JP2001174234A - Image-measuring apparatus - Google Patents

Image-measuring apparatus

Info

Publication number
JP2001174234A
JP2001174234A JP36264099A JP36264099A JP2001174234A JP 2001174234 A JP2001174234 A JP 2001174234A JP 36264099 A JP36264099 A JP 36264099A JP 36264099 A JP36264099 A JP 36264099A JP 2001174234 A JP2001174234 A JP 2001174234A
Authority
JP
Japan
Prior art keywords
image
measurement
light
object
table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP36264099A
Other languages
Japanese (ja)
Inventor
Soichi Kadowaki
Sadayuki Matsumiya
Taizo Nakamura
Kenji Okabe
泰三 中村
憲嗣 岡部
貞行 松宮
聰一 門脇
Original Assignee
Mitsutoyo Corp
株式会社ミツトヨ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Corp, 株式会社ミツトヨ filed Critical Mitsutoyo Corp
Priority to JP36264099A priority Critical patent/JP2001174234A/en
Publication of JP2001174234A publication Critical patent/JP2001174234A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an image-measuring apparatus, capable of measuring the image with high accuracy. SOLUTION: An image-measuring head is provided for taking in the image of an object W to be measured mounted on a table and the image-measuring head has a laser light source 21, CCD camera 27, collimator lens 24 for collimating light from the light source into a parallel light to irradiate the object, a reference mirror 26 disposed parallel to the optical axis of the collimator lens between this lens and the object, and beam splitter 25 disposed between the collimator lens and the object for splitting the parallel light into a measuring light for a measuring plane of the object and a reference light for the reference mirror, and for guiding reflected lights from these to the CCD camera 27 through the collimator lens.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape of a measurement object based on image information and a relative movement amount taken from the image measurement head while relatively moving a table on which the measurement object is placed and an image measurement head. And an image measuring device for measuring coordinates. More specifically, the present invention relates to an image measurement device in which an image measurement head is configured by an interferometer.

[0002]

2. Description of the Related Art As a conventional image measuring device, a table on which a measuring object is mounted, an image measuring head for capturing an image of the measuring object mounted on the table, and the table and the image measuring head are relatively moved. 2. Description of the Related Art There is known an image measurement device including a relative movement unit and a displacement detection unit that detects a relative movement amount of the table and the image measurement head. In this image measuring device, while the table and the image measuring head are relatively moved by the relative moving means,
An image of the object to be measured is captured from the image measurement head, an edge image of the object to be measured is detected from the captured image information, and the shape and coordinates of the object to be measured are determined based on the edge image and the relative movement detected by the displacement detecting means. Ask for.

[0003]

In a conventional image measuring apparatus, a low magnification image measuring head is used to measure a large range of an object to be measured. However, in a low-magnification image measurement head, the focus detection accuracy of an image used for measurement in the height direction (Z-axis direction) is in the plane direction (X
Since the detection accuracy is lower than the detection accuracy in the (Y-axis direction), there is a problem that highly accurate measurement cannot be performed.

An object of the present invention is to solve such a conventional problem and to provide an image measuring apparatus capable of measuring an image with high accuracy.

[0005]

The image measuring apparatus of the present invention employs the following configuration to achieve the above object. The image measuring device according to claim 1, wherein a table on which the measurement target is placed, an image measurement head that captures an image of the measurement target placed on the table, and the table and the image measurement head are relatively moved. Relative movement means, the relative movement means moving the table and the image measurement head relative to each other, the shape of the measurement object based on the image information taken from the image measurement head and the relative movement amount by the relative movement means And an image measuring device for measuring coordinates, wherein the image measuring head is a light source, an observation optical system, and guides light from the light source to a measurement surface and a reference surface of the measurement object, and reflects light from these components. It is characterized by comprising an interferometer having a beam splitter for guiding light to the observation optical system. According to this configuration, the image measurement head is configured by a Twyman-Green or Fizeau interferometer,
Since the detection accuracy in the height direction (Z-axis direction) is high, the minute shape measurement can be performed with high accuracy simultaneously with the dimensional measurement.

