JP2002122719A - Optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical device capable of adjusting diopter by using a reflection-type optical characteristic variable optical element and an optical characteristic variable mirror, etc., without installing mechanical moving parts. SOLUTION: The optical characteristic variable mirror 9 is constituted of a thin film 9a, coated with aluminum and plural electrodes 9b, and a power supply 12 is connected in between the thin film 9a and the electrodes 9b via a variable resistor 11 and a power supply switch 13, and the resistance value of the variable resistor 11 is controlled by a calculating device 14. The shape of the thin film 9a functioning as a reflection surface is controlled by changing the resistance value of each variable resistor 11, in accordance with a signal from the calculating device 14, so that the optimum image forming performance can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical device,
For example, the present invention relates to an optical device having an optical system for observing with eyes or an optical device having an imaging optical system.

[0002]

2. Description of the Related Art In a digital camera such as a Kepler finder, it is necessary to adjust the diopter in accordance with the diopter of an observer. For this reason, as shown in FIG.
02, a conventional finder including a Porro II prism 903 and an eyepiece 901 moves the eyepiece 901 back and forth. However, a mechanical structure for moving the lens back and forth is required, and there are drawbacks such as taking up space.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of such problems of the prior art, and has as its object to use, for example, a reflection-type variable optical characteristic element or a variable optical characteristic mirror. To provide an optical device that realizes diopter adjustment and the like without a mechanically movable part.

[0004]

The optical device according to the present invention includes, for example, the following.

[1] An optical element with variable optical characteristics.

[2] An optical characteristic variable mirror.

[3] The optical characteristic variable mirror according to the above item 2, wherein an electrostatic force is used.

[4] The optical characteristic variable mirror according to the above item 2, wherein an organic material or a synthetic resin is used.

[5] The optical characteristic variable mirror according to the above item 2, wherein an electromagnetic force is used.

[6] The optical characteristic variable mirror according to the above item 2, wherein a permanent magnet is provided and an electromagnetic force is used.

[7] The optical characteristic variable mirror according to the above item 2, wherein the mirror has a coil and a permanent magnet, and uses electromagnetic force.

[8] The optical characteristic variable mirror according to the above item 2, comprising a permanent magnet, a coil integrated with the mirror substrate, and using electromagnetic force.

[0013]

[9] The optical characteristic variable mirror according to the above item 2, comprising a coil, a permanent magnet integrated with the mirror substrate, and using electromagnetic force.

[10] The optical characteristic variable mirror according to the above item 2, comprising a plurality of coils, a permanent magnet integrated with the mirror substrate, and using electromagnetic force.

[11] The optical characteristic variable mirror according to the above item 2, comprising a plurality of coils and permanent magnets, and using electromagnetic force.

[12] The variable optical characteristic mirror according to the above item 2, comprising a permanent magnet, a plurality of coils integrated with the mirror substrate, and using electromagnetic force.

[13] The optical characteristic variable mirror according to the above item 2, wherein the mirror is provided with a coil and an electromagnetic force is used.

[14] The mirror with variable optical characteristics according to [2], comprising a plurality of coils and using electromagnetic force.

[15] The variable optical characteristic mirror according to the above item 2, wherein the mirror has a ferromagnetic material and uses electromagnetic force.

[16] The optical characteristic variable mirror according to [2], further comprising a coil opposed to the ferromagnetic material and using an electromagnetic force.

[17] The variable optical characteristic mirror according to the above item 2, wherein the mirror has a ferromagnetic mirror substrate and a coil, and uses electromagnetic force.

[18] A variable mirror driven by a fluid.

[19] An optical characteristic variable mirror driven by a fluid.

[20] An optical characteristic variable mirror characterized by combining an optical characteristic variable lens and a mirror.

[21] An optical element having variable optical characteristics and having an extended curved surface.

[22] An optical characteristic variable optical element having a plurality of electrodes.

[23] A variable optical characteristic mirror comprising a plurality of electrodes.

[24] The optical characteristic variable mirror according to the above item 23, wherein the plurality of electrodes include a plurality of electrodes that are not on the same plane.

[25] The optical characteristic variable mirror according to the above item 23, comprising a plurality of electrodes, wherein the plurality of electrodes are formed on a curved surface.

[26] The optical characteristic variable optical element, the optical characteristic variable mirror, and the optical element according to any one of the above items 2, 20 to 23, characterized by being driven by electrostatic force.

[27] The optical characteristic variable optical element, the optical characteristic variable mirror, and the optical element according to any one of the above items 2, 20 to 23, wherein a piezoelectric substance is used.

[28] A variable optical characteristic lens comprising a plurality of electrodes.

[29] The optical characteristic variable optical element, the optical characteristic variable mirror, and the optical characteristic variable lens according to any one of the above items 1, 20 to 22, and 28, wherein liquid crystal is used.

[30] The variable optical characteristic element, variable optical characteristic mirror and variable optical characteristic lens described in 29 above, wherein the liquid crystal orientation is changed by changing the frequency.

[31] A variable-optical-characteristic mirror characterized in that a surface shape in a certain state is a shape close to a part of a quadric surface of revolution.

[32] The optical characteristic variable mirror according to the above item 31, wherein a deviation from a part of the rotational quadratic surface of the surface in a certain state satisfies the expression (2).

[33] The optical characteristic variable mirror according to the above item 31, wherein a deviation from a part of the rotational quadratic surface of the surface shape in a certain state is within 1 mm.

[34] The optical characteristic variable mirror according to the above item 31, wherein the reflecting surface has a portion that does not reflect light.

[35] The optical characteristic variable mirror according to the above item 31, wherein an electrode is provided on the surface of the member facing the optical characteristic variable mirror. [36] Information for controlling the shape is stored in a memory. [37] The optical system according to [31], wherein the optical element provided to face the optical characteristic variable mirror satisfies Expression (1).

[38] An optical system comprising the optical characteristic variable optical element, the optical characteristic variable mirror, the variable mirror, the optical element, the optical characteristic variable lens or the optical system according to any one of the above items 1 to 37. system.

[39] The optical system as set forth in [38], further comprising an extended curved surface prism.

[40] The above-mentioned 38 provided with an optical characteristic variable mirror for obliquely incident a light beam on the optical characteristic variable mirror.
Optical system as described.

[41] The optical system according to any one of [38] to [40], further comprising an optical element using a synthetic resin or a frame using a synthetic resin.

[42] An optical system characterized by compensating for a change in the imaging state of the optical system by changing the optical characteristics of the optical characteristic variable optical element.

[43] Variable optical characteristics By changing the optical characteristics of the optical element, it is possible to mainly compensate for any one or more of temperature change, humidity change, manufacturing error, blur, focus, and diopter of the optical system. Characteristic optical system.

[44] An optical system comprising a variable optical characteristic optical element for preventing blur.

[45] An optical system comprising an optical element with variable optical characteristics and improving the resolving power.

[46] An optical system characterized by having a zooming function or a variable focus function provided with an optical characteristic variable optical element.

[47] Variable optical characteristic optical element or
An optical system comprising at least one extended curved prism and a signal transmission or signal processing function.

[48] An optical system having an even number of mirrors with variable optical characteristics.

[49] An optical system having an even number of reflecting surfaces, the optical system having an even number of variable optical characteristic mirrors.

[50] An optical system having an even number of reflecting surfaces, the optical system having an even number of variable optical characteristic mirrors driven by electrostatic force or fluid.

[51] An optical system having an even number of optical characteristic variable mirrors, characterized by being driven by electrostatic force or fluid, in an optical system having four or more reflecting surfaces.

[52] An optical system comprising a plurality of variable optical characteristic mirrors and satisfying the following expression (8).

[53] The optical system according to any one of the items 38 to 41, wherein the optical system according to any one of the items 38 to 41 is provided.
3. The optical system according to any one of 2.

[54] An optical system having a variable mirror for performing blur prevention.

[55] An optical system having a variable lens for preventing blur.

[56] An imaging optical system comprising an optical characteristic variable mirror and an optical element having a rotationally symmetric surface.

[57] An optical system for an electronic image pickup device, comprising an optical characteristic variable mirror and an optical element having a rotationally symmetric surface.

[58] An optical system for a side-view or perspective electronic endoscope, comprising an optical characteristic variable mirror and an optical element having a rotationally symmetric surface.

[59] An optical system for a side-view or perspective electronic endoscope, comprising an optical characteristic variable mirror, an optical element having a rotationally symmetric surface, and a prism.

[60] An imaging optical system including a plurality of variable optical characteristic mirrors and an optical element having a rotationally symmetric surface.

[61] An optical system for an electronic image pickup device, comprising: a plurality of variable optical characteristic mirrors; and an optical element having a rotationally symmetric surface.

[62] An optical system for an electronic image pickup apparatus, comprising a plurality of variable optical characteristic mirrors and an optical element having a rotationally symmetric surface, and having a zoom function.

[63] An optical system comprising an optical element having variable optical characteristics capable of switching a plurality of focal lengths.

[64] The optical characteristic variable optical element, the optical characteristic variable mirror, the variable mirror, the optical element, the optical characteristic variable lens, the optical system or the imaging optical system according to any one of the above items 38 to 63 are provided. An imaging device characterized by the above-mentioned.

[65] The optical characteristic variable optical element, the optical characteristic variable mirror, the variable mirror, the optical element, the optical characteristic variable lens, the optical system or the imaging optical system according to any one of the above items 38 to 63 are provided. An electronic imaging device characterized by the above-mentioned.

[66] The optical characteristic variable optical element, the optical characteristic variable mirror, the variable mirror, the optical element, the optical characteristic variable lens, the optical system or the imaging optical system according to any one of the above items 38 to 63, is provided. An observation device, characterized in that:

[67] The optical characteristic variable optical element, the optical characteristic variable mirror, the variable mirror, the optical element, the optical characteristic variable lens, the optical system or the imaging optical system according to any one of the above items 38 to 63 are provided. An optical device, characterized in that:

[68] An optical characteristic variable optical element, an optical characteristic variable mirror, a variable mirror, an optical element, an optical characteristic variable lens, an optical system or an image forming optical system according to any one of the above items 38 to 63. An imaging device, characterized in that:

[69] An optical device comprising an optical system having an odd number of reflection surfaces, and having a variable optical characteristic mirror and an image inversion processing section.

[70] An imaging apparatus comprising: an optical system having an odd number of reflection surfaces; and an optical characteristic variable mirror and an image inversion processing unit.

[71] A Kepler-type observation device characterized by using an optical characteristic variable mirror.

[72] A Galilean observation apparatus using a variable optical characteristic mirror.

[73] A finder using an optical characteristic variable mirror.

[74] The observation direction is 20 degrees from the thickness direction of the camera, digital camera, TV camera, VTR camera, etc.
A viewfinder such as a camera, a digital camera, a TV camera, or a VTR camera, which has a variable optical characteristic mirror within the range of °.

[75] A Galileo-type finder or a Galileo-type telescope characterized by using a variable optical characteristic mirror.

[76] A Kepler-type finder or a Kepler-type telescope, characterized by using a variable optical characteristic mirror.

[77] A single-lens reflex imaging apparatus using a variable optical characteristic mirror.

[78] A telescope characterized by using an optical characteristic variable mirror.

[79] An observation apparatus using a variable optical characteristic mirror.

[80] An observation apparatus characterized in that the diopter can be partially changed.

[81] A viewfinder characterized by using an optical characteristic variable mirror.

[82] A head-mounted display using an optical characteristic variable mirror.

[83] A head mounted display using an optical characteristic variable mirror capable of partially changing diopter.

[84] The head-mounted display according to the above item 83, which has a line-of-sight detecting function.

[85] An optical element having a photonic crystal on the surface of the optical element.

[86] An optical element having an extended curved prism or an optical element and a transmission or reflection type photonic crystal.

[87] An optical device using a transmission or reflection type photonic crystal.

[88] An observation apparatus using a transmission or reflection type photonic crystal.

[89] A head-mounted display using a transmissive or reflective photonic crystal.

[0092]

[90] A head mounted display using an extended curved prism, mirror, or optical element and a transmission or reflection type photonic crystal.

[91] An optical apparatus using an extended curved prism, a mirror, or an optical element and a transmission or reflection type photonic crystal.

[92] A measuring method, measuring instrument or measured object characterized in that interference is generated at an inverted wavefront and an optical element or an optical system having an extended curved surface is measured in combination with image processing.

[93] A method, a measuring instrument or a method characterized in that interference is generated in an inverted wavefront, a part of the wavefront is removed, and an optical element or an optical system having an extended curved surface is measured in combination with image processing. What was measured.

[94] An optical measurement method, an optical measuring instrument or an optically measured object of a test object, wherein a canceller having a shape substantially opposite to the optical surface of the test object is used.

[95] A measuring method characterized by determining at least one of a refractive index, a refractive index distribution, and a change in refractive index of a test object using a canceller having a shape substantially opposite to the optical surface of the test object; Measuring instrument or measured object.

[96] Using a canceller having a shape substantially opposite to the optical surface of the test object, at least one of the refractive index, the refractive index distribution, the change in the refractive index, and the eccentricity of the test object is determined from the measurement results of a plurality of times. A measuring method, measuring instrument, or measured object characterized by what is required.

[97] An optical system comprising the variable mirror according to any one of the above items 1 to 38, wherein the variable mirror is arranged near a stop of the optical system.

[98] By deforming the variable mirror, focus adjustment, zooming, zooming, blur correction, correction of a change of an optical device, correction of a change of a subject, and correction of a change of an observer are performed. Optical system.

[0101]

[99] By substantially fixing the peripheral portion of the variable mirror to at least one of the other optical elements and deforming the variable mirror, focus adjustment, zooming, zooming, blur correction, correction of changes in the optical device, An optical system for correcting a change in a subject and a change in an observer.

[100] The center of the variable mirror is substantially fixed to at least one of the other optical elements, and the variable mirror is deformed to adjust the focus, change the magnification, zoom, shake correction, and change the optical device. An optical system that corrects a change of a subject, a change of a subject, and a change of an observer.

[101] A free-form surface variable mirror is provided.
An optical system that performs focus adjustment, zooming, zooming, blur correction, correction of a change in an optical device, correction of a change in a subject, and correction of a change in an observer by deforming a variable mirror.

[102] A variable mirror having a rotationally asymmetric surface or an eccentric rotationally symmetric surface is provided. By deforming the variable mirror, focus adjustment, zooming, zooming, blur correction, correction of a change in an optical device, object An optical system for correcting a change and a change of an observer.

[103] A variable mirror having a rotationally asymmetric surface or a rotationally symmetric surface is provided. By deforming the variable mirror,
An optical system for performing focus adjustment, zooming, zooming, blur correction, correcting a change in an optical device, correcting a change in a subject, and correcting a change in an observer.

[104] An optical system having one or more variable mirrors and performing focusing.

[105] An optical system having two or more variable mirrors and performing zooming and focusing.

[106] An optical system having at least one extended curved surface and a variable mirror.

[107] An optical system having an optical element having a free-form surface and a variable mirror.

[108] An optical system having a free-form surface prism and a variable mirror.

[109] An optical system having an optical element having a rotationally asymmetric surface or an eccentric rotationally symmetric surface and a variable mirror.

[110] An optical system comprising a prism or a mirror having a rotationally asymmetric surface or a decentered rotationally symmetric surface, and a variable mirror.

[111] An optical system comprising a prism or mirror having a rotationally symmetric surface and a variable mirror.

[112] An optical system characterized by having a variable mirror on one side with respect to the longitudinal direction of an optical element having an extended curved surface.

[113] An optical system characterized by having variable mirrors on both sides in the longitudinal direction of an optical element having an extended curved surface.

[114] An optical system characterized in that the number of reflecting surfaces in an optical element having an extended curved surface is three or less and a variable mirror is provided.

[115] An optical system having an optical surface having only one plane of symmetry and a variable mirror.

[116] An optical system having an optical surface having only two symmetry surfaces and a variable mirror.

[117] An optical system characterized by not having an optical element having a light beam converging or diverging function in front of a variable mirror.

[118] An optical system comprising an optical element having a light flux converging or diverging function in front of a variable mirror.

[119] An optical system comprising an optical element having one or more extended curved surfaces, one or more rotationally symmetric surfaces, and a variable mirror.

[120] An optical system comprising: an optical element having one or more extended curved surfaces; an optical element; and a variable mirror.

[121] An optical system having an extended curved prism or an extended curved reflecting surface, an optical element, and a variable mirror.

[122] An optical system having an extended curved prism or an extended curved reflecting surface, a lens, and a variable mirror.

[123] An optical system comprising an optical element having an extended curved surface, a convex lens, a concave lens, and a variable mirror.

[124] An optical system having an optical element having an extended curved surface, a concave lens, and a variable mirror.

[125] An optical system having a plurality of variable mirrors, wherein the normal directions of at least two variable mirrors are in a torsional relationship.

[126] An optical system having a plurality of variable mirrors, wherein normal directions of at least two variable mirrors are substantially on the same plane.

[127] An optical system wherein an optical element is present in an optical path between at least two of the plurality of variable mirrors.

[128] An optical system characterized in that there is no optical element in the optical path between at least two of the plurality of variable mirrors.

[129] An optical system characterized in that an optical element having a light flux converging or diverging action exists between two variable mirrors.

[130] An optical system characterized in that there is no optical element having a light flux converging or diverging effect between two variable mirrors.

[131] An optical system having a plane-parallel plate between two variable mirrors.

[132] An optical system characterized in that there is no parallel flat plate between two variable mirrors.

[133] An optical system comprising a prism or a mirror having a rotationally symmetric surface, a variable mirror, and one or more optical elements.

[134] An optical system comprising a prism or mirror having a rotationally symmetric surface, a variable mirror, and two or more optical elements.

[135] An optical system comprising a prism or a mirror having a rotationally symmetric surface, a variable mirror, and one or more lenses.

[136] An optical system having a prism or mirror having a rotationally symmetric surface, a variable mirror, and two or more lenses.

[137] An optical system comprising a prism or mirror having a rotationally symmetric non-planar surface and a variable mirror.

[138] An optical system comprising a prism or mirror having a rotationally symmetric non-planar surface, a variable mirror, and one or more optical elements.

[139] An optical system comprising a prism or mirror having a rotationally symmetric non-planar surface, a variable mirror, and two or more optical elements.

[140] An optical system comprising a prism or mirror having a rotationally symmetric non-planar surface, a variable mirror, and one or more lenses.

[141] An optical system comprising a prism or mirror having a rotationally symmetric non-planar surface, a variable mirror, and two or more lenses.

[142] An optical system having an optical element having a rotationally symmetric optical surface and a variable mirror.

[143] An optical system comprising an optical element having a rotationally symmetric optical surface and a plurality of variable mirrors.

[144] An optical system having a plurality of optical elements having rotationally symmetric optical surfaces and a variable mirror.

[145] An optical system comprising a variable mirror, a free-form surface prism, and an optical element.

[146] An optical system comprising a variable mirror, a free-form surface prism, and a lens.

[147] An optical system comprising a variable mirror, a free-form surface prism, and a rotationally symmetric optical element.

[148] An optical system comprising a variable mirror, a free-form surface prism, and a rotationally symmetric lens.

[149] An optical system characterized in that a lens is provided on one side with respect to the longitudinal direction of an optical element having an extended curved surface.

[150] An optical system comprising a concave lens on one side in the longitudinal direction of an optical element having an extended curved surface.

[151] An optical system characterized in that a convex lens is provided on one side with respect to the longitudinal direction of an optical element having an extended curved surface.

[152] An optical system characterized by having a plurality of lenses on one side with respect to the longitudinal direction of an optical element having an extended curved surface.

[153] An optical system characterized by having lenses on both sides in the longitudinal direction of an optical element having an extended curved surface.

[154] An optical system characterized in that a lens is provided on the side opposite to the variable mirror with respect to the longitudinal direction of the optical element having an extended curved surface.

