JP2001255252A - Sample conveyance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower the height of a member arranged over the sample replacement position. SOLUTION: This sample conveyance device is equipped with a sample holding member support device 4 having a sample holding member locking part and arranged on the sample observation position P1, a wire W wound on a wire hoist 11 arranged over the sample replacement position P2 over the sample observation position P1, a sample holding member SH connected to the lower end of the wire W and having a member to be locked movable between the locking position locked by the sample holding member locking part and the uncoupling position uncoupled from the sample holding member locking part, a sample holding member removing rod support member 14 arranged over the sample replacement position P2 and supported movably, and a sample holding member removal rod 21 supported on the upper end thereof by the sample holding member removing rod support member 14, for moving the member to be locked between the locking position and the uncoupling position when the sample holding member removing rod support member 14 is moved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for transporting a sample holding member holding a sample of a scanning probe microscope between a sample exchange position and a sample observation position below the sample exchange position. The present invention relates to a sample transfer device capable of attaching and detaching the sample holding member to and from a holding member support device. The present invention relates to STM (Scanning Tunneling Microscope, scanning tunneling microscope), AFM (Atomic Force Microsc
ope, atomic force microscope), UHV (Ulutra High Vacuu)
m) -STM (Ultra High Vacuum Scanning Tunneling Microscope), UH
It can be used with a scanning probe microscope such as V (Ulutra High Vacuum) -AFM (ultra high vacuum atomic force microscope).

[0002]

2. Description of the Related Art In the above-mentioned scanning probe microscope, when observing a sample cooled in a UHV (Ultra High Vacuum) chamber of a UHV cooling device using a cryostat (cooling vessel), an observation position at the bottom of the UHV chamber. It is necessary to transport a sample holding member (for example, an STM stage or the like) holding a sample between the sample and a sample exchange position thereabove. In this case, the sample holding member for holding the sample is transported to the observation position at the bottom of the UHV chamber using a transport rod of MGL (Magnetic Loader), a belt-type transport rod, or the like. It is detachably attached (fixed) to the support member.

[0003] The following prior arts (1) and (2) are known as sample transfer devices using a transfer rod of the MGL (Magnetic Loader), a belt-type transfer rod, and the like. (1) Technique shown in FIG. 9 FIG. 9 is an explanatory view of a conventional example of a sample transfer device, FIG. 9A is a diagram showing a state in which a sample holding member is at a sample exchange position, and FIG. FIG. 3 is a diagram showing a certain state.
In FIG. 9, an STM cell support device (sample holding member support device) 04 is disposed at a sample observation position P1 at the bottom of a UHV (Ultra High Vacuum) inner chamber 03 inside a cryostat 02 supported via a vibration isolation member 01. ing. The STM cell support device 04 is a device for fixedly supporting an STM cell (STM stage holding a sample) SH. UH above the UHV inner chamber 03
Above the sample exchange position P2 set in the V chamber, a cylindrical transport rod housing 06 is provided extending in the vertical direction. MG in the cylindrical transfer rod housing 06
An L transport rod (sample transport member) 07 is slidably and rotatably supported, and an MGL magnet 08 is slidably and rotatably supported outside the transport rod housing 06. By sliding the MGL magnet 08, the STM cell (sample holding member) SH held at the lower end of the MGL transport rod 07 is moved to the sample exchange position P.
2 (see FIG. 9A) to the sample observation position P1 at the bottom of the UHV inner chamber 03 (see FIG. 9B). In a state where the STM cell SH is transported to the STM cell support device 04,
When the MGL transport rod 07 is rotated by rotating the MGL magnet 08, the STM cell SH is fixed to the STM cell support device 04.

