θ with respect to the radiation angle θ, so that the slit light is scanned in the baseline direction as shown in FIG. However, it is not necessary to sequentially detect the light amount by the CCD, and it is sufficient to observe the image of the CCD with respect to the two pattern lights, which has the advantage of significantly shortening the measurement time. However, it is necessary that G2 (θ) / G1 (θ) is a monovalent function with respect to θ.

For example, if G1 (θ) is a monotonically decreasing function with respect to θ and G2 (θ) is a monotonically increasing function with respect to θ,
G2 (θ) / G1 (θ) is a monotonically increasing function with respect to θ, and θ is uniquely obtained from P2 / P1. B. Carrihi
In ll's paper, G1 (θ) has a uniform uniform distribution regardless of θ, and G2 (θ) has a distribution in which the amount of light increases linearly. However, the method using the intensity ratio method is disclosed. Kaihei 1
In the description of Japanese Unexamined Patent Publication No. 0-48336, a distribution in which G1 (θ) decreases linearly and a distribution in which G2 (θ) increases linearly are adopted.

[0015]

As described above, the intensity ratio method does not depend on the reflectance of the measurement surface as compared with the light section method.
Although it has an advantage that the two patterns can be collectively irradiated and measured, it also has a drawback. The problem of the intensity ratio method is that when taking the ratio of the amounts of light received by the light receiving element for the two light patterns, in order to increase the S / N of the measurement, the amount of reflected light, which is signal light, is compared with the amount of background light, which is noise. It is necessary to make it high enough. That is, G1
If the minimum value of (θ) or G2 (θ) is too small, the S / N decreases, and the effect thereof appears as a shape error.

That is, the dynamic range of P2 / P1 does not increase. On the other hand, since there is a lower limit to the light amount resolution of the CCD, there is a lower limit to the measurable resolution of the radiation angle θ, which eventually leads to a decrease in the resolution of the measured shape. The depth accuracy of the shape is determined depending on the S / N of the measured light amount of the reflected light, as in the rainbow method shown in the previous example.

As another pattern projection method, there is a phase shift method. This method irradiates a measurement object with a sinusoidal light pattern with multiple stripe-shaped altitudes that have mutually different phases, and uses the intensity information of the reflected light at the measurement object to determine the phase due to the unevenness of the measurement object. It is a method of obtaining the change of. Since the phase change has depth information, the shape information can be obtained from the phase information. For example, Toru Yoshizawa, "Optical three-dimensional measurement", pp.115-116, New Technology Communications, 199
According to 3 years, the phase-modulated reflected light Y is a background light a, the amplitude intensity of the irradiated sine wave pattern is b, the phase of the observed fringe pattern is ω, and the phase that can be given in advance is ω o. Then, Y (ωo) = a + b * cos (ω + ωo) (5)

Reflected light Y reflected by each measurement object is obtained by irradiating a stripe pattern with 0, π / 2, and π as ωo.
From (0), Y (π / 2), Y (π), the phase difference ω is ω = arctan ((Y (π) -Y (π / 2)) / (Y (0) -Y (π / 2))) + π / 4 (6) If the phase ω is known, the shape can be obtained.
The advantage of the phase shift method is that it projects a fringe pattern whose shape is known as a sine wave, so even though the shape is obtained from the intensity distribution of the illuminated light pattern as well, compared to the rainbow method and the intensity ratio method. That is, the shape is required with high accuracy. If a change in the amount of light having the same amplitude as that of the intensity ratio method is given, the phase shift method can give a larger change in the amount of light in a shorter period. N can be improved. It is the same as the intensity ratio method in that it does not depend on the reflectance of the measuring object because the phase, that is, the shape is obtained using the ratio of the received light amount Y.

On the other hand, when the depth information is obtained from the phase, the phase information is obtained only between 0 and 2π.
There is an ambiguity that is an integral multiple of 2π with respect to the true phase value, and there is essentially a problem that ambiguity is involved in determining the phase, that is, depth information. Normally, assuming continuity of phase values,
It is necessary to calculate the true phase from the measured phase ω (called phase unwrapping).

As an example of improving the phase ambiguity of the phase shift method, a combination of the phase shift method and the focus method is disclosed in Japanese Patent Laid-Open No. 2000-
There is a technique disclosed in Japanese Patent No. 9444. The focus method is a shape measurement method that utilizes the fact that the contrast of an image of an object is maximized when a measurement object is located at a focal position of a camera. The focus method does not have the ambiguity of the shape as does the phase shift method, but the measurement accuracy of the shape is inferior to that of the phase shift method. It will be described with reference to FIG. The shape of the measurement object 507 is measured by the image sensor 508 while changing the focal position. On the other hand, a striped pattern is emitted from a pattern projection mechanism 517 which is an illumination system of the phase shift method, and a deformed image of the striped pattern having phase information is observed by the image sensor 508. The fringe patterns having different phases pass through the collector lens 502 from the light source 501, and the projection lens 505 illuminates the object 507 while changing the phase of the fringe pattern emitted by the phase shifter 504.

If the result of obtaining the outline of the shape by the focus method and the locally precise but globally ambiguous shape obtained by the phase shift method are matched, the entire measurement object can be measured with high accuracy. be able to. As described above, combining the two methods of the focus method and the phase shift method has the advantage of compensating for the drawbacks of both methods. In this case, the method of combining with the phase shift method is to use an imaging sensor, which is a light receiving system, as the focus method. Since it is necessary to be able to change the focus mechanism in order to perform the above, there is a problem that the cost becomes high.

An object of the present invention is to solve the above-mentioned problems in the prior art and to measure the S / N of the light quantity in the conventional optical shape measuring method for obtaining the irradiation angle from the information of the light quantity of the irradiated pattern light. It is an object of the present invention to provide an optical shape measuring device capable of solving the problem that the accuracy of shape measurement deteriorates when the deterioration of the shape.

[0023]

In order to achieve the above object, the present invention is characterized by adopting the following configuration. The configuration of the invention will be described below with reference to the claims.

In the optical profile measuring apparatus according to claim 1,
One or more types of light for each of the partial measurement areas in the measurement area divided into a plurality of slit-shaped partial measurement areas that are divided perpendicularly to the parallax direction connecting the illumination means and the detection means and do not overlap each other. Illuminating means for illuminating the pattern, detecting means for detecting the reflected light of the light pattern illuminated in each of the partial measurement areas, and from the light quantity of the reflected light detected by this detecting means, the number of each of the partial measurement areas Shape estimation means for estimating the shape data of each of the partial measurement areas by using the parallax of the illumination means and the detection means while leaving the ambiguity of correspondence, and an ambiguity in the shape data of each estimated partial measurement area. And a shape correction unit that obtains unambiguous shape data of each partial measurement region.

The parallax direction connecting the illuminating means and the detecting means in this claim corresponds to the scanning direction of the slit light of the light cutting method. Since the light pattern radiated from the illuminating means is applied to each partial area (partial measurement area) obtained by dividing the measurement area, one partial area is provided as compared with the case where the same light pattern is given to the entire measurement area. The change in the amount of light of the light pattern irradiated per hit becomes large. That is, if the width of the partial region is narrow, the amount of light reflected by the measurement region and detected by the detection means is (width of the entire measurement region) / (width of the partial region) as compared with the case of irradiating the width of the entire measurement region. Since the rate of change in light amount increases by (width) times, when the light amount is detected at the same sampling interval in the parallax direction, the error in measuring the light amount of reflected light is substantially reduced by (width of partial area) / (width of measurement area) times. As a result, the accuracy of shape measurement is improved.

However, since the measurement area is divided into partial areas, it is not known which reflected light belongs to which partial area. Therefore, the shape data calculated by the shape estimating means from the reflected light quantity is essentially It will include ambiguity. The shape data obtained by integrating the shape data and eliminating ambiguity is obtained by the shape correction means. As a method of removing the ambiguity of the shape data, for example, the continuity of the shape is assumed. The measurement area is not limited to a flat surface, but may be a panoramic shape, a hemispherical shape, or the like. In that case, the illumination means and the detection means may illuminate or detect according to the geometric shape of the measurement area.

In the optical shape measuring device according to claim 2,
In addition to the structure described in claim 1, the partial areas and the light pattern emitted by the illumination means are finely divided in an area where the measurement accuracy is desired to be improved with respect to the parallax direction, and are roughly divided in other areas. It is what In the invention according to claim 1, it is not necessary that the widths of the partial regions are uniform, and in this claim, the widths of the partial regions are set to be narrow in a portion requiring high precision and wide in a sufficient portion even if precision is low. ing. As the number of partial regions decreases, the ambiguity as to which partial region belongs decreases. Therefore, it is possible to simplify the shape correction means for correcting the shape data of the entire measurement region from the shape data including the ambiguity. it can. The measurement error of the amount of reflected light is
Since it is approximately proportional to the width of the partial region, it is preferable to make the division width of the partial region inversely proportional to the desired measurement accuracy. Further, the area division may be dynamically changed according to the change of the measurement object.