[155] An optical system characterized in that a lens is provided on the same side as the variable mirror in the longitudinal direction of an optical element having an extended curved surface.

[156] An image pickup system characterized by having a variable mirror on one side and an image pickup element on the other side with respect to the longitudinal direction of an optical element having an extended curved surface.

[157] An image pickup system comprising a variable mirror and an image pickup element on one side of the optical element having an extended curved surface in the longitudinal direction.

[158] An optical system characterized in that there is no optical element having a luminous flux converging or diverging effect in an optical path between the imaging element and the variable mirror.

[159] An optical system characterized in that an optical element having a luminous flux converging or diverging action exists in an optical path between an imaging element and a variable mirror.

[160] An imaging system comprising an optical element provided on the opposite side of the optical element having an extended curved surface from the image sensor in the longitudinal direction.

[161] An imaging system comprising an optical element provided on the same side as the imaging element with respect to the longitudinal direction of the optical element having the extended curved surface.

[162] An image pickup system characterized in that an optical element is provided between the image pickup element and the optical element having the extended curved surface in the longitudinal direction of the optical element having the extended curved surface.

[163] An imaging system characterized by including a lens on the opposite side to the imaging device with respect to the longitudinal direction of the optical device having the extended curved surface.

[164] An imaging system comprising a lens on the same side as the imaging element with respect to the longitudinal direction of the optical element having the extended curved surface.

[165] An imaging system comprising a lens provided between an imaging element and an optical element having an extended curved surface in the longitudinal direction of the optical element having the extended curved surface.

[166] An imaging system characterized by having a variable mirror and an imaging element on one side and an optical element on the other side with respect to the longitudinal direction of an optical element having an extended curved surface.

[167] An optical element and an image pickup element are provided on one side with respect to the longitudinal direction of the optical element having the extended curved surface.
An imaging system having a variable mirror on the opposite side.

[168] An imaging system characterized by having an optical element and a variable mirror on one side and an imaging element on the other side with respect to the longitudinal direction of the optical element having an extended curved surface.

[169] An imaging system having a variable mirror, wherein the longitudinal direction of the imaging device is not parallel to the symmetry plane of the optical system.

[170] An imaging system having a variable mirror, wherein the longitudinal direction of the imaging device is not perpendicular to the plane of symmetry of the optical system.

[171] An optical system having a variable mirror that changes from positive to negative or from negative to positive when there is a main curvature approximating the mirror surface shape of the variable mirror.

[172] An optical system comprising a variable mirror that changes from positive to negative or from negative to positive with a main curvature approximating the mirror surface shape of the variable mirror, and another optical element.

[173] An optical system having a variable mirror that changes from substantially 0 to minus (concave shape) in a state where there is a main curvature approximating the mirror surface shape of the variable mirror.

[174] An optical system comprising: a variable mirror that changes from approximately 0 to minus (concave shape) with a main curvature approximating the mirror surface shape of the variable mirror; and another optical element.

[175] An optical system comprising a plurality of variable mirrors, wherein at least two of the variable mirrors have, in a certain state, a change in the mirror surface shape of the variable mirror in an opposite direction.

[176] A variable power optical system comprising a plurality of variable mirrors, wherein at least two of the variable mirrors have, in a certain state, a change in the mirror surface shape of the variable mirror in the opposite direction.

[177] An optical system comprising a plurality of variable mirrors, wherein at least two of the variable mirrors have the same change in the mirror surface shape in a certain state.

[178] A variable power optical system comprising a plurality of variable mirrors, wherein at least two of the variable mirrors have the same change in the mirror surface shape in a certain state.

[179] An optical system provided with a variable mirror, which satisfies at least one of Expressions (12) to (13-1) in a certain operation state.

[180] An optical system provided with a variable mirror, which satisfies at least one of Expressions (14) to (15-1) in a certain operation state.

[181] An optical system provided with a variable mirror, which satisfies at least one of Expressions (16) to (17-2) in a certain operation state.

[182] An optical system provided with a variable mirror, which satisfies at least one of Expressions (18) to (19-2) in a certain operation state.

[183] Formula (20) or (20-1)
An optical system having a variable mirror, characterized by satisfying the following.

[184] An optical system having a variable mirror, characterized by satisfying Expression (21) in a certain operation state.

[185] Equations (22) through (22-
An optical system provided with a variable mirror, which satisfies at least one of the requirements (1).

[186] An optical system provided with a variable mirror, which satisfies at least one of the equations (16-3) and (17-3) in a certain operation state.

[187] An optical system provided with a variable mirror, which satisfies at least one of Expressions (23) to (24-1) in a certain operation state.

[188] An optical characteristic variable mirror characterized in that a surface shape in a certain state is a shape close to a part of a quadratic curved surface.

[189] An optical characteristic variable mirror characterized in that a deviation from a quadratic curved surface that approximates the surface shape in a certain state satisfies Expression (2).

[190] A variable optical characteristic mirror characterized in that a deviation from a quadratic curved surface which approximates the surface shape in a certain state is within 1 mm.

[191] A variable optical characteristic mirror characterized in that a deviation from a quadratic surface approximating the surface shape in a certain state is within 10 mm.

[192] An optical system characterized in that the variable mirror is arranged at any of the front side, the rear side, and the vicinity of the stop position of the stop, and the variable mirror is operated at the time of focusing.

[193] An optical system characterized in that the variable mirror is arranged at any of the front side, the rear side, and the vicinity of the stop position of the stop, and the variable mirror is operated at the time of zooming.

[194] An optical system characterized in that there is a stop in an optical path between at least two of the plurality of variable mirrors.

[195] An optical system having a variable mirror at a position where the height of the principal ray is higher than the marginal ray.

[196] An optical system having a variable mirror at a position where the height of a principal ray is lower than that of a marginal ray.

[197] A variable mirror characterized in that an aperture is formed in the periphery of the variable mirror.

[198] An optical system having at least one variable mirror in a movable group.

In the above, as long as the conditional expressions are mathematically equivalent, conditional expressions using other expressions may be used.

[0202]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the optical device according to the present invention will be described below.

FIG. 1 is a diagram showing a configuration of an optical device according to an example of the present invention, and shows an example of a viewfinder of a digital camera using an optical characteristic variable mirror 9. Of course, it can be used for silver halide film cameras. First, the optical property variable mirror 9 will be described.

The variable optical characteristic mirror 9 is a variable optical characteristic mirror (hereinafter simply referred to as a variable mirror) composed of a thin film (reflection surface) 9a coated with aluminum and a plurality of electrodes 9b. Reference numeral 11 denotes each electrode 9b. A plurality of variable resistors connected respectively, 12 is a power source connected between the thin film 9a and the electrode 9b via the variable resistor 11 and the power switch 13, and 14 is for controlling the resistance value of the plurality of variable resistors 11. Are the temperature sensor, the humidity sensor and the distance sensor connected to the arithmetic unit 14, respectively, and these are arranged as shown in the figure to constitute one optical device.

The objective lens 902 and the eyepiece 90
1, and the surfaces of the prism 4, the isosceles right-angled prism 5, and the mirror 6 need not be planar, but may be spherical, rotationally symmetric aspherical, spherical, planar, or rotationally symmetric. Any shape such as a spherical surface or an aspherical surface having a symmetrical surface, an aspherical surface having only one symmetrical surface, an aspherical surface having no symmetrical surface, a free-form surface, or a surface having a non-differentiable point or line In addition, any surface may be used as the reflecting surface or the refracting surface as long as it can have some effect on light. Hereinafter, these surfaces are collectively referred to as an extended curved surface.

The thin film 9a is made of, for example, P. Rai-choudh
ury, Handbook of Michrolithography, Michromachin
ing and Michrofabrication, Volume 2: Michromachining
andMichrofabrication, P495, Fig. 8.58, published by SPIE PRESS and Optics Communication, Vol. 140 (1997), pp. 187-190, when a voltage is applied to a plurality of electrodes 9b, The thin film 9a is deformed by the electrostatic force to change its surface shape. This makes it possible not only to adjust the focus according to the diopter of the observer, but also to adjust the lenses 901, 902 and / or the prism. 4. Deformation or refractive index change of the isosceles right-angle prism 5 and the mirror 6 due to temperature and humidity changes, or
Deterioration of the imaging performance due to expansion and contraction and deformation of the lens frame and assembly errors of components such as the optical element and the frame can be suppressed, and the focus adjustment and the aberration correction caused by the focus adjustment can always be appropriately performed.

According to this embodiment, the light from the object is refracted by the entrance surface and the exit surface of the objective lens 902 and the prism 4, reflected by the variable mirror 9, transmitted through the prism 4, and becomes an isosceles right angle. The light is further reflected by the prism 5 (in FIG. 1,
A + mark in the optical path indicates that the light beam travels toward the back side of the paper. ), Reflected by the mirror 6 and the eyepiece 9
01 to the eye. As described above, the observation optical system of the optical apparatus according to the present embodiment is configured by the lenses 901 and 902, the prisms 4 and 5, and the variable mirror 9, and the surface shape and the thickness of each of these optical elements are optimized. By doing so, the aberration of the object image can be minimized.

That is, the shape of the thin film 9a as a reflection surface is controlled by changing the resistance value of each variable resistor 11 by a signal from the arithmetic unit 14 so that the imaging performance is optimized. That is, a signal having a magnitude corresponding to the ambient temperature and humidity and the distance to the object is input from the temperature sensor 15, the humidity sensor 16 and the distance sensor 17 to the arithmetic device 14, and the arithmetic device 14 receives the signals based on these input signals. In order to compensate for the deterioration of the imaging performance due to the ambient temperature and humidity conditions and the distance to the object, the resistance of the variable resistor 11 is adjusted so that a voltage that determines the shape of the thin film 9a is applied to the electrode 9b. Outputs a signal for determination. As described above, since the thin film 9a is deformed by the voltage applied to the electrode 9b, that is, the electrostatic force, the thin film 9a takes various shapes including an aspheric surface depending on the situation, and becomes convex if the polarity of the applied voltage is changed. You can also. The distance sensor 17 may not be provided. In this case, the imaging lens 3 of the digital camera is moved so that the high-frequency component of the image signal from the solid-state imaging device 8 becomes substantially maximum, and the object distance is reversed from the position. May be calculated and the variable mirror may be deformed so as to focus on the eyes of the observer.

If the thin film 9a is made of a synthetic resin such as polyimide, it is convenient because large deformation can be performed even at a low voltage. The prism 4 and the variable mirror 9 can be integrally formed to form a unit, but this unit is an example of the optical device according to the present invention.

Although not shown, the solid-state imaging device 8 may be integrally formed on the substrate of the variable mirror 9 by a lithography process.

The lenses 901, 902, the prisms 4, 5, and the mirror 6 can be easily formed into a curved surface of any desired shape by being formed with a plastic mold or the like, and the manufacture is simple. In the image pickup apparatus of the present embodiment, the lenses 901 and 902 are formed apart from the prism 4. However, the prisms 4 and 4 can be removed without providing the lenses 901 and 902.
If the mirror 5, the mirror 6, and the variable mirror 9 are designed, the prisms 4, 5, and the variable mirror 9 become one optical block, which facilitates assembly. Further, some or all of the lenses 901, 902, the prisms 4, 5, and the mirror 6 may be made of glass. With such a configuration, a more accurate imaging device can be obtained.

In the example shown in FIG. 1, the arithmetic unit 14, the temperature sensor 15, the humidity sensor 16, and the distance sensor 17 are provided, and the variable mirror 9 compensates for changes in temperature and humidity, changes in object distance, and the like. It is not necessary. That is, the arithmetic unit 14, the temperature sensor 15, the humidity sensor 1
6. The distance sensor 17 may be omitted, and only the change in diopter of the observer may be corrected by the variable mirror 9.

When the variable mirror 9 is provided so as to face the prism surface 4A of the prism 4, it is necessary for the light beam to pass through the prism surface 4A without being totally reflected and to enter the variable mirror 9. Assuming that the refractive index of the prism 4 is n, it is necessary to satisfy 1 / n> sin θ (1). Here, θ is the incident angle of the light beam on the surface 4A in the prism 4. Equation (1) holds true for optical elements other than the prism 4 provided to face the variable mirror 9.

The surface shape of the variable mirror 9 is flat when no voltage is applied, but when a voltage is applied, a part of the hyperboloid of revolution as shown by the thick line in FIG. It is good. The reason is as described below.

In FIG. 2, P ₁ and P ₂ are focal points of the hyperbolic surface. When the light beam from the objective lens 902 is advanced toward the focal point P _2, the focusing the light beam to the point P ₁ with no aberration, the shape of the deformable mirror 9, the points P _1, P ₂ and focus rotation This is because a hyperboloid may be used (Hiroshi Kubota, "Optics", pp. 136-137 (Iwanami Shoten, December 2, 1965)
0).

If the objective lens 902 is not provided, a parallel light beam enters the variable mirror 9, so that the shape of the variable mirror 9 may be a part of the paraboloid of revolution.

When the objective lens 902 is a concave lens, an image of the concave lens is formed on the left side P ₂ of the variable mirror 9 as shown in FIG. It may be a part shown.

Of course, in the case where the light beam becomes a divergent light beam after being reflected by the variable mirror 9, it may be a hyperboloid of revolution.

In applications that do not require high precision, or when aberrations can be canceled by other optical elements, or when the imaging performance of an off-axis object point is considered, the above three aspheric surfaces (spheroidal surface, A paraboloid of revolution or a hyperboloid of revolution may be approximated by a spherical surface, a toric surface, or a non-rotationally symmetric quadratic surface (eg, a hyperbolic paraboloid, an elliptic paraboloid, an anamorphic surface, etc.).

A spherical surface, a spheroidal surface, a paraboloid of revolution, and a hyperboloid of revolution are collectively referred to as a quadratic surface of revolution, and the axis of rotation is the X-axis. The X axis is an axis at which the focal point is located, as shown in FIGS.

Note that a rotationally symmetric quadratic surface and a rotationally asymmetric quadratic surface are collectively called a quadratic surface. A quadratic surface is a surface represented by a quadratic expression for x, y, and z. In other words, if expressed by the equation, Refers to a curved surface that satisfies i, j, and k are 0, 1, or 2.

The conditions described above are for forming a light beam from an object point on the optical axis with no aberration. Therefore, actually, the image formation of a light beam from an object point outside the optical axis and the light from other optical elements are not performed. It is also necessary to consider aberrations, and the best shape of the variable mirror 9 deviates from the rotating quadric surface. Although the amount of the deviation depends on the optical system, when a quadratic surface approximating the shape of the variable mirror 9 is obtained by the least square method or the like, the deviation Δ from the quadratic surface within the light flux transmission range is a maximum. However, it is better to be within 1 mm. If the amount of deviation is larger than this, the problem increases because the imaging performance of the light beam on the optical axis is reduced.

However, in applications where high performance is not required for the optical system, Δ may be within 10 mm.

Alternatively, for the same reason, it is preferable to satisfy Δ <(1/5) × D (2). Here, D is the diameter of a circle having the same area as the area of the light beam passing portion of the variable mirror 9.

It should be noted that, as can be generally said about the present invention, it is preferable that light rays incident on the variable mirror 9 be incident obliquely on the surface. That is, the state is oblique incidence.
This is because, when a light beam is incident perpendicular to the surface, the reflected light travels perpendicular to the surface and only reverses the optical system that has already passed.

Next, the configuration of the variable mirror 9 will be described.

FIG. 4 shows another embodiment of the variable mirror 9. In this embodiment, a voltage element 9c is interposed between the thin film 9a and the electrode 9b. It is provided in. By changing the voltage applied to the piezoelectric element 9c for each of the electrodes 9b, the piezoelectric element 9c is partially expanded and contracted differently, so that the shape of the thin film 9a can be changed. The shape of the electrode 9b may be concentric division as shown in FIG. 5, may be rectangular division as shown in FIG. 6, and other appropriate shapes can be selected. . In the figure, reference numeral 24 denotes a shake (blur) sensor connected to the arithmetic unit 14, which detects, for example, a shake of a digital camera, and deforms the thin film 9a so as to compensate for image disturbance caused by the shake. Then, the voltage applied to the electrode 9b via the variable resistor 11 is changed. At this time, signals from the temperature sensor 15, the humidity sensor 16 and the distance sensor 17 are also considered at the same time, and focusing, temperature and humidity compensation, and the like are performed. In this case, since the stress associated with the deformation of the piezoelectric element 9c is applied to the thin film 9a, it is preferable that the thin film 9a is made somewhat thick to have a corresponding strength.

FIG. 7 shows still another embodiment of the variable mirror 9. This embodiment is different from the first embodiment in that the piezoelectric element interposed between the thin film 9a and the electrode 9b is composed of two piezoelectric elements 9c and 9c 'made of a material having opposite piezoelectric characteristics. 4 is different from the embodiment shown in FIG. That is,
If the piezoelectric elements 9c and 9c 'are made of ferroelectric crystals, they are arranged so that the directions of the crystal axes are opposite to each other. In this case, since the piezoelectric elements 9c and 9c 'expand and contract in the opposite direction when a voltage is applied, the force for deforming the thin film 9a becomes stronger than in the embodiment shown in FIG. The advantage is that the shape can be greatly changed.

Examples of the material used for the piezoelectric elements 9c and 9c 'include barium titanate, Rossier salt, quartz, tourmaline, potassium dihydrogen phosphate (KDP), ammonium dihydrogen phosphate (ADP), lithium niobate and the like. Piezoelectric materials, polycrystals of the same materials, crystals of the same materials, piezoelectric ceramics of a solid solution of PbZrO ₃ and PbTiO ₃ , organic piezoelectric materials such as polyvinyl difluoride (PVDF), and ferroelectrics other than the above. In particular, an organic piezoelectric substance is preferable because it has a small Young's modulus and can be largely deformed even at a low voltage. When these piezoelectric elements are used, if the thickness is made non-uniform, the shape of the thin film 9a in the above embodiment can be appropriately deformed.

FIG. 8 shows still another embodiment of the variable mirror 9. In this modification, the piezoelectric element 9c is a thin film 9
a between the thin film 9a and the electrode 9d, and a voltage is applied between the thin film 9a and the electrode 9d via a drive circuit 25 controlled by the arithmetic unit 14. The arithmetic unit 1 is also provided for the electrode 9b provided in
The voltage is applied via a drive circuit 25 controlled by the control circuit 4. Therefore, in this embodiment, the thin film 9a can be deformed doubly by the voltage applied between the electrode 9d and the electrostatic force generated by the voltage applied to the electrode 9b, and the thin film 9a can be more deformed than those shown in the above embodiments. This has the advantage that more deformation patterns are possible and the response is fast.

FIG. 9 shows still another embodiment of the variable mirror 9. In this embodiment, the shape of the reflecting surface can be changed using electromagnetic force.
A permanent magnet 26 is mounted and fixed on the inner bottom surface, and a peripheral portion of a substrate 9e made of silicon nitride or polyimide is fixed on the top surface. The surface of the substrate 9e is made of a metal coat such as aluminum. The variable mirror 9 is provided with a thin film 9a. A plurality of coils 27 are provided on the lower surface of the substrate 9e, and each of the coils 27 is connected to the arithmetic unit 14 via a drive circuit 28. Therefore, an appropriate electric current is applied to each coil 27 from each drive circuit 28 by an output signal from the arithmetic unit 14 corresponding to a change in the optical system obtained in the arithmetic unit 14 by a signal from each of the sensors 15, 16, 17, and 24. Is supplied, each coil 27 is repelled or adsorbed by an electromagnetic force acting between the coil and the permanent magnet 26, and deforms the substrate 9e and the thin film 9a.

In this case, a different amount of current may flow through each coil 27. Further, the number of coils 27 may be one, or the permanent magnet 26 may be attached to the substrate 9 e and the coil 27 may be provided on the inner bottom surface side of the support base 23. The coil 27 may be made by a method such as lithography, and the coil 27 may be provided with an iron core made of a ferromagnetic material.