(2) Technique shown in FIG. 10 FIG. 10 is an explanatory view of another conventional example of the sample transfer apparatus.
A is a diagram showing a state where the sample holding member is at the sample exchange position,
FIG. 10B is a diagram illustrating a state where the sample holding member is at the sample observation position. In the description of FIG. 10, the same components as those of FIG. 9 are denoted by the same reference numerals, and overlapping detailed description will be omitted. In FIG. 10, an STM cell S is provided at the lower end.
The transport rod 07 to which H is connected is connected to the belt 011. When the belt 011 is rotated by the rotation introducing device 012 for belt rotation, the transport rod 07 moves up and down, and the STM cell SH moves to the STM at the sample observation position.
It is transported to the cell support device 04. STM cell SH is ST
When the transport rod 07 is rotated by the rod rotation rotation introducing device 013 while being transported to the M cell support device 04, the STM cell SH is fixed to the STM cell support device 04.

[0005]

FIG. 9 or FIG.
As shown in (1), since the cryostat 02 has a height, the UHV inner chamber 03 in the cryostat 02 needs to have a length corresponding to the height of the cryostat 02. Long U
In order to transport the sample stage, the sample holder, and the like to the observation position at the bottom of the HV inner chamber 03, the transport rod 07 is required.
Needs to be the same length as the length of the UHV inner chamber 03. Therefore, cryostat 0
A transport rod housing 06 having a length corresponding to the length of the transport rod 07 is required on the upper part of the transport rod 07. For this reason, the transport rod accommodation portion 06 extends high above the cryostat 02. For this reason, the height of the whole apparatus becomes high, and it often cannot be accommodated in a general installation room. For this reason, it becomes necessary to provide a separate installation room or to modify the installation room. In an apparatus such as an STM that requires resolution at the atomic or molecular level, vibrations and the like are easily amplified as the height of the apparatus increases from the vibration isolation table.
The resolution is reduced.

In view of the above circumstances, the present invention provides the following (O01)
Is the subject of the description. (O01) The sample holding member is transported between the sample holding member support device provided at the sample observation position and the sample exchange position set above the sample holding member support device, and the sample holding member is detachably attached to the sample holding member support device. The height of a member disposed above the sample exchange position is reduced in the sample transport device.

[0007]

Means for Solving the Problems Next, the present invention which has solved the above-mentioned problems will be described. Elements of the present invention include elements of the embodiments to facilitate correspondence with the elements of the embodiments described later. The sign of parentheses is added in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(The present invention) In order to solve the above-mentioned problems, the sample transport apparatus of the present invention has the following requirements (A01) to (A05)
(A01) a sample holding member support device (4) having a sample holding member locking portion (9b) and arranged at a sample observation position (P1), (A02) a sample observation position While being transported to (P1), it is movable between a locking position where it is locked by the sample holding member locking portion (9b) and a detached position where it is detached from the sample holding member locking portion (9b). Sample holding member (SH) having a simple locked member (29), (A)
03) A rod support member (14) for mounting and dismounting a sample holding member, which is disposed above the sample exchange position (P2) above the sample observation position (P1) and movably supported, and (A04) the upper end of which holds the sample. The locked member (29) is supported by the member attaching / detaching rod support member (14) and moves the locked member (29) between the locked position and the detached position when the sample holding member attaching / detaching rod support member (14) moves. A sample holding member attaching / detaching rod (21) to be moved, (A05) being disposed below the sample holding member attaching / detaching rod support member (14);
A sample holding member transfer device (11 + W) for transferring the sample holding member (SH) between the sample observation position (P1) and a sample exchange position (P2) above the sample observation position (P1);

