JP2002108411A - Temperature controller and heat treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature controller where the occurrence of overshoot at the time of a response to disturbance is suppressed and to provide a heat treatment device using the controller. SOLUTION: When disturbance occurs, a holding signal is outputted to a PID controller 3 for a prescribed period in response to a disturbance trigger signal. The PID controller 3 receives the holding signal, holds an integral operation and continuously outputs integral output which is just before.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature controller for controlling the temperature of an object to be controlled and a heat treatment apparatus using the temperature controller.

[0002]

2. Description of the Related Art As a conventional heat treatment apparatus, for example, FIG.
There is a thermal oxidation device 30 shown in FIG. This thermal oxidation device 3
0, the temperature of the reaction tube 31 as a heat treatment furnace is detected by a plurality of temperature sensors 32, and the temperature controller 33 adjusts the temperature around the reaction tube so that the detected temperature becomes a preset target temperature. This is to control the energization of the plurality of heaters 34 divided and arranged.

[0003]

In such a heat treatment apparatus such as a thermal oxidation apparatus or a CVD apparatus, the heating is performed in an environment in which heat is hardly radiated such as in a vacuum. If it becomes hot, it is difficult to cool down, so that the temperature does not readily drop to the target temperature. As a result, it takes a long time to settle the temperature, and the tact time of the heat treatment becomes long.

For example, in temperature control of a cylinder portion of an injection molding machine or an extrusion molding machine, in order to suppress heat dissipation and save energy, it is sometimes necessary to surround the cylinder 等 portion and the like with a heat insulating material to insulate the heat. However, even in such a case, if the temperature once overshoots and becomes hot at the time of a disturbance response, it is difficult to cool down, so that the temperature does not easily drop to the target temperature.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and is directed to a temperature controller capable of suppressing the occurrence of overshoot at the time of a disturbance response and shortening the takt time of heat treatment, and a heat treatment apparatus using the same. The purpose is to provide.

[0006]

In order to achieve the above-mentioned object, the present invention is configured as follows.

That is, the temperature controller of the present invention comprises a temperature control means for outputting an operation signal based on a deviation between a temperature detected by the temperature detection means and a target temperature, and an integration operation in the temperature control means when a disturbance occurs. And means for weakening.

[0008] Here, weakening the integration operation means weakening the integration operation as compared to a time other than when a disturbance occurs, for example, increasing the integration time.

According to the present invention, when a disturbance occurs, the integration operation is weakened, so that an overshoot at the time of a disturbance response can be suppressed.

In one embodiment of the present invention, a temperature control means for outputting an operation signal based on a deviation between a temperature detected by the temperature detection means and a target temperature, and an integration operation in the temperature control means when a disturbance occurs. Holding means.

Here, holding the integration operation means stopping the integration operation and holding the integration operation amount.

According to the present invention, when a disturbance occurs, the integral operation is held, so that the integral operation amount does not increase unlike the related art, thereby suppressing the overshoot at the time of the disturbance response.

In another embodiment of the present invention, a temperature control means for outputting an operation signal based on a deviation between a temperature detected by the temperature detection means and a target temperature, and an integration operation in the temperature control means when a disturbance occurs. Means for increasing the integration time.

Here, to extend the integration time means to increase the integration time as compared with a time other than when a disturbance occurs.

According to the present invention, when a disturbance occurs, the integration time is lengthened to weaken the integration operation, so that an overshoot at the time of a disturbance response can be suppressed.

In a preferred embodiment of the present invention, the means for extending the integration time makes the integration time coincide with the time constant of the first-order lag of the controlled object.

According to the present invention, when a disturbance occurs, the integration time is made to match the time constant of the first-order lag of the controlled object to weaken the integration operation, so that the overshoot at the time of the disturbance response can be suppressed as described later, Can also be suppressed.

In another embodiment of the present invention, there is provided means for weakening a proportional gain of the proportional operation in the temperature control means when a disturbance occurs.

Here, to weaken the proportional gain means to make the proportional gain weaker, that is, to make it smaller, than when a disturbance occurs.

