JP2002181728A - Visual inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that a special know-how is required for workers on the spot to handle a visual inspection apparatus, forcing the workers to take trouble with the inspection. SOLUTION: The visual inspection apparatus 10 is connected to a server 60 which can communicate with a user terminal 80. The visual inspection apparatus 10 takes images by scanning a substrate face of an object to be inspected, compares the images with a predetermined criterion and judges for every inspection item whether or not the substrate face is good. The server 60 includes a page generation part 70 for generating page data so as to make the user input commands to be transmitted to the visual inspection apparatus 10, a second communication part 76 for transmitting the page data to the user terminal 80, and a relay process part 68 for receiving the commands inputted by the user to the page data and transmitting the commands as data interpretable by the visual inspection apparatus 10 to the visual inspection apparatus 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a visual inspection system and a visual inspection technique for scanning a substrate surface of an object to be inspected to acquire an image and perform inspection. The present invention particularly relates to an image board inspection system.

[0002]

2. Description of the Related Art A process for manufacturing a substrate of an electronic device includes a mounting process of mounting an electronic component on a substrate and an inspection process of inspecting a mounted state of the component. The mounting process is increasing in density, and mounting positions of electronic components on the order of several tens of microns are determined. In addition, the demand for IT-related devices, especially mobile devices such as mobile phones, is increasing, and the mounting process is increasing year by year. On the other hand, in the inspection process after component mounting, it is extremely difficult to find a defect due to the high density of the substrate. In the conventional inspection, a contact-type test method such as an ICT (in-circuit tester) using a prober has been used. There is a growing demand for appearance inspection devices using molds, especially image recognition technology.

In such an appearance inspection apparatus, it is necessary to photograph a component mounting state at a very high resolution corresponding to high-density mounting, and to detect a defect with high accuracy. Therefore, the time required for the inspection tends to be long. Even if the demand for integrated circuits increases and the mounting process speeds up, if the inspection process takes time, product shipment will be delayed,
They will not be able to withstand the current severe production competition. Therefore, the development of a visual inspection apparatus with high accuracy and capable of shortening the inspection time has been promoted.

In such a situation, Japanese Patent Laid-Open No. 10-1
JP-A-53556 discloses a centralized management system that receives video signals of a board from a plurality of visual inspection devices with a video switch, switches the video signals, and displays an image of the board. Japanese Patent Application Laid-Open No. 5-47867 discloses that in a probing test of a semiconductor chip, the status of a contact check is received from a prober and an IC tester to a host computer, and when the contact check is defective, an instruction from the host computer causes the prober to determine the cause of the defect. Disclose a test method for searching for and removing S.

[0005]

However, even if a visual inspection apparatus with high inspection efficiency is developed, if the operator who operates the apparatus is not proficient in using the apparatus or an inspection method specific to the apparatus, the inspection is performed. Cannot be advanced efficiently. Also, in the work of setting inspection data such as inspection items and inspection standards, it is necessary to set appropriate data in accordance with the characteristics of each visual inspection device, which requires specialized knowledge and experience. Recently, in particular, since high-mix, small-quantity order production is performed more than mass production, inspection data setting work, inspection procedures, equipment operation, etc., according to individual boards, are performed by on-site workers. The need for detailed guidance is increasing.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a visual inspection system for operating a visual inspection apparatus from a remote place to set inspection data and perform inspection. is there.

Another object of the present invention is to provide a visual inspection system capable of obtaining an image of an object to be inspected acquired by a visual inspection apparatus at a remote place, and setting an inspection and evaluating an inspection result. .

[0008]

One embodiment of the present invention relates to a visual inspection system. The visual inspection system includes a server connected to a remote user terminal via a network, and an inspection device locally connected to the server. The inspection apparatus scans a substrate surface of an inspection object to capture an image, a memory that stores the captured image, and illuminates the stored image with a predetermined pass / fail determination criterion. And an analysis unit for determining whether or not the result is acceptable. The server transmits a page data to the user terminal to allow the user to input a command to be transmitted to the inspection device from the user terminal, and acquires a command input by the user with respect to the page data. ,
And a relay unit for transmitting the data to the inspection device as data interpretable by the inspection device. The visual inspection system
One of the scanning of the substrate of the inspection object by the inspection device, the capture of the image, and the pass / fail determination, or a process associated therewith, can be performed remotely.