(Operation of the present invention) In the sample transporting apparatus of the present invention having the above-described configuration, the sample holding member supporting device (4) having the sample holding member locking portion (9b) is located at the sample observation position (P
1). Sample holding member transfer device (11 + W)
Are arranged below the sample holding member attaching / detaching rod support member (14) above the sample exchange position (P2), and the sample observation position (P1) and the sample exchange position (P
The sample holding member (SH) is conveyed to and from 2). The sample holding member (SH) is provided with the sample holding member locking portion (9).
a locking member (29) movable between a locking position locked to b) and a detached position separated from the sample holding member locking portion (9b). The sample holding member attaching / detaching rod support member (14) disposed above the sample exchange position (P2) is movably supported. The sample holding member attaching / detaching rod (21), the upper end of which is supported by the sample holding member attaching / detaching rod supporting member (14), holds the locked member when the sample holding member attaching / detaching rod supporting member (14) moves. (29) is moved between the locking position and the release position. The locked member (2) of the sample holding member (SH)
In a state in which the sample holding member (SH) is moved to a locking position where the sample holding member is locked by the sample holding member locking portion (9b) of the sample holding member supporting device (4), the sample holding member (SH) is moved to the sample holding member supporting device (4). ). Therefore, in the present invention, the movement of the sample holding member (SH) is performed by the sample holding member transport device (11 + W), and the attachment and detachment of the sample holding member (SH) to and from the sample holding member support device (4) are performed. This is performed according to (21).

[0010] The sample holding member transfer device (11 + W)
Need only have a function of transporting the sample holding member (SH), and can be configured using members such as a wire (W) and a belt. In this case, it is not necessary to configure the sample holding member transfer device (11 + W) to extend upward and high. Also, a sample holding member attaching / detaching rod (21)
Requires a rigidity, and therefore requires a height corresponding to the moving distance. However, since the function of transporting the sample holding member (SH) is not required, the necessary moving distance is small. That is, the sample holding member attaching / detaching rod (21) may be moved by a moving distance necessary for attaching / detaching the sample holding member (SH) to / from the sample holding member supporting device (4). For this reason, even when the sample holding member attaching / detaching rod (21) is moved upward, the sample holding member attaching / detaching rod (21) does not extend high upward. For this reason, when the sample transport device of the present invention is used in a vacuum chamber in a cryostat (cooling vessel), the accommodation portion of the sample holding member attaching / detaching rod (21) moving in the vacuum chamber is formed to be higher. You don't have to. Therefore, it is not necessary to raise the ceiling of the room accommodating the sample transport device.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, specific examples (embodiments) of embodiments of the sample transport apparatus of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments. Absent. (Embodiment 1) FIG. 1 is an overall explanatory view of a sample transport apparatus according to Embodiment 1 of the present invention. FIG. 2 is an operation explanatory view of the entire sample transporting apparatus of the first embodiment, and FIG. 2A is a diagram showing a state in which the sample holding member is being transported from a sample exchange position to a sample holding member supporting device at a sample observation position below, FIG. 2B is a view showing a state in which the sample holding member is transported to the sample holding member support device and a sample holding member attaching / detaching rod for attaching and detaching the sample holding member to and from the sample holding member support device is moved above the attachment / detachment position; FIG. 3B is a diagram showing a state in which the sample holding member attaching / detaching rod has been moved downward from the position shown in FIG. 2B. 3 is an explanatory view of the sample holding member, FIG. 3A is a front view, FIG. 3B is a view from the arrow IIIB of FIG. 3A, and FIG. 3C is IIIC-III of FIG. 3A.
3D is a sectional view taken along the line IIID-IIID in FIG. 3A, FIG. 3E is a perspective view of the detachable lever shown in FIG. 3D, and FIG. 3F is a perspective view of the lever support member shown in FIG. 3D. It is. 4A and 4B are explanatory views of a method of mounting the sample holding member on the sample holding member support device. FIG. 4A is a diagram showing a state where the sample holding member is transported to the sample holding member support device. FIG. FIG. 4C is a diagram illustrating a state in which the sample attaching / detaching rod is pressed against the sample holding member supporting device, and FIG. 4C is a diagram illustrating a state where the sample attaching / detaching rod is rotated to attach the sample holding member to the sample holding member supporting device. FIG. 4 is a view showing a state in which the sample holding member attaching / detaching rod is detached upward;
FIG. 4E is a view from the line IVE-IVE of FIG. 4A, FIG. 4F is a cross-sectional view of the line IVF-IVF of FIG. 4A, and FIG.
FIG. 4H is a view from the line IVG-IVG of FIG.
It is an IVH-IVH line sectional view.