FIG. 10 shows still another embodiment of the variable mirror 9. In this embodiment, a thin film coil 28 'is provided on the lower surface of the substrate 9e, and the support 23
A coil 27 is provided on the inner bottom surface of the. And
A variable resistor 11, a power supply 12, and a power switch 1 for supplying an appropriate current to the thin-film coil 28 'as necessary.
3 are connected. The variable resistor 11 is connected to each of the coils 27.
A power supply 12 for supplying current to the variable resistor 7 and the variable resistor 11 and a switch 29 for switching and opening and closing the power supply for changing the direction of the current flowing to the coil 27 are provided. Therefore, according to this embodiment, each coil 27 and the thin-film coil 2 are changed by changing the resistance value of the variable resistor 11 respectively.
By changing the electromagnetic force acting between the substrate and the thin film 9a, the substrate 9e and the thin film 9a can be deformed to operate as a movable mirror. Further, by inverting the switch 29 and changing the direction of the current flowing through the coil 27, the thin film 9a can be changed into a concave surface or a convex surface.

In this case, the winding density of the thin-film coil 28 'is
As shown in FIG. 11, a desired deformation can be given to the substrate 9e and the thin film 9a by changing depending on the place. Further, as shown in FIG. 12, one coil 27 may be used, and an iron core made of ferromagnetic may be inserted into these coils 27. Also, the support table 23
If the space formed by the magnetic fluid is filled, the electromagnetic force is further increased.

FIG. 13 shows still another embodiment of the variable mirror 9. In this embodiment, the substrate 9e is made of a ferromagnetic material such as iron, and the thin film 9a as a reflection film is made of aluminum or the like. In this case, since it is not necessary to provide a thin film coil, the structure is simpler and the manufacturing cost can be reduced as compared with the embodiment shown in FIG. 10, for example. Also, if the power switch 13 is replaced with a switch / power switch 29 (see FIG. 10), the direction of the current flowing through the coil 27 can be changed, and the shapes of the substrate 9e and the thin film 9a can be changed freely. . FIG. 14 shows the arrangement of the coil 27 in this embodiment, and FIG. 15 shows another example of the arrangement of the coil 27. These arrangements are also applicable to the embodiments shown in FIGS. 9 and 10. Can be. FIG. 16 shows an arrangement of the permanent magnets 26 suitable for a case where the arrangement of the coils 27 is as shown in FIG. 15 in the embodiment shown in FIG. That is,
As shown in FIG. 16, if the permanent magnets 26 are arranged radially, the substrate 9 is more delicately deformed than the embodiment shown in FIG.
e and the thin film 9a. Further, in the case where the substrate 9e and the thin film 9a are deformed by using the electromagnetic force as described above (the embodiments in FIGS. 9, 10 and 13), there is an advantage that they can be driven at a lower voltage than the case where the electrostatic force is used. is there.

FIG. 17 is a view showing a second embodiment of the optical apparatus according to the present invention, which is an example of an electronic viewfinder.
In this embodiment, in order to guide light from an LCD (Liquid Crystal Display) 45 to the eye via the prism 30, a liquid crystal variable mirror 3 in which a liquid crystal variable focus lens is disposed in front of the mirror.
1 is different from the above embodiment. The liquid crystal variable mirror 31 is an example of a variable mirror. The liquid crystal variable mirror 31 is configured by filling a twisted nematic liquid crystal 31d between a transparent electrode 31a and a divided electrode 31c serving also as a mirror applied to the surface of a curved substrate 31b. The helical pitch P of the twisted nematic liquid crystal 31d satisfies P <5λ (3). Where λ is the wavelength of light,
In the case of visible light, λ is approximately 380 nm to 700 nm. When the twisted nematic liquid crystal 31d satisfies the above equation (3), the refractive index becomes substantially isotropic regardless of the polarization direction of the incident light, so that a varifocal mirror without blurring can be obtained without providing a polarizing plate. .

When this optical device is used as an electronic viewfinder of a low-cost digital camera, even if the spiral pitch P of the twisted nematic liquid crystal 31d is P <15λ (4) In some cases it can be used. Instead of the twisted nematic liquid crystal, a liquid crystal having a helical structure satisfying the above formulas (3) and (4), for example, a cholesteric liquid crystal or a smectic liquid crystal may be used. Further, instead of the twisted nematic liquid crystal, a polymer dispersed liquid crystal or a polymer stabilized liquid crystal may be used. A substance whose refractive index changes by electricity may be used instead of the liquid crystal.

Examples of liquid crystal substances that can be used as liquid crystals include cholesteric liquid crystals, smectic liquid crystals,
Smectic C ^* liquid crystal, ferroelectric liquid crystal, antiferroelectric liquid crystal, tolan liquid crystal, difluorostilbene low viscosity compound, banana liquid crystal, discotic liquid crystal, polymer stabilized liquid crystal using them, polymer There is a dispersed liquid crystal, and in particular, a polymer-stabilized liquid crystal is preferable because the alignment of liquid crystal molecules can be easily controlled.

Further, since the response speed of the ferroelectric liquid crystal and the antiferroelectric liquid crystal can be increased, fast blur can be corrected.

In the liquid crystal variable mirror 31, the electrode 3
When a voltage is applied between 1a and 31c, as shown in FIG. 18, the direction of the liquid crystal 31d changes and the refractive index with respect to the incident light decreases.
For example, the focal length changes. Therefore, if the resistance value of each variable resistor 11 is appropriately adjusted in accordance with the temperature change and the blur at the time of photographing together with the diopter adjustment, the prism 30
It is possible to compensate for the temperature change of the image and to prevent the shake during the observation.

FIG. 19 is a view showing an example of the electrostatic drive mirror 9T used in the present invention, and the electrodes 9b1, 9b2, 9b
The feature is that 3, 9b4 and 9b5 are not on the same plane.
The electrodes 9b1, 9b2, 9b3, 9b4, 9b5 are formed on different substrates 23A, 23B, 23C and arranged on different planes. In this case, a voltage is applied to the electrostatic drive mirror 9T, and even when the thin film 9a is depressed, the distance between the central electrode 9b3 and the thin film 9a is not so reduced, so that the electric field between the thin film 9a and the electrode 9b3 becomes too strong. Therefore, there is an advantage that the shape of the thin film 9a can be easily controlled.

Now, it is assumed that the potential difference between the positive and negative electrodes applied to the electrostatic drive mirror 9T is fixed at a constant value. Electrode 9
Assuming that the maximum height of b1, 9b2, 9b3, 9b4, 9b5 is ΔB, if ΔB = (１ ／) × H (5), the electric field changes when the thin film 9a is deformed. Least. H indicates the maximum amount of shape change.

Practically, the electrodes 9b1, 9b2, 9b3, 9b4, 9b5 in the range of (1/1000) × H ≦ ΔB ≦ 10H (6)
In addition to the arrangement, Δ may be appropriately selected.

If ΔB is selected so as to satisfy (1/10) × H ≦ ΔB ≦ 2H (7), control becomes easy in most cases.

When ΔB exceeds the upper limit in the equations (6) and (7), it becomes difficult to control the thin film 9a, and when ΔB falls below the lower limit, the difference between the heights of the electrodes 9b1, 9b2, 9b3, 9b4, and 9b5 is reduced. The effect of attaching is reduced.

FIG. 20 shows electrodes 9b1, 9b2, 9b3,
Electrostatically driven mirror 9U having 9b4 and 9b5 formed on a curved surface
Thus, the effect is the same as that of FIG. Equations (5) to (7) can be applied as they are. Further, the plurality of electrodes 9b1, 9b2,
By shifting the positions of 9b3, 9b4, 9b5 from the same plane, the manner of deformation of the thin film 9a may be controlled.

FIG. 21 shows an example in which the amount of deformation in the middle portion of the thin film 9a is large and the amount of deformation in the center portion is small. In this case, ΔB represents the electrodes 9b1, 9b2, 9b3, 9
It is defined as the maximum displacement of the electrode from the average height of b4 and 9b5. Equations (5)-(7) apply analogously.

To facilitate the control of the shape of the variable mirror by shifting the positions of the plurality of electrodes from the plane as described above, another variable mirror of the present invention, that is, an electromagnetic mirror, a liquid crystal variable mirror, and a piezoelectric element is used. Equations (5) to (7) are equally applicable to mirrors and the like.

In some embodiments of the present invention, extended curved prisms 4, 5, 30, etc. are used. Instead of these, a reflecting mirror 60 having an extended curved surface as shown in FIG. 22 is used. Is also good. The shape of the reflecting surface of the reflecting mirror 60 is an extended curved surface. In this case, there is an advantage that the weight is reduced due to the hollow compared with the extended curved surface prism. FIG. 22 is an example of an electronic imaging device (digital camera or television camera). Focus adjustment, blur prevention, and the like can be performed by the variable mirror 9. Further, as shown in FIG. 23, an optical system may be formed by using two or more variable mirrors 9 of the present invention. In this case, for example, shake prevention and focus adjustment can be performed by separate variable mirrors 9, and the degree of freedom in optical design is increased. Also, two or more variable mirrors 9 of the present invention can be used in one optical system to perform zooming, focus adjustment, shake prevention, and the like of the optical system. FIG. 23 shows an example of a digital camera. Reference numeral 20 denotes an extended curved surface prism, and reference numeral 33 denotes a lens.

As can be said in common with the optical apparatus of the present invention, it is preferable that the variable mirror is placed near the stop of the optical system. Since the beam height is low near the stop, the variable mirror can be reduced in size, which is advantageous in terms of response speed, cost and weight.

FIG. 24 shows an example of a zoom finder 61 for a camera, a digital camera, or a moving image recording apparatus, for example, a camcorder camera, as viewed from the -x direction. FIG. 25 shows the zoom finder 61 viewed from the + y direction.

The prisms 62 and 63 and the two variable mirrors 9
1, 92 form a bent light path like a Porro I prism. It is an example of an observation device using a Kepler-type optical system. Each of the prisms 62 and 63 may be a normal triangular prism formed of a flat surface, or one of the surfaces may be an extended curved surface.

By changing the shape of the surfaces of the variable mirrors 91 and 92, both zooming and diopter adjustment can be realized.
There is an advantage that zooming and diopter adjustment can be performed without moving the lens. Also, there is an advantage that no sound for moving the lens is generated during zooming, and this is particularly advantageous in the case of a camcorder finder that also records audio.

Even when zooming is performed using a variable mirror in the imaging system of the camcorder, there is an advantage that no sound is produced.

A moving image recording device other than a camcorder and an electronic moving image recording device have similar advantages.

FIG. 26 shows an example of the present invention, which is a single-lens reflex optical system for a digital camera. In this example, variable mirrors are arranged on both sides in the longitudinal direction of the free-form surface prism, and optical elements are arranged on both sides in the longitudinal direction. An image sensor is provided on one side in the longitudinal direction, and an optical element and a variable mirror are arranged on the opposite side. Zooming and autofocus are performed by the variable mirrors 93 and 94 to form an image on the solid-state imaging device 8. The variable mirrors 93 and 94 may have a variable focus adjustment function instead of zooming, and focus may be adjusted separately.

The variable mirrors 93 and 95 adjust the zoom and diopter of the Keplerian finder. The finder optical path is in the order of lens 64 → variable mirror 93 → prism 20 → prism 65 (where the optical path is bent to the back side of prism 20) → variable mirror 95 → eyepiece 901.

Reference numeral 66 denotes a semi-transmissive coating, and the optical path of the imaging system is as follows: lens 64 → variable mirror 93 → prism 2
0 → variable mirror 94 → lens 67 → crystal low-pass filter 68 → infrared cut filter 69 → solid-state imaging device 8
The order is as follows. Reference numeral 70 denotes a transparent electrode, which can make the thin film 9a convex by applying a voltage between itself and the thin film 9a, or can make the thin film 9a concave like the variable mirror 9 already described.

As described above, the variable mirror 93 can operate as a variable mirror having a large shape change. Prism 20
Each surface is an extended curved surface. Each surface of the prism 65 may be a flat surface or an extended curved surface.

The example of FIG. 26 has an advantage that no sound is generated even when zooming is performed. The optical system of FIG. 26 can be used for a camcorder and a television camera.

FIG. 27 shows another example of the present invention, which is an example of a Gregory-type reflection telescope using a variable mirror 96 having a light transmitting portion in part. Reflective film 96a of variable mirror 96
Has a portion 72 which is not partially coated with a reflection coating. A transparent portion 73 is also provided at the center of the electrode 96b. No electrode may be provided in this portion, or a transparent electrode may be provided. The variable mirrors 9 and 96 form a telescope capable of both zooming and focusing. If an image sensor is placed on the focal plane 74, an image can be taken. If the eyepiece 901 is placed behind the focal plane 74, visual observation can be made.

FIG. 28 shows the electrostatically driven variable mirrors 9J and 9J.
This is an example of a zoom-type Galilean finder using K, and an example of an observation device using a Galileo-type optical system.
Used for cameras, digital cameras, opera glasses and the like. Concave lens 76 → variable mirror 9J → variable mirror 9K →
Light from the convex lens 77 and the object travels and enters the eye. The power supply 12B of the variable mirrors 9K and 9J is used in common with the illumination device 78 of the liquid crystal display device 45B, and a common power supply can be used. Instead of the illuminating device 78, a power source of another electric device such as a strobe and a power source of the variable mirrors 9J and 9K may be shared. In the optical system shown in FIG. 28, the variable mirrors 9J and 9K are controlled by the arithmetic unit 14 so that the diopter of the observer, for example, minus 2 diopters when viewed from the eyes.

When the function of the variable mirror 9J as the concave reflecting surface is weak and the function of the variable mirror 9K as the concave reflecting surface is strong, the wide-angle variable mirror 9J has a strong function as the concave reflecting surface, and the variable mirror 9J has a strong function as the concave reflecting surface. When the function as a concave reflecting surface of 9K is weak, it works as a telephoto, Galileo-type finder.

In the viewfinder optical system shown in FIG. 28, as shown in FIG. 29, the observation direction (minus z direction in FIG. 28) is the thickness direction of the camera or digital camera 79 (z ′ in FIG. 29).
If the camera or digital camera 79 is installed so as to be parallel to the direction within 20 °, the camera or digital camera 79 can be made compact and convenient.

FIG. 30 shows the optical characteristic variable mirrors 9J and 9K.
2 is an example of an imaging optical system for an imaging device, a digital camera, and a VTR camera using the image forming apparatus. Two extended curved prisms 20
J, 20K and the variable mirrors 9J, 9K constitute an imaging system having a reflecting surface five times, that is, an odd number of times. As in the previous examples, zooming (variable focus only) and focusing are realized by the extended curved surface prisms 20J and 20K. Due to the odd number of reflections, a back image (mirror image) is formed on the solid-state imaging device 8, but the image is inverted and becomes a normal image through an inversion processing unit 14B formed by an electronic circuit or an information processing device. LCD 45 or printer 45
Output to J.

Here, assuming that the maximum deformation amounts of the variable mirrors 9J and 9K are HJ and HK, it is preferable that the following condition is satisfied: 0.0001 ≦ | HJ / HK | <10000 (8) Because if it exceeds this range, the deformation amount of one variable mirror will be too large,
This is because control becomes difficult.

Therefore, if the condition of 0.001 ≦ | HJ / HK | <1000 (8-1) is satisfied, the production may be facilitated. Further, it is more preferable that 0.1 ≦ | HJ / HK | <10 (9) is satisfied. This is because within this range, it becomes possible to use two identical variable mirrors.

When there are three or more variable mirrors, if the maximum deformation is HK and the minimum deformation is HJ, equations (8) and (9) hold similarly.

The control of the shapes of the variable mirrors 9J and 9K is performed by the arithmetic unit 14, and information on the shapes of the variable mirrors 9J and 9K determined by the focal length and the object distance is stored in the memory 14
It is preferable to store the data in M by a look-up table or the like and control the shape according to the stored data.

FIG. 31 shows an example of the present invention, which is an image pickup apparatus for a digital camera or a side-view electronic endoscope using an electrostatically driven variable mirror 9J. In the figure, reference numerals 81 and 82 denote optical elements each having a rotationally symmetric curved surface. That is,
For example, it is a normal spherical lens, an aspherical lens, or the like. By changing the shape of the thin film 9a according to the change in the object distance, it is possible to perform focus adjustment, correction of aberration change accompanying the focus adjustment, and the like. As compared with the conventional optical system, there is an advantage that the lens does not need to be driven mechanically. Also, since there is only one reflecting surface, the image on the solid-state imaging device 8 is a back image, but may be inverted electrically or by image processing.

FIG. 32 is an example of the present invention, and is an example of a perspective electronic endoscope that performs focusing using an electrostatically driven variable mirror 9T. A variable mirror 9T is provided to face the transmission surface 83A of the prism 83. Since the surface 83B of the prism 83 is totally reflected, an aluminum coating is not required.
In this example, there is an advantage that a mechanical lens drive is not required and an image is not reflected because it is reflected an even number of times.

FIG. 33 shows another example of the present invention, which is an image pickup apparatus for a digital camera or electronic endoscope using two electrostatically driven variable mirrors 9J and 9K. V
It can also be used for TR cameras and TV cameras. In the figure, reference numerals 81, 82, and 84 denote lenses having rotationally symmetric surfaces. By changing the shape of the reflecting surfaces of the variable mirrors 9J and 9K, it is possible to simultaneously change the angle of view for imaging and focus. In FIG. 33, the normal to the surface of the variable mirror 9J and the normal to the surface of the variable mirror 9K are substantially parallel. However, the variable mirrors 9J and 9K are arranged such that the directions of the two normals are in a torsional relationship. May be arranged. That is, at this time, the optical system in FIG. 33 is no longer plane-symmetric. At that time, the imaging surface of the solid-state imaging device 8 is not orthogonal to the paper surface.
In the examples of FIGS. 31 and 32, the optical system is symmetric about the paper surface.

As can be said in common to the present invention, it is also possible to use a variable mirror 85 as shown in FIG. 34 for deforming a reflecting surface using a fluid, for example, air or fluid, as the variable mirror. Good. By moving the piston 86, the amount of the fluid 87 changes, and the shape of the reflecting surface 88 can be changed. This has the merit that it can be deformed on both sides.

Also, as can be said in common to the present invention, when autofocusing is performed by an image pickup apparatus using a solid state image pickup device such as a television camera or a digital camera using a variable mirror, the autofocus is obtained by a distance sensor or the like. Based on the distance information,
It is preferable to perform autofocus by changing the current or voltage applied to the variable mirror.

Alternatively, the contrast of the image obtained by imaging the object is detected while changing the current or voltage applied to the variable mirror, and it is considered that the object is in focus when the contrast is maximized. May be performed. In this case, it is particularly preferable to detect the peak of the contrast by focusing on the contrast of the high frequency component of the image.

Also, as can be said in common to the present invention, when controlling the shape of the electrostatically driven variable mirror, the capacitance between two positive and negative electrodes is checked, and then the distance information between the positive and negative electrodes is obtained. Then, the shape of the variable mirror is obtained, and the variable mirror may be controlled so as to approach the shape of the design value. In order to check the capacitance between the two electrodes, for example, it is preferable to check the time change of the current after applying a voltage between the two electrodes.

As can be said in common to the present invention, the power source for driving the variable mirror may be shared with the power source of a display device such as a liquid crystal display or the power source of a strobe. Sharing is advantageous in cost, weight reduction, and the like.

FIG. 35 shows an example in which the variable mirror 9 is used for a head mounted display (abbreviated as HMD) 142. By changing the voltage applied to the electrode 9b, it can be used for diopter adjustment.
It is possible to give a perspective according to the part of the image displayed on D45. Assume that an image of a flower and a mountain as shown in FIG. 36 is displayed on the LCD 45 by the display electronic circuit 192. Flowers are close, mountains are far away.
Therefore, if the thin film 9a is deformed by controlling the voltage applied to the electrode 9b by the drive circuit 193 so that the diopter of the flower is minus and the diopter of the mountain is substantially 0, the perspective according to the image portion is obtained. Can be obtained.