In the optical shape measuring device according to claim 3,
In the illumination means according to the second aspect, the one or more types of light patterns with which each partial measurement area is illuminated are periodic with respect to the parallax direction, and the period is equal to the width of the partial area. According to the present invention, it is periodic with respect to the parallax direction, the widths of the respective partial regions are made equal, and at the same time, the same light pattern is repeated. Since the light pattern to be irradiated becomes simple by making it periodic, it is possible to simplify the means configuration of the illumination means and the shape estimation means and shape correction means. In this claim, if the number of light patterns is 3, the light patterns are sine waves, and the phase difference between the light patterns is, for example, π / 2, π, the phase shift method is 1
By way of example, this claim can also be viewed as a generalization of the phase shift method.

In the optical profile measuring apparatus according to claim 4,
The illumination means in the invention according to claim 1 is configured to collectively illuminate the light pattern. In this claim, the light patterns to be illuminated are collectively illuminated. Since it is not necessary to scan in the parallax direction or illuminate each area, the detection means can collectively detect the light amount of the entire measurement area in accordance with the collective irradiation of the illumination means. Therefore, the shape can be measured at high speed.

Further, here, a filter whose transmittance is modulated is emitted from the light source, or a mirror whose reflectance is modulated is reflected by the light emitted from the light source to irradiate the measurement region with a light pattern all at once, and the above-mentioned filter is used. Alternatively, the mirror may be subjected to a surface treatment for suppressing light diffusion. As an example, a case where the light transmitted through the filter is used will be described. When a filter is used to radially irradiate the measurement area from the back surface with a light source close to a point light source such as a laser, the baseline length that is the basis of triangulation is the distance between the light source position and the optical center of the detection means. C with lens as detection means
If a CD camera is used, the center of the lens will be the optical center of the detection means.

In order to irradiate the measurement area with the pattern, when the light source irradiates the transmitted light of the filter with the density distribution, when the light from the light source is scattered on the film surface, the scattered light overlaps the measurement area. When viewed from the measurement area, the film surface becomes a new light source and is observed by the CCD camera, so the light source positions that are the basis of triangulation are dispersed between the light source and the film surface, resulting in deformation of the shape. . If the film surface is subjected to antireflection coating to suppress light diffusion, this deformation will not occur. This applies not only to the combination of a transparent film and a light source, but also to a mirror and a light source that have a distribution of reflectance. If there is scattering on the mirror surface, that becomes the light source, so the shape measured by the same principle is deformed. . Light diffusion is suppressed by performing a coating process for preventing light diffusion on the mirror surface.

In the optical shape measuring device according to claim 5,
The illumination means in the invention according to claim 4 irradiates two types of light patterns per partial area, and the shape data of the measurement area is estimated from the ratio of the light amounts of the two types of reflected light detected by the shape estimation means by the detection means. It is configured. This claim applies the intensity ratio method to the shape measurement of each partial region in the invention according to claim 4, and by dividing into a plurality of partial regions, the measurement accuracy by the intensity ratio method is improved. It is a thing.

Two types of light patterns are emitted from the illumination means to each partial area. At this time, if the first pattern of the light patterns is a distribution in which the light amount increases in the parallax direction and the second pattern is a distribution in which the light amount decreases in the parallax direction, the two light patterns are The shape estimation unit obtains shape data for the partial area based on the ratio of the two measured amounts of reflected light reflected by the partial area.
Since there are only two types of light patterns that the illumination means should illuminate,
The irradiation optical system can be simplified.

Further, the light quantity data of the light pattern detected at the end of each partial area may be rejected. According to claim 5, the intensity ratio method is used for shape detection for each partial region. However, in the intensity ratio method, a pattern in which the light amount monotonously increases and a pattern in which the light amount decreases in the parallax direction are irradiated, and the intensity ratio of the reflected light amounts of the two patterns is used. Is often asked. In this case, the irradiated pattern has a sawtooth shape with a jump in the light amount distribution at the boundary of the partial areas. Therefore, the amount of light is always small at one of the irradiation patterns at the edge of the partial region, and is often susceptible to the influence of light amount noise. Alternatively, when pattern irradiation is performed by an image forming system such as a normal projector as the irradiation means, blurring occurs in the pattern when the image forming position deviates. In other words, in the case of a sawtooth pattern in which the light amount jumps at the end of the partial area, the pattern is blurred and the measured light amount varies. As a result, irregularities are deformed in the measured shape.

By rejecting the pixel data at the edge of the region,
This deformation can be avoided. As a condition for rejecting, a criterion such as rejecting all pixels within a certain range from the edge of the region, or rejecting when the light amount of the pixel is less than or equal to a threshold value may be provided. In the shape measuring method using the pattern light irradiation method, it is difficult to identify the error only from the amount of reflected light even if the shape is incorrect, so if you remove the data that seems to be incorrect in advance as described above, It is desirable because it is easy to deal with the abnormal shape.

Further, in the optical shape measuring apparatus according to claim 5, the ratio of the light amounts of the reflected light is obtained, the ratio of the light amounts is smoothed with respect to the irradiation angle, and the smoothed light amount ratio and the irradiation angle correspond. The attachment may be performed by linear interpolation. In the optical shape measuring device according to the fifth aspect, the distance is measured by using the intensity ratio method. In the intensity ratio method, the shape is obtained by using the correspondence between the intensity ratio of the reflected light amounts of the two irradiation patterns and the irradiation direction. The accuracy of this association is directly reflected in the measurement accuracy. This correspondence can be obtained by measuring the relationship between the reference intensity ratio and the irradiation angle.

If an appropriate distribution model is prepared in advance and fitted to the distribution of the reference intensity ratio, the correlation can be made only with the accuracy of the model, which is not suitable for improving the accuracy. Conversely, if the distribution data that represents the relationship between the actually measured intensity ratio and the irradiation angle that is used as a reference is used as is without giving a model of the intensity ratio distribution, some kind of interpolation is required, but the obtained light intensity data Since noise is always mixed in, the original data still has noise even if high-order interpolation is used, and therefore proper association cannot be performed. This is because in high-order interpolation, the interpolation result is selected so that the given noisy reference data points are sewn, so even if the order of interpolation is increased, a vibrational error similar to the Runge phenomenon of Lagrange interpolation is generated. Is generated in the interpolation result. In addition, there are not enough data points for interpolation around the edge of the interpolation area, so
Although accuracy deterioration is likely to occur, this tendency becomes remarkable in high-order interpolation and causes an error.

Therefore, here, the intensity ratio distribution is once smoothed to remove the light amount noise, and then the correlation is performed by linear interpolation. First, since noise removal is performed, sufficient accuracy of matching can be obtained even by linear interpolation, and as a result, the accuracy of shape measurement is improved.

Further, the detecting means is composed of a two-dimensional array optical sensor capable of individually detecting the light amount of the light receiving area, and the light amount ratio and the irradiation angle are independently associated with each other in the parallax direction line of the optical sensor. May be When detecting a shape from an image based on the principle of triangulation, an imaging optical system such as a lens is often used as a detection unit such as an illumination unit or a camera. Aberrations are included in this imaging system. Especially, if there is distortion aberration of the lens, distortion occurs in the irradiation position of the pattern on the measurement area and the position of the reflected light obtained by the detection means, and as a result, There is an error in the obtained shape. It is generally performed to correct the distortion aberration of the lens of the detection means, but it takes some effort. Further, the distortion of the lens system of the illumination means cannot be corrected on the detection side, which causes a decrease in the accuracy of triangulation. The distortion is distributed almost radially in the optical axis direction of the camera.

Therefore, here, the parallax direction is calibrated for each row of the array sensor of the detecting means. That is, the intensity ratio and the irradiation angle are calibrated for each angle (elevation angle) formed by the line connecting the optical axis direction of the camera, the measurement point, and the optical center of the detection means. As already explained, the distortion aberration is distributed radially with respect to the optical axis of the detection means, so the distribution is different from the elevation angle direction, but the elevation deformation direction component of the radial deformation component can be corrected by correction for each elevation angle. . That is, the distortion aberration can be easily reduced. Since the distortion of the illumination means cannot be corrected unless the shape of the measurement object is known in advance, this simple correction for each elevation angle is effective in suppressing the distortion of the shape caused by the illumination means.

Next, in the optical shape measuring apparatus according to the sixth aspect, in the invention according to the fifth aspect, the illuminating means simultaneously irradiates two kinds of light patterns per partial area with different wavelengths, and wavelength separation is possible. It is configured to detect with various detection means. In the present claim, the shape can be measured by irradiating the light pattern from the illuminating device only once, so that the illuminating device can be simplified. The simplest configuration example is a configuration in which the wavelengths of the two light patterns are red and green, the two patterns are optically combined in the illumination means to illuminate at the same time, and a color camera is used as the detection means. With this configuration, red information and green information can be detected independently.

Further, the detecting means is composed of a two-dimensional array optical sensor capable of individually detecting the light amount in the light receiving area, and the number of pixels in the parallax direction of the optical sensor, that is, the direction connecting the illuminating means and the detecting means is N, When the bit for AD conversion is p and the number of divisions of the area is D, N / D <2 ^ p may be set. Here, 2 ^ p means 2 to the power of p. The detection means detects the light amount distribution by a two-dimensional array sensor including a CCD or CMOS sensor, but at this time, the light amount must be separated by pixels of each array sensor for each partial area. Since N / D is the number of pixels per partial area, at least this bit requires a light amount difference of 1 bit at each pixel position in order to be distinguishable from each other. Since the light amount level that can be resolved by p-bit AD conversion is 2 ^ p, N / D <2 ^ p is a necessary condition for measuring the shape for each pixel.

