JP2001358411A - Two-dimensional surface light emitting laser array, two- dimensional surface light emitting laser beam scanner, and two-dimensional surface light emitting laser beam recording equipment and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem of the conventional art wherein trouble is apt to be generated on a scanner mirror, noise is generated, gaps are generated between pixels on a photosensitive member, and improvement of positional precision of a pixel array on the photosensitive member has a limit. SOLUTION: A plurality of lasers (which have apertures 170) are formed at equal intervals at prescribed positions on at least two main scanning lines on a semiconductor substrate 100. The respective lasers have prescribed beam diameters and output laser lights which have no gaps in the main scanning direction by taking different positions in the main scanning direction. As a result, a two-dimensional surface light emitting laser array which is so constituted that pixel lines having no gaps are formed on a main scanning line on an image forming surface can be obtained. A laser beam scanner and laser beam recording equipment and method are constituted by using the two-dimensional surface light emitting laser array.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a two-dimensional surface emitting laser array, a two-dimensional surface emitting laser beam scanner, and a two-dimensional surface emitting laser beam scanner.
The present invention relates to a two-dimensional surface-emitting laser beam recording apparatus and method, and more particularly, to a two-dimensional surface-emitting laser array capable of forming a closely arranged laser spot on an image forming surface, mainly on a photoreceptor, with high accuracy. The present invention relates to a scanner and a two-dimensional surface emitting laser beam recording apparatus and method.

[0002]

2. Description of the Related Art A conventional two-dimensional surface emitting laser array is disclosed in, for example, US Pat. No. 5,325,386. This two-dimensional surface-emitting laser array is configured by arranging a plurality of lasers two-dimensionally on a semiconductor substrate in a predetermined pattern, and forming a microlens on each laser as needed.

Each of the two-dimensional surface emitting lasers is driven in accordance with an image signal, and laser light emitted from each laser is scanned by a scanning mirror in a main scanning direction or a main scanning direction and a sub-scanning direction. A two-dimensional visually recognizable image pattern is generated.

On the other hand, as a conventional semiconductor laser beam scanner, there is one disclosed in, for example, Japanese Patent Application Laid-Open No. 1-152683. This semiconductor laser beam scanner
A semiconductor laser array in which a plurality of lasers are arranged one-dimensionally, and a lens system for condensing laser light emitted from the semiconductor laser array at an exposure position, and an image forming surface such as a barcode is formed at the exposure position. They are arranged to form a scanner.

As a conventional laser beam printer, there is one disclosed in, for example, Japanese Patent Application Laid-Open No. Sho 64-42667. This laser beam printer is configured by laminating a plurality of semiconductor substrates, and a semiconductor laser array in which a plurality of lasers are arranged over the width of the recording body in the main scanning direction. It is composed of a photoconductor directly exposed by laser light.

[0006]

However, according to the two-dimensional surface emitting laser array described in US Pat. No. 5,325,386, the scanning mirror scans the laser beam, so that the scanning mirror system fails. Is likely to occur,
Noise is generated. On the other hand, if the photoconductor is directly exposed to the laser beam, there is a gap between the lasers, so that high-quality image recording without a gap between pixels cannot be performed.

Further, according to the semiconductor laser beam scanner disclosed in Japanese Patent Application Laid-Open No. 1-152683, the lasers of the semiconductor laser array are arranged at intervals on the semiconductor substrate, so that they are formed on the photosensitive member. There is a gap between the imaged pixels, and there is a limit in improving the image quality.

Further, according to the laser beam printer disclosed in Japanese Patent Application Laid-Open No. Sho 64-42667, in addition to the above-described problem of the distance between pixels, a semiconductor laser array is formed by bonding a plurality of semiconductor substrates. As a result, the positional accuracy of the pixel array decreases.

Accordingly, an object of the present invention is to suppress occurrence of a failure,
An object of the present invention is to provide a two-dimensional surface-emitting laser array, a two-dimensional surface-emitting laser beam scanner, and a two-dimensional surface-emitting laser beam recording apparatus and method without noise.

Another object of the present invention is to provide a two-dimensional surface emitting laser array capable of forming an image having no space between pixels.
An object of the present invention is to provide a two-dimensional surface emitting laser beam scanner, and a two-dimensional surface emitting laser beam recording device and method.

It is still another object of the present invention to provide a two-dimensional surface emitting laser array, a two-dimensional surface emitting laser beam scanner, and a two-dimensional surface emitting laser beam recording apparatus and method having high positional accuracy.

[0012]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention comprises a first plurality of lasers arranged at predetermined intervals on a base line extending in a predetermined direction on a single semiconductor substrate. A second plurality of lasers respectively arranged at predetermined intervals on a plurality of inclined lines extending at a predetermined angle with respect to the base line on the single semiconductor substrate, wherein the first and second lasers are provided. The plurality of lasers are arranged so that sub-scanning lines extending in a direction orthogonal to the direction of the base line passing through the center of the laser are arranged at equal intervals, and laser light emitted from the first and second plurality of lasers is further provided. A two-dimensional surface emitting laser array including a positioning laser for adjusting a relative position with respect to an exposure surface to be exposed by the laser.