FIG. 37 shows an example of the present invention in which a hologram reflecting mirror 103 made of a photonic crystal 102 is formed on the surface of an extended curved prism 101. HMD1
42 is an example. The hologram reflecting mirror 103 can reflect light rays that do not follow the normal law of reflection.
It is useful and convenient for increasing the degree of freedom of the design and correcting aberrations.

As shown in FIG. 38, the photonic crystal 102 is formed by regularly arranging size units (white circles, black circles, and hatched circles in the figure) which are smaller than or equal to different wavelengths.
It can be made by a technique such as lithography and molding. The photonic crystal 102 is superior to a photographic photosensitive material, a photopolymer, or the like in that a large amount of holograms can be accurately formed.

FIG. 39 uses an extended curved mirror 104 instead of the extended curved prism 101, and has the advantage of being lighter than the example of FIG. The photonic crystal 102 on the extended curved prism 101 is a transmission type photonic crystal, and has substantially the same characteristics as a reflection type photonic crystal.

In addition to the above, an optical element having a photonic crystal can be observed using a digital camera, an image pickup optical system such as an endoscope, a display optical system such as a viewfinder, or an optical system microscope for performing optical signal processing or transmission. Needless to say, it may be used for an optical system or the like.

[0283] The photonic crystal may be formed on the surface of an optical element such as a lens or a filter. If formed on the lens surface, an optical element having the same function as a hologram optical element (HOE) can be obtained. If the refractive index of the photonic crystal is made smaller than the refractive index of the optical element, an antireflection effect can also be obtained.

Also, as can be said in common to the examples of FIGS. 35, 37, and 39, a gaze detecting device 107 is provided in an HMD in which the images entering the left and right eyes are made to look different from each other, and the binocular visual field is provided. It is preferable that the diopter of the HMD matches the object distance generated in the above. By doing so, the observation images of both eyes are fused, and a natural three-dimensional image is seen.

FIG. 40 relates to, for example, an improvement in a measuring method of an optical element having an aspheric lens and an extended curved surface used in the embodiment of the present invention. FIG. 40 shows an example in which the shape, refractive index distribution, eccentricity, and the like of an aspherical lens are measured by a Mach-Zehnder interferometer 200.
03 are recorded as interference fringes. At this time, depending on the shape of the aspherical lens, as shown in FIG.
There is a case where the light flux F in the peripheral portion of 01 and 202 is inverted on the screen 203 to form an image. Inversion means that the upper ray F1 of the light beam F is on the screen 203 on the optical axis (Z
Axis), and the lower ray F2 of the light flux F
On 3, it is separated from the optical axis. In such a case, it has been considered that the surface shape and the like of the test lens 202 cannot be measured conventionally.

Therefore, in the present invention, the computer 205
Thus, the signal of the light beam F captured by the television camera 204 is inverted by image processing, and distortion and the like are also corrected. When ordinary processing is performed on such interference fringes, differences from the reference lens 201 such as the surface shape, the refractive index distribution, the refractive index, and the eccentricity of the test lens 202 can be obtained. In FIG. 40, reference numeral 206 denotes a laser as a light source of the interferometer, and 207 denotes a monitor TV.

In FIG. 42, the positions of the light rays in the light beam F on the screen 203 are indicated by circles and crosses.
This is subjected to image processing by the computer 205, and FIG.
It is inverted as shown by.

The inner luminous fluxes G, H, etc.
When it is troublesome to overlap with the light beam F on 03, the shield 208 may be placed on the optical axis as shown in FIG.

FIG. 44 shows an aspherical lens, a free-form surface lens, a free-form surface prism, or an extended-surface lens, or an extended-surface prism or an extended-surface optical element 801 which may be used in the present invention. It is explanatory drawing of the method of measuring the change of a refractive index, and the distribution of a refractive index.
At the time of interference measurement, in order to reduce the influence of the refraction of the surface of the test lens 801, a canceller 802 having one surface substantially opposite to the aspheric surface 804 of the test lens 801 and a spherical surface 806 of the test lens 801 have one surface. A test lens 801 is sandwiched from both sides by a canceller 803 having a substantially inverted shape. In the figure, reference numeral 805 denotes a matching oil having a refractive index substantially equal to the refractive index of the test lens 801, and is not necessarily provided. The outer surfaces 810 of the cancellers 802 and 803 are flat.

This canceller 802 and the lens to be inspected 80
1. The combination of the canceller 803 is placed in the optical path of the Fizeau interferometer 807 as shown in FIG. 45, and the transmitted wavefront W (x, y) reflected by the mirror 808 is measured by the Fizeau interferometer 807. In the figure, reference numeral 809 is a reference plane. Then, the thickness of the test lens 801 in the z direction is t (x, y), the average value of the refractive index of the test lens 801 in the z direction is n (x, y), and the refractive indexes of the cancellers 802 and 803 are n _C. , canceller 802, the sample lens 801, when the total thickness of the canceller 803 and t _T, the W (x, y) ≒ 2 {(t T -t) n C + t n} ··· (10). Here, the thickness of the matching oil 805 was ignored because it was thin.

By solving the equation (1) for n, the following equation is obtained: n ≒ (W−2−t _T n _C ) / t + n _C (11)

Therefore, from the equation (11), the lens to be inspected 8
01 ( n, x, y) can be obtained.

Similarly, the combination of the canceller 802, the lens to be inspected 801 and the canceller 803 is inclined by β with respect to the z-axis as shown in FIG. Analyzes the wavefront and calculates the average value of the refractive index of the test lens in the direction along the ray m
n _m (β) can be obtained.

By obtaining n _m (β) for various β, the X-ray CT method, for example, Radon conversion is performed, and the refractive index distribution n (x, y, z) of the lens 801 to be measured can be obtained. .

In addition, the eccentricity of the test lens or the optical element can be obtained from the analysis of the transmitted wavefront.

Next, as Examples A to M, specific numerical examples of an optical system using a variable mirror will be described.

(Embodiment A) In this embodiment, as shown in the cross section at the wide-angle end (a) and at the telephoto end (b) in FIG. Are provided with two free-form surface variable mirrors 115 and 116 facing the refraction surfaces 112 and 113 on both sides in the longitudinal direction of the free-form surface prism 110 to achieve miniaturization and perform both zooming and focusing. This is an optical system for an imaging system. In the figure, 117 is a plane parallel plate such as a filter, and 118 is an imaging surface (imaging surface). The stop is arranged on the surface of the first variable mirror 115 or in the vicinity thereof. An aperture can be formed by applying a black coating around the reflecting surface of the variable mirror 115.

When the two variable mirrors 115 and 116 are zoomed, one 115 changes from a plane to a concave, and the other 116 changes from a concave to a plane in the opposite direction. Of course, these two variable mirrors 115 and 116 may change from convex to concave and from concave to convex. This is because it is changing in the opposite direction.

The imaging surface 118 is a free-form surface prism 110
Are located on the opposite side to the longitudinal direction of the free-form surface prism 110 with respect to the one variable mirror 116 and the same side as the other variable mirror 115 with respect to the longitudinal direction of the free-form surface prism. With this arrangement, the entire optical system may be reduced in size.

The first variable mirror 115 is deformed even during focusing. Since the variable mirror 115 is located on the stop surface, there is an advantage that the angle of view hardly changes even when deformed.
The second variable mirror 116 deforms during zooming. Since the height of the principal ray is higher than the luminous flux radius, zooming (or zooming) can be performed without significantly changing the focus. At the time of zooming, the first variable mirror 115 may also be deformed (see numerical data described later).

The numerical data of this embodiment will be described later.
The numbers are 4.6 at the wide-angle end, 5.8 at the telephoto end, and the focal length f _TOT is 5.8 mm at the wide-angle end and 9.4 m at the telephoto end.
m, the imaging surface size is 3.86 x 2.9 mm, and the angle of view is
At the wide-angle end, the diagonal angle of view is 45 °, the short side direction angle of view is 28 °,
Long-side view angle 36.8 °, telephoto end, diagonal view angle 28
°, the short side direction angle of view is 18 °, and the long side direction angle of view is 23 °.

In the variable mirror according to the present invention, including at least one of the embodiments, at least one of the variable mirrors is provided by the following formula (12) or (1) in at least one state during operation.
It is desirable to satisfy 3).

0 ≦ | P_I/ P_TOT| <1000 (12) 0 ≦ | P_V/ P_TOT| <1000 (13) where P_IIs the principal radius of curvature near the optical axis of the variable mirror.
Medium, the reciprocal of the principal radius of curvature closer to the entrance surface, P_VIs variable
Of the principal radii of curvature near the optical axis of the
The reciprocal of the radius of curvature (a free-form surface is expressed by equation (a) below)
Case where there is only one plane of symmetry parallel to the YZ plane
In the case of a free-form surface,_I= 2C ₆, P_V=
2C_FourCan be calculated by ), P_TOT= 1 / f_TOTAnd
f_TOTIs the focal length of the entire system.

Because | P _I / P _TOT | or | P
_{As V} / P _TOT | approaches the lower limit of 0 in the expression (12) or (13), the surface shape becomes closer to a flat surface or a cylindrical surface, so that it becomes easier to control the surface shape.
If it exceeds 00, it becomes difficult to correct aberrations and manufacture a variable mirror.

For higher precision applications, instead of equations (12) and (13), 0 ≦ | P _I / P _TOT | <100 (12-1) 0 ≦ | P _V / P _TOT | <100 (13-1)

The variable mirror used in the optical system according to the present invention includes at least one mirror during operation, including the case of this embodiment.
In one state, it is desirable that at least one of the variable mirrors satisfies one of the following two equations (14) and (15).

0.00001 <| ΔP _I / P _TOT | <1000 (14) 0.00001 <| ΔP _V / P _TOT | <1000 (15) where ΔP _I and ΔP _V are each P _I, is a variation of P _V.

| ΔP _I / P _TOT |, | ΔP _V / P
_If the value of _TOT | is less than the lower limit of 0.00001, the effect as a variable mirror is reduced, while the upper limit of 1000
When the value exceeds the above, it becomes difficult to correct the aberration and to manufacture the mirror.

When higher precision is desired, the expression (1)
4), instead of equation (15), 0.00001 <| ΔP _I / P _TOT | <100 (14-1) 0.00001 <| ΔP _V / P _TOT | <100 (15) -1)

It is desirable that the variable mirror used in the optical system of the present invention satisfies at least one of the following two expressions in a certain operation state, including the case of this embodiment.

0.00001 <| P _I | <100 (mm ⁻¹ ) (16) 0.00001 <| P _V | <100 (mm ⁻¹ ) (17) | P _I | or If | P _V | exceeds the upper limit of 100 in each equation, the mirror becomes too small to make, and if it falls below the lower limit of 0.00001, the effect of the variable mirror is lost.

In applications where high precision is desired, instead of equations (16) and (17), 0.001 <| P _I | <10 (mm ^-1 ) (16-1) 0.001 <| P _V | <10 (mm ⁻¹ ) (17-1)

Further, instead of the equations (16-1) and (17-1), 0.005 <| P _I | <10 (mm ⁻¹ ) (16-2) 0.005 <| P _V | <10 (mm ^-1 ) (17-2) is more preferable.

It is desirable that at least one of the variable mirrors used in the optical system of the present invention satisfies at least one of the following two expressions in a certain operating state, including the case of this embodiment.

0.0001 <| ΔP _I | <100 (mm ⁻¹ ) (18) 0.0001 <| ΔP _V | <100 (mm ⁻¹ ) (19) | ΔP _I | or If the value of | ΔP _V | exceeds the upper limit of 100 in each equation, the amount of deformation of the mirror may become too large and the mirror may be broken. On the other hand, when the value is below the lower limit of 0.0001, the effect as a variable mirror decreases.

In applications where higher precision is desired, the expression (18)
Instead of equation (19), 0.0005 <| ΔP _I | <10 (mm ⁻¹ ) (18-1) 0.0005 <| ΔP _V | <10 (mm ⁻¹ ) (( ¹ )) 19-1) should be satisfied.

Further, instead of equations (18-1) and (19-1), 0.002 <| ΔP _I | <10 (mm ⁻¹ ) (18-2) 0.002 <| ΔP _V | <10 (mm ^-1 ) (19-2) is more preferable.

It is desirable that at least one of the variable mirrors used in the optical system of the present invention satisfies the following expression in a certain operating state, including the case of this embodiment.

0 ≦ | P _I / (P _V cos φ) | <100 (20) Here, φ is an incident angle of an axial ray on the mirror surface.

| P _I / (P _V cos φ) | is the upper limit of 10
If it exceeds 0, it becomes difficult to correct astigmatism. It should be noted that the lower limit approaches 0 when the shape of the surface approaches the cylindrical surface.

For more precise applications, it is preferable to satisfy 0 ≦ | P _I / (P _V cos φ) | <25 (20-1) instead of (20).

It should be noted that in equations (20) and (20-1), P _V =
0 and P _I = 0, that is, in the case of a plane, P _I / (P _V
cosφ) is replaced by 1 / cosφ.

Also, in equations (20) and (20-1), P _I ≠
0 and in the case of P _V = 0, and replaces the P _V cos [phi 1.

Similarly, for the purpose of correcting astigmatism, it is preferable to satisfy | P _V | ≧ | P _I | (21) in an operating state in which at least one of the variable mirrors is present.

The above formulas (12) to (15-1) apply to any of Examples A to D and G to M of the present invention. Further, the above equations (16) to (21) also apply to Examples A to M of the present invention.

(Embodiment B) In this embodiment, as shown in the cross section in FIG. 48, three refracting surfaces 111 to 113 having free-form surfaces are used.
1 with the longitudinal direction of the free-form surface prism 110 made of
This is an example of an electronic imaging system that performs focusing by arranging a number of variable mirrors 115 and an imaging surface 118 of an imaging device. Needless to say, it can be used for film cameras and the like.

In this embodiment, a wide angle of 66 ° is realized by arranging a concave lens 119 on the object example of the free-form surface prism 110 and a convex lens 120 on the image side of the free-form surface prism 110. The diaphragm is the second of the free-form surface prism 110.
It is arranged on the surface 112 or in the vicinity thereof. Note that the first surface 111 of the free-form surface prism 110 has a concave lens 119.
Of the light reflected from the second surface 112, the effect of totally reflecting the light reflected by the second surface 112, and the effect of the third surface 1
It also has the function of refracting the light that has entered the prism again from 13 and exiting the prism.

In this embodiment, focusing is performed by disposing the variable mirror 115 behind the stop.

In this example, it is possible to obtain an optical system in which the light flux converging power of the variable mirror 115 is strong and the aberration is small. Further, by arranging the concave lens 119 and the convex lens 120 on the same side as the image sensor with respect to the longitudinal direction of the free-form surface prism 110, miniaturization and thinning are achieved.

The numerical data of this embodiment will be described later.
The number is 2.2, the focal length f _TOT is 3.8 mm, the imaging surface size is 3.64 × 2.85 mm, the angle of view is 66 ° diagonal, 40 ° in the short side direction, and 40 ° in the long side direction. The angle is 52 °.

(Embodiment C) In this embodiment, as shown in a cross section in FIG. 49, four free-form refraction surfaces 111 to 114 are formed.
A concave lens 119 and a convex lens 120 on both sides in the longitudinal direction of the free-form surface prism 110 made of
This is an example of an imaging system in which an imaging surface 118 of an imaging device and a variable mirror 115 are arranged on one side with respect to a longitudinal direction of a free-form surface prism 110. Focusing is performed by the variable mirror 115.

The first surface 1 of the free-form surface prism 110
Numeral 11 serves both as a function of refracting light from the concave lens 119 and causing the light to enter the prism, and a function of totally reflecting light that has entered the prism again from the second surface 112. Both the function of totally reflecting the light totally reflected by the surface 111 and the function of refracting the light reflected by the fourth surface 114 and emitting the light outside the prism are used.

This example has an advantage that the angle of view does not change even if focusing is performed because the stop is placed on the surface of the variable mirror 115 and the principal ray incident on the image plane 118 is substantially perpendicular to the image plane.

In addition, the variable mirror 115 and the imaging surface 118 are arranged in the same example in the longitudinal direction of the free-form surface prism 110,
In addition, the concave lens 119 is disposed on the opposite side to serve as a cover glass for a digital camera or the like, thereby achieving a reduction in thickness.

Numerical data of this embodiment will be described later.
The number is 2.6, the focal length f _TOT is 4.8 mm, the imaging surface size is 3.5 × 2.67 mm, and the angle of view is diagonal angle of view 5
The angle of view is 0 °, the angle of view in the short side is 32 °, and the angle of view in the long side is 40 °.

(Embodiment D) In this embodiment, as shown in the cross section in FIG. 50, three free-form refracting surfaces 111 to 113 are formed.
One concave lens 119 is placed on the object side in the longitudinal direction of the free-form surface prism 110 made of
This is an example of an imaging optical system that realizes downsizing by arranging an imaging surface 118 of an imaging element on the same side as the above and a variable mirror 115 on the opposite side. It is excellent in that the angle of view is as wide as 63 ° and the number of lenses is small.

The plane-parallel plate 117 is a drawing in which an infrared cut filter, a low-pass filter, a cover of an image sensor, glass and the like are collectively drawn.

The first surface 1 of the free-form surface prism 110
Numeral 11 has both the function of refracting the light from the concave lens 119 to enter the prism and the function of totally reflecting the light reflected by the second surface 112.

The numerical data of this embodiment will be described later.
The number is 2.8, the focal length f _TOT is 4.2 mm, the imaging surface size is 4.1 × 3.2 mm, and the diagonal angle of view is 63.
°, short side direction angle of view 40.4 °, long side direction angle of view 52.2 °
It is.

As can be said in common with Examples A to D and G to M, the N-th optical element 1 other than the free-form surface optical element
Assuming that the focal length of each of the lenses (the cemented lens is not separated and the variable mirror may be included) is f _N , the absolute value of the ratio to the total system focal length f _TOT is at least one optical distance. It is desirable that the element satisfy the following condition: 0.1 <| f _N / f _TOT | (22) If the value of | f _N / f _TOT | falls below the lower limit of 0.1, it becomes difficult to correct aberrations.

If high performance is desired, it is preferable to set 0.5 <| f _N / f _TOT | (22-1).

(Embodiment E) In this embodiment, as shown in the cross sections at the wide-angle end (a) and the telephoto end (b) in FIG. 51, a zoom Galilean finder using two variable mirrors 115 and 116 is used. It is an example. A first variable mirror 1 between a concave power objective lens 121 and a convex power eyepiece 122;
15 and the second variable mirror 116 form a Z-shaped folded optical path. When zooming, the variable mirror 115,
One of the surfaces 116 is deformed in a direction opposite to the concave surface formed of a toric surface from the flat surface, and the other is deformed in a direction opposite to the concave surface of the toric surface. This achieves zoom by moving the power in the lens system. At this time, the variable mirror 115,
The optical elements 121 and 122 other than 116 are characterized in that their positions are not changed, and have an advantage that the mechanical structure is simplified.

In addition to zooming, it is possible to focus on objects at different distances by changing the curvatures of the two variable mirrors 115 and 116.

Numerical data of this embodiment will be described later. At the wide-angle end, the object-side half angle of view is 14.5 °, the angular magnification is 0.38, the pupil diameter is 5.25 mm, and at the telephoto end, the object-side half angle of view is 8. 0.7 °,
The angular magnification is 0.6 and the pupil diameter is 5.25 mm.

| F _m | is defined as the focal length of an optical element having the shortest absolute value of the focal length in such an optical system (in the case of a cemented lens, the focal length in the cemented state). and the absolute value, | if that, for any of the variable mirror 115 constituting an optical system, an operating state of a variable _{mirror, 0.0001 <| | P m |} = 1 / | f m P I | / | P _m | <100 (23) or 0.0001 <| P _V | / | P _m | <100 (24)

| P _I | / | P _m | or | P _V | / | P _m
Is less than the lower limit of these equations, 0.0001, the amount of deformation of the variable mirror is too small to reduce the effect of zooming or focusing. Because it becomes difficult.