As a specific example, a CCD of 1 million pixels
If so, the number of pixels is about 1000 × 1000,
N = 1000. In a normal CCD, AD conversion of 8 bits or more is commonly available, so D is generally required to be 1 or more (D = 1 corresponds to the conventional intensity ratio method). Actually, since it is necessary to consider noise and the like at the time of AD conversion, it is necessary to take an effective number of bits for p, so p is as small as 6 to 7. That is,
Under the condition of approximately D> 4, the pattern light divided into the partial regions can be separated. In the conventional intensity ratio method with D = 1, the resolution of the image sensor such as CCD cannot be obtained, so N
The condition of <2 ^ p was not effectively satisfied, and therefore the measurement accuracy was low. However, in this patent, the measurement region is divided into D partial regions to satisfy the condition of the light amount separation in the above technique. Is possible, and as a result, the measurement accuracy is improved by about D times.

Furthermore, the illumination means uses an imaging system to
A configuration may be adopted in which a magnified image of the light amount distribution of the two-dimensional filter array or the two-dimensional mirror array is projected, and the imaging position of the imaging system is located at the center of the measurement range in the depth direction. In a system similar to a commercially available projector that uses an image forming system for the illumination means, the irradiation pattern is blurred and the shape to be measured is deformed at a position back and forth in the depth direction from the image forming position of the pattern. If the image forming position of the image forming system is located at the center of the measurement depth range, blurring will occur on the average both on the front side and the back side of the image forming position, so the blurring in the depth direction that occurs within the measuring range will affect the light intensity distribution. Is minimized and, as a result, the measurement shape error is also reduced.

In the optical shape measuring apparatus according to claim 1 or 8, the illuminating means projects an enlarged image of the dynamic light amount distribution of the two-dimensional filter array or the two-dimensional mirror array by using an imaging system. It is also effective to average the light quantity data captured by the detection means a plurality of times.

Here, it is assumed that an illumination system such as a liquid crystal projector that can dynamically switch the illumination pattern is used as the illumination means, and an imaging system that captures light amount data at a certain timing such as a CCD camera is used as the detection means. Since both the irradiation system and the imaging system perform irradiation / imaging at a certain timing, if there is a timing deviation, the light amount fluctuates and reproducibility is lost. Therefore, here, in order to avoid this, the fluctuation of the light quantity is eliminated by imaging the light quantity distribution a plurality of times by the imaging system and averaging the results. For example, considering a commercially available liquid crystal projector as the irradiation system, and a CCD camera as the image pickup system that takes in data via an AD conversion board. Even if the timing of taking in the camera is not synchronized with the liquid crystal projector, the data is taken in multiple times on the camera side. By averaging, the fluctuation of light quantity can be suppressed.

Next, in the optical shape measuring apparatus according to claim 7, in the invention according to claim 6, the wavelengths of the two types of light patterns are red and cyan which is a complementary color of red, and the wavelength separable detection is performed. Color CCD whose means separates RGB wavelengths
The configuration is Normally, in a color CCD that easily obtains RGB color separation, red:
Since the ratio of the number of pixels of green: blue is often 2: 1: 1, when a light pattern is irradiated with a combination of red and cyan, the light amount can be detected with the same number of pixels for two light patterns. That is, since the light receiving areas of the CCD are the same, it is unlikely that the problem that only the light amount of one light pattern decreases will occur.

The wavelengths of the two types of light patterns may be red and blue, and the wavelength-separable detection means may be a color CCD sensor or a color CMOS sensor that performs RGB wavelength separation. In a commercially available color CCD sensor or color CMOS sensor, the RGB primary colors are often separated by a built-in filter. At this time,
Separation of the red and blue wavelengths is good, but the green filter usually transmits some red and blue light. Therefore, here, two types of light patterns are simultaneously irradiated to the measurement region, and red and blue, which have the best color separation, are used when detecting with a color CCD or the like. In this way, even a low-cost color sensor can detect the patterns of two colors with sufficient accuracy.

Further, in the invention according to claim 4, the illuminating means irradiates one kind of light pattern per partial area,
The light pattern may be an arrangement of continuous or discontinuous colors in the parallax direction of the partial region. That is, the rainbow method is applied to the shape measurement of each partial area of the invention according to claim 4, and the accuracy of shape measurement is improved by dividing into a plurality of partial areas.

Since the light pattern illuminated by the illumination means has colors arranged continuously or negatively in the parallax direction,
The irradiation direction and the color correspond to a certain partial area, and the irradiation angle, that is, the shape can be obtained by determining the color of the reflected light by the detection means. The order of the colors does not have to be lined up according to the length of the wavelength, and it is sufficient that the order is predetermined. In the present invention, since the shape measurement can be performed by irradiating the light pattern from the illuminating means only once, the illuminating means can be simplified.

Furthermore, it is also possible to irradiate a pattern with a uniform light quantity outside the measurement region and monitor the light quantity from the reflected light quantity. It is desirable that the irradiation light source always has a constant irradiation light amount, but in reality, it is costly to make the irradiation light amount constant. Therefore, here, by irradiating the part outside the measurement range with a constant light intensity pattern for light intensity monitoring, and monitoring the light intensity with a detection system, the light intensity variation can be detected only by software, without additional hardware, Can be corrected. If there is a change in the amount of light detected by the detection means, the intensity ratio obtained using that amount of light also changes by a constant multiple,
As a result, the shape is deformed. Since the variation ratio of the light amount variation roughly corresponds to the distance accuracy, if the light amount variation is 1%, the shape error is also 1%.

Even with a commercially available expensive light source that has been stabilized, the stability of the light quantity is about 1%. Therefore, when performing shape measurement with high accuracy, it is essential to correct the light quantity fluctuation. With this configuration, since the light source variation can be measured during the actual measurement by performing the light amount monitoring, it is possible to easily improve the shape accuracy error due to the light amount fluctuation of the light source.

An optical shape measuring device according to an eighth aspect of the present invention comprises a rough shape measuring means for measuring a rough shape of a measurement region, and a first shape measuring means.
1 in each of the partial measurement areas in the measurement area divided into a plurality of partial measurement areas that are divided perpendicularly to the parallax direction connecting the illumination means and the first detection means.
First illuminating means for illuminating more than one kind of light pattern, first detecting means for detecting reflected light of the light pattern illuminated on each of the partial measurement regions, and reflected light detected by the first detecting means Shape measurement means for removing the ambiguity of each of the partial measurement regions from the shape data obtained from the light intensity of the light and the rough shape measurement means, and obtaining shape data without ambiguity. It is composed of.
In this claim, the shape is obtained in advance by the rough measuring means, and the detailed shape is obtained by irradiating the partial region with the light pattern as in claim 1, and the ambiguity of the latter shape data is the former shape data. The feature is that the two types of shape measuring means, which are to be removed, are complementarily combined.

The first illumination means irradiates a light pattern for each partial area and the first detection means obtains the light amount, which has the same structure as in claim 1, but the general shape measuring means first measures the measurement area. It is possible to determine which partial area each measurement point of the measurement area belongs to by measuring the entire shape data of the. If this information is used, the ambiguity regarding the region to which the light amount data obtained from the shape measuring unit belongs is eliminated. Therefore, the first shape estimating unit matches the two shape data so that there is no inconsistency. The entire shape of the measurement area can be obtained without any space. In this device, the outline shape measuring means and the light pattern are obtained by projecting and detecting the light pattern in a partial area to obtain the shape in duplicate, so it seems to be wasteful, but the outline shape measuring means uses the detected amount of reflected light. In order to remove the ambiguity of the partial area, it is sufficient to determine which partial area each measurement point of the measurement area belongs to, so the shape measurement accuracy may be low. As the rough shape measuring means, any shape measuring means may be used as long as the rough shape is obtained.
A method of stereo matching a two-dimensional image obtained from a multi-lens camera that does not require active illumination may be used.

An optical shape measuring apparatus according to a ninth aspect is the optical shape measuring apparatus according to the eighth aspect, wherein the general shape measuring means is
Second illumination means for irradiating the measurement area with two kinds of light patterns, second detection means for detecting reflected light of the light pattern illuminated on the measurement area, and detection by the second detection means The second shape estimating unit determines the shape data of the measurement region based on the ratio of the light amounts of the two types of reflected light. This claim applies the measuring means by the intensity ratio method to both the rough shape measuring means for obtaining the entire measuring area and the shape measuring of each partial area of the invention according to the seventh aspect.

In the general shape measuring means, first, two kinds of light patterns are irradiated and the light amount is detected by the second detecting means,
By obtaining the shape data of the entire measurement area by the second shape estimation means from the ratio of the two light quantities, the partial area to which each measurement point of the measurement area belongs can be determined. Similarly, the first shape measuring means also obtains the ratio of the amounts of reflected light obtained by illuminating two types of light patterns for each partial area, but the ambiguity of the partial area to which the partial shape already belongs is known from the shape data. Therefore, the first shape estimating unit can obtain the shape data of the entire measurement region from the ratio of the shape data and the light amount.