In order to achieve the above object, the present invention provides a first plurality of lasers arranged at predetermined intervals on a base line extending in a predetermined direction on a single semiconductor substrate; A second plurality of lasers arranged at predetermined intervals on a plurality of inclined lines extending at a predetermined angle with respect to the base line on the substrate, wherein the first and second plurality of lasers are Sub-scanning lines extending in a direction orthogonal to the direction of the base line through the center of the laser are arranged at equal intervals,
Further, the present invention provides a two-dimensional surface emitting laser array including a spare laser.

In order to achieve the above object, the present invention provides a first plurality of lasers arranged at a predetermined interval on a base line extending in a predetermined direction on a single semiconductor substrate; A second plurality of lasers arranged at predetermined intervals on a plurality of inclined lines extending at a predetermined angle with respect to the base line on the substrate, wherein the first and second plurality of lasers are Sub-scanning lines extending in a direction orthogonal to the direction of the base line through the center of the laser are arranged at equal intervals,
A two-dimensional surface emitting laser array is provided, wherein the centers of the plurality of lasers pass on at least one of the sub-scanning lines passing through the centers of the first and second plurality of lasers.

According to the present invention, in order to achieve the above object, a first plurality of lasers arranged at predetermined intervals on a base line extending in a predetermined direction on a single semiconductor substrate; Assuming a traveling direction, a first inclined line extending in the traveling direction at a predetermined angle with the base line on the single semiconductor substrate, and the first inclined line with respect to the predetermined direction. A second plurality of lasers respectively arranged at predetermined intervals on a second inclined line extending in a folded manner, wherein the first and second plurality of lasers pass through the center of the laser and extend in the direction of the base line. A two-dimensional surface emitting laser array characterized in that sub-scanning lines extending in a direction orthogonal to are arranged at equal intervals.

According to the present invention, there is provided a laser beam scanner for exposing a laser beam to an image forming surface conveyed in a sub-scanning direction to form an electrostatic latent image on a semiconductor substrate. A two-dimensional surface-emitting laser array having a plurality of two-dimensionally arranged lasers; and a laser light emitting side of the two-dimensional surface-emitting laser array, which is disposed on a laser light emission side of the two-dimensional surface emitting laser array. A lens system having an aperture for receiving light and projecting laser light emitted from the plurality of lasers over the entire width of the image forming surface in the main scanning direction; and the plurality of lasers of the two-dimensional surface emitting laser array A two-dimensional surface-emitting laser beam scanner provided with a driving circuit for driving the laser beam with a designated scanning pattern.

In order to achieve the above object, the present invention provides a two-dimensional surface emitting laser array having a plurality of lasers two-dimensionally arranged on a semiconductor substrate, and a laser beam of the two-dimensional surface emitting laser array. A lens system disposed on the emission side and having a diameter for receiving all laser beams emitted from the plurality of lasers, and driving the plurality of lasers of the two-dimensional surface emitting laser array in a designated scanning pattern A driving circuit, which rotates at a predetermined speed in the sub-scanning direction and is exposed over the entire width of the image forming surface in the main scanning direction by the plurality of laser beams transmitted through the lens system to form an electrostatic latent image; A two-dimensional surface-emitting laser beam recording apparatus is provided, comprising: a photoreceptor; and recording means for performing image recording based on the electrostatic latent image.

In order to achieve the above object, the present invention provides a semiconductor laser having a plurality of lasers two-dimensionally arranged on a semiconductor substrate.
Prepare a three-dimensional surface emitting laser array, emit laser light from a laser driven by driving the plurality of lasers of the two-dimensional surface emitting laser array in a specified scanning pattern,
The photosensitive member has a diameter to receive all of the laser light, and the photosensitive member is irradiated with the laser light through a lens system that projects laser light emitted from the plurality of lasers over the entire width of the photosensitive member in the main scanning direction. A two-dimensional emission laser beam recording method, comprising: forming an electrostatic latent image on the photoreceptor in accordance with an exposure pattern, and performing image recording based on the electrostatic latent image. .

[0019]

FIG. 1 shows a first embodiment of a two-dimensional surface emitting laser beam recording apparatus according to the present invention. The memory 11 stores pixel signals, and processes image signals read from the memory 11. A signal processing unit 12 for outputting a recording signal corresponding to a recording pattern, and a driving signal for driving a two-dimensional surface emitting laser array (hereinafter simply referred to as a laser array) 10 by inputting the recording signal from the signal processing unit 12 Drive circuit 13, an optical system 14 for expanding laser light emitted from the laser array 10 in the main scanning direction and the sub-scanning direction, and rotatably supported by supporting rolls 16 and 17 (at least one of which is a driving roll). A photoreceptor belt 15 that forms an electrostatic latent image on the surface by being exposed to laser light from the laser array 10 via the optical system 14 after being electrostatically charged; That. Around the photoreceptor belt 15,
A charging device, a developing device, a transfer device, and the like are provided, a paper feeding unit is provided at a stage preceding the transfer device, and a fixing device,
A paper discharge unit and the like are provided. These units are not shown for the sake of explanation.

