JP2001308463A5 - - Google Patents

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Publication number
JP2001308463A5
JP2001308463A5 JP2000127400A JP2000127400A JP2001308463A5 JP 2001308463 A5 JP2001308463 A5 JP 2001308463A5 JP 2000127400 A JP2000127400 A JP 2000127400A JP 2000127400 A JP2000127400 A JP 2000127400A JP 2001308463 A5 JP2001308463 A5 JP 2001308463A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000127400A
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Japanese (ja)
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JP4560885B2 (ja
JP2001308463A (ja
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Priority to JP2000127400A priority Critical patent/JP4560885B2/ja
Priority claimed from JP2000127400A external-priority patent/JP4560885B2/ja
Publication of JP2001308463A publication Critical patent/JP2001308463A/ja
Publication of JP2001308463A5 publication Critical patent/JP2001308463A5/ja
Application granted granted Critical
Publication of JP4560885B2 publication Critical patent/JP4560885B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000127400A 2000-04-27 2000-04-27 化合物半導体装置およびその製造方法ならびに半導体発光装置およびその製造方法 Expired - Fee Related JP4560885B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000127400A JP4560885B2 (ja) 2000-04-27 2000-04-27 化合物半導体装置およびその製造方法ならびに半導体発光装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000127400A JP4560885B2 (ja) 2000-04-27 2000-04-27 化合物半導体装置およびその製造方法ならびに半導体発光装置およびその製造方法

Publications (3)

Publication Number Publication Date
JP2001308463A JP2001308463A (ja) 2001-11-02
JP2001308463A5 true JP2001308463A5 (enrdf_load_stackoverflow) 2006-12-28
JP4560885B2 JP4560885B2 (ja) 2010-10-13

Family

ID=18636998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000127400A Expired - Fee Related JP4560885B2 (ja) 2000-04-27 2000-04-27 化合物半導体装置およびその製造方法ならびに半導体発光装置およびその製造方法

Country Status (1)

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JP (1) JP4560885B2 (enrdf_load_stackoverflow)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2645055B2 (ja) * 1988-02-09 1997-08-25 株式会社東芝 ダブルヘテロウェハ及びダブルヘテロ接合型半導体レーザ装置
JP2642404B2 (ja) * 1988-05-13 1997-08-20 株式会社東芝 半導体レーザの製造方法
JP2806089B2 (ja) * 1991-08-06 1998-09-30 日本電気株式会社 半導体多重歪量子井戸構造
JPH06275919A (ja) * 1993-03-18 1994-09-30 Fujitsu Ltd 光半導体素子
JPH07235730A (ja) * 1994-02-22 1995-09-05 Matsushita Electric Ind Co Ltd 歪多重量子井戸構造およびその製造方法ならびに半導体レーザ
JPH08102566A (ja) * 1994-09-30 1996-04-16 Nec Corp 量子井戸構造光半導体装置及びその製造方法
JP2669401B2 (ja) * 1995-05-25 1997-10-27 日本電気株式会社 半導体レーザおよびその製造方法

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