Although the rough shape measuring means is less accurate than the shape measuring means, it has sufficient accuracy to remove the ambiguity of the region, and therefore the overall shape can be obtained with the accuracy of the shape measuring means without ambiguity. it can. Here, the first illumination means and the second
The lighting means may be the same lighting means, or
The first detecting means and the second detecting means may be the same means. For example, by switching the irradiation patterns by the same means, the parallaxes of the rough shape measuring means and the shape measuring means can be made equal, so that the processing by the first shape estimating means can be simplified.

Here, the outline shape measuring means and the pattern irradiated by the shape measuring means are a pattern in which the light quantity monotonously changes in the parallax direction over the entire measurement area in color 1, and a uniform pattern over the entire measurement area in color 2. It consists of a pattern of light quantity, a pattern in which the light quantity monotonously changes in the parallax direction for each partial area in color 3, and the light quantity of color 2 is always smaller than the light quantity of color 1 and color 3,
Color 1 is red, color 2 is green, color 3 is blue, or color 1 is blue, color 2 is green, color 3 is red, and the detection means is a color CCD sensor or a color CMOS sensor that performs RGB wavelength separation. It may have a certain configuration. That is, here, the intensity ratio method is used for both the rough shape measuring means and the shape measuring means. Two types of light intensity patterns are required for each method, but one of them is used in common, three patterns are assigned to red, green, and blue, and they are irradiated simultaneously, and are collectively detected by a color sensor, which is necessary for shape measurement. The number of pattern irradiations is set to once.

As the irradiation pattern used for the rough shape measuring means, a pattern in which the light quantity monotonously changes in the parallax direction over the entire measurement area irradiated with color 1 and an entire measurement area irradiated with color 2 are used. Then, a rough pattern is obtained from this intensity ratio using a pattern of uniform light intensity. This 2 in the measurement area
Since the intensity ratio of one pattern to the irradiation angle is unique,
The conventional intensity ratio method remains unchanged.

As the irradiation pattern used for the shape measuring means, a pattern having a uniform light amount over the entire measurement region irradiated with color 2 and a monotonous light amount in the parallax direction for each partial region irradiated with color 3 are used. With changing patterns. This 2
In the intensity ratio of the two patterns, the same intensity ratio exists for each partial area. Therefore, the approximate shape is determined in advance by the approximate shape measuring means, and then the partial area is specified to obtain the detailed shape for each partial area. At this time, a pattern having a uniform light amount over the entire measurement region irradiated with color 2 is a pattern common to the rough shape measuring unit and the shape measuring unit,
Assign this color to green. The remaining two patterns are assigned to colors with good color separation, red and blue. By irradiating these three color patterns at the same time and performing color separation using a color sensor with a color filter, the three light amount information is independently detected.

The color purity of the irradiation light source can be easily increased by using a laser or a light emitting diode, but the green filter of the color sensor has a wide transmission wavelength range, and it is often difficult to separate red and blue colors. . That is, red and blue information is likely to be mixed in the green information obtained by the color sensor. Conversely, by increasing the color purity of the light source, it is possible to prevent the green information from being mixed with the red and blue information obtained by the sensor. If the green pattern has a uniform intensity and a large amount of light is set for the remaining two patterns, the effect of mixing red and blue data on green can be sufficiently reduced, and the resulting distortion of the shape also decreases. .

Further, the color 2 may be white, and the light amount data detected by the color 2 may be used as the texture of the measurement area. For example, white is selected as the uniform pattern of the above-mentioned color 2 instead of green, and the intensity is not limited. Since the uniform pattern is illuminated with white, it is necessary to perform illumination and photographing separately from the remaining two color patterns. When a uniform white pattern is emitted, the same conditions as when capturing the texture image of the measurement area are obtained, as in normal camera photography. When measuring the shape,
A method of mapping a texture image on a polygon composed of the obtained shape data is generally performed.
Here, shape measurement and texture capture are performed in the same pattern. Therefore, apparently, the shape measurement was taken once.
It is possible to perform shape measurement with a texture in a total of two times of photographing the texture, the number of times of capturing is reduced, and the user is not burdened.

Finally, in the optical shape measuring apparatus according to claim 10, in the invention according to claim 8, the light pattern for illuminating each of the partial measurement regions by the first illuminating means is:
The color of the partial measurement areas is continuous or discontinuous in the parallax direction. The present invention applies the measuring means by the intensity ratio method to the rough shape measuring means for obtaining the entire measuring area of the invention according to claim 8, and the measuring means by the rainbow method for measuring the shape of each partial area. Is.

In the general shape measuring means, first, two kinds of light patterns are irradiated and the light amount is detected by the second detecting means,
By obtaining the shape data of the entire measurement area by the second shape estimation means from the ratio of the two light quantities, the partial area to which each measurement point of the measurement area belongs can be determined. In the first shape measuring means, color information is obtained for each partial area from the amount of reflected light obtained by illuminating one type of light pattern in which colors are arranged for each partial area. Is known from the shape data, the first shape estimating means can obtain the shape data of the entire measurement region from the shape data and the color information. According to this configuration, since the rainbow method is applied to the shape measuring means, only one type of irradiation pattern is required.
The structure of the illumination means can be simplified.

Similarly to the eighth aspect, the rough shape measuring means is lower in accuracy than the shape measuring means, but has sufficient accuracy to remove the ambiguity of the region, and thus the shape of the entire shape is measured without ambiguity. It can be determined with the accuracy of the means. Here, the first illuminating unit and the second illuminating unit may be the same illuminating unit, or the first detecting unit and the second detecting unit may be the same unit. For example, by switching the irradiation patterns by the same means, the parallaxes of the optical shape measuring means and the optical shape measuring means can be made equal, so that the processing by the shape estimating means can be simplified.

Further, in the optical shape measuring apparatus according to claim 11, in the invention according to claim 8, the intensity distribution of the light pattern for illuminating each of the partial measurement regions by the first illuminating means has different phases. The configuration is a sine wave. The present invention applies the measuring means by the intensity ratio method to the rough shape measuring means for obtaining the entire measuring area of claim 8 and the measuring means by the phase shift method for measuring the shape of each partial area.

In the rough shape measuring means, first, two kinds of light patterns are irradiated and the light amount is detected by the second detecting means,
By obtaining the shape data of the entire measurement area by the second shape estimation means from the ratio of the two light quantities, the partial area to which each measurement point of the measurement area belongs can be determined. The shape measuring means projects a sine wave light pattern having the same period as the partial region. For example, the number of light patterns is 3, and the phase difference between the light patterns is π / 2, π. Since the ambiguity of the partial regions to which it already belongs is known from the shape data, the first shape estimation means removes the ambiguity of the phase difference from the shape data and the phase difference information of the three optical patterns obtained by the procedure of the phase shift method. At the same time, the shape data of the entire measurement region can be obtained.

Here, since the phase shift method is applied to the shape measuring means, the number of light patterns to be irradiated is increased as compared with the intensity ratio method or the rainbow method, but the measurement accuracy can be improved. As in the eighth aspect, the rough shape measuring means is less accurate than the shape measuring means, but has sufficient accuracy to remove the ambiguity of the region, and therefore the entire shape is measured without any ambiguity. Can be obtained with the accuracy of. Here, the first illuminating unit and the second illuminating unit may be the same illuminating unit, or the first detecting unit and the second detecting unit may be the same unit. For example, by switching the irradiation patterns by the same means, the parallaxes of the optical shape measuring means and the optical shape measuring means can be made equal, so that the processing by the shape estimating means can be simplified.

[Embodiment 1] In this embodiment, claims 1, 3,
Based on 4, 5. In the claims, the illuminating means is the illuminating device 4, the detecting means is the camera 10, the measurement area is 15, the partial areas of the measurement area are 15-1, ... 15-6, the light patterns are the transmittance patterns of the filters 2a and 2b, and the reflected light amount. Is the light quantity data 13, the shape data with ambiguous regions is 16, the shape estimation means is the shape estimation device 11, and the shape data is the shape data 1.
4. The shape correction means corresponds to the shape correction device 12. As shown in FIG. 1, the configuration of the present embodiment irradiates the measurement object 6 with the illumination light 5 of the illumination device 4, detects the image of the reflected light 7 with the camera 10, and measures the measurement object 6 according to the principle of triangulation. It measures the shape. Here, in order to make the drawing easier to understand,
The reflected light 7 is drawn only for the partial region 15-4.
The parallax direction is the direction connecting the camera 10 and the lighting device 4, and is the left-right direction in the drawing.