FIG. 2 shows one element of a laser constituting the laser array 10 of FIG. 1, and includes an n-GaAs semiconductor substrate 100,
An n-type reflector 110 in which Al _0.15 Ga _0.85 As and AlAs are alternately stacked in multiple layers, and a cavity region 120 including a light emitting layer formed by sandwiching a GaAs quantum well layer between upper and lower Al _0.3 Ga _0.7 As.
A P-type reflecting mirror layer 130 in which Al _0.15 Ga _0.85 As and AlAs are alternately laminated in a multilayer, and a high-resistance region 14 in which protons are implanted.
0 and the n-type electrode 1 formed on the back surface of the semiconductor substrate 100
50, and a P-type electrode 160 formed on the surface of the P-type reflector layer 130. The P-type electrode 160 has an opening 170 for emitting a laser beam 180 in a surface-emitting state.

FIG. 3 shows a part of the laser array 10, in which a P-type electrode 160 connected to a power supply (not shown) by a wiring 190 is arranged in a predetermined pattern. An opening 170 for emitting light is formed.

FIG. 4 shows a pattern of the opening 170 of the laser array 10, and includes a base line N (first base line) in the main scanning direction,
A pattern of the opening 170 is defined by a base line (second base line) M having an angle θ with respect to the base line N and passing over the laser on the base line N. Baseline M is n for n lasers
Although this can be defined, only one is shown. Each laser showing only the opening 170 is formed on a single semiconductor substrate, and n lasers at equal intervals along the base line N and m laser diodes at equal intervals along the base line M, for a total of n × m lasers The lasers are arranged two-dimensionally. Each laser aperture 170 has a diameter d and each aperture 1
70 has an interval a along the base line M and an interval b along the base line N. Reference numerals 51 to 512 indicates a sub-scanning line interval in the sub-scanning lines 5 ₁ to 5 ₁₂ is expressed by kcos. Opening 170 has a diameter d is formed so as to satisfy the d ≧ a cos [theta], on the sub-scanning line 5 _{1-5 12} has at least one opening 170 is formed. The distance b between the openings 170 in the main scanning direction is represented by b = macos θ.

FIG. 5 shows the drive circuit 13 of FIG. 1, which is connected to the laser array 10 via a resistor R. The laser array 10 has a plurality of lasers formed two-dimensionally on a single semiconductor substrate. Each laser is divided into sections 1 to q (for example, q = 14), and each section has p ( For example, a laser of p = 1000) is formed. As for q and p, q × p = n × m is established in relation to n and m described above. Each section is controlled by the signal processing circuit 1 based on the clock of the clock generation circuit 61.
2, a shift register 62 for inputting a serial print signal from the shift register 62 and outputting it in parallel, a latch circuit 64 for inputting a parallel print signal from the shift register 62 and latching the same according to a latch signal from a latch signal generating circuit 69, A shift register 66 that shifts the transfer signal from the transfer signal generation circuit 70 bit by bit based on the clock input from the circuit 61 and puts the AND circuit 65 corresponding to the bit into a through state, and a turned-on AND circuit 65 And a driver 67 for inputting a recording signal from the latch circuit 64 via the latch circuit 64 and driving the laser array 10 based on the power supply Vcc.

The operation of the above configuration will be described with reference to the timing chart of FIG. First, an image signal is read from the memory 11 and subjected to signal processing in the signal processing circuit 12 to generate a recording signal corresponding to a recording pattern.
A recording signal (data) is serially output from the signal processing circuit 12 to the shift register 62 of each section based on the clock output from the clock signal generation circuit 61,
The inside can be shifted one bit at a time. When a recording signal is input to each bit of the shift register 62, a latch signal is output from the latch signal generation circuit 69 to the latch circuit 64, and the recording signal of the shift register 62 is transferred to the latch circuit 64 in parallel and latched there. . Next, when a transfer signal is supplied from the transfer signal generation circuit 70 to the shift register 66, the transfer signal shifts the shift register 66 one bit at a time on the basis of a clock, and sets the AND circuit 65 to a through state for each bit. . AND circuit 65
Is in a through state, the recording signal latched by the latch circuit 64 is supplied to the driver 67, whereby each laser of the laser array 10 is driven according to the recording signal.

Each laser of the laser array 10 has an n-type electrode 1
When a drive voltage based on the power supply voltage Vcc is received between the P-type electrode 50 and the p-type electrode 160, carriers are concentrated in the cavity region 120 surrounded by the high-resistance region 140, and the GaAs quantum well layer generates light, and the p-type And n-type reflector layer 1
A cavity phenomenon occurs between 10 and 130, and laser light 180 is emitted from opening 170.