According to a second aspect of the present invention, there is provided an image measuring apparatus comprising: a table on which an object to be measured is mounted; an image measuring head for capturing an image of the object to be measured mounted on the table; A relative movement means for performing relative movement, wherein the relative movement means relatively moves the table and the image measurement head, and the measurement object is based on image information taken from the image measurement head and a relative movement amount by the relative movement means. An image measurement device that measures the shape and coordinates of an object, wherein the image measurement head includes a light source, an observation optical system, and a collimator lens that irradiates light from the light source as parallel light to a measurement surface of a measurement target. A reference mirror disposed orthogonally to the optical axis of the collimator lens between the collimator lens and the measurement object; Along with dividing the parallel light disposed between the lens and the measurement target into measurement light on the measurement surface of the measurement target and reference light to the reference mirror, reflected light from these is reflected through the collimator lens. It is characterized by comprising an interferometer having a beam splitter for guiding to the observation optical system. According to this configuration, since the collimator lens also functions as the imaging lens, the number of parts can be reduced and the size can be reduced. In particular,
Since the interferometer is of the Twyman Green type, it is easy to use regardless of the type of light. By the way, in the case of white light, since the optical path of the reference light and the optical path of the measurement light need to be equidistant,
It is difficult to use with Fizeau type.

According to a third aspect of the present invention, in the image measuring apparatus of the second aspect, a shutter is provided on an optical path side of the reference light split by the beam splitter. I do. According to this configuration,
If the optical path side of the reference light is blocked by the shutter, interference fringes do not occur when observing the measurement object, so that it is easy to observe.

According to a fourth aspect of the present invention, in the image measuring apparatus of the second or third aspect, a light amount attenuation filter is replaceable on an optical path side of the reference light split by the beam splitter. It is characterized by being provided in. According to this configuration, by replacing the light amount attenuation filter, the light amount can be made substantially constant in accordance with the measurement object. In other words, if the amount of the measurement light and the reference light is the same, the contrast of the interference fringes will be high, but if the reflectance of the reference mirror is determined according to the measurement object with high reflectance, the measurement object with low reflectance will Then the contrast drops. Therefore, by replacing the light amount attenuating filter, the light amount can be made substantially constant even when the object to be measured changes, so that the contrast of the interference fringes can be prevented from lowering.

According to a fifth aspect of the present invention, in the image measuring apparatus according to any one of the first to fourth aspects, the image measuring head is provided with the image measuring head with respect to a measurement surface of the measurement object. It is characterized in that a focus detecting means for adjusting the focus of the interferometer is provided. According to this configuration, the focus detection unit can focus the interferometer on the measurement target,
Focusing can be performed easily and accurately.

According to a sixth aspect of the present invention, in the image measuring apparatus according to the fifth aspect, the focus detecting means projects the pattern image onto the object to be measured through a part of optical elements of the interferometer. It is characterized by being constituted by a pattern projecting means. According to this configuration, since the pattern image is projected on the measurement surface of the measurement target, the pattern image is captured by the observation optical system, and the table and the image measurement head are relatively moved (approaching or approaching) so that the contrast is maximized. (In the direction of separation), focusing can be easily performed.