Inside the illuminating device 4, the white light source 1a and the white light source 1b illuminate the filter 2a and the filter 2b, respectively.
The light whose intensity is modulated by the two filters is combined by the prism 3 with the optical axes thereof being combined to be irradiation light 5. The illumination light 5 emitted from the illuminating device 4 passes through the filter 2 to the partial regions 15-1, ... 15-6 obtained by dividing the measurement region 15 into six regions.
Illumination is performed with two different light patterns according to the transmittances of a and 2b. The light patterns are switched by switching between the light sources 1a and 1b. The camera 10 includes a CCD 9 that detects an image of the measurement object 6 and an imaging lens 8 that forms an image on the CCD 9. The light quantity data 13 obtained by the CCD 9 is the shape data 1 having the indefiniteness of the area by the shape estimation device 11.
6, and the shape correction device 12 finally generates the unambiguous shape data 14.

If the sum of the transmittance distributions of the filters 2a and 2b is taken, the transmittance becomes a constant distribution in the parallax direction. Therefore, if the sum of the texture data obtained by the two light patterns is taken, the measurement area is obtained. It can be used as texture data when the entire surface is illuminated with uniform light. As shown in FIG. 2, the filters 2a and 2b modulate the transmittance in the parallax direction in correspondence with the partial regions, and have a sawtooth transmittance distribution. Filter 2a and filter 2b are the same 6
Although it is divided into periods, the increase / decrease in the transmittance differs in the parallax direction. Therefore, the emission angle of the illumination light 5 emitted from the light sources 1a and 1b is related to the density of the transmittance of the filters 2a and 2b, and when limited to the partial region, it is the same as the normal intensity ratio. When the ratio of the reflected light of the light pattern with which the measurement object 6 is irradiated by the two filters is obtained, it is unclear which partial region it belongs to, but the emission angle is obtained.

The shape estimating device 11 performs this processing, and as a result, the shape data 16 having the ambiguity of the area is output. As shown in the enlarged perspective view of the main part of FIG. 3, the filters 2 a and 2 b arranged on the side surface of the prism 3 are illuminated by the light sources 1 a and 1 b, and the measurement region 1 including the measurement object 6 is measured.
Irradiate 5. The measurement area 15 is divided into six partial areas 15-1, ..., 15-6 in the parallax direction and illuminated in accordance with the six divisions of the filters 2a and 2b. The irradiation patterns of the filter 2a and the filter 2b are aligned so that the partial areas match each other.

For each partial area, the two patterns of the filter 2a and the filter 2b are irradiated twice by switching the light sources 1a and 1b, and the camera 10 photographs twice. The amount of light increases and decreases with respect to the parallax direction for each partial region 2
Since the reflection pattern of one light pattern is formed, the shape of each partial region can be obtained by obtaining the light amount ratio of the two patterns and applying the intensity ratio method for each region. This calculation is performed by the shape estimation device 11. However, CC
Although the light quantity ratio can be obtained in D9, it is unclear which of the six partial regions it corresponds to. Therefore, for example, in the shape correction device 12 so that the shape data 16 of the partial regions are continuously and smoothly connected to each other. Perform the operation to disambiguate the area. The result is output as the shape data 14.

In this embodiment, since the light pattern that increases or decreases in the parallax direction is illuminated for each of the six partial areas, if the maximum transmittance and the minimum transmittance of the filters 2a and 2b are the same, the measurement area 15 Compared with the case of illuminating with an increasing or decreasing light pattern with respect to the whole (Fig. 4),
The change in the amount of light per unit length is 6 times that in the parallax direction. Since the CCD 9 has a limit in the light amount resolution that can be detected, a large change rate of the resolution leads to an improvement in the light amount resolution. After all, the measurement area 15 is changed to the partial area 15
By dividing into -1, ... 15-6, the rate of change in light quantity can be increased, so that the accuracy of shape measurement is improved. When it is not desired to lower the minimum transmittance of the filters 2a and 2b so that the light amount can be detected even if there is an influence of background light which is not desirable for the shape measurement (FIG. 5), the area shown in this embodiment is used. It is particularly effective to divide the light source to increase the rate of change in light quantity.

In the present embodiment, the number of divisions of the area is set to 6, but
The number of divisions may be changed according to the required accuracy. Further, as shown in FIG. 6, the changing direction of the transmittance of the filter may be changed for each adjacent region. By doing so, even if the same light pattern is used, the increasing direction is alternately changed for each area, and thus it becomes somewhat complicated to determine which area each adjacent partial area belongs to. However, in comparison with the case of FIG. Differently, a mask that does not cause a rapid change in the light amount in the adjacent partial regions may be used, which facilitates the manufacture of the filters 2a and 2b.

[Embodiment 2] In this embodiment, claims 1, 3,
It is based on 4, 5, 6, 7. The configuration of this embodiment is the same as that of the first embodiment, but the filters 2a and 2b may be different color filters and the CCD 9 may be a color CCD. For example, if the filter 2a is a red filter and the filter 2b is a color filter that transmits cyan (complementary color of red), the light source 1
Even if both a and 1b are made to emit light at the same time, the color CCD 9 can detect the data of the filters 2a and 2b as red and cyan (the sum of the green and blue data), so that the camera 10 only needs to take one image. There is an advantage that image deterioration due to camera shake of the camera 10 is less likely to occur. Also,
In a color CCD, the ratio of the number of red: green: blue pixels to all pixels is often 2: 1: 1. Therefore, when a light pattern is illuminated with a combination of red and cyan, the amount of light is detected with the same number of pixels. Therefore, it is possible to avoid the problem that the sensitivity of only one of the light patterns decreases when the color CCD 9 detects the light.

[Embodiment 3] This embodiment has the following features:
Based on 4, 5. The configuration of this embodiment is the same as that of the first embodiment, but the distributions of the transmittances of the filters 2a and 2b are different. FIG. 7 shows the transmittance distributions of the filters 2a and 2b. As compared with FIG. 2, the region width near the center of the measurement region 15 becomes narrower and the change in transmittance is larger. The vicinity of the center of the measurement area corresponds to the center observed by the camera 10, and is usually the position where the measurement object 6 is most likely to be observed. Therefore, the width of the divided area is narrowed to measure the shape near the center. The point is that the accuracy is improved.

On the other hand, as the number of regions to be divided increases, the ambiguity in determining the region to be corrected by the shape correction device 12 increases, and the process tends to be complicated. Therefore, the periphery of the measurement region in which the measurement object 6 is rarely arranged is small. The width of the region division of the filter is increased at the parts (right and left ends), and the accuracy is slightly reduced compared to the center. In the present embodiment, the precision is focused on the required portion to improve the precision, and the labor required to recover the required precision and the ambiguity of the region determination can be optimized.

[Embodiment 4] In this embodiment, claims 1, 3,
Based on 4. The structure of this embodiment is shown in FIG. The configuration is similar to that of the first embodiment, but the configuration of the lighting device 4 is different. The illumination device 4 is composed of a single light source 1 and a filter 2, and the filter 2 irradiates a light pattern of 10 colors for each of the partial regions 15-1, ..., 15-6. As shown in FIG.
The filter 2 is divided into six parts, and bandpass color filters having different colors are arranged in each region. As shown in FIG. 10, 6
The filter 2 is configured by arranging band-pass color filters obtained by dividing the visible wavelength into 10 for each part.

The white light emitted from the light source 1 passes through the filter 2 and then illuminates the measurement object 6 as illumination light 5. The reflected light 7 reflected by the measuring object is reflected by the color CC of the camera 10.
If the color of the reflected light 7 is detected by detecting at D9, the color CC
Since the irradiation angle divided into 10 can be separated for each point of D9, the shape estimation device 11 calculates the shape data 16 having the ambiguity of the region. Similar to the first embodiment, the shape correction device 12 eliminates the ambiguity of the area determination and obtains the final shape data 14.

In this embodiment, by arranging the bandpass color filters 16-1-1, ... 16-6-10 in the six divided partial areas 15-1, ... 15-6, the light source The relationship between the irradiation angle of the illumination light 5 from 1 and the color is associated. Since the color resolution of this method is determined by the type of filters that are arranged, color resolution (that is, angular resolution and shape resolution) is greater than when a continuous color distribution is generated using a normal color separation prism or diffraction grating. However, since the color order of the filters can be freely set and a thin filter material can be integrated by a semiconductor process similar to that of a liquid crystal panel, there is an advantage that the filter has a thin and simple structure.

Here, by dividing into six partial areas, even if there are 10 kinds of bandpass color filters, the resolution is the same as that of 6 times.
The filter 2 is substantially composed of 6 × 10 = 60 kinds of bandpass color filters. In the present embodiment, unlike the first embodiment, a prism is not necessary, and only one filter 2 and one light source 1 are required, so that the structure can be greatly simplified.
In addition, the number of times of photography is only one, and the labor of measurement is greatly reduced.

[Embodiment 5] This embodiment is based on claims 8 and 9. In the claims, the first illuminating means and the second illuminating means are the illuminating device 4, the first detecting means and the second detecting means are the camera 10, the measurement area is 15, the partial area of the measurement area is 15-1, ... , 15-6, the light pattern corresponding to the second lighting means corresponds to the transmittance pattern of the filter 2a, and the light pattern corresponding to the first lighting means corresponds to the transmittance pattern of the filters 2b and 2c, the second lighting means. The amount of reflected light to be reflected and the amount of reflected light corresponding to the first illuminating means are the light amount data 13, and the shape data by the rough shape measuring device is the rough shape data 1.
7, the second shape estimation means is a rough shape estimation device 18, the first
The shape estimation means of No. 2 corresponds to the shape estimation device 11, and unambiguous shape data corresponds to the shape data 14.