In FIG. 1, a UHV (Ultra Ultra) inside a cryostat 2 supported via a plurality of vibration isolation members 1 is shown.
An STM cell support device (sample holding member support device) 4 is disposed at the sample observation position P1 at the bottom of the high vacuum (inner vacuum chamber) 3. STM
The cell support device 4 includes an STM cell (an STM holding a sample).
This is a device for detachably mounting (fixing and supporting) a sample holding member SH such as a stage. 4 and 3, the STM cell support device 4 includes a cylindrical case 6 and a support device side terminal plate 7 fixed to an upper end of the case 6.
And a cylindrical member 8 provided on the upper surface of the support device side terminal plate 7 and an upper end plate 9 provided on the upper surface thereof.

The case 6 has a sample holding member housing 6a having a cylindrical inner peripheral surface. The support-device-side terminal plate 7 has a circular hole 7a having a diameter slightly smaller than that of the sample holding member accommodating portion 6a.
A plurality of electrical connection terminals 7b are formed on outer portions on both sides in the diameter direction of a. The inner peripheral surface 8a of the cylindrical member 8 has a larger diameter than the circular hole 7a, and a space is formed above the electric connection terminal 7b. The upper end plate 9 has an oblong hole 9a, and the major diameter of the oblong hole 9a is the same as the inner peripheral surface 8a of the cylindrical member 8 (FIGS. 4E to 4H).
(See above) so that the upper part of the electrical connection terminal 7b is open to the outside (from the upper part of the upper end plate 9).
Is formed). On the lower surface of the upper end plate 9, sample holding member locking portions 9b projecting inward from the inner peripheral surface 8a of the cylindrical member 8 are provided on both sides in the minor diameter direction of the oblong hole 9a.

In FIG. 1, the sample exchange position P2 set in the UHV chamber above the UHV inner chamber 3 is set at a position above the sample observation position P1. The sample exchange position P2 is a position for exchanging a sample or a probe (probe) held in the sample holding member (STM cell) SH. A wire hoist 11 is disposed above the sample exchange position P2. 3A and 3B, the wire hoist 11 has a pair of drums 11a, 11a, and the wires W, W are wound around the respective drums 11a, 11a. The sample holding member SH is connected to a lower end of each of the wires W. Sample holding member transport device (11 + W) by the wire hoist 11 and the wire W
Is configured. The wire hoist 11 is connected to the lower ends of the wires W, W by winding and unwinding the wires W, W by rotating an external hoist operating handle 12 (see FIG. 2). The sample holding member SH can be transported vertically.

In FIG. 1 and FIG. 2, the wire hoist 1
An upper end fixing flange 13 is provided above 1.
Above the upper end fixing flange 13, an elevating nut 15 for vertically moving a movable flange (rod supporting member for attaching and detaching a sample holding member) 14 is provided on a screw shaft 16.
a so as to be able to move up and down. Lifting nut 15
The screw shaft 16 is moved by the lifting handle 16.
When a is rotated, the position is adjusted in the vertical direction. The flange guide 17 has a slide rod 17a extending downward, and the slide rod 17a is
Are slidably supported up and down by a guide member provided on the upper surface. The flange guide 17 supports the movable flange 14 so as to be movable in the horizontal direction, and is connected to the movable flange 14 so as not to be relatively movable in the vertical direction.

One end of a screw shaft 18a screwed to the lifting nut 15 and horizontally passing through the lifting nut 15 is screwed to the movable flange 14. Therefore, when the screw 16a is rotated by the lifting handle 16 to raise and lower the lifting nut 15, the lifting nut 15 and the screw shaft 18a are raised and lowered, so that the movable flange 14 to which one end of the screw shaft 18a is screwed is also raised and lowered. I do. At that time, the movable flange 1
The flange guide 17 and the slide rod 17a, which are connected to the rail 4 so that they cannot move relative to each other in the vertical direction, also move up and down. A left-right moving handle 18 is provided at the other end of the screw shaft 18a. Said left / right movement handle 1
When the screw shaft 18a is rotated by 8, the movable flange 14 supported by the flange guide 17 so as to be movable in the horizontal direction moves in the left-right direction, and the position is adjusted in the left-right direction.

