JP2001013319A - 光学フィルター及びそれを備えた照明光学系 - Google Patents
光学フィルター及びそれを備えた照明光学系Info
- Publication number
- JP2001013319A JP2001013319A JP18887699A JP18887699A JP2001013319A JP 2001013319 A JP2001013319 A JP 2001013319A JP 18887699 A JP18887699 A JP 18887699A JP 18887699 A JP18887699 A JP 18887699A JP 2001013319 A JP2001013319 A JP 2001013319A
- Authority
- JP
- Japan
- Prior art keywords
- light
- wavelength
- optical system
- lens
- transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 91
- 238000002834 transmittance Methods 0.000 claims abstract description 48
- 230000003595 spectral effect Effects 0.000 claims abstract description 27
- 238000005286 illumination Methods 0.000 claims description 50
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 abstract description 2
- 230000003252 repetitive effect Effects 0.000 abstract 2
- 230000000630 rising effect Effects 0.000 abstract 1
- 230000004075 alteration Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 12
- 229910052753 mercury Inorganic materials 0.000 description 12
- 210000001747 pupil Anatomy 0.000 description 12
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 11
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 9
- 239000010436 fluorite Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 239000000284 extract Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18887699A JP2001013319A (ja) | 1999-07-02 | 1999-07-02 | 光学フィルター及びそれを備えた照明光学系 |
| US09/557,649 US6339498B1 (en) | 1999-04-27 | 2000-04-26 | Ultraviolet microscope optical system and optical filter used in the same optical system |
| US10/024,709 US6671089B2 (en) | 1999-04-27 | 2001-12-21 | Optical filter and illumination optical system provided with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18887699A JP2001013319A (ja) | 1999-07-02 | 1999-07-02 | 光学フィルター及びそれを備えた照明光学系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001013319A true JP2001013319A (ja) | 2001-01-19 |
| JP2001013319A5 JP2001013319A5 (https=) | 2006-08-03 |
Family
ID=16231432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18887699A Pending JP2001013319A (ja) | 1999-04-27 | 1999-07-02 | 光学フィルター及びそれを備えた照明光学系 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001013319A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002086580A3 (de) * | 2001-04-23 | 2003-05-01 | Leica Microsystems | Reflexionsfiltersystem in beleuchtungseinrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06289301A (ja) * | 1993-03-31 | 1994-10-18 | Olympus Optical Co Ltd | 顕微鏡用落射照明光学系 |
| JPH08129105A (ja) * | 1994-10-31 | 1996-05-21 | Nikon Corp | 帯域フィルター |
| JPH08313812A (ja) * | 1995-05-19 | 1996-11-29 | Olympus Optical Co Ltd | 走査型レーザ顕微鏡装置 |
-
1999
- 1999-07-02 JP JP18887699A patent/JP2001013319A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06289301A (ja) * | 1993-03-31 | 1994-10-18 | Olympus Optical Co Ltd | 顕微鏡用落射照明光学系 |
| JPH08129105A (ja) * | 1994-10-31 | 1996-05-21 | Nikon Corp | 帯域フィルター |
| JPH08313812A (ja) * | 1995-05-19 | 1996-11-29 | Olympus Optical Co Ltd | 走査型レーザ顕微鏡装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002086580A3 (de) * | 2001-04-23 | 2003-05-01 | Leica Microsystems | Reflexionsfiltersystem in beleuchtungseinrichtung |
| US7268940B2 (en) | 2001-04-23 | 2007-09-11 | Vistec Semiconductor Systems Gmbh | Illuminating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060616 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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