The structure of this embodiment is shown in FIG. The configuration is similar to that of FIG. 1 of the first embodiment, the measurement object 6 is irradiated with the illumination light 5 of the illumination device 4, the image of the reflected light 7 is detected by the camera 10, and the shape of the measurement object 6 is measured by the principle of triangulation. Is to measure. Similar to FIG. 1, the reflected light 7 is drawn only for the partial region 15-4. The parallax direction is the direction connecting the camera 10 and the lighting device 4, and is the left-right direction in the drawing.

Inside the illuminating device 4, three white light sources 1a, 1b and 1c illuminate the three filters 2a, 2b and 2c, and the light whose intensity is modulated by the three filters is directed to the optical axes of the two prisms 3. The combined light is used as irradiation light 5.
The illumination light 5 emitted from the illuminating device 4 has partial regions 15-1, ..., 15-6 obtained by dividing the measurement region 15 into six regions.
Are illuminated with three different light patterns according to the transmittances of the filters 2a, 2b, 2c. The switching of the light pattern is performed by switching the light sources 1a, 1b, 1c. Camera 1
0 is the CCD 9 that detects the image of the measurement object 6 and this CC
The image forming lens 8 forms an image on D9. The shape of the data obtained by the CCD 9 is estimated by the shape estimating device 11. However, unlike the first embodiment, the ambiguity of the region determination is essentially removed by adding the rough shape estimating device 18.

The transmittances of the filters 2a, 2b and 2c are shown in FIGS. 12 (a), 12 (b) and 12 (c). As shown in FIG. 12A, the change in the transmittance of the filter 2a linearly and monotonically increases over the entire measurement region, while the change in the transmittance shown in FIG.
As shown in FIGS. 2 (b) and 2 (c), the changes of the filters 2b and 2c have a monotonous increasing and monotonically decreasing distribution in each subregion. These three filters 2a, 2b,
Ra, Rb, R of the received light data from the CCD 9 irradiated by 2c
Let c be the sum Rs of Rb and Rc, which is the received light data when the entire measurement area is illuminated with uniform light, so that it can be used as texture data, and at the same time Ra and Rs can be used by the normal intensity ratio method. The overall shape distribution can be obtained.
That is, the light amount data 13 of Ra, Rb, and Rc are first input to the rough shape measuring device 18, and then to the shape estimating device 11 as the rough shape data 17.

Schematic shape data 17 obtained from Ra and Rs
Is lower in accuracy than the shape data obtained by applying the intensity ratio method to each of the regions divided from Rb and Rc, but it is sufficient to determine which point belongs to which region. That is, Ra, Rb, and Rc are measured, and by determining the shape of the measurement object 6 from Ra and Rs, it is determined to which partial area each point of the image obtained by the CCD 9 belongs, and the ambiguity regarding the partial area is determined. When the intensity ratio method is applied to Rb and Rc for each belonging partial region, shape data having higher accuracy than the shape data obtained from Ra and Rs can be obtained. That is,
Schematic shape data 17 obtained from the schematic shape measuring device 18
Since it is possible to determine to which partial region the light intensity data of Rb and Rc belong, the shape estimation device 11 removes the ambiguity of the precise region from the light intensity data 13 of Rc and Rb and the rough shape data 17. Is obtained.

In the present embodiment, the number of filters is larger than that of the first embodiment and the configuration of the illumination device 4 is complicated, but the continuity of the shape data 14 performed by the shape correction device 12 of the first embodiment and The effect of being able to essentially eliminate the ambiguity of belonging to a partial region without assuming smoothness and at the same time being able to improve the accuracy of shape measurement is significant. In this embodiment, the three filters 2a, 2b, 2c can be combined with a color filter. For example, the filter 2a,
By combining 2b and 2c with RGB color filters respectively, three light patterns of RGB can be detected independently at the same time by making the CCD 9 which is a light receiving element a color CCD, so that the light source 1a for each filter can be detected. , 1b, 1c
It is possible to irradiate the three light patterns in a collective form without having to switch between.

[Embodiment 6] The present embodiment relates to claims 8 and 10.
Is based on. The configuration of this embodiment is similar to that of the fifth embodiment shown in FIG.
However, the filters 2a, 2b and 2c have different transmittance distributions. 13 (a), (b), (c)
Shows the transmittance of the filters 2a, 2b, 2c. The filter 2a has the same distribution as that in FIG. 12A, in which the transmittance linearly increases in the parallax direction, and conversely, the transmittance distribution of the filter 2b in FIG. 13B is linear in the parallax direction. Decrease to. If the intensity ratio method is applied to the light amount distributions Ra and Rb when the measurement area is irradiated by the two filters received by the CCD 9, the entire shape of the measurement area 15 can be obtained. The filter 2c has the same configuration as the color filter of the fourth embodiment, and is a filter in which bandpass color filters of 10 colors are arranged in each of the six partial regions. Since the partial regions can be unambiguously determined from the light amount detection results of the filters 2a and 2b, by determining the color of the light amount distribution Rc obtained from the filter 2c, the irradiation direction of the illumination light 5, that is, the object The shape can be determined from triangulation.

Also in this embodiment, as in the case of the second embodiment, in consideration of the effect of claim 7, the filter 2a is red and the filter 2b is
Is combined with a color filter that transmits cyan, which is a complementary color of red, and CCD 9 which is a light receiving element is replaced with a color CCD, the measurement areas 15 can be irradiated with the filters 2a and 2b only once. By using the filter 2c, the shape can be measured as a whole by two times of irradiation and light amount detection.

[Embodiment 7] The present embodiment relates to claims 8 and 11.
Is based on. The first illuminating means and the second in the claims
Is a lighting device 4, the first detecting means and the second detecting means are cameras 10, the measuring area is 15, the partial areas of the measuring area are 15-1, ..., 15-6, and the first illuminating means is Both the corresponding light pattern and the light pattern corresponding to the second illuminating means are the transmittance patterns of the liquid crystal panel 2, and the reflected light quantity corresponding to the first illuminating means and the reflected light quantity corresponding to the second illuminating means are light quantity data. 13, shape data obtained by the rough shape measuring apparatus is rough shape data 17, second shape estimating means is a rough shape estimating apparatus 18, first shape estimating means is a shape estimating apparatus 11, and unambiguous shape data is shape data 14. Equivalent to.

The structure of this embodiment is shown in FIG. The illuminating device 4 includes a single light source 1 and a transmissive liquid crystal panel 2, and the liquid crystal panel 2 irradiates a plurality of light patterns for each of the partial regions 15-1, ..., 15-6. The transmittance distribution of the liquid crystal panel is controlled by the liquid crystal panel driver 19, and a desired light amount distribution is applied to the measurement area according to the transmittance distribution of the liquid crystal panel. The irradiation light 5 emitted from the light source 1 through the liquid crystal panel 2 irradiates the measurement area 15 and is reflected by the surface of the measurement object 6 located there, and the reflected light 7
Is imaged on the CCD 9 by the imaging lens 8 of the camera 10. The detection result of the image is taken out from the CCD 9 as the light amount data 13, the rough shape estimating device 18 calculates the rough shape data 17 for removing the ambiguity of the region, and the shape estimating device 11 finally processes it to perform precise processing. It is extracted as the shape data 14 with no ambiguity of a specific area.

The transmittance distribution of the liquid crystal panel 2 is shown in FIG. First, as shown in FIGS. 15A and 15B, a transmittance distribution that linearly increases or decreases in the parallax direction is generated, and the light source 1 emits light for each light transmittance pattern. Light amount data Ra and Rb are obtained. If the ratio of Ra and Rb is used, the approximate shape data 17 of the measurement object 6 can be obtained by applying the normal intensity ratio method in the approximate shape measuring device 18. Therefore, using this data, the shape estimating device 11 It is possible to determine to which partial area each point of the light amount data 13 obtained by the CCD 9 belongs.

Next, the transmittance distribution of the liquid crystal panel 2 is shown in FIG.
As shown in 5 (c), (d), and (e), the light amount data Rc, Rd, and Re are obtained as three sine waves having different phases by π / 2 according to each transmission condition. If the normal phase shift method is applied to these three data, the phase value corresponding to the depth information can be obtained with an ambiguity that is an integral multiple of 2π. This ambiguity is obtained by the intensity ratio method first. Since it is obtained as the rough shape data 17 by the rough shape estimation device 18, the phase shift can be uniquely determined so as to best fit this. Therefore, according to the present embodiment, it is possible to solve the problem of phase indeterminacy of the phase shift method while fully utilizing the high accuracy of the phase shift method.

In addition, regarding Examples 1, 2, 3, and 5,
By using the liquid crystal panel 2 for some cost as in the present embodiment, the light source 1 and the liquid crystal panel 2 which is a filter can be completed as one, and a compact irradiation device 4 can be configured.

Another embodiment of the present invention will be described below.