A metal bellows 19 is provided between the lower surface of the movable flange 14 and the upper surface of the upper fixed flange 13.
Are connected. The upper end of a sample holding member attaching / detaching rod 21 extending downward is connected to the movable flange 14.
It is rotatable by a rotating handle 22 supported on the upper surface. The lower end of the sample holding member attaching / detaching rod 21 extends near the upper end of the sample observation position P1, and a horizontal pin 21a is fixed to the lower end.

3 and 4, the sample holding member (STM)
The cell SH includes a cylindrical stage housing case 26, a holding member side terminal plate 27 provided at the upper end thereof, which is oblong in plan view, a lever supporting member 28 provided on the upper surface of the holding member side terminal plate 27, The detachable lever 29 (locked member, FIG. 3) rotatably supported by the lever support member 28.
E). Electrical connection terminals 27a are provided on the lower surface of both ends in the longitudinal direction of the elliptical holding member side terminal plate 27 via a plurality of conductive elastic members. 4A and 4B, the holding member side terminal plate 27 passes through the oblong hole 9a and the cylindrical member 8 of the upper end plate 9 of the STM cell support device 4 from the upper side to the lower side, and the upper surface of the support device side terminal plate 7 Supported by At this time, the electric connection terminals 7b on the upper surface of the support device side terminal plate 7 and the electric connection terminals 27a of the holding member side terminal plate 27 are connected.

In FIG. 3, a lever supporting member 28 supports a lower portion 28a (see FIG. 3F) that rotatably supports the detachable lever 29 in a range of 90 ° around a vertical axis, and a lower portion 28a. And a donut-shaped upper portion 28b fixed to the upper surface of the lower portion 28a to prevent the detachable lever 29 from being pulled upward. As shown in FIG. 3E, the attachment / detachment lever 29
9a and protrusions 29b, 29b protruding on both sides thereof. The center circular portion 29a has a pin insertion hole 29c.
Are formed, and the projecting portions 29b, 29b are formed with inclined surfaces 29d, 29d. Therefore, in a state where the holding member side terminal plate 27 of the sample holding member SH is placed on the supporting device side terminal plate 7 of the sample holding member supporting device 4 (see FIG. 4A), the horizontal pin 21a of the sample holding member attaching / detaching rod 21 is attached. 4B is inserted into the pin insertion hole 29c of the attachment / detachment lever 29 and the sample holding member attachment / detachment rod 21 is rotated (see FIG. 4C), and each of the protrusions 29b, 29b of the attachment / detachment lever 29 is rotated. Inclined surface 29
d is pressed downward by the lower surface of the sample holding member locking portion 9b.

(Operation of the First Embodiment) In FIG. 4, in the sample transporting apparatus of the first embodiment having the above-described configuration, the STM cell supporting device (sample holding member supporting device) 4 having the sample holding member locking portion 9b is , UHV inside the cryostat 2 (Ul
The tra High Vacuum is located at the sample observation position P1 at the bottom of the inner chamber (that is, the vacuum chamber) 3.
By operating the wire hoist 11 above the sample exchange position P2 in the vacuum chamber 3 above the sample observing position P1, the sample W connected to the lower ends of the wires W, W wound on the wire hoist 11 is operated. The holding member SH can be transported between the sample observation position P1 and the sample exchange position P2.

The sample holding member SH is moved to the sample observation position P1.
2B and 4A, the movable flange 14 disposed above the sample exchange position P2 is moved in the horizontal and vertical directions by operating the left / right moving handle 18 and the elevating handle 16. Can be moved. At this time, the horizontal pin 21a at the lower end of the sample holding member attaching / detaching rod 21 whose upper end is supported by the movable flange 14 has separated from the position where it is engaged with the pin insertion hole 29c of the attaching / detaching lever (locked member) 29. Can be moved to and from positions.