The laser light emitted from the opening 170 of the laser array 10 is enlarged by a predetermined magnification in the main scanning direction and the sub-scanning direction by the lens system 14 to expose the photosensitive belt 15 to light.

FIG. 7A shows a pixel (laser spot) of the photosensitive belt 15 which has been exposed once by a laser beam emitted by driving a laser connected to each of the wirings 1 to p of sections 1 to q in FIG. ), The illustrated baselines N ′ and M ′ correspond to the previously described baselines N and M, the pixel diameter d ′ and the pixel spacing a ′ and b ′ are the diameter d of the aperture 170,
The distance a and b between the openings 170 is equal to a value obtained by enlarging the lens system 14 at a predetermined magnification. All lasers are driven once during one cycle of the transfer signal 70. During this time, the photosensitive belt 15 moves by a predetermined distance. Transfer signal 70
In the next cycle, all lasers are driven again.

FIG. 7B shows this state, and the pixel 72 is
Main scanning line 6 ₁Picture formed on
Formed in the cycle of the next transfer signal 70 in contact with the element 71
Thus, the main scanning line 6₁, 6_Two, 6_Three, 6_Four
.... and sub-scanning line 5₁, 5_Two, 5_Three, 5_Four, ...
Are formed one after another at the intersection of. As a result, the photosensitive member 1
The surface of No. 5 has pixels with no space between adjacent pixels.
As a result, an electrostatic latent image corresponding to the recording signal is formed. This electrostatic
The latent image is developed into a toner image by being developed with toner.
The toner image is transferred to a recording medium, and the transferred image is fixed.
Then, it is fixed on the recording medium. Image recording in this way
Is executed.

As is apparent from the above description, it is possible to obtain a high quality image formed by pixels densely arranged at equal intervals and having no interval between adjacent pixels. Further, since the laser array 10 is formed on a single semiconductor substrate, the positional accuracy of each laser is increased, and as a result, it is possible to prevent a deterioration in image quality.

FIGS. 8A and 8B show a second embodiment of a two-dimensional surface-emitting laser beam recording apparatus according to the present invention, in which a laser array 10 which emits laser light by being driven in accordance with a recording signal. A magnifying lens 81 for enlarging the laser beam at a predetermined magnification in the main scanning direction, and a reducing mirror 8 for reducing the laser beam magnified in the main scanning direction at a predetermined reduction ratio in the sub-scanning direction.
2 and a photosensitive drum 15 that is exposed with laser light that is enlarged in the main scanning direction and reduced in the sub-scanning direction. A charger, a developing device, a transfer device, and the like are arranged around the photosensitive drum 15, but are omitted in the figure.

In the above configuration, when the laser array 10 is driven according to a recording signal, laser light is emitted from the laser array 10. The laser light is enlarged by an enlargement lens 81 and reduced by a reduction mirror 82 so that the photosensitive drum 1
Exposure 5 By this exposure, an electrostatic latent image corresponding to the recording signal is formed on the drum 15, and an image is formed on the recording medium as described in the first embodiment.

FIG. 9A corresponds to FIG. 7A and shows pixels formed on the photosensitive drum 15. That is enlarged in the main scanning line 6 _1, 6 ₂ ..... and sub scanning 5 _1, 5 _2, ... in the main scanning direction at the intersection, a pixel which is reduced in the sub-scanning direction is formed .

FIG. 9 (b) corresponds to FIG. 7 (b) and shows a pixel 71 formed in the cycle of the previous transfer signal and a pixel 72 formed in the cycle of the next transfer signal. I have.

According to the second mode, the width of the image projected on the photosensitive member with the laser array in the sub-scanning direction is reduced.
Even if the photoconductor drum 15 has a small radius of curvature, an image with small distortion can be obtained. Also, the first
A high quality image can be obtained as in the embodiment. Further, the size of the pixel in the sub-scanning direction can be changed by changing the laser lighting time.

FIGS. 10A and 10B show a third embodiment of a two-dimensional surface emitting laser beam recording apparatus according to the present invention, in which a laser array 10 driven in accordance with a recording signal and a laser in a main scanning direction are provided. A main scanning / sub-scanning optical system 21 for enlarging a laser beam emitted from the array 10 and a reflecting mirror 23 for reflecting the laser beam enlarged in the main scanning direction and the sub-scanning direction
And a sub-scan enlargement optical system 22 for enlarging or reducing the laser light from the reflecting mirror 23 in the sub-scanning direction, and a photosensitive drum 15 exposed by the laser light.

In the above third embodiment, the laser beam is expanded in the main scanning direction and the sub-scanning direction by the main scanning and sub-scanning optical system 21 composed of a spherical lens, and the sub-scanning optical system 22 composed of an aspherical lens is formed. To enlarge or reduce in the sub-scanning direction. The sub-scan enlargement optical system 22 may be replaced by a main-scan enlargement optical system.