The page data is, for example, data described in a language such as HTML or XML typified by a Web page, and is displayed on a user terminal by a general-purpose browser. The page data may include a description of an input form that allows the user to easily set inspection items, pass / fail criteria, inspection instructions, and the like. The relay unit of the server converts the data input by the user using the input form included in the displayed page data into, for example, a CGI (Common Gatew
The data may be converted into data that can be interpreted by the inspection device, for example, a dedicated machine language interpreted by the inspection device, and transmitted to the inspection device using an ay interface).

The scanning head includes a one-dimensional sensor for detecting reflected light from the substrate surface, and the memory stores, as an image, a screen obtained by scanning the substrate surface on a line-by-line basis. The server receives the image stored in the memory of the inspection device, extracts an image of a specific portion of the board surface at a specified magnification according to an instruction from the user terminal, and sends the image to the user terminal. May be sent.

[0011] The server may store the image acquired by the inspection apparatus in a memory provided in the server, and extract an image of a specific part from the memory at a specified magnification.
Further, in order for the server to acquire an image of the specified magnification of the specific part, an instruction for imaging is sent to the inspection apparatus, and the board surface is again scanned, and an image having at least one different resolution and imaging location is captured, and the image is obtained. May be configured to be received from the inspection device.

[0012] The server may receive, from the user terminal, test data defining at least one of the pass / fail criterion and the test item for each part of the board surface. The server may transmit the inspection data received from the user terminal to the inspection device and return the inspection result to the user terminal. By designating an image area for the image of the board surface received from the server and displayed on the user terminal, a portion of the board surface is specified, the inspection data is created for the portion, and the server May be configured so that the inspection data is transmitted together with a designated image area.

[0013] The inspection apparatus or server further includes an inspection library storage unit that stores, as an inspection library, inspection data including the pass / fail judgment criteria and the inspection items prepared in advance for each type of component mounted on the board surface, The test data may be read from the test library storage unit, transmitted to a user terminal, and edited by a user.

As described above, since the inspection apparatus captures the surface of the inspection object as one screen, the server holds the image, and the area specified by the user can be provided to the user terminal at an arbitrary magnification. Observation of a site of an inspection object at an arbitrary magnification, creation and editing of inspection data for the site, inspection instructions, evaluation of inspection results, and the like can be smoothly performed in a remote place.

[0015] Another embodiment of the present invention relates to a visual inspection system. In particular, the present invention relates to an image board inspection system that acquires an image of a board and performs inspection. The system includes an inspection device,
A user terminal capable of communicating with the inspection device via a network. The inspection apparatus includes a scan head that scans a substrate surface of an inspection object to capture an image, a memory that stores the captured image, and a communication unit that communicates with the user terminal. The user terminal refers to at least a part of an image stored in the memory of the inspection device,
The inspection apparatus includes a controller configured to perform predetermined settings, the stored image is illuminated according to a predetermined acceptance / rejection criterion, and an analysis unit that determines pass / fail of each inspection item is included in the inspection apparatus or the user terminal. Provide.

The communication unit may extract an image of a specific portion of the board surface at a specified magnification from the image stored in the memory in accordance with an instruction from the user terminal, and transmit the image to the user terminal. Good. The control unit may transmit, to the inspection device, inspection data defining at least one of the acceptance / rejection criterion and the inspection item for each part of the substrate surface.

Another embodiment of the present invention relates to a visual inspection method. The visual inspection method includes a step of scanning the substrate surface of the inspection object line by line to obtain an image of the substrate surface; a step of receiving a designated portion and a designated magnification of the image from the user terminal; Extracting an image of the part at the specified magnification and transmitting the image of the specified part to the user terminal; and a predetermined pass / fail criterion for the specified part at the user terminal based on the image of the specified part. And a step of determining pass / fail for each inspection item.