Further, in order to obtain an optical system having a large effect and a good aberration using a variable mirror, instead of the equations (23) and (24), 0.001 <| P _I | / | P _m | <10 (23-1) or 0.001 <| P _V | / | P _m | <10 It is preferable that at least one of the following conditions is satisfied.

(Embodiment F) This embodiment is an example of a Galilean finder using one variable focus mirror 115 as shown in the cross section in FIG.
Variable mirror 1 between the lens 21 and the eyepiece 122 having a convex power
The fixed mirror 123 and the fixed mirror 123 form a Z-shaped folded optical path. As the object approaches the near point from the far point, the variable mirror 115 placed in front of the stop (pupil) changes from a flat surface to a concave surface formed of a toric surface. And change.

Formulas (23) to (24-1) are obtained in Examples A to
The same holds for M.

The numerical data of this embodiment will be described later. The object-side half angle of view is 20 °, the angular magnification is 0.34, and the pupil diameter is 6 mm.

(Embodiment G) In this embodiment, as shown in the cross section at the wide-angle end (a) and the telephoto end (b) in FIG.
Front group 1 of negative power consisting of two cemented lenses with 4 interposed
25, a first variable mirror 115 on the object side of a rotationally symmetric lens system composed of a rear unit 126 having a positive power composed of a cemented lens and one lens, between the image plane 118 and the lens system. In this example, zooming is performed by disposing a second variable mirror 106 and changing the aspherical shapes of two variable mirrors 115 and 116 in cooperation with each other.

In this embodiment, a variable focus objective optical system such as a digital camera is constructed by using a spherical surface exclusively for a lens without using a free-form surface and a rotationally symmetric aspheric surface for the variable mirrors 115 and 116. .

Numerical data of this embodiment will be described later. The image height is 2 mm, the F number is 3.1 to 3.5, and the focal length is 6.76 to 8.73 mm.

(Embodiment H) In this embodiment, as shown in FIG. 54, the cross section at the wide-angle end (a) and the telephoto end (b) is shown in FIG.
Front group 1 of negative power consisting of two concave lenses with 4 interposed
25, and a first variable mirror 115 between the lenses of a front group 125 of a rotationally symmetric lens system including a rear group 126 having a positive power including a cemented lens and one positive lens. In this example, zooming is performed by disposing the second variable mirror 106 between the rear group 126 and changing the aspherical shapes of the two variable mirrors 115 and 116 in cooperation.

In this embodiment, a variable focus objective optical system such as a digital camera is constituted by using a spherical surface exclusively for a lens without using a free-form surface, and a rotationally symmetric aspheric surface for the variable mirrors 115 and 116. .

Numerical data of this embodiment will be described later. The image height is 2 mm, the F number is 3.6 to 4.48, and the focal length is 4.51 to 6.49 mm.

(Embodiment I) In this embodiment, as shown in FIG. 55, the cross section at the wide-angle end (a) and the telephoto end (b) is shown in FIG.
4, the front surface of the negative power group 125 composed of the lens 125 a having the anamorphic surface on the second surface and the cemented lens, and the positive power group composed of the cemented lens and one positive lens. A front group 125 of the lens system including the group 126
A first variable mirror 115 is provided between
In this example, zooming is performed by disposing a second variable mirror 106 between the rear lens group 126 and the rear group 126 and changing the aspherical shapes of the two variable mirrors 115 and 116 in cooperation.

In this embodiment, a variable focus objective optical system such as a digital camera or the like is formed by using an anamorphic surface or a spherical surface for a lens without using a free-form surface, and using a rotationally symmetric aspherical surface for the variable mirrors 115 and 116. Make up.

Numerical data of this embodiment will be described later. The image height is 2 mm, the F-number is 4.38 to 5.43, and the focal length is 5.89 to 8.86 mm.

(Embodiment J) In this embodiment, as shown in the cross section at the wide-angle end (a) and at the telephoto end (b) in FIG.
4, a first variable mirror 115 is disposed between a front group 125 of negative power including a negative lens and a positive lens and a diaphragm 124, and a rear group 126 between the diaphragm 124 and the image forming surface 118 is a convex lens. The lens comprises a cemented double lens and a convex lens, and a second variable mirror 11 between the convex lens and the cemented double lens.
6, a third variable mirror 127 is arranged between the doublet cemented lens and the last convex lens, and the optical paths are respectively 90 ° in total.
Three variable mirrors 115, 116, 127 that deflect each time
In this example, zooming is performed by changing the shapes of the free-form surfaces of these three variable mirrors independently in cooperation with each other.

In this embodiment, spherical lenses and rotationally symmetric aspheric surfaces are used for lenses other than the variable mirror, and constitute a variable focus objective optical system such as a digital camera.

The parallel plane plate group 128 between the rear group 126 and the image plane 118 is a filter, a cover glass or the like.

Numerical data of this embodiment will be described later. The aspect ratio of the imaging surface is 3: 4, and the maximum image height is 2.8 mm.
The F number is 2.56-8.34, and the focal length is 4.
69-9.33 mm, the angle of view is 25.50 in the X direction.
° to 13.50 °, Y-direction angle of view 19.70 ° to 10.2
0 °.

(Embodiment K) In this embodiment, as shown in the cross section at the wide-angle end (a) and at the telephoto end (b) in FIG.
4, a first variable mirror 115 is disposed between a front group 125 of negative power including a negative lens and a positive lens and a diaphragm 124, and a rear group 126 between the diaphragm 124 and the image forming surface 118 is a convex lens. The lens comprises a cemented double lens and a convex lens, and a second variable mirror 11 between the convex lens and the cemented double lens.
6, a third variable mirror 127 is disposed between the doublet cemented lens and the last convex lens, and three variable mirrors 115, 116 and 127 for deflecting the optical path are disposed, and these three variable mirrors are free. This is an example in which zooming is performed by independently changing the curved surface shape in cooperation. In this example, the variable mirror 11
5 and 127, the optical path is not deflected by 90 °, which is different from Example J in this point.

In this embodiment, spherical lenses and rotationally symmetric aspheric surfaces are used for lenses other than the variable mirror, and constitute a variable focus objective optical system such as a digital camera.

The parallel plane plate group 128 between the rear group 126 and the image plane 118 is a filter, a cover glass or the like.

Numerical data of this embodiment will be described later. The aspect ratio of the imaging surface is 3: 4, and the maximum image height is 2.8 mm.
The F-number is 3.67 to 6.69, and the focal length is 4.
69-9.33 mm, the angle of view is 25.50 in the X direction.
° to 13.50 °, Y-direction angle of view 19.70 ° to 10.2
0 °.

(Embodiment L) In this embodiment, a Cassegrain telescope or a Riccier comprising a rotationally symmetric main mirror 115 and sub-mirror 116 as shown in FIG. 58 shows the cross section at the wide-angle end (a) and the telephoto end (b).・ Catade opto-optical system 2 with two cemented lenses 129 added to the image side of the Cretean telescope
In this zoom system, a variable mirror is used as a mirror, and the distance between the stop 124 and the imaging surface 118 is fixed. The variable mirrors 115 and 116 use rotationally symmetric aspheric surfaces. In cooperation with the variable mirrors 116, 2
The variable-focus objective optical system is configured by moving the cemented lens 129 in the axial direction.

The numerical data of this embodiment will be described later, but the aspect ratio of the imaging surface is 3: 4 and the maximum image height is 2.8 mm.
And the F-number is 3.08-4.62 and the focal length is 4
0.0 to 60.0 mm, and the angle of view is 3.20 in the X direction.
° to 2.14 ° and the angle of view in the Y direction 2.40 ° to 1.60 °.

(Example M) In this example, as shown in the cross section in FIG. 59, a front group 125 composed of a positive lens and a double cemented lens, a double cemented lens and two positive Example of an imaging optical system such as an electronic imaging system or the like that performs focusing by disposing a variable mirror 115 between two positive lenses of a rear group 126 of a so-called double Gaussian lens system including a rear group 126 including a lens. It is.

This embodiment focuses on a short-distance object by deforming the variable mirror 115 from a flat surface to a free-form surface.

The numerical data of this embodiment will be described later. The aspect ratio of the imaging surface is 3: 4, and the maximum image height is 2.8 mm.
The F number is 3.5, the focal length is 6.4mm, and X
The angle of view in the direction is 21.58 ° and the angle of view in the Y direction is 16.52 °.

FIGS. 47 to 59 showing the above Examples A to M.
Are cross-sectional views taken along the YZ plane. In this example, the entire lens system is considered as one moving group,
The zooming may be performed by changing the shape of the variable mirror 115 while moving the movable mirror 115 in a direction away from the zoom lens.

As can be said throughout the present invention, in general, a zoom optical system is one of variable power optical systems. However, the term zoom optical system may be used synonymously with zoom optical system.

The unit of the examples is mm.

Further, the above Examples A to M are
In any case, the shape of the variable mirror changes continuously with zooming or focusing. However, zooming and focusing may be discontinuously performed at some places.

For example, in Examples A, C, E, and F, the peripheral portion of the variable mirror is fixed to other optical elements, and the central portion is designed to be deformed. Therefore, the surface top area of the variable mirror changes with the deformation of the variable mirror.

For example, in the embodiments B and D, the vicinity of the center of the variable mirror is fixed, and the peripheral portion is moved. In this case, the value of the variable mirror coordinate origin does not change in the lens data.

In the embodiments G to G, the variable mirror and other optical elements may be arranged so that the normals of at least two variable mirrors have a torsion relationship (since the aberration does not change).

In addition, even if the intermediate portion of the variable mirror or the other portion is fixed, or the variable mirror has no fixed point, if the mirror is deformed, the design is almost the same as those in these embodiments. Focusing, zooming, etc. can be realized. This is because the error in the position of the variable mirror does not affect the imaging performance as much as the error in the surface shape.

In an optical system using a variable mirror, any one of the following equations may be satisfied in a certain operation state.

0 ≦ | P _I | ≦ 0.01 (mm ⁻¹ ) (16-3) 0 ≦ | P _V | ≦ 0.01 (mm ⁻¹ ) (17-3) Equation 2 indicates that one of the curvatures is close to a flat surface in the operating state, and the flat surface is excellent in that shape control is easy and power is hardly consumed. The above two equations hold for Examples A to M.

In the following, the constituent parameters of Examples A to M are shown, and the free-form surface used in the present invention is defined by the following equation. The Z axis of this definition formula is the axis of the free-form surface.

[0384] Here, the first term of the equation (a) is a spherical term, and the second term is a free-form surface term.

In the spherical term, c: curvature of the vertex k: conic constant (conical constant) r = √ (X ² + Y ² ).

A free-form surface term is Here, C _j (j is an integer of 2 or more) is a coefficient.

The free-form surface generally includes an XZ plane,
Neither YZ plane has a symmetry plane, but by setting all odd-order terms of X to 0, a free-form surface having only one symmetry plane parallel to the YZ plane exists. In addition, by setting all odd-order terms of Y to 0, a free-form surface having only one symmetry plane parallel to the XZ plane is obtained.

As another definitional expression of a free-form surface which is a surface having the above-mentioned rotationally asymmetric curved surface shape, it can be defined by a Zernike polynomial. The shape of this surface is defined by the following equation (b). The Z axis of the definition formula (b) is Zernik
e is the axis of the polynomial. The definition of the rotationally asymmetric surface is defined by polar coordinates of the height of the Z axis with respect to the XY plane, where A is XY
The distance R from the Z axis in the plane is an azimuth around the Z axis, and can be expressed by a rotation angle measured from the Z axis.

X = R × cos (A) y = R × sin (A) Z = D_Two + D_ThreeRcos (A) + D_FourRsin (A) + D_FiveR^Two cos (2A) + D₆(R^Two-1) + D₇R^Two sin (2A) + D₈R^Threecos (3A) + D₉(3R^Three-2R) cos (A) + D_Ten(3R^Three-2R) sin (A) + D₁₁R^Threesin (3A) + D₁₂R^Fourcos (4A) + D₁₃(4R^Four-3R^Two) Cos (2A) + D₁₄(6R^Four-6R^Two+1) + D_Fifteen(4R^Four-3R^Two) Sin (2A) + D₁₆R^Foursin (4A) + D₁₇R^Fivecos (5A) + D₁₈(5R^Five-4R^Three) Cos (3A) + D₁₉(10R^Five-12R^Three+ 3R) cos (A) + D₂₀(10R^Five-12R^Three+ 3R) sin (A) + D_{twenty one}(5R^Five-4R^Three) Sin (3A) + D_{twenty two}R^Fivesin (5A) + D_{twenty three}R⁶cos (6A) + D_{twenty four}(6R⁶-5R^Four) Cos (4A) + D_{twenty five}(15R⁶-20R^Four+ 6R^Two) Cos (2A) + D₂₆(20R⁶-30R^Four+ 12R^Two-1) + D₂₇(15R⁶-20R^Four+ 6R^Two) Sin (2A) + D₂₈(6R⁶-5R^Four) Sin (4A) + D₂₉R⁶sin (6A) ········ (b) where D_m(M is an integer of 2 or more) is a coefficient. What
To design an optical system symmetrical in the X-axis direction,
D_Four, D_Five, D₆, D_Ten, D₁₁, D₁₂, D₁₃, D₁₄, D
₂₀, D_{twenty one}, D_{twenty two}Use….

The above-mentioned definition formula is shown for the purpose of exemplifying a surface having a rotationally asymmetric curved surface, and it goes without saying that the same effect can be obtained for any other definition formula.
If it is mathematically equivalent, the curved surface shape may be represented by another definition.

As another example of the free-form surface definition formula,
The following definition formula (c) is given.

Z = ΣΣC _nm XY As an example, when k = 7 (seventh-order term) is considered, when expanded, it can be expressed by the following equation.

Z = C ₂ + C ₃ Y + C ₄ | X | + C ₅ Y ² + C ₆ Y | X | + C ₇ X ² + C ₈ Y ³ + C ₉ Y ² | X | + C ₁₀ YX ² + C ₁₁ | X ³ | + C ₁₂ Y ⁴ + C ₁₃ Y ³ | X | + C ₁₄ Y ² X ² + C ₁₅ Y | X ³ | + C ₁₆ X ⁴ + C ₁₇ Y ⁵ + C ₁₈ Y ⁴ | X | + C ₁₉ Y ³ X ² + C ₂₀ Y ² | X ^{_{3 | + C 21 YX 4 +}} C 22 | X 5 | + C 23 Y 6 + C 24 Y 5 | X | + C 25 Y 4 X 2 + C 26 Y 3 | X 3 | + C 27 Y 2 X 4 + C 28 Y | X 5 | ^{_{+ C 29 X 6 + C 30}} Y 7 + C 31 Y 6 | X | + C 32 Y 5 X 2 + C 33 Y 4 | X 3 | + C 34 Y 3 X 4 + C 35 Y 2 | X 5 | + C 36 YX 6 + C 37 | X ⁷ | (c) The aspherical surface is a rotationally symmetric aspherical surface given by the following definition expression.

Z = (Y ² / R) / [1+ ｛1- (1 + K) Y ² / R ² ｝ ^1/2 ] + AY ⁴ + BY ⁶ + CY ⁸ + DY ¹⁰ +... (D) Is the optical axis (on-axis principal ray) where the traveling direction of light is positive, and Y is a direction perpendicular to the optical axis. Here, R is a paraxial radius of curvature, K is a conic constant, and A, B, C, D,... Are fourth-order, sixth-order, eighth-order, and tenth-order aspherical coefficients, respectively.
The Z axis of this definition expression is the axis of the rotationally symmetric aspherical surface.

The shape of the anamorphic surface is defined by the following equation. A straight line passing through the origin of the surface shape and perpendicular to the optical surface is the axis of the anamorphic surface.

[0396] ^{Z = (Cx · X 2 +} Cy · Y 2) / [1+ {1- (1 + Kx) Cx 2 · X 2 - (1 + Ky) Cy 2 · Y 2} 1/2] + ΣRn {(1-Pn) X ² + (1 + Pn) Y ² ｝ ^{(n + 1)} Here, when n = 4 (fourth-order term) is considered as an example, when expanded, it can be expressed by the following equation (a).

Z = (Cx.X ² + Cy.Y ² ) / [1+ {1− (1 + Kx) Cx ² .X ² − (1 + Ky) Cy ² .Y ² } ^1/2 ] + R1} (1-P1) ^{X 2 + (1 + P1)} Y 2} 2 + R2 {(1-P2) X 2 + (1 + P2) Y 2} 3 + R3 {(1-P3) X 2 + (1 + P3) Y 2} 4 + R4 {(1-P4 ) X ² + (1 + P4) Y ² ｝ ⁵ (e) where Z is the amount of deviation from the tangent plane to the origin of the surface shape, Cx is the curvature in the X-axis direction, Cy is the curvature in the Y-axis direction, and Kx is X An axial conic coefficient, Ky is a Y-axial conic coefficient, Rn is an aspherical term rotationally symmetric component, and Pn is an aspherical term rotationally asymmetric component. Note that between the curvature radius Rx in the X-axis direction and the curvature radius Ry in the Y-axis direction and the curvatures Cx and Cy, Rx = 1 / Cx, R
y = 1 / Cy.

The toric surface includes an X toric surface and a Y toric surface, each of which is defined by the following equation. A straight line passing through the origin of the surface shape and perpendicular to the optical surface is the axis of the toric surface. X toric surface, F (X) = Cx · X 2 / [1+ {1- (1 + K) Cx 2 · X 2} 1/2] + AX 4 + BX 6 + CX 8 + DX 10 ··· Z = F (X) + (1/2) Cy {Y ² + Z ² −F (X) ² } (f) Next, the lens rotates around the X axis through the center of curvature in the Y direction. As a result, the surface becomes aspheric in the XZ plane and Y
-A circle is formed in the Z plane. The Y toric surface is: F (Y) = Cy · Y ² / [1+ {1− (1 + K) Cy ² · Y ² ｝ ^1/2 ] + AY ⁴ + BY ⁶ + CY ⁸ + DY ¹⁰ ... Z = F (Y) + (1/2) Cx {X ² + Z ² −F (Y) ² } (g) Next, the lens rotates around the Y axis through the center of curvature in the X direction. As a result, the surface becomes aspheric in the YZ plane, and X
-A circle is formed in the Z plane.

Where Z is the amount of deviation from the tangent plane to the origin of the surface shape, Cx is the curvature in the X-axis direction, Cy is the curvature in the Y-axis direction, K is the conic coefficient, and A, B, C, and D are the aspherical coefficients. is there. The radius of curvature Rx in the X-axis direction and the radius of curvature R in the Y-axis direction
There is a relationship of Rx = 1 / Cx, Ry = 1 / Cy between y and the curvatures Cx, Cy.

[0400] The eccentric surface is defined by the amount of eccentricity (X, Y, and Z in the X, Y, and Z directions, respectively) from the center of the reference surface of the optical system to the top of the surface. The center axis of the surface (for a free-form surface, the Z-axis of the above formula (a); for an aspheric surface, the Z-axis of the above formula (d); for an anamorphic surface, the Z-axis of the above formula (e)) , For the toric surface, the X of the formula (f) or the formula (g)
The tilt angles (α, β, γ (°), respectively) about the axis, the Y axis, and the Z axis are given. In that case, α
The positive of β and β mean counterclockwise with respect to the positive direction of each axis, and the positive of γ means clockwise with respect to the positive direction of Z axis. How to rotate α, β, γ of the central axis of the surface is
The center axis of the surface and its XYZ orthogonal coordinate system are first rotated α counterclockwise around the X axis, and then the center axis of the rotated surface is rotated counterclockwise around the Y axis of the new coordinate system. The coordinate system rotated once and the coordinate system rotated once are also rotated counterclockwise by β around the Y axis, and then the center axis of the twice rotated surface is changed to the Z axis of the new coordinate system of the new coordinate system. The clockwise rotation is γ.