According to the present invention, the overshoot at the time of disturbance response can be suppressed, while the responsiveness can be improved as described later.

In a further preferred aspect of the present invention, there is provided an arithmetic means for calculating the time constant of the first-order lag of the controlled object based on the operation signal at the time of settling, the detected temperature, and the maximum inclination obtained by the auto tuning. ing.

According to the present invention, the time constant of the first-order lag of the controlled object is automatically calculated by the calculating means, so that the integration time can be made to coincide with the calculated time constant. The operation of calculating and setting becomes unnecessary.

In another embodiment of the present invention, the calculating means calculates a proportional gain based on the dead time and the maximum slope obtained by the auto tuning, and the means for weakening the proportional gain is used when a disturbance occurs. Is changed to the calculated proportional gain.

According to the present invention, the proportional gain is calculated by the arithmetic means, and when the disturbance occurs, the proportional gain is changed to the calculated proportional gain, so that the operator does not need to calculate and set the proportional gain. .

In still another embodiment of the present invention,
The means for weakening the integration operation, the means for holding the integration operation, the means for increasing the integration time, and the means for weakening the proportional gain of the proportional operation perform respective operations in response to a trigger signal given when the disturbance occurs. Is performed over a certain period.

According to the present invention, when a disturbance occurs, the integration operation is weakened, the integration operation is held, the integration time is lengthened, or the proportional gain of the proportional operation is weakened for a certain period of time. In addition, overshoot at the time of disturbance response is suppressed.

In a preferred embodiment of the present invention, a disturbance detecting means for detecting occurrence of disturbance based on at least one of the detected temperature, the deviation and the operation signal is provided.

According to the present invention, since the disturbance can be automatically detected by the disturbance detecting means, there is no need to externally provide a trigger signal.

In another embodiment of the present invention, there is provided communication means for communicating with a host device, and when a disturbance occurs, a corresponding signal is given from the host device.

According to the present invention, the integration time, the proportional gain, and the like can be set from the host device through communication, and a command is issued to the means for extending the integration time or the means for weakening the proportional gain in the proportional operation in response to disturbance. Can be given.

In still another embodiment of the present invention,
Disturbance operation amount applying means for applying an operation amount to the operation signal so as to cancel the disturbance when the disturbance occurs is provided.

According to the present invention, since the operation amount is added so as to cancel the disturbance, the overshoot at the time of the disturbance response can be suppressed, and the responsiveness can be improved.

A heat treatment apparatus according to the present invention includes the temperature controller according to the present invention, heat treatment means to be controlled, and temperature detection means for detecting the temperature of the heat treatment means.

According to the present invention, in a heat treatment apparatus such as a thermal oxidation apparatus or a CVD apparatus for heating in an environment where heat radiation is difficult such as in a vacuum, the occurrence of overshoot at the time of disturbance response is suppressed. Can be shortened as compared with the conventional example.

[0035]

Embodiments of the present invention will be described below in detail with reference to the drawings.

Embodiment 1 FIG. 1 is a block diagram of a temperature controller 1 according to one embodiment of the present invention.

The temperature controller 1 of this embodiment outputs an operation signal (operation amount) MV based on a detected temperature PV from a temperature sensor (not shown) for detecting the temperature of the control target 2, and PI as temperature control means for performing PID control so that the temperature becomes a preset target temperature SP
A D controller 3 is provided.

The temperature controller 1 is applicable to temperature control of a heat treatment apparatus, for example, a heat treatment board of a single-wafer type CVD apparatus shown in FIG. In FIG. 2, the heat treatment plate 5 on which the wafer 4 is placed is divided concentrically into an outer circle portion 6, an intermediate portion 7, and a central portion 8, and heaters 9 to 9 individually corresponding to each portion. 11 is provided to control the temperature for each zone.

In such a temperature control system, the heat treatment board 5
Even if the temperature of the wafer 4 matches the target temperature,
Is placed on the heat treatment board 5, the heat is taken away by the wafer 4, and as a result, the temperature of the heat treatment board 5 drops below the target temperature. Such a temperature drop due to the placement of the wafer 4 is disturbed. Things.