When the sample holding member attaching / detaching rod 21 is rotated by the rotating handle 22 (see FIGS. 1 and 2) in a state where the horizontal pin 21a is engaged with the pin insertion hole 29c (see FIGS. 2B and 4B). The horizontal pin 21a and the attachment / detachment lever 29 rotate from the state of FIG. 4B to the state of FIG. 4C. At this time, the inclined surfaces 29d and 29d of the attachment / detachment lever (locked member) 29 of the sample holding member SH are connected to the sample holding member locking portion of the sample holding member support device 4 (the oblong hole 9a of the upper end plate 9). It moves to the locking position where it is pressed (locked) by the short-side direction lower surfaces 9b). In this state, the sample holding member SH is fixed to the sample holding member support device 4. In this state, the lifting handle 16 (FIG. 1,
By rotating the sample holding member attaching / detaching rod 21 as shown in FIG. 4D, the horizontal pin 21a is disengaged from the pin insertion hole 29c, and can be moved to the position shown in FIG. 2A. Therefore, in the present invention, the movement of the sample holding member SH is performed by the wire W, and the attachment and detachment of the sample holding member SH with respect to the sample holding member support device 4 is performed by the sample holding member attaching / detaching rod 21.

For this reason, the sample holding member attaching / detaching rod 21
Is a sample holding member SH for the sample holding member support device 4.
What is necessary is just to move by the moving distance required for attaching and detaching. Sample holding member attaching / detaching rod 2 in the vacuum chamber 3
Since the moving distance of the sample holding member 1 is small, it is not necessary to form the accommodating portion of the sample holding member attaching / detaching rod 21 that moves in the vacuum chamber 3 high. Therefore, it is not necessary to raise the ceiling of the room accommodating the sample transport device.

(Embodiment 2) FIG. 5 is an overall explanatory view of a sample transfer apparatus according to a second embodiment of the present invention, and corresponds to FIG. 1 of the first embodiment. FIG. 6 is a view for explaining the operation of the entire sample transporting apparatus of the second embodiment, and corresponds to FIG. 2 of the first embodiment.
6A is a diagram showing a state in which the sample holding member is being transported from the sample exchange position to the sample holding member support device at the sample observation position below, and FIG. 6B is a diagram showing the state in which the sample holding member is transported to the sample holding member support device and the sample is held. FIG. 6C is a view showing a state in which a sample holding member attaching / detaching rod for attaching / detaching a member to / from the sample holding member supporting device is being moved above the attaching / detaching position, and FIG. It is a figure showing the state where it was moved below. FIG. 7 is a view as seen from the arrow VII in FIG. FIG. 8 is an explanatory diagram of a moving mechanism of the sample holder holding member attaching / detaching rod. Note that the second embodiment
In the description, the same reference numerals are given to the components corresponding to the components of the first embodiment, and the detailed description thereof will be omitted. The second embodiment differs from the first embodiment in the following points, but has the same configuration as the first embodiment in other points.

In FIGS. 5 to 8, a flange guide 15 for guiding the movable flange 14 in the horizontal direction is supported by one screw shaft 16a and three rod-shaped guides 17 'so as to be able to move up and down. Handle 1
By rotating 6, the vertical position can be adjusted.
The movable flange 1 to which the upper end of the bellows 19 is connected.
4 is supported by a flange guide 15 so as to be movable in the horizontal direction. A rotating handle 22 is supported on the upper surface of the movable flange 14. The upper end of the sample holding member attaching / detaching rod 21 arranged inside the vacuum chamber 3 rotatably penetrates the movable flange 14, and the upper end thereof is attached to the rotating handle 22 so as to rotate integrally with the rotating handle 22. Are linked. In FIG. 8, a plurality of link connecting members 31 are rotatably mounted on the sample holding member attaching / detaching rod 21 at predetermined intervals in the longitudinal direction. Also,
Inside the vacuum chamber 3, the sample holding member attaching / detaching rod 2 is provided.
A fixed rod 32 is arranged in parallel with 1, and one end of a plurality of parallel levers 33 is connected to the fixed rod 32 so as to be rotatable in the vertical direction. The other end of the lever 33 is rotatably connected to the link connecting member 31.