[Embodiment 8] The structure of this embodiment is the same as that of Embodiment 5.
11 is the same as the CCD 9 of FIG.
This is a case where the number of pixels is 80 × 960 and the AD conversion circuit for digitizing the light amount data of the CCD 9 is 10 bits. The direction in which the 1280 pixels are arranged is along the parallax direction (upward to the right in the drawing) that connects the light source 1a and the imaging lens 8. The number of pixels in this direction N = 1280, and the number of regions is 6
Which corresponds to D = 6 and p = 10. Although the condition is satisfied even when p = 8, the reason for having a margin of p = 10 is that
This is because the increase in the dynamic range of the reflected light amount due to the variation in the reflectance of the measurement object 6 is estimated to be four times. By using this embodiment, the lowest level (p = 8) of the number of bits of AD conversion of CCD can be known, so that the number of bits of AD conversion of actual specifications could be easily estimated.

[Ninth Embodiment] The structure of this embodiment is the same as that of the fifth embodiment.
Is the same as that of the filter 2a, 2b, 2C of FIG.
A non-reflective coating is applied to prevent diffuse reflection. Since the lights of the light sources 1a, 1b, 1C are superposed by the prism 3, the light sources 1b, 1C and the filters 2b, 2C are optically equivalent to being located at the positions of the light source 1a and the filter 2a, respectively.
Only the light source 1a and the filter 2a will be described. If there is no anti-reflection coat, diffuse reflection from the filter overlaps the measurement object 6 and is irradiated, and a new pseudo light source is placed at a position of the filter 2a different from the original light source 1a. As a result, although there are two parallax directions, the CCD camera side cannot separate the data depending on these two base lines, so that the assumption of triangulation is broken and an incorrect shape is reproduced. Therefore, in this embodiment, since the filters 2a, 2b, 2c are non-reflective coated, this pseudo light source does not exist and the shape is not incorrect.

[Embodiment 10] The configuration of this embodiment is the same as that of the fifth embodiment, but when the shape estimation device 11 obtains a portion divided into six partial areas for each partial area, Data for 7 pixels is discarded at the end (in the cross-sectional view of FIG. 11, in the left-right direction, near the boundary with the adjacent region). Since a shape abnormality is often obtained from about 3 pixels from the boundary edge, 7 pixels from the edge are discarded with a margin. In many cases, there is an abnormality in the original data that associates the intensity ratio with the irradiation angle. Since the light amount distribution changes sharply at the region boundaries as shown in FIGS. 12B and 12C, the light amount variation of the irradiation system, the mounting error of the filters 2a, 2b, 2c, and the light sources 1a, 1
Due to the mounting error of b and 1c, the boundaries of the patterns are not always exactly overlapped. for that reason,
Although a wrong shape is obtained at the region boundary, if the data that is likely to be erroneous at the edge of the partial region is rejected as in the present embodiment, the number of data points obtained is slightly reduced, but the shape data with few errors is reduced. Is obtained.

[Embodiment 11] The construction of this embodiment is shown in FIG. The basic structure of the embodiment is common to that of the seventh embodiment, except that an image forming lens 20 such as a commercially available liquid crystal projector is used for the irradiation unit. The depth of focus of the imaging system is about 100 mm. When the depth range of the measurement area is 400 to 600 mm from the camera 10, the imaging lens 20
Is set to a position of 500 mm from the camera, which is an intermediate position of the depth area. By using this embodiment, it is possible to configure a shape measuring apparatus that maximizes the depth of focus.

[Embodiment 12] The construction of this embodiment is the same as that of the fifth embodiment. In the rough shape estimation device 18 and the shape estimation device 11, the intensity ratio is smoothed in advance and linear interpolation is used to associate the intensity ratio with the irradiation angle.
When fitting with a polynomial, it was saturated with a relative accuracy error of about 0.4% with a 9th-order polynomial with respect to the measured distance, and 0.1% even if the order was raised, but use the intensity ratio smoothing and linear interpolation. It was possible to obtain an interpolation accuracy of 0.06%.

[Embodiment 13] The structure of this embodiment is the same as that of the fifth embodiment. In this embodiment, as shown in FIG.
Calibration is performed by correlating the intensity ratio and the irradiation angle for each elevation angle χ of the surface stretched by the light source, the camera, and the measurement point. The intensity ratio mentioned here includes both the correspondence between the intensity ratio and the irradiation angle used in the rough shape estimating device 18 and the shape estimating device 11.
By calibrating the correspondence between the intensity ratio and the irradiation angle for each elevation angle under the conditions of a CCD camera with a measurement distance of 600 mm, a baseline length of 200 mm, and a 300,000-pixel CCD, the shape accuracy error can be corrected without correcting the distortion on the camera side. It could be improved to less than 0.3%.

[Embodiment 14] The construction of this embodiment is the same as that of the fifth embodiment. In this embodiment, the light amount data is measured from the CCD 9 eight times and averaged. Even if the detected light amount has noise, it is alleviated by this averaging operation. Since the data from the CCD 9 is input at a video rate of 30 frames / second, the reading of the image data is completed in 0.26 seconds even if the averaging operation is performed 8 times, and the measurement time does not take long.

[Embodiment 15] The constitution of this embodiment is the same as that of the fifth embodiment. In this embodiment, the filters 2a, 2b, ... For irradiating the pattern light are configured as shown in FIG.
That is, a portion whose transmittance is modulated for pattern irradiation is provided in the pattern irradiation areas 2a-1, 2b-1, ..., And a portion (light amount monitor area) 2a for irradiating a constant light amount.
-2, 2b-2, ... are newly added. The light that has passed through the pattern irradiation areas 2a-1, 2b-1, ... Illuminates the measurement area and irradiates the pattern light for shape measurement. The light of the light quantity monitor regions 2a-2, 2b-2, ... Has a constant transmittance so that the light quantity does not have a light quantity distribution and a constant intensity of light is emitted. Filter light amount monitor areas 2a, 2b,
The pattern light that has been transmitted through and is irradiated onto a portion other than the measurement object so that it can be detected by the camera 10 without fail. Of the images captured by the camera, first, the reflected light amounts of the light amount monitor area are integrated. The integrated light amount in the light amount monitor area between the filters should not change if the light amounts of the three light sources 1a, 1b, 1c are constant. By measuring the increase or decrease of the light quantity in advance and comparing it with the reference integrated light quantity at the time of shape measurement, the light quantity fluctuation of the light source can be read. Since the absolute value of the light amount measured in the pattern irradiation region can be corrected by using this light amount variation, the correct shape can be obtained from the value of the pixel corresponding to the reflected light in the pattern irradiation region by using the intensity ratio method.

[Embodiment 16] The structure of this embodiment is the same as that of the second embodiment.
But the filter 2a is a red color filter and the filter 2b is a blue color filter. The CCD 9 is a primary color CCD sensor capable of detecting RGB. In this embodiment, while simultaneously irradiating the red and blue patterns with good color separation,
One pattern can be detected separately even with a relatively low-cost CCD.

[Embodiment 17] The constitution of this embodiment is the same as that of FIG. 11 of the embodiment 5, but the filters 2a, 2b and 2c are used.
19A to 19C, 2a is red (a), 2b is blue (b), and 2c is green (c).
It is composed of color filters. The CCD 9 is a primary color CCD sensor capable of detecting RGB. (A) Using the intensity ratio of the reflected light amount of the pattern (c), the rough shape is estimated by the rough shape estimating device 18 from the conventional intensity ratio method, and the intensity ratio of the reflected light amounts of the patterns of (b) and (c) is calculated. The detailed shape of each partial area is obtained by the shape designating device 11 by using. At this time, the light amount of the green pattern in (c) is red in (a), and the light amount in (b) is
Since the light amount distributions of (a) and (b) obtained by the color camera 10 are not so much mixed into the light amount distribution that should be obtained in (c), there is little error in the light amount distribution. A distribution is obtained, and as a result, a shape with few errors is reproduced.

[Embodiment 18] The construction of this embodiment is the same as that of Embodiment 17. However, the white light source 1c is shown in (c) of FIG. 19, and the filter 2c is removed. Light source 1a,
1a is turned on to measure the shape, so that FIGS. 19 (a) and 19 (b) are used.
The pattern is illuminated and the color camera 10 images the amount of reflected light. Next, only the light source 1c is turned on, and the color camera 10 detects the amount of reflected light. In the first embodiment, the shape is reproduced from the ratio of the reflected light amounts of the patterns (a), (b), and (c).
Although the same as No. 7, the texture of the measurement object as captured by a camera with a flash is obtained in the light amount distribution obtained at the time of irradiation of the pattern (c). By mapping this texture on the obtained shape data, not only the shape of the measurement object but also the three-dimensional shape data with a texture that is realistic can be obtained. At this time, the number of times of shooting was 1 time for shape measurement and 1 time for capturing texture, a total of 2 times,
The burden on the user is small.

It should be noted that each of the above-described embodiments is merely an example of the present invention, and the present invention should not be limited to these, and appropriate modifications and improvements are made without departing from the spirit of the present invention. It goes without saying that you may go to.

[0109]

As described above in detail, according to the present invention, the following effects can be obtained.