It is to be noted that any combination of the above-described constituent elements, a system expressed as a system, replaced by a method,
The opposite aspect, or a representation of the present invention as a recording medium or a computer program is also effective as an aspect of the present invention.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described. FIG. 1 is a configuration diagram of a visual inspection system according to the first embodiment. The visual inspection system includes a visual inspection device 10, a server 60, and a user terminal 80. The server 60 and the user terminal 80 are connected to the Internet 90 and are configured to be able to communicate with each other. Appearance inspection device 1
In the case of 0, the board is photographed and the mounting state of the electronic component is inspected by image recognition. The server 60 is locally connected to the visual inspection device 10 and receives the image of the board and the inspection result from the visual inspection device 10. The server 60 is accessed from a remote user terminal 80 via the Internet 90. The server 60 has a function as a Web server, displays an image of the board acquired by the visual inspection device 10 on the user terminal 80, and displays a Web page for allowing the user to input an operation instruction for the visual inspection device 10 on the user terminal. 80.

The user sets the inspection data including the position of the part to be inspected on the Web page, inspection items, pass / fail judgment criteria, etc., executes the inspection, and takes in the image of the specific part by performing operations such as enlargement and reduction of the image. Enter instructions. Server 60
Converts an operation instruction input by a user to a Web page into a dedicated machine language that can be interpreted by the visual inspection device 10 using a function such as a CGI (Common Gateway Interface) and transmits the converted machine instruction to the visual inspection device 10 I do.

FIG. 2 is a configuration diagram of the appearance inspection apparatus 10. In this apparatus, an inspection surface of an inspection object is scanned by a line sensor to form an image, and a pass / fail of a component mounting state is determined by image recognition. By driving the scanning head perpendicularly to the scanning direction by the line sensor, an image for each line is sequentially obtained, and an entire image of the substrate surface is obtained by one-dimensional movement of the scanning head. Another type of visual inspection device is one that moves the inspection surface two-dimensionally, stops it, and repeats this to take spot images one after another. In this case, however, the mechanism system is generally complicated, and the inspection time is generally reduced. Is often long. In that respect, the form using the one-dimensional sensor of this embodiment is advantageous. The present applicant has previously described Japanese Patent Application Laid-Open
Japanese Patent Application Publication No. 254500 proposes an appearance inspection apparatus using such a one-dimensional sensor, and may be used in the present embodiment.

As shown in FIG. 2, the appearance inspection apparatus 10 includes a main unit 12 and a test unit 14. A support table 22 is provided below the test unit 14, and holds the substrate 1 as an object to be inspected. Above the test unit 14, a scanning head 16, a stepping motor 20 for driving the scanning head 16, and a guide 18 such as a linear guide for supporting the scanning head 16 are provided.

The scanning head 16 has an illumination unit 30, a lens 32 and a line sensor 34. These members are fixed on a frame 36. Lighting unit 30
Incorporates an epi-illumination source, a side illumination source, a half mirror, and the like. Light reflected vertically upward from the substrate 1 is guided to the lens 32 by the half mirror, passes through the lens 32, and is input to the line sensor 34, which is a one-dimensional CCD sensor. The line sensor 34 scans the substrate 1 line by line and outputs the image data 57 to the memory 44.

The main unit 12 controls the entire apparatus. The main unit 12 may be implemented by a normal computer. The head control unit 40 of the main unit 12 first outputs a lighting control signal 55 to the lighting unit 30 to realize different lighting states according to the content of the test. The head control unit 40 further outputs a motor control signal 56 to the motor 20 and a test start signal 58 to the memory control unit 42. The step control of the motor 20 is performed by the motor control signal 56, and the scanning head 16 moves to the end of the substrate 1 at the start of the inspection. With this position as a start position, the scanning head 16 advances one line by the motor control signal 52 each time one line is scanned thereafter. On the other hand, with reference to the test start signal 58, the memory control unit 42 controls the writing of the image data 57 to the memory 44, and thereafter, the image data 57 is recorded in line units.

