JP2001188017A5 - - Google Patents

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Publication number
JP2001188017A5
JP2001188017A5 JP1999375212A JP37521299A JP2001188017A5 JP 2001188017 A5 JP2001188017 A5 JP 2001188017A5 JP 1999375212 A JP1999375212 A JP 1999375212A JP 37521299 A JP37521299 A JP 37521299A JP 2001188017 A5 JP2001188017 A5 JP 2001188017A5
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JP
Japan
Prior art keywords
scale
light
light receiving
receiving portion
light emitting
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Application number
JP1999375212A
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English (en)
Japanese (ja)
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JP2001188017A (ja
JP4428781B2 (ja
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Priority to JP37521299A priority Critical patent/JP4428781B2/ja
Priority claimed from JP37521299A external-priority patent/JP4428781B2/ja
Priority to US09/749,817 priority patent/US6639207B2/en
Publication of JP2001188017A publication Critical patent/JP2001188017A/ja
Publication of JP2001188017A5 publication Critical patent/JP2001188017A5/ja
Application granted granted Critical
Publication of JP4428781B2 publication Critical patent/JP4428781B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP37521299A 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置 Expired - Fee Related JP4428781B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP37521299A JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置
US09/749,817 US6639207B2 (en) 1999-12-28 2000-12-28 Optical rotary encoder and motor control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37521299A JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置

Publications (3)

Publication Number Publication Date
JP2001188017A JP2001188017A (ja) 2001-07-10
JP2001188017A5 true JP2001188017A5 (https=) 2007-02-15
JP4428781B2 JP4428781B2 (ja) 2010-03-10

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ID=18505160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37521299A Expired - Fee Related JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置

Country Status (2)

Country Link
US (1) US6639207B2 (https=)
JP (1) JP4428781B2 (https=)

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US7456386B2 (en) * 2005-10-03 2008-11-25 Hewlett-Packard Development Company, L.P. Averaging signals
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EP3291010A1 (en) 2006-08-31 2018-03-07 Nikon Corporation Exposure apparatus and method, and device manufacturing method
TWI622084B (zh) 2006-09-01 2018-04-21 尼康股份有限公司 Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
KR101452524B1 (ko) 2006-09-01 2014-10-21 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법
JP4928206B2 (ja) * 2006-09-22 2012-05-09 キヤノン株式会社 エンコーダ
US7732756B2 (en) * 2006-11-01 2010-06-08 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. User navigation device with a code wheel and an encoder
US7507950B2 (en) * 2006-11-09 2009-03-24 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Encoder with a combined position and index track
ATE461426T1 (de) * 2006-11-17 2010-04-15 Amo Automatisierung Messtechni Positionsmesseinrichtung
US20080156973A1 (en) * 2006-12-29 2008-07-03 Weng Fei Wong Photosensor array for optical encoder
EP1944582A1 (de) * 2007-01-09 2008-07-16 Leica Geosystems AG Verfahren zur bestimmuing einer einflussgrosse auf die exzentrizitat in einem wineklmesser
US20080189072A1 (en) * 2007-02-01 2008-08-07 Nescom Inc. High resolution encoder within a swivel
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JP2009042191A (ja) * 2007-08-10 2009-02-26 Toyohashi Univ Of Technology 回転振れ測定装置およびスケール部
WO2009087476A2 (en) * 2007-12-24 2009-07-16 Steorn Limited Torque measurement system
JP2010256081A (ja) * 2009-04-22 2010-11-11 Fujifilm Corp 光学式位置検出器及び光学装置
JP5263033B2 (ja) * 2009-06-26 2013-08-14 富士ゼロックス株式会社 速度検出装置、画像記録装置及び速度検出プログラム
KR20110093499A (ko) * 2010-02-12 2011-08-18 삼성전자주식회사 회전식 인코더 및 그 제어 방법
US9217731B2 (en) 2010-05-21 2015-12-22 Kabushiki Kaisha Toshiba Welding inspection method and apparatus thereof
US20110284508A1 (en) * 2010-05-21 2011-11-24 Kabushiki Kaisha Toshiba Welding system and welding method
JP5393598B2 (ja) * 2010-06-03 2014-01-22 キヤノン株式会社 ガルバノ装置及びレーザ加工装置
US8712013B2 (en) 2010-08-30 2014-04-29 Rigaku Corporation Motion control system and X-ray measurement apparatus
JP4945674B2 (ja) * 2010-11-08 2012-06-06 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
US8525102B2 (en) 2011-02-15 2013-09-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoding system and optical encoder having an array of incremental photodiodes and an index photodiode for use in an optical encoding system
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JP6003372B2 (ja) * 2012-08-07 2016-10-05 富士通株式会社 光学式ロータリーエンコーダ及びその補正方法
JP5954372B2 (ja) * 2014-08-06 2016-07-20 日本精工株式会社 光学式センサ
JP6724884B2 (ja) 2017-11-27 2020-07-15 Tdk株式会社 演算処理装置、角度センサ及びステアリング装置
CN109506629B (zh) * 2018-10-24 2021-07-09 东华大学 一种水下核燃料组件检测装置旋转中心标定的方法
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