In the first aspect, the measurement area is divided into a plurality of partial areas that do not overlap each other, and the shape measuring method is applied to each of the partial areas to measure the shape, thereby improving the accuracy of the entire measurement area. Therefore, as compared with the case where the region is not divided, the accuracy of shape measurement can be improved even though the same shape measurement method is used. In claim 2, in addition to claim 1, by adjusting the size of the partial areas according to the desired measurement accuracy, the total number of area divisions is reduced and the indeterminacy between areas is minimized. The estimating means for estimating can be simplified.

In the third aspect, the one or more types of light patterns with which the partial region is illuminated are periodic with respect to the parallax direction,
Since the light pattern generation mechanism only needs to repeatedly generate the same light pattern, the light pattern generation unit can be simplified. According to the fourth aspect, since the shape detection can be performed collectively by the illumination means collectively illuminating the light patterns, it is possible to shorten the time for shape measurement.

In the fifth aspect, there are two methods for detecting the partial area.
Since only one light pattern is used, the shape can be detected by a simple illumination means without depending on the reflectance of the object. In the sixth aspect, in addition to the fifth aspect, the two light patterns can be simultaneously irradiated by changing the wavelengths, so that the shape detection can be performed collectively, and thus the shape measurement time can be shortened.

In the seventh aspect, in addition to the sixth aspect, since the two light patterns of red and cyan irradiate a light pattern having a wavelength suitable for a color CCD that performs color detection in normal RGB, the accuracy of shape measurement can be improved. Can be improved. In claim 8, since the region indefiniteness of the measurement result of the high-precision shape measuring unit having the region indefiniteness is removed from the measurement result of the shape measuring unit without the region indefiniteness, the entire measurement region is measured. Shape measurement can be performed without any ambiguity while maintaining accuracy.

In the ninth aspect, since only two light patterns are used for the measuring method of the shape measuring unit having no region indefiniteness and the highly accurate shape measuring unit having region indefiniteness, a simple illumination unit is used. Shape measurement can be performed. Claim 1
In 0, there are two optical patterns in the shape measuring means without region indefiniteness, and 1 in the high precision shape measuring means with region indefiniteness.
Since only one light pattern is used, the shape can be measured with a simple illumination means. According to the eleventh aspect, two optical patterns are used for the shape measuring means having no region indefiniteness, and the so-called phase shift method is used for the highly accurate shape measuring means having region indefiniteness, which is a drawback of the phase shift method. While eliminating the indefiniteness of the phase, it is possible to perform highly accurate shape measurement by utilizing the high accuracy that is characteristic of the phase shift method.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a configuration of a shape measuring apparatus according to an embodiment of the present invention.

FIG. 2 is a diagram showing a transmittance distribution of a filter used in the shape measuring apparatus according to the example shown in FIG.

3 is an enlarged perspective view of a main part of the shape measuring apparatus shown in FIG.

FIG. 4 is a diagram (No. 1) for explaining the operation of the shape measuring apparatus shown in FIG. 1.

5A and 5B are views (No. 2) for explaining the operation of the shape measuring apparatus shown in FIG.

6A and 6B are views (No. 3) for explaining the operation of the shape measuring apparatus shown in FIG.

FIG. 7 is a diagram showing a transmittance distribution of a filter used in the shape measuring apparatus according to another embodiment of the present invention.

FIG. 8 is an explanatory diagram showing a configuration of a shape measuring apparatus according to still another embodiment of the present invention.

9 is a diagram (No. 1) showing the transmittance distribution of the filter used in the shape measuring apparatus shown in FIG.

10 is a diagram (No. 2) showing the transmittance distribution of the filter used in the shape measuring apparatus shown in FIG.

FIG. 11 is an explanatory diagram showing a configuration of a shape measuring apparatus according to still another embodiment of the present invention.

12 is a diagram (No. 1) showing a transmittance distribution of a filter used in the shape measuring apparatus shown in FIG.

13 is a diagram (No. 2) showing the transmittance distribution of the filter used in the shape measuring apparatus shown in FIG.

FIG. 14 is an explanatory diagram showing a configuration of a shape measuring apparatus according to still another embodiment of the present invention.

15 is a diagram showing a transmittance distribution of a filter used in the shape measuring apparatus shown in FIG.

FIG. 16 is an explanatory diagram showing a configuration of a shape measuring apparatus according to still another embodiment of the present invention.

FIG. 17 is a diagram showing a calibration situation in which the intensity ratio and the irradiation angle are associated with each other in the shape measuring apparatus according to still another embodiment of the present invention.

FIG. 18 is a diagram showing calibration of a filter in the shape measuring apparatus according to still another embodiment of the present invention.

FIG. 19 is a diagram showing a transmittance distribution of a filter used in a shape measuring apparatus according to an embodiment of yet another embodiment of the present invention.

FIG. 20 is a diagram (No. 1) showing a schematic configuration of a conventional optical shape measuring apparatus.

FIG. 21 is a diagram illustrating the principle of triangulation.

FIG. 22 is a diagram (No. 2) showing a schematic configuration of a conventional optical shape measuring apparatus.

FIG. 23 is a diagram (No. 3) showing a schematic configuration of a conventional optical shape measuring apparatus.

FIG. 24 is a diagram (No. 4) showing a schematic configuration of a conventional optical shape measuring apparatus.

[Explanation of symbols]

1, 1a, ... Light source 2, 2a, ... Filter 2a-1, 2b-1, ... Pattern irradiation area 2a-2, 2b-2, ... Light intensity monitor area 3 prism 4 Lighting equipment 5 illumination light 6 measuring object 7 reflected light 8,20 Imaging lens 9 CCD 10 cameras 11 Shape estimation device 12 Shape correction device 13 Light intensity data 14 Shape data 15, 15-1, ... Measuring area Shape data with 16 undefined areas 17 Outline shape data 18 Schematic shape estimation device 19 LCD panel driver

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Claims (11)

[Claims] 1. Each of the partial measurement areas in the measurement area is divided perpendicularly to the parallax direction connecting the illumination means and the detection means and is divided into a plurality of slit-shaped partial measurement areas that do not overlap each other. Each of the partial measurements is made from an illuminating means for illuminating at least one kind of light pattern, a detecting means for detecting reflected light of the light pattern illuminated in each of the partial measurement regions, and a light quantity of the reflected light detected by the detecting means. While leaving the ambiguity of the correspondence with the number of the area, shape estimation means for estimating the shape data of each partial measurement area by using the parallax of the illumination means and the detection means, and the estimated partial measurement area An optical shape measuring apparatus comprising shape correction means for removing ambiguity in the shape data and obtaining unambiguous shape data of each partial measurement region. 2. In each of the partial measurement areas and the light pattern emitted by the illuminating means, in an area where it is desired to improve the measurement accuracy with respect to the parallax direction, the partial measurement areas are divided more finely than the number of divisions in other areas. The optical shape measuring device according to claim 1, wherein 3. In the illuminating means, one or more types of light patterns illuminated on each of the partial measurement areas are periodic with respect to the parallax direction, and the cycle is within the width of each of the partial measurement areas. The optical shape measuring device according to claim 2, wherein they are equal to each other. 4. The optical shape measuring device according to claim 1, wherein the illuminating unit collectively illuminates the one or more types of light patterns. 5. The shape of the measurement region is calculated from the ratio of the light amounts of the two types of reflected light detected by the shape estimating unit by the shape estimating unit, by irradiating two kinds of light patterns for each of the partial measurement regions. The optical profiler according to claim 4, which estimates data. 6. The illuminating means simultaneously irradiates two types of light patterns for each of the partial measurement regions with different wavelengths,
The optical shape measuring device according to claim 5, wherein the detection is performed by a detection unit capable of wavelength separation. 7. The wavelength of the two types of light patterns is red and cyan which is a complementary color thereof, and the detection means capable of wavelength separation is a color CCD that performs wavelength separation of RGB. The optical shape measuring device described in 1. 8. A plurality of portions which are divided perpendicularly to the parallax direction connecting the rough shape measuring means for measuring the rough shape of the measurement region and the first illuminating means and the first detecting means and which do not overlap each other. First illumination means for illuminating each of the partial measurement areas in the measurement area divided into the measurement areas with one or more kinds of light patterns, and detecting reflected light of the light pattern illuminated in each of the partial measurement areas. The ambiguity of each of the partial measurement regions is removed from the shape data obtained from the first detection means, the light amount of the reflected light detected by the first detection means, and the rough shape measurement means to remove the ambiguity. An optical shape measuring device comprising: a shape measuring unit having a first shape estimating unit that obtains missing shape data. 9. The second illumination means for irradiating the measurement area with two types of light patterns, and the second detection for detecting the reflected light of the light pattern illuminated on the measurement area. 9. The method according to claim 8, further comprising: means and second shape estimation means for determining shape data of the measurement region from a ratio of light amounts of two types of reflected light detected by the second detection means. Optical shape measuring device. 10. The light pattern for illuminating each of the partial measurement areas by the first illuminating means is an array of continuous or discontinuous colors in the parallax direction of each of the partial measurement areas. The optical shape measuring device according to claim 8. 11. The optical shape measuring apparatus according to claim 8, wherein the intensity distribution of the light pattern for illuminating each of the partial measurement areas by the first illuminating means is a sine wave having a different phase. .