According to a seventh aspect of the present invention, in the image measuring apparatus according to the fifth aspect, the focus detecting means is arranged obliquely at the center of the measuring object corresponding to a position conjugate with the interference fringe observation position. It is characterized by comprising a light beam irradiation means for irradiating a light beam. According to this configuration, since the light beam is applied obliquely to the center of the measurement target, if the measurement target is out of focus from the measurement surface,
Since the light beam also deviates from the screen, if the table and the image measurement head are relatively moved (moved in the direction of approaching or moving away) so that the position of this light beam is at the center of the screen, focusing can be easily performed. it can.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a perspective view showing an image measuring apparatus according to a first embodiment. As shown in the figure, the image measuring apparatus according to the first embodiment includes a table 1 on which a measurement target W is placed.
An image measuring head 2 for capturing an image of the measurement object W placed on the table 1, a relative moving unit 10 for relatively moving the table 1 and the image measuring head 2 in a three-dimensional direction, and the relative moving unit And a displacement detecting means (not shown) for detecting a relative movement amount of the table 1 and the image measuring head 2 by the image measuring head 10.
The shape and coordinates of the object to be measured are measured based on the image information fetched from the device and the relative movement amount W detected by the displacement detecting means.

[0013] The relative moving means 10 is provided with the table 1
1 that supports so that it can move in the front-rear direction (Y-axis direction)
1, a portal frame 12 erected on both sides of the base 11, an X slider 13 supported by a horizontal beam 12A of the portal frame 12 so as to be movable in the left-right direction (X-axis direction), A Y slider 14 is supported by the slider 13 so as to be able to move up and down in the vertical direction (Z-axis direction) and has the image measuring head 2 at the lower end. That is,
The relative moving means 10 supports the table 1 and the image measuring head 2 so as to be relatively movable in three-dimensional directions (X, Y, Z axis directions).

The image measuring head 2 comprises a Twyman-Green interferometer 20. Interferometer 2
Reference numeral 0 denotes a laser light source 21, a beam splitter 23 disposed at a position where light is irradiated from the laser light source 21 via an optical fiber 22, and a light reflected by the beam splitter 23, as shown in FIG. A collimator lens 24 that irradiates the measurement surface of the measurement object W as parallel light, and a collimator lens 24 that is coaxial with the collimator lens 24.
And a CCD camera 27 as an observation optical system disposed on the opposite side of the measurement object W with the measurement object W interposed between the collimator lens 24 and the measurement object W at right angles to the optical axis of the collimator lens 24. The reference mirror 26 that is disposed, and the parallel light that is disposed between the collimator lens 24 and the measurement target W is divided into measurement light on the measurement surface of the measurement target W and reference light to the reference mirror 26. At the same time, the reflected light from the
And a beam splitter 25 for guiding to the CD camera 27.

On the optical path side of the reference light split by the beam splitter 25, a shutter 31, a light amount attenuation filter 32, and a phase variable wedge glass 33 are sequentially arranged from the beam splitter 25 side. Shutter 3
Reference numeral 1 is arranged so as not to generate interference fringes when observing the measurement object W. The light amount attenuation filter 32 is
In order to make the light amount substantially constant, it is exchangeably inserted in accordance with the measurement object W. In other words, if the measurement light and the reference light have the same light amount, the contrast of the interference fringes increases, but the reference mirror 2 is adjusted in accordance with the measurement target W having a high reflectance.
When the reflectance of No. 6 is determined, the contrast is reduced in the measurement object W having a low reflectance. Therefore, the measurement object W having a low reflectance
In consideration of the above, the light quantity attenuation filter 32 is replaceably inserted so that the light quantity (the quantity of the reflected light of the measurement light and the quantity of the reflected light of the reference light) becomes substantially constant. Phase variable wedge glass 33
Is used as means for changing the optical path of the reference light when the phase shift method is used in the analysis of interference fringes. The interference fringe analysis is not limited to the phase shift method, but may be a Fourier transform method.

In such a configuration, in order to obtain the shape and coordinates of the object W to be measured, the relative movement means 10 and the table 1 use the relative moving means 10 while the shutter 31 is closed and the image taken by the CCD camera 27 is viewed. The image measurement head 2 is relatively moved in the three-dimensional direction, and the measurement surface of the measurement target W is moved to the shooting position of the CCD camera 27.
That is, the table 1 and the image measurement head 2 are moved in the X and Y directions until the image of the measurement surface of the measurement object W is captured.
The table 1 and the image measuring head 2 are relatively moved in the Z-axis direction so that the image is in focus while being relatively moved in the axial direction.