In the case where only the inclination of the reflecting surface is indicated, the inclination angle of the central axis of the surface is given as the amount of eccentricity.

Note that terms relating to free-form surfaces, aspheric surfaces, and the like for which no data is described are zero. The refractive index for d-line (wavelength 587.56 nm) is shown. The unit of the length is mm.

The following describes the constituent parameters of the above-described embodiments A to M. In the table below, "FFS" is a free-form surface,
“ASS” is an aspherical surface, “RP” is a reference surface, “HRP” is a virtual surface, “RE” is a reflective surface, “DM” is a variable mirror,
“XTR” indicates an X toric surface, and “ANM” indicates an anamorphic surface. Regarding the surface shape and eccentricity, “WE” and “TE” indicate the wide-angle end and the telephoto end, respectively, and “OD” indicates the object distance.

(Example A) Surface number Curvature radius Surface spacing Eccentricity Refractive index Abbe number Object plane {1000.00 1} (HRP, RP) Eccentricity (1) 2 FFS Eccentricity (2) 1.5254 56.2 3 FFS Eccentricity (3) 4 FFS (Aperture) (DM1) Eccentricity (4) 5 FFS Eccentricity (3) 1.5254 56.2 6 FFS Eccentricity (5) 7 FFS (DM2) Eccentricity (6) 8 FFS Eccentricity (5) 1.5254 56.2 9 FFS Eccentricity (7) 10 ∞ Eccentricity (8) 1.5163 64.1 11 ∞ eccentricity (9) image surface ∞ eccentricity _{(10) FFS C 4 -6.7765 ×} 10 -2 C 6 -6.2321 × 10 -2 C 8 -2.2954 × 10 -2 C 10 -1.9491 × 10 - ² C ₁₁ -3.1101 × 10 ^-3 C ₁₃ -6.5957 × 10 ^-3 C ₁₅ -2.9764 × 10 ^-3 FFS C ₄ -7.7519 × 10 ^-2 C ₆ -6.0590 × 10 ^-2 C ₈ -5.9666 × 10 ^-3 C ₁₀ -2.6208 × 10 ^-3 C ₁₁ -7.4511 × 10 ^-4 C ₁₃ -4.5909 × 10 ^-4 C ₁₅ -4.2617 × 10 ^-5 FFS WE: ∞ (flat) TE: C ₄ -1.7971 × 10 ^-2 C ₆ -1.8050 × 10 ^-2 C ₈ 3.0008 × 10 ^-5 C ₁₀ -1.3132 × 10 ^-3 C ₁₁ -3.4160 × 10 ^-4 C ₁₃ -7.3683 × 10 ^-4 C ₁₅ -3.1388 × 10 ^-4 FFS C ₄ -6.8810 × 10 ^-2 C ₆ -5.6218 × 10 ^-2 C ₈ 1.0316 × 10 ^-3 C ₁₀ -4.5924 × 10 ^-4 C ₁₁ -3.0583 × 10 ^-3 C ₁₃ 5.7663 × 10 ^-4 C ₁₅ 8.8386 × 10 ^-4 FFS WE: C ₄ 5.1461 × 10 ^-2 C ₆ 3.7863 × 10 ^-2 C ₈ -3.0012 × 10 ^-3 C ₁₀ -6.4390 × 10 ^-4 C ₁₁ 1.8790 × 10 ^-3 C ₁₃ 2.5101 × 10 ^-3 C ₁₅ 6.3665 × 10 ^-4 TE: ∞ (plane) FFS C ₄ -4.1970 × 10 ^-2 C ₆ -7.0058 × 10 ^-2 C ₈ -1.5784 × 10 ^-2 C ₁₀ -1.6308 × 10 ^-2 C ₁₁ -2.8968 × 10 ^-3 C ₁₃ 4.4919 × 10 ^-3 C ₁₅ -1.1667 × 10 ^-3 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y -0.03 Z 0.33 α 1.73 β 0.00 γ 0.00 Eccentricity (3) X 0.00 Y -0.10 Z 2.94 α 19.43 β 0.00 γ 0.00 Eccentricity (4) WE: X 0.00 Y -0.26 Z 4.08 α 16.93 β 0.00 γ 0.00 TE: X 0.00 Y -0.26 Z 4.12 α 16.93 β 0.00 γ 0.00 Eccentricity (5) X 0.00 Y -3.83 Z 1.02 α 8.48 β 0.00 γ 0.00 Eccentricity (6) WE: X 0.00 Y -4.80 Z -0.22 α 8.00 β 0.00 γ 0.00 TE: X 0.00 Y -4.80 Z 0.20 α 8.00 β 0.00 γ 0.00 Eccentricity (7) X 0.00 Y -4.33 Z 2.61 α -34.51 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -6.16 Z 3.17 α -13.93 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -6.40 Z 4.14 α -13.93 β 0.00 γ 0.00 Eccentricity (10) X 0.00 Y -6.46 Z 4.39 α -13.93 β 0.00 γ 0.00.

(Example B) Surface number Curvature radius Surface spacing Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 ∞ (RP) Eccentricity (1) 1.5168 64.1 2 10.00 Eccentricity (2) 3 FFS Eccentricity (3) 1.5254 56.2 4 FFS (Aperture) (RE) Eccentricity (4) 1.5254 56.2 5 FFS (RE) Eccentricity (3) 1.5254 56.2 6 FFS Eccentricity (5) 7 FFS (DM) Eccentricity (6) 8 FFS Eccentricity (5) 1.5254 56.2 9 FFS Eccentricity ( 3) 10 -17.00 Eccentricity (7) 1.8080 40.6 11 ∞ Eccentricity (8) Image plane ∞ Eccentricity (9) FFS C ₄ -4.7020 × 10 ^-2 C ₆ -1.8559 × 10 ^-2 C ₈ -2.1989 × 10 ^-3 C ^{_{10 -1.3752 × 10 -3 C 11 6.3011}} × 10 -4 C 13 -2.3538 × 10 -4 C 15 -1.2872 × 10 -4 FFS C 4 -3.5411 × 10 -2 C 6 -2.2443 × 10 -2 C 8 - 4.5396 × 10 ^-4 C ₁₀ -6.6517 × 10 ^-4 C ₁₁ 4.4891 × 10 ^-4 C ₁₃ 2.2297 × 10 ^-4 C ₁₅ -9.9027 × 10 ^-5 FFS C ₄ -6.3691 × 10 ^-2 C ₆ -5.2302 × 10 ^{_{-2 C 8 2.0046 × 10 -3 C}} 10 -1.4613 × 10 -3 C 11 -5.9788 × 10 -4 C 13 2.5449 × 10 -4 C 15 1.5212 × 10 -4 FFS OD: ∞ ^{_{4 -3.2044 × 10 -2 C 6 -3.4056}} × 10 -2 C 8 -1.1269 × 10 -3 C 10 9.3234 × 10 -4 C 11 -8.2793 × 10 -5 C 13 -9.5598 × 10 -4 C 15 -4.0391 × 10 ^-4 OD: 100 C ₄ -3.9028 × 10 ^-2 C ₆ -3.7848 × 10 ^-2 C ₈ -1.0212 × 10 ^-3 C ₁₀ 1.0709 × 10 ^-3 C ₁₁ 2.4511 × 10 ^-4 C ₁₃ -5.0708 × 10 ^-4 C ₁₅ -3.2267 × 10 ^-4 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.50 α 0.00 β 0.00 γ 0.00 Eccentricity (3) X 0.00 Y -3.37 Z 3.23 α 12.78 β 0.00 γ 0.00 Eccentricity (4) X 0.00 Y 0.37 Z 4.59 α 39.33 β 0.00 γ 0.00 Eccentricity (5) X 0.00 Y -5.99 Z 5.91 α -13.67 β 0.00 γ 0.00 Eccentricity (6) OD: 0.00 X 0.00 Y -6.78 Z 6.28 α -24.23 β 0.00 γ 0.00 OD: 100 X 0.00 Y -6.82 Z 6.28 α -24.23 β 0.00 γ 0.00 Eccentricity (7) X 0.00 Y -7.10 Z 3.60 α 1.02 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -7.11 Z 2.80 α 1.02 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -7.15 Z 0.80 α 1.02 β 0.00 γ 0.00.

(Example C) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane 10 ∞ 1 100.00 (RP) Eccentricity (1) 1.5168 64.1 2 7.00 Eccentricity (2) 3 FFS Eccentricity (3) 1.5254 56.2 4 FFS Eccentricity (4) 5 FFS (aperture) (DM) Eccentricity (5) 6 FFS Eccentricity (4) 1.5254 56.2 7 FFS (RE) Eccentricity (3) 1.5254 56.2 8 FFS (RE) Eccentricity (6) 1.5254 56.2 9 FFS (RE Eccentricity (7) 1.5254 56.2 10 FFS Eccentricity (6) 11 10.00 Eccentricity (8) 1.5163 64.1 12 ∞ Eccentricity (9) Image plane ∞ Eccentricity (10) FFS C ₄ 1.8163 × 10 ^-2 C ₆ 1.1651 × 10 ^-2 C ₈ 3.0002 × 10 ^-3 C ₁₀ -3.5383 × 10 ^-4 C ₁₁ -3.3122 × 10 ^-4 C ₁₃ 1.2716 × 10 ^-4 C ₁₅ 9.7268 × 10 ^-6 FFS C ₄ -4.5005 × 10 ^-3 C ₆ 9.0 138 × 10 ^-4 C ₈ 4.5271 × 10 ^-3 C ₁₀ -1.5303 × 10 ^-3 C ₁₁ 3.3446 × 10 ^-4 C ₁₃ 5.9680 × 10 ^-4 C ₁₅ 2.3049 × 10 ^-4 FFS OD: ∞ C ₄ 5.0000 × 10 ^-3 C ₆₀ C ₈ 2.1463 × 10 ^-3 C ₁₀ 1.5585 × 10 ^-3 C ₁₁ -4.7817 × 10 ^-4 C ₁₃ 1.3 106 × 10 ^-4 C ₁₅ -1.0174 × 10 ^-4 OD: 200 C ₄ 3.9639 × 10 ^-3 C ₆ -2.1776 × 10 ^-3 C ₈ 2.1463 × 10 ^-3 C ₁₀ 1.5585 × 10 ^-3 C ₁₁ -4.7817 × 10 ^-4 C ₁₃ 1.3106 × 10 ^-4 C ₁₅ -1.0174 × 10 ^-4 FFS C ₄ 4.3696 × 10 ^-2 C ₆ 1.0430 × 10 ^-2 C ₈ 7.1557 × 10 ^-3 C ₁₀ -1.2829 × 10 ^-3 C ₁₁ -9.5494 × 10 ^-5 C ₁₃ 4.0730 × 10 ^-5 C ₁₅ 6.5262 × 10 ^-5 FFS C ₄ 4.4714 × 10 ^-2 C ₆ 2.5659 × 10 ^-2 C ₈ 1.9530 × 10 ^-3 C ₁₀ -2.1893 × 10 ^-3 C ₁₁ 1.9650 × 10 ^-4 C ₁₃ -9.0025 × 10 ^-5 C ₁₅ 2.2762 × 10 ^-4 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 1.00 α 0.00 β 0.00 γ Eccentricity (3 ) X 0.00 Y -3.33 Z 3.14 α -9.55 β 0.00 γ 0.00 Eccentricity (4) X 0.00 Y -0.13 Z 5.47 α 15.33 β 0.00 γ 0.00 Eccentricity (5) OD: ∞ X 0.00 Y -0.35 Z 6.415 α 20.19 β 0.00 γ 0.00 OD: 200 X 0.00 Y -0.35 Z 6.42 α 20.19 β 0.00 γ 0.00 Eccentricity (6) X 0.00 Y -8.71 Z 6.22 α -3.45 β 0.00 γ 0.00 Eccentricity (7) X 0.00 Y -11.69 Z 4.00 α 30.06 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -11.39 Z 6.60 α 9.61 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -11.22 Z 7.59 α 9.61 β 0.00 γ 0.00 Eccentricity (10) X 0.00 Y -10.77 Z 10.25 α 9.61 β 0.00 γ 0.00.

(Example D) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 ∞ (RP) Eccentricity (1) 1.5168 64.1 2 10.00 Eccentricity (2) 3 ∞ Eccentricity (3) 4 FFS Eccentricity ( 4) 1.5254 56.2 5 FFS (aperture) (RE) Eccentricity (5) 1.5254 56.2 6 FFS (RE) Eccentricity (4) 1.5254 56.2 7 FFS Eccentricity (6) 8 FFS (DM) Eccentricity (7) 9 FFS Eccentricity (6) 1.5254 56.2 10 FFS Eccentricity (4) 11 ∞ Eccentricity (8) 1.5163 64.1 12 ∞ Eccentricity (9) Image plane ∞ Eccentricity (10) FFS C ₄ -4.7148 × 10 ^-2 C ₆ -1.8559 × 10 ^-2 C ₈ -2.1989 × 10 ^-3 C ₁₀ -1.3752 × 10 ^-3 C ₁₁ 6.3011 × 10 ^-4 C ₁₃ -2.3538 × 10 ^-4 C ₁₅ -1.2872 × 10 ^-4 FFS C ₄ -3.5411 × 10 ^-2 C ₆ -2.2443 × 10 ^-2 C ₈ -4.5396 × 10 ^-4 C ₁₀ -6.6517 × 10 ^-4 C ₁₁ 4.4891 × 10 ^-4 C ₁₃ 2.2297 × 10 ^-4 C ₁₅ -9.9027 × 10 ^-5 FFS C ₄ -6.3691 × 10 ^-2 C ₆ -5.2302 × 10 ^-2 C ₈ 2.0046 × 10 ^-3 C ₁₀ -1.4613 × 10 ^-3 C ₁₁ -5.9788 × 10 ^-4 C ₁₃ 2.5449 × 10 ^-4 C ₁₅ 1.5212 × 10 ^-4 FFS OD: ∞ C ₄ -3.2044 × 10 ^-2 C ₆ -3.4056 × 10 ^-2 C ₈ -1.1269 × 10 ^-3 C ₁₀ 9.3234 × 10 ^-4 C ₁₁ -8.2793 × 10 ^-5 C ₁₃ -9.5598 × 10 ^-4 C ₁₅ -4.0391 × 10 ^-4 OD: 100 C ₄ -3.6403 × 10 ^-2 C ₆ -3.5596 × 10 ^-2 C ₈ -9.3276 × 10 ^-4 C ₁₀ 1.0425 × 10 ^-3 C ₁₁ 1.7142 × 10 ^-4 C ₁₃ -6.2756 × 10 ^-4 C ₁₅ -3.7675 × 10 ^-4 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.50 α 0.00 β 0.00 γ 0.00 Eccentricity (3 ) X 0.00 Y 0.00 Z 4.20 α 0.00 β 0.00 γ 0.00 Eccentricity (4) X 0.00 Y -3.37 Z 3.23 α 12.78 β 0.00 γ 0.00 Eccentricity (5) X 0.00 Y 0.37 Z 4.59 α 39.33 β 0.00 γ 0.00 Eccentricity (6) X 0.00 Y -5.99 Z 5.91 α -13.67 β 0.00 γ 0.00 Eccentricity (7) OD: Ｘ X 0.00 Y -6.78 Z 6.28 α -24.23 β 0.00 γ 0.00 OD: 100 X 0.00 Y -6.78 Z 6.28 α -24.23 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -7.10 Z 2.99 α 1.02 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -7.11 Z 2.44 α 1.02 β 0.00 γ 0.00 Eccentricity (10) X 0.00 Y -7.15 Z 0. 44 α 1.02 β 0.00 γ 0.00.

(Example E) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ 1000.00 1 -30.00 (RP) Eccentricity (1) 1.5168 64.1 2 -19.75 Eccentricity (2) 1.6727 32.2 3 30.00 Eccentricity (3) 4 XTR (DM1) Eccentricity (4) 5 XTR (DM2) Eccentricity (5) 6 100.0 Eccentricity (6) 1.5168 64.1 7 -20.0 Eccentricity (7) 1.6727 32.2 8 -120.0 Eccentricity (8) 9 9) Image plane Ｘ XTR WE: ∞ (plane) TE: Ry -70.0 Rx -60.622 XTR WE: Ry 125.0 Rx 108.253 TE: ∞ (plane) Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 3.00 α 0.00 β 0.00 γ 0.00 Eccentricity (3) X 0.00 Y 0.00 Z 4.30 α 0.00 β 0.00 γ 0.00 Eccentricity (4) WE: X 0.00 Y 0.00 Z 14.30 α -30.00 β 0.00 γ 0.00 TE: X 0.00 Y 0.00 Z 15.009 α -30.00 β 0.00 γ 0.00 Eccentricity (5) WE: X 0.00 Y -17.465 Z 4.217 α -30.00 β 0.00 γ 0.00 TE: X 0.00 Y -17.934 Z 4.6546 α -30.00 β 0.00 γ 0.00 Eccentricity (6) X 0.00 Y -17.934 Z 13.655 α 0.00 β 0.00 γ 0.00 Eccentricity (7) X 0.00 Y -17.934 Z 17.655 α 0.00 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -17.934 Z 18.655 α 0.00 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -17.934 Z 20.655 α 0.00 β 0.00 γ 0.00.

(Example F) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ 10000.00 1 -30.00 (RP) Eccentricity (1) 1.5168 64.1 2 -19.75 Eccentricity (2) 1.6727 32.2 3 30.00 Eccentricity (3) 4 XTR (DM) Eccentricity (4) 5 mm (RE) Eccentricity (5) 6 50.0 Eccentricity (6) 1.5168 64.1 7 -20.0 Eccentricity (7) 1.6727 32.2 8 -60.0 Eccentricity (8) 9 mm (throttle surface) Eccentricity ( 9) Image plane Ｘ XTR OD: 10000.00 ∞ (plane) OD: 1000.00 TE: Ry -400 Rx -346.4 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 0.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 3.00 α 0.00 β 0.00 γ 0.00 Eccentricity (3) X 0.00 Y 0.00 Z 4.30 α 0.00 β 0.00 γ 0.00 Eccentricity (4) OD: 10000.00 X 0.00 Y 0.00 Z 14.176 α -30.00 β 0.00 γ 0.00 OD: 1000.00 X 0.00 Y 0.00 Z 14.300 α -30.00 β 0.00 γ 0.00 Eccentricity (5) X 0.00 Y -17.32 Z 4.30 α -30.00 β 0.00 γ 0.00 Eccentricity (6) X 0.00 Y -17.32 Z 13.30 α 0.00 β 0.00 γ 0.00 Eccentricity (7) X 0.00 Y -17.32 Z 17.3 0 α 0.00 β 0.00 γ 0.00 Eccentricity (8) X 0.00 Y -17.32 Z 18.30 α 0.00 β 0.00 γ 0.00 Eccentricity (9) X 0.00 Y -17.32 Z 20.30 α 0.00 β 0.00 γ 0.00.