The analysis unit 46 reads out the image data 57 from the memory 44 in parallel with the scan or after the scan is completed, and checks the pass / fail of each test item based on a pass / fail judgment criterion recorded in the test data storage unit 48 in advance. to decide. By switching the illumination source of the illumination unit 30 between an epi-illumination source that illuminates vertically downward and a side illumination source that illuminates from the lateral direction, two images are recorded, and an epi-illumination test and a side test are performed. Inspection items include determination of misalignment of parts, missing parts, and missing solder by a drop test, and determination of presence / absence of a solder bridge, wrong mounted parts, and reversal of polarity by a side test.

The inspection setting section 52 sets inspection data defining inspection items and pass / fail criteria for each electronic component on the board in the inspection data storage section 48. The inspection setting unit 52 refers to and uses a library of inspection data prepared in advance for each type of electronic component stored in the inspection library storage unit 50 as needed.

FIG. 3 is a configuration diagram of the server 60. First
The communication unit 62 communicates with the visual inspection device 10 and receives images and inspection results. The server 60 may perform network communication by connecting to the visual inspection device 10 via a LAN.
Visual inspection device 1 directly according to standards such as 232C
0 may be connected to perform serial communication. The second communication unit 76 communicates with the user terminal 80 via the Internet 90, receives an inspection instruction, and transmits an inspection result.

The relay processing unit 68 outputs an operation instruction received from the second communication unit 76 to the first communication unit 62 in order to relay data exchange between the visual inspection device 10 and the user terminal 80, The inspection result received from the first communication unit 62 is output to the second communication unit 76. Relay processing unit 68
May convert data exchanged between the visual inspection device 10 and the user terminal 80 into a format that can be interpreted by both, if necessary. For example, the operation instruction sent to the appearance inspection device 10 is converted into a machine language or the like that can be interpreted by the appearance inspection device 10, and the inspection result sent to the user terminal 80 is
It is converted to natural language. The relay processing unit 68 stores the inspection result in the inspection result storage unit 72. Page generation unit 70
Acquires page data for inputting an operation instruction to the user from the page data storage unit 74, acquires an inspection result from the inspection result 72 as necessary, and creates page data. The relay processing unit 68 provides the page data created by the page generation unit 70 to the user terminal 80 via the second communication unit 76.

The image memory 64 receives image data from the first communication unit 62 and stores it. The image generation unit 66
It receives the image region designation and the magnification designation from the relay processing unit 68, reads the image of the designated region from the image memory 64, generates the image at the designated magnification, and sends it to the user terminal 80 via the second communication unit 76. Send. This image data may be provided to the user terminal 80 while being included in the above-described page data. The user may specify an image area and a magnification using a mouse or the like, and the instruction may be transmitted to the relay processing unit 68. Good.

Referring to FIG. 4 and FIG.
The test library stored in the test library storage unit 0 will be described. The inspection library is a library in which the inspection items of electronic components mounted on the board and the acceptance criteria are determined in advance. As shown in FIG. 4, the data of the inspection library includes an inspection library name, a library type, and window data. The inspection library name is component identification information. The library type is a content indicating a component type such as a chip and an IC connector. The window data is inspection content including a defect attribute to be inspected, a determination method, a pass / fail determination criterion, and the like, and is created for each inspection item.

FIG. 5 shows an example of the window data.
FIG. 5A shows that the defect attribute to be inspected is “out of stock”.
The determination method is a determination based on the length of the component, and indicates an inspection content that the allowable range in the pass / fail criterion may differ from the original length of the component by α. In FIG. 5B, the defect attribute to be inspected is “position shift”, and the determination method is a determination based on the brightness of the captured component, and the allowable range is 0 to 90.
Indicates the content of the test.

FIG. 6 is a diagram for explaining an example of inspection by image recognition. Whether or not the electronic component 2 is correctly mounted on the pattern 4 on the substrate 1 is inspected by image recognition. The image recognition locations 6A to 6D correspond to (a) missing item inspection, (b) solder inspection, (c) parts standing inspection,
(D) In the displacement inspection, the image recognition area is evaluated, and the length, area, brightness, brightness distribution, and the like are evaluated for this area, and pass / fail is determined.