FIGS. 11A and 11B show a fourth embodiment of a two-dimensional surface emitting laser beam recording apparatus according to the present invention, in which a laser array 10 driven according to a recording signal and a laser array 1 are provided.
A main scanning magnifying optical system 21 for enlarging the laser light emitted from the main scanning direction in the main scanning direction; a sub-scanning magnifying optical system 22 for enlarging the laser light expanded in the main scanning direction in the sub-scanning direction; The photosensitive drum 15 is exposed to the laser beam enlarged in the sub-scanning direction.

Hereinafter, various patterns of the two-dimensional surface emitting laser array of the present invention will be described.

(A) Basic arrangement (vertical 10 spots) FIG. 12 shows a basic arrangement (vertical 10 spots), and suppose ten base lines extending in the main scanning direction including the illustrated base lines. A first laser array is provided by forming laser openings 170 at the illustrated intervals on the illustrated baseline. The next base line (not shown) extending parallel to the illustrated base line is provided with, for example, a laser opening 170 shifted in the main scanning direction by a distance equal to the outer diameter of the opening 170. Thus, a second laser array is formed. Hereinafter, the same applies to the first from the third.
The two-dimensional surface emitting laser array 10 is obtained by forming the zero laser array. When the two-dimensional surface emitting laser array 10 is driven, for example, in units of base lines, and a photoconductor (not shown) is moved (rotated) in the sub-scanning direction at a speed corresponding to the drive timing of each base line, the photosensitive is On the body, as shown by reference numeral 50, a closely arranged pixel array having no space in the main scanning direction is obtained. Although the pixel array 50 is illustrated at the same magnification in both the main scanning direction and the sub-scanning direction for explanation, as described above, the main scanning direction is enlarged at the first predetermined magnification, and the sub-scanning direction is the first predetermined magnification. Is preferably enlarged or reduced at a second predetermined magnification smaller than the predetermined magnification. According to the pattern of the laser array 10 in this basic arrangement, the intervals between the laser openings 170 are equal, so that the pattern is simple and easy to manufacture.

(B) Combination of Square Lattice FIG. 13 shows a two-dimensional surface emitting laser array 10 based on a combination of square lattices.
Is a two-dimensional surface emitting laser array by using a 6 × 6 square lattice as a unit and tilting a plurality of units at a predetermined angle with respect to a base line. The reference numeral 50 shown below indicates the pixel array 50 formed on the photoreceptor. According to the pattern of the laser array 10, since the unit is a square lattice, the pattern is the simplest, and the accuracy is high. Well manufactured.

(C) Positioning Spot (Part 1) FIG. 14 shows a two-dimensional surface emitting laser array 10 in which a plurality of positioning laser openings 170a are arranged above and below the image forming laser opening 170. In the figure, baselines M and N,
The numerical apertures m and n of the laser, the angle θ of the base line M with respect to the base line N, the intervals a and b of the laser opening 170, and the outer diameter d of the laser opening 170 have been described in the description of FIG. According to the two-dimensional surface emitting laser array 10, it is possible to detect a relative inclination or the like with respect to a photoconductor or the like, and it is possible to obtain high-quality image recording.

(D) Alignment spot (No. 2) FIG. 15 shows a two-dimensional array in which the distance between the apertures 170a of the alignment laser is increased while the number of the apertures 170a is reduced as compared with the two-dimensional surface emitting laser array 10 of FIG. Surface emitting laser array 1
0 is shown.

(E) Positioning Spot (Part 3) FIG. 16 shows a two-dimensional surface emitting laser array 10 in which the number of openings 170a of the positioning laser array is further reduced from that of the two-dimensional surface emitting laser array 10 of FIG. Is shown.
In the two-dimensional surface-emitting laser array 10, one positioning laser opening 170a is located on the base line N and is arranged alongside the image forming laser opening 170.

(F) One row of spare spots FIG. 17 shows one spare laser opening 170b arranged at a cycle in which ten image forming laser openings 170 are arranged in the main scanning direction. A two-dimensional surface emitting laser array 10 is provided in which twelve basic arrangement patterns are provided with one row of apertures 170b for the spare laser. According to the two-dimensional surface emitting laser array 10, even if one laser becomes defective, the corresponding spare laser is controlled and driven at a drive timing, thereby preventing pixel omission due to the defective laser. Also, the spare laser 170b
Can be used as alignment spots.

(G) Preliminary Spot in Two-Dimensional Arrangement FIG. 18 shows the two-dimensional surface emitting laser array 10 in which the aperture 170b of the preliminary laser is provided adjacent to the aperture 170 of each image forming laser. The correspondence between the defective laser and the spare laser is determined based on the sub-scanning line 5. That is, when one laser becomes defective, the spare laser located on the same sub-scanning line 5 is driven with its drive timing controlled. Thus, the operation is performed as if the laser light was emitted from the opening 170 of the defective laser. In this manner, pixel omission due to a defective laser can be prevented.