(Example G) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 ASS (DM1) 5.5000 Eccentricity (1) 2 5.2581 3.8903 1.88300 40.76 3 15.4927 3.4495 1.72151 29.23 4 0.9691 1.0000 5 ∞ (Aperture) Surface) 0.2000 6 -40.7277 1.0035 1.88300 40.76 7 1.9125 2.2294 1.83481 42.72 8 -2.6031 0.1000 9 17.9219 0.9949 1.88300 40.76 10 8.8386 2.9405 11 ASS (DM2) d ₁ Eccentricity (2) Image plane Ａ ASS WE: R 106.39172 K -400 A-400 × 10 ^-5 B 1.8807 × 10 ^-6 C -2.1512 × 10 ^-8 D 1.0292 × 10 ^-10 TE: R 240.85450 K 0.0000 A 2.8699 × 10 ^-5 B -7.6530 × 10 ^-7 C 1.8985 × 10 ^-8 D- 1.5367 × 10 ^-10 ASS WE: R -24.73983 K 0.0000 A 2.0754 × 10 ^-3 B -2.7716 × 10 ^-4 C 1.7647 × 10 ^-5 TE: R -49.19751 K 0.0000 A -6.0663 × 10 ^-4 B 1.8049 × 10 ^-4 C -1.0921 × 10 ^-5 Variable interval d ₁ WE: 5.54732 TE: 5.54510 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00.

(Example H) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 ∞ 1.0000 1.51633 64.14 2 8.4105 5.5000 3 ASS (DM1) 4.0000 Eccentricity (1) 4 3.2414 3.2454 1.88300 40.76 5 1.5926 0.8213 6 ∞ (aperture plane) 0.2000 7 32.9618 7.0342 1.84666 23.78 8 11.5062 2.7774 1.51633 64.14 9 -4.4027 1.8078 10 36.1618 1.2403 1.72916 54.68 11 -13.6093 4.1642 12 ASS (DM2) d 1 eccentric (2) image surface ∞ ASS WE: R 109.58316 K 0.0000 A -6.1107 × 10 ^-4 B 6.6969 × 10 ^-5 C -3.1575 × 10 ^-6 D 5.5493 × 10 ^-8 TE: R -175.10236 K 0.0000 A 3.7168 × 10 ^-4 B -3.0985 × 10 ^-5 C 1.1219 × 10 ^-6 D -7.0811 × 10 ^-27 ASS WE: R -89.25156 K 0.0000 A 5.9040 × 10 ^-4 B -3.5468 × 10 ^-5 C 9.0208 × 10 ^-7 TE: R 91.42433 K 0.0000 A -4.5028 × 10 ^-4 B 5.5916 × 10 ^-5 C -2.4949 × 10 ^-6 Variable interval d ₁ WE: 5.49484 TE: 5.50021 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.00 α -34.372 β 0.00 γ 0.00.

(Example I) Surface number Curvature radius Surface spacing Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 ∞ 1.0000 1.51633 64.14 2 ANM 5.0000 3 ASS (DM1) 4.0000 Eccentricity (1) 4 3.0102 3.0708 1.51633 64.14 5 -24.9459 1.5539 1.88300 40.76 6 1.9584 1.0818 7 ∞ (aperture plane) 0.2000 8 -295.2763 6.3253 1.84666 23.78 9 15.8702 2.6272 1.51633 64.14 10 -4.2027 1.7630 11 -206.7394 1.2972 1.72916 54.68 12 -9.3156 4.1451 13 ASS (DM2) d 1 eccentric (2) image plane ∞ ANM Ry 41.4008 Rx 61.2166 Ky 0.0000 Kx 0.0000 R1 -1.5273 × 10 ^-3 R2 1.1686 × 10 ^-4 R3 -3.7464 × 10 ^-6 R4 4.7549 × 10 ^-8 P1 2.4721 × 10 ^-2 P2 -3.8239 × 10 ^-3 P3 -5.9130 × 10 ^-3 P4 1.1138 × 10 ^-2 ASS WE: R 149.96177 K 0.0000 A -7.0601 × 10 ^-5 B 2.2751 × 10 ^-6 C -4.7356 × 10 ^-8 D 3.6529 × 10 ^-10 TE: R -186.85340 K 0.0000 A 3.7389 × 10 ^-4 B -1.6633 × 10 ^-5 C 2.5291 × 10 ^-7 D -7.0811 × 10 ^-27 ASS WE: R- 51.51621 K 0.0000 A 7.0673 × 10 ^-4 B -3.4212 × 10 ^-5 C 7.2662 × 10 ^-7 TE: R 196.67374 K 0.0000 A -1.0661 × 10 ^-3 B 1.3376 × 10 ^-4 C -5.2193 × 10 ^-6 Variable interval d ₁ WE: 5.43122 TE: 5.45627 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00.

(Example J) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane 18 ∞ 1 188.01 4.86 1.7093 54.3 2 ASS 7.00 3 -16.52 5.00 1.5268 65.8 4 -7.53 4.00 5 FFS (DM1) 5.00 Eccentricity (1 ) 6 ∞ (diaphragm surface) 0.50 7 ASS 2.00 1.4875 70.2 8 -728.98 4.00 9 FFS (DM2) 4.00 Eccentricity (2) 10 118.60 1.95 1.4875 70.2 11 -5.57 4.53 1.8467 23.8 12 -26.99 4.00 13 FFS (DM3) 4.00 Eccentricity ( 3) 14 -9.15 3.00 1.5263 65.9 15 ASS 1.00 16 ∞ 0.80 1.5163 64.1 17 ∞ 1.80 1.5477 62.8 18 ∞ 0.50 19 ∞ 0.50 1.5163 64.1 20 ∞ 1.00 Image surface ∞ ASS R 3.68 K 0.0000 A -3.0236 × 10 ^-4 B -2.4721 × 10 ^-4 C 1.9293 × 10 ^-5 D -1.7320 × 10 ^-6 ASS R -9.14 K 0.0000 A 4.7221 × 10 ^-6 B 2.5368 × 10 ^-6 C -2.0457 × 10 ^-7 D 6.2856 × 10 ^-9 ASS R 12.33 K 0.0000 A -5.7706 × 10 ^-4 B 1.6455 × 10 ^-5 C -2.7671 × 10 ^-6 D 9.5513 × 10 ^-8 FFS WE: C ₄ 1.3195 × 10 ^-3 C ₆ 1.6555 × 10 ^-4 C ₈ 2. 5372 × 10 ^-5 C ₁₀ -2.9788 × 10 ^-6 C ₁₁ 9.7932 × 10 ^-6 C ₁₃ 3.8809 × 10 ^-6 C ₁₅ 1.2337 × 10 ^-6 TE: C ₄ -1.1656 × 10 ^-2 C ₆ -9.1985 × 10 ^-4 C ₈ 4.6664 × 10 ^-5 C ₁₀ 4.0729 × 10 ^-5 C ₁₁ 3.4607 × 10 ^-6 C ₁₃ -2.1879 × 10 ^-6 C ₁₅ -1.0285 × 10 ^-6 FFS WE: C ₄ 1.8423 × 10 ^-3 C _{^{6 -1.4463 × 10 -4 C 8 1.5642}} × 10 -4 C 10 -2.5385 × 10 -5 C 11 -1.3512 × 10 -6 C 13 4.2397 × 10 -6 C 15 -2.8277 × 10 -6 TE: C 4 - 2.5101 × 10 ^-2 C ₆ 1.7952 × 10 ^-3 C ₈ -1.3478 × 10 ^-3 C ₁₀ 2.2 259 × 10 ^-4 C ₁₁ 4.1435 × 10 ^-6 C ₁₃ -9.2639 × 10 ^-5 C ₁₅ 8.7872 × 10 ^-6 FFS WE: C ₄ -7.6689 × 10 ^-5 C ₆ -1.1461 × 10 ^-3 C ₈ 1.0248 × 10 ^-4 C ₁₀ -2.2888 × 10 ^-5 C ₁₁ -3.2560 × 10 ^-5 C ₁₃ 2.3921 × 10 ^-6 C ₁₅ -5.6394 × 10 ^-6 TE: C ₄ 7.4185 × 10 ^-3 C ₆ 1.7664 × 10 ^-2 C ₈ -8.0810 × 10 ^-4 C ₁₀ 5.1976 × 10 ^-4 C ₁₁ -4.7072 × 10 ^-5 C ₁₃ -1.8546 × 10 ^-4 C ₁₅ 2.7899 × 10 ^-5 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α -45.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00.

Eccentricity (3) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00.

(Example K) Surface number Curvature radius Surface distance Eccentricity Refractive index Abbe number Object plane ∞ ∞ 1 99.38 4.38 1.6480 57.6 2 ASS 7.00 3 -23.52 4.38 1.5272 49.3 4 -8.83 4.00 5 FFS (DM1) 5.00 Eccentricity (1) ) 6 ∞ (diaphragm surface) 0.50 7 ASS 2.00 1.4875 70.2 8 27.63 4.00 9 FFS (DM2) 4.00 Eccentricity (2) 10 -88.03 2.33 1.6162 59.3 11 -5.12 2.97 1.8467 23.8 12 -13.95 4.00 13 FFS (DM3) 4.00 Eccentricity 3) 14 -13.06 3.00 1.4875 70.2 15 ASS 1.00 16 ∞ 0.80 1.5163 64.1 17 ∞ 1.80 1.5477 62.8 18 ∞ 0.50 19 ∞ 0.50 1.5163 64.1 20 ∞ 1.00 Image plane ＳＳ ASS R 3.78 K 0.0000 A -9.9411 × 10 ^-4 B -1.2686 × 10 ^-4 C 7.9744 × 10 ^-6 D -1.1175 × 10 ^-6 ASS R -17.37 K 0.0000 A 1.9221 × 10 ^-5 B -4.7245 × 10 ^-5 C 1.4660 × 10 ^-5 D -1.6412 × 10 ^-6 ASS R 9.37 K 0.0000 A -1.1445 × 10 ^-3 B 7.2645 × 10 ^-5 C -4.4423 × 10 ^-6 D 9.7740 × 10 ^-8 FFS WE: C ₄ -1.0242 × 10 ^-3 C ₆ -2.9132 × 10 ^-3 C _8- 1.7482 × 10 ^-5 C ₁₀ -5.8646 × 10 ^-6 C ₁₁ -6.7499 × 10 ^-6 C ₁₃ -1.6480 × 10 ^-5 C ₁₅ -5.3516 × 10 ^-6 TE: C ₄ -1.1888 × 10 ^-2 C _6- 2.5578 × 10 ^-3 C ₈ 7.4643 × 10 ^-5 C ₁₀ 3.3620 × 10 ^-5 C ₁₁ -5.6066 × 10 ^-6 C ₁₃ -1.4296 × 10 ^-5 C ₁₅ -5.1085 × 10 ^-6 FFS WE: C ₄ -1.2349 _{^{× 10 -3 C 6 -4.8627 × 10}} -3 C 8 -9.3065 × 10 -5 C 10 -2.7168 × 10 -4 C 11 1.3448 × 10 -5 C 13 -1.6792 × 10 -5 C 15 -2.3260 × 10 - ⁵ TE: C ₄ -2.1788 × 10 ^-2 C ₆ 1.6763 × 10 ^-3 C ₈ -9.0487 × 10 ^-4 C ₁₀ 1.7415 × 10 ^-4 C ₁₁ -1.0766 × 10 ^-4 C ₁₃ -9.6712 × 10 ^-5 C ₁₅ 4.3032 × 10 ^-6 FFS WE: C ₄ 3.6425 × 10 ^-4 C ₆ -3.3124 × 10 ^-3 C ₈ -6.6428 × 10 ^-5 C ₁₀ -1.4832 × 10 ^-4 C ₁₁ 1.7998 × 10 ^-6 C ₁₃ 5.7814 _{^{× 10 -6 C 15 -5.4564 × 10}} -6 TE: C 4 1.0084 × 10 -2 C 6 2.0630 × 10 -2 C 8 -6.9625 × 10 -4 C 10 3.5904 × 10 -4 C 11 -3.6557 × 10 - ⁵ C ₁₃ -1.3505 × 10 ^-4 C ₁₅ 2.8988 × 10 ^-5 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α -36.00 β 0.00 γ 0.00 Eccentricity (2) X 0.00 Y 0 .00 Z 0.00 α 45.00 β 0.00 γ 0.00 Eccentricity (3) X 0.00 Y 0.00 Z 0.00 α 39.00 β 0.00 γ 0.00.

[0416] (Example L) Surface number curvature radius spacing eccentric refractive index Abbe number object surface ∞ ∞ 1 ∞ (aperture plane) 17.00 2 ASS (DM1) d 1 3 ASS (DM2) d 2 4 10.17 1.80 1.5713 52.9 5 -9.11 1.00 1.7725 49.6 6 18.98 d ₃ image surface ∞ ASS WE: R -56.07 K -6.6587 × 10 -1 A 1.4016 × 10 -6 B 5.4841 × 10 -9 C -7.2045 × 10 -11 D 4.8599 × 10 -13 TE: R -57.25 K -2.3246 × 10 ^-1 A 8.4461 × 10 ^-7 B -4.0454 × 10 ^-10 C 5.5081 × 10 ^-12 D 1.6847 × 10 ^-15 ASS WE: R -83.86 K -2.4760 × 10 A 1.5233 × 10 ^-5 B 3.3907 × 10 ^-7 C -2.8012 × 10 ^-8 D 8.0957 × 10 ^-10 TE: R -41.56 K -2.5160 × 10 A -2.4200 × 10 ^-5 B 1.1173 × 10 ^-6 C -8.1069 × 10 ^-8 D 2.5583 × 10 ^-9 Variable interval d ₁ WE: -13.268 TE: -17.000 Variable interval d ₂ WE: 15.000 TE: 19.457 Variable interval d ₃ WE: 5.000 TE: 4.275

(Example M) Surface number Curvature radius Surface spacing Eccentricity Refractive index Abbe number Object surface ∞ ∞ 1 14.04 1.85 1.8467 23.8 2 24.90 2.21 3 21.02 1.94 1.7891 25.4 4 -16.31 1.00 1.7725 49.6 5 3.88 6.18 6 ∞ ) 1.33 7 -7.30 1.11 1.8204 28.8 8 9.09 2.12 1.6698 56.6 9 -7.00 0.50 10 29.43 3.00 1.6835 56.0 11 -10.92 5.50 12 FFS (DM) 5.50 Eccentricity (1) 13 -7.85 3.00 1.5568 63.2 14 -37.04 5.43 Image plane ＦＦ FFS OD: ∞ (flat) OD: 100 C ₄ -1.0215 × 10 ^-3 C ₆ -5.3693 × 10 ^-4 C ₈ 7.2810 × 10 ^-6 C ₁₀ 9.5760 × 10 ^-6 C ₁₁ 3.2283 × 10 ^-6 C ₁₃ 4.2419 × 10 ^-6 C ₁₅ 5.7400 × 10 ^-7 Eccentricity (1) X 0.00 Y 0.00 Z 0.00 α 45.00 β 0.00 γ 0.00.

Next, FIGS. 60 to 67 show lateral aberration diagrams of the above-described Examples B, E, K, and L. FIG. 60 and 61 are lateral aberrations at the time of focusing on the far point and near point in Example B, and FIGS. 62 and 63.
64 shows lateral aberrations at the wide angle end and the telephoto end of Example E, and FIGS.
66 shows lateral aberrations at the wide angle end and the telephoto end of Example K, and FIGS.
Are the lateral aberrations at the wide angle end and the telephoto end of Example L. In these lateral aberration diagrams, the numbers in parentheses are the angles of view, and the two numbers in parentheses are (horizontal (X Direction), the vertical (Y direction) angle of view, and the lateral aberration at that angle of view. Note that the lateral aberration in Example E is an aberration on the virtual image plane.

Next, the values of the conditional expressions (2), (8), (12) to (24) of the above-mentioned Examples A to M are shown. D is the diameter of a circle having the same area as the light beam passing portion of the variable mirror.

(Example A) Variable mirror 1 2 state TE-WE TE-WE Shape of light beam passing portion Elliptical square Δ 0.0016 0.0740 (1/5) × D 0.332 0.8 H 0.04 0.042 HJ / HK 0.0952 φ2740P _I -0.0361 0.0757 P _V -0.0359 0.1029 ΔP _I -0.0361 -0.0757 ΔP _V -0.0359 -0.1029 | P _I / (P _V cos φ) | 1.1273 0.9604 | P _I / P _TOT | 0.2094 0.4392 | P _V / P _TOT | 0.2085 0.5969 | ΔP _I / P _TOT | 0.2094 0.4392 | ΔP _V / P _TOT | 0.2085 0.5969.

(Example B) State Peripheral point Far point Shape of light beam passing portion Rounded rectangle Rectangular corner Δ 0.006 0.01 (1/5) × D 1.42 1.42 H 0.09 0.09 φ 40 40 P _I -0.0757 -0.0681 P _V -0.0781 -0.0641 ΔP _I -0.0078 ΔP _V -0.0140 | P _I / (P _V cos φ) | 1.2659 1.3877 | P _I / P _TOT | 0.2876 0.2589 | P _V / P _TOT | 0.2966 0.2435 | ΔP _I / P _TOT | 0.0288 | ΔP _V / P _TOT | 0.0531 | f ₁ / f _TOT | 5.0919 | f ₂ / f _TOT | 5.5366.

[0422] (Example C) state near point far point light beam passage portion having a shape oval oval Δ 0.005 0.007 (1/5) × D 0.508 0.508 H 0.005 0.005 φ 37 37 P I -0.0044 0 P V 0.0079 0.01 ΔP _{I -0.0044 ΔP V -0.0021 | P I} / (P V cosφ) | 0.6879 0 | P I / P TOT | 0.0209 0 | P V / P TOT | 0.0381 0.048 | ΔP I / P TOT | 0.0209 | ΔP V / P _{TOT | 0.0099 | f 1 / f} TOT | 3.0454 | f 2 / f TOT | 4.0348.

(Example D) State Peripheral point Far point Shape of light beam passing portion Rounded square Square rounded square Δ 0.01 0.1 (1/5) × D 1.46 1.46 H 0.06 0.06 φ 41 41 P _I -0.0712 -0.0681 P _V -0.0728 -0.0641 ΔP _I -0.0031 ΔP _V -0.0087 | P _I / (P _V cos φ) | 1.2956 1.4082 | P _I / P _TOT | 0.2990 0.2861 | P _V / P _TOT | 0.3058 0.2692 | ΔP _I / P _TOT | 0.0129 | ΔP _V / P _TOT | 0.0366 | f ₁ / f _TOT | 4.607.

(Embodiment E) Variable mirror 12-state TE-WE TE-WE Shape of light beam passing portion Ellipse Ellipse Δ 0.001 0.00003 (1/5) × D 2.6 1.72 H 0.62 0.14 φ3030 HJ / HK 4.4286 P _I -0.0143 -0.008 P _V -0.0165 -0.0092 ΔP _I -0.0143 0.008 ΔP _V -0.0165 0.0092 │P _I / (P _V cosφ) │ 1.0007 0.9997 │P _I │ / │P _m │ -0.2917 -0.1632 │P _{V | / | P m | -0.3366 -0.1885} .

[0425] (Example F) state near point far point light beam passage portion having a shape oval oval Δ 0.000003 0.000003 (1/5) × D 2.38 2.38 H 0.05 0.05 φ 30 30 P I -0.0025 0 P V -0.0029 0 ΔP _I -0.0025 ΔP _V -0.0029 │P _I / (P _V cos φ) │ 0.9954 1.1547 │P _I │ / │P _m │ -0.051 0 │P _V │ / │P _m │ -0.0592 0.