For example, in the missing item inspection, the presence or absence of a part is determined based on the luminance of pixels included in the area 6A which is the center of the position where the part should be. In the solder inspection, a defective solder is determined based on whether or not the area of a bright pixel in a region 6B including a soldered portion is smaller than a predetermined value. In the component standing inspection, it is determined whether the length of the region 6C longer than the entire component including the electrode pattern is shorter than the original length of the component, and it is determined whether the component is floating with respect to the board. In the misalignment inspection, it is determined whether or not the component is shifted and mounted based on the luminance of the area 6D including the electrode pattern on the outer periphery of the component.

FIG. 7 is an explanatory diagram of an inspection data editing screen displayed on the user terminal 80. The user uses a mouse to enclose an area including the electronic component 2 and the pattern 4 on the board in the image 124 with the window 100 and designate a part to be inspected. You can change the magnification of the image by clicking on the designated part with the mouse and enlarge or reduce it. For the specified site, type 102, library 104
Select

The window 106 displays a list of inspection windows. The user will see one of the listed examination windows
One of them can be selected and the inspection window can be edited by clicking the window edit button 116. In addition, a new inspection window can be created and added. With respect to the inspection window selected for editing, current values such as a defect attribute 108, a screen selection 110, a determination method 112, and an allowable range 114 are displayed.

In the defect attribute 108, "mounting position"
"Missing", "Flip", "Position Correction", "Uki",
Specify the inspection items such as “Slip” and “Solder”. In the screen selection 110, the user selects whether to use the screen for the epi-illumination test or the side illumination test. Judgment method 11
In step 2, a determination method such as determination based on length, determination based on brightness, determination based on binarization, or the like is selected. The determination by binarization refers to determination based on a binary value of 0 or 1 such as whether or not there is a pixel having a certain brightness or more. In the allowable range 114, the upper and lower limits of the scale used for the judgment are input. This inspection data editing screen may be used to view the inspection results. In this case, the presence or absence of an error is displayed for each inspection window, and the total number of failures 126 for the component is displayed.

FIG. 8 is a flowchart showing an appearance inspection procedure by the appearance inspection system having the above configuration. The visual inspection device 10 scans the substrate surface to acquire image data (S10). The server 60 receives the image data from the visual inspection device 10 and transmits the image data to the user terminal 80 (S1).
2). The user specifies a part to be inspected on the board while viewing the image (S14). The user creates inspection data for the specified component, which defines inspection items and pass / fail criteria (S16). The server 60 receives the inspection data input by the user terminal 80 and transmits it to the visual inspection device 10 (S
18). The visual inspection device 10 performs an inspection based on the inspection data (S20). The server 60 receives the inspection result from the visual inspection device 10 and transmits it to the user terminal 80 (S2).
2). In step S16, the user may specify the inspection library and use the predetermined inspection data as it is, or edit the inspection data for the specified component.

Next, a second embodiment of the present invention will be described. FIG. 9 is a configuration diagram of a visual inspection system according to the second embodiment. The visual inspection system includes a visual inspection device 10,
And a user terminal 80. The visual inspection device 10 and the user terminal 80 are connected to the Internet 90 and are configured to be able to communicate with each other. The functional configuration and operation of the visual inspection device 10 are the same as those of the visual inspection device 1 of the first embodiment shown in FIG.
0, the communication unit 54 is the same except that the communication unit 54 directly communicates with the user terminal 80, and thus the description is omitted. The user terminal 80 has, as a control unit, the configuration of the inspection function of the main unit 12 in the visual inspection device 10 of the first embodiment, and performs setting of inspection data, image capture, pass / fail determination, and processing associated therewith. It is configured so that it can be performed remotely.

FIG. 10 is a configuration diagram of the user terminal 80. The user terminal 80 has a communication unit 82 as a functional configuration.
, An examination part instruction unit 84, an analysis unit 86, an examination setting unit 88, a memory 92, a display unit 94, an examination data storage unit 96, and an examination library storage unit 98,
Implemented on a normal computer.

The inspection setting unit 88 sets the inspection data and the inspection data for each electronic component on the board to be inspected by the visual inspection apparatus 10 in the inspection data storage unit 96. The inspection setting unit 88 refers to and uses a library of inspection data prepared in advance for each type of electronic component stored in the inspection library storage unit 98 as needed.