(H) Folding Pattern FIG. 19 shows the two-dimensional surface emitting laser array 10 in which the opening 170 of the image forming laser is folded in a predetermined cycle in the main scanning direction. According to the laser array 10, even if the laser array 10 is inclined or rotated with respect to a predetermined mounting position, displacement of a pixel formed on the photoconductor from a predetermined scanning line can be reduced.

(I) Folded Pattern with Shift (Part 1) FIG. 20 shows the two-dimensional surface emitting laser array 10 having the folded pattern shown in FIG. 19, in which the opening 170c of the image forming laser after the turning point is shifted in position. 2
1 shows a two-dimensional surface emitting laser array 10. According to the laser array 10, in addition to the effect of the laser array 10 of FIG. 19, the opening 170 is prevented from approaching at the turning point. Thereby, the laser array 10
This makes it difficult to manufacture the.

FIG. 21 shows the positions of the apertures 170c1 and 170c2 of the image forming laser after the turning point in the two-dimensional surface emitting laser array 10 having the turning pattern with shift shown in FIG. 2 shows a two-dimensional surface emitting laser array 10 with an increased actual shift amount. The same effect as the laser array 10 of FIG. 20 can be obtained.

(I) Two-Spot Pattern (Part 1) FIG. 22 shows a two-dimensional surface emitting laser array 10 in which two image forming laser openings 170 are formed for each sub-scanning line. According to the laser array 10, the image forming speed can be doubled. On the other hand, the image forming speed of 2
When doubling is not performed, it may be used as a spare spot.

(E) Two spot patterns (No. 2) FIG. 23 shows two image forming laser apertures 1 on each scanning line.
Two-dimensional surface emitting laser array 10 in which 70 are arranged adjacently
Is shown. According to this laser array 10, FIG.
In addition to the effect of the laser array 10, when one of them is used as the aperture of the spare laser, the rotation error at the time of switching can be reduced.

(W) Shifted folded pattern having alignment spots FIG. 24 shows a two-dimensional surface emitting laser array 1 based on a shifted folded pattern having alignment spots 170a.
0 is shown. Reference numeral 170c denotes the shift opening described above. According to the laser array 10, the above-described effects of positioning, shifting, and folding can be simultaneously obtained.

(F) Folded pattern with shift having two spots FIG. 25 shows two apertures 170 of the image forming laser formed on each sub-scanning line, and an opening 170c which is positionally shifted after the return point in the folded pattern. 2 shows a two-dimensional surface emitting laser array 10 having the following. According to the laser array 10, the effects of the two spots, shift, and folding described above can be simultaneously obtained.

[0053]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A two-dimensional surface-emitting laser beam recording apparatus using the two-dimensional surface-emitting laser array described above was implemented under the following conditions. (1) Example in which the magnification in the main scanning direction and the sub-scanning direction in the optical system is made equal.

[Table 1] (2) Example in which the magnification in the sub-scanning direction is made smaller than the magnification in the main scanning direction in the optical system, or the magnification is reduced in the sub-scanning direction

[Table 2]

As described above, according to the present invention, the following effects can be obtained. (1) Since a scanning mirror is not required, occurrence of a failure can be suppressed and noise can be prevented. (2) A plurality of lasers arranged at equal intervals on at least two main scanning lines are formed on a semiconductor substrate, and the laser light emitted by the plurality of lasers is enlarged in the main scanning direction, and is expanded in the sub-scanning direction. Since the image is enlarged or reduced, it is possible to perform image recording based on a pixel array having no space at least in the main scanning direction. (3) Since it is not necessary to form a two-dimensional surface emitting laser array on a single semiconductor substrate and combine a plurality of semiconductor substrates, a pixel array can be formed with high positional accuracy.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a first embodiment of a two-dimensional surface emitting laser beam recording apparatus of the present invention.

FIG. 2 is a cross-sectional view showing a laser of a two-dimensional surface emitting laser array according to the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention.

FIG. 3 is an explanatory diagram showing a relationship between a laser light emitting opening and wiring of a two-dimensional surface emitting laser array according to the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention.

FIG. 4 is an explanatory view showing an arrangement pattern of laser light emitting openings of the two-dimensional surface emitting laser array in the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention.

FIG. 5 is a block diagram showing a laser array driving circuit in the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention.

FIG. 6 is a timing chart showing laser array driving in the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention.

7A is an explanatory view of a pixel pattern on a photoreceptor belt according to the first embodiment of the two-dimensional surface emitting laser beam recording apparatus of the present invention, and FIG. Illustration

8A is a perspective view illustrating a two-dimensional surface emitting laser beam recording apparatus according to a second embodiment of the present invention, and FIG. 8B is a side view illustrating the second embodiment as in FIG.

9A is an explanatory view of a pixel pattern on a photosensitive drum in a second embodiment of a two-dimensional surface emitting laser beam recording apparatus of the present invention, and FIG. Illustration

FIG. 10A is a top view showing a third embodiment of a two-dimensional surface emitting laser beam recording apparatus of the present invention, and FIG. 10B is a side view showing the third embodiment as in FIG.