Here, the shutter 31 is opened to perform observation using interference fringes. Then, the laser light emitted from the laser light source 21 via the optical fiber 22 is reflected by the beam splitter 23, is subsequently converted into parallel light by the collimator lens 24, and is then converted by the beam splitter 25 into measurement light and reference light. Divided into The measurement light is irradiated on the measurement target W as it is, and then reflected by the measurement target W. On the other hand, the reference light passes through the light quantity attenuation filter 32 and the phase variable wedge glass 33, is reflected by the reference mirror 26, again passes through the phase variable wedge glass 33 and the light quantity attenuation filter 32, and interferes with the measurement light. .

As a result, interference fringes generated by interference between the measurement light and the reference light are captured by the CCD camera 27 via the collimator lens 24 and the beam splitter 23. Therefore, if the interference fringes captured by the CCD camera 27 are analyzed, the unevenness of the measurement object W can be measured with high accuracy.

According to the first embodiment, the image measuring head 2
However, a laser light source 21, a CCD camera 27, and a beam splitter 25 that guides light from the laser light source 21 to the measurement surface of the measurement target W and the reference mirror 26 and guides reflected light from these to the CCD camera 27 Since it is configured with the interferometer 20 having the above configuration, that is, it is configured using the interferometer 20 having high detection accuracy in the height direction (Z-axis direction), the minute shape measurement can be performed with high accuracy at the same time as the dimensional measurement.

Moreover, the interferometer 20 has a structure in which the collimator lens 24 also functions as an imaging lens, so that the number of parts can be reduced and the size can be reduced. In particular,
Since the interferometer is of the Twyman Green type, it is easy to use regardless of the type of light. By the way, in the case of white light, since the optical path of the reference light and the optical path of the measurement light need to be equidistant,
It is difficult to use with Fizeau type.

Further, since the shutter 31 is arranged on the optical path side of the reference light split by the beam splitter 25,
If the optical path side of the reference light is blocked by the shutter 31, interference fringes will not occur when observing the measurement object W, so that it is easy to observe.

Further, a light amount attenuating filter 3 is further provided on the optical path side of the reference light split by the beam splitter 25.
Since the light quantity attenuating filter 32 is provided, the light quantity can be made substantially constant in accordance with the measurement object W by replacing the light quantity attenuation filter 32. In other words, the contrast of the interference fringes increases when the amounts of the measurement light and the reference light are the same. However, when the reflectance of the reference mirror 26 is determined according to the measurement object W having a high reflectance, the measurement of the low reflectance is performed. In the object W, the contrast is reduced. Therefore, by replacing the light amount attenuation filter 32, the light amount can be made substantially constant in accordance with the measurement object W, so that the contrast of the interference fringes can be prevented from lowering.

Further, since the phase variable wedge glass 33 is provided on the reference light path side, the phase can be easily adjusted by sliding the phase variable wedge glass 33, especially in the case of white light. In addition, since the interference fringe analysis is performed using the phase variable wedge glass 33, the influence of the reference mirror 26 falling down can be reduced as compared with, for example, moving the reference mirror 26.

(Second Embodiment) FIG. 3 is a view showing an image measuring head according to a second embodiment. In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted or simplified. In the second embodiment, focus detection means 40 for focusing the interferometer 20 on the measurement surface of the measurement object W is added to the image measurement head 2 of the first embodiment.

The focus detecting means 40 is constituted by a pattern projecting means 50 for projecting a pattern image on the measurement surface of the measuring object W through the beam splitters 23 and 25 and the collimator lens 24. Specifically, a beam splitter 51 disposed between the beam splitter 23 and the CCD camera 27 and a laser light source 5
2, an optical fiber 53 for guiding the laser light from the laser light source 52, a lens 54 for condensing the light from the optical fiber 53, this lens 54 and the beam splitter 5
1 and a pattern projecting means 50 having a pattern 55 disposed between the two.