The temperature controller 1 according to this embodiment is designed to suppress the occurrence of overshoot at the time of such a disturbance response.
As shown in FIG. 1, the PID controller includes a hold signal output unit 12 that outputs a hold signal to the PID controller 3 for a predetermined period in response to a disturbance trigger signal such as an event signal given when a disturbance occurs. Numeral 3 is to hold the integration operation in response to the hold signal. The PID controller 3 and the hold signal output means 12 are constituted by, for example, a microcomputer.

As shown in FIG. 3, the PID controller 3 includes an integrator 13, a differentiator 14, and a proportional element 15. The integrator 13 performs an integration operation over a certain period when a hold signal is given. The integration is stopped, the integrated output immediately before the hold signal is given is held, and the integration operation is restarted after the predetermined period has elapsed.

Here, the certain period is set in advance, for example, the detected temperature PV changed by disturbance.
Is a period in which the temperature returns to the target temperature. As another embodiment of the present invention, a hold signal may be output until the detected temperature PV returns to a predetermined temperature, instead of outputting a hold signal over a certain period.

The disturbance trigger signal is given, for example, in response to the mounting of the wafer 4 described above.

FIGS. 4A and 4B are waveform diagrams for explaining the operation of this embodiment. FIG. 4A is a control diagram showing a detected temperature PV, and FIG. 4B is a control diagram showing a difference between the target temperature PV and the detected temperature PV. FIG. 4C shows the deviation e, FIG. 4C shows the integrated output of the conventional example, FIG. 5D shows the hold signal, and FIG. 5E shows the integrated output of this embodiment. The solid line is
In this embodiment, broken lines indicate conventional examples.

Due to the disturbance, the detected temperature PV sharply decreases, the control deviation e from the target temperature SP increases, and accordingly, the integral output also increases in the related art, as shown by the broken line in FIG. In this embodiment, the overshoot of the detected temperature PV occurs, whereas in the present embodiment, the integral output shown in FIG. As shown by the solid line in FIG. 7A, the occurrence of overshoot of the detected temperature PV is suppressed.

[0046] FIG. 5 (Embodiment 2), a block diagram of a temperature controller 1 ₁ of another embodiment of the present invention, the parts corresponding to the embodiment described above, the same reference numerals Attach.

[0047] In the temperature regulator 1 ₁ of this embodiment, in order to suppress the overshoot at the disturbance response is intended to increase the integration time, specifically, a period of time in response to a disturbance trigger signal Integration change signal output means 16 for outputting an integration change signal to the PID controller 3 over
In response to the integration change signal, the PID controller 3 matches the integration time (integration time constant) with a preset first-order lag time constant of the controlled object 2, and the predetermined time has elapsed. The rest is to restore the original integration time.

Here, the reason why the overshoot can be improved by increasing the integration time will be described with reference to a Nichols diagram and a Bode diagram.

That is, a Nichols diagram is a convenient tool for obtaining a closed loop transfer function from an open loop transfer function. By using this, a condition without overshoot is obtained from a Bode diagram.

The absence of overshoot in the step response means that the peak gain Mp of the frequency characteristics of the closed loop is 1.

The condition where the closed loop Mp is 1 or less on the Nichols diagram is the shaded portion in FIG.

FIG. 7 shows an example of the frequency characteristic A without overshoot and an example of the frequency characteristic B with overshoot on the Nichols diagram.

From these figures, strictly speaking, in the frequency range (low frequency side) where the gain of the closed loop is １ ／ or more (−6 dB or more), if the phase delay is 90 ° or less, no overshoot occurs. It will be. "

Since the closed loop gain is １ ／, it is not easy to understand. Therefore, in this example, “the closed loop gain is 1 and the phase lag is 9 (0 dB or more) in the frequency range of 1 or more.
If it is 0 ° or less, there is almost no overshoot. ”

The control object of the temperature control can be approximated by a first-order lag dead time system. The transfer function P (s) of the controlled object of the first-order lag dead time system is expressed as follows.