FIG. 11A is a top view showing a fourth embodiment of a two-dimensional surface emitting laser beam recording apparatus according to the present invention, and FIG. 11B is a side view showing the fourth embodiment as in FIG. Illustration

FIG. 12 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 13 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 14 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 15 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 16 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 17 is an explanatory view showing another embodiment of the opening pattern for laser light emission of the two-dimensional surface emitting laser array of the present invention.

FIG. 18 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 19 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 20 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 21 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 22 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 23 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 24 is an explanatory view showing another embodiment of the laser light emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

FIG. 25 is an explanatory view showing another embodiment of the laser beam emitting aperture pattern of the two-dimensional surface emitting laser array of the present invention.

[Explanation of symbols]

 51, 52, 53 Sub-scanning line 61, 62, 63 Main scanning line 10 Two-dimensional surface emitting laser array 11 Image memory 12 Signal processing circuit 13 Drive circuit 14 Optical system 15 Photoconductor belt or photoconductor drum 16, 17 Support roll 21 , 22 Magnifying optical system 50 Pixel lines 61 at equal intervals 61 Clock generation circuit 62, 66 Shift register 64 Latch signal generation circuit 65 AND circuit 67 Trivers 69 Latch signal generation circuit 70 Transfer signal generation circuit 71, 72 pixels (laser spot) 100 semiconductor substrate 110, 130 reflecting mirror layer 140 high resistance region 150 n-type electrode 160 p-type electrode 170 laser light emitting opening 180 laser light 190 wiring

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Akira Sakamoto, Inventor 430 Sakai Nakaicho, Kanagawa Prefecture Green Tech Nakai Inside Fuji Xerox Co., Ltd. In-company F term (reference) 2C362 AA11 AA14 AA15 AA42 BA21 BA58 BA60 BA61 BA84 BA86 CB33 5C072 AA03 BA04 CA06 CA09 HB01 XA05 5F073 AA64 AB05 AB17 BA07 CA04 CB02

Claims (16)