(Operation of the Second Embodiment) In the second embodiment having the above-described structure, when the raising / lowering handle 16 is rotated to move the flange guide 15 up and down, the rotating handle 22 and the sample holder connected thereto are held. The member attaching / detaching rod 21 moves up and down. As the sample holding member attaching / detaching rod 21 is moved up and down, the lever 33 rotates in the up and down direction with the connecting portion with the fixed rod 32 as a fulcrum. Therefore, the sample holding member attaching / detaching rod 21 moves in the horizontal direction at the same time as the vertical movement. Then, as the sample holding member attaching / detaching rod 21 moves in the horizontal direction, the movable flange 14 and the rotating handle 22 are moved.
Also move horizontally. Therefore, when the flange guide 15 is lowered by the lifting handle 16 from the state of FIG. 6A, the flange guide 15 and the sample holding member attaching / detaching rod 21 change to the state of FIG. 6C via the state of FIG. 6B. At this time, the horizontal pin 21a at the lower end of the sample holding member attaching / detaching rod 21 automatically engages with the pin insertion hole 29c. The state is the same as the state of FIG. 4B of the first embodiment.

When the rotary handle 22 is rotated in this state, as in the case described with reference to FIG.
9 rotates and is pressed by the sample holding member locking portion (the lower surface on both sides in the short diameter direction of the oblong hole 9a of the upper end plate 9) 9b,
Locked. In this state, the sample holding member SH is fixed to the sample holding member support device 4. When the flange guide 15 is raised by the lifting handle 16 in this state, the sample holding member attaching / detaching rod 21 is raised, and the horizontal pin 21a is separated from the pin insertion hole 29c. Therefore, in the second embodiment, the horizontal movement and the vertical movement of the sample holding member attaching / detaching rod 21 can be performed only by rotating the lifting handle 16. For this reason, FIG.
The left-right movement handle 18 shown in FIG. 2 can be omitted.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. (H01) As means for moving the sample holding member SH between the sample observation position P1 and the sample exchange position P2, a wire W
Instead of using a belt, a belt can be used.

[0029]

The sample transport apparatus of the present invention has the following advantages. (E01) The sample holding member is transported between the sample holding member support device provided at the sample observation position and the sample exchange position set above the sample holding member support device, and the sample holding member is detachably attached to the sample holding member support device. In the sample transport apparatus, the height of a member disposed above the sample exchange position can be reduced. (E02) In an apparatus such as an STM which requires resolution at the atomic or molecular level, as the height of the apparatus increases from the vibration isolation table, vibrations and the like are easily amplified and the resolution is reduced. Since the height of the apparatus can be reduced, it is possible to provide a high-resolution scanning probe microscope apparatus which is hardly affected by vibration and has high resolution.

[Brief description of the drawings]

FIG. 1 is an overall explanatory diagram of a sample transport device according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating the operation of the entire sample transfer apparatus according to the first embodiment. FIG. 2A is a state in which a sample holding member is being transferred from a sample exchange position to a sample holding member support device at a sample observation position below the sample exchange position. FIG. 2B shows a state in which the sample holding member is transported to the sample holding member support device, and the sample holding member attaching / detaching rod for attaching and detaching the sample holding member to / from the sample holding member support device is moved above the attaching / detaching position. FIG. 2C is a view showing a state in which the sample holding member attaching / detaching rod is moved downward from the position shown in FIG. 2B.