According to the second embodiment, in addition to the effects described in the first embodiment, the interferometer 20
Can be adjusted easily and accurately. In particular, since the image of the pattern 55 is projected onto the measurement object W through the collimator lens 24, the pattern image is
The table 1 and the image measuring head 2 may be relatively moved (moved in a direction of approaching or separating) so that the image is captured by the camera 27 and the contrast is maximized. Therefore, focusing can be easily performed.

The focus detecting means 40 includes:
The configuration is not limited to the configuration of the pattern projection unit 50 described in the second embodiment, and another configuration may be used. For example, as shown in FIG. 4, the focus detection unit 40 may be configured by a light beam irradiation unit 60 that irradiates a light beam obliquely to the center of the measurement target W corresponding to a position conjugate to the interference fringe observation position. Good. Specifically, a beam splitter 61 disposed between the beam splitter 23 and the CCD camera 27,
A laser light source 62 and a lens 63 for condensing light from the laser light source 62 and making the light incident on the beam splitter 61
And light beam irradiation means 60 having the following.

According to this configuration, since the light beam is applied obliquely to the center of the measuring object W, if the measuring surface of the measuring object W is out of focus, the light beam also shifts from the screen. If the table 1 and the image measuring head 2 are relatively moved (moved in a direction of approaching or moving away from each other) so that the position of is located at the center of the screen, focusing can be easily performed.

In each of the above embodiments, the relative movement means 10 for relatively moving the table 1 and the image measuring head 2 is constituted by the base 11, the portal frame 12, the X slider 13, and the Y slider 14. However, it is not limited to this. For example, XY movable in X and Y axis directions
A table capable of moving up and down in the X-axis direction may be arranged on the table, and the table 1 may be arranged on the table so that the table 1 can be moved in the three-dimensional direction. Alternatively, the table 1 may be fixed and the image measuring head 2 may be configured to be movable in a three-dimensional direction. At this time, these relative movements may be performed automatically or manually.

The relative displacement detecting means for detecting the relative movement amount between the table 1 and the image measuring head 2 includes a photoelectric displacement detecting means, a capacitance displacement detecting means,
Any method such as a magnetic displacement detecting means may be used. In the above embodiment, the Twyman-Green interferometer 20 is used, but a Fizeau-type interferometer may be used.

[0031]

According to the image measuring device of the present invention, since the image measuring head is constituted by the interferometer, high-precision image measurement is possible, and the minute shape measurement can be performed simultaneously with the dimension measurement with high accuracy. .

[Brief description of the drawings]

FIG. 1 is an overall perspective view showing a first embodiment of the present invention.

FIG. 2 is a diagram showing an image measuring head used in the embodiment.

FIG. 3 is a diagram illustrating an image measuring head used in a second embodiment of the present invention.

FIG. 4 is a diagram showing an image measuring head using different focus detecting means in the second embodiment.

[Explanation of symbols]

 Reference Signs List 1 Table 2 Image measuring head 10 Relative moving means 20 Interferometer 21 Laser light source 24 Collimator lens 25 Beam splitter 26 Reference mirror 27 CCD camera (observation optical system) 31 Shutter 32 Light amount attenuation filter 33 Phase variable wedge glass 40 Focus detecting means 50 Pattern Projection means 60 Light beam irradiation means

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Sadayuki Matsumiya 1-20-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Prefecture Mitutoyo Corporation (72) Inventor Souichi Kadowaki 1-20-, Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa 1 F-term in the System Technology Institute, Inc. (Reference) 2F064 AA09 BB07 CC04 EE02 EE05 FF01 FF05 GG00 GG02 GG12 GG22 GG41 GG59 GG65 HH03 HH08 JJ00 JJ01 JJ15 KK01 2F065 AA09 BB13 DD03 DD03 DD03 LL24 LL30 LL46 MM03 MM24 PP12 QQ00 QQ16 QQ28