The inspection site designating section 84 specifies an inspection site such as an electronic component on the board, and specifies the magnification of the image of the inspection site. The communication unit 82 transmits the instruction content of the inspection part instruction unit 84 to the visual inspection device 10. The visual inspection device 10 scans the substrate surface, stores the image data of the substrate surface in the memory 44, and provides the communication unit 82 with the image data of the specified inspection part at a resolution that matches the specified magnification.

The image data of the examination site received by the communication unit 82 is stored in the memory 92 and displayed on the display unit 94.
The appearance inspection device 10 has a function as a Web server,
In the CGI, the image data may be displayed on the browser of the user terminal 80. The inspection site may be specified by the user selecting an area to be inspected in the image displayed on the browser.

The communication section 82 may receive inspection data defining inspection items and pass / fail criteria for electronic components on the board, and store the inspection data in the inspection data storage section 96. The test setting unit 88 may update the program with reference to the received test data. The inspection site instruction unit 84 includes an inspection data storage unit 96
The inspection site may be designated by allowing the user to select the name and type of the component to be inspected from the inspection data stored in.

The analysis unit 86 reads out the image data of the inspection site from the memory 92 and judges pass / fail of each inspection item based on a pass / fail judgment criterion stored in the test data storage unit 96 in advance.

FIG. 11 is a flowchart showing the procedure of the appearance inspection by the appearance inspection system having the above configuration.
The user specifies the inspection site such as electronic components on the board,
Inspection items and pass / fail judgment criteria for the inspection site are set (S30). The user specifies the magnification of the image of the examination site (S32). The visual inspection device 10 extracts the image of the inspection part from the image of the board taken into the memory 44 at a resolution corresponding to the specified magnification, and transmits the extracted image to the user terminal 80 (S34). The image data of the inspection site is stored in the memory 92 of the user terminal 80, and the image of the inspection site is displayed on the display unit 94 of the user terminal 80 (S36). The analysis unit 86 uses the image data of the inspection site to inspect the inspection site for each inspection item according to the acceptance / rejection criterion (S3).
8). The user compares the test result with the image of the test site, evaluates the validity and problems of the test, such as whether the pass / fail judgment criterion was appropriate, and corrects the test contents (S40).

In the above description, the appearance inspection apparatus 10 has the main unit 12, and the user terminal 80 performs the inspection remotely, and the appearance inspection apparatus 10 can also perform the inspection locally. Was. The embodiment is not limited to this. As a modified example, the main unit 12 of the visual inspection apparatus 10 may include an analysis unit 46 that provides an inspection function, an inspection data storage unit 48, and an inspection library storage unit 5.
0 and the inspection setting section 52 are omitted, and the main unit 12
May be configured to have a function of controlling the test unit 14 to scan the board and capture an image into the memory 44, and a communication function of providing the image data to the user terminal 80.

According to the appearance inspection system according to each of the above-described embodiments, it is possible to operate the appearance inspection device from a remote place, designate a component on the board, execute the inspection, and obtain an inspection result. In addition, the mounting state of the component can be confirmed by an image, and the inspection can be performed visually. For that purpose, it is also possible to enlarge and observe a specific site. In particular, the entire image of the substrate surface can be once downloaded to the user terminal together with the inspection result from the server, and the evaluation of the inspection and the instruction for the re-inspection can be easily performed even in a remote place.

If an appearance inspection system is used, an inspection can be performed in cooperation with a worker at the inspection site. If the operator is not familiar with the inspection, the instructor can provide guidance on the inspection contents from a remote place, and it is possible to smoothly introduce a new visual inspection device to the site.

Further, the visual inspection system can be applied to a case where products are manufactured in a distributed manner at a plurality of manufacturing plants including overseas bases. One skilled worker can be remotely involved in the inspection process at another factory, which leads to a reduction in the number of workers and a reduction in education costs. Particularly under a high-mix low-volume production system, the merit of remote inspection by a person who is familiar with the inspection know-how of a specific product is great.

The present invention has been described based on several embodiments. These embodiments are exemplifications, and it is understood by those skilled in the art that various modifications can be made to the combination of each component and each processing process, and such modifications are also within the scope of the present invention. By the way.