(Example G) Variable mirror 12-state TE-WE TE-WE Δ0.0041 0.0818 (1/5) × D 1.62 0.54 H 0.1534 0.0200 HJ / HK 7.684 φ 45.0 45.0 P _I 0.0094 -0.0404 P _V 0.0094- 0.0404 ΔP _I 0.0094 -0.0404 ΔP _V 0.0094 -0.0404 │P _I / (P _V cos φ) │ 1.4142 1.4142 │P _I / P _TOT │ 0.0639 0.3517 │P _V / P _TOT │ 0.0639 0.3517 │ΔP _I / P _TOT │ 0.0639 0.3517 _{| ΔP V / P TOT | 0.0639} 0.3517 | f m | 3.4 3.4 | P I | / | P m | 0.0318 0.1367 | P V | / | P m | 0.0318 0.1367 | f 1 / f TOT | 1.74 1.36 | f 2 / f _TOT | 7.82 6.11 | f ₃ / f _TOT | 0.50 0.39 | f ₄ / f _TOT | 3.06 2.39 | f ₅ / f _TOT | 1.82 1.42

[0427] (Example H) variable mirror 1 2 state TE-WE TE-WE Δ 0.0365 0.0650 (1/5) × D 1.00 1.60 H 0.0300 0.0625 HJ / HK 0.480 φ 45.0 34.4 P I 0.0091 -0.0112 P V 0.0091 - 0.0112 ΔP _I 0.0091 -0.0112 ΔP _V 0.0091 -0.0112 | P _I / (P _V cos φ) | 1.4142 1.2116 | P _I / P _TOT | 0.0411 0.0728 | P _V / P _TOT | 0.0411 0.0728 | ΔP _I / P _TOT | 0.0411 0.0728 _{| ΔP V / P TOT | 0.0411} 0.0728 | f m | 9.5 9.5 | P I | / | P m | 0.0864 0.1061 | P V | / | P m | 0.0864 0.1061 | f 1 / f TOT | 3.62 2.51 | f 2 / f _TOT | 12.18 8.43 | f ₃ / f _TOT | 10.23 7.08 | f ₄ / f _TOT | 2.10 1.46 | f ₅ / f _TOT | 3.05 2.11 | f ₆ / f _TOT | 9.92 6.87.

(Example I) Variable mirror 12-state TE-WE TE-WE Δ0.0562 0.1279 (1/5) × D 1.22 0.82 H 0.0210 0.0836 HJ / HK 0.251 φ 45.0 45.0 P _I 0.0067 -0.0194 P _V 0.0067- 0.0194 ΔP _I 0.0067 -0.0194 ΔP _V 0.0067 -0.0194 │P _I / (P _V cos φ) │ 1.4142 1.4142 │P _I / P _TOT │ 0.0393 0.1728 │P _V / P _TOT │ 0.0393 0.1728 │ΔP _I / P _TOT │ 0.0393 0.1728 _{| ΔP V / P TOT | 0.0393} 0.1728 | f m | 9.5 9.5 | P I | / | P m | 0.0634 0.1844 | P V | / | P m | 0.0634 0.1844 | f 1 / f TOT | 13.59 9.01 | f 2 / f _TOT | 12.71 8.42 | f ₃ / f _TOT | 2.35 1.56 | f ₄ / f _TOT | 1.61 1.07 | f ₅ / f _TOT | 2.26 1.50 | f ₆ / f _TOT | 4.37 2.89

(Example J) Variable mirror 1 2 3 state TE-WE TE-WE TE-WE Δ 0.0012 0.0101 0.0111 (１ ／) × D 2.12 1.84 1.96 H 0.3300 0.4740 0.3470 HI / HJ 0.696 HJ / HK 1.366 HK / HI 1.052 φ 45.0 45.0 45.0 P I 0.0003 -0.0003 -0.0023 P V 0.0026 0.0037 -0.0002 ΔP I 0.0003 0.0003 -0.0023 ΔP V 0.0026 -0.0037 -0.0002 | P I / (P V cosφ) | 0.1774 0.1110 21.1351 | P I / P _TOT | 0.0016 0.0014 0.0108 | P _V / P _TOT | 0.0124 0.0173 0.0007 | ΔP _I / P _TOT | 0.0016 0.0014 0.0108 | ΔP _V / P _TOT | 0.0124 0.0173 0.0007 | f _m | 5.4 5.4 5.4 | P _I | _{m | 0.0018 0.0016 0.0124 | P V} | / | P m | 0.0143 0.0199 0.0008 | f 1 / f TOT | 1.14 1.14 1.14 | f 2 / f TOT | 4.70 4.70 4.70 | f 3 / f TOT | 4.05 4.05 4.05 | f 4 / F _TOT | 8.82 8.82 8.82 | f ₅ / f _TOT | 2.24 2.24 2.24

(Example K) Variable mirror 1 2 3 state TE-WE TE-WE TE-WE Δ 0.0012 0.0101 0.0111 (１ ／) × D 1.36 1.28 1.68 H 0.0980 0.1960 0.4290 HI / HJ 0.500 HJ / HK 0.457 HK / HI 4.378 φ 36.0 45.0 39.0 P I -0.0058 -0.0097 -0.0066 P V -0.0020 -0.0025 0.0007 ΔP I -0.0058 -0.0097 -0.0066 ΔP V -0.0020 -0.0025 0.0007 | P I / (P V cosφ) | 3.5158 5.5688 11.7015 _{| P I / P TOT | 0.0273} 0.0456 0.0311 | P V / P TOT | 0.0096 0.0116 0.0034 | ΔP I / P TOT | 0.0273 0.0456 0.0311 | ΔP V / P TOT | 0.0096 0.0116 0.0034 | f m | 6.2 6.2 6.2 | P I │ / │P _m │ 0.0361 0.0603 0.0411 │P _V │ / │P _m │ 0.0127 0.0153 0.0045 │f ₁ / f _TOT │ 1.32 1.32 1.32 │f ₂ / f _TOT │ 5.18 5.18 5.18 │f ₃ / f _TOT │ 4.73 4.73 _{4.73 | f 4 / f TOT |} 15.24 15.24 15.24 | f 5 / f TOT | 2.50 2.50 2.50.

(Example L) Variable mirror 12-state TE-WE TE-WE Δ0.0037 0.0025 (1/5) × D 2.80 1.40 H 0.0067 0.0970 HJ / HK 0.069 φ 0.0 0.00 P _I -0.0178 -0.0119 P _{V- 0.0178 -0.0119 ΔP I -0.0178 -0.0119 ΔP V} -0.0178 -0.0119 | P I / (P V cosφ) | 1.0000 1.0000 | P I / P TOT | 0.7135 0.4770 | P V / P TOT | 0.7135 0.4770 | ΔP I / P _{TOT | 0.7135 0.4770 | ΔP V /} P TOT | 0.7135 0.4770 | f m | 28.0 28.6 | P I | / | P m | 0.5000 0.3414 | P V | / | P m | 0.5000 0.3414 | f 1 / f TOT | 0.70 0.70 _{| f 2 / f TOT | 1.05} 1.05 | f 3 / f TOT | 14.17 14.17.

(Example M) State Near point Far point Δ 0 0.0015 (1/5) × D 1.86 1.86 H 0.0000 0.0177 φ 45.0 45.0 P _I 0.0000 -0.0011 P _V 0.0000 -0.0020 ΔP _I -0.0011 ΔP _V -0.0020 | P _I / (P _V cos φ) | 1.4142 0.7434 | P _I / P _TOT | 0.0000 0.0069 | P _V / P _TOT | 0.0000 0.0131 | ΔP _I / P _TOT | 0.0000 0.0069 | ΔP _V / P _TOT | 0.0000 0.0131 | f _{m | 6.7 6.7 | P I | /} | P m | 0.0000 0.0072 | P V | / | P m | 0.0000 0.0138 | f 1 / f TOT | 5.51 5.51 | f 2 / f TOT | 1.05 1.05 | f 3 / f TOT | 13.09 13.09 | f ₄ / f _TOT | 1.88 1.88 | f ₅ / f _TOT | 2.70 2.70

As described above, in some embodiments, the shape is changed by fixing the central portion of the variable mirror. However, the shape of the surface may be changed by fixing the peripheral portion of the variable mirror.

Finally, the definitions of terms used in the present invention will be described.

An optical device is a device including an optical system or an optical element. The optical device alone does not have to function. That is, it may be a part of the device.

The optical device includes an imaging device, an observation device, a display device, a lighting device, a signal processing device, and the like.

[0437] Examples of the imaging device include a film camera,
There are a digital camera, a television camera, a moving image recording device, an electronic moving image recording device, a camcorder, a VTR camera, an electronic endoscope, and the like.

Examples of the observation device include a microscope, a telescope,
There are glasses, binoculars, loupes, fiberscopes, finders, viewfinders and the like.

Examples of the display device include a liquid crystal display, a viewfinder, and a head-mounted image display device (h
ead mounted display (HMD),
There is a PDA (Personal Digital Assistant) and the like.

Examples of the illumination device include a camera strobe, a car headlight, an endoscope light source, a microscope light source, and the like.

Examples of the signal processing device include an optical disk reading / writing device, an optical computer arithmetic device, and the like.

The image pickup device refers to, for example, a CCD, an image pickup tube, a solid-state image pickup device, a photographic film and the like. Also, the parallel plane plate is included in one of the prisms. The change in the observer includes a change in diopter. To change the subject,
This includes changes in the distance of the object to be the subject, movement of the object, movement of the object, vibration, shake of the object, and the like.

[0443]

As described above, according to the present invention,
For example, it is possible to realize an optical element whose optical characteristics, for example, the focal length changes, and by using them, focusing function, zooming function, miniaturization, blur prevention, various corrections, etc. can be performed without mechanically moving the optical element. An optical device that can be realized has been realized. Further, by using a photonic crystal, a more excellent HMD can be realized. Further, according to the present invention, it is possible to measure the shape and eccentricity of the optical element and the optical system, or the refractive index and the refractive index distribution of the optical element.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a configuration of an optical device according to an example of the invention.

FIG. 2 is a diagram showing a hyperboloid of revolution used for the surface shape of a variable mirror;

FIG. 3 is a diagram showing a spheroid used for the surface shape of a variable mirror;

FIG. 4 is a diagram showing another embodiment of the variable mirror.

FIG. 5 is a diagram showing that an electrode is divided concentrically.

FIG. 6 is a diagram showing that an electrode is divided into rectangles.

FIG. 7 is a view showing still another embodiment of the variable mirror.

FIG. 8 is a view showing still another embodiment of the variable mirror.

FIG. 9 is a view showing still another embodiment of the variable mirror.

FIG. 10 is a diagram showing still another embodiment of the variable mirror.

FIG. 11 is a diagram showing a state where the winding density of the thin-film coil changes depending on a place.

FIG. 12 is a diagram showing a configuration using one coil.

FIG. 13 is a view showing still another embodiment of the variable mirror.

FIG. 14 is a diagram showing a configuration of another example showing an arrangement of coils.

FIG. 15 is a diagram showing another arrangement example of the coil.

FIG. 16 is a diagram showing an arrangement of permanent magnets in the embodiment of FIG.

FIG. 17 is a view showing a configuration of a second embodiment of the optical device according to the present invention.

FIG. 18 is a diagram showing a configuration of a liquid crystal variable mirror.

FIG. 19 is a diagram showing an example of an electrostatic drive mirror used in the present invention.

FIG. 20 is a diagram showing an electrostatic drive mirror in which electrodes are formed on a curved surface.

FIG. 21 is a diagram illustrating an example in which a plurality of electrodes are shifted from the same plane to control the manner in which a thin film is deformed.

FIG. 22 is a diagram illustrating a configuration of an example of an optical device using a reflecting mirror having an extended curved surface.

FIG. 23 is a diagram showing a configuration of an example in which an optical system is formed using two or more variable mirrors.

FIG. 24 is a diagram illustrating a configuration of a zoom finder according to an example of the present invention.

FIG. 25 is a diagram viewed from another direction of FIG. 24;

FIG. 26 is a diagram illustrating a configuration of a single-lens reflex optical system for a digital camera according to an example of the invention.

FIG. 27 is a diagram showing a configuration of another example of a Gregory reflection telescope of the present invention.

FIG. 28 is a diagram illustrating a configuration of an example of a zoom-type Galilean finder using an electrostatically driven variable mirror.

FIG. 29 is a view for explaining an observation direction of the finder optical system in FIG. 28;

FIG. 30 is a diagram illustrating a configuration of an example of an imaging optical system using an optical characteristic variable mirror.

FIG. 31 is a diagram showing a configuration of an image pickup apparatus for a digital camera or a side-view electronic endoscope using an electrostatically driven variable mirror according to an example of the present invention.

FIG. 32 is a diagram showing a configuration of a perspective electronic endoscope that performs focusing using an electrostatically driven variable mirror according to an example of the present invention.

FIG. 33 is a diagram showing a configuration of an image pickup apparatus for a zoom digital camera or an electronic endoscope using two electrostatically driven variable mirrors in another example of the present invention.

FIG. 34 is a diagram illustrating a configuration of an example of a fluid variable mirror.

FIG. 35 is a diagram showing a configuration of an example in which a variable mirror is used for a head mounted display.

36 is a diagram illustrating an example of an image including a perspective object displayed on the LCD of FIG. 35;

FIG. 37 is a diagram showing a configuration of a hologram reflecting mirror made of a photonic crystal formed on the surface of an extended curved prism in one example of the present invention.

FIG. 38 is a diagram schematically showing a configuration of a photonic crystal.

FIG. 39 is a diagram showing a modification of FIG. 37 using an extended curved mirror;

FIG. 40 is a diagram showing a method for measuring an aspheric lens and an optical element having an extended curved surface used in an example of the present invention.

FIG. 41 is a diagram for explaining image processing in the measurement of FIG. 40;

FIG. 42 is a diagram showing the position of the light beam of FIG. 41 on the screen.

FIG. 43 is a diagram for explaining image processing in the case of FIG. 42;

FIG. 44 is a diagram for explaining a method of measuring a refractive index, a change in a refractive index, and a distribution of a refractive index of an aspheric lens or the like used in the present invention.

FIG. 45 is a diagram showing a measurement arrangement in the case of FIG. 44;

FIG. 46 is a diagram showing a state in which a test object is arranged at an angle and measured.

FIG. 47 is a cross-sectional view of the optical system of Example A of the present invention at the wide-angle end and the telephoto end.

FIG. 48 is a sectional view of the optical system according to Example B of the present invention at the time of remote focusing.

FIG. 49 is a sectional view of the optical system according to Example C of the present invention at the time of near focusing.

FIG. 50 is a cross-sectional view of the optical system according to Example D of the present invention at the time of remote focusing.

FIG. 51 is a cross-sectional view of a wide-angle end and a telephoto end of an optical system according to Example E of the present invention.

FIG. 52 is a cross-sectional view of the optical system according to Example F of the present invention at the time of near focus.

FIG. 53 is a cross-sectional view of the optical system of Example G of the present invention at the wide-angle end and the telephoto end.

FIG. 54 is a cross-sectional view of a wide-angle end and a telephoto end of an optical system according to Example H of the present invention.

FIG. 55 is a sectional view of the optical system of Example I of the present invention at the wide-angle end and the telephoto end.

FIG. 56 is a cross-sectional view of the optical system of Example J of the present invention at the wide-angle end and the telephoto end.

FIG. 57 is a cross-sectional view of the optical system of Example K of the present invention at the wide-angle end and the telephoto end.

FIG. 58 is a cross-sectional view of the optical system of Example M of the present invention at the wide-angle end and the telephoto end.

FIG. 59 is a cross-sectional view of the optical system of Example M of the present invention at the time of remote focusing.

FIG. 60 is a lateral aberration diagram at the time of focusing on a far point in Example B of the present invention.

FIG. 61 is a lateral aberration diagram at the time of focusing on a near point in Example B of the present invention.

FIG. 62 is a lateral aberration diagram at a wide-angle end in Example E of the present invention.

FIG. 63 is a lateral aberration diagram at a telephoto end in Example E of the present invention.

FIG. 64 is a lateral aberration diagram at a wide-angle end in Example K of the present invention.

FIG. 65 is a lateral aberration diagram at a telephoto end in Example K of the present invention.

FIG. 66 is a lateral aberration diagram at a wide-angle end in Example L of the present invention.

FIG. 67 is a lateral aberration diagram at a telephoto end in Example L of the present invention.

FIG. 68 is a view showing a state in which an eyepiece is moved for diopter adjustment by a conventional finder.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 3 ... Imaging lens 4 ... Prism 4A ... Prism surface 5 ... Isosceles right angle prism 6 ... Mirror 8 ... Solid-state image sensor 9 ... Optical characteristic variable mirror 9a ... Thin film (reflection surface) 9b ... Electrode 9c ... Voltage element 9c '... Piezoelectric element 9d ... electrode 9e ... substrate 9b1, 9b2, 9b3, 9b4, 9b5 ... electrode 9J, 9K ... electrostatic drive variable mirror 9T ... electrostatic drive variable mirror 9U ... electrostatic drive variable mirror 11 ... variable resistor 12 ... power supply 12B ... Power supply 14 ... Calculation device 14B ... Reversal processing unit 14M ... Memory 13 ... Power switch 15 ... Temperature sensor 16 ... Humidity sensor 17 ... Distance sensor 20 ... Extended curved prism 20J, 20K ... Extended curved prism 23 ... Support base 23A, 23B, 23C ... board 24 ... shake (blur) sensor 25 ... drive circuit 26 ... permanent magnet 27 ... coil 28 ... drive circuit 28 ': Thin-film coil 29: Switch for switching and opening / closing power supply 30: Prism 31: Liquid crystal variable mirror 31a: Transparent electrode 31b: Substrate 31c: Split electrode 31d: Twisted nematic liquid crystal 33: Lens 45: LCD (liquid crystal display) 45B ... Liquid crystal display 45J Printer 60 Reflector 61 Zoom finder 62, 63 Prism 64 Lens 65 Prism 66 Semi-transmissive coating 67 Lens 68 Quartz low-pass filter 69 Infrared cut filter 70 Transparent electrode 72 Part without reflective coating 73 Transparent part 74 Focus plane 76 Concave lens 77 Convex lens 78 Illumination device 79 Camera, digital camera 81, 82, 84 ... Optical element (lens) having a rotationally symmetric curved surface 83 ... Prism 83A ... Transmission surface 83B… Puri Surface 85 ... fluid variable mirror 86 ... piston 87 ... fluid 88 ... reflecting surface 91,92,93,94,95,96 ... variable mirror 96a ... reflecting film 96b ... electrode 101 ... extended curved prism 102 ... photonic crystal 103 Hologram reflector 104 extended curved mirror 107 line of sight detecting device 110 free curved prism 111 first surface 112 second surface 113 third surface 114 fourth surface 115, 116 variable mirror 117 parallel plane plate Reference numeral 118: imaging surface (image forming surface) 119: concave lens 120: convex lens 121: objective lens 122: eyepiece 123: fixed mirror 124: diaphragm 125: front group 125a: lens having an anamorphic surface 126: rear group 127: variable Mirror 128: Parallel plane plate group 142: Head mounted display (HMD) 192 Display electronic circuit 193 Drive circuit 200 Mach-Zehnder interferometer 201 Reference lens 202 Test lens 203 Screen 204 TV camera 205 Computer 206 Laser 207 Monitor TV 208 Shield 801 Test Lenses 802, 803 Canceller 804 Aspheric surface 805 Matching oil 806 Sphere 807 Fizeau interferometer 808 Mirror 809 Reference surface 810 Plane 901 Eyepiece 902 Objective lens 903 Porro II prism

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Kazuhito Hayakawa 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Tetsuhide Takeyama 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd. F term (reference) 2H018 AA02 AA11 BA01 BB00 2H042 CA01 CA12 CA14 CA18 DA02 DA11 DB00 DB14 DC02 DD04 DD06 DD07 DD08 DD09 DD10 DD11 DD12 DD13 DE00 2H044 DA01 DA02 DA04 DB04

Claims (3)

[Claims] 1. A peripheral portion of a variable mirror is substantially fixed to at least one of other optical elements, and the variable mirror is deformed to adjust focus, change magnification, zoom, blur correction, and change of an optical device. An optical system for performing any one of correction, change of a subject, and correction of a change of an observer. 2. An optical system comprising a plurality of variable mirrors, wherein at least two of the variable mirrors have, in a certain state, a change in a mirror surface shape of the variable mirror in an opposite direction. 3. In an operating state, equation (12)
(14), (16), (16-2), (18), (2
0), any one of (22), (16-3) and (23)
An optical system having a variable mirror, characterized by satisfying at least two.