P (s) = {K / (1 + Ts)} e- ^LS where K: steady-state gain of the control target T: time constant of first-order lag L: ^dead time When this equation is represented by a Bode diagram, FIG. become that way. Note that ω ₀ is an angular frequency at which the gain crosses 0 dB (it becomes a control band when the control of the controller is P control and the gain is 1). The gain is bent at the angular frequency 1 / T of the first-order lag time constant, and wasteful. At the angular frequency 1 / L of time, there is a straight line relationship without bending.

Next, FIG. 9 shows a phase waveform corresponding to the gain waveform shown in FIG.

Under the influence of the first-order lag, the phase of the control object is 1 /
At the angular frequency of T, there is a delay of -45 °, and then -90 °
Until late. Further, at a higher frequency, the gain does not change as it is due to the dead time, and is suddenly delayed by the phase. The degree of the delay is L × ω × 60 [deg]. Therefore, 1
At an angular frequency of / L, a delay of -150 ° results.

It can also be seen from the Bode diagram that at a high frequency affected by the dead time L, the phase is suddenly greatly delayed instead of the phase delay of -90 °.

Therefore, the condition under which there is no overshoot in principle, which was found from the Nichols diagram, “phase lag is −90 °
It can be said that "within" can be realized only by low-frequency control without the influence of dead time.

The control target P of the above-mentioned first-order delay dead time system
Among the criteria there is no influence of dead time (s), further as to integral control, divided into two conditions as follows by constant T _I of the integrating.

One is the time constant of integration (integration time) T
_{If I} is greater than the time constant T of the primary delay of the controlled object, T _I
> T, and the other is the integration time constant (integration time) T
_{When I} is smaller than the time constant T of the primary delay of the controlled object, T _I
<T. 10 and 11 show Bode diagrams under the condition of T _I > T, and FIGS. 12 and 13 show Bode diagrams under the condition of T _I <T.

Under the condition of T _I > T in FIGS. 10 and 11, both the broken-line waveform without integration and the solid-line waveform with integration are shown. Looking at the phase in FIG.
Under the condition that the phase is slightly advanced only in the interval of the angular frequency between 1 / T _I and 1 / T and there is no phase delay of -90 ° or more, there is no problem, that is, the closed loop In the frequency range where the gain is 1 or more (0 dB or more), the phase delay is 90 ° or less, and the overshoot is almost eliminated.

Conversely, as can be seen by comparing FIGS. 11 and 13, under the condition of T _I <T, the interval of the angular frequency between 1 / T and 1 / T _I has a phase lag, −90 It can be seen that a delay of more than ° causes overshoot.

That is, if the time constant T _{I of the} integration is longer than the time constant T of the primary delay of the controlled object, no overshoot occurs, but if the time constant T _{I of the} integration is too long, the responsiveness is poor. Therefore, it is preferable to make the time constant T _{I of the} integration equal to the time constant T of the primary delay of the controlled object.

Therefore, in this embodiment, FIG.
The integration time of the PID controller 3 in response to the disturbance trigger signal is increased over a certain period as shown in FIG.
The overshoot is suppressed by matching the time constant of the first-order lag.

The time constant of the first-order lag of the controlled object 2 is
Is preset to the temperature controller 1 _1.

[0068] Third Embodiment FIG. 14 is a further block diagram of the temperature controller 1 ₂ another embodiment of the present invention, the portion corresponding to the above-described embodiment, the same reference numerals Is attached.

[0069] In the temperature regulator 1 ₂ of this embodiment, as in the embodiment described above, when the disturbance occurs, with match the time constant of the first-order lag of the control object 2 the integration time,
The proportional gain is weakened. Specifically, an integral proportional change signal output means 17 for outputting an integral proportional change signal to the PID controller 3 for a certain period in response to a disturbance trigger signal is provided, PID controller 3
In response to the integration proportional change signal, the integration time is made to match a preset first-order lag time constant of the controlled object 2, and the proportional gain is changed to a preset proportional gain to weaken. After a certain period of time, the original integration time and the proportional gain are restored.