As such a modification, in the first embodiment, the user terminal 80 may be configured to be able to download the image data of the board from the server 60. In addition, when a worker at the site performs an inspection by directly operating the visual inspection device 10, the inspection data is configured to be acquired by the user terminal 80 via the server 60, and the inspection content of the operator can be remotely controlled. An instructor or a developer engineer may modify the data at the ground and return it to the visual inspection device 10 via the server 60. In addition, the visual inspection apparatus 10 downloads the inspection data edited by the user terminal 80 from the server 60, and stores the inspection data in the inspection data storage unit 48.
May be stored. Further, the inspection library storage unit 50 may be provided on the server 60 side.

In the first embodiment, the server 60 is located between the visual inspection device 10 and the user terminal 80, and
Although the GI function is provided and the exchange of data is relayed, the server 60 is omitted, and the main unit 12 of the visual inspection device 10 has a function as a Web server.
It may be configured to execute CGI processing and directly exchange data with the user terminal 80. Conversely, in the second embodiment, a server 60 may be provided to relay data exchange between the visual inspection device 10 and the user terminal 80 by CGI.

As described above, the server function for relaying the exchange of data may be provided inside the appearance inspection apparatus 10 or outside the appearance inspection apparatus 10, but one preferable embodiment is the appearance inspection apparatus. In this embodiment, a server function is provided inside 10 and the server function is integrated with the inspection apparatus. This configuration combines a server function and an inspection function into one C
It is advantageous in terms of cost in terms of processing by a PU, and is highly effective despite its simple configuration. In this preferred embodiment, the following effects are reconfirmed.

Since the appearance inspection apparatus 10 acts as a server for the user terminal 80, the user terminal 80 may be a general-purpose personal computer. The user terminal 80 communicates with the visual inspection apparatus 10 using a general-purpose communication protocol such as TCP / IP, and exchanges data with the HT.
This can be performed using a protocol normally used in WWW such as TP. Since data is presented and input on a Web page written in a general-purpose language such as HTML, the user terminal 80 uses a normal browser function to
The visual inspection device 10 can be remotely operated. When the visual inspection device 10 is accessed from the user terminal 80, the server function of the visual inspection device 10 can also set the access restriction and the priority order by the operator.

Since the image data of the board is stored in the memory of the appearance inspection apparatus 10, the appearance inspection apparatus 10 controls the resolution of the image data so that the entire image of the board is displayed in the image display area of the user terminal 80. , The image data can be transmitted to the user terminal 80. The image on the memory of the visual inspection device 10 is stored at a high resolution in order to perform a high-precision component inspection. However, considering the restriction of the communication environment of the user terminal 80 and observing the board visually, it is not always necessary. This is because it is not necessary to transmit an image at a high resolution. When no image is stored in the memory of the visual inspection device 10, the user terminal 80 may instruct the visual inspection device 10 to obtain an image of the board and store the image in the memory.

When the user recognizes a part having a problem from the entire image of the board, the user designates the part with a mouse or the like in order to observe the mounting state of the part in detail, and requests an enlarged image of the part. The visual inspection device 10 can cut out the image of the part specified by the user from the memory, transmit the image data to the user terminal 80 in a high resolution state, and provide a function like a microscope. At this time, the user terminal 80
Shows the pass / fail result of the inspection performed by the visual inspection device 10 on the component, the inspection data, the inspection history, and the like.
0 and can be displayed together with the image of the component. If the image of the area where the user wants to observe the details is not stored in the memory of the visual inspection device 10, the user terminal 80 instructs the visual inspection device 10 to obtain the image of the region and store it in the memory. May be.

If the user cannot confirm a problematic part from the entire image of the board, an appropriate area may be designated with a mouse to receive an image of an intermediate resolution. Alternatively, instruct the user to enlarge the image using keyboard operation or the operation icon on the browser display screen, and enlarge the image on the board.When the image resolution is so large that it is too large to recognize the parts, the high-resolution image is displayed. You may make it receive again. In addition, receiving an image with a high resolution and therefore a size larger than the display range of the display unit,
The user may move the display area up, down, left, and right with a keyboard, mouse, or the like to find a problematic part. As described above, the visual inspection device 10 can transmit the image data to the user terminal 80 after adjusting the resolution of the image of the board stored in the memory in accordance with the instruction from the user and the usage status.