3 is an explanatory view of a sample holding member, FIG. 3A is a front view, FIG. 3B is a view from the arrow IIIB in FIG. 3A, and FIG. 3C is a view from the line IIIC-IIIC in FIG. 3A. , FIG. 3D
3D is a sectional view taken along the line IIID-IIID of FIG. 3A, FIG. 3E is a perspective view of the attaching / detaching lever shown in FIG. 3D, and FIG.
It is a perspective view of the lever support member shown in FIG.

FIG. 4 is an explanatory view of a method of mounting the sample holding member on the sample holding member support device. FIG. 4A is a diagram showing a state where the sample holding member is transported to the sample holding member support device, and FIG. FIG. 4C is a diagram illustrating a state in which the member is pressed against the sample holding member supporting device with the sample holding member mounting / dismounting rod, and FIG. 4C illustrates a state where the sample holding member mounting / dismounting rod is rotated to mount the sample holding member on the sample holding member supporting device. FIG. 4D is a view showing a state in which the sample holding member attaching / detaching rod is detached upward, FIG. 4E is a view from the line IVE-IVE of FIG. 4A, and FIG.
4G is a sectional view taken along the line IVF-IVF in FIG. 4A, FIG. 4G is a view as seen from the line IVG-IVG in FIG. 4C, and FIG.
FIG. 4 is a cross-sectional view taken along line IVH-IVH of FIG.

FIG. 5 is an overall explanatory view of a sample transporting apparatus according to a second embodiment of the present invention, and corresponds to FIG. 1 of the first embodiment.

FIG. 6 is an explanatory view of the operation of the entire sample transporting apparatus of the second embodiment, corresponding to FIG. 2 of the first embodiment;
FIG. 6A is a diagram showing a state in which the sample holding member is being transported from the sample exchange position to the sample holding member support device at the sample observation position below, and FIG. 6B is a diagram showing the state in which the sample holding member is transported to the sample holding member support device; FIG. 6C is a view showing a state in which the sample holding member attaching / detaching rod for moving the sample holding member attaching / detaching member to / from the sample holding member supporting device is being moved above the attaching / detaching position, and FIG. It is a figure showing the state where it was moved to.

FIG. 7 is a view as seen from the arrow VII in FIG. 5;

FIG. 8 is an explanatory view of a moving mechanism of a sample holder holding member attaching / detaching rod.

FIG. 9 is an explanatory view of a conventional example of a sample transporting apparatus. FIG. 9A shows a state in which a sample holding member is at a sample exchange position, and FIG. 9B shows a state in which the sample holding member is at a sample observation position. There is a figure.

FIG. 10 is an explanatory view of another conventional example of the sample transport device. FIG. 10A is a view showing a state where the sample holding member is at a sample exchange position, and FIG. 10B is a state where the sample holding member is at a sample observation position. FIG.

[Explanation of symbols]

P1: sample observation position, P2: sample exchange position, SH: sample holding member (STM cell), W: wire, 4: sample holding member support device (STM cell support device), 9b: sample holding member engaging portion, 11 ... wire hoisting machine, 14 ... rod supporting member (movable flange) for attaching / detaching sample holding member, 21 ... rod attaching / detaching rod for sample holding member, 29 ... member to be locked (lever for attaching / detaching),

Claims (1)

[Claims] 1. A sample transport device comprising the following constitutional requirements (A01) to (A05): (A01) a sample holding member having a sample holding member engaging portion and arranged at a sample observation position. Member support device, (A02) moving between a locking position locked by the sample holding member locking portion and a detached position separated from the sample holding member locking portion while being transported to the sample observation position. Sample holding member having a possible locked member, (A03)
(A04) a sample holding member attaching / detaching rod support member that is movably supported and disposed above the sample exchanging position above the sample observation position, and (A04) an upper end is supported by the sample holding member attaching / detaching rod supporting member. A sample holding member attaching / detaching rod for moving the locked member between the locked position and the detached position when the sample holding member attaching / detaching rod supporting member moves, (A05) the sample holding member attaching / detaching rod supporting member. A sample holding member transfer device that is arranged below the sample holding member and transfers the sample holding member between the sample observation position and a sample replacement position above the sample observation position.