That is, as shown in FIG.
The integrator 13 of the D controller 3 matches the integration time with the first-order time constant of the controlled object 2 over a certain period in which the integration proportional change signal is given, while the proportional element 15
In response to the integral proportional change signal, the proportional gain is weakened over the predetermined period.

By reducing the proportional gain, 0 dB
Therefore, the occurrence of overshoot can be suppressed even when the dead time is considered.

[0072] Figure 16 (Embodiment 4) is a block diagram of a temperature controller 1 ₃ of another embodiment of the present invention, the parts corresponding to the embodiment described above, the same reference numerals Attach.

In each of the above-described embodiments, a disturbance trigger signal according to the occurrence of a disturbance is input from the outside. In this embodiment, however, the occurrence of a disturbance is detected internally and a disturbance trigger signal is generated. Is provided to the integration change signal output means 16.

The disturbance detecting means 18 of this embodiment determines that a disturbance has occurred when the detected temperature PV fluctuates by a certain value or more, and outputs a disturbance trigger signal. This is the same as in the second embodiment.

As another embodiment, as shown in FIG. 17, a disturbance may be detected on the basis of a change in the control deviation, or, as shown in FIG. Amount) The disturbance may be detected based on the fluctuation of the MV.

[0076] (Embodiment 5) FIG. 19 is a block diagram of a temperature controller 1 ₄ of the embodiment other of the present invention, the parts corresponding to the embodiment described above, the same reference numerals Attach.

[0077] Temperature controller 1 ₄ of this embodiment is provided with a communication interface 19 as a communication means for communicating with a host computer which is the host device, a command and settings from the computer When a disturbance occurs, the PID controller 3 is provided with an integral proportional change means 20 for setting the integration time of the PID controller 3 to the set first-order time constant of the controlled object 2 and weakening the proportional gain to the set proportional gain. .

[0078] (Embodiment 6) FIG. 20 is a block diagram of a temperature controller 1 ₅ of the embodiment other of the present invention, the parts corresponding to the embodiment described above, the same reference numerals Attach.

In the above-described embodiment, the time constant of the first-order lag of the controlled object 2 is set in advance, but in this embodiment, the operation signal (operation amount) MV, the detected temperature PV, and the auto-tuning at the time of settling. Time constant calculating means 21 for calculating the time constant of the first-order lag of the controlled object 2 from the maximum gradient R obtained by the above, and in response to a disturbance trigger signal, the integration time of the PID controller 3 is increased over a certain period. There is provided an integral changing means 22 for changing to the time constant calculated by the time constant calculating means 21.

The time constant calculating means 21 calculates the time constant T of the primary delay of the controlled object according to the following equation.

T = PV / (MV × R) According to this embodiment, it is not necessary for the operator to preliminarily calculate the time constant of the first-order lag of the controlled object and set it by the operator.

(Embodiment 7) FIG. 21 is a block diagram of a temperature controller _{16 according to} another embodiment of the present invention. The same reference numerals are used for parts corresponding to the above-described embodiment. Attach.

In the above embodiment, the proportional gain at the time of occurrence of disturbance is set in advance, but in this embodiment, the proportional gain corresponding to the proportional gain is obtained from the dead time L and the maximum slope R obtained by the auto tuning. In addition to the proportional band calculating means 23 for calculating the band P, the proportional band of the PID controller 3 is calculated in response to a disturbance trigger signal.
There is provided a proportional band changing means 24 for changing to the proportional band calculated by the proportional band calculating means 23 over a certain period.

The proportional band calculating means 23 calculates the proportional band P according to the following equation.

P = R · L / k Here, k is a relatively small value, for example, 0.1 to 1.

According to this embodiment, there is no need to previously calculate and set a proportional gain corresponding to the proportional gain.

Although not shown in FIG. 21, when a disturbance occurs, the integration time is made to coincide with the first-order time constant of the controlled object 2 in the same manner as in the above-described embodiment.

(Embodiment 8) FIG. 22 is a block diagram of a temperature controller _{17 according to} another embodiment of the present invention, and portions corresponding to the above-described embodiment 7 have the same reference numerals. Is attached.