When the user finds a problem with the inspection, the user adds inspection items, corrects the acceptance / rejection determination criteria, and so on, with respect to the inspection data received from the visual inspection device 10, and rewrites the inspection data. It can be transmitted to the visual inspection device 10. Further, a component inspection item input screen provided in the visual inspection device 10 is displayed on the user terminal 80,
The user may be able to modify some of the inspection items and the pass / fail criteria set in the visual inspection device 10. In this case, dedicated software for performing a predetermined setting change process or a plug-in module incorporated in a browser may be installed in the user terminal 80.

[0059]

According to the present invention, it is possible to operate a visual inspection device from a remote place, observe a test position of an object to be inspected, and efficiently proceed with the test.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a visual inspection system according to a first embodiment.

FIG. 2 is a configuration diagram of a visual inspection device according to the first embodiment.

FIG. 3 is a configuration diagram of a server according to the first embodiment.

FIG. 4 is an explanatory diagram of an inspection library.

FIG. 5 is a diagram illustrating an example of window data of an inspection library.

FIG. 6 is a diagram illustrating an example of inspection by image recognition.

FIG. 7 is an explanatory diagram of an inspection data edit screen displayed on the user terminal.

FIG. 8 is a flowchart showing a visual inspection procedure by the visual inspection system according to the first embodiment.

FIG. 9 is a configuration diagram of a visual inspection system according to a second embodiment.

FIG. 10 is a configuration diagram of a user terminal according to a second embodiment.

FIG. 11 is a flowchart showing a visual inspection procedure by a visual inspection system according to a second embodiment.

[Explanation of symbols]

1 board, 10 visual inspection device, 12 main unit, 14 test unit, 16 scanning head,
30 lighting unit, 34 line sensor, 40 head control unit, 42 memory control unit, 4
4 memory, 46 analysis unit, 52 examination setting unit, 54 communication unit, 60 server, 62 first communication unit, 64 image memory, 66 image generation unit,
68 relay processing unit, 70 page generation unit, 76 second
The communication unit of 80 user terminals.

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) // G01B 11/00 G01B 11/00 HF term (reference) 2F065 AA03 AA07 AA16 AA61 BB05 CC28 DD00 FF01 FF04 MM07 MM16 QQ03 QQ24 RR08 SS04 SS13 UU05 2G051 AA65 AB14 AC01 BA01 CA03 CA04 CB01 CD04 DA07 EA11 EA14 EB01 EB02 EC02 ED15 FA10 5B057 AA03 BA02 BA11 BA17 CA08 CA12 CA16 CE11 CH11 DA03 DB02 DB09 DC32 5E319 AA01 AC01 CD53 GG03

Claims (3)

[Claims] 1. An inspection apparatus, comprising: a user terminal capable of communicating with the inspection apparatus via a network; wherein the inspection apparatus scans a substrate surface of an object to be inspected to capture an image; A memory that stores the obtained image, and a communication unit that communicates with the user terminal, wherein the user terminal refers to at least a part of the image stored in the memory of the inspection device, A control unit for performing a predetermined setting, the stored image is illuminated according to a predetermined pass / fail determination criterion, and an analysis unit that determines pass / fail of each test item is provided in either the inspection device or the user terminal. Features a visual inspection system. 2. The scanning head includes a one-dimensional sensor for detecting light reflected from the substrate surface, and the memory stores an image on a screen obtained by scanning the substrate surface line by line by the scanning head. The communication unit, from the image stored in the memory,
2. The visual inspection system according to claim 1, wherein an image of a specific portion of the board surface is extracted at a designated magnification according to an instruction from the user terminal, and transmitted to the user terminal. 3. The inspection apparatus according to claim 1, wherein the control unit transmits inspection data defining at least one of the acceptance / rejection criterion and the inspection item for each part of the substrate surface to the inspection apparatus. The visual inspection system according to any one of the above.