[Claims] A first plurality of lasers arranged at predetermined intervals on a base line extending in a predetermined direction on a single semiconductor substrate; and a predetermined angle with the base line on the single semiconductor substrate. A second plurality of lasers arranged at predetermined intervals on a plurality of inclined lines extending, the first and second plurality of lasers passing through a center of the laser in a direction of the base line; A positioning laser that is arranged so that sub-scanning lines extending in a direction orthogonal to each other are equally spaced, and further adjusts a relative position with respect to an exposure surface exposed by laser light emitted from the first and second plurality of lasers; And a two-dimensional surface emitting laser array. A first plurality of lasers arranged at predetermined intervals on a base line extending in a predetermined direction on a single semiconductor substrate; and a predetermined angle with the base line on the single semiconductor substrate. A second plurality of lasers arranged at predetermined intervals on a plurality of inclined lines extending, the first and second plurality of lasers passing through a center of the laser in a direction of the base line; A two-dimensional surface emitting laser array, wherein sub-scanning lines extending in a direction orthogonal to each other are arranged at equal intervals, and further including a spare laser. 3. A first plurality of lasers arranged at a predetermined interval on a base line extending in a predetermined direction on a single semiconductor substrate, and a predetermined angle with the base line on the single semiconductor substrate. A second plurality of lasers arranged at predetermined intervals on a plurality of inclined lines extending, the first and second plurality of lasers passing through a center of the laser in a direction of the base line; Sub-scanning lines extending in a direction orthogonal to each other are arranged at equal intervals, and the centers of the plurality of lasers are positioned on at least one of the sub-scanning lines passing through the centers of the first and second plurality of lasers. A two-dimensional surface emitting laser array characterized by passing through. 4. A first plurality of lasers arranged at a predetermined interval on a base line extending in a predetermined direction on a single semiconductor substrate, and a predetermined angle with respect to the base line on the single semiconductor substrate. A second plurality of lasers disposed at predetermined intervals on a first inclined line extending and extending, and on a second inclined line extending by folding the first inclined line in the predetermined direction. The first and second plurality of lasers are arranged such that sub-scanning lines extending in a direction orthogonal to the direction of the base line passing through the center of the laser are arranged at equal intervals.
Dimensional surface emitting laser array. 5. The two-dimensional structure according to claim 4, wherein said pair of first and second inclined lines on which said second plurality of lasers are arranged are periodically repeated in said predetermined direction. Surface emitting laser array. 6. The plurality of second lines on the first inclined line.
And the plurality of second lasers on the second tilt line.
6. The two-dimensional surface emitting laser array according to claim 4, wherein the laser is arranged at a different position from a direction perpendicular to the base line. 7. The two-dimensional surface emitting laser according to claim 4, wherein a plurality of lasers are further arranged at positions shifted from the first and second plurality of lasers in the sub-scanning line direction. array. 8. A laser beam scanner for exposing a laser beam to an image forming surface conveyed in a sub-scanning direction to form an electrostatic latent image, comprising: a plurality of lasers two-dimensionally arranged on a semiconductor substrate; A two-dimensional surface-emitting laser array having: a plurality of laser light sources arranged on a laser light emitting side of the two-dimensional surface-emitting laser array, having a diameter for receiving all laser light emitted from the plurality of lasers; A lens system for projecting a laser beam emitted from a laser over the entire width of the image forming surface in the main scanning direction, and a drive for driving the plurality of lasers of the two-dimensional surface emitting laser array in a designated scanning pattern A two-dimensional surface emitting laser beam scanner comprising a circuit. 9. The plurality of lasers of the two-dimensional surface emitting laser array, the first plurality of lasers being arranged at a predetermined interval on a base line extending in a predetermined direction on the semiconductor substrate; Having a plurality of second lasers arranged at predetermined intervals on a plurality of inclined lines extending at a predetermined angle from the base line on the semiconductor substrate, wherein the first and second plurality of lasers are 9. The two-dimensional surface emitting laser beam scanner according to claim 8, wherein sub-scanning lines extending in a direction perpendicular to the direction of the base line passing through the center of the laser are arranged at equal intervals. 10. A lens system, comprising: a first lens system for enlarging laser light emitted from the plurality of lasers at a first magnification in a main scanning direction; and a laser beam emitted from the plurality of lasers. A second magnification smaller than the first magnification in the sub-scanning direction;
9. The two-dimensional surface-emitting laser beam scanner according to claim 8, wherein the two-dimensional surface-emitting laser beam scanner includes a second lens system that expands or reduces at a magnification of. 11. A two-dimensional surface emitting laser array having a plurality of lasers two-dimensionally arranged on a semiconductor substrate; and the plurality of lasers arranged on a laser beam emission side of the two-dimensional surface emitting laser array. A lens system having an aperture for receiving all laser beams emitted from the laser, a driving circuit for driving the plurality of lasers of the two-dimensional surface emitting laser array in a designated scanning pattern, and a predetermined circuit in the sub-scanning direction. A photoreceptor that rotates at a speed and is exposed over the entire width of the image forming surface in the main scanning direction by the plurality of laser beams transmitted through the lens system to form an electrostatic latent image; A two-dimensional surface-emitting laser beam recording apparatus, comprising: recording means for executing image recording based on the information. 12. The plurality of lasers of the two-dimensional surface emitting laser array, wherein the plurality of lasers are arranged at a predetermined interval on a base line extending in a predetermined direction on the semiconductor substrate; Having a plurality of second lasers arranged at predetermined intervals on a plurality of inclined lines extending at a predetermined angle from the base line on the semiconductor substrate, wherein the first and second plurality of lasers are 12. The two-dimensional surface emitting laser beam recording apparatus according to claim 11, wherein sub-scanning lines extending in a direction orthogonal to the direction of the base line passing through the center of the laser are arranged at equal intervals. 13. A lens system for enlarging laser light emitted from the plurality of lasers at a first magnification in a main scanning direction, and a lens system for enlarging laser light emitted from the plurality of lasers. A second magnification smaller than the first magnification in the sub-scanning direction;
12. The two-dimensional surface emitting laser beam recording apparatus according to claim 11, further comprising a second lens system for enlarging or reducing at a magnification of. 14. A two-dimensional surface emitting laser array having a plurality of lasers two-dimensionally arranged on a semiconductor substrate is prepared, and the plurality of lasers of the two-dimensional surface emitting laser array are arranged in a designated scanning pattern. A laser beam is emitted from the driven laser and has a diameter to receive all of the laser light, and the laser beams emitted from the plurality of lasers are spread over the entire width of the photoconductor in the main scanning direction. Exposing the photoreceptor with the laser beam through a lens system for projection to form an electrostatic latent image on the photoreceptor in accordance with an exposure pattern, and performing image recording based on the electrostatic latent image A two-dimensional emission laser beam recording method characterized by the above-mentioned. 15. The plurality of lasers of the two-dimensional surface emitting laser array, the first plurality of lasers being arranged at equal intervals on a base line extending in a predetermined direction on the semiconductor substrate; A second plurality of lasers arranged at equal intervals on a plurality of inclined lines extending at a predetermined angle with respect to the base line on the semiconductor substrate, wherein the first and second plurality of lasers are 15. The two-dimensional emission laser beam recording method according to claim 14, wherein sub-scanning lines extending in a direction orthogonal to the base line direction passing through the center of the laser are arranged at equal intervals. 16. The method of forming an electrostatic latent image, comprising: enlarging the laser light at a first magnification in a main scanning direction by the lens system; and applying the laser light to the first magnification in a sub-scanning direction by the lens system. 15. The two-dimensional surface emitting laser beam recording method according to claim 14, further comprising a step of enlarging or reducing at a second magnification smaller than the magnification.