In this embodiment, in order to suppress the overshoot and further improve the response time, when the disturbance occurs, the PID controller 3 operates in response to the disturbance trigger signal so as to cancel the disturbance. Disturbance operation amount applying means 25 for adding a disturbance operation amount to a signal (operation amount) is provided.

The disturbance operation amount is, for example, as shown in FIG.
The attenuation exponential function shown in (a), the triangular wave shown in (b) of the figure, or the rectangular shape shown in (c) of the figure.

The shape is determined in advance based on a change in the operation amount or the detected temperature due to a disturbance. The area of the shape is, for example, about 70 to 80% of the area of the change in the operation amount due to the disturbance.

In this embodiment, the disturbance operation amount from the disturbance operation amount applying means 25 is applied in a feed-forward manner to the operation signal from the PID controller 3 by inverting the sign.

The other structure is the same as that of the seventh embodiment.

As described above, when a disturbance occurs, the integral is weakened, and a disturbance operation amount is added to cancel the disturbance.
Since so-called feedforward control is performed, overshoot can be suppressed, and the responsive time until the detected temperature PV returns to the target temperature SP can be improved.

FIGS. 24 and 25 show waveform diagrams of experimental results comparing this embodiment and the conventional example. FIG.
FIG. 25 shows this embodiment, and FIG. 25 shows a conventional example. The solid line shows the detected temperature PV, and the broken line shows the manipulated variable MV.

When a disturbance occurs, the integration time is lengthened and an operation amount is added so as to cancel the disturbance. FIG. 24 shows that the overshoot is improved as compared with the conventional example of FIG.

(Other Embodiments) The present invention is not limited to the above-described embodiment. For example, the disturbance operation amount applying means of the eighth embodiment may be provided in another embodiment. Of course, the respective embodiments may be appropriately combined.

Although the above embodiment has been described by applying to PID control, the present invention is applicable not only to PID control but also to other control systems such as integral control and proportional control.

In the above-described embodiment, the description has been given of the case where the present invention is applied to the temperature control using the heating means such as the heater, but it is needless to say that the present invention may be applied to the temperature control using the Peltier element or the cooler. Further, the present invention may be applied to temperature control using both a heating unit and a cooling unit.

The heat treatment apparatus of the present invention is a single-wafer type C
The present invention can be applied not only to the VD apparatus but also to the temperature control of the diffusion furnace and the thermal oxidation apparatus shown in FIG. 26 described above. Also,
The heat treatment apparatus of the present invention can also be applied to temperature control of a cylinder portion of an injection molding machine or an extrusion molding machine or temperature control of a heater base of a packaging machine.

[0101]

As described above, according to the present invention, when a disturbance occurs, the integral operation of the temperature control means is weakened, so that an overshoot at the time of a disturbance response can be suppressed, thereby radiating heat in a vacuum or the like. In a heat treatment apparatus such as a thermal oxidation apparatus or a CVD apparatus that performs heating in a difficult environment, the takt time of the heat treatment can be shortened as compared with the related art.

[Brief description of the drawings]

FIG. 1 is a block diagram of a temperature controller according to one embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a main part of a heat treatment apparatus according to one embodiment of the present invention.

FIG. 3 is a configuration diagram of a PID controller of FIG. 1;

FIG. 4 is a waveform chart for explaining the operation.

FIG. 5 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 6 is a Nichols diagram for explaining a basic principle of the present invention.

FIG. 7 is a Nichols diagram showing frequency characteristics corresponding to the presence or absence of overshoot.

FIG. 8 is a Bode diagram of a gain characteristic of a control target.

FIG. 9 is a Bode diagram of a phase characteristic of a control target.

FIG. 10 is a Bode diagram of gain characteristics of a control target and a PID controller.

FIG. 11 is a Bode diagram of phase characteristics of a control target and a PID controller.

FIG. 12 is a Bode diagram of gain characteristics of a control target and a PID controller.

FIG. 13 is a Bode diagram of phase characteristics of a control target and a PID controller.

FIG. 14 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 15 is a configuration diagram of the PID controller of FIG. 14;

FIG. 16 is a block diagram of a temperature controller according to still another embodiment of the present invention.