Claims (7)

[Claims]
1. A table on which an object to be measured is mounted, an image measuring head for capturing an image of the object mounted on the table, and a relative moving means for relatively moving the table and the image measuring head. An image for measuring the shape and coordinates of the object to be measured based on the image information taken from the image measurement head and the relative movement amount by the relative movement means while relatively moving the table and the image measurement head by the relative movement means; A measurement device, wherein the image measurement head is a light source, an observation optical system, and guides light from the light source to a measurement surface and a reference surface of the measurement object, and reflects reflected light from the observation optical system. An image measurement device, comprising: an interferometer having a beam splitter that guides light to a light source.
A table on which the object to be measured is placed; an image measuring head for capturing an image of the object to be placed on the table; and a relative moving means for relatively moving the table and the image measuring head. An image for measuring the shape and coordinates of the object to be measured based on the image information taken from the image measurement head and the relative movement amount by the relative movement means while relatively moving the table and the image measurement head by the relative movement means; A measurement device, wherein the image measurement head is a light source, an observation optical system, a collimator lens that irradiates light from the light source as parallel light to a measurement surface of the measurement target, and the collimator lens and the measurement target. A reference mirror disposed orthogonally to the optical axis of the collimator lens between the collimator lens and the object to be measured. A beam splitter that divides the parallel light into measurement light on the measurement surface of the measurement object and reference light on the reference mirror, and guides reflected light from these to the observation optical system via the collimator lens. An image measurement device comprising an interferometer having the same.
3. The image measurement device according to claim 2, wherein a shutter is provided on an optical path side of the reference light split by the beam splitter.
4. The image measurement device according to claim 2, wherein a light amount attenuation filter is replaceably provided on an optical path side of the reference light split by the beam splitter. Image measurement device.
5. The image measurement device according to claim 1, wherein the image measurement head has a focus for focusing the interferometer on a measurement surface of the measurement object. An image measurement device comprising a detection unit.
6. The image measurement apparatus according to claim 5, wherein the focus detection unit is configured by a pattern projection unit that projects a pattern image onto a measurement surface of the measurement object through some optical elements of an interferometer. An image measurement device, characterized in that:
7. The image measurement apparatus according to claim 5, wherein the focus detection unit irradiates a light beam obliquely to a center of the measurement target corresponding to a position conjugate with the interference fringe observation position. An image measuring device characterized by comprising:
JP36264099A 1999-12-21 1999-12-21 Image-measuring apparatus Pending JP2001174234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36264099A JP2001174234A (en) 1999-12-21 1999-12-21 Image-measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36264099A JP2001174234A (en) 1999-12-21 1999-12-21 Image-measuring apparatus

Publications (1)

Publication Number Publication Date
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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003035508A (en) * 2001-07-24 2003-02-07 Mitsutoyo Corp Image measurement head and image measuring device
JP2007536539A (en) * 2004-05-04 2007-12-13 カール マール ホールディング ゲーエムベーハー Apparatus and method for detection based on a combination of geometric interference and imaging, especially in microsystem technology
JP2008216182A (en) * 2007-03-07 2008-09-18 Tokyo Electron Ltd Device and method for measuring temperature

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003035508A (en) * 2001-07-24 2003-02-07 Mitsutoyo Corp Image measurement head and image measuring device
JP2007536539A (en) * 2004-05-04 2007-12-13 カール マール ホールディング ゲーエムベーハー Apparatus and method for detection based on a combination of geometric interference and imaging, especially in microsystem technology
JP4644707B2 (en) * 2004-05-04 2011-03-02 カール マール ホールディング ゲーエムベーハー An apparatus for detection based on a combination of geometric interference and imaging, especially in microsystem technology
JP2008216182A (en) * 2007-03-07 2008-09-18 Tokyo Electron Ltd Device and method for measuring temperature

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