FIG. 17 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 18 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 19 is a block diagram of a temperature controller according to still another embodiment of the present invention.

FIG. 20 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 21 is a block diagram of a temperature controller according to still another embodiment of the present invention.

FIG. 22 is a block diagram of a temperature controller according to another embodiment of the present invention.

FIG. 23 is a waveform chart of a disturbance operation amount.

FIG. 24 is a waveform chart of a detected temperature and an operation amount in the embodiment of FIG. 22;

FIG. 25 is a waveform diagram of a detected temperature and an operation amount in a conventional example.

FIG. 26 is a schematic configuration diagram of a thermal oxidation device.

[Explanation of symbols]

Reference numerals 1 ₁ to ₁₆ , 33 Temperature controller 2 Control target 3 PID controller 4 Wafer 5 Heat treatment board 13 Integrator 14 Differentiator 15 Proportional element 18 Disturbance detecting means 19 Communication interface 21 Time constant calculating means 23 Proportional band calculating means 25 Disturbance operation Amount application means

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 21/205 H01L 21/205 H05B 3/00 310 H05B 3/00 310D (72) Inventor: Isao Ando Kyoto 801 Fudo-term in Omron Co., Ltd. 801 Fudo-term (reference) 3F045 AA04 AA71 BA00 BA19 CB14 CB25 CC06 5F045 BB08 BB20 EK22 EK27 GB05 5H004 GA03 GA07 GA11 GB15 HA01 H04 KB17 KB33 KC39 KC47 KC55 LA01 LA03 LA13 LB05 LB06 LB10 5H323 AA40 BB05 BB06 CA08 CB02 DA01 FF01 HH02 KK05 KK09 LL01 LL02 LL22 LL27 MM06

Claims (12)

[Claims] 1. A temperature control means for outputting an operation signal based on a deviation between a detected temperature from a temperature detection means and a target temperature, and means for weakening an integral operation of the temperature control means when a disturbance occurs. A temperature controller. 2. A temperature control means for outputting an operation signal based on a deviation between a temperature detected by a temperature detection means and a target temperature, and means for holding an integral operation of the temperature control means when a disturbance occurs. A temperature controller characterized by that: 3. A temperature control means for outputting an operation signal based on a deviation between a temperature detected by the temperature detection means and a target temperature, and means for extending an integration time of an integration operation in the temperature control means when a disturbance occurs. A temperature controller, comprising: 4. The temperature controller according to claim 3, wherein the means for increasing the integration time matches the integration time with a first-order time constant of a controlled object when a disturbance occurs. 5. A means for weakening a proportional gain of a proportional operation in said temperature control means when a disturbance occurs.
Or the temperature controller according to 4. 6. The temperature according to claim 4 or 5, further comprising a calculating means for calculating a time constant of the first-order lag of the controlled object based on an operation signal at the time of settling, a detected temperature, and a maximum slope obtained by auto-tuning. Regulator. 7. The calculating means calculates a proportional gain based on a dead time and a maximum slope obtained by auto tuning, and the weakening means reduces the proportional gain when a disturbance occurs. 7. The temperature controller according to claim 6, wherein the temperature controller is changed. 8. A means for weakening the integration operation, a means for holding the integration operation, a means for increasing the integration time,
The temperature controller according to any one of claims 1 to 7, wherein the means for weakening the proportional gain of the proportional operation performs each operation for a predetermined period in response to a trigger signal given when the disturbance occurs. 9. The temperature controller according to claim 1, further comprising a disturbance detecting unit that detects occurrence of a disturbance based on at least one of the detected temperature, the deviation, and a variation of the operation signal. 10. The temperature controller according to claim 1, further comprising communication means for communicating with a host device, wherein a corresponding signal is given from the host device when a disturbance occurs. 11. The temperature controller according to claim 1, further comprising a disturbance operation amount application unit that applies an operation amount to the operation signal so as to cancel the disturbance when a disturbance occurs. 12. A heat treatment apparatus comprising: the temperature controller according to claim 1; heat treatment means to be controlled; and temperature detection means for detecting a temperature of